JPH0868515A - Burner made of quartz glass - Google Patents

Abstract

PURPOSE: To obtain a burner made of quartz glass, whose tip of a nozzle is hardly broken partly by combustion heat during use of it, by a method wherein the thickness of the converging part of a fluid path of the nozzle is continuously increased from line convergence starting part toward the tip. CONSTITUTION: The thickness of a converging part 2 of a fluid path of a nozzle of a quartz-glass-made burner 1 is continuously increased from a convergence starting part 3 toward the tip to form the nozzle into an external shape of a cylinder with a tapered-off tip. By this constitution, the tip of the nozzle is prevented from becoming thin and breaking due to the combustion heat, causing the burner 1 to exhibit its stable performance for a long period of time.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has an improved nozzle for use in internal combustion of quartz furnace core tubes for semiconductor manufacturing and in fire processing for manufacturing various jigs such as wafer support boats and drawing rods. It relates to a quartz glass burner.

[0002]

2. Description of the Related Art Conventionally, the above-mentioned quartz glass burner is usually formed in a cylindrical shape of a pre-throttle from the tip 10 while maintaining the wall thickness of the pre-throttle start portion 9 of the fluid passage of the nozzle as shown in FIG. Are used.

[0003]

In such a nozzle for a quartz glass burner, the tip of the nozzle is reduced by the heat of combustion of gas during use, thinning and partially chipping off,
This is the source of waste. Such dust floats inside the quartz furnace core tube and adheres to the wafer surface.
The dust that adheres to and is released from the jig during the firing process adheres to the surface of the wafer during the heat treatment and causes product defects on the wafer.

Further, the partial chipping of the nozzle tip portion changes the opening diameter of the nozzle tip to change the gas discharge amount and the heating condition, which adversely affects the product. It is an object of the present invention to provide a quartz glass burner in which the tip of the nozzle is not easily chipped off due to the heat of combustion during use.

[0005]

In the quartz glass burner of the present invention, the thickness of the pre-throttled portion of the fluid passage of the nozzle is continuously increased from the pre-throttled starting portion toward the tip. Furthermore, the thickened nozzle has a structure in which a portion in which the inner diameter of the tip end of the front throttle of the fluid passage of the nozzle is held constant is formed in the tip portion of the nozzle.

A quartz glass burner generally has a cylindrical body having an outer diameter of 10 mm to 20 mm and a wall thickness of 2 to 3 mm, and a nozzle portion of a fluid passage has a tip constricted cylinder while maintaining the wall thickness of the burner body. The length of the nozzle fluid passage is 20 mm to 70 m from the leading end to the tip.
m, the inclination angle of the front diaphragm is 10 with respect to the axial direction of the tubular body.
It is formed at ~ 30 degrees.

The quartz glass burner of the present invention is the same as the above general burner, in which the thickness of the pre-throttled portion of the fluid passage of the nozzle is gradually increased from the pre-throttle start portion to the tip while maintaining the shape of the fluid passage. It is important to form.
The wall thickness of the tip of the thickened nozzle is preferably about 1.5 to 3 times the wall thickness of the pre-throttle start portion of the fluid passage of the nozzle, but it may be appropriately changed depending on the shape and size of the burner. Selectively formed. Generally, as the thickening of the tip of the nozzle increases, the fire resistance stability of the burner improves, but the outer diameter of the nozzle tip is formed into a cylindrical shape that is almost the same as the outer diameter of the pre-throttle start portion of the fluid passage of the nozzle. Is practical. If the wall thickness of the tip of the nozzle is not less than 1.5 times the wall thickness of the leading end of the fluid passage of the nozzle, the durability of the quartz glass burner nozzle of the present invention cannot be improved, and the nozzle tip If the outer diameter is larger than the outer diameter of the leading end portion of the fluid passage of the nozzle, it is not preferable because it is difficult to handle at the time of fire processing, and it may come into contact with the product.

In the quartz glass burner of the present invention, the thickness of the pre-throttled portion of the fluid passage of the nozzle is continuously increased from the pre-throttled start portion toward the tip, but the durability of the tip portion of the nozzle is improved. In order to further improve the property, it is preferable to form a portion at the tip where the inner diameter and the outer diameter of the tip end of the tip of the fluid passage of the nozzle are kept constant. It is preferable that this portion is usually formed to have a protruding length of 8 mm or more from the tip surface of the nozzle. If the protrusion length is less than 8 mm, the effect of increasing the strength of the tip portion of the nozzle becomes weak, which is not desirable.

[0009]

In the quartz glass burner of the present invention, the thickness of the pre-throttled portion of the fluid passage of the nozzle is continuously increased from the pre-throttled starting portion toward the tip, and the tip is the tip of the nozzle. Since it has a portion in which the inner diameter and the outer diameter of the nozzle are held constant, it is robust and does not easily decrease due to the combustion heat during use, and the tip of the nozzle does not fall off partially.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of the quartz glass burner of the present invention will be specifically described below with reference to the accompanying drawings. FIG. 1 is a partial schematic vertical sectional view including a pre-throttled portion of a fluid passage of a quartz glass burner of the present invention, and FIG. 2 is a pre-throttled portion of a fluid passage of a quartz glass burner of another example of the present invention. It is a partial schematic longitudinal cross-sectional view including. As shown in FIG. 1, in the quartz glass burner 1 of the present invention, the thickness of the tapered portion 2 of the fluid passage of the nozzle is continuously increased from the tapered start portion 3 toward the tip, Is formed in a cylindrical shape with a front end. Further, in the quartz glass burner 4 of the present invention shown in FIG. 2, the thickness of the tapered portion 5 of the fluid passage of the nozzle is continuously increased from the tapered start portion 6 toward the tip. At the tip, a portion 8 is formed in which the inner diameter and outer diameter of the tip end tip 7 of the nozzle fluid passage are kept constant, and the outer diameter of the tip is equal to the outer diameter of the tip end portion 6 of the nozzle fluid passage. The same shape is formed in a tubular shape.

[0011]

According to the quartz glass burner of the present invention,
The tip of the nozzle becomes thin due to the heat of combustion during use,
Because it does not fall off and become garbage, for a long time,
It can exhibit stable performance.

[Brief description of drawings]

FIG. 1 is a schematic vertical sectional view of a nozzle portion of a quartz glass burner of the present invention.

FIG. 2 is a schematic vertical cross-sectional view of a nozzle portion of a quartz glass burner according to another example of the present invention.

FIG. 3 is a schematic vertical sectional view of a nozzle portion of a conventional quartz glass burner.

[Explanation of reference symbols] 1 Quartz glass burner 2 Nozzle tip drawing part 3 Nozzle tip drawing start part 4 Quartz glass burner 5 Nozzle tip drawing part 6 Nozzle tip drawing start part 7 Nozzle fluid path tip drawing tip 8 Thick wall holding part 9 Nozzle tip drawing start part 10 Nozzle tip

Claims (2)

[Claims] 1. A quartz glass burner, characterized in that the thickness of a pre-throttled portion of a fluid passage of a nozzle is continuously increased from the pre-throttled start portion toward the tip. Burner. 2. The quartz glass burner according to claim 1, further comprising a tip portion in which the inner diameter of the tip end of the tip of the fluid passage of the nozzle is kept constant.