JPH0872142A - Precise stamper roll - Google Patents

Abstract

PURPOSE: To improve the slip characteristics between the rear surface of a stamper and the surface of a roll while uniformly distributing tension and preventing breakage or peeling by fixing the stamper having fine uneven patterns formed on the surface thereof on the roll to bond the same to the roll through a lubricant interface. CONSTITUTION: A lubricant plating layer containing nickel as a matrix and containing fine particles of a tetrafluoroethylene resin as a dispersion phase is provided to the rear surface of a stamper 2 as a lubricant layer 2 in a thickness of 5μm. Next, the lubricant plating layer having the same structure is provided on a roll 3 as the lubricant layer 4 in a thickness of 5μm. The stamper is wound around the roll. Subsequently, the stamper and the roll are brought to a line contact state at first and closely bonded mutually so as not to involve air in the gap between the stamper and the roll.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roll-shaped precision stamper for continuously transferring a preformat of a fine uneven pattern onto a substrate for an optical recording medium.

[0002]

2. Description of the Related Art Conventionally, as a method of manufacturing an information recording medium having a fine concavo-convex pattern, there is a method of fixing a stamper for transferring the fine concavo-convex pattern to a roll and continuously transferring and molding the stamper onto a resin substrate or the like. JP-A-56-8672
No. 1 and No. 56-87203.

The roll-shaped stamper used for these is (1) a plate-shaped stamper fixed by electroforming and fixed to the roll, (2) a fine concave-convex pattern is directly engraved on the roll. Things, etc. are known. The present invention relates to a stamper roll for fixing the former plate-shaped stamper on a roll.

Conventionally, in an optical recording medium, recording / reproducing is performed by a spot of a semiconductor laser having a diameter of 0.6 to 3 μm, like an optical disk or an optical card, but in order to secure reliability at that time, As a pre-format for a pregroove or a fine uneven pattern with track numbers for tracking, it is engraved and molded on the substrate surface of the optical recording medium. This molding die is a transfer die called a stamper. .

This stamper is required to have an accuracy of the submicron order as its pattern size, and is generally manufactured through a copy from a master pattern obtained by a fine photolithography technique similar to IC manufacturing in the semiconductor industry. The size of the stamper is restricted by the IC printing machine and the laser cutting device, and it is difficult to obtain a stamper having a size of 300 mm □ or more while satisfying the accuracy requirement.

[0006] As a manufacturing method for engraving a fine concavo-convex preformat pattern on the surface of the substrate of the information recording medium with a stamper, injection molding, compression molding, embossing, or other plastic shaping method is used. In particular, the method of sandwiching a semi-molten sheet made by melt extrusion of resin between roll-formed stamper roll and mirror surface roll (semi-melt sandwiching method) is the best because of its high productivity. It is a method.

As a method of forming the stamper in a roll shape, the method of fixing the plate-shaped stamper on the roll as described above is generally the simplest method, and various fixing methods have been proposed. What has been done, the definitive method has not yet been established.

As a method of fixing the above stamper on the roll, (1) a method of fixing a flexible stamper on the roll with a screw or an adhesive, (2) a method of incorporating the stamper as a die set on the roll, (3) A method is known in which fixing jigs are provided at both ends of a flexible stamper, and the jigs are fitted into fixing grooves formed on a roll and fixed.

The conditions required for the stamper roll having the stamper fixed on the roll are as follows: (a) In order to realize an efficient stamper arrangement (preformat pattern) for obtaining high productivity, fixing is required. Use less parts, (b) consider measures against "loosening" due to thermal expansion of the stamper, and (c) easily replace the stamper if it should be lost, etc. It is necessary to meet the requirements.

Under these circumstances, the method (3) of fixing the stamper around the roll and fixing it at one place is the most common method among the above fixing methods.

[0011]

However, in this method, the roll temperature rises to about 150 to 350 ° C. at the time of forming, so when the thermal expansion of the stamper material is larger than that of the roll material, the thermal expansion causes the expansion of the stamper. And cause "slack" on the roll. As a result, (1) occurrence of "bleeding" and "distortion" of the transfer pattern, (2) occurrence of wrinkles on the stamper, (3)
Further, problems such as breakage of the stamper occur.

For this reason, when fixing the stamper on the roll, a tensile force is applied to the stamper while heating it to a predetermined temperature, and the stamper is retightened so that it does not become loose. Improvements have been measured.

However, even if tension is applied to the stamper and fixed by retightening, the tension between the back surface of the stamper and the surface of the roll is not good, so the tension is unevenly distributed. This causes peeling and breakage of the bonding surface of the stamper and nonuniform elongation of the stamper pattern (pattern distortion).

The inventors of the present invention have analyzed these phenomena in detail and, as a result of their examination, have found that improving the situation by providing the interface between the stamper and the roll with lubricity and also by providing a heat insulating effect. As a result of knowing that they can contribute and variously studying the mode of embodying these properties, the present invention has been completed.

