JPH0843186A - Vibration detector for vibrating body - Google Patents

Abstract

PURPOSE:To accurately detect the vibration of a vibrating body without attenuation. CONSTITUTION:A jig 4 having holding means 2 for holding a vibrating body 1 and vibration detecting means 3 for the vibration body 1 is supported on a base 5 via a freely rockable cushioning material 6. Thus, the vibrating body 1 is vibrated to integrally vibrate with jig 4 with the vibrator 1, and the vibration is accurately detected by the means 3 fixed to the jig 4 without attenuating the vibration.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration detecting device for a vibrating body for detecting a vibration of 6 degrees of freedom without attenuating the vibration of the vibrating body.

[0002]

2. Description of the Related Art A device for detecting vibration of a vibrating body has been known from Japanese Patent Publication No. 3-11417. This conventional example has a base 3 as shown in FIG.
The fixed base 31 is fixed to 0 and the movable base 32 is attached to the base 30.
Is movable by a cylinder 33, and a vibrating body 1 such as a motor is elastically held by a vibrating body receiving rubber 34 provided on the fixed base 31 and the movable base 32, and the power supply means 20 is connected to the vibrating body 1. The vibrating body 1 such as a motor is vibrated by applying a voltage, and the vibrating body 1 is vibrated by the non-contact vibration sensor 35 supported by the vibrating body receiving rubber 34 so as to be in a non-contact state with the vibrating body 1. I was trying to detect. When holding the vibrating body 1 by the vibrating body receiving rubber 34, a metal plate 36 is interposed as shown in FIG. 17 in order to improve wear resistance. Further, in the conventional example, the cylinder 33 is used for the purpose of not damping the vibration of the vibrating body 1.
The vibration of the vibrating body 1 is detected in the state where the holding force due to is weakened.

[0003]

In the above-described conventional example, since the metal plate 36 is provided, the vibration is attenuated for all 6 degrees of freedom of the vibrating body 1 which vibrates three-dimensionally with 6 degrees of freedom. There was a problem that it could not be measured and could not be measured accurately. Further, since the non-contact vibration sensor 35 is supported by rubber, the position of the non-contact vibration sensor 35 cannot be accurately determined,
Further, the non-contact vibration sensor 35 is affected by the vibrating body 1 and cannot accurately detect vibration of the vibrating body 1. Further, since the vibrating body 1 is directly supported by the vibrating body receiving rubber 34, the vibrating body receiving rubber 34 is likely to be damaged, and the change in the holding force of the vibrating body 1 affects the vibration phenomenon.
There is a problem that it becomes very difficult to maintain the performance of the device.

The present invention was invented in view of the above-mentioned problems of the conventional example, and the purpose thereof is to accurately detect the vibration of the vibrating body without attenuating the vibration. It is an object of the present invention to provide a vibration detecting device for a vibrating body because the vibrating body is not directly supported by the cushioning material, and therefore the cushioning material is not easily damaged.

[0005]

In order to solve the problems of the above-mentioned conventional examples and to achieve the object of the present invention, the vibration detecting device for a vibrating body of the present invention comprises a holding means 2 for holding the vibrating body 1. The jig 4 provided with the vibration detecting means 3 of the vibrating body 1 is attached to the base 5 by 6
It is characterized in that it is supported via a cushioning member 6 which can freely swing.

Further, a jig 4 having a holding means 2 for holding the vibrating body 1 is mounted on a base 5 so as to be capable of swinging in 6 degrees of freedom.
It is also preferable that the vibration detection means 3 is provided at a position apart from the jig 4 while being supported via the vibration detection means 3. It is also preferable to provide two vibration detection means 3 in the axial direction of the orthogonal coordinates. It is also preferable that the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 are aligned with each other, and the center of gravity of the total mass of the vibrating body 1 and the jig 4 is aligned with the elastic axis of the cushioning material 6.

It is also preferable to dispose the driving means 7 for driving the holding means 2 of the vibrating body 1 on the base 5 independently of the jig 4. It is also preferable to provide a lock means 8 for preventing the jig 4 from vibrating except when the vibration of the vibrating body 1 is detected. It is also preferable to provide a center-of-gravity adjusting means for matching the axis passing through the center of gravity of the vibrating body 1 and the jig 4 with the support axis of the cushioning material 6.

It is also preferable to provide driving means 7 capable of driving the holding means 2 and the locking means 8. Further, the holding means 2 has a pair of support ribs 9 provided on the jig 4, a movable plate 10 provided on at least one of the support ribs 9, and a movable plate 10.
It is also preferable to include a cylinder 11 for driving

It is also preferable to provide the jig 4 with a vibrating means 12. It is also preferable to provide a position detecting means 13 for detecting the position of the jig 4. It is also preferable to provide a detection means capable of detecting the vibration of the vibrating body 1 and the position of the jig 4. It is also preferable to provide the jig 4 with power supply means for the vibrating body 1.

It is also preferable to provide the jig 4 with an external vibrating means 40 for performing impulse-like vibration from the outside of the jig 4. Further, the moving means 4 for moving the driving means 7
3, the lock means 8 is separated from the driving means 7 and the moving means 43, and the lock means 8 is composed of at least a plurality of pins 60.
It is also preferable that the jig 4 is three-dimensionally positioned in a state in which the plurality of pins 60 are inserted into the lock pin insertion holes 61 and the plurality of pins 60 are inserted into the lock pin insertion holes 61.

Further, the vibrating means 12 attached to the jig 4 is
It is also possible to attach the uniaxial vibrator 12a to the jig 4 so that the oscillating direction is not parallel to any of the orthogonal coordinate axes in which the vibration detecting means 3 are arranged. preferable. Further, it is also preferable to provide a vibration direction adjusting means capable of adjusting the vibration direction of the uniaxial vibrator 12a to the jig 4.

It is also preferable to provide a waveform generator 41 capable of varying the vibration frequency for vibrating the uniaxial vibrator 12a. It is also preferable to provide a waveform generator 41 capable of generating a plurality of vibration frequencies for vibrating the uniaxial vibrator 12a. It is also preferable that the vibrating means 12 is a voice coil motor.

[0013]

According to the present invention having the above structure, the vibrating body 1
A jig 4 provided with a holding means 2 for holding and a vibration detecting means 3 for the vibrating body 1 is mounted on a base 5 and a cushioning material 6 which can swing freely in 6 degrees of freedom.
When the vibrating body 1 is vibrated, the vibrating body 1 and the jig 4 vibrate integrally, and the vibration is damped by the vibration detecting means 3 fixed to the jig 4. Can be accurately detected without

Further, a jig 4 provided with a holding means 2 for holding the vibrating body 1 is mounted on a base 5 so as to be capable of swinging in 6 degrees of freedom.
In the case where the vibration detecting means 3 is provided at a position apart from the jig 4, the vibrator 1 and the jig 4 vibrate integrally with each other and the jig 4 is supported. The vibration can be accurately detected without being damped by the vibration detecting means 3 provided at a position away from.

Here, by providing two vibration detecting means 3 in the axial direction of the orthogonal coordinates, the calculation is performed between the output values of the two vibration detecting means 3 arranged in each axial direction, and the vibrating body is detected. It is possible to detect the vibration in the orthogonal coordinate axis direction of 1 and the rotation direction around the orthogonal coordinate axis. Further, the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 are made to coincide with each other, and the centroid axis of the total mass of the vibrating body 1 and the jig 4 and the elastic axis of the cushioning material 6 are made to coincide with each other. Since a non-coupling system in which the degree of motion is independent can be configured, the direction of the exciting force of the vibrating body 1 can be accurately and easily detected.

