JPH0871898A - Double-end grinding device - Google Patents

Double-end grinding device

Info

Publication number
JPH0871898A
JPH0871898A JP20615294A JP20615294A JPH0871898A JP H0871898 A JPH0871898 A JP H0871898A JP 20615294 A JP20615294 A JP 20615294A JP 20615294 A JP20615294 A JP 20615294A JP H0871898 A JPH0871898 A JP H0871898A
Authority
JP
Japan
Prior art keywords
grindstone
work
carrier
double
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20615294A
Other languages
Japanese (ja)
Other versions
JP3290825B2 (en
Inventor
Haruto Uchida
治人 内田
Noriyuki Inagaki
典之 稲垣
Kazunari Yasuda
一成 安田
Masayuki Takahashi
正行 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20615294A priority Critical patent/JP3290825B2/en
Priority to US08/522,097 priority patent/US5755613A/en
Publication of JPH0871898A publication Critical patent/JPH0871898A/en
Application granted granted Critical
Publication of JP3290825B2 publication Critical patent/JP3290825B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

PURPOSE: To conduct stable, double-sided grinding between two grinding stones facing with each other even in the case of a film-like work. CONSTITUTION: A work 3, which is set in a holding hole 2 of a carrier 1 and then carried, is guided by upper and lower guides 4, 5 so as to be introduced into a space between a pair of (upper and lower) grinding stones 6 and 7 facing with each other for the sake of double-sided grinding. The film-like carrier 1 is held in a tense state by rigid-body holders 8a, 8b situated at an outer peripheral part and is supported via these rigid-body holders 8a, 8b in a rotatable manner. The work 3 is held by the holding hole 2, which is provided at the outer peripheral part of the carrier 1, and then carried.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は両頭研削装置に関し、例
えば、圧電素子に代表されるようなセラミックス部品
や、自動車の歯車部品等の板状、あるいは柱状である材
料を両面同時研削するのに用いられる両頭研削装置に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-sided grinding machine, for example, for simultaneous double-sided grinding of plate-shaped or columnar materials such as ceramic parts represented by piezoelectric elements and gear parts of automobiles. The present invention relates to a double-sided grinding machine used.

【0002】[0002]

【従来の技術】近時、圧電素子のような厚みが0.5m
m以下のセラミックス部品は、スライシングマシンを用
いて薄片状に成形される。この成形後のセラミックス部
品は必要な電気特性を発揮するように両面加工される。
従来、この両面加工には図3に示すような両頭研削装置
aが用いられている。
2. Description of the Related Art Recently, the thickness like a piezoelectric element is 0.5 m.
Ceramic parts having a size of m or less are formed into thin pieces using a slicing machine. The molded ceramic parts are double-sided processed so as to exhibit the required electrical characteristics.
Conventionally, a double-sided grinding machine a as shown in FIG. 3 has been used for this double-sided processing.

【0003】この両頭研削装置は、例えば図3の(a)
に示すように、パーツフィーダaから供給されるワーク
bを、ガイドローラrにてエンドレスベルト状に張設し
たスルーフィーダcに有する図3の(b)に示すような
保持孔kに受入れて、上下のガイドd、eの案内のもと
に、上下に対向する一対の砥石f、g間に導入して両面
加工に供し、上下の砥石f、gを出た加工後のワークb
は、今1つの上下のガイドh、iの案内の基に所定距離
さらに搬送し、この上下ガイドh、iを外れた時点で容
器jに自然落下して回収されるようにしている。
This double-sided grinding machine is, for example, shown in FIG.
As shown in FIG. 3, the work b supplied from the parts feeder a is received in the holding hole k as shown in FIG. 3B provided in the through feeder c stretched like a endless belt by the guide roller r, Under the guidance of the upper and lower guides d and e, it is introduced between a pair of vertically facing grindstones f and g to be subjected to double-sided processing, and the work b after the upper and lower grindstones f and g is processed.
Is further conveyed by a predetermined distance on the basis of the guides of the upper and lower guides h and i, and when it is removed from the upper and lower guides h and i, it is naturally dropped into the container j and collected.

【0004】これによって、薄膜状、柱状をした各種の
材料の両面研削を同時に達成することができる。なお、
ワークbが厚み0.1mm〜0.2mm程度の薄いもの
である場合、スルーフィーダcには金属のベルト等を用
い、ワークbの両面研削ができるように前記ワークbの
厚みよりも小さな厚みに設定される。
This makes it possible to simultaneously perform double-sided grinding of various thin-film and columnar materials. In addition,
When the work b has a thin thickness of about 0.1 mm to 0.2 mm, a metal belt or the like is used for the through feeder c, and the work b has a thickness smaller than that of the work b so that both sides of the work b can be ground. Is set.

【0005】[0005]