The object of the present invention is to solve the above problems,
The slip characteristics between the stamper back surface and the roll surface are improved,
To provide an excellent precision stamper roll for continuous transfer of a preformatted pattern onto a substrate for an optical information recording medium, in which the tension is evenly distributed to prevent breakage, peeling, non-uniform distortion of a pattern, etc. It is in.

[0016]

The above object can be achieved by the present invention described below. That is, the present invention relates to a stamper roll for manufacturing an optical recording medium substrate, which is formed by fixing a stamper having a fine uneven pattern on the surface thereof, wherein the stamper and the roll are bonded via a lubricous interface. Disclosed is a precision stamper roll.

First, the first aspect of the present invention is to connect the stamper and the roll by providing a lubricous interface by some means. This releases the waste tension that is unevenly distributed. Therefore, as a result, peeling of the joint surface and non-uniform extension of the stamper pattern (pattern distortion) are avoided. Of course, there are various ways of providing the lubricious interface, which will be described in detail later.

Next, a heat insulating layer is additionally provided. This is because when the temperature conditions during molding are changed, especially when the temperature is low, the molding resin sheet is pressed when the first roll and the molding roll are pressed. The heat transfer from the mold to the molding roll is hindered, and the high temperature state of the molding resin sheet can be maintained at the pinching point, so that the rapid decrease in melt viscosity is suppressed, and the followability to the stamper of the molding resin sheet and internal distortion It is possible to obtain a high-quality substrate sheet having good transferability without immobilization.

Further, in the present invention, by providing a lubricating layer on a part of the stamper and / or a part of the roll of a stamper roll having a stamper having a fine uneven pattern on the surface thereof, the stamper roll is fixed. In the case of "re-tightening", the sliding property between the back surface of the stamper and the roll surface is improved, the tension is evenly distributed, and the breakage and peeling of the stamper and the uneven distortion of the pattern are improved.

Specific embodiments of the present invention will be described below in the order of claims. The invention according to claim 2 is characterized in that "the lubricative interface is a lubricating layer provided on the stamper and the roll".

That is, in a stamper roll in which a stamper having a fine uneven pattern on the surface is fixed on a roll, by providing a lubricant layer on the stamper and the roll, the backside of the stamper is subjected to the above "reinforcement". The slip characteristics between the roll surface and the roll surface are improved, the tension is evenly distributed, and it is possible to improve breakage of the stamper, peeling, and uneven pattern distortion.

Further description will be given below with reference to the drawings.
FIG. 1 is a cross-sectional explanatory view of an essential part showing the structure of the stamper roll of the invention according to claim 2. The lubricating layer 4 is interposed between the solid surfaces to reduce the slip resistance. It is preferable to provide a layer of a substance that imparts slipperiness.

Examples of the substance that imparts slipperiness include a liquid lubricant such as silicone oil, a semi-solid lubricant such as grease, a resin, a solid lubricant, and the like. For the liquid lubricant, for example, silicone oil and silicone oil are Freon, A liquid diluted with a solvent such as hexane, a microcrystalline wax for a semi-solid lubricant, a tetrafluoroethylene resin for a resin, and molybdenum disulfide, graphite fluoride, graphite or the like for a solid lubricant can be used.

Of these, non-liquid type lubricants are preferably used rather than liquid type lubricants from the viewpoints of use at high temperatures and a method of processing stampers with high precision. That is,
Polytetrafluoroethylene resin, molybdenum disulfide, graphite fluoride, graphite and the like are preferably used.

Examples of non-liquid type lubricants preferably used in the present invention are listed in more detail below. (1) Molybdenum disulfide, tungsten disulfide, which is a layered solid,
Tantalum disulfide, graphite, graphite fluoride, boron nitride, phthalocyanine, mica, selenide, telluride,
In (2) non-layered inorganic substances such as halides, calcium fluoride, sodium fluoride, barium fluoride, lanthanum fluoride, yttrium fluoride, lead sulfide, iron sulfide, cadmium sulfide, lead oxide, aluminum oxide, molybdenum oxide, In the case of (3) simple substance of metal such as tungsten oxide, iron oxide, and silicon oxide, gallium, indium, lead, tin, silver,
There are copper, gold, tungsten, molybdenum and the like, and (4) tetrafluoroethylene resin, polyethylene, polyurethane, phenol resin, and the like.

As a method for forming the lubricant layer on the stamper or roll, (a) a vacuum coating of the above lubricant on the stamper back surface or roll, and (b) a coating film in which the lubricant is dispersed in a binder are used. Forming, (c) forming a lubricating plating film, (d) adhering or screwing a sheet film-like thing, etc., and forming and fixing by these methods directly or through an adhesive. .

In the case of lubricating plating, the dispersed phase is 4
It is preferable to form the lubricating layer by using fluorinated ethylene resin, fluorinated graphite, or the like. Lubricating plating is a method of co-depositing lubricant fine particles together with plating metal from a suspension of a plating bath containing finely soluble lubricant fine particles (tetrafluoroethylene resin, fluorinated graphite, etc.) to obtain lubricity in the metal. It means dispersion plating forming a dispersed phase.

The thickness of the lubricating layer is 0.01 to 500.
μm is suitable, but it is not limited to this as long as it satisfies the function of reducing the friction coefficient of the interface. Below, an example of the manufacturing method of the stamper roll of this invention is shown.

