JPH0868899A - Holder for optical element - Google Patents

Abstract

PURPOSE: To provide a holder capable of mitigating the distortion of optical elements due to aging and temperature change. CONSTITUTION: In a holder 5, a contact part 70 for contacting with an optical element 2 as a holding object is provided. The contact part 10 is supported with an elastic body 71 elastically changeable more significantly than the optical element 2 by the force in the direction perpendicular to the optical axis AX of the optical element 2. By this, distortion of the optical element 2 is mitigated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holder and a holding method suitable for holding a highly accurate optical element used in an X-ray microscope, an X-ray analyzer or the like.

[0002]

2. Description of the Related Art The wavelength of soft X-rays is 0.1 nm to 30 nm, which is shorter than the wavelength of visible light (about 380 nm to 770 nm) and has a high material permeability. The use of this soft X-ray in an X-ray device such as a microscope or an analyzer produces a great feature that the internal structure of a substance can be observed with higher resolution than before. However, since the wavelength of the soft X-ray is shorter than that of visible light, the shape accuracy of the reflecting surface is required to be very high. With the development of ultra-fine processing technology in recent years, X
It has become possible to manufacture an optical element having a high shape accuracy that can be used for a reflecting mirror for X-ray, and it has come to be applied to an X-ray microscope, an analyzer, and the like.

Since X-rays cannot use a conventional lens utilizing a refraction effect such as visible light, a Wolter type oblique incidence reflecting mirror in which a rotation axis symmetric hyperboloid and a rotation axis symmetric elliptical surface are combined, a rotation. An oblique-incidence reflecting mirror that uses total reflection of incident X-rays from a grazing angle such as an axisymmetric elliptical mirror,
An X-ray optical element using a multilayer film such as a Schwarzschild type optical system in which two spherical mirrors are combined has been developed.

7 and 8 are a plan view and a sectional view showing an example of a method of holding an X-ray optical element used in the X-ray apparatus. In this example, the X-ray optical element 2 is inserted into the through hole 1a of the holder 1, and the visible light lens is fixed between the inner peripheral surface of the through hole 1a and the outer peripheral surface of the optical element 2. A similar adhesive 3 is filled.

[0005]

7 and 8 described above.
In the fixing method, since the holder 1 has higher rigidity than the optical element 2, the optical element 2 is deformed due to the volume change accompanying the drying of the adhesive 3. Further, the optical element 2 is also deformed by the expansion and contraction of the holder 1 due to the temperature change. In conventional lenses and reflectors for visible light, these shape deformations hardly affected the optical performance, but in high-precision optical elements for soft X-rays that use wavelengths shorter than visible light, The shape deformation of these reflecting mirrors greatly affects the optical performance. Therefore,
In order to fully demonstrate the optical performance of high precision optical elements,
It is necessary to consider that the high-precision optical element is not affected by the deformation of the holder due to the volume change due to the drying of the adhesive or the temperature change.

It is an object of the present invention to provide a holder and a holding method capable of suppressing the deformation of an optical element due to changes over time and changes in temperature.

[0007]

1 and 2 showing an embodiment, the holder 5 of the invention of claim 1 has a joint portion 70 to be joined to the optical element 2 to be held. To have. Then, the joint portion 70 is supported by the elastic body 71 whose rigidity in the direction orthogonal to the optical axis AX of the optical element 2 is set lower than that of the optical element 2 to achieve the above-described object. The invention of claim 2 is applied to the holder 5 of claim 1, and a plurality of bonding portions 70 are provided around the optical axis AX of the optical element 2. The holder 5 of the invention of claim 3 comprises a holder body 6 and
A holding arm 7 attached to the holder main body 6 for holding the optical element 2 to be held. And the holding arm 7
Further, the joint portion 70 joined to the optical element 2 and the leaf spring-like elastic body that connects the joint portion 70 and the holder body 6 in a state where the bending direction is directed to the joint direction between the joint portion 70 and the optical element 2. 7
1 is provided to achieve the above-mentioned object. The invention of claim 4 is applied to the holder 5 of claim 3, and a plurality of holding arms 7 are provided so as to be rotationally symmetrical about the optical axis AX of the optical element 2. An elastic body 71 is provided on each holding arm 7 symmetrically with respect to a virtual plane IP passing through both the center position of the joint portion 70 of each holding arm 7 and the optical axis AX of the optical element 2. In the holding method of the invention of claim 5, the holder 5 according to any one of claims 2 to 4 is used, and the joint portion 70 of the holder 5 and the optical element 2 are bonded.