【発明が解決しようとする課題】しかし、上記のように
ガイドローラrにより張設されたスルーフィーダcは、
各部での微小な伸縮が集積した揺れや垂れが生じやす
く、上下の砥石f、gと接触して双方が徒に磨耗して寿
命が短くなったり、ワークbを安定した搬送状態で上下
の砥石f、gによる両面加工に供しにくく十分な加工精
度が得られないと云った問題がある。しかも、ワークb
がスルーフィーダcの保持孔kから抜け出て、スルーフ
ィーダcと砥石fや砥石gとの間に挟まると云ったこと
により、適正に加工されず、場合によっては、上下の砥
石f、g間を無理に通り抜けようとして、ワークbや砥
石f、gが損傷してしまうこともある。特に、下砥石g
等が図3の(b)に示す仮想線の状態から実線の状態に
磨耗したようなとき、下ガイドeと下砥石gとの間に段
差sができて、スルーフィーダcと下砥石gとの間の隙
間が拡大するので、下ガイドeから下砥石gにワークb
が移載されるときに、ワークbが保持孔kから抜け出て
スルーフィーダcと下砥石gとの間に落ち込みやすくな
るので、前記問題が頻繁に生じる。
However, the through feeder c stretched by the guide roller r as described above is
Shaking or sagging due to the accumulation of minute expansion and contraction at each part is likely to occur, the upper and lower grindstones f and g come into contact with each other, and wear is shortened, and the work b is stably conveyed. There is a problem that it is difficult to perform double-sided processing with f and g and sufficient processing accuracy cannot be obtained. Moreover, the work b
Is removed from the holding hole k of the through-feeder c and is sandwiched between the through-feeder c and the grindstone f or the grindstone g, so that it is not properly machined, and in some cases, the upper and lower grindstones f and g are separated from each other. The work b and the grindstones f and g may be damaged when trying to force them through. Especially, lower grindstone g
3B is worn from the state of the imaginary line shown in FIG. 3B to the state of the solid line, a step s is formed between the lower guide e and the lower grindstone g, and the through feeder c and the lower grindstone g are formed. Since the gap between the two is widened, the workpiece b from the lower guide e to the lower grindstone g.
When the workpiece is transferred, the work b easily comes out of the holding hole k and easily falls between the through feeder c and the lower grindstone g, so that the above-mentioned problem frequently occurs.

【0006】本発明は、上記従来のような問題を解消す
ることを課題とし、薄膜状のワークでも安定して相対向
する砥石間での両面加工に供せる両頭研削装置を提供す
ることを主たる目的とするものである。
An object of the present invention is to solve the above-mentioned problems of the prior art, and it is a main object of the present invention to provide a double-sided grinding machine capable of stably performing double-sided processing between grindstones facing each other even in a thin film-like work. It is intended.

【0007】[0007]

【課題を解決するための手段】本発明の両頭研削装置
は、上記のような目的を達成するために、キャリアの保
持孔に嵌め入れられて搬送されるワークを上下のガイド
により案内して、上下に対向する一対の砥石間に導入し
両面加工に供するようにした両頭研削装置において、薄
板状のキャリアを外周部の剛体ホルダにて展張状態に保
持するとともに、この剛体ホルダを介して回転できるよ
うに支持し、キャリアの外周部に設けた保持孔にワーク
を保持して前記搬送を行うようにしたことを主たる特徴
とする。
In order to achieve the above-mentioned object, the double-sided grinding machine of the present invention guides a work, which is inserted into a holding hole of a carrier and conveyed, by upper and lower guides, In a double-headed grinding machine that is introduced between a pair of vertically facing grindstones for double-sided processing, a thin plate-shaped carrier can be held in a stretched state by a rigid holder on the outer peripheral part and rotated through this rigid holder. The main feature is that the work is held in a holding hole provided on the outer peripheral portion of the carrier for carrying the work.

【0008】この場合、前記砥石のレベルに、この砥石
に対応するガイドのレベルを合わせる砥石・ガイド位置
調節手段を備えたものであるのが好適である。
In this case, it is preferable to provide a grindstone / guide position adjusting means for adjusting the level of the guide corresponding to the grindstone to the level of the grindstone.

【0009】さらに、砥石の微小切り込みを行う微小切
り込み機構と、加工後のワークの厚みを計測する計測手
段と、この計測手段での計測情報を基に、微小切り込み
機構を働かせてワークの加工厚みの制御と、切り込み制
御される砥石に対応するガイドの前記砥石微小切り込み
分の位置調節とを行う制御手段を備えたものであるのが
好適である。
Further, based on the measurement information from the measuring means for measuring the thickness of the work after machining, the minute cutting mechanism for performing minute cutting of the grindstone, and the working information of the measuring means, the working thickness of the work is worked. It is preferable to include a control means for controlling the control of No. 2 and adjusting the position of the minute cutting portion of the grindstone of the guide corresponding to the grindstone whose cutting is controlled.

【0010】[0010]

【作用】本発明の両頭研削装置の主たる特徴の上記構成
では、キャリアの保持孔に嵌め入れて搬送されるワーク
を上下のガイドにより案内して、上下に対向する一対の
砥石間に導入し両面加工に供する場合、薄板状のキャリ
アが外周部にて剛体ホルダで展張状態に保持されている
ことにより、各部の伸縮が蓄積しての揺れや垂れはなく
特に外周部で高い剛性を示し、この外周部に保持孔を設
けてワークを保持して搬送することにより、保持孔によ
る搬送に薄板状キャリアの揺れや垂れの影響を無くせる
とともに、キャリアの回転も前記剛体ホルダを介した支
持によって安定したものとなるので、薄板状のキャリア
を利用して薄膜状のワークを搬送するときでも、ワーク
の上下の砥石間に脱落やキャリアと砥石間への挟み込み
等のトラブルなく確実にかつ安定した状態で搬送して加
工に供し、加工が高精度に安定して達成されるようにす
ることができる。また、キャリアのワーク搬送部である
外周部が特に剛性の高い揺れや垂れのない安定したもの
であることにより、キャリアが上下の各砥石と接触して
磨耗し合うようなことも解消する。
In the above-mentioned structure, which is the main feature of the double-sided grinding machine of the present invention, the work which is inserted into the holding hole of the carrier and conveyed is guided by the upper and lower guides and introduced between a pair of vertically facing grindstones. When used for processing, since the thin plate-shaped carrier is held in a stretched state by the rigid holder at the outer peripheral portion, there is no swaying or sagging due to the expansion and contraction of each part, and particularly high rigidity is exhibited at the outer peripheral part. By holding and transporting the work by holding holes in the outer periphery, the effect of shaking and sagging of the thin plate-shaped carrier can be eliminated in the transport by the holding hole, and the rotation of the carrier is also stabilized by the support via the rigid holder. Therefore, even when using a thin plate carrier to convey a thin film work, there is no trouble such as dropping between the upper and lower grindstones of the work or being pinched between the carrier and the grindstone. Subjected to machining are transported by a truly and stable state, it is possible to make the processing is achieved stably with high accuracy. Further, since the outer peripheral portion, which is the work transfer portion of the carrier, has a particularly high rigidity and is stable without swaying or sagging, it is possible to prevent the carrier from contacting the upper and lower grindstones and wearing each other.

