JPH084910A - Speed control valve - Google Patents

Speed control valve

Info

Publication number
JPH084910A
JPH084910A JP13462694A JP13462694A JPH084910A JP H084910 A JPH084910 A JP H084910A JP 13462694 A JP13462694 A JP 13462694A JP 13462694 A JP13462694 A JP 13462694A JP H084910 A JPH084910 A JP H084910A
Authority
JP
Japan
Prior art keywords
control valve
speed control
elastic diaphragm
valve
tubular member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13462694A
Other languages
Japanese (ja)
Inventor
Harumi Shimada
晴示 島田
Isanori Okunishi
功憲 奥西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitta Moore Co
Original Assignee
Nitta Moore Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitta Moore Co filed Critical Nitta Moore Co
Priority to JP13462694A priority Critical patent/JPH084910A/en
Publication of JPH084910A publication Critical patent/JPH084910A/en
Pending legal-status Critical Current

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  • Details Of Valves (AREA)

Abstract

PURPOSE:To provide a speed control valve which can be used for a long term by providing a cap-form supporting member which is provided so as to be externally inserted into a cylinder member and receives the large diameter part of an elastic diaphragm and the peripheral surface part excluding the vicinity thereof without interruption in the whole circumference. CONSTITUTION:This speed control valve is provided with a cylinder member 3 which is fixedly disposed on a coaxial line with a needle valve 2 inside a joint main body 1, an elastic diaphragm 4 externally inserted into the cylinder member 3 and a supporting member 5 which is externally inserted into the cylinder member 3 in order to receive the elastic diaphragm 4. The elastic diaphragm is a cone made of synthetic rubber and is constituted of a relatively thick bottom wall part 40 and a relatively thin conical piece part 41. In the speed control valve, the whole circumference of the conical piece part 4 is deformed so as to be uniformly expanded and contracted, and the elastic diaphragm 4 is not damaged in a short term, so that the speed control valve may be used for a long term.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、メイン流路に設けら
れた流量制御弁とバイパス流路に設けられたチェックバ
ルブとから構成された所謂速度制御弁に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called speed control valve composed of a flow rate control valve provided in a main flow path and a check valve provided in a bypass flow path.

【0002】[0002]

【従来の技術】この種の速度制御弁としては、例えば、
特公昭61−51714号公報に開示されたものがあ
る。
2. Description of the Related Art As a speed control valve of this type, for example,
There is one disclosed in Japanese Patent Publication No. 61-51714.

【0003】この速度制御弁は、図7に示すように、継
手主体9の内部に支持固定した筒部材91内にニードル
弁90を挿入する形式の流量制御弁を有するもので、前
記筒部材91の孔部分をメイン流路92Aとすると共に
継手主体9の内壁と筒部材91の外壁との間をバイパス
流路92Bとしている。
As shown in FIG. 7, this speed control valve has a flow control valve of a type in which a needle valve 90 is inserted into a tubular member 91 supported and fixed inside the joint main body 9, and the tubular member 91 is provided. The hole portion is used as the main flow passage 92A, and the space between the inner wall of the joint main body 9 and the outer wall of the tubular member 91 is used as the bypass flow passage 92B.

【0004】前記バイパス流路92Bには、図7、図
8、図9に示すように、多数の突条93aを有するキャ
ップ状の支持部材93によって支持されたコーン形状の
弾性ダイヤフラム94を配置させてあり、この弾性ダイ
ヤフラム94をチェック弁として機能させている。即
ち、空気源からエアー機器に空気が圧送されてきたとき
にはその空気圧により前記弾性ダイヤフラム94が開い
た状態となってバイパス流路92Bが閉じ、逆に、空気
がエアー機器から排出されていくときには突条93a,
93a相互間からの空気の圧力により前記弾性ダイヤフ
ラム94が狭まった状態となってバイパス流路92Bが
開いた状態となる。
In the bypass flow passage 92B, as shown in FIGS. 7, 8 and 9, a cone-shaped elastic diaphragm 94 supported by a cap-shaped support member 93 having a large number of protrusions 93a is arranged. The elastic diaphragm 94 functions as a check valve. That is, when the air is pressure-fed from the air source to the air equipment, the air pressure causes the elastic diaphragm 94 to open and the bypass flow passage 92B to close, and conversely, when the air is discharged from the air equipment, Article 93a,
The elastic diaphragm 94 is narrowed by the pressure of air from between 93a, and the bypass flow passage 92B is opened.