[0008]

According to the first and second aspects of the invention, when a force in a direction orthogonal to the optical axis AX acts between the holder 5 and the optical element 2,
The elastic body 71 is elastically deformed and the deformation of the optical element 2 is suppressed. According to the second aspect of the invention, the restoring forces for elastic deformation of the elastic body 71 act on the optical element 2 from different directions,
The optical element 2 is constrained by the balance of these restoring forces. According to the inventions of claims 3 and 4, the rigidity required for supporting the holder 5 itself is given to the holder body 6, and the rigidity in the bending direction of the leaf spring-like elastic body 71 is more sufficient than that of the optical element 2. Can be set small. Thereby, when a force in a direction orthogonal to the optical axis AX is applied between the holder 5 and the optical element 2, the elastic body 71 is deformed and the deformation of the optical element 2 is suppressed. According to the leaf spring-like elastic body 71, since the rigidity in the bending direction can be set low and the width in the optical axis AX direction can be set sufficiently large, it is sufficient to support the optical element 2 in the optical axis AX direction. Rigidity can be given to the holder 5. According to the invention of claim 4, the optical axis AX of the optical element 2 is held at a constant position by the balance of the restoring force against the elastic deformation of the elastic body 71. Since the elastic body 71 is deformed equally with respect to the virtual plane IP, no twisting force acts on the optical element 2. In the fifth aspect of the invention, only the plurality of joints 70 can be adhered to the optical element 2 to efficiently fix the optical element 2.

Incidentally, in the section of means and action for solving the above-mentioned problems for explaining the constitution of the present invention, the drawings of the embodiments are used to make the present invention easy to understand. It is not limited to.

[0010]

Embodiments of the present invention will be described with reference to FIGS. 1 and 2 show a state in which the optical element 2 is held by the holder 5 according to the embodiment of the present invention. As is clear from these figures, the holder 5 according to the present embodiment is integrally formed with the disc-shaped holder main body 6 and the inner peripheral surface of the through hole 60 at the center of the holder main body 6 at appropriate intervals. It has three molded holding arms 7. The central axis of the holder body 6 is the optical element 2 to be held.
And the holding arm 7 is arranged so as to have rotational symmetry (pitch of 120 °) around the optical axis AX. The holding arms 7 have the same shape and size. The optical element 2 is the same as that shown in FIGS. Reference numeral 61 designates mounting holes provided at three locations in the circumferential direction for fixing the holder main body 6 to other parts.

The holding arms 7 are joined to the outer peripheral surface of the optical element 2 with the adhesive 3, and the joining portions 70 are arranged on both sides of each joining portion 70 to connect the joining portion 70 and the holder body 6. And a leaf spring-like elastic body 71. Joining part 70 and optical element 2
The thickness t of the elastic body 71 in the joining direction with and is set to be sufficiently smaller than the thickness of the joining portion 70 in the same direction and the wall thickness of the optical element 2, and the rigidity of the elastic body 71 in the joining direction. Is much smaller than the rigidity of the optical element 2 in the same direction. on the other hand,
The width of the elastic body 71 in the direction of the optical axis AX (the direction orthogonal to the paper surface of FIG. 1) is equal to the thickness of the holder main body 6 in the same direction, so that the optical element 2 is supported in the direction of the optical axis AX. The sufficient rigidity is ensured in the elastic body 71. Furthermore, assuming a virtual plane IP that passes through both the center position of each joint 70 and the optical axis AX of the optical element 2, the elastic body 71 of each holding arm 7 is provided symmetrically across the virtual plane IP. Has been. Therefore, when a force in the radial direction of the optical element 2 is applied to the joint portion 70, the left and right elastic bodies 71 move to the virtual plane IP.
Deforms uniformly in the direction of.

In the above-described joining structure of the holder 5 and the optical element 2, even if the adhesive 3 is applied to the extent that it protrudes from the joining portion 70 as shown in FIG. 3, when these are dried, as shown in FIG. The volume of the adhesive 3 decreases and each joint 70 receives a tensile force toward the center of the optical element 2 in the radial direction. At this time, the elastic body 71 having the lowest rigidity is flexibly deformed in the radial direction of the optical element 2 and the deformation of the optical element 2 is suppressed. Since the joints 70 are arranged rotationally symmetrically around the optical axis AX, and the elastic bodies 71 are provided symmetrically with respect to the virtual plane IP for each joint 70, the restoring force for the deformation of the elastic body 71 is optical. The optical axes AX are locked in the same position in equilibrium with each other on the axis AX. A force for twisting and deforming the optical element 2 in the circumferential direction is also not generated. Since only the joint portion 70 is adhered without applying the adhesive 3 to the entire circumference of the optical element 2, the consumption amount of the adhesive 3 is saved and the adhering work is made efficient.

