JPH0850003A - Shape-measuring apparatus - Google Patents

Abstract

PURPOSE:To provide a shape-measuring apparatus capable of measuring shapes of circular arc-shaped grooves of bearings of different kinds without using many mounting jigs. CONSTITUTION:A probe 70 moves linearly in a Z-axis direction along a Z-axis guide surface, and therefore a measuring range in the Z-axis direction for the probe 70 can be set optionally. Moreover, because of the employment of an optical moire fringes scale for an X-axis scale and a Z-axis scale 46, the measuring range can be set wide. Accordingly, a moving pattern of the probe 70 can be set in conformity with a shape of a bearing 86. A shape of a circular arc- shaped groove of the bearing 86 of a different kind can be measured by changing the moving pattern of the probe 70.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring machine and is intended for all objects to be measured having an arc including a lens and the like. In this embodiment, the shape of an arc groove such as a bearing is particularly measured. Take a shape measuring machine.

[0002]

2. Description of the Related Art Conventionally, as a device for measuring the shape of a circular arc groove of a bearing, a shape measuring device proposed in Japanese Patent Laid-Open No. 63-36107 has been known. According to this shape measuring device, the stylus provided on the stylus is moved along the circular arc groove of the bearing to be measured to measure its shape.

[0003]

However, since the shape measuring device disclosed in Japanese Patent Laid-Open No. 63-36107 moves the stylus by the cam mechanism, the movement pattern of the stylus is regulated by the cam mechanism. Further, since this shape measuring device detects the amount of movement of the stylus by the differential transformer, the measuring range is narrow. As a result, it is necessary to select a mounting jig according to the type of each bearing to be measured and to match the arc groove of each bearing to be measured with the movement pattern of the stylus. Therefore, there is a problem in that a large number of mounting jigs must be prepared according to the type of bearing to be measured.

The present invention has been made in view of the above circumstances, and provides a shape measuring machine capable of measuring the shapes of arc grooves of bearings of different types without preparing many mounting jigs. With the goal.

[0005]

In order to achieve the above-mentioned object, the present invention moves the stylus movably supported in the X-axis direction and the Z-axis direction along the surface of the object to be measured so that the object to be measured is moved. In a shape measuring machine for measuring the surface shape of an object to be measured, a stylus equipped with the stylus is swingably supported in the X-axis direction and movable in the Z-axis direction along a Z-axis guide surface of a main body. A supported lifting body, a moving means for moving the lifting body in the Z-axis direction, a Z-axis scale for detecting the amount of movement of the lifting body in the Z-axis direction, and a swingable support for the lifting body. A weight member connected to the stylus for maintaining the stylus parallel to the Z-axis direction by its own weight, a retracting means capable of holding the stylus in the retract position, and an X-axis for detecting the amount of swing of the stylus in the X-axis direction. Equipped with a scale It is characterized in that.

Further, in order to achieve the above object, the present invention is characterized in that the Z-axis scale and the X-axis scale are optical moire fringe scales. further,
In order to achieve the above object, the present invention provides that the measurement data of the Z-axis scale and the X-axis scale is input to a measurement instructing section, and the measurement instructing section is based on the input measurement data. Is calculated, and a non-defective product / defective product of the measured object is determined based on the calculated value.

[0007]

According to the present invention, the elevating body is movably supported in the Z-axis direction along the guide surface of the main body, and the stylus having the stylus is oscillatably supported in the X-axis direction on the elevating body. . The lifting means moves the lifting body in the Z-axis direction, and the Z-axis scale detects the amount of movement of the lifting body in the Z-axis direction. In addition, a weight member is connected to the stylus swingably supported by the lifting body, and the weight member keeps the stylus parallel to the Z-axis direction by its own weight. The retract means holds the stylus at the retract position, and the X-axis scale detects the amount of swing of the stylus in the X-axis direction.

Since the stylus moves linearly in the Z-axis direction in this manner, the measurement range of the stylus in the Z-axis direction can be set arbitrarily. Therefore, the movement pattern of the stylus can be set according to the shape of the object to be measured. Further, according to the present invention, since the optical moire fringe case is used for the X-axis scale and the Z-axis scale, it is possible to set a wide measurement range.