(Manufacture of Stamper) The stamper used in the present invention can be manufactured in the same manner as the manufacturing method generally used for CDs (compact discs) and the like. Specifically, a resist is applied to a glass master, the pattern is exposed and developed, then a resist pattern is formed, nickel is sputtered on the resist pattern to form a conductive layer, and this is used as an electrode to form a predetermined pattern. Electroform nickel to thickness.

The transfer surface (second master) obtained by peeling this electroformed layer from the master may be used as a stamper, or
The third master (mother) and stamper may be created using the master as a father. The thickness of the stamper is preferably 10 μm to 2 mm, and 50 μm to 0.5 m, because mechanical strength and durability required for molding are required.
m is more preferred.

(Roll) As the roll for fixing the above stamper, any material may be used as long as it has a high surface hardness, high durability, and easy control of the roll temperature, as long as it has good thermal conductivity. Although it is possible, for example, metals such as iron, chrome steel and carbon steel, metal alloys, metal compounds and the like have good roll processability and can be preferably used. Regarding the processing of the roll surface, the surface accuracy is 1
If S or less, a more preferable surface accuracy is 0.1S or less.

(Production of Stamper Roll) A stamper roll of the present invention can be obtained by providing a lubricating layer on the back surface and / or roll of the stamper and winding the stamper around the roll.

[0033]

EXAMPLES The present invention will be described in detail below with reference to examples, but the present invention is not limited to these.

Example 1 On the back surface of the stamper 2, a lubricating plating layer having a matrix of nickel as a lubricating layer 4 and a dispersion layer of fine particles of tetrafluoroethylene resin is provided to a thickness of 5 μm. Next, on the roll 3 as well, a lubricating plating layer having nickel as a matrix and fine particles of tetrafluoroethylene resin as a dispersion layer is similarly provided to 5 μm as the lubricating layer 4. Wrap this stamper around this roll (see Figure 1).

Next, the stamper and the roll are first brought into line contact with each other, and then the stamper and the roll are brought into close contact with each other so that air is not entrapped between the stamper and the roll. When the entire surface of the stamper comes into contact with the roll, tension is applied to the stamper to eliminate slack and looseness of the stamper, and the contact parts of the roll push against each other with a certain pressure to prevent distortion, waviness, deformation, wrinkles, and tightening of the stamper. Fix it so that it does not exist.

Example 2 Instead of the lubrication plating of the lubricating layer 4 of Example 1, graphite was evaporated to a thickness of 50 nm on the back surface of the stamper 2 and on the roll 3, respectively. went. Using the stamper rolls obtained in Examples 1 and 2, optical recording medium substrates were manufactured by extrusion molding (see FIG. 10). 2 melted polycarbonate resin
The resin sheet was extruded from the T-die 13 at a resin temperature of 80 to 310 ° C., passed through between the stamper roll 1 and the mirror surface roll 14, and a small pressure was applied to produce a resin sheet on which a fine uneven pattern on the surface of the stamper roll was transferred.

When the stamper roll is formed, the stamper tension on the roll is evenly distributed, there is no breakage or peeling, and the uneven distortion of the pattern is eliminated. Therefore, the transferred uneven pattern has uneven pattern dimensions. It was a highly accurate transfer sheet. The next is the invention according to claim 3, which is as described above, "the lubricative interface is formed by including a lubricant in a part of the heat insulating layer provided between the stamper and the roll". Is characterized by.

According to the present invention, in a stamper roll comprising a stamper having a fine uneven pattern on its surface and fixed on the roll via a heat insulating layer, a lubricant is contained in a part of the heat insulating layer. At the time of the above retightening, the slip property between the back surface of the stamper and the roll surface is improved, the tension is evenly distributed, and breakage, peeling, and uneven distortion of the pattern can be improved.

FIG. 2 is a cross-sectional explanatory view of the essential parts showing the structure of the stamper roll in this case. As the heat insulating layer 5 ',
As disclosed in Japanese Patent Application Laid-Open No. 4-364242, a resin layer having a heat insulating property, for example, polyimide resin, fluororesin, polyether ether ketone, polyether sulfone, polyparabanic acid resin, polyphenylene oxide, polyarylate resin. And epoxy resin are preferably used.

The heat insulating layer 5'includes a lubricant in at least a part thereof. Examples of the lubricant include oil, resin, wax and the like. For example, silicone oil is used as oil, ethylene tetrafluoride resin is used as resin, microcrystalline wax is used as wax, and molybdenum disulfide, graphite fluoride, graphite, etc. are used. You can

As a method of incorporating a lubricant into the heat insulating layer, a method of adding and mixing the lubricant during molding of the resin sheet for the heat insulating layer is generally used. The thickness of the heat insulating layer containing the lubricant may satisfy the function disclosed in Japanese Patent Laid-Open No. 4-364242, and 10 to 500 μm is suitable, but the thermal conductivity of the lubricant to be added depends on the thickness. It is corrected accordingly.