【0005】ところが、上記した如く弾性ダイヤフラム
94が開いた状態となったときには、図10に示すよう
に、支持部材93に具備させてある多数の突条93aに
よって前記弾性ダイヤフラム94が円周及び半径方向に
おいて複雑に変形してしまい、このため、弾性ダイヤフ
ラム94が破損してしまうことがある。これは速度制御
弁が不能となることを意味する。尚、このような問題は
メータイン制御用の制御弁、メータアウト制御用の制御
弁にかかわらず存在する。
However, when the elastic diaphragm 94 is in the open state as described above, as shown in FIG. The elastic diaphragm 94 may be deformed in a complicated direction, and the elastic diaphragm 94 may be damaged. This means that the speed control valve will be disabled. Incidentally, such a problem exists regardless of whether the control valve is for meter-in control or the control valve is for meter-out control.

【0006】近年、流体機器を使用する業界では、長期
間使用することができる速度制御弁の開発が望まれてい
る。
In recent years, in the industry using fluid equipment, it is desired to develop a speed control valve that can be used for a long period of time.

【0007】[0007]

【発明が解決しようとする課題】そこで、この発明で
は、長期間使用することができる速度制御弁を提供する
ことを課題とする。
Therefore, it is an object of the present invention to provide a speed control valve that can be used for a long period of time.

【0008】[0008]

【課題を解決する為の手段】この発明は、継手主体1の
内部に支持固定した筒部材3内の流路にニードル弁2を
挿入する態様でエアー機器に供給される単位時間当たり
の空気量を調節し得るようにしてあると共に、前記継手
主体1の内壁と筒部材3の外壁との間に形成される流路
に略コーン形状の弾性ダイヤフラム4を前記筒部材3に
外挿する態様で設けてチェック弁を構成させてある速度
制御弁であって、前記筒部材3に外挿する態様で設けら
れ且つ弾性ダイヤフラム4の大径部及びその近傍を除い
た外周面部分を間断なく全周で受けているキャップ状の
支持部材5を具備させてある。
According to the present invention, the amount of air supplied to an air device per unit time in a mode in which a needle valve 2 is inserted into a flow path in a tubular member 3 supported and fixed inside a joint main body 1. And a substantially cone-shaped elastic diaphragm 4 is externally inserted into the tubular member 3 in a flow path formed between the inner wall of the joint main body 1 and the outer wall of the tubular member 3. A check valve is provided to constitute a speed control valve, which is provided in a manner to be externally inserted into the cylindrical member 3 and has an outer peripheral surface portion excluding a large diameter portion of the elastic diaphragm 4 and its vicinity without interruption. The cap-shaped support member 5 received in step 1 is provided.

【0009】尚、弾性ダイヤフラム4の大径側端面が、
外周面から内周面に向かって大径側から小径側に傾斜し
たテーパ面であることが好ましい。
The end face of the elastic diaphragm 4 on the large diameter side is
It is preferable that the tapered surface is inclined from the large diameter side to the small diameter side from the outer peripheral surface toward the inner peripheral surface.

【0010】[0010]

【作用】この発明は次のように作用する。The present invention operates as follows.

【0011】この速度制御弁では、弾性ダイヤフラム4
の大径部及びその近傍を除いた外周面部分をキャップ状
の支持部材5によって間断なく全周で受けているから、
従来の技術の欄に記載した速度制御弁の如く、弾性ダイ
ヤフラム94が円周及び半径方向において複雑に変形せ
ず、全周において一様に変形する。したがって、弾性ダ
イヤフラム94には応力集中が発生しにくいから長寿命
となり、速度制御弁は長期間使用できるものとなる。
In this speed control valve, the elastic diaphragm 4
Since the outer peripheral surface portion excluding the large diameter portion and its vicinity is received by the cap-shaped supporting member 5 over the entire circumference without interruption,
Unlike the speed control valve described in the section of the related art, the elastic diaphragm 94 does not deform in the circumferential and radial directions in a complicated manner, but deforms uniformly in the entire circumference. Therefore, stress concentration is unlikely to occur in the elastic diaphragm 94, so that the elastic diaphragm 94 has a long life and the speed control valve can be used for a long period of time.

【0012】[0012]

【実施例】この発明の構成を実施例として示した図面に
従って説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The configuration of the present invention will be described with reference to the drawings shown as embodiments.