Further, by arranging the driving means 7 for driving the holding means 2 of the vibrating body 1 on the base 5 independently of the jig 4, all the weight elastically supported by the cushioning material 6 can be reduced in weight. Therefore, the vibration gain with respect to the exciting force of the vibrating body 1 can be increased. Further, the lock means 8 for preventing the vibration of the jig 4 except when the vibration of the vibrating body 1 is detected.
In the case where the jig 4 is provided, it is possible to prevent the jig 4 from swinging due to attachment / detachment of the vibrating body 1 to / from the jig 4, and the jig 4 can be accurately positioned.

Further, by providing the center of gravity adjusting means for matching the axis passing through the center of gravity of the vibrating body 1 and the jig 4 with the support axis of the cushioning material 6, the centers of gravity can be easily matched, and the vibration system is not The coupled system, that is, the movement (vibration) having 6 degrees of freedom becomes independent, and the direction of the exciting force of the vibrating body 1 can be accurately detected. Further, by providing the driving means 7 capable of driving the holding means 2 and the locking means 8, the driving means 7 drives the holding means 2 to hold or release the vibrating body 1.
The driving means 7 is driven to lock or unlock the locking means 8.

Further, the holding means 2 is provided with a pair of support ribs 9 provided on the jig 4, a movable plate 10 provided on at least one of the support ribs 9 and a cylinder 11 for driving the movable plate 10. The vibrating body 1 is held or released by moving the movable plate 10 by driving the cylinder 11, and the vibrating body 1 can be automatically attached to and detached from the holding means 2.

Further, by providing the vibrating means 12 on the jig 4, it is possible to detect a change in the performance of the device due to a change in the characteristics of the cushioning material 6. In other words, by providing a reference oscillating means that is a reference for the oscillating force, detecting the vibration when a certain oscillating force is generated and comparing it with the value at the normal time, it is possible to check the abnormality of the device. Become. Further, by providing the position detecting means 13 for detecting the position of the jig 4, it is possible to detect the change in the performance of the device due to the change in the characteristics of the cushioning material 6. That is, it is possible to detect the initial position of the jig 4 and compare it with the value at the normal time to detect the performance change. Here, if a detecting means capable of detecting the vibration of the vibrating body 1 and the position of the jig 4 is provided, the jig 4 for detecting the performance change of the vibration detecting means 3 of the vibrating body 1 and the device by the detecting means. The position detecting means 13 for detecting the position can also be used, and the configuration is simplified.

Further, by providing the jig 4 with the power supply means for the vibrating body 1, it is not necessary to connect another vibrating system to the vibrating body 1. Further, by providing the jig 4 with the external vibrating means 40 for performing impulse-like vibration from the outside of the jig 4,
The characteristics of the jig 4 can be checked by vibrating it with the external vibrating means 40 in the same state as the vibration inspection of the vibrating body 1. The external vibrating means 40 can always apply a constant vibrating force to the jig 4 to check the characteristics of the jig 4.

Further, moving means 43 for moving the driving means 7
The lock means 8 is separated from the driving means 7 and the moving means 43, and the lock means 8 is composed of at least a plurality of pins 60, and the plurality of pins 60 are connected to the lock pin insertion holes 61 of the jig 4. In the jig 4 with a plurality of pins 60 inserted in the lock pin insertion holes 61.
By three-dimensionally positioning the jig 4, the jig 4 can be three-dimensionally positioned with a simple configuration in which the pin 60 is inserted, and when the vibration of the vibrating body 1 is inspected, the jig 4 vibrates. It is possible to perform an accurate inspection without contacting the driving means 7 with the driving means 4.

Further, the vibrating means 12 attached to the jig 4 is
The axial exciter 12a is attached to the jig 4 so that the vibrating direction is not parallel to any of the orthogonal coordinate axes in which the vibration detecting means 3 are arranged. The characteristics of the jig 4 can be checked in six directions at the same time. Further, by providing the vibration direction adjusting means that can freely adjust the vibration direction of the uniaxial vibrator 12a to the jig 4, it is possible to easily distribute the vibration force evenly in all six directions. become.

Further, by providing the waveform generator 41 capable of varying the vibration frequency for vibrating the uniaxial vibrator 12a, the frequency characteristic of the jig 4 can be checked. Further, by providing the waveform generator 41 capable of generating a plurality of vibration frequencies for vibrating the uniaxial vibrator 12a, the frequency characteristics of the jig 4 can be efficiently checked.

Further, since the vibrating means 12 is the voice coil motor, a linear vibrating force can be generated with respect to the input current, so that the vibrating frequency can be easily set.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the embodiments shown in the accompanying drawings. FIG. 1 shows an embodiment of a vibration detecting device for a vibrating body according to the present invention. A column 14 is erected on the base 5, and a jig 4 is supported on the column 14 provided on the base 5 via a cushioning material 6 so as to be swingable in 6 degrees of freedom. Jig 4
The characteristics of the holding means 2 for holding the vibrating body 1, the vibration detecting means 3 for detecting the vibration of the vibrating body 1, the power supply means 20 that is a means for supplying power to the vibrating body 1, and the cushioning material 6. A vibrating means 12 serving as a reference vibrating means for detecting a change is provided.

In the embodiment shown in the accompanying drawings, the holding means 2 is composed of opposing support ribs 9, a movable plate 10 provided on at least one of the support ribs 9 and means for moving the movable plate 10. The movable plate 10 is provided at the tip of a movable body 15 penetrating the supporting rib 9 so as to be movable, and a spring member 16 is interposed between the movable plate 10 and the supporting rib 9 so that the spring member 16 can move.
The elastic plate 10 is elastically pressed toward the opposing support rib 9 side (arrow A side in FIG. 2), and the vibrating body 1 is supported by the movable plate 10 and the opposing support rib 9. . A shaft support 17 is provided on the support rib 9, and a shaft 19 serving as a fulcrum of a bell crank 18 is supported on the shaft support 17, and a cylinder 11 that constitutes a drive means 7 is arranged apart from the jig 4. By applying an acting force to the bell crank 18 by means of this, the movable plate 1 is attached to the tip end against the spring force of the spring member 16.
The movable body 15 having 0 is moved to the arrow B side in FIG. In addition, the movable plate 10 has a power supply means 20.
Is provided.

Two vibration detecting means 3 for detecting the vibration of the vibrating body 1 are arranged in each axial direction (X-axis, Y-axis, Z-axis direction) of the orthogonal coordinates as shown in the explanatory view of FIG. I am doing it.
That is, the vibration detecting means 3x ₁ and 3x ₂ are arranged as the vibration detecting means 3 in the X-axis direction, and the vibration detecting means 3 in the Y-axis direction.
Are arranged as the vibration detecting means 3y ₁ and 3y ₂ and the vibration detecting means 3z ₁ and 3z ₂ are arranged as the vibration detecting means 3 in the Z-axis direction, and the two vibration detecting means 3 are arranged in the respective axial directions. Of the output values of the vibrating body 1 in six degrees of freedom, that is, in the orthogonal coordinate axis directions (X, Y, Z) of the vibrating body 1.
Direction) and the direction of rotation around the Cartesian coordinate axes (θx, θy, θ
Vibration in the z direction) is detected. here,
The detected vibration may be any of vibration displacement, vibration velocity, and vibration acceleration.