Further, according to the present invention, the measurement data of the Z-axis scale and the X-axis scale are input to the measurement instruction section,
The measurement instruction unit calculates the shape of the object to be measured based on the input measurement data. Then, the non-defective product or defective product of the DUT is determined based on the calculated value. Therefore, there is no erroneous determination of whether the measured object is a good product or a defective product.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A shape measuring machine according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows a shape measuring machine 1 according to the present invention.
2 is a front view of the shape measuring machine 10 according to the present invention.
The block diagram of is shown. As shown in FIG. 1, the shape measuring machine 10
Is provided with a main body 12, and a mounting table 12A is provided in the center of the main body 12.
Are mounted in parallel. The measuring device 14 is mounted on the mounting table 12A, and the measurement instruction unit 1 is provided on the upper end of the main body 12.
6 is attached. The measurement instruction unit 16 includes a display 16A. A keyboard 17 is provided on the right side of the measurement instruction section 16.

As shown in FIG. 3, the measuring device 14 has a casing 15, and a fixing portion 18 is formed in the casing 15. A ball screw 20 is rotatably supported on the fixed portion 18. The lower end of the ball screw 20 is connected to a motor 24 in a gear box 22 via a gear (not shown) so as to be able to transmit a rotational force. A moving piece 26 is screwed to the ball screw 20. As shown in FIG. 4, piano wires 28, 28 are sandwiched between both ends of the moving piece 26, and both ends of the piano wire 28 have guide pieces 30, 30.
Attached to.

The guide pieces 30 and 30 are each a slider 3
It is fixed to 2. The slider 32 is supported by a slide bearing at the right end of the fixed portion 18 so as to be able to move up and down. Therefore, when the motor 24 is driven, the rotational force is transmitted to the ball screw 20 via the gear in the gear box 22, and the ball screw 20
Rotates and the moving piece 26 moves up and down. Therefore, piano wire 2
The slider 32 via the guide pieces 8 and 28 and the guide pieces 30 and 30.
Moves up and down along the plain bearing of the fixed portion 18. in this case,
Since the contact surface of the slide bearing of the fixed portion 18 is wide, the slider 32
It is possible to keep the surface pressure low when the bearing contacts the sliding bearing. Therefore, the slider 32 has excellent wear resistance and a long life.

A wire 3 is attached to the upper end of the slider 32.
4 has one end attached. Wire 34 is pulley 3
Is extended to the left side of the fixed portion 18 via 6A and 36B,
A weight 38 is attached to the other end of the wire 34. The weight 38 is supported on the left end of the fixed portion 18 so as to be able to move up and down. As a result, a force is applied to the slider 32 to pull it up by the load of the weight 38, so that the slider 32 moves up and down smoothly.

As shown in FIG. 3, a holding frame 42 is attached to the right side of the slider 32 via leaf springs 40A and 40B. A protrusion 44 is provided on the lower end 42A of the holding frame 42.
Is provided, and the protrusion 44 is a pin 46A of the Z-axis scale 46.
Is in contact with Accordingly, the vertical movement amount (Z direction) of the holding frame 42 is detected by the Z-axis scale 46. Z
An optical moire fringe scale, an interferometer, or the like is used for the axis scale 46. Therefore, it is possible to set a wide measurement range in the Z-axis direction.

As shown in FIG. 5, a swinging body 48 is swingably supported in the holding frame 42 via a shaft 50. A stylus 68 is attached to the upper end of the rocking body 48, and a stylus 70 is fixed to the tip of the stylus 68. The stylus 70 is made of ruby, diamond, or the like. A pressing pin 56 is attached to the upper end portion of the rocking body 48, and the flange portion 56 of the pressing pin 56 is attached.
One ends of springs 58, 58 are locked to A.

The other ends of the springs 58, 58 have a flange portion 60A.
The flange portion 60A is formed on the tip portion of the shaft 60 of the X-axis scale 62. X-axis scale 6
2 is fixed to the holding frame 42. Thus, the spring 5
By locking 8 and 58 to the flange portion 56A and the flange portion 60A, the tip portion of the pressing pin 56 and the tip portion of the shaft 60 come into contact with each other by the biasing force of the springs 58 and 58. In this case, the stylus 70 moves in an arc, but since the pressing pin 56 and the shaft 60 are separated, the X-axis scale 62 moves only in the X-axis direction to move the stylus 70 in the X-axis direction. Accurately detect the amount of movement.