【0011】この場合、前記砥石のレベルに、この砥石
に対応するガイドのレベルを合わせる砥石・ガイド位置
調節手段を備えた構成では、この位置調節手段によっ
て、砥石のレベルに、この砥石に対応するガイドのレベ
ルを合わせられるので、砥石のレベルが磨耗等により変
化してもこの砥石との間に段差ができるのを防止し、こ
のような段差によりワークがキャリアの保持孔から脱落
したりキャリアと砥石との間に挟まったりするようなこ
とを確固に防止することができる。
In this case, in the construction provided with the grindstone / guide position adjusting means for adjusting the level of the guide corresponding to the grindstone to the level of the grindstone, the position adjusting means corresponds to the grindstone to the level of the grindstone. Since the level of the guide can be adjusted, even if the level of the grindstone changes due to wear or the like, it is possible to prevent a step from being formed between this and the grindstone. It can be securely prevented from being caught between the grindstone.

【0012】さらに、砥石の微小切り込みを行う微小切
り込み機構と、加工後のワークの厚みを計測する計測手
段と、この計測手段での計測情報を基に、微小切り込み
機構を働かせてワークの加工厚みの制御と、切り込み制
御される砥石に対応するガイドの前記砥石微小切り込み
分の位置調節とを行う制御手段を備えた構成では、制御
手段が、ワークの加工後の厚みに関する計測手段による
計測情報を基に砥石の微小切り込み機構を働かせて、ワ
ークの加工厚みが所定通りになるように砥石のレベルを
砥石の磨耗等に対応して微調整するので、ワークの所定
の加工厚みを常時確保することができるのに併せ、制御
手段はさらに前記計測情報を基に微小切り込み調整した
砥石に対応するガイドの高さを調節するので、前記所定
の加工厚みを確保するための砥石の微小切り込み調整に
よってこれに対応するガイドとの間に段差ができるのを
防止し、ワークの安定した供給とこれによる高精度な加
工とを保証することができる。
Further, a fine cutting mechanism for making a fine cut in the grindstone, a measuring means for measuring the thickness of the work after processing, and a working thickness of the work by operating the fine cutting mechanism on the basis of the measurement information from this measuring means. In the configuration provided with the control means for controlling the position of the grindstone minute cut portion of the guide corresponding to the grindstone to be controlled for cutting, the control means, the measurement information by the measuring means regarding the thickness of the workpiece after processing. The fine cutting mechanism of the grindstone is used as a base, and the level of the grindstone is finely adjusted according to the wear of the grindstone so that the work thickness of the work becomes the predetermined thickness, so that the predetermined working thickness of the work is always secured. In addition to this, the control means further adjusts the height of the guide corresponding to the grindstone finely adjusted based on the measurement information, so that the predetermined processing thickness is secured. It is possible to prevent the can step between the guide corresponding thereto by micro cut adjustment because of the grinding wheel, to ensure and a stable supply and precision by which machining of the workpiece.

【0013】[0013]

【実施例】本発明の両頭研削装置について幾つかの実施
例を示しながら以下具体的に説明する。
EXAMPLES The double-sided grinding machine of the present invention will be specifically described below by showing some examples.

【0014】図1は本発明の第1の実施例としての両頭
研削装置を示している。この装置は図に示すように、キ
ャリア1の保持孔2に嵌め入れて搬送されるワーク3を
上下のガイド4、5により案内して、上下に対向する一
対の砥石6、7間に導入し両面加工に供するようにして
いる。
FIG. 1 shows a double-sided grinding machine as a first embodiment of the present invention. As shown in the figure, this device guides a work 3 which is fitted into a holding hole 2 of a carrier 1 and conveyed by upper and lower guides 4 and 5, and is introduced between a pair of vertically facing grindstones 6 and 7. We are going to process both sides.

【0015】キャリア1は薄板状で、これを外周部に配
した例えば上下一対の環状の剛体ホルダ8a、8b間に
て、太鼓の革のように遠心方向に展張した状態で挟み付
けて保持してある。下側の剛体ホルダ8bの下面には取
付環8cが結合され、この取付環8cと、基板21上に
固定した支持環22との間に例えばクロスローラベアリ
ング10を利用した回転支持機構9を設けて、キャリア
1を剛体ホルダ8a、8bを介し回転できるように支持
し、取付環8cの下部外周に設けたギヤ23に、例えば
モータ24に直結した駆動ギヤ25を噛み合わせて、モ
ータ24によりキャリア1を回転駆動できるようにして
あり、キャリア1の外周部に設けた保持孔2にワーク3
を保持して、キャリア1の回転により前記搬送を行う。
上下ガイド4、5は通常キャリア1の砥石6、7が位置
している部分、および上下からワーク3を供給し、取り
出す部分を除いた範囲に設けられる。
The carrier 1 is in the form of a thin plate, and is held by being sandwiched between, for example, a pair of upper and lower annular rigid body holders 8a and 8b arranged on the outer peripheral portion thereof in a state of being stretched in the centrifugal direction like drum leather. There is. A mounting ring 8c is coupled to the lower surface of the lower rigid holder 8b, and a rotation support mechanism 9 using, for example, a cross roller bearing 10 is provided between the mounting ring 8c and the support ring 22 fixed on the substrate 21. Then, the carrier 1 is rotatably supported via the rigid holders 8a and 8b, and the drive gear 25 directly connected to the motor 24 is engaged with the gear 23 provided on the lower outer periphery of the mounting ring 8c. 1 can be driven to rotate, and the work 3 is inserted into the holding hole 2 provided on the outer peripheral portion of the carrier 1.
And the carrier 1 is rotated to carry the carrier.
The upper and lower guides 4 and 5 are usually provided in a range excluding a portion where the grindstones 6 and 7 of the carrier 1 are located and a portion where the work 3 is supplied and taken out from above and below.