【0013】この実施例はメータアウト制御用の速度制
御弁であり、この速度制御弁は基本的には図1に示すよ
うに、T字状に形成された継手主体1と、前記継手主体
1の縦部材の一端部に螺入されているニードル弁2と、
前記継手主体1内においてニードル弁2と同軸線上に固
定配置されている筒部材3と、前記筒部材3に外挿され
ている弾性ダイヤフラム4と、前記弾性ダイヤフラム4
を受けるべく筒部材3に外挿されている支持部材5と、
前記継手主体1を構成する横部材に設けられたワンタッ
チ式のチューブ接続部6を具備する構成としている。
This embodiment is a speed control valve for meter-out control, and this speed control valve is basically a joint main body 1 formed in a T-shape and the joint main body 1 as shown in FIG. A needle valve 2 screwed into one end of the vertical member of
A cylindrical member 3 fixedly arranged coaxially with the needle valve 2 in the joint main body 1, an elastic diaphragm 4 externally inserted in the cylindrical member 3, and the elastic diaphragm 4
A support member 5 externally inserted into the tubular member 3 to receive the
The one-touch type tube connecting portion 6 provided on the lateral member constituting the joint main body 1 is provided.

【0014】継手主体1は、図1に示すように、金属製
の縦部材10に樹脂製の横部材11を装着するようにし
て構成してあり、縦部材10の内部と横部材11の内部
とを連通させると共に縦部材10と横部材11との間に
Oリング12,13を介在させてこれら相互間の流体密
性を確保するようにしている。
As shown in FIG. 1, the joint main body 1 is constructed by mounting a resin horizontal member 11 on a metal vertical member 10. The inside of the vertical member 10 and the inside of the horizontal member 11 are arranged. And O-rings 12 and 13 are interposed between the vertical member 10 and the horizontal member 11 to ensure fluid tightness between them.

【0015】ニードル弁2は、図1に示すように、弁軸
20とこれを継手本体1に対して回転不能にロックする
ロックナット21とから構成されており、前記弁軸20
は同図に示す如く継手主体2の外側に配置される調整用
工具対応部22と、継手主体1への挿入側端部に形成し
たテーパ状弁部23と、前記調整用工具対応部22とテ
ーパ状弁部23との間に形成した雄ネジ部24とを有す
るものとしてある。また、前記弁軸20にはOリング2
5を外装してあり、このOリング25により弁軸20と
継手本体1との間から流体が漏洩しないようにしてあ
る。
As shown in FIG. 1, the needle valve 2 comprises a valve shaft 20 and a lock nut 21 which locks the valve shaft 20 against the joint body 1 so that the valve shaft 20 cannot rotate.
Is an adjustment tool corresponding portion 22 arranged outside the joint main body 2 as shown in the figure, a tapered valve portion 23 formed at an end portion on the insertion side into the joint main body 1, and the adjustment tool corresponding portion 22. It has a male screw portion 24 formed between the tapered valve portion 23 and the tapered valve portion 23. The valve shaft 20 has an O-ring 2
5, the O-ring 25 prevents the fluid from leaking between the valve shaft 20 and the joint body 1.

【0016】尚、この実施例では、図3や図4に示すよ
うに、テーパ状弁部23と筒部材3の間の空隙がメイン
流路Aの開度となる。
In this embodiment, as shown in FIGS. 3 and 4, the gap between the tapered valve portion 23 and the tubular member 3 is the opening of the main flow path A.

【0017】筒部材3は、図1に示すように、上端部を
拡大径部30とした筒状のもので、筒保持体7によりニ
ードル弁2と同軸線上に固定配置されるようにしてあ
る。尚、筒保持体7は図1に示すように、細径部70と
太径部71とを有する筒状のものであり、前記太径部7
1に複数の流路となる貫通孔72を形成してある。
As shown in FIG. 1, the tubular member 3 is a tubular member having an enlarged diameter portion 30 at its upper end portion, and is fixedly arranged coaxially with the needle valve 2 by a tubular holder 7. . As shown in FIG. 1, the cylinder holder 7 is a cylinder having a small diameter portion 70 and a large diameter portion 71.
A plurality of through holes 72, which form a plurality of flow paths, are formed in one.