In the present invention, when the vibrating body 1 is held by the jig 4, the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 are set to coincide with each other. It is set so that the center of gravity of the total mass of 4 and the elastic axis of the cushioning material 6 coincide with each other. Then, the jig 4 is attached to the base 5 6
As shown in FIG. 4, for example, the cushioning member 6 that swings freely has a spring member 6a ₁ having an elastic coefficient k ₁ and an elastic coefficient k ₁ as shown in FIG.
₁ spring material 6a ₂ and elastic coefficient k ₂ spring material 6b ₁ ,
When the cushioning material 6 is composed of the spring material 6b ₂ having the elastic coefficient k ₂ , and the center of gravity axis passing through the center of gravity G of the total mass of the vibrating body 1 and the jig 4 supporting the vibrating body 1 is in the Y-axis direction. , And the elastic axes of the spring material 6a ₁ and the spring material 6a ₂ are set to coincide with each other in the Y-axis direction. Here, the elastic coefficients of the spring material 6a ₁ and the spring material 6a ₂ are both k ₁ , and the spring material 6b ₁ and the spring material 6b.
Both ₂ modulus of elasticity is set to k _2.

The base 5 is further independent of the jig 4,
Driving means 7 (cylinder 11 in the embodiment) for driving the holding means 2 of the vibrating body 1 and locking means 8 are provided. When the vibrating body 1 is held by the holding means 2, the driving means 7 and the locking means 8 are completely vibration-insulated from the jig 4. Cylinder 1 constituting drive means 7
When 1 is descending, the bell crank 18 and the cylinder 11 are in a non-contact state as shown in FIG. 1, the locking means 8 and the jig 4 are in a non-contact state, and the jig 4 is in a non-contact state. The movable plate 10 is supported only by the cushioning member 6 on the base 5, and the movable plate 10 is pressed against the opposing supporting rib 9 side by the spring member 16. In this state, the holding means 2 holds the vibrating body 1 to detect vibration. It is in a state. On the other hand, the cylinder 11 which constitutes the driving means 7 is driven and moved upward to push the bell crank 18 upward, whereby the jig 4 is pushed upward via the support rib 9 and the gap s shown in FIG. When, ie, the jig 4 is pressed against the lock means 8, the lock means 8 locks the jig 4. Here, when the cylinder 11 which constitutes the driving means 7 further pushes the bell clamp 18 upward, the movable body 15 is moved in the direction of arrow B in FIG. 2 against the spring force of the spring member 16 and faces the movable plate 10. The support rib 9 is widened (that is, the holding means 2 is opened).

Next, the operation of the vibration detecting device for a vibrating body having the above-mentioned structure will be described. The vibrating body 1 is set on the jig 4 by an arbitrary carrying means. At this time, the driving means 7
Is driven to raise the jig 4 so that the clearance s in FIG.
Then, the jig 4 is locked and fixed by the lock means 8, and at the same time, the holding means 2 is resisted against the spring force of the spring member 16.
Is open. Next, the driving means 7 is operated in the reverse direction. Then, the spring force of the spring member 16 causes the movable plate 10 to move.
Moves to close the holding means 2, the holding means 2 completely fixes the vibrating body 1 to the jig 4, and at the same time the locking means 8 is released, and the power supply means 20 contacts the electrode of the vibrating body 1. A voltage is supplied to the vibrating body 1. Then, the transportation means is detached, and the jig 4 is supported by the base 5 only through the cushioning material 6, and is in a state of being swingable in 6 degrees of freedom. Then, the vibrations of the respective points are simultaneously detected by the six vibration detecting means 3, and the calculation is performed to calculate the vibrations of 6 degrees of freedom. When the vibration detection is completed, the driving means 7 is operated again, the jig 4 is fixed by the locking means 8, the holding means 2 is opened, and the vibrating body 1 is removed from the jig 4 by the carrying means. Here, the driving of the driving means 7 is such that the vibrating body 1 is automatically attached and detached by being controlled by a personal computer or the like. By repeating the above operation, the vibration of the vibrating body 1 with 6 degrees of freedom is automatically detected. Here, the feature extraction is performed from the obtained vibration of the vibration body 1 having 6 degrees of freedom. Thereby, the quality of the vibrating body 1 can be determined. In determining the quality of the vibrating body 1 in this case, for example, Japanese Patent Application No.
The method shown in No. 5968 can be adopted. In addition,
The vibrating body 1 may be, for example, a motor.

By the way, in this embodiment, as a means for maintaining the performance of the vibration detecting device, a vibrating means 12 serving as a reference vibrating means for detecting a characteristic change of the cushioning material 6 is provided. The known vibrating force is applied to the jig 4 by the vibrating means 12 serving as the reference vibrating means, and the output value of the vibration detecting means 3 at that time is compared with the normal value to check the abnormality of the apparatus. Has become.

Next, another embodiment of the present invention will be described in detail with reference to FIG. A pillar 14 is erected on the base 5, and the jig 4 is mounted on the pillar 14 provided on the base 5 via a cushioning material 6.
It is freely swingable and supported. The jig 4 is provided with a holding means 2 for holding the vibrating body 1 and a center of gravity adjusting means 21. In this embodiment, the center of gravity of the vibrating body 1 and the jig 4 are used.
The center of gravity of the vibrating body 1 and the jig 4 are matched with the elastic axis of the cushioning material 6.

In the embodiment shown in the accompanying drawings, the holding means 2 includes supporting ribs 9 facing each other, a movable plate 10 provided on one of the supporting ribs 9, a means for moving the movable plate 10, and another supporting rib 9. The movable plate 22 is provided so as to be movable, and means for moving the movable plate 22. The movable plate 10 is a support rib 9
Is provided at the front end of the movable body 15 penetrating the movable plate 15 in a freely movable manner, and a spring member 16 is interposed between the movable plate 10 and the support rib 9 to support the movable plate 10 by the spring member 16 side. The vibrating body 1 is supported by being elastically pressed toward (the arrow A side in FIG. 5) and supported by the movable plate 10 and the supporting ribs 9 facing each other. A shaft support 17 is provided on the support rib 9, and a shaft 19 serving as a fulcrum of a bell crank 18 is supported on the shaft support 17, and a cylinder 11 constituting a drive means 7 arranged away from the jig 4 is used. Bell crank 1
By applying an acting force to 8, the movable body 15 having the movable plate 10 at its tip is moved to the arrow B side in FIG. 5 against the spring force of the spring member 16. Further, the movable plate 10 is provided with a power supply means 20. The moving plate 22 is provided, for example, at the tip of a horizontally oriented screw rod 23 screwed into the support rib 9, and the position of the moving plate 22 is moved in the axial direction of the screw rod 23 by rotating the screw rod 23 by some means. You can do it. That is, the vibrating body 1 is sandwiched between the movable plate 10 and the moving plate 22, but the holding position of the vibrating body 1 is changed by rotating the screw rod 23 to change the position of the moving plate 22. It can be adjusted in the direction.

