JPH0883978A - Ceramic board brazed with external terminal and separating apparatus of jig for brazing - Google Patents

Abstract

PURPOSE: To perform a separating operation continuously by a method wherein a pin for an external terminal is brazed to a ceramic board, a pin jig for a brazing jig is then reversed, in this state the ceramic board provided with the pin is pulled out from the pin jig so as to be collected in a tray and the pin jig is reversed again so as to be collected. CONSTITUTION: A lower jig 2 for a brazing jig is separated from a positioning jig 7, the respective jigs 2, 7 are stacked and housed respectively, and a remaining pin jig 4 is transferred to a pin-jig reversion part 51. The pin jig 4 which holds a pin which has been brazed to a ceramic board is reversed in the pin-jig reversion part 51. Then, a pin-brazed defective product is collected, and the pin jig 4 is transferred to a tray feed part 60. A tary is fed to the lower part of the pin jig 4 in the tray feed part 60, the ceramic board is pulled out from the pin jig 4 in a board collection part 50 so as to be packed in the tray, and the pin jig 4 is reversed again in a pin-jig collection part 80 so as to be collected. Thereby, a separating operation can be performed continuously.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for separating a ceramic substrate on which external terminals are brazed from a brazing jig,
More specifically, when manufacturing a ceramic package for accommodating semiconductor chips such as PGA, an external terminal pin is brazed to a ceramic substrate using a brazing jig having a lower jig, a pin jig, and a positioning jig. After that, separate the lower jig, pin jig, positioning jig and ceramic substrate,
The present invention relates to a separating device for housing the ceramic substrate.

[0002]

2. Description of the Related Art In order to braze pins for external terminals to a ceramic substrate such as a PGA substrate, as shown in FIG. 5 (a), a brazing jig 1 made of carbon according to the type of the ceramic substrate is used. Then, the pin jig 4 is arranged on the lower jig 2 of the jig 1 via the pin aligning plate 3, and the pin 6 for the external terminal is inserted into the pin hole 5 of the pin jig 4. Positioning jig 7 is placed on jig 4, and pin 6 is placed inside it.
The ceramic substrate 8 to be brazed is arranged, and as shown in FIG. 6, this is placed on the boat jig 10 which is moved by the brazing line 9 and the brazing furnace 11 is passed through.

Here, when the ceramic substrate as the brazing jig 1 is a substrate with a heat sinker or a heat spreader 12, as shown in FIG. 5B, the lower jig 2 and the pin jig are used. 4 and the positioning jig 7, a jig having a positioning frame jig 13, a weight positioning jig 14, and a weight 15 is used. Moreover, as shown in FIG. In the case of a substrate with a mark, a jig having a pressing chip 17 is used. Thus, in order to braze the pins for external terminals to the ceramic substrate, the brazing jig 1 made of carbon as described above is used to position the ceramic substrate, and the pin is fixed to the ceramic substrate through the brazing furnace. The pin inserted in the pin hole of the tool is brazed.

Then, the brazing jig holding the ceramic substrate with the pins brazed through a brazing furnace is disassembled into a lower jig, a pin jig and a positioning jig, and the pins are pushed out from the pin jig. The ceramic substrates are collected, the ceramic substrates are arranged on a tray, the trays are stacked, and the disassembled brazing jigs are collected and stacked.

[0005]

And, conventionally, each of these operations is manually performed. This is for the following reason. That is, when disassembling the brazing jig, it is necessary to select a ceramic substrate that is not well brazed, that is, to check the mixture of defective products. Since it is necessary to support a large number of small-volume ceramic substrates, there are different types of brazing jigs,
Automation is difficult. It is necessary to deal with the difference in the size of the ceramic substrate mounted on the brazing jig and the size of the tray to be collected and stored. That is, as shown in FIG. 7, the brazing jig 1
The intervals of the ceramic substrates 8 placed on the tray 18 and the intervals of the ceramic substrates 8 on the tray 18 are different, or the number of the ceramic substrates 8 placed on the brazing jig 1 and the number of the ceramic substrates 8 placed on the tray 18 are different. Since the numbers are different, it is necessary to deal with them. Etc.

