JPH084909A - Fluid controller - Google Patents

Abstract

PURPOSE:To provide a fluid controller in which high sealing performance is obtained under relatively sail surface pressure and much labor is not required for manufacture and the cost reduction is achieved in a fluid controller which is utilized for semiconductor manufacturing equipment, vacuum equipment, medical treatment and food manufacturing equipment and the like. CONSTITUTION:This fluid controller is constituted of a valve box 2, a valve body 3, an annular groove 4 and an annular tongue part 5, and particularly the annular groove 4 is provided in the vicinity of the valve seats 17, 6 of the valve body 3 or the valve box 2 to form the annular tongue part 5 which can be elastically deformed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid controller used in, for example, semiconductor manufacturing equipment, vacuum equipment, medical / food manufacturing equipment, and the like, and more particularly to improvement of a metal touch type seat portion.

[0002]

2. Description of the Related Art Conventionally, as this type of fluid controller, for example, one described in JP-A-5-118447 is known. This is basically a valve body having a valve body having a valve seat and a valve body having a valve seat capable of abutting against the valve seat of the valve body. Valve seat of the base,
The cover member is made of a metal thin film and is covered with the cushion member. The cushion member is made of an elastic material and is interposed between the base portion and the cover member. Thus, such a thing can obtain a high sealing property with a relatively small surface pressure due to the elastic deformation of the cover body and the cushion body. However, since a cover body and a cushion body have to be separately provided in such a case, there is a problem in that it takes much labor to manufacture and the cost is high.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems and was devised to solve the problem. The object of the present invention is to achieve a high sealing property with a relatively small surface pressure. An object of the present invention is to provide a fluid controller which can be obtained and yet can be manufactured at a low labor cost.

[0004]

The fluid controller of the present invention comprises:
Basically, in a fluid controller having a valve box having a valve seat, and a valve body having a valve seat that can abut against the valve seat of the valve box,
The present invention is characterized in that an annular groove is formed near the valve seat of the valve body or the valve box to form an elastically deformable annular tongue.

[0005]

When the valve body is moved to the valve seat side of the valve box, the valve seat of the annular tongue is brought into contact with the valve seat of the mating side, and then the annular tongue is elastically deformed so that the valve seat is mated. The valve seat on the side is seated at a predetermined surface pressure to shut off the fluid passage. On the contrary, when the valve body is moved to the side opposite to the valve seat of the valve box, the annular tongue that was elastically deformed while the valve seat of the annular tongue is in contact with the valve seat of the other side is in its original shape. After returning to, the valve seat of the annular tongue is separated from the valve seat of the other side, and the fluid passage is opened.

[0006]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a vertical sectional view showing a fluid controller according to a first embodiment of the present invention. FIG. 2 is an enlarged vertical sectional view of a main part of FIG. The fluid controller 1 comprises a valve box 2, a valve body 3, an annular groove 4 and an annular tongue portion 5 as main components, and in this example, a check valve. The valve box 2 is provided with a valve seat 6, and in this example, exhibits a substantially inverted T shape and is made of metal,
An inflow passage 7 is inside the left side (the left side in FIG. 1), an outflow passage 8 is inside the right side, and a valve chamber 9 that is open to the upper side and connects the inflow passage 7 and the outflow passage 8 is formed. A valve seat 6 is formed at the boundary between the inflow passage 7 and the valve chamber 9, and a female screw 10 is formed inside the valve chamber 9. A bonnet 11 is provided on the top of the valve box 2. The bonnet 11 has a substantially T-shape and is made of metal.
2, a male screw 13 on the outside of the lower side, a spring accommodating hole 14 on the inside of the upper side, and a valve body guide hole 1 with the lower side open to the inside of the lower side.
5 are formed respectively. Bonnet 11 is male screw 1
3 is screwed to the female screw 10 and attached to the valve box 2 to close the valve chamber 9. A seal member 16 is provided between the valve box 2 and the bonnet 11. The valve body 3 is the valve box 2
In this example, the upper half has a cylindrical shape and the lower half has a truncated conical shape, and is made of metal. The valve seat 17 is provided with a spring accommodating hole 18 having an open upper part inside the upper side, and a communication passage 19 communicating with the spring accommodating hole 18 in the middle. Disc 3
Is inserted into the valve body guide hole 15 of the bonnet 11 so as to be able to move up and down. Spring receiving hole 18 of valve body 3 and bonnet 11
The valve body 3 between the spring housing hole 14 and the valve seat 6 of the valve box 2.
A compression type spring 20 that urges the side (lower side) is provided. The annular groove 4 is cut in the vicinity of the valve seats 17 and 6 of the valve body 3 or the valve box 2. In this example, the annular groove 4 is cut in the vicinity of the valve seat 17 of the valve body 3. That is, the valve seat 17 is cut inward (axial direction of the valve body 3) from the valve seat 17 (lower outer surface) of the valve body 3 by a predetermined distance, and is cut upward by a predetermined depth in parallel to the valve seat 17. It has a tapered cylindrical shape that is concentric with the axis of the valve body 3 whose lower part is open. The annular tongue portion 5 is an elastically deformable member formed by the annular groove 4, and in this example, is formed outside the annular groove 4 and has a valve seat 17 on its outer surface.
In other words, it has a tapered cylindrical shape with the valve seat 17 on the outer surface so that the lower end can be elastically deformed in the horizontal direction.