The X-axis scale 62 uses an optical moire fringe scale. Therefore, the measurement range in the X-axis direction can be set wide. A needle pin 66A of an origin detecting means 66 is provided at the rear end of the pressing pin 56 via a bar 64. The origin detecting means 66 is fixed to the holding frame 42,
The origin detecting means 66 can adjust the stylus 68 to the vertical state. Therefore, the origin detecting means 66
The orientation of the stylus 70 can be adjusted so that the stylus 70 maintains a right angle with respect to a bearing 86 described later. The origin detecting means 66, the X-axis scale 62, and the Z-axis scale 4
Since 6 is a general-purpose product with an integrated dustproof structure,
It can be used in the field environment and has excellent maintainability.

The bolt 5 is attached to the lower end of the rocking body 48.
A weight 54 is attached via 2. The weight of the weight 54 is set so as to maintain the oscillating body 48 in a vertical state (that is, the needle pin 66A of the origin detecting means 66 is located at the origin position) via the shaft 50. The control pin 72 is provided on the swinging body 48 below the pressing pin 56.
Are provided, and 72A and 72B at both ends of the control pin 72 project from the left and right side portions of the holding frame 42 (see FIG. 6). In FIG. 6, a rotary plate 74 is rotatably supported on the right side of the holding frame 42. As shown in FIG. 7, the rotary plate 7
A motor 75 is connected to the motor 4 so as to be able to transmit a rotational force. Further, the rotary plate 74 is provided with an origin detecting means 76, and the needle pin 76A of the origin detecting means 76 is fixed to the holding frame 42. As described above, since the origin detecting means 76 is connected to the rotary plate 74, sufficient strength against external force can be obtained. Then, the origin detecting means 76 is provided on the rotating plate 7.
The rotation angle of 4 is detected.

A control groove 74A is formed on the rotary plate 74,
The control pin 72 is located at the center of the control groove 74A. Thus, when the control pin 72 is located at the center of the control groove 74A, the needle pin 76A of the origin detecting means 76 is located at the origin position. When the motor 76 is driven from this position to rotate the rotary plate 74 counterclockwise, the control groove 74A is moved.
The right wall portion 74A 'of the control pin 72 contacts the right end portion 72A of the control pin 72, and the rocking body 48 rotates in the counterclockwise direction about the shaft 50. This allows the stylus 6 in FIG.
8 swings to the retracted position.

Next, when the motor 75 is rotated in the reverse direction to rotate the pulley 74 in the clockwise direction, the right wall portion 74 of the control groove 74A is rotated.
The contact between A'and the left end portion 72A of the control pin 72 is released. As a result, the oscillating body 48 is rotated clockwise by the weight of the weight 54 via the shaft 50. In this case, the amount of movement of the stylus 70 in the clockwise direction and the counterclockwise direction (X direction) is detected by the X-axis scale 62.

As shown in FIG. 5, a vertical movement detection switch 78 is provided between the slider 32 and the holding frame 42. The vertical movement detection switch 78 detects bending of the leaf springs 40A and 40B. That is, the up-and-down movement detection switch 78 has the first contact portion 80A and the second contact portion 80B, and the holding frame 42 interferes with an obstacle when the holding frame 42 rises, and the leaf spring 4
When 0A and 40B are bent, the contact state of the first contact portion 80A is released. As a result, the leaf springs 40A, 4
Deflection of 0B is detected.

When the holding frame 42 interferes with an obstacle when the holding frame 42 descends and the leaf springs 40A and 40B bend, the leaf spring 82 bends and the first contact portion 80A rises. As a result, the contact state of the second contact portion 80B is released, and the bending of the leaf springs 40A and 40B is detected. Therefore, the bending of the leaf springs 40A and 40B when the holding frame 42 moves up and down is detected.

As shown in FIG. 8, an attachment jig 100 is attached to the upper end of the casing 15 of the measuring device 14. That is, the positioning pin 102 is provided on the upper end of the casing 15 of the measuring device 14, and the plate 104 positioned by the positioning pin 102 is attached. An elongated hole 104A is formed in the center of the plate 104 (see FIG. 9), and positioning pins 106A and 106B are provided upright on both sides of the elongated hole 104A.

A pressing block 108 is placed on the right side of the positioning pins 106A and 106B.
An elongated hole 108A is formed in 08. Slot 108A
Has a pressing movement block 108B in the lower part thereof, and the pressing movement block 108B is always pressed by the spring (not shown) to lock the bearing 86. A knob bolt 110 for releasing the pressing force of the spring is screwed into the pressing movement block via the elongated hole 108A.