A lubricant is present between solid surfaces to reduce the slip resistance. The lubricant is a substance that provides slipperiness, and is a liquid lubricant such as silicone oil or a semi-solid lubricant such as grease. , Resin, solid lubricant, etc., for example, liquid lubricant is silicone oil, liquid in which silicone oil is diluted with a solvent such as Freon, hexane, etc., semi-solid lubricant is microcrystalline wax, resin is tetrafluoroethylene resin, As the solid lubricant, molybdenum disulfide, graphite fluoride, graphite and the like can be used, but these are all the same as above.

The method for manufacturing the stamper roll in this case will be described below. The stamper itself is the same as the above (the description of the invention of claim 2), and the roll itself is also the same as the above. The precision stamper roll of the present invention can be obtained by winding and fixing the above stamper around a roll through a heat insulating layer 5 ′ containing a lubricant.

Example 3 A fluororesin was mixed with 10% by weight of molybdenum disulfide to obtain a powder. 10 parts by weight of ultra-high molecular weight polyethylene powder was mixed with 100 parts by weight of this resin, and the mixture was ram extruded to form a sheet of a heat insulating layer 5 ′ containing a lubricant of 50 μm. The heating temperature of the extrusion molding machine at this time is 300 ° C. The stamper is wound around a roll through the fluororesin sheet (see FIG. 2).

Next, after the stamper and the roll are brought into line contact with each other through the heat insulating layer 5'containing a lubricant, air is not entrained between the heat insulating layer 5'containing the stamper and the lubricant and the roll. , The heat-insulating layer 5 ′ containing the stamper and the lubricant is brought into close contact with the roll. When the entire surface of the stamper comes into contact with the roll through the heat insulating layer 5'containing a lubricant, tension is applied to the stamper to eliminate the slack and looseness of the stamper, so that the contact portions of the rolls press against each other with a constant pressure. , Fix the stamper so that it is not distorted, wavy, deformed, wrinkled, or tight.

Example 4 The fluororesin of Example 3 was changed to polyphenylene oxide,
Molybdenum disulfide to calcium fluoride, heating temperature to 2
Example 3 was repeated except that the temperature was changed to 50 ° C (Fig. 2).
reference).

An optical recording medium substrate was extrusion molded using the stamper rolls obtained in Examples 3 to 4 (see FIG. 10). Polycarbonate molten resin, 280-310
The resin sheet was extruded from the T die 13 at a resin temperature of ° C, passed through between the stamper roll 1 and the mirror surface roll 14, and a small uneven pattern on the surface of the stamper roll was transferred with a small pressure to prepare a resin sheet.

When the stamper roll is produced, the stamper tension on the roll is evenly distributed, there is no breakage or peeling, and there is no uneven elongation of the pattern. Therefore, the transferred uneven pattern is good with no transfer unevenness. Met.

According to a fourth aspect of the invention, the lubricating interface is
The precision stamper roll according to claim 1, wherein the precision stamper roll is a lubricating layer provided on a part of a heat insulating layer provided between the stamper and the roll. In a stamper roll formed by fixing a stamper having on a roll, a heat insulating layer is provided between the stamper and the roll, and by having a lubricating layer in a part of the heat insulating layer, in the above retightening, The slip characteristics between the stamper back surface and the roll surface are improved, the tension is evenly distributed, and breakage, peeling, and uneven pattern distortion can be improved.

FIG. 3 is a cross-sectional explanatory view of the essential parts showing the structure of the stamper roll of the invention in this case. The heat insulating layer 5 is the same as that described in claim 3. The heat insulating layer 5 has the lubricating layer 4 in a part thereof. The lubricant contained in this lubricating layer is also the same as that described in the third aspect.

As a method for forming the heat insulating layer having a lubricating layer, (1) the above lubricant is vacuum-deposited on the heat insulating layer,
(2) forming a coating film in which a lubricant is dispersed in a binder, (3) adhering a dispersed plating film, or (4) adhering a sheet film-like material, etc., directly or through an adhesive. Done.

When performing lubrication plating, the dispersed phase is 4
It is preferable to form the lubricating layer by using fluorinated ethylene resin, fluorinated graphite, or the like. Lubricating plating is dispersion plating containing self-lubricating fine particles (tetrafluoroethylene resin, fluorinated graphite, etc.).

The thickness of the lubricating layer should satisfy the function of reducing the friction coefficient at the interface, and is 0.01 to 500 μm.
m is suitable, but not limited to this. The thickness of the heat insulating layer having the lubricating layer is preferably 10 to 500 μm, which is the same as that described in the description of the invention of claim 2, but is appropriately corrected according to the thermal conductivity of the lubricating layer provided. .

The lubricating layer is interposed between the solid surfaces to reduce the slip resistance, and the substance used for forming the lubricating layer is as described in the invention of claim 2. Below, the manufacturing method of the stamper roll in the case of this claim is shown.

The stamper itself used is as described in the case of claim 2, and the roll itself is the same as described in claim 2. The stamper roll in this case can also be obtained by winding the stamper around the roll through the heat insulating layer.