Next, the operation will be described based on such a configuration. When the handled fluid flows backward from the outflow passage 8 toward the inflow passage 7, the valve body 3 is moved downward due to the pressure of the handled fluid and the elasticity of the spring 20, and the valve seat 17 of the valve body 3 moves toward the valve housing 2. After being brought into contact with the valve seat 6 of the valve seat 6, the annular tongue portion 5 is elastically deformed inward (in the axial direction of the valve body 3) so that the valve seat 17 contacts the valve seat 6 of the valve box 2 with a predetermined surface pressure. Then, the flow of the handled fluid is cut off. On the contrary, when the handled fluid flows from the inflow passage 7 toward the outflow passage 8, the valve body 3 is moved upward against the elasticity of the spring 20,
After the valve seat 17 of the valve body 3 is in contact with the valve seat 6 of the valve box 2 and the annular tongue portion 5 that has been elastically deformed returns to its original shape, the valve body 3
The valve seat 17 is separated from the valve seat 6 of the valve box 3 to allow the handling fluid to flow therethrough. In short, when the valve seat 17 of the valve body 3 and the valve seat 6 of the valve box 2 are seated against each other, the annular tongue portion 5 is elastically deformed, so that a high sealing performance can be obtained with a relatively small surface pressure. Since the annular groove 4 is cut so as to be connected to the inflow passage 7 side, the annular tongue portion 5 is elastically deformed outward due to the pressure of the handled fluid, and the sealing effect between the valve seats 3 and 17 is improved. It

Next, a second embodiment of the present invention will be described with reference to FIGS. 3 and 4. The second embodiment has a valve seat 6 of the valve box 2.
Is formed on the bottom surface of the valve chamber 9 and is raised in a semicircular cross section,
The valve body 3 has a cylindrical shape and its lower surface serves as a valve seat 17, and the annular groove 4 is spaced inward from the valve seat 17 (lower surface) of the valve body 3 by a predetermined distance. A point that is cut in the direction of the axis of the body 3) and has an annular plate shape with the outside open.
It differs from the first embodiment in that the annular tongue portion 5 is formed into an annular plate shape having a valve seat 17 on the lower surface so that the outer end is elastically deformable in the vertical direction. Such a thing also exhibits the same effect as the first embodiment.

Although the fluid controller 1 is a check valve in the previous embodiment, the fluid controller 1 is not limited to this and may be, for example, a globe valve or a safety valve. Although the annular groove 4 and the annular tongue portion 5 are formed on the valve body 3 side in the previous embodiment, the present invention is not limited to this and may be formed on the valve box 2 side, for example.

[0010]

As described above, according to the present invention,
The following excellent effects can be achieved. (1) It is composed of a valve box, a valve body, an annular groove and an annular tongue, and in particular, an annular groove is cut near the valve seat of the valve body or the valve box to form an elastically deformable annular tongue. In addition, a high sealing property can be obtained with a relatively small surface pressure, and yet it does not take time and effort for manufacturing, and the cost can be reduced. (2) Since the elastically deformable annular tongue is formed, the valve body and the valve seat of the valve box are not easily scratched, the durability of the seat is improved, and the generation of fine dust due to friction is hardly generated.
Cleanability is improved. (3) Since the annular groove is cut, the weight can be reduced accordingly.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view showing a fluid controller according to a first embodiment of the present invention.

FIG. 2 is an enlarged vertical cross-sectional view of a main part of FIG.

FIG. 3 is a longitudinal sectional view showing a fluid controller according to a second embodiment of the present invention.

FIG. 4 is an enlarged vertical cross-sectional view of a main part of FIG.

[Explanation of symbols]

1 ... Fluid controller, 2 ... Valve box, 3 ... Valve body, 4 ... Annular groove, 5
... annular tongue portion, 6, 17 ... valve seat, 7 ... inflow passage, 8 ... outflow passage, 9 ... valve chamber, 10 ... female screw, 11 ... bonnet, 12
... Rotation stop portion, 13 ... Male screw, 14, 18 ... Spring accommodation hole, 1
5 ... Valve guide hole, 16 ... Sealing material, 19 ... Communication passage, 20
…Spring.

Claims (1)

[Claims] 1. A fluid controller having a valve body having a valve seat and a valve body having a valve seat capable of abutting against the valve seat of the valve body, comprising: a valve seat of the valve body or the valve body. A fluid controller characterized by forming an annular groove in the vicinity to form an elastically deformable annular tongue.