In view of the above points, the present inventor has studied and studied variously, and as a result, has a function of reversing the pin jig of the brazing jig and selecting a ceramic substrate having poor brazing, By including the structure, the lower jig, the pin jig, the positioning jig, and the ceramic substrate are separated, and the ceramic substrate having the external terminals that can store the ceramic substrate in the tray is brazed and the brazing jig. It is possible to obtain a separating device of the above, and when the ceramic substrate is stored in the tray, it is possible to move the tray and the pin jig relative to each other, so that various types of brazing (with different outer diameter dimensions) can be brazed. It was clarified that the finished ceramic substrate can be automatically extracted from the pin jig and packed in a tray.

The present invention has been made in response to the above-mentioned problems, and the purpose thereof is to apply a pin for external terminal to a ceramic substrate after brazing it and then to use it when brazing. Another object of the present invention is to provide a device for separating a ceramic substrate having brazed external terminals and a brazing jig, which can continuously disassemble the brazing jig and take out the ceramic substrate. Another object of the present invention is to provide a separation device that can handle a wide variety of products.

[0008]

As a means for solving the above problems, a separating device for a ceramic substrate on which external terminals are brazed and a brazing jig according to the present invention includes a lower jig and a pin jig. After the external terminal pins are brazed to the ceramic substrate by a brazing furnace using a brazing jig having a positioning jig and a brazing jig, the lower jig, the pin jig, the positioning jig and the ceramic substrate are separated. A separating device for separating the lower jig and the positioning jig of the brazing jig, and a pin jig for holding the pins brazed to the ceramic substrate. A pin jig reversal unit that reverses and selects and collects defective pins attached to the ceramic substrate, a tray supply unit that supplies a tray below the pin jig, and the ceramic substrate is extracted from the pin jig and packed in a tray. A ceramic substrate recovery unit, the pin jig recovery unit for loading reversed again to stage the pin jig that,
The ceramic substrate recovery unit includes a tray of the tray supply unit,
The tray / pin jig relative movement mechanism is provided to relatively move the pin jig to fill the ceramic substrate held by the pin jig with a tray.

[0009]

The separating device for the ceramic substrate having the external terminals brazed and the brazing jig according to the present invention first separates the lower jig and the positioning jig from the brazing jig, Each is stacked and stored, and the remaining pin jigs are transferred to the pin jig inverting section. Next, in the pin jig reversing unit, the pin jig that holds the pins brazed to the ceramic substrate is reversed to select and collect defective pins on the ceramic substrate and supply the pin jig to a tray. And the tray supply section supplies the tray below the pin jig, and the board collecting section extracts the ceramic substrate from the pin jig and packs it in the tray, and then the pin jig collecting section. Then, the pin jig is re-inverted and collected.

As described above, after the pins for external terminals are brazed to the ceramic substrate, the pin jig of the brazing jig is reversed, so that defective products of the ceramic substrate to which the pins are attached can be selected, and In the inverted state, the ceramic substrate with pins is extracted from the pin jig and collected in a tray, and the pin jig is again reversed and collected, so that the separating operation can be performed continuously.

Further, the ceramic substrate recovering unit relatively moves the tray of the tray supplying unit and the pin jig to relatively move the tray / pin jig for packing the ceramic substrate held by the pin jig into the tray. Since it has a mechanism, it is possible to cope with the difference in size between the ceramic substrate mounted on the brazing jig and the tray for collecting and storing, and there is no need for a tray corresponding to a wide variety of jigs.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 are as follows.
1 shows an embodiment of the present invention, FIG. 1 is a block diagram showing a schematic configuration, and FIG. 2 is a cross-sectional view of a pin jig reversing section, a tray supplying section, a ceramic substrate collecting section, a pin hole air blow section and a pin jig collecting section. 3, FIG. 3 is a detailed cross-sectional view of the ceramic substrate recovery section, and FIG.

The separating device for the ceramic substrate on which the external terminals are brazed and the brazing jig of this embodiment are summarized as follows.
The brazing jig take-in unit 20, the lower jig / positioning jig separating unit 30, the pin jig reversing unit 40, the ceramic substrate collecting unit 50, the tray supplying unit 60, and the air blow unit 7
0, and the pin jig recovery unit 80 is composed of seven parts.