Example 5 Graphite having a thickness of 30 nm was used as a lubricating layer 4 on both surfaces of a heat insulating layer 5 ′ made of a polyimide film having a thickness of 25 μm.
Deposited to a thickness. A stamper is wound around a roll through this polyimide film (see FIG. 3).

Then, after the stamper, the above-mentioned polyimide film and the roll are brought into line contact with each other, they are brought into close contact with each other without trapping air between the stamper, the polyimide and the roll.

When the entire surface of the stamper contacts the roll,
Applying tension to the stamper to eliminate slack and slack in the stamper, so that the contact parts of the rolls press against each other with a certain pressure, and the distortion, waviness, deformation, and wrinkles of the stamper,
Fix it so that there is no tight fit.

Example 6 Silicone oil containing 10% of fluorinated graphite particles was coated as a lubricating layer 4 on both surfaces of a heat insulating layer 5 made of polyarylate resin having a thickness of 40 μm to a thickness of about 1 μm. This polyarylate resin was interposed between the stamper and the roll in the same manner as in Example 5 to prepare a stamper roll.

An optical recording medium substrate was extrusion-molded using the stamper roll obtained in Example 5 or 6 (FIG. 10).
reference). The molten resin of polycarbonate is 280-31
The resin sheet was extruded from the T die 13 at a resin temperature of 0 ° C., passed through between the stamper roll 1 and the mirror surface roll 14, and a small uneven pattern on the surface of the stamper roll was transferred with a small pressure to prepare a resin sheet.

At the time of forming the stamper roll, the tension of the stamper on the roll is uniformly distributed, and breakage, peeling, and non-uniform elongation of the pattern are eliminated. Therefore, the transferred uneven pattern is good with no transfer unevenness. Met.

Next, the invention described in claim 5 will be described. The precision stamper roll in this case is characterized in that "the stamper and the roll are bonded via a heat insulating layer, and the lubricous interface is a lubricating layer provided on at least one of the stamper and the roll". In other words, a stamper having a fine uneven pattern on the surface, in a stamper roll formed by fixing on a roll via a heat insulating layer, by using a stamper roll having a lubricating layer on at least one of the stamper or roll, Upon the above-mentioned retightening, the sliding property on the roll surface via the stamper and the heat insulating layer is improved, the tension is evenly distributed, and breakage, peeling, and uneven pattern distortion can be improved.

FIG. 4 is a cross-sectional explanatory view of the essential parts showing the structure of the stamper roll in this case. The heat insulating layer 5 is generally a resin sheet, but is a resin layer having the same heat insulating property as in the description of the invention according to claim 3, and is, for example, a polyimide resin, a fluororesin, a polyether ether ketone, or a polyether. Sulfone, polyparabenic acid resin, polyphenylene oxide, polyarylate resin, epoxy resin and the like are preferably used. And its thickness is 10-50
0 μm is suitable.

For the lubricating layer 4, as described in the second aspect of the invention, exactly the same lubricant as in that case can be used. As a method of forming the lubricating layer 4 on the stamper 2 or the roll 3, the same method as that described in claim 2 can be applied, and the thickness of the lubricating layer is 0.01 to 5
00 μm is suitable, but it is not limited to this as long as it satisfies the function of reducing the friction coefficient of the interface.

The method for producing the stamper roll of the invention in this case will be described below. The description of the stamper 2 itself is the same as that of claim 2, and the description of the roll 3 itself is the same as that of claim 2.

A precision stamper roll of the present invention can be obtained by providing a lubricating layer on the back surface of the stamper or on the roll, or on both of them, and winding the stamper around the roll via the heat insulating layer 5. The heat insulating layer 5 is arranged between the stamper and the roll when the stamper is wound around the roll.

Example 7 On the back surface of the stamper 2, a lubricating plating layer having nickel as a matrix and fine particles of tetrafluoroethylene resin as a dispersed phase was formed to a thickness of 5 μm as a lubricating layer 4. Next, on the roll 3, similarly, nickel is used as a matrix and 4
A lubrication plating layer having fine particles of a fluorinated ethylene resin as a dispersion layer is provided at 5 μm. This stamper is wound around this roll through a 20 μm polyimide film (Fig. 4).
(See (a)).

Next, after the stamper, the heat insulating layer and the roll are brought into line contact with each other, air is not entrapped between the stamper, the heat insulating layer and the roll, and the stamper and the roll are brought into close contact with each other. When the entire surface of the stamper comes into contact with the roll, apply tension to the stamper to eliminate slack and slack in the stamper, and press the contact parts of the roll against each other with a certain pressure to prevent distortion, swell, deformation, wrinkles, and tension in the stamper. Fix it so that it does not exist.

Example 8 Instead of the lubrication plating of Example 7, graphite was deposited to a thickness of 50 nm on the back surface of the stamper 2 and on the roll 3, respectively, and 25 μm was used instead of the polyimide film.
Using the polyether sulfone of No. 1, a stamper roll was similarly prepared thereafter.

Example 9 Lubrication plating, which is the lubricating layer 4 of Example 1, was provided only on the back surface of the stamper 2 (see FIG. 4B), and thereafter the same procedure as in Example 1 was performed.