【0016】ここで、キャリア1の保持孔2に嵌め入れ
て搬送されるワーク3を上下のガイド4、5により案内
して、上下に対向する一対の砥石6、7間に導入し両面
加工に供するのに、薄板状のキャリア1が外周部にて剛
体ホルダ8a、8bで展張状態に保持されていることに
より、各部の伸縮が蓄積しての揺れや垂れはなく特に外
周部で高い剛性を示し、この外周部に保持孔2を設けて
ワーク3を保持して搬送することにより、保持孔2によ
る搬送に薄板状キャリア1の揺れや垂れの影響を無くせ
るとともに、キャリア1の回転が前記剛体ホルダ8a、
8bを介した支持により安定したものとなるので、薄板
状のキャリア1を利用して薄膜状のワーク3を搬送する
ときでも、ワーク3の上下の砥石6、7間への脱落やキ
ャリア1と砥石6、7間への挟み込み等のトラブルなく
確実にかつ安定した状態で搬送して加工に供し、加工が
高精度に安定して達成されるようにすることができる。
また、キャリア1のワーク搬送部である特に外周部が剛
性の高い揺れや垂れのない安定したものであることによ
り、キャリア1が上下の各砥石6、7と接触して磨耗し
合うことも解消し、耐久性が向上して前記高精度な加工
を長期に保証することができる。
Here, the work 3 fitted into the holding hole 2 of the carrier 1 and conveyed is guided by the upper and lower guides 4 and 5, and is introduced between a pair of vertically facing grindstones 6 and 7 for double-sided processing. In addition, since the thin plate-shaped carrier 1 is held in the stretched state by the rigid body holders 8a and 8b at the outer peripheral portion, expansion and contraction of each portion does not cause swaying or sagging, and particularly high rigidity at the outer peripheral portion. As shown, by providing the holding hole 2 in the outer peripheral portion and holding and transporting the work 3, it is possible to eliminate the influence of shaking and sagging of the thin plate-shaped carrier 1 in the transport by the holding hole 2 and the rotation of the carrier 1 Rigid body holder 8a,
Since it becomes stable by being supported via 8b, even when the thin film-shaped work 3 is conveyed by using the thin plate-shaped carrier 1, the work 3 falls off between the upper and lower grindstones 6 and 7 and the carrier 1. The grindstones 6 and 7 can be conveyed and processed in a reliable and stable state without any trouble such as being caught between the grindstones 6 and 7, and the processing can be stably achieved with high accuracy.
Further, since the outer periphery of the carrier 1, which is the work transfer part, has a high rigidity and is stable without swaying or sagging, it is possible to prevent the carrier 1 from contacting the upper and lower grindstones 6 and 7 and wearing each other. However, the durability is improved and the highly accurate processing can be guaranteed for a long period of time.

【0017】もっとも、キャリア1を外周部で展張状態
に保持する剛体ホルダ、およびこの剛体ホルダを介した
キャリア1の回転支持構造、キャリア1の回転駆動機構
の具体的構成は本実施例に限定されるものではなく、種
々に設計することができる。
However, the concrete structure of the rigid holder for holding the carrier 1 in the stretched state at the outer peripheral portion, the rotation support structure of the carrier 1 via this rigid holder, and the rotary drive mechanism of the carrier 1 are limited to this embodiment. It is not a thing but various designs can be made.

【0018】なお、上下の砥石6、7は回転駆動される
スピンドル12、13の先端に設けられ、図示しない上
下位置調節機構によって従来同様に相互の間隔がワーク
3の加工厚みに合わせて設定できるようにされている。
したがって、ワーク3を所望の加工厚みに加工できる。
本実施例では上下の砥石6、7双方が高さ調節されるよ
うな形式のものを採用しているが、本発明は上方の砥石
6のみが高さ調節されるものにも適用できる。
The upper and lower grindstones 6 and 7 are provided at the tips of the spindles 12 and 13 that are driven to rotate, and the mutual distance can be set in accordance with the processing thickness of the work piece 3 by a vertical position adjusting mechanism (not shown) as in the conventional case. Is being done.
Therefore, the work 3 can be processed into a desired processing thickness.
In the present embodiment, the type in which both the upper and lower grindstones 6 and 7 are adjusted in height is adopted, but the present invention is also applicable to the one in which only the upper grindstone 6 is adjusted in height.

【0019】本実施例ではさらに、前記各砥石6、7の
磨耗状態によるレベル変化をそれぞれに対応して設置し
たレベルセンサ31、32により検出し、この砥石6、
7のレベルに対応する上下ガイド4、5のレベルを前記
レベルセンサ31、32によるレベル検出情報を基に手
動で合わせる砥石・ガイド位置調節手段33を備えてい
る。
Further, in this embodiment, level changes due to the wear state of the respective grindstones 6 and 7 are detected by the level sensors 31 and 32 installed corresponding to the respective grindstones 6 and 7.
A grindstone / guide position adjusting means 33 for manually adjusting the levels of the upper and lower guides 4 and 5 corresponding to the level 7 according to the level detection information from the level sensors 31 and 32 is provided.