The jig 4 is provided with a center of gravity adjusting means 21. The center of gravity adjusting means 21 includes a first center of gravity adjusting means 21a,
It is constituted by the second center of gravity adjusting means 21b. The first center-of-gravity adjusting means 21a is configured by vertically arranging four vertically oriented screw rods 24 on the front and rear portions on the left and right sides of the jig 4, and screwing a weight 25 as a load onto each vertically oriented screw rod 24. In order to adjust the center of gravity of the jig 4 by moving the weight 25 in the vertical direction without adjusting the vibrating body 1 to the jig 4, so that the center of gravity of the jig 4 coincides with the elastic axis of the cushioning material 6. Adjust to. Here, in the embodiment, the first center-of-gravity adjusting means 21a is adjusted so as to be horizontal and is made to coincide with the elastic axis of the cushioning material 6. Further, the second center-of-gravity adjusting means 21b is used for the horizontal screw rod 2 for moving the moving plate 22 in the horizontal direction as described above.
3, the vibrating body 1 is attached to the holding means 2 of the jig 4.
While the screw bar 23, which is the second center-of-gravity adjusting means 21b, is rotated and moved with respect to the support rib 9, the position of the moving plate 22 in the axial direction of the screw bar 23 is finely adjusted. As a result, the center of gravity of the vibrating body 1 held by the movable plate 22 and the movable plate 10 and the center of gravity of the jig 4 are aligned with each other, and the center of gravity of the entire mass of the vibrating body 1 supported by the jig 4 and the jig 4 is set. Is adjusted so as to match the elastic axis of the cushioning material 6. Here, in the embodiment, the screw bar 23 is rotated to adjust the jig 4 to be horizontal, so that the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 coincide with each other, and at the same time, the jig 4 moves. The center of gravity of the entire mass of the vibrating body 1 supported by the jig 4 and the elastic axis of the cushioning material 6 can be matched. By adjusting the first center-of-gravity adjusting means 21a and the second center-of-gravity position adjusting means 21b in this manner, the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 are made to coincide with each other, and the vibrating body 1 and the jig 4 are connected to each other. The center of gravity axis of the total mass and the elastic axis of the cushioning material 6 can be matched.

In this embodiment, the vibration detecting means 3 for detecting the vibration of the vibrating body 1 is provided independently of the jig 4. That is, a plurality of supporting portions 26 are erected from the base 5, and the vibration detecting means 3 is provided on the supporting portions 26. The vibration detecting means 3 is a non-contact type position detecting sensor which is not in contact with the jig 4. It is composed by. Also in this example,
The vibration detecting means 3 for detecting the vibration of the vibrating body 1 is, as shown in the explanatory view of FIG. 3, each axial direction of the orthogonal coordinates (X axis, Y axis).
Two of them are arranged in each of the axes and the Z-axis direction). That is, X
The vibration detection means 3x ₁ , 3 as the vibration detection means 3 in the axial direction
The x ₂ is arranged, the vibration detecting means 3y _1, 3y ₂ arranged as a vibration detecting unit 3 in the Y-axis direction, Yes disposed vibration detecting means 3z _1, 3z ₂ as a vibration detecting unit 3 in the Z-axis direction, A calculation is performed between the output values of the two vibration detecting means 3 arranged in each axial direction to vibrate the vibrating body 1 in six degrees of freedom, that is, the orthogonal coordinate axis directions (X, Y, Z) of the vibrating body 1. Direction) and rotations around the orthogonal coordinate axes (θx, θy, θz directions). Here, the detected vibration may be any of vibration displacement, vibration velocity, and vibration acceleration.

The base 5 is further independent of the jig 4,
Driving means 7 (cylinder 11 in the embodiment) for driving the holding means 2 of the vibrating body 1 and locking means 8 are provided. When the vibrating body 1 is held by the holding means 2, the driving means 7 and the locking means 8 are completely vibration-insulated from the jig 4. Cylinder 1 constituting drive means 7
When 1 is descending, the bell crank 18 and the cylinder 11 are in a non-contact state as shown in FIG. 5, the locking means 8 and the jig 4 are in a non-contact state, and the jig 4 is The movable plate 10 is supported only by the cushioning member 6 on the base 5, and the movable plate 10 is pressed by the spring member 16 toward the opposite movable plate 22 side. In this state, the holding means 2 holds the vibrating body 1 to detect vibration. It is in a state. On the other hand, the cylinder 11 which constitutes the driving means 7 is driven and raised to push up the bell crank 18 upward, whereby the jig 4 is pushed up via the support rib 9 and the jig 4 is moved to the locking means 8. The jig 4 is locked by the locking means 8 in the pressed state. Here, when the cylinder 11 that constitutes the driving means 7 further pushes the bell clamp 18 upward, the movable body 15 is moved in the direction of arrow B in FIG. 5 against the spring force of the spring material 16, and opposes the movable plate 10. The gap between the movable plate 22 and the moving plate 22 is widened (that is, the holding means 2 is opened).

Next, the operation of the vibration detecting device for a vibrating body according to the second embodiment having the above-mentioned structure will be described. First, before the vibrating body 1 is set, the first center of gravity adjusting means 21
The center of gravity of the jig 4 is finely adjusted by a, and the jig 4 is horizontally adjusted to match the elastic axis of the cushioning material 6. In this state,
The jig 4 is raised by driving the driving means 7, and the jig 4 is locked and fixed by the lock means 8, and at the same time, the holding means 2 is opened against the spring force of the spring member 16. In this state, the vibrating body 21 is set on the jig 4 by an arbitrary carrying means. Next, the driving means 7 is operated in the reverse direction. Then, the movable plate 10 is moved by the spring force of the spring member 16 to close the holding means 2, the holding means 2 completely fixes the vibrating body 1 to the jig 4, and at the same time the locking means 8 is released, and the power source is The supply means 20 comes into contact with the electrodes of the vibrating body 1, and the voltage is supplied to the vibrating body 1. Then, the transportation means is detached, and the jig 4 is supported by the base 5 only through the cushioning material 6, and is in a state of being swingable in 6 degrees of freedom. next,
The center of gravity of the vibrating body 1 held by the holding means 2 in the jig 4 and the center of gravity of the jig 4 are adjusted by adjusting the second center of gravity adjusting means 21b, and the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 are matched. And the center of gravity of the total mass of the vibrating body 1 and the jig 4 are aligned with the elastic axis of the cushioning material 6. In this case, when the vibrating body 1 is set on the jig 4 which is leveled by the first center-of-gravity adjusting means 21a, if the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 do not match, the jig 4 will be Therefore, when the jig 4 becomes horizontal by being adjusted by the second center-of-gravity adjusting means 21b, the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 coincide with each other. Then, the vibrations of the respective points are simultaneously detected by the six vibration detecting means 3, and the calculation is performed to calculate the vibrations of 6 degrees of freedom. When the vibration detection is completed, the driving means 7 is restarted.
Is operated to fix the jig 4 by the lock means 8, the holding means 2 is opened, and the vibrating body 1 is removed from the jig 4 by the carrying means. Here, the drive of the drive means 7 is controlled by a personal computer or the like so that the vibrating body 1 is automatically attached and detached. Repeat the above operation to automatically
Detect vibrations in degrees of freedom. Here, 6 of the obtained vibrating body 1
Features are extracted from the vibration of the degree of freedom. Thereby the vibrating body 1
It is also possible to judge the quality of. Vibrating body 1 in this case
In determining the quality of the above, for example, a method as shown in Japanese Patent Application No. 5-5968 filed by the present applicant can be adopted.