Therefore, by pressing the pressing movement block 108B against the bearing 86 with the bearing 86 mounted on the plate 104 in contact with the positioning pins 106A and 106B, the bearing 86 is positioned at a predetermined position. Further, the tip of the stylus 68 projects above the casing 15 through the elongated hole 104A. The stylus 68 is at the standby position P ₁ shown in FIG.
The stylus 68 does not have to be drawn into the casing 15 of the measuring device 14 because the stylus 68 is protected by the mounting jig 100 by being located inside 4A.

Thus, the measuring operation of the stylus 68 can be set without waste. 8 and 9, the case where the shape of the arc groove of the inner bearing 86 is measured has been described, but the shape of the arc groove of the outer bearing can be measured by changing the mounting jig. In the measurement instruction section 16 shown in FIG. 2, the measurement range of the bearing 86, the measurement start position,
The data of the measurement end position is input, and further, the cutoff rate data (see FIG. 10) is input. Then, the measurement instructing unit 16 obtains the radius calculation range based on the cutoff rate, and P−
The V value calculation range is obtained as data. These data are registered in the built-in computer so that they can be reused.
Incidentally, these data can be registered in a medium such as a floppy disk.

The measurement instruction section 16 is based on these data.
Then, the operation of the stylus 70 of the measuring device 14 is controlled. to this
Therefore, the stylus 70 of the measuring device 14 is, as shown in FIG.
Standby position P₁→ Position P₂→ Position P₃→ Measurement start position P_Four
→ Measurement end position P_Five→ Position P ₆→ Standby position P₁In order
Moving. Hereinafter, the operation of the stylus 70 will be described with reference to FIG.
Reveal First, the motor 76 is driven to rotate the pulley 74 in the opposite direction.
The right wall portion of the control groove 74A by rotating in the clockwise direction
74A 'is brought into contact with the right end portion 72A of the control pin 72. This
As a result, the control pin 72 is rotated around the shaft 50.
Since it rotates clockwise, the stylus 70 moves to the standby position P.₁
To retract position P₂Move left along X axis
To do.

Next, the motor 24 is driven to transmit the rotational force to the ball screw 20 via the gear in the gear box 22. As a result, the ball screw 20 rotates and the moving piece 26
Moves up and down, so the piano wires 28, 28 and the guide piece 3
The slider 32 ascends in the Z-axis direction along the slide bearing of the fixed portion 18 via 0 and 30. Therefore, the holding frame 42 attached to the slider 32 via the leaf springs 40A and 40B moves up in the Z-axis direction. Thereby, the holding frame 42
The stylus 70 is moved through the stylus 68 supported by the
It rises in the axial direction and reaches the position P ₃ .

Next, the motor 76 is reversely rotated to rotate the pulley 74.
When is rotated clockwise, the right wall portion 7 of the control groove 74A is
The contact between 4A 'and the right end portion 72A of the control pin 72 is released. As a result, the oscillating body 48 is rotated by the weight of the weight 54 in the clockwise direction via the shaft 50. Therefore, the stylus 70 moves to the right along the X axis and comes into contact with the measurement start position P ₄ . In this case, the stylus 68 is maintained in the measuring state.

Subsequently, the motor 24 is rotated in reverse to rotate the ball screw 20 in the reverse direction to lower the moving piece 26, whereby the slider 32 is lowered in the Z-axis direction. This allows the stylus 7 to pass through the holding frame 42 attached to the slider 32.
0 descends in the Z-axis direction. In this case, since the stylus 68 moves to the right due to the weight of the weight 54, the stylus 70
Moves along the circular arc groove of the bearing 86 and moves to the measurement end position P ₅
To reach. Thereby, the shape of the circular arc groove of the bearing 86 is measured, and the measurement speed of the stylus 70 in this case is set to a low speed.

Next, the motor 76 is driven to drive the pulley 74.
By rotating the stylus 70 in the counterclockwise direction,
End position P_FiveTo position P₆Move left along X axis
To do. Then, the motor 24 is rotated in the reverse direction, and the motor 76
Reverse to move the stylus 70 to position P ₆To standby position P₁Return to
You In this case, the moving speed of the stylus 70 depends on the measurement start position P.
_FourTo measurement end position P_FiveSet the measurement speed up to low
However, other return speeds were set to high.

As described above, the measurement instruction section 16 drives the motor 24 and the motor 76 based on the data to drive the stylus 70.
Are moved in the order of standby position P ₁ → retract position P ₂ → position P ₃ → measurement start position P ₄ → measurement end position P ₅ → position P ₆ → standby position P ₁ . In this case, the measurement instructing unit 16 can arbitrarily set the vertical movement of the stylus 68, retract, etc. by a program, and further can change it. Accordingly, the measurement start position P ₄ and the measurement end position P ₅ can be arbitrarily set to widen the measurement range of the stylus 70. Further, when the bearings 86 have different types, the shape of the bearings 86 of different types can be measured by the same mounting jig 100 by newly inputting / registering the measurement conditions for each type in the measurement instruction section 16. it can.