【0020】砥石・ガイド位置調節手段33が手動であ
っても、これの操作によって、砥石6、7のレベルに、
この砥石6、7に対応するガイド4、5のレベルを合わ
せることにより、砥石6、7のレベルが磨耗等により変
化してもこの砥石6、7との間に段差ができるのを防止
するので、このような段差によりワーク3がキャリア1
の保持孔2から脱落したりキャリア1と砥石6、7との
間に挟まったりするようなことを確固に防止することが
できる。
Even if the whetstone / guide position adjusting means 33 is manually operated, the operation of the whetstone / guide position adjusting means 33 brings the whetstones 6 and 7 to the level.
By adjusting the levels of the guides 4 and 5 corresponding to the grindstones 6 and 7, it is possible to prevent a step from being formed between the grindstones 6 and 7 even if the levels of the grindstones 6 and 7 change due to wear or the like. , Work 3 is carrier 1 due to such steps
It is possible to securely prevent the carrier 1 from falling off from the holding hole 2 and being caught between the carrier 1 and the grindstones 6 and 7.

【0021】本実施例の場合、砥石・ガイド位置調節手
段33は、下ガイド5についてはこれの被ガイド軸35
を基板21に設けたスライド軸受34によって上下摺動
できるように支持するとともに、この被ガイド軸35を
基板21との間で上方に付勢するばね36を働かせると
ともに、被ガイド軸35の下端に取り付けたマイクロメ
ータヘッド37の位置規制突子37aが基板21の下面
に当接して、被ガイド軸35を介した下ガイド5の高さ
レベルを、位置規制突子37aのマイクロメータ方式で
の微小な突出量調節によって微細に設定できるようにし
てある。また上ガイド4についてはこれに取付たスライ
ドアーム38をボール入りの精密直進ガイド39により
上下摺動できるように支持するとともに、スライドアー
ム38を今1つのマイクロメータヘッド41の位置規制
突子41aによって下方より受止め、上ガイド4のレベ
ルを位置規制突子41aのマイクロメータ方式での微小
な突出量調節によって微細に設定できるようにしてあ
る。
In the case of the present embodiment, the grindstone / guide position adjusting means 33 has a guided shaft 35 for the lower guide 5.
Is supported by a slide bearing 34 provided on the base plate 21 so as to be vertically slidable, and a spring 36 for urging the guided shaft 35 between the base shaft 21 and the base plate 21 is actuated at the lower end of the guided shaft 35. The position regulating protrusion 37a of the attached micrometer head 37 abuts the lower surface of the substrate 21, and the height level of the lower guide 5 via the guided shaft 35 is adjusted to be small by the micrometer system of the position regulating protrusion 37a. Fine adjustment is possible by adjusting the amount of protrusion. Regarding the upper guide 4, a slide arm 38 attached to the upper guide 4 is supported by a precision linear guide 39 containing a ball so that it can slide up and down, and the slide arm 38 is supported by a position regulating protrusion 41a of another micrometer head 41. The level of the upper guide 4 is received from below, and the level of the upper guide 4 can be finely set by finely adjusting the protrusion amount of the position regulating protrusion 41a by the micrometer method.

【0022】したがって、レベルセンサ31、32の検
出レベル情報に基づく上下ガイド4、5の前記レベル調
節を、それぞれのマイクロメータヘッド37および41
の位置規制突子37a、41aの突出量の微小調節によ
って微小に精密に行えるので、磨耗等によってレベルが
微小に変化する砥石6、7に、これに対応するガイド
4、5のレベルを正確に一致させることができる。
Therefore, the level adjustment of the upper and lower guides 4, 5 based on the detection level information of the level sensors 31, 32 is performed by the respective micrometer heads 37, 41.
The position control protrusions 37a and 41a can be finely and precisely adjusted by finely adjusting the protrusion amounts, so that the levels of the guides 4 and 5 corresponding to the whetstones 6 and 7 whose levels change minutely due to wear can be accurately adjusted. Can be matched.

【0023】もっとも、マイクロメータヘッド等の砥石
・ガイド位置調節手段33の位置調節部材をモータ等の
自動駆動手段に連結し、レベルセンサ31、32の検出
レベル情報に応じて前記自動駆動手段を働かせるように
制御すると云ったことにより、上下ガイド4、5のレベ
ルを対応する砥石6、7のレベルに自動的に一致させる
ようにすることもできる。また上下の砥石6、7の一方
のみを他方側に近づける位置調節によって、ワーク3を
所定の加工厚みに両面加工することができ、この場合も
本発明の範疇に属する。
Of course, the position adjusting member of the grindstone / guide position adjusting means 33 such as a micrometer head is connected to the automatic driving means such as a motor, and the automatic driving means is operated according to the detection level information of the level sensors 31 and 32. Since the above control is performed, the levels of the upper and lower guides 4 and 5 can be automatically matched with the levels of the corresponding grindstones 6 and 7. Further, the work 3 can be double-sided processed to a predetermined processing thickness by adjusting the positions of only one of the upper and lower grindstones 6 and 7 closer to the other side, and this case also belongs to the category of the present invention.

【0024】さらに、砥石6、7のレベル検出の具体的
方式や、上下ガイド4、5の上下位置調節機構は、本実
施例のものに限られることはなく、種々に設計すること
ができる。
Further, the concrete method of detecting the level of the grindstones 6 and 7 and the vertical position adjusting mechanism of the vertical guides 4 and 5 are not limited to those of the present embodiment, but can be variously designed.