Therefore, as in the present embodiment, the center of gravity of the vibrating body 1 and the center of gravity of the jig 4 are made to coincide with each other, and the center of gravity of the total mass of the vibrating body 1 and the jig 4 and the cushioning material 6 are combined. By making the elastic axes coincide with each other, it is possible to construct a non-coupling system in which the motions of each degree of freedom are independent. That is, the vibrating system is a non-coupling system, that is, the movement (vibration) of 6 degrees of freedom becomes independent, and the vibrating body 1
The direction of the exciting force of can be detected accurately. Here, in order to obtain the vibration gain Gv with respect to the exciting force F in advance, the magnitude of the exciting force can be calculated from the observed vibration V as F = Gv.
It can be determined by the formula of × V.

By the way, the vibration detecting means 3 in this embodiment is composed of a non-contact type position detecting sensor for the vibration system of the vibrating body 1, and not only detects the vibration of the vibrating body 1 but also at the time of adjusting the center of gravity. The horizontal position of the jig 4 and the initial position of the jig 4 when the vibrating body 1 is not set are detected, and compared with the normal value, the position of the jig 4 due to deterioration of the cushioning material 6 or the like. It is also used as a means for inspecting the deviation.

Next, still another embodiment of the present invention will be described with reference to FIGS. In the structure of the vibration detecting device in this embodiment, a jig 4 having a holding means 2 for holding the vibrating body 1 and a vibration detecting means 3 for detecting vibration can be freely swung in a base 5 with 6 degrees of freedom. A driving means 7 for supporting the holding means 2, a moving means 43 for moving the driving means 7 in the vertical direction, and a swing of the jig 4 except when vibration is detected. The lock means 8 for locking and the external vibrating means 40 for detecting the characteristic change of the jig 4 are configured.

Here, the holding means 2 is a supporting rib 9 facing each other.
And the movable plate 10 provided on at least one of the support ribs 9.
And means for moving the movable plate 10. The movable plate 10 is a movable body 15 penetrating the support rib 9 in a freely movable manner.
The spring member 16 is provided between the movable plate 10 and the support rib 9 and is provided at the tip of the movable plate 1 by the spring member 16.
0 is elastically pressed toward the opposing support rib 9 side, and the vibrating body 1 is supported by the movable plate 10 and the opposing support rib 9. At the rear end of the movable body 15, a U-shaped locking portion 15a having a U-shape in plan view is provided.

The drive means 7 is constructed by providing a locking projection 46 at the tip of the drive rod 45 of the cylinder device 44.
The cylinder device 44 constituting the drive means 7 is the moving means 4
It is movable up and down by 3. When the cylinder device 44 descends and the locking projection 46 is located below the U-shaped locking portion 15a, the drive means 7 and the movable body 1 are moved.
The edge is completely cut off from No. 5. Then, the cylinder device 44 is raised and the locking projection 46 is inserted into the U-shaped locking portion 15a from the lower opening of the U-shaped locking portion 15a. In this state, the cylinder device 44 is driven to drive the spring member 16 The movable body 15 is moved against this. Since the driving means 7 is vertically movable by the moving means 43 in this manner, the driving means 7 is lowered to hold the vibrating body 1 in the holding means 2.
In the state of being held by, the driving means 7 is completely vibration-insulated from the jig 4, and the reliability of vibration detection can be improved. Further, the driving means 7 is completely separated from the jig 4 and provided at an independent position, so that the jig 4
The weight can be reduced.

The lock means 8 for preventing the jig 4 from swinging except when the vibration is detected is provided separately from the driving means 7 and the moving means 43 at an independent position. This locking means 8
Is composed of a plurality of pins 60. In the embodiment, it is composed of three pins 60, and two pins are arranged on either the front side or the rear side of the jig 4, and one pin is arranged on either side. And
Lock pin insertion holes 6 provided on the front and rear surfaces of the jig 4.
It can be freely inserted into 1. A pin support 64, into which the pin 60 is movably inserted, is fixed by fixing bolts 65 on a substrate 63 fixed to the upper surface of the base 5, and a cylinder forming a pin driving means 62 is fixed to the substrate 63. Device 6
7 is fixed. A locking projection 66 is provided at the rear end of the pin 60.
Is provided, and a U-shaped locking portion 69 is provided at the tip of the rod 68 of the cylinder device 67, and the locking projection 66 is vertically movably fitted in the U-shaped locking portion 69. The pin support 64 is provided with pin insertion angle adjusting means 70. In the embodiment of FIGS. 8 to 10, the pin angle adjusting means 70 is configured by screwing at least three or more bolts 71 on the left and right and the front and rear. That is, each of the bolts 71 is screwed into the female screw portion provided on the pin support 64. If the plurality of pins 60 (three in the embodiment) provided on the jig 4 are not completely aligned with the plurality of lock pin insertion holes 61, the pin insertion angle adjusting means 70 is damaged. Is used to adjust the insertion angle of the pin 60. That is, as shown in FIG. 8, with the pin support 64 placed on the substrate 63, the fixing bolt 65 is
In order to adjust the insertion angle of the pin 60 from the state in which the pin is tightened and fixed, the fixing bolt 65 is first loosened, and the bolt 71 is rotated in this state so that the lower end portion of the bolt 71 is fixed to the pin support 6
4, the pin support 64 is lifted from the substrate 63 and the pin 6 is pressed against the substrate 63 as shown in FIG.
The height of 0 is adjusted and the fixing bolt 65 is fixed in this state, or as shown in FIG. 10, the plurality of bolts 71 are made to have different projecting lengths from the pin support 64 to the downward direction. While tilting 60, the tilt angle is adjusted, and in this state, it is fixed by the fixing bolt 65. FIG.
Even if the state of FIG. 9 is adjusted to the state of FIG. 9 and FIG. 10, the locking state is secured only by moving the locking projection 66 up and down within the U-shaped locking section 69. The driving of the pin 60 by 67 is not hindered.

The external vibrating means 40 is arranged at a position completely separated from the jig 4, and an impulse-like vibrating (impulsive vibrating) is applied to the jig 4 from the outside of the jig 4. Done, jig 4
It is used to detect changes in the characteristics of. Impulse-like excitation refers to excitation with a waveform represented by the formula shown below.