【0018】弾性ダイヤフラム4は、図1〜図3に示す
ように、合成ゴムにより形成されたコーン形状のもの
で、比較的厚肉の底壁部40と比較的薄肉のコーン状片
部41とから構成されている。前記コーン状片部41の
先端部は、同図に示すように、底壁部40側から先端側
に向かって外側に傾斜するテーパ面42としてあり、こ
のテーパ面42により空気圧によってコーン状片部41
が座屈するような力が直接的に作用しないようにしてあ
る。即ち、コーン状片部41は図3や図4に示すよう
に、空気圧に対して湾曲する態様で変形するようになっ
ている。
As shown in FIGS. 1 to 3, the elastic diaphragm 4 has a cone shape formed of synthetic rubber, and has a relatively thick bottom wall portion 40 and a relatively thin cone-shaped piece portion 41. It consists of As shown in the figure, the tip of the cone-shaped piece portion 41 has a tapered surface 42 that inclines outward from the bottom wall portion 40 side toward the tip end side. 41
The buckling force is not applied directly. That is, as shown in FIGS. 3 and 4, the cone-shaped piece portion 41 is configured to be deformed in a mode in which it is curved with respect to air pressure.

【0019】支持部材5は、図1〜図3に示すように、
比較的浅いコーン形状のキャップで構成されており、具
体的には、底壁部50と、コーン状片部51と、前記コ
ーン状片部51の外周面に形成されたリブ52とから形
成されている。尚、この実施例では、図3に示すよう
に、支持部材5により上記弾性ダイヤフラム4の底壁部
40を構成する側面、即ち、弾性ダイヤフラム4の大径
部及びその近傍を除いた側壁部分を受けるようにしてい
る。
The support member 5, as shown in FIGS.
It is composed of a relatively shallow cone-shaped cap, and is specifically formed from a bottom wall portion 50, a cone-shaped piece portion 51, and a rib 52 formed on the outer peripheral surface of the cone-shaped piece portion 51. ing. In this embodiment, as shown in FIG. 3, the side surface that constitutes the bottom wall portion 40 of the elastic diaphragm 4 by the support member 5, that is, the side wall portion excluding the large diameter portion of the elastic diaphragm 4 and the vicinity thereof. I am trying to receive it.

【0020】尚、上記した弾性ダイヤフラム4及び支持
部材5は、図1に示すように、筒部材3の拡大径部30
と筒保持体6により挟み込まれる態様でほとんど動かな
いように取り付けてある。
The elastic diaphragm 4 and the support member 5 described above are, as shown in FIG. 1, enlarged diameter portions 30 of the cylindrical member 3.
The cylinder holder 6 is attached so as not to move in such a manner as to be sandwiched by the cylinder holder 6.

【0021】チューブ接続部6は、図1に示すように、
チューブの着脱が容易な公知のワンタッチ式のもの、即
ち、チューブを接続する際にはチューブを押し込むだけ
でよく、チューブは取り外す際には操作筒60を押し込
んでチューブを引っ張るだけでよいものが採用されてい
る。
The tube connecting portion 6 is, as shown in FIG.
A well-known one-touch type that allows easy tube attachment / detachment, that is, you only have to push the tube to connect the tube, and to remove the tube, just push the operation tube 60 and pull the tube. Has been done.

【0022】この実施例の速度制御弁では、弾性ダイヤ
フラム4の大径部及びその近傍を除いた外周面部分を支
持部材5によって間断なく全周で受けたものとなってい
るから、従来の技術の欄に記載した速度制御弁の如く、
弾性ダイヤフラムが円周及び半径方向において複雑に変
形するようなことはない。即ち、この速度制御弁ではコ
ーン状片部41が全周で一様に拡縮径する態様で変形す
るのみである。したがって、弾性ダイヤフラム4は短期
間で破損せず、速度制御弁は長期間使用できるものとな
る。ここで、図5は支持部材5により受けられていない
弾性ダイヤフラム4の装着時の応力分布を示すものであ
り、図6は支持部材5により受けられていない弾性ダイ
ヤフラム4に空気圧が作用してコーン状片部41の大径
部及びその近傍が拡径したときの応力分布を示すもので
ある。
In the speed control valve of this embodiment, the outer peripheral surface portion of the elastic diaphragm 4 excluding the large diameter portion and the vicinity thereof is received by the supporting member 5 over the entire circumference without interruption. Like the speed control valve described in the column
The elastic diaphragm does not deform in a complicated manner in the circumferential and radial directions. That is, in this speed control valve, the cone-shaped piece portion 41 only deforms in such a manner that the diameter of the cone-shaped portion 41 is uniformly expanded and contracted over the entire circumference. Therefore, the elastic diaphragm 4 is not damaged in a short period of time, and the speed control valve can be used for a long period of time. Here, FIG. 5 shows a stress distribution when the elastic diaphragm 4 which is not received by the support member 5 is mounted, and FIG. 6 is a diagram in which air pressure acts on the elastic diaphragm 4 which is not received by the support member 5 and The stress distribution when the large-diameter part of the strip-shaped part 41 and its vicinity expand in diameter is shown.