【0025】図2は本発明の第2の実施例としての両頭
研削装置を示している。本実施例の装置は、図に示すよ
うに砥石6、7の微小切り込みを上方の砥石6について
のみ行う微小切り込み機構51と、加工後のワーク3の
厚みを計測する計測手段52と、この計測手段52での
計測情報を基に、微小切り込み機構51を働かせるワー
ク3の加工厚みの制御と、切り込み制御される砥石6に
対応するガイド4の前記砥石微小切り込み分の砥石・ガ
イド位置調節手段33を介した位置調節とを行う制御手
段64を備えた点で第1の実施例と異なっている。
FIG. 2 shows a double-sided grinding machine as a second embodiment of the present invention. The apparatus of the present embodiment, as shown in the figure, has a fine cutting mechanism 51 for finely cutting the grindstones 6 and 7 only for the upper grindstone 6, a measuring means 52 for measuring the thickness of the work 3 after processing, and this measurement. Based on the measurement information of the means 52, the control of the working thickness of the work 3 which operates the minute cutting mechanism 51, and the grindstone / guide position adjusting means 33 of the grindstone minute cut of the guide 4 corresponding to the grindstone 6 to be cut controlled. This is different from the first embodiment in that a control means 64 for performing position adjustment via the is provided.

【0026】この異なった点のみ以下説明し、第1の実
施例と重複する説明は省略する。微小切り込み機構51
はモータ50により駆動されるボールねじ53に勾配カ
ム54を螺合させるとともに、勾配カム54の斜面54
aにスピンドル12に設けたカムフォロア55を受止
め、モータ50で適宜に駆動するボールねじ53により
勾配カム54を微小量ずつ後退させることで、スピンド
ル12を微小量ずつ下動させて上砥石6の微小切り込み
を自在に行えるようにしてある。
Only the different points will be described below, and the description overlapping with the first embodiment will be omitted. Micro-cutting mechanism 51
Causes the slope cam 54 to be screwed onto the ball screw 53 driven by the motor 50, and the slope 54 of the slope cam 54
The cam follower 55 provided on the spindle 12 is received at a, and the gradient cam 54 is moved backward by a minute amount by the ball screw 53 which is appropriately driven by the motor 50, so that the spindle 12 is moved down by a minute amount and the upper grindstone 6 moves. It is designed so that minute cuts can be made freely.

【0027】砥石・ガイド位置調節手段33は、第1の
実施例の場合と異なり上ガイド4についてだけ設けてあ
り、モータ56によって駆動されるボールねじ57に、
上ガイド4に取り付けたスライドアーム38を螺合さ
せ、モータ56で適宜に駆動するボールねじ57により
スライドアーム38を微小量ずつ下動させることで、上
ガイド4を微小量ずつ下動させて上砥石6の微小切り込
み量分だけ下動させ、微小切り込み制御される上砥石6
のレベルに、上ガイド4のレベルを常に一致させられる
ようにしてある。
Unlike the case of the first embodiment, the grindstone / guide position adjusting means 33 is provided only for the upper guide 4, and the ball screw 57 driven by the motor 56,
By screwing the slide arm 38 attached to the upper guide 4 and moving the slide arm 38 downward by a minute amount by the ball screw 57 that is appropriately driven by the motor 56, the upper guide 4 is moved downward by a minute amount. The upper grindstone 6 which is moved down by the minute cut amount of the grindstone 6 to control the minute cut
The level of the upper guide 4 can be always matched with the level of.

【0028】加工後のワーク3は、吸引ノズル等を利用
したアンローダ58により、キャリア1からピックアッ
プして取り出し、搬送コンベア59に移載して所定位置
に搬送され処理されるようにしてあるが、この搬送コン
ベア59の途中に前記計測手段52が設けられている。
計測手段52は搬送コンベア59にて搬送される加工後
のワーク3が上下一対のセンサ52a、52b間を通過
するときの離間間隔等によって、加工後のワーク3の加
工厚みを計測するようにしている。もっとも、どのよう
な方式でこの計測を行ってもよいのは勿論である。
The work 3 after processing is picked up and taken out from the carrier 1 by an unloader 58 using a suction nozzle or the like, transferred to a transfer conveyor 59 and transferred to a predetermined position for processing. The measuring means 52 is provided in the middle of the transport conveyor 59.
The measuring means 52 measures the processing thickness of the processed work 3 by the separation distance or the like when the processed work 3 conveyed by the conveyor 59 passes between the pair of upper and lower sensors 52a and 52b. There is. However, it goes without saying that this measurement may be performed by any method.

【0029】制御手段64はマイクロコンピュータ等を
利用し、計測手段52からの計測情報をメータ61によ
り確認できるようにしてあるほか、計測情報をもとに前
記2つのモータ50、56を動作制御し、前記の砥石6
の微小切り込み制御と、これに伴う上ガイド4の位置調
節とを達成する。
The control means 64 uses a microcomputer or the like so that the measurement information from the measurement means 52 can be confirmed by the meter 61, and the operation of the two motors 50, 56 is controlled based on the measurement information. , The above whetstone 6
And the position adjustment of the upper guide 4 accompanying this.