By newly inputting / registering the measurement conditions in this way, when the bearing 120 is formed with the eccentric groove 120A as shown in FIG. 12, the bearing 120 is held in a state inclined by Θ °. By using the tool, the eccentric groove 120A can be measured. Further, as shown in FIG. 13, even in the case of the double type bearing 122, the circular arc grooves 122A, 12A
2B can be measured. Further, as shown in FIG. 14, even in the case of the spherical roller body 124, the spherical surface 124A can be measured.

By the way, when the stylus 70 moves in the order of standby position P ₁ → retract position P ₂ → position P ₃ → measurement start position P ₄ → measurement end position P ₅ → position P ₆ → standby position P ₁ ... , Measurement start position P ₄ → Z in the range of measurement end position P ₅
The measurement data of the axis scale 46 and the X-axis scale 62 are input to the measurement instruction unit 16. These measurement data are recorded in the measurement instruction section 16.

Based on the recorded data, the measurement instructing section 16 determines the radius of the arc groove of the bearing 86 and PV (Peak to Va).
lley) Calculate the value. In this case, the measurement start position and the measurement end position are automatically detected, and the radius and the PV value are calculated based on the data between the measurement start position and the measurement end position. The shape error is compared based on the calculated arc radius groove and the PV value.

Then, the measurement instructing unit 16 judges that the compared shape error is a non-defective product when the radius tolerance upper limit value and the radius tolerance lower limit value are allowed, and the compared shape error is the radius tolerance upper limit value and the radius tolerance lower limit value. If it is not allowed, it is determined as a defective product. The radius tolerance upper limit value and the radius tolerance lower limit value can be registered in a built-in computer so that they can be reused, as in the measurement range, or can be registered in a medium such as a floppy disk.

Further, when the measuring device 14 is calibrated by using the master ball, if the calculated radius value and PV value are not within the preset range, it is determined as calibration NG. . In the case of calibration NG, it is set so that the workpiece cannot be measured unless the calibration is properly performed. The measurement instruction unit 16 displays the shape error as a curve in a graph (see FIG. 15).

The amplification instruction unit 88 shown in FIG. 2 processes the drive command from the measurement instruction unit 16 and drives the drive unit 1 of the measuring device 14.
4A, and further the Z-axis scale 4 of the drive unit 14A.
The movement signal from 6 is processed and output to the measurement instruction unit 16. Further, the amplification instruction unit 88 processes the pickup signal from the X-axis scale 62 and outputs it to the measurement instruction unit 16.

The keyboard 17 also inputs data to the measurement instruction section 16. For example, the keyboard 17 has a bearing 86.
The measurement range of the bearing 86 is measured based on the manufacturing drawing of
6 can be entered. The measurement range of the bearing 86 can be input to the measurement instructing unit 16 by teaching, instead of being input via the keyboard 17. In addition, the printer 92 of FIGS.
The value calculated by 6 is printed on the paper.

The operation of the shape measuring machine according to the present invention configured as described above will be described with reference to the flowchart of FIG. First, the bearing 8
A predetermined value is selected from the manufacturing drawing of No. 6, and the measurement range of the bearing 86 (measurement start position P ₄ → measurement end position P ₅ ) is input to the measurement instruction unit 16 via the keyboard 17 (step 1
50). Next, the measurement instruction unit 1 measures the measurement pitch within the measurement range.
6 (step 152), and after the completion of step 152, the measuring speed of the stylus 70 within the measuring range (1.5 mm / se
c) is input to the measurement instruction unit 16 (step 154).

Next, the measurement type (measurement line constant pitch) is set according to the type of the bearing 86, and the measurement instruction unit 1
6 (step 156). Next, automatic conditions for measurement according to the type of bearing 86 (retract after measurement)
Is set and input to the measurement instruction section 16 (step 15
8). Return speed of stylus 70 after completion of automatic condition input (6 mm
/ Sec) is input to the measurement instruction unit 16 (step 16
0).