【0023】図5と図6とを比較検討すると、空気圧が
作用することによりコーン状片部41の基端部、即ち図
6に示すA部に大きな変形と応力が生じていることが判
る。
A comparison of FIGS. 5 and 6 reveals that a large deformation and stress are generated at the base end portion of the cone-shaped piece portion 41, that is, the portion A shown in FIG. 6 due to the action of air pressure.

【0024】したがって、このA部を支持部材5で全周
を受けることにより大きな応力を生じる部位がなくな
る。何故ならば、コーン状片部41のA部以外の部分は
変形しやすく、図5及び図6から判るように応力集中が
発生しないからである。つまり、この実施例の管継手の
構成を採用した場合、弾性ダイヤフラム4は長期間破損
しないことを意味する。
Therefore, there is no portion where a large stress is generated by receiving the entire circumference of the portion A by the support member 5. This is because the portion other than the portion A of the cone-shaped piece portion 41 is easily deformed, and stress concentration does not occur as can be seen from FIGS. 5 and 6. That is, when the structure of the pipe joint of this embodiment is adopted, the elastic diaphragm 4 is not damaged for a long period of time.

【0025】また、この速度制御弁では、空気源からチ
ューブを介してエアー機器側に空気が圧送されてきたと
きには図3に示すように、その圧力によりコーン状片部
41の径が縮小した状態となってバイパス流路Bが開
き、逆に、空気がエアー機器から空気が排出されていく
ときには図4図に示すように、空気の圧力によりコーン
状片部41の径が拡大された状態となってバイパス流路
Bが閉じた状態となる。
Further, in this speed control valve, when air is pressure-fed from the air source to the air equipment side through the tube, as shown in FIG. 3, the pressure reduces the diameter of the cone-shaped piece portion 41. Then, the bypass flow path B is opened, and conversely, when the air is discharged from the air equipment, as shown in FIG. 4, the diameter of the cone-shaped piece portion 41 is expanded by the pressure of the air. As a result, the bypass flow path B is closed.

【0026】尚、上記実施例の速度制御弁にかえて、メ
ータイン制御用の制御弁にこの発明を施した場合でも同
様の効果を有することはいうまでもない。
Needless to say, even when the present invention is applied to a control valve for meter-in control, instead of the speed control valve of the above embodiment, the same effect can be obtained.

【0027】[0027]

【発明の効果】上記した作用の欄に記載内容から、長期
間使用することができる速度制御弁を提供できた。
From the contents described in the above-mentioned action column, a speed control valve that can be used for a long period of time could be provided.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例の速度制御弁の断面図。FIG. 1 is a sectional view of a speed control valve according to an embodiment of the present invention.

【図2】前記速度制御弁の弾性ダイヤフラムと支持部材
の斜視図。
FIG. 2 is a perspective view of an elastic diaphragm and a supporting member of the speed control valve.

【図3】前記速度制御弁において、空気源から機器へ空
気が供給された場合の弾性ダイヤフラムの状態を示す断
面図。
FIG. 3 is a cross-sectional view showing a state of an elastic diaphragm in the speed control valve when air is supplied from an air source to a device.

【図4】前記速度制御弁において、機器から空気が排出
された場合の弾性ダイヤフラムの状態を示す断面図。
FIG. 4 is a cross-sectional view showing a state of an elastic diaphragm in the speed control valve when air is discharged from a device.

【図5】支持部材により受けられていない弾性ダイヤフ
ラムの装着時の応力分布を示す図。
FIG. 5 is a diagram showing a stress distribution when an elastic diaphragm that is not received by a support member is attached.

【図6】支持部材により受けられていない弾性ダイヤフ
ラムに空気圧が作用してコーン状片部の大径部及びその
近傍が拡径したときの応力分布を示す図。
FIG. 6 is a view showing a stress distribution when air pressure acts on an elastic diaphragm that is not received by a support member and a large diameter portion of a cone-shaped piece portion and its vicinity expand in diameter.

【図7】従来の速度制御弁の断面図。FIG. 7 is a sectional view of a conventional speed control valve.

【図8】従来の速度制御弁に使用されている支持部材の
断面図。
FIG. 8 is a sectional view of a supporting member used in a conventional speed control valve.

【図9】従来の速度制御弁に使用されている弾性ダイヤ
フラムの断面図。
FIG. 9 is a cross-sectional view of an elastic diaphragm used in a conventional speed control valve.