[0045]

[Equation 1]

As a characteristic of exciting with the waveform represented by the equation (1), the frequency components as shown in FIG. 11A, that is, all the frequencies are approximately the same (with a perfect impulse waveform). (Exactly the same) included, and by observing the vibration of the jig 4 due to impulse excitation, the jig 4
The frequency characteristics from low frequency range to high frequency range can be analyzed in a short time. At this time, since it is difficult to apply the impulse excitation force to the jig 4 with a constant magnitude every time, it is necessary to normalize the excitation force. Further, the frequency of the exciting force can be adjusted depending on the material used for the collision portion 40a of the external exciting means 40. For example, if it is not necessary to investigate the characteristics up to high frequencies, the resin material can be used.
A vibrating force including frequencies as shown in 1 (b) can be applied. On the other hand, by using a metal material,
Excitation force including frequencies as shown in (c) can be applied, and frequency characteristics up to high frequencies can be known. Next, the operation of this embodiment will be described. First, the lock pin insertion holes 61 provided in the jig 4 with the pins 60 constituting the lock means 8 at three locations
And then the jig 4 is three-dimensionally positioned and fixed.
That is, in this embodiment, the three pins 60 in FIG.
Is inserted into the lock pin insertion hole 61, positioning is performed in two directions orthogonal to the axial direction of the pin 60, and the stepped portion 60a is provided on the pin 60.
Hits the edge of the lock pin insertion hole 61 to position the pin 60 in the axial direction, and as a result, the jig 4 is positioned and fixed so as not to move three-dimensionally. After the positioning and fixing of the jig 4 is performed by the lock means 8 in this way, the moving means 43
6 to move the driving means 7 to the position A in FIG.
Is inserted into the U-shaped locking portion 15a, and in this state, the driving means 7 is driven to pull the holding means 2 to release the clamp. In this unclamped state, the vibrating body 1 is carried to the jig 4 by some kind of carrying means and set, and when the setting is completed, the driving means 7 is driven in the opposite direction to clamp the vibrating body 1 by the holding means 2. And hold. Thereafter, the moving means 43 moves the driving means 7 to the position B in FIG. 6, and the lock means 8 unlocks the jig 4. As a result, the jig 4 is completely vibration-insulated from the base 5 (this state is called a vibration-detectable state). After detecting the vibration of the jig 4 by the vibration detecting means 3 in this vibration detectable state, the locking means 8, the moving means 43 and the driving means 7 are respectively operated again, and the vibrating body 1 is removed from the jig 4 by the carrying means. . After that, the above operation is repeated to automatically detect the vibration of the vibrating body 1 with 6 degrees of freedom.

Next, a method of detecting a characteristic change of the jig 4 by the external vibrating means 40 will be described. First, the vibrator 1 is attached to the jig 4
The external vibration means 4 is set to
0 is applied to the jig 4 with an impulse waveform. The vibration of the jig 4 after the vibration is detected by the six vibration detecting means 3, and is divided into vibrations of 6 degrees of freedom by vibration direction by calculation, and the impulse response waveform is observed. By frequency-analyzing this response waveform, the frequency characteristics of the jig 4 can be observed in each of the 6 degrees of freedom. By comparing this result with the normal one, the current characteristic change of the jig 4 is detected.

Next, still another embodiment of the present invention will be described. The configuration of the vibration detecting device for a vibrating body of the present embodiment is the same as that of the embodiment shown in FIG. 6 to FIG.
The present embodiment is characterized by the configuration of the vibrating means 12 for detecting the characteristic change of the jig 4. That is, the vibrating means 12 of the present embodiment is a reference vibrating means capable of giving a known vibration to the jig 4, and the vibrating means 12 is the uniaxial vibrating device 12a. It is characterized in that the vibration exciter 12a is attached to the jig 4 so that the vibration direction is not parallel to any of the rectangular coordinate axes in which the vibration detection means 3 are arranged.

The uniaxial shaker 12a is a shaker that can vibrate in only one direction, and a shaker holding means 80 holding the uniaxial shaker 12a is attached to the jig 4. Shaker holding means 80
Is mounted on the lower base portion 81 which is held by being held by the holding means 2 provided on the jig 4, as shown in FIG. 13, and for mounting the uniaxial vibration exciter 12a on the upper base portion 82. A portion 83 is provided and configured. Then, as shown in FIG. 15, the uniaxial vibrator 12a is attached to the attachment portion 83.
With the uniaxial vibrator 12a attached to the mounting portion 83 as shown in FIG. 15, the uniaxial vibrator 12a is vibrated in the directions of the respective orthogonal coordinate axes shown in FIG. 13 (X axis, Y axis, Z axis). Direction) is set so that neither of them is parallel. Therefore, with the lower base 81 held by the holding means 2,
When the axis exciter 12a excites only in one direction, the orthogonal coordinate axes with respect to the jig 4 are the respective orthogonal axis directions (X axis, Y axis).
Axis, Z-axis direction and rotation directions around it (θx, θy,
The structure is such that vibration can be applied to θz). It should be noted that two vibration detecting means 3 are arranged in each axial direction (X-axis, Y-axis, Z-axis direction) of the Cartesian coordinate axes, as already described in the first embodiment.

Here, the upper base portion 82 is shown in FIG.
As shown in (b) and (c), a hole to be the mounting portion 83 is provided in an inclined manner, and further two screw holes 84 are provided on the lower surface of the upper base portion 82, while the lower base portion 81 is provided. FIG. 14 (d)
As shown in (e) and (f), one shaft hole 85a and one elongated hole 85b having an arcuate cross section are provided. Then, the upper base portion 82 is placed on the lower base portion 81 as shown in FIG. 13, and a bolt (not shown) inserted into the shaft hole 85 a is attached to the upper base portion 82 of the lower base portion 81.
The lower base portion 81 is screwed into one of the screw holes 84 and the bolt (not shown) inserted into the long hole 85b is screwed into the other screw hole 84.
In this case, the upper base portion 82 is attached, and in this case, by adjusting the vibration direction of the uniaxial vibration exciter 12a with respect to the jig 4, by screwing the bolts in the elongated holes 85b in a state of being slid and positioned, Adjustments are made so that the vibration is evenly distributed in any direction.

Power is supplied from the waveform generator 41 to the uniaxial vibrator 12a, and 86 is an amplifier for amplifying the output of the waveform generator 41. The waveform generator 41 has a function of generating, for example, a sine wave of a trigonometric function, which causes the uniaxial vibrator 12a to vibrate. However, a uniaxial vibrator 12a with a built-in voice coil motor should be used. Since the vibration having the same frequency as the signal output from the waveform generator 41 is generated, there is an advantage that the vibration frequency can be easily understood. FIG. 16 shows a uniaxial vibrator 12a with a built-in voice coil motor as the vibrator 12. This is the fixed part 87
, The permanent magnet 88 fixed to the fixed portion 87, and the coil 8
9 and a linear guide 90 for smoothly moving the coil 89 in one direction with respect to the fixed portion 87, an electromagnetic force proportional to the current supplied from the amplifier 86 acts on the coil, and the linear guide The coil moves in the direction forced by 90, thereby generating vibration. If a device having a function of changing the frequency of the signal output from the waveform generator 41 is used, the characteristics of the jig 4 for each frequency can be observed. Furthermore, if the waveform generator 41 having a function capable of outputting a waveform including a plurality of frequencies is used, the characteristics of the jig 4 for each frequency can be obtained very efficiently.

Next, the operation of this embodiment will be described. First, the uniaxial shaker 12 a that constitutes the shaker 12 that is the reference shaker is attached to the attachment portion 83 of the upper base portion 82. Then, the holding means 2 provided on the jig 4 is opened, the lower base portion 81 is set on the holding means 2, and the holding means 2 is closed. After that, the present embodiment is set to the vibration detectable state described in the above-described embodiments, and the output signal of the waveform generator 41 is input to the uniaxial vibrator 12a that is the reference vibration means to vibrate the jig 4. This time,
Even if the vibrating means 12 is the one-axis exciter 12a with a built-in voice coil motor capable of vibrating only in one direction, the one-axis exciter 1
When 2a is attached to the holding means 2, it is attached to the jig 4 so as not to be parallel to any axial direction of the orthogonal coordinate axes on which the vibration detecting means 3 is arranged as described above. Therefore, 6 directions (X, Y, Z, θ
x, θy, θz) can be applied.
Since the jig 4 has the structure as shown in FIG.
It is preferable to adjust the vibrating directions of (1) and (2) to adjust the vibrating in each direction so as to be uniform in every direction as much as possible.