Then, the output unit of the measured value is (mm, in
ch) and input to the measurement instructing unit 16 (step 1
62) Further, the stylus 70 is moved to the X-axis measurement start position (step 164). After completion of step 164, an instruction to start measurement is input to the measurement instructing section 16 (step 16
6). As a result, the stylus 70 moves along the shape of the bearing 86. In this case, the measurement data is input to the measurement instruction unit 16 based on the measurement pitch input in step 152. In this state, it is determined whether or not a predetermined number of measurement data have been input (step 168). Then, when the predetermined number of measurement data is not input, the measurement is continued, and when the predetermined number of measurement data is not input, the stylus 70 is moved to the X-axis standby position and the measurement is ended (step 170).

[0043]

As described above, according to the shape measuring machine of the present invention, since the stylus moves linearly in the Z-axis direction, the measurement range of the stylus in the Z-axis direction can be set arbitrarily. it can. Further, since the optical moire fringe case is used for the X-axis scale and the Z-axis scale, it is possible to set a wide measurement range. Thereby, the movement pattern of the stylus can be set according to the shapes of the objects to be measured which are different in kind. Therefore, it is possible to measure the shapes of the objects to be measured of different types without preparing a large number of mounting jigs according to the types of bearings to be measured.

Further, according to the present invention, the measurement data of the Z-axis scale and the X-axis scale is input to the measurement instructing section, and this measurement instructing section calculates the shape of the object to be measured based on the input measurement data. . Then, the non-defective product or defective product of the DUT is determined based on the calculated value. Therefore, there is no erroneous determination of whether the measured object is a good product or a defective product.

[Brief description of drawings]

FIG. 1 is a front view of a shape measuring machine according to the present invention.

FIG. 2 is a block diagram of a shape measuring machine according to the present invention.

FIG. 3 is a sectional view of a measuring device used in the shape measuring machine according to the present invention.

4 is a cross-sectional view taken along the line AA of FIG.

FIG. 5 is an enlarged view of a main part of a measuring device used in the shape measuring machine according to the present invention.

6 is a sectional view taken along line BB of FIG.

7 is a view taken along the line CC of FIG.

FIG. 8 is a front view of a mounting jig used in the shape measuring machine according to the present invention.

FIG. 9 is a plan view of a mounting jig used in the shape measuring machine according to the present invention.

FIG. 10 is an explanatory diagram illustrating data input to the shape measuring machine according to the present invention.

FIG. 11 is an explanatory view explaining the operation of the stylus of the measuring device used in the shape measuring machine according to the present invention.

FIG. 12 is a sectional view of a bearing that can be measured by the shape measuring machine according to the present invention.

FIG. 13 is a sectional view of a bearing that can be measured by the shape measuring machine according to the present invention.

FIG. 14 is a front view of a spherical roller body that can be measured by the shape measuring machine according to the present invention.

FIG. 15 is a diagram illustrating measurement results measured by the shape measuring machine according to the present invention.

FIG. 16 is a flow chart illustrating the operation of the shape measuring machine according to the present invention.

[Explanation of symbols]

 10 ... Shape measuring machine 16 ... Measurement instruction section 24 ... Motor (elevating means) 32 ... Slider (elevating body) 42 ... Holding frame (elevating body) 46 ... Z-axis scale 54 ... Weight (weight member) 62 ... X-axis scale 68 ... Stylus 70 ... Stylus 76 ... Motor (retract means) 86 ... Bearing (measurement object)

Claims (3)

[Claims] 1. A shape measuring machine for measuring a surface shape of an object to be measured by moving a needle which is movably supported in an X-axis direction and a Z-axis direction along a surface of the object to be measured. A stylus including a stylus that is swingable in the X-axis direction and is also supported so as to be movable in the Z-axis direction along a Z-axis direction guide surface of the main body; and the stylus is moved in the Z-axis direction. Moving means, a Z-axis scale for detecting the amount of movement of the lifting body in the Z-axis direction, and a stylus that is swingably supported by the lifting body, and the stylus is parallel to the Z-axis direction by its own weight. A shape measuring machine comprising: a weight member for maintaining the stylus at a retract position; a retracting means capable of holding the stylus at a retract position; and an X-axis scale for detecting a swing amount of the stylus in the X-axis direction. 2. The shape measuring machine according to claim 1, wherein the Z-axis scale and the X-axis scale are optical moire fringe scales. 3. The measurement data of the Z-axis scale and the X-axis scale are input to a measurement instructing unit, and the measurement instructing unit calculates the shape of the measured object based on the input measurement data, The shape measuring machine according to claim 1, wherein a non-defective product or a defective product of the object to be measured is determined based on the calculated value.