The brazing jig taking-in section 20 takes in the brazing jig 1 from the brazing line 9 composed of a conveyor, and transfers the brazing jig 1 to the lower jig / positioning jig separating section 30. It is a part to do. Brazing jig 1
Is a lower jig 2 and a pin jig 4, as shown in FIG.
The positioning jig 7 is freely assembled, and the pin jig 4 has pin holes 5 for inserting the pins 6 for external terminals to be brazed to the ceramic substrate 8.

The lower jig / positioning jig separating section 30 disassembles and separates the positioning jig 7 and the lower jig 2 from the brazing jig 1 on the conveyor and stacks them (if necessary). ,
It is configured to be collected and stacked in a box or the like) and the remaining pin jig 4 is transferred to the pin jig reversing unit 40. The positioning jig 7 and the lower jig 2 are separated from the brazing jig 1 by disassembling and separating the positioning jig 7 in the preceding stage, collecting the positioning jig 7, and then disassembling the positioning jig 7 The lower jig 2 is disassembled and separated from the separated brazing jig 1, and collected,
Stack each. Depending on the type of the brazing jig 1, before the separation of the positioning jig 7 and the lower jig 2,
The chips and the like shown in (b) and (c) are disassembled and separated, and each is collected in a box or the like and stacked as necessary. Then, the pin jig 4 is transferred to the pin jig reversing unit 40 by the pin jig transfer device.

As shown in FIGS. 2 and 3, the pin jig reversing section 40 includes a reversing mechanism section 41 for reversing the pin jig 4 and a defective article collecting section 42 for selecting and collecting defective articles on the ceramic substrate 8. It consists of and. The reversing mechanism unit 41 includes a chuck 45 that holds the brazing jig 1 from the left and right or the front and rear directions.
And a stepping motor 46 that reverses the chuck 45, and the pin jig 4 is reversed through the stepping motor 46. A collection box 47 for collecting defective products is provided below the reversing mechanism 41.

The ceramic substrate recovery unit 50 is a portion for taking out the ceramic substrate 8 which is normally brazed, and includes a punching head 51, a servo slider 52 which moves the punching head 51 corresponding to the ceramic substrate 8 for punching, and a servo slider 52.
A holding table 53 for holding the pin jig 4 and the pin jig 4
Has a pin jig transfer device 54 for transferring.
The punching head 51 has a punching pin 55 at the tip,
The punching pin 55 is a pin having a size capable of punching out the pin 6 inserted into the pin hole of the pin jig 4. Here, the punching head 51 is configured so as to be compatible with five types of pin jigs 4. The pin jig transfer device 54 has a chuck 56 for holding the pin jig 4 at the lower end, a left and right movable arm 57 for moving the chuck 56 left and right, and an actuator 59 for operating this arm 58, and a servo. An actuator such as a cylinder has a predetermined stroke with respect to the slider 58 in the vertical direction. A tray supply unit 60 is provided below the ceramic substrate recovery unit 50, and the pin jig 4 from which the pinned ceramic substrate 8 is extracted is blown to the next stage by a pin jig transfer device 54. Transferred to part 80.

The tray supply section 60 is a section for supplying a tray 61 for accommodating the ceramic substrate 8 to be punched and taken out by the punching head 51 in the ceramic substrate recovery section 50, and is configured to be able to feed two types of trays. There is. Further, the air blow portion 70 is provided with the pin hole 5 of the pin jig 4.
Is a part for improving workability when removing clogging and reusing it, and is composed of an air suction device, which is connected to a dust collector (not shown). Also,
The pin jig recovery unit 80 is a unit that re-inverts the pin jig 4 inverted by the pin jig inversion unit 40 to restore the original state and stacks and collects the pin jig 4. The pin jig collecting unit 80, like the pin jig reversing unit 40, includes a chuck 86 that holds the pin jig 4 from the left or right or the front-rear direction and a stepping motor 87 that reverses the chuck 86.