FIGS. 5 and 6 show changes in the shape of the holder 5 with changes in temperature. When the holder body 6 or the elastic body 71 expands from the state shown in FIG. 5, the elastic body 71 is deformed to absorb thermal displacement as shown in FIG.
Deformation is prevented. Also in this case, the optical axis AX of the optical element 2 is constrained to the same position due to the symmetry of the arrangement of the joint portions 70 and the symmetry of the elastic body 71 with respect to each joint portion 70, and the twisting force of the optical element 2 is not generated. Regarding the thickness t of the elastic body 71, a thickness having an optimal elastic force can be arbitrarily selected according to the size and weight of the optical element 2 to be held.

The present invention is not limited to the above-mentioned embodiments, and the target optical element is not limited to the one for X-rays. Even in the case of an optical element for visible light, when high shape accuracy is required, the present invention can similarly suppress the influence of shape change after bonding and thermal deformation due to temperature.

In addition, although three joints are provided in the embodiment,
Two or four or more may be provided. In either case, it is desirable that the joints are arranged rotationally symmetrically around the optical axis of the optical element. The present invention is applicable not only to the case where the optical element is held from the outer circumference, but also to the case where the optical element is held from the inner circumference side. The elastic body may be another spring means such as a disc spring. An elastic material having a large anisotropy of elastic coefficient may be arranged so that the elastic coefficient becomes small in the bonding direction of the optical element.

[0016]

As described above, according to the present invention,
It is possible to suppress the deformation of the optical element by deforming the elastic body with respect to the force acting between the holder and the optical element in the direction orthogonal to the optical axis. Therefore, it is possible to provide a highly reliable holder and a holding method in which the deformation of the optical element with respect to a change with time or a temperature change of the holder is small. Particularly, according to the inventions of claims 3 and 4,
While using a leaf spring-like elastic body to secure sufficient rigidity to support the optical element in the optical axis direction, reduce the rigidity of the elastic body in the direction orthogonal to the optical axis to suppress deformation of the optical element. You can According to the second and fourth aspects of the invention, the optical element can be constrained to a fixed position in the plane orthogonal to the optical axis by the balance of the restoring force against the elastic deformation of each elastic body. In particular, according to the invention of claim 4, the optical axis of the optical element can always be held at a fixed position, and twisting of the optical element in the circumferential direction can be prevented. Further, in the invention of claim 5, since only a plurality of joint portions arranged in the circumferential direction of the optical element are bonded to the optical element, the consumption amount of the adhesive can be reduced and the efficiency of the bonding work can be improved.

[Brief description of drawings]

FIG. 1 is a plan view showing a state in which an optical element is held by a holder according to an embodiment of the present invention.

FIG. 2 is an axial cross-sectional view of the holder shown in FIG.

FIG. 3 is a diagram showing a state immediately after bonding the holder of FIG. 1 and an optical element.

FIG. 4 is a diagram showing a state where the drying of the adhesive has progressed from the state of FIG.

FIG. 5 is a diagram showing a state where thermal deformation of the holder of FIG. 1 is small.

6 is a diagram showing a state in which thermal deformation has increased from the state of FIG.

FIG. 7 is a plan view showing a state where an optical element is held by a holder of a conventional example.

8 is a sectional view of the holder shown in FIG. 7 taken along the axial direction.

[Explanation of symbols]

 2 Optical element 3 Adhesive 5 Holding tool 6 Holding tool body 7 Holding arm 70 Joint part 71 Leaf spring elastic body AX Optical axis of optical element IP Virtual plane

Claims (5)

[Claims] 1. A joint part to be joined to an optical element to be held, wherein the joint part is made of an elastic body whose rigidity in the direction orthogonal to the optical axis of the optical element is set lower than that of the optical element. An optical element holder characterized by being supported. 2. The holder for an optical element according to claim 1, wherein a plurality of the joint portions are provided around an optical axis of the optical element. 3. A holder main body, and a holding arm attached to the holder main body for holding an optical element to be held, wherein the holding arm has a joint portion joined to the optical element. An optical element having a leaf spring-like elastic body that connects the joint and the holder main body in a state in which the bending direction is directed to the joint between the joint and the optical element. Retainer. 4. A plurality of the holding arms are provided so as to be rotationally symmetric about the optical axis of the optical element, and each holding arm includes:
4. The holding of an optical element according to claim 3, wherein the elastic body is provided symmetrically with respect to a virtual plane that passes through both the center position of the joint portion of each holding arm and the optical axis of the optical element. Ingredient 5. A method of holding an optical element, which comprises using the holder according to claim 2 and bonding the joint portion of the holder to the optical element.