Example 10 The lubricating plating of Example 1 was provided only on the roll 3 (see FIG.
(See (c)), and thereafter the same as in Example 1.

Using the precision stamper rolls obtained in Examples 7 to 10, an optical recording medium substrate was extrusion molded (see FIG. 10). The molten resin of polycarbonate is 280-
The resin sheet was extruded from the T die 13 at a resin temperature of 310 ° C., passed through between the stamper roll 1 and the mirror surface roll 14, and a small pressure was applied to form a resin sheet on which a fine uneven pattern on the surface of the stamper roll was transferred.

At the time of forming the stamper roll, the stamper tension on the roll is uniformly distributed, there is no breakage or peeling, and the uneven distortion of the pattern is eliminated. It was a transfer sheet that was evenly and accurately.

Next, the invention described in claim 6 will be described. The precision stamper roll in this case is characterized in that it is the precision stamper roll according to claim 1, wherein a heat insulating layer is provided on the stamper and a lubricating layer is provided on a part of the heat insulating layer.

According to this embodiment of the present invention, in a stamper roll in which a heat insulating layer is provided on a stamper having a fine uneven pattern on the surface and is fixed on the roll, a lubricating layer is provided on a part of the heat insulating layer. By using the stamper roll having the above, upon the above-mentioned retightening, the sliding property between the stamper and the roll surface is improved, the tension is evenly distributed, and breakage, peeling, and uneven distortion of the pattern can be improved. .

FIG. 5 is a cross-sectional explanatory view of the essential parts showing the structure of the stamper roll in this case. The heat insulating layer 5 is as described in the case of claim 5, and the lubricating layer 4 is exactly the same as the description of claim 5, that is, the same as the case of claim 2. .

As a method of forming the lubricating layer on the heat insulating layer,
There is a method of forming a lubricating layer after providing a heat insulating layer on the back surface of the stamper, or providing a heat insulating layer having lubricity on the back surface of the stamper. To fix the lubricating layer to the lubricating layer or the heat insulating layer, the substance having the above-mentioned lubricity is formed into a vacuum film, a coating film in which a lubricant is dispersed in a binder is formed (including a lubricating paint), or a sheet film-like material. Glue things,
Etc. directly or via an adhesive. The thickness of the lubricating layer to be provided is preferably 0.01 to 500 μm, but is not limited to this as long as the function of reducing the friction coefficient of the interface is satisfied.

The method for producing the stamper roll of the invention in this case will be described below. The stamper itself is the same as that described in claim 2, and the description of the roll itself is the same as that described in claim 2.

After a heat insulating layer is provided on the back surface of the stamper, a lubricating layer is provided and the stamper is wound around a roll, or the heat insulating layer main body is provided with lubricity.
By providing this on the back surface of the stamper and winding this stamper around the roll, the stamper roll of the present invention can be obtained.

Example 11 The back surface of the stamper 2 was coated with 20 μm of polyimide resin as the heat insulating layer 5. On this, graphite was vapor-deposited to a thickness of 75 nm as a lubricating layer 4. This stamper was wound around a roll to obtain a stamper roll (Fig. 5
reference).

Then, after the stamper and the roll are brought into line contact with each other, the stamper and the roll are brought into close contact with each other so that air is not caught between the stamper and the roll. When the entire surface of the stamper comes into contact with the roll, apply tension to the stamper to eliminate slack and slack in the stamper, and press the contact parts of the roll against each other with a certain pressure to prevent distortion, swell, deformation, wrinkles, and tension in the stamper. Fix it so that it does not exist.

Example 12 A 50 μm sheet of polyetheretherketone was laminated as a heat insulating layer 5 on the back surface of the stamper 2. Silicone oil containing 10% of fluorinated graphite particles as a lubricating layer 4 was spray-coated thereon to a thickness of about 1 μm. Using this stamper, a stamper roll was prepared in the same manner as in Example 11.

Example 13 As the heat insulating layer 5, a polyphenylene oxide resin having a thickness of 20 μm was impregnated with silicone oil as a lubricant.
This resin was attached to the back surface of the stamper 2. Using this stamper, a stamper roll was prepared in the same manner as in Example 11.

Example 14 A polyimide resin having a thickness of 30 μm was laminated on the back surface of the stamper 2 as a heat insulating layer 5, and then microcrystalline wax was hot-pressed as a lubricant. Using this stamper, a stamper roll was prepared in the same manner as in Example 11.

An optical recording medium substrate was extrusion-molded using the stamper rolls obtained in the above Examples 11 to 14 (see FIG. 10). 28 of molten resin of polycarbonate
The resin sheet was extruded from the T-die 13 at a resin temperature of 0 to 310 ° C., passed through between the stamper roll 1 and the mirror surface roll 14, and a small pressure was applied to produce a resin sheet on which a fine uneven pattern on the surface of the stamper roll was transferred.

At the time of producing the stamper roll, the tension of the stamper on the roll is evenly distributed and there is no breakage or peeling.
Since the uneven distortion of the pattern disappeared, the transferred uneven pattern was an accurate transfer sheet with uniform pattern dimensions.