Next, the operation of the separating device for the ceramic substrate on which the external terminals are brazed and the brazing jig of the present embodiment described above will be described. First, using the brazing jig 1 having the lower jig 2, the pin jig 4 and the positioning jig 7, the pins 6 for external terminals are brazed to the ceramic substrate 8 through the brazing furnace 11 to form the brazing jig. In the capturing unit 20,
According to the preset program, the ceramic substrate 8,
The brazing jig 1 incorporating the pins 6 is taken in from the boat jig 10 of the brazing line 9 and transferred to the brazing jig transfer conveyor 23.

Then, the brazing jig 1 transferred to the brazing jig transfer conveyor 23 is transferred to the leading end in the traveling direction thereof, and is also transferred to the lower jig / positioning jig separating section 30 to be cured. In the tool / positioning jig separating unit 30, first, the positioning jig 7 is separated, stacked and collected, and then the lower jig 2 is separated, stacked and collected. Then, the remaining pin jigs 4 are transferred to the pin jig reversing unit 40 by the pin jig transfer device. Next, in the pin jig reversing section 40, the pin jig 4 is gripped by the chuck 45, and when the pin jig 4 is reversed by the stepping motor 46 in the gripped state, the pin 6 is placed on the ceramic substrate 8. When the ceramic substrate 8 is not securely brazed, the ceramic substrate 8 falls and is collected in the collection box 47 as a defective product.

The pin jig 4 which has been inverted by the pin jig reversing unit 40 is transferred to the holding table 53 of the ceramic substrate recovery unit 50 by the pin jig transfer device 54, and the pin jig 4 is moved. The tray supply unit 60 downwardly moves the tray 61.
And the servo slider 52 is operated to punch out the pin 6 inserted into the pin jig 4 and brazed to the ceramic substrate 8 by the punching head 51, and the pin 6 is dropped to a predetermined position on the tray 61 and stored. To do. Here, in order to drop and store the ceramic substrate 8 on the tray 61, the servo slider 52 is operated to move the position of the punching pin 55 of the punching head 51 to the position of the ceramic substrate 8 to be punched, and as shown in FIG. In this way, the position of the tray 61 is moved. This is the pin jig 4 and tray 6.
This is due to the fact that the size of 1, the number of ceramic substrates 8 stored, and the position are different. This makes it possible to cope with the difference in size between the ceramic substrate 7 mounted on the brazing jig 1 and the tray 61 to be collected / stored, and the tray 61 corresponding to a variety of jigs is not required.

Then, the pin jig 4 punched out of the ceramic substrate ceramic 8 is transferred to the air blow section 70 of the next stage by the pin jig transfer device 54 having the chuck 56, the left / right movable arm 57, and the actuator 59. The air blow portion 70 blows the pin hole 5 of the pin jig 4.
As a result, the clogging of the pin hole 5 of the pin jig 4 can be removed in advance, so that the work efficiency when the jig is reused can be improved. Next, the pin jig 4 is transferred to the pin jig recovery unit 80, the pin jig 4 is re-inverted by the chuck 86 and the stepping motor 87 to restore the original state, and the pin jig 4 is stacked. to recover.

Thus, according to the separating apparatus of this embodiment, the brazing jig 1 used for brazing the external terminal pins 6 to the ceramic substrate 8 through the brazing furnace 11 In addition to disassembling and separating the tool 2, the pin jig 4, and the positioning jig 7, the ceramic substrate 8 on which the pin 6 is brazed is stored in the tray 61, the ceramic substrate 8 that is not brazed is selected and collected, and the pin The jig 4 can be continuously and reliably blown with air, and the separation work can be automated.

It should be noted that the present invention is not limited to the above-described embodiments, but includes configurations that can be modified and implemented within the scope without changing the gist of the present invention. Incidentally, in the above-described embodiments, the structure in which the brazing ceramic substrate is stored from the brazing line in the brazing furnace and the brazing jig used for the brazing is disassembled and separated continuously has been described. ,
Take out the brazing jig from the brazing line,
It goes without saying that a configuration may be adopted in which the brazed ceramic substrate and the brazing jig used for brazing are continuously disassembled after being housed in a box or the like. Further, in the above-described embodiment, the brazing jig is disassembled into the lower jig, the pin jig, and the positioning jig, and then the pin jig is reversed. However, the brazing jig is reversed. It is a win that these separations may be performed after the above.