【図10】従来の速度制御弁の弾性ダイヤフラムに大径
部側から小径部側に向かって空気圧が作用した場合の断
面図。
FIG. 10 is a cross-sectional view when air pressure acts on the elastic diaphragm of the conventional speed control valve from the large diameter portion side toward the small diameter portion side.

【符号の説明】[Explanation of symbols]

1 継手主体 2 ニードル弁 3 筒部材 4 弾性ダイヤフラム 5 支持部材 1 Joint Main Body 2 Needle Valve 3 Cylindrical Member 4 Elastic Diaphragm 5 Support Member

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 継手主体(1)の内部に支持固定した筒
部材(3)内の流路にニードル弁(2)を挿入する態様
でエアー機器に供給される単位時間当たりの空気量を調
節し得るようにしてあると共に、前記継手主体(1)の
内壁と筒部材(3)の外壁との間に形成される流路に略
コーン形状の弾性ダイヤフラム(4)を前記筒部材
(3)に外挿する態様で設けてチェック弁を構成させて
ある速度制御弁であって、前記筒部材(3)に外挿する
態様で設けられ且つ弾性ダイヤフラム(4)の大径部及
びその近傍を除いた外周面部分を間断なく全周で受けて
いるキャップ状の支持部材(5)を具備させてあること
を特徴とする速度制御弁。
1. The amount of air supplied to an air device per unit time is adjusted by inserting a needle valve (2) into a flow path in a tubular member (3) supported and fixed inside a joint main body (1). The tubular member (3) is provided with a substantially cone-shaped elastic diaphragm (4) in the flow path formed between the inner wall of the joint main body (1) and the outer wall of the tubular member (3). A speed control valve which is provided in a manner to be externally inserted to form a check valve, the speed control valve being provided in a manner to be externally inserted in the tubular member (3) and having a large diameter portion of the elastic diaphragm (4) and its vicinity. A speed control valve comprising a cap-shaped support member (5) that receives the outer peripheral surface portion except the entire circumference without interruption.
【請求項2】 弾性ダイヤフラム(4)の大径側端面
が、外周面から内周面に向かって大径側から小径側に傾
斜したテーパ面であることを特徴とする請求項1記載の
速度制御弁。
2. The velocity according to claim 1, wherein the large-diameter side end surface of the elastic diaphragm (4) is a tapered surface inclined from the large-diameter side to the small-diameter side from the outer peripheral surface toward the inner peripheral surface. Control valve.
JP13462694A 1994-06-16 1994-06-16 Speed control valve Pending JPH084910A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13462694A JPH084910A (en) 1994-06-16 1994-06-16 Speed control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13462694A JPH084910A (en) 1994-06-16 1994-06-16 Speed control valve

Publications (1)

Publication Number Publication Date
JPH084910A true JPH084910A (en) 1996-01-12

Family

ID=15132776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13462694A Pending JPH084910A (en) 1994-06-16 1994-06-16 Speed control valve

Country Status (1)

Country Link
JP (1) JPH084910A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245366A (en) * 2003-02-14 2004-09-02 Asahi Organic Chem Ind Co Ltd Vacuum regulator
JP2004321248A (en) * 2003-04-21 2004-11-18 Asahi Organic Chem Ind Co Ltd Vacuum regulator
CN103372825A (en) * 2012-04-27 2013-10-30 三星钻石工业股份有限公司 Substrate adsorption unit
KR101520923B1 (en) * 2013-02-22 2015-05-27 박철용 Banjo-needle valve
CN117570230B (en) * 2024-01-19 2024-03-19 四川中油乐仪能源装备制造股份有限公司 Axial flow type check valve

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245366A (en) * 2003-02-14 2004-09-02 Asahi Organic Chem Ind Co Ltd Vacuum regulator
JP2004321248A (en) * 2003-04-21 2004-11-18 Asahi Organic Chem Ind Co Ltd Vacuum regulator
CN103372825A (en) * 2012-04-27 2013-10-30 三星钻石工业股份有限公司 Substrate adsorption unit
JP2013232466A (en) * 2012-04-27 2013-11-14 Mitsuboshi Diamond Industrial Co Ltd Substrate suction apparatus
KR101520923B1 (en) * 2013-02-22 2015-05-27 박철용 Banjo-needle valve
CN117570230B (en) * 2024-01-19 2024-03-19 四川中油乐仪能源装备制造股份有限公司 Axial flow type check valve

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