Further, the invention according to claim 7 will be explained. In the case of the invention, "a heat insulating layer is provided on the roll, and a lubricating layer is provided on a part of the heat insulating layer.
The precision stamper roll described in ".

According to this embodiment of the present invention, in a stamper roll formed by fixing a stamper having a fine uneven pattern on its surface on a roll provided with a heat insulating layer, a lubricating layer is formed on a part of the heat insulating layer. By using a stamper roll having, when performing the above retightening,
The slip property between the back surface of the stamper and the roll is improved, the tension is evenly distributed, and breakage, peeling, uneven pattern distortion, and the like can be improved.

FIG. 6 is a cross-sectional explanatory view of the essential parts showing the structure of the stamper roll of the present invention. The heat insulating layer 5 on the roll is as described in the case of claim 5, and the description of the lubricating layer 4 is exactly the same as that of claim 5, that is, claim 2. As a method of forming the lubricating layer on the heat insulating layer, there is a method of forming the heat insulating layer on the roll and then forming the lubricating layer or providing a heat insulating layer having lubricity on the roll.

The lubricant layer is fixed to the lubricant layer or the heat insulating layer by vacuum film formation of the substance having the above-mentioned lubricity, or by forming a coating film in which a lubricant is dispersed in a binder (including a lubricating paint), or It is carried out directly or through an adhesive by adhering a sheet-like material.
The thickness of the lubricating layer provided is preferably 0.01 to 500 μm, but is not limited to this as long as the function of reducing the friction coefficient of the interface is satisfied.

The method for producing the stamper roll of the invention in this case will be described below. The stamper itself used in this case is the same as that described in claim 2, and the roll itself is the same as that described in claim 2.

After the heat insulating layer is provided on the surface of the roll, a lubricating layer is provided, and the stamper is wound around this roll, or the heat insulating layer main body is provided with lubricity, and this is provided on the surface of the roll. By winding around this roll, the stamper roll of the present invention can be obtained.

Example 15 Polyimide resin having a thickness of 20 μm was used as a heat insulating layer 5 on a roll.
Coated. On this, graphite was vapor-deposited to a thickness of 75 nm as a lubricating layer 4. A stamper was wound around this roll to obtain a stamper roll (see FIG. 6).

Then, after the stamper and the roll are brought into line contact with each other, the stamper and the roll are brought into close contact with each other so that air is not trapped between the stamper and the roll. When the entire surface of the stamper comes into contact with the roll, apply tension to the stamper to eliminate slack and slack in the stamper, and press the contact parts of the roll against each other with a certain pressure to prevent distortion, swell, deformation, wrinkles, and tension in the stamper. Fix it so that it does not exist.

Example 16 After a 30 μm epoxy resin sheet was adhered as a heat insulating layer 5 on a roll, a silicone oil containing 10% fluorinated graphite particles as a lubricating layer 4 was sprayed thereon to a thickness of about 1 μm. Coated. In this roll, Example 1
A stamper was wound in the same manner as in No. 5 to make a stamper roll.

Example 17 A 25 μm thick polyarylate resin as the heat insulating layer 5 was impregnated with silicon oil as a lubricant. After winding this resin on a roll, a stamper was wound on this roll in the same manner as in Example 15 to prepare a stamper roll.

Example 18 A polyimide resin having a thickness of 30 μm was provided as a heat insulating layer 5 on a roll, and then microcrystalline wax as a lubricating layer 4 was coated on the roll with a hot roll. A stamper was wound around this roll in the same manner as in Example 15 to prepare a stamper roll.

An optical recording medium substrate was extruded and molded using the stamper roll obtained in each of Examples 15 to 18 (see FIG. 10). 28 of molten resin of polycarbonate
The resin sheet was extruded from the T-die 13 at a resin temperature of 0 to 310 ° C., passed through between the stamper roll 1 and the mirror surface roll 14, and a small pressure was applied to produce a resin sheet on which a fine uneven pattern on the surface of the stamper roll was transferred.

At the time of forming the stamper roll, the stamper tension on the roll is uniformly distributed, there is no breakage or peeling, and the uneven distortion of the pattern is eliminated. Therefore, the transferred uneven pattern has uneven pattern dimensions. It was a highly accurate transfer sheet. 7 (a) and 7 (b),
It is a schematic explanatory drawing which shows the structure of the stamper roll corresponding to Claim 8 of this invention, respectively.

Example 19 A lubricating plating layer having a thickness of 5 μm was formed on the back surface of the stamper 2 as a lubricating layer 4 with Ni as a matrix and fine particles of tetrafluoroethylene resin as a dispersed phase. This stamper was wound around a roll (see FIG. 7 (a)).

Then, after the stamper and the roll are brought into line contact with each other, air is not entrapped between the stamper and the roll, and the stamper and the roll are brought into close contact with each other. When the entire surface of the stamper comes into contact with the roll, apply tension to the stamper to eliminate slack and slack in the stamper, and press the contact parts of the roll against each other with a constant pressure to prevent distortion, swell, deformation, wrinkles, and tension in the stamper. So that it is fixed.