[0025]

As is apparent from the above description, according to the separating device for the ceramic substrate on which the external terminals are brazed and the brazing jig according to the present invention, the pins for external terminals are brazed on the ceramic substrate. After that, since the pin jig of the brazing jig is inverted, it is possible to sort out defective products of the ceramic substrate to which the pins are attached, and in the inverted state, the pin jig of the ceramic substrate is removed. Since the pin jigs are collected and collected again by reversing the pin jigs, there is an effect that these separating operations can be continuously performed.

Further, the ceramic substrate recovery unit relatively moves the tray of the tray supply unit and the pin jig, and moves the tray / pin jig relative movement for packing the ceramic substrate held by the pin jig into the tray. Since the mechanism has the mechanism, it is possible to cope with the difference in size between the ceramic substrate mounted on the brazing jig and the tray to be collected and stored, and there is an effect that a tray corresponding to a variety of jigs is not required.

[Brief description of drawings]

FIG. 1 is a block diagram showing a schematic configuration of an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a pin jig reversing unit, a tray supplying unit, a ceramic substrate collecting unit, a pin hole air blow unit, and a pin jig collecting unit.

FIG. 3 is a detailed cross-sectional view of a ceramic substrate recovery unit.

FIG. 4 is an explanatory diagram of tray packing of ceramic substrates.

FIG. 5 is a cross-sectional view of a brazing jig in a state where a ceramic substrate and pins for external terminals are assembled.

FIG. 6 is a plan view of a brazing line.

FIG. 7 is an explanatory diagram of a relationship between a brazing jig and a tray on which a ceramic substrate is placed.

[Explanation of symbols]

1 ... Brazing jig, 2 ... Lower jig, 3 ... Pin aligning plate, 4 ... Pin jig, 5 ... Pin hole, 6 ...
・ External terminal pins, 7 ... Positioning jig, 8 ...
Ceramic substrate, 9 ... Brazing line, 10 ...
Boat jig, 11 ... Brazing furnace, 12 ... Heat sinker or heat spreader, 13 ... Positioning frame jig, 14 ... Weight positioning jig, 15 ... Weight, 16 ... Covering, 17 ... Holding chip, 18 ... Tray, 20 ... Brazing jig taking-in section, 23 ... Brazing jig transfer conveyor, 30
... lower jig / positioning jig separating section, 40 ... pin jig reversing section, 41 ... reversing mechanism section, 42 ... defective product collecting section, 45 ... chuck, 46 ... Stepping motor, 47 ... Recovery box, 50 ... Ceramic substrate recovery section, 51 ... Punching head, 52 ... Servo slider, 53 ... Holding table, 54 ... Pin jig transfer device , 55 ... punching pin, 56 ... chuck, 57 ... left / right movable arm, 59 ... actuator, 58 ... servo slider, 60 ... tray supply section, 61 ... tray , 70 ... Air blow part,
80: Pin jig collecting section, 86: Chuck, 87
... Stepping motors

Claims (1)

[Claims] 1. A lower jig after brazing pins for external terminals to a ceramic substrate with a brazing furnace using a brazing jig having a lower jig, a pin jig, and a positioning jig,
A separating device for separating a pin jig, a positioning jig, and a ceramic substrate, the lower jig / positioning jig separating portion separating the lower jig and the positioning jig of the brazing jig, and the ceramic A pin jig reversing unit that reverses the pin jig that holds the pins brazed to the substrate and sorts and collects defective pins on the ceramic substrate; and a tray supply unit that supplies a tray below the pin jig. , A ceramic substrate recovery unit for extracting the ceramic substrate from the pin jig and packing it in a tray, and a pin jig recovery unit for reversing and recovering the pin jig, and the ceramic substrate recovery unit is a tray supply unit. The tray and the pin jig are moved relative to each other, and a tray / pin jig relative movement mechanism for packing the ceramic substrate held by the pin jig in the tray is provided. Separator of the ceramic substrate and the brazing jig.