【0030】このように、制御手段64が、ワーク3の
加工後の厚みに関する計測手段52による計測情報を基
に砥石6の微小切り込み機構51を働かせて、ワーク3
の加工厚みが所定通りになるように砥石6のレベルを砥
石6の磨耗等に対応して微調整するので、ワーク3の所
定の加工厚みを常時確保することができるのに併せ、制
御手段64はさらに前記計測情報を基に微小切り込み調
整した砥石6に対応するガイド4の高さを調節するの
で、前記所定の加工厚みを確保するための砥石6の微小
切り込み調整によってこれに対応するガイド4との間に
段差ができるのを防止し、ワーク3の安定した供給とこ
れによる高精度な加工とを保証することができる。
As described above, the control means 64 activates the minute cutting mechanism 51 of the grindstone 6 based on the measurement information by the measurement means 52 on the thickness of the work 3 after processing, and the work 3
Since the level of the grindstone 6 is finely adjusted in accordance with abrasion of the grindstone 6 so that the processed thickness of the workpiece 3 becomes a predetermined value, a predetermined processed thickness of the work 3 can be always ensured and the control means 64 is also provided. Further adjusts the height of the guide 4 corresponding to the grindstone 6 finely adjusted based on the measurement information. Therefore, the guide 4 corresponding to this is adjusted by the fine cut adjustment of the grindstone 6 to secure the predetermined processing thickness. It is possible to prevent a step from being formed between the workpiece and the workpiece, and to ensure the stable supply of the work 3 and the highly accurate processing thereby.

【0031】この砥石の微小切り込み量の調節と、これ
に対応したガイドの位置調節機能とを下の砥石7と下の
ガイド5とに適用することができるし、上下の砥石6、
7と上下のガイド4、5とに同時に適用するようにもで
きる。
The adjustment of the minute cutting amount of the grindstone and the position adjusting function of the guide corresponding thereto can be applied to the lower grindstone 7 and the lower guide 5, and the upper and lower grindstones 6,
7 and the upper and lower guides 4, 5 can be applied simultaneously.

【0032】しかも本実施例のこのような機構を第1の
実施例に併用することもできる。
Moreover, such a mechanism of this embodiment can be used in combination with the first embodiment.

【0033】[0033]

【発明の効果】本発明の両頭研削装置の主たる特徴によ
れば、薄板状のキャリアが外周部にて剛体ホルダで展張
状態に保持されていることにより、各部の伸縮が蓄積し
ての揺れや垂れはなく特に外周部で高い剛性を示し、こ
の外周部に保持孔を設けてワークを保持して搬送するこ
とにより、保持孔による搬送に薄板状キャリアの揺れや
垂れの影響を無くせるとともに、キャリアの回転も前記
剛体ホルダを介した支持によって安定したものとなるの
で、薄板状のキャリアを利用して薄膜状のワークを搬送
し両頭研削装置での両面加工に供するときでも、ワーク
の上下の砥石間に脱落やキャリアと砥石間への挟み込み
等のトラブルなく確実にかつ安定した状態で搬送して加
工に供し、加工が高精度に安定して達成されるようにす
ることができる。また、キャリアのワーク搬送部である
外周部が特に剛性の高い揺れや垂れのない安定したもの
であることにより、キャリアが上下の各砥石と接触して
磨耗し合うようなことも解消し、耐久性が向上して前記
高精度な加工を長期に保証することができる。
According to the main feature of the double-sided grinding machine of the present invention, since the thin plate-shaped carrier is held in the stretched state by the rigid holder at the outer peripheral portion, expansion and contraction of each portion accumulates and shakes. There is no sagging, especially high rigidity in the outer peripheral part, and by holding a work hole in this outer peripheral part and holding and transporting the work, it is possible to eliminate the influence of swaying and sagging of the thin plate-like carrier in the carrying by the holding hole, Since the rotation of the carrier is also stabilized by the support via the rigid holder, even when the thin film carrier is used to carry a thin film-like work and to perform double-sided processing with a double-head grinding machine, It is possible to convey the material in a reliable and stable state for processing without troubles such as dropping between the grinding wheels or being pinched between the carrier and the grinding wheel, and to perform the processing with high accuracy and stability. In addition, since the outer peripheral part that is the work transfer part of the carrier is highly rigid and stable without swaying or sagging, it is eliminated that the carrier contacts the upper and lower grindstones and wears each other, and it is durable. Therefore, it is possible to guarantee the high-precision processing for a long period of time.

【0034】この場合、前記各砥石のレベルを検出し、
この砥石に対応するガイドのレベルを前記検出レベルに
合わせる砥石、ガイド位置調節手段を備えた構成のもの
によれば、砥石のレベルに、この砥石に対応するガイド
のレベルを合わせることにより、砥石のレベルが磨耗等
により変化してもこの砥石との間に段差ができるのを防
止し、このような段差によりワークがキャリアの保持孔
から脱落したりキャリアと砥石との間に挟まったりする
ようなことを確固に防止することができる。
In this case, the level of each grindstone is detected,
According to the grindstone that adjusts the level of the guide corresponding to the grindstone to the detection level, and the configuration including the guide position adjusting means, by adjusting the level of the guide corresponding to the grindstone to the level of the grindstone, Even if the level changes due to wear or the like, it is possible to prevent a step from being formed between the whetstone and such a step, and such a step causes the work piece to fall out of the holding hole of the carrier or get caught between the carrier and the whetstone. It can be firmly prevented.