The vibration to the jig 4 by the vibrating means 12, which is the reference vibrating means, is detected by the vibration detecting means 3, and the jigs are detected from the respective detection outputs of the vibration detecting means 3 by the method described in the first embodiment. 6 directions of 4 (X, Y, Z, θx, θy, θz)
Is calculated, and the magnitude of the vibration of the jig 4 with respect to the magnitude of the vibration input is compared with the normal value to detect the characteristic change of the jig 4. At this time, change the vibration frequency,
By observing the magnitude of vibration of the jig 4 with respect to each frequency, the frequency characteristic of the jig 4 can be known, and the characteristic change of the jig 4 can be detected more accurately. Further, at this time, if the waveform generator 41 capable of simultaneously outputting a waveform including a plurality of frequencies is used, the frequency characteristic of the jig 4 can be efficiently analyzed.

[0054]

According to the first aspect of the present invention, as described above, the jig provided with the holding means for holding the vibrating body and the vibration detecting means for the vibrating body is provided on the base 6 freely. Since it is supported via a shock-absorbing cushioning material, the vibrator and the jig holding the vibrator are completely fixed, and the vibration of the integrated system is detected. The influence of the difference in holding force of the vibrating body on the vibration damping rate is eliminated, and accurate vibration of the vibrating body can be detected. Further, by detecting the vibration of the jig, it is not necessary to remove the vibration detecting means from the drive system once when the vibrator is attached or detached, and it is not necessary to elastically support the vibration detecting means. Can be detected.

Further, in the present invention as defined in claim 2, a jig having a holding means for holding the vibrating body is supported on the base through a cushioning material which can be swung in 6 degrees of freedom, and the jig is used. Since the vibration detection means is provided at a distant position, the vibrating body and the jig holding the vibrating body are completely fixed, and the vibration of the integrated system is detected. The influence of the holding force on the vibration damping rate is eliminated, and accurate vibration of the vibrating body can be detected. Further, by detecting the vibration of the jig by the vibration detecting means at a position distant from the jig, the vibration of the vibrating body can be accurately measured without being damped by the vibration detecting means provided at a position distant from the jig. Can be detected.

In addition, in the invention described in claim 3, in addition to the effect of the invention described in claim 1 or 2, since two vibration detection means are provided in each axial direction of the orthogonal coordinates, each axis is provided. By performing calculation between the output values of the two vibration detecting means arranged in the direction, the vibration of the vibrating body in the orthogonal coordinate axis direction and the rotation direction around the orthogonal coordinate axis can be detected with a simple configuration.

Further, in the invention described in claim 4, in addition to the effect of the invention described in claim 1 or 2, the center of gravity of the vibrating body and the center of gravity of the jig are made to coincide with each other, and Since the center of gravity axis of the total mass and the elastic axis of the cushioning material are matched, it is possible to construct a non-coupling system in which the motions of each degree of freedom are independent, and the vibration force of the vibrating body and its direction can be easily Can be accurately detected.

According to the invention of claim 5, in addition to the effect of the invention of claim 1 or 2, the driving means for driving the holding means for the vibrating body is independent of the jig and is the base. By arranging at, the weight of all the elastically supported by the cushioning material can be reduced, and as a result, the vibration gain with respect to the exciting force of the vibrating body can be increased.

Further, in the invention described in claim 6, in addition to the effect of the invention described in claim 1 or 2, lock means for preventing vibration of the jig is provided except when vibration of the vibrating body is detected. Therefore, the jig can be prevented from rocking except when the vibration of the vibrating body is detected, and the jig can be accurately positioned, thereby improving the productivity. Also,
In the invention described in claim 7, claim 1 or claim 2
In addition to the effects of the invention described above, since the center of gravity adjusting means for aligning the axis passing through the center of gravity of the vibrating body and the jig with the support axis of the cushioning material is provided, the center of gravity can be easily matched, and the vibration system Is a non-coupling system, that is, the movement (vibration) of 6 degrees of freedom becomes independent, and the direction of the exciting force of the vibrating body can be accurately detected.

Further, in the invention described in claim 8, in addition to the effect of the invention described in claim 1 or claim 2, by providing a driving means capable of driving the holding means and the locking means, The vibrating body can be held or released by the holding means by driving, or locked or unlocked by the locking means by driving the driving means, and the mechanism of the device can be simplified.

Further, in the invention described in claim 9, in addition to the effect of the invention described in claim 1 or 2, in addition to the pair of supporting ribs provided on the jig by the holding means, at least one supporting rib is provided. By providing the movable plate provided and the cylinder for driving the movable plate, it is possible to hold or release the holding of the vibrating body by driving the cylinder to move the movable plate,
Since the vibrating body can be automatically attached to and detached from the holding means, the productivity is improved.

According to the invention of claim 10,
In addition to the effect of the invention according to claim 1 or claim 2, since the jig is provided with the vibrating means, it is possible to detect and check the change in the performance of the device due to the change in the characteristic of the cushioning material, and to accurately detect the vibration. It is possible. In addition, in the invention described in claim 11, in addition to the effect of the invention described in claim 1 or 2, since position detecting means for detecting the position of the jig is provided, the device according to the characteristic change of the cushioning material. It is possible to detect and check the change in the performance of, and enable accurate vibration detection.

According to the twelfth aspect of the invention,
In addition to the effect of the invention as set forth in claim 11, since the detection means capable of detecting the vibration of the vibrating body and the position of the jig is provided,
The detecting means can be used both as the vibration detecting means of the vibrating body and the position detecting means for detecting the position of the jig for detecting the change in the performance of the apparatus, and the apparatus can be simplified. In addition, in the invention of claim 13, claim 1 or claim 2
In addition to the effects of the invention described above, since the power supply means for the vibrating body is provided in the jig, it is not necessary to press the power supply means against the vibrating body with an elastic body, and accurate vibration can be detected.

According to the fourteenth aspect of the invention,
In addition to the effects of the invention described in claim 1 or claim 2, since the jig is provided with an external vibrating means for performing impulse-like vibration from the outside of the jig, the characteristics of the jig vibrate. It is possible to check in the same state as when inspecting the body (that is, the state in which the vibrating body is held by the holding means), which enables a more accurate check and can apply a constant vibration force to the jig. It is a thing.

Further, in the invention according to claim 15,
In addition to the effect of the invention according to claim 5 or claim 6, a moving means for moving the driving means is provided, the locking means is separated from the driving means and the moving means, and the locking means is constituted by at least a plurality of pins. Since the plurality of pins are freely inserted into the lock pin insertion holes of the jig and the jig is three-dimensionally positioned with the plurality of pins inserted into the lock pin insertion holes, the inspection of the vibrating body is performed. Sometimes, the vibrating body allows the jig to be accurately inspected without coming into contact with the driving means, and the jig can be positioned three-dimensionally, so that the jig can be accurately positioned. is there.