Example 20 A stamper roll was prepared in the same manner as in Example 1 except that graphite was evaporated to a thickness of 50 nm on the back surface of the stamper instead of the lubricating plating as the lubricating layer of Example 19 (see FIG. 7 (a)).

Example 21 As the lubrication layer 4 on the surface of the roll, a lubrication plating layer composed of a Ni matrix and a dispersed phase tetrafluoroethylene resin was 5 μm.
It has a thickness of m. A stamper was wound around this roll (see FIG. 7 (b)).

Then, after the stamper and the roll are brought into line contact with each other, the stamper and the roll are brought into close contact with each other so that air is not caught between the stamper and the roll. When the entire surface of the stamper comes into contact with the roll, apply tension to the stamper to eliminate slack and slack in the stamper, and press the contact parts of the roll against each other with a constant pressure to prevent distortion, swell, deformation, wrinkles, and tension in the stamper. So that it is fixed.

Example 22 Instead of the lubricating plating of the lubricating layer of Example 21, tetrafluoroethylene resin was rolled to 100 μm by baking.
Coated to thickness. A stamper was wound around this roll (see FIG. 7 (b)).

An optical recording medium substrate was extruded using the stamper rolls obtained in Examples 19 to 22 described above (see FIG. 10). 2 melted polycarbonate resin
The resin sheet was extruded from the T die 13 at a resin temperature of 80 to 310 ° C., passed through both rolls of the stamper roll 1 and the mirror-finished roll 14, and a small uneven pattern on the surface of the stamper roll was transferred with a small pressure to prepare a resin sheet.

When the stamper roll was produced, the stamper tension on the roll was evenly distributed, there was no breakage or peeling, and the uneven distortion of the pattern was eliminated. Therefore, the transferred uneven pattern had uneven pattern dimensions. A highly satisfactory and satisfactory transfer sheet was obtained.

[0108]

As described above, by providing the lubricating layer on a part of the stamper and / or a part of the roll of the stamper roll in which the stamper having a fine uneven pattern on the surface is fixed on the roll, Pre-formatted pattern continuation on the substrate for optical information recording media, which improves the sliding property between the back surface of the stamper and the roll surface and can prevent the breakage, peeling, and non-uniform distortion of the pattern due to the uniform distribution of tension. It becomes possible to obtain an excellent stamper roll for transfer, and an excellent effect is exhibited.

[Brief description of drawings]

FIG. 1 is a cross-sectional explanatory view of a main part of a precision stamper roll of the present invention.

FIG. 2 is a cross-sectional explanatory view of the essential parts of the precision stamper roll of the present invention.

FIG. 3 is an explanatory cross-sectional view of a main part of the precision stamper roll of the present invention.

4 (a), (b) and (c) are cross-sectional explanatory views of the essential parts of the precision stamper roll of the present invention.

FIG. 5 is a cross-sectional explanatory view of the essential parts of the precision stamper roll of the present invention.

FIG. 6 is a cross-sectional explanatory view of the essential parts of the precision stamper roll of the present invention.

7 (a) and (b) are cross-sectional explanatory views of the essential parts of the precision stamper roll of the present invention.

FIG. 8 is a schematic configuration diagram of a precision stamper roll of the present invention.

FIG. 9 is a schematic perspective view of a precision stamper roll of the present invention.

FIG. 10 is an explanatory view of sheet forming (machine) using the precision stamper roll of the present invention.

FIG. 11 is a schematic cross-sectional view showing a conventional stamper roll.

[Explanation of symbols]

 1 Precision Stamper Roll 2 Stamper 3 Roll 4 Lubricating Layer 5 Heat Insulating Layer 5'Insulating Layer Containing Lubricant 11 Concavo-convex Pattern 12 Extruder 13 T Die 14 Mirror Roller 15 Sheet 21 Conventional Stamper Roll

Claims (8)

[Claims] 1. A stamper roll for manufacturing an optical recording medium substrate, comprising a stamper having a fine uneven pattern on its surface and fixed on the roll, wherein the stamper and the roll are bonded together via a lubricous interface. A precision stamper roll characterized by 2. The lubrication interface is a lubrication layer provided on the stamper and the roll.
Precision stamper roll described. 3. The precision stamper roll according to claim 1, wherein the lubricous interface is formed by including a lubricant in a part of a heat insulating layer provided between the stamper and the roll. . 4. The precision stamper roll according to claim 1, wherein the lubricous interface is a lubricating layer provided on a part of the heat insulating layer. 5. The stamper and roll are bonded together via a heat insulating layer, and the lubricous interface is a lubricant layer provided on at least one of the stamper and the roll. Precision stamper roll. 6. The precision stamper roll according to claim 1, wherein a heat insulating layer is provided on the stamper, and a lubricating layer is provided on a part of the heat insulating layer. 7. The heat insulating layer is provided on the roll, and a lubricating layer is provided on a part of the heat insulating layer.
Precision stamper roll described. 8. The lubricating layer is a part of the stamper,
The precision stamper roll according to claim 2, wherein the precision stamper roll is provided on a part of the roll and / or the roll.