【0035】さらに、砥石の微小切り込みを行う微小切
り込み機構と、加工後のワークの厚みを計測する計測手
段と、この計測手段での計測情報を基に、微小切り込み
機構を働かせるワークの加工厚みの制御と、切り込み制
御される砥石に対応するガイドの前記砥石微小切り込み
分の位置調節とを行う制御手段を備えた構成のものによ
れば、ワークの加工後の厚みに関する計測情報を基に、
ワークの加工厚みが所定通りになるように砥石のレベル
を砥石の磨耗等に対応して微調整し、ワークの所定の加
工厚みを常時確保するのに併せ、前記計測情報を基に微
小切り込み調整した砥石に対応するガイドの高さを調節
して、前記所定の加工厚みを確保するための砥石の微小
切り込み調整によってこれに対応するガイドとの間に段
差ができるのを防止し、ワークの安定した供給とこれに
よる高精度な加工とを保証することができる。
Further, a fine cutting mechanism for finely cutting the grindstone, a measuring means for measuring the thickness of the work after processing, and a machining thickness of the work for operating the fine cutting mechanism based on the measurement information by the measuring means. According to a configuration including a control means for performing position adjustment of the grindstone minute cut portion of the guide corresponding to the grindstone to be cut controlled, based on the measurement information on the thickness of the workpiece after processing,
Finely adjust the level of the grindstone according to the wear of the grindstone so that the work thickness of the work is as specified, and at the same time to always secure the predetermined work thickness of the work, fine cut adjustment based on the above measurement information By adjusting the height of the guide corresponding to the grindstone, it is possible to prevent a step from being formed between the guide and the corresponding fine adjustment of the grindstone to secure the predetermined processing thickness, and stabilize the work. It is possible to guarantee the supply and the highly accurate processing by this.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例としての両頭研削装置の
主要構成を示す断面図である。
FIG. 1 is a sectional view showing the main configuration of a double-sided grinding machine as a first embodiment of the present invention.

【図2】本発明の第2の実施例としての両頭研削装置の
要部を示す断面図である。
FIG. 2 is a sectional view showing an essential part of a double-sided grinding machine as a second embodiment of the present invention.

【図3】従来の両頭研削装置の主要構成を示す断面図で
ある。
FIG. 3 is a cross-sectional view showing the main configuration of a conventional double-headed grinding machine.

【符号の説明】[Explanation of symbols]

1 キャリア 2 保持孔 3 ワーク 4、5 ガイド 6、7 砥石 8a、8b 剛体ホルダ 9 回転支持機構 21 基板 24 モータ 31、32 レベルセンサ 33 砥石・ガイド位置調節手段 51 微小切り込み機構 52 計測手段 64 制御手段 1 Carrier 2 Holding Hole 3 Work 4, 5 Guide 6, 7 Grinding Stones 8a, 8b Rigid Holder 9 Rotation Support Mechanism 21 Substrate 24 Motor 31, 32 Level Sensor 33 Grindstone / Guide Position Adjusting Means 51 Micro Cutting Mechanism 52 Measuring Means 64 Controlling Means

───────────────────────────────────────────────────── フロントページの続き (72)発明者 高橋 正行 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masayuki Takahashi 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 キャリアの保持孔に嵌め入れられて搬送
されるワークを上下のガイドにより案内して、上下に対
向する一対の砥石間に導入し両面加工に供するようにし
た両頭研削装置において、 薄板状のキャリアを外周部の剛体ホルダにて展張状態に
保持するとともに、この剛体ホルダを介して回転できる
ように支持し、キャリアの外周部に設けた保持孔にワー
クを保持して前記搬送を行うようにしたことを特徴とす
る両頭研削装置。
1. A double-headed grinding machine in which a workpiece, which is inserted into a holding hole of a carrier and conveyed, is guided by upper and lower guides and is introduced between a pair of vertically facing grindstones for double-sided processing. The thin plate-shaped carrier is held in a stretched state by a rigid body holder on the outer peripheral part, and is supported so as to be rotatable via this rigid body holder, and the workpiece is held in a holding hole provided on the outer peripheral part of the carrier to carry the carrier. A double-sided grinding machine characterized by being performed.
【請求項2】 前記砥石のレベルに、この砥石に対応す
るガイドのレベルを合わせる砥石・ガイド位置調節手段
を備えた請求項1に記載の両頭研削装置。
2. The double-sided grinding machine according to claim 1, further comprising a grindstone / guide position adjusting means for adjusting a level of a guide corresponding to the grindstone to a level of the grindstone.
【請求項3】 砥石の微小切り込みを行う微小切り込み
機構と、加工後のワークの厚みを計測する計測手段と、
この計測手段での計測情報を基に、微小切り込み機構を
働かせるワークの加工厚みの制御と、切り込み制御され
る砥石に対応するガイドの前記砥石微小切り込み分の位
置調節とを行う制御手段を備えた請求項1、2のいずれ
かに記載の両頭研削装置。
3. A micro-cutting mechanism for micro-cutting a grindstone, and a measuring means for measuring the thickness of a work after processing,
Based on the measurement information by this measuring means, the control means for controlling the machining thickness of the work that operates the minute cutting mechanism and adjusting the position of the minute cutting portion of the grindstone of the guide corresponding to the grindstone whose cutting is controlled are provided. The double-sided grinding device according to claim 1.
JP20615294A 1994-08-31 1994-08-31 Double-head grinding apparatus and method Expired - Fee Related JP3290825B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP20615294A JP3290825B2 (en) 1994-08-31 1994-08-31 Double-head grinding apparatus and method
US08/522,097 US5755613A (en) 1994-08-31 1995-08-31 Two grinder opposed grinding apparatus and a method of grinding with the apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20615294A JP3290825B2 (en) 1994-08-31 1994-08-31 Double-head grinding apparatus and method

Publications (2)

Publication Number Publication Date
JPH0871898A true JPH0871898A (en) 1996-03-19
JP3290825B2 JP3290825B2 (en) 2002-06-10

Family

ID=16518664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20615294A Expired - Fee Related JP3290825B2 (en) 1994-08-31 1994-08-31 Double-head grinding apparatus and method

Country Status (1)

Country Link
JP (1) JP3290825B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110524385A (en) * 2019-08-31 2019-12-03 厦门曦哲贸易有限公司 A kind of spinning disk polishing machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110524385A (en) * 2019-08-31 2019-12-03 厦门曦哲贸易有限公司 A kind of spinning disk polishing machine

Also Published As

Publication number Publication date
JP3290825B2 (en) 2002-06-10

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