According to the sixteenth aspect of the invention,
In addition to the effect of the invention as set forth in claim 10, the vibrating means attached to the jig is a uniaxial exciter, and the vibrating direction of the uniaxial exciter is a rectangular coordinate axis in which vibration detecting means are arranged. Since it is attached to the jig so that it is not parallel to any of the axial directions, the jig characteristics can be checked in 6 directions (X, Y, Z,
θx, θy, θz) can be performed simultaneously.

Further, in the invention of claim 17,
In addition to the effect of the invention as set forth in claim 16, since a vibration direction adjusting means for adjusting the vibration direction of the uniaxial vibrator to the jig is provided, the vibration direction can be adjusted. It is possible to easily distribute the excitation force evenly in all directions. In addition, in the invention described in claim 18, in addition to the effect of the invention described in claim 16 or 17,
Since the waveform generator capable of varying the vibration frequency for vibrating the shaft vibrator is provided, the frequency characteristic of the jig can be checked.

According to the invention of claim 19,
In addition to the effect of the invention according to any of claims 16 to 18, since a waveform generator capable of generating a plurality of excitation frequencies for vibrating the uniaxial exciter is provided, It is possible to efficiently check the frequency characteristics of the jig. In addition, in the invention described in claim 20, in addition to the effect of the invention described in any of claims 16 to 19, since the vibrating means is a voice coil motor, it is linear with respect to the input current. Since the exciting force can be generated, the exciting frequency can be easily set.

[Brief description of drawings]

FIG. 1 is a schematic front view of an embodiment of the present invention.

FIG. 2 is an explanatory view showing a mechanism for driving a movable plate of the above.

FIG. 3 is a block diagram showing a vibration detecting means of the same as above, which is arranged in each axis direction (X) of orthogonal coordinates.
It is an explanatory view explaining arranging every two in the axis, the Y-axis, and the Z-axis direction.

FIG. 4 is an explanatory view showing an example of support by the above-mentioned cushioning material.

FIG. 5 is a schematic front view showing another embodiment of the present invention.

FIG. 6 is a schematic front view showing still another embodiment of the present invention.

FIG. 7 is a schematic plan view of the same.

8A and 8B are drawings showing a mounting state of a pin supporter that supports the above-mentioned pins, FIG. 8A is a schematic side view, and FIG. 8B is a schematic front view.

FIG. 9 is a view showing the position adjustment of the above-mentioned pin, wherein (a) is a schematic side view and (b) is a schematic front view.

FIG. 10 is a view showing the position adjustment of the above-mentioned pin, (a)
Is a schematic side view, and (b) is a schematic front view.

11A, 11B, and 11C are graphs showing the relationship between the vibration acceleration level and the frequency in the same as above.

FIG. 12 is a schematic front view showing still another embodiment of the present invention.

13A is a perspective view of a vibrating device holding means used in the above, and FIG. 13B is a perspective view seen from another direction.

14 (a), (b) and (c) are a front view, a side view and a bottom view of an upper base portion, respectively, and (d), (e) and (f) are a front view, a side view and a lower surface of a lower base portion, respectively. It is a figure.

FIG. 15A is a perspective view showing a state in which a uniaxial shaker is attached to the shaker holding means of the above, and FIG. 15B is a perspective view seen from another direction.

FIG. 16: 1 using a voice coil motor used in the above
It is a front view in which a shaft shaker is partially broken.

FIG. 17 is a schematic explanatory view showing a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibrating body 2 Holding means 3 Vibration detecting means 4 Jig 5 Base 6 Buffer material 7 Driving means 8 Locking means 9 Support ribs 10 Movable plate 11 Cylinder 12 Exciting means 12a 1-axis exciter 13 Position detecting means 40 External application Shaking means 41 Waveform generator 43 Moving means 60 pins 61 Lock pin insertion hole

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Takuya Nakatani 1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd.

Claims (20)

[Claims] 1. A jig having a holding means for holding a vibrating body and a vibration detecting means for the vibrating body is supported on a base through a cushioning material which can swing in 6 degrees of freedom. Vibration detection device for vibrating body. 2. A jig having a holding means for holding a vibrating body is supported on a base through a cushioning material which can be swung in 6 degrees of freedom, and a vibration detecting means is provided at a position apart from the jig. A vibration detecting device for a vibrating body. 3. A vibration detecting means is provided for each two in the axial direction of the rectangular coordinate system.
The vibration detecting device for a vibrating body according to claim 1 or 2, wherein the vibration detecting device is provided individually. 4. The center of gravity of the vibrating body and the center of gravity of the jig are made to coincide with each other, and the center of gravity of the total mass of the vibrating body and the jig is made to coincide with the elastic axis of the cushioning material. Claim 1
Alternatively, the vibration detecting device for a vibrating body according to claim 2. 5. The vibration detecting device for a vibrating body according to claim 1, wherein the driving means for driving the vibrating body holding means is arranged on the base independently of the jig. . 6. The vibration detecting device for a vibrating body according to claim 1, further comprising a lock means for preventing vibration of the jig except when vibration of the vibrating body is detected. 7. The vibration of the vibrating body according to claim 1, further comprising center of gravity adjusting means for aligning an axis passing through the center of gravity of the vibrating body and the jig with a support axis of the cushioning material. Detection device. 8. The vibration detecting device for a vibrating body according to claim 6, further comprising drive means capable of driving the holding means and the lock means. 9. The holding means comprises a pair of support ribs provided on the jig, a movable plate provided on at least one of the support ribs, and a cylinder for driving the movable plate. Alternatively, the vibration detecting device for a vibrating body according to claim 2. 10. The vibration detecting device for a vibrating body according to claim 1, wherein the jig is provided with a vibrating means. 11. The vibration detecting device for a vibrating body according to claim 1, further comprising position detecting means for detecting the position of the jig. 12. A detection means capable of detecting the vibration of the vibrating body and the position of the jig is provided.
The vibration detection device for a vibrating body described. 13. The vibration detecting device for a vibrating body according to claim 1, wherein the jig is provided with power supply means for the vibrating body. 14. The vibration detection of a vibrating body according to claim 1, wherein the jig is provided with an external vibrating means for performing impulse-shaped vibration from the outside of the jig. apparatus. 15. A moving means for moving the driving means is provided,
The locking means is separated from the driving means and the moving means, and the locking means is composed of at least a plurality of pins,
6. The jig is three-dimensionally positioned while allowing the plurality of pins to be inserted into the lock pin insertion holes of the jig and inserting the plurality of pins into the lock pin insertion holes. Alternatively, the vibration detecting device for a vibrating body according to claim 6. 16. The vibrating means attached to the jig is a uniaxial vibrating device, and the vibrating direction of the uniaxial vibrating device is parallel to each of the orthogonal coordinate axes in which the vibration detecting means are arranged. 11. The vibration detecting device for a vibrating body according to claim 10, wherein the vibration detecting device is attached to a jig so as not to cause the vibration. 17. A vibration detecting device for a vibrating body according to claim 16, further comprising a vibration direction adjusting means for adjusting a vibration direction of the uniaxial vibrator to the jig. 18. The vibration detecting device for a vibrating body according to claim 16, further comprising a waveform generator capable of varying a vibration frequency for vibrating the uniaxial vibrator. 19. The method according to claim 16, further comprising a waveform generator capable of generating a plurality of excitation frequencies for vibrating the uniaxial exciter. Vibration detection device for the body. 20. The vibration detecting device for a vibrating body according to claim 16, wherein the vibrating means is a voice coil motor.