JPH0837229A - Substrate teaching apparatus - Google Patents

Abstract

PURPOSE:To simply and automatically perform substrate teaching in a stable and efficient manner regardless of the thickness of substrates. CONSTITUTION:A substrate loading cassette 50 has a substrate loading pitch equal to an integral multiple of the amount of one step of a stepping motor 5. The cassette 50 also has substrate loading positions that makes the cassette 50 accommodate substrates 6 with a thickness of 0.38 mm-a few millimeters. A laser beam 11 is projected from a laser light source 52 to a laser beam detection sensor 53, oppositely placed in a position angled at theta to the plane on which the laser light source 52 is placed, in order to detect the position of substrates 6 placed in the substrate loading cassette 50. A detection signal processing circuit system 10 judges whether the laser beam 11 is sensed by the detection sensor 53.

Description

Detailed Description of the Invention [Industrial applications]

The present invention relates to a substrate teaching apparatus having a robot transfer arm for forming a pattern on a semiconductor substrate used for manufacturing a semiconductor device such as a semiconductor integrated circuit, and particularly to a substrate position and a substrate regardless of a change in substrate thickness. The present invention relates to a substrate teaching device that is capable of detecting both the position and the substrate thickness.

[0002]

2. Description of the Related Art In recent years, as the performance of semiconductor integrated circuits has improved, a dry etching technique capable of forming an extremely fine pattern in the submicron region has been required. Usually, in order to form a pattern on a semiconductor substrate, reactive ion etching is used from the viewpoint of productivity, and E is used from the viewpoint of high etching selectivity and freedom of etching parameters.
CR ion flow etching is widely used.

Further, in these etchings, from the viewpoints of measures against particles, process stability, and productivity, a load lock chamber in which a substrate loading cassette is placed, and a robot transfer arm for transferring a substrate from the load lock chamber to the etching chamber. An etching apparatus having a is widely used.

However, in a conventional etching apparatus having a load lock chamber in which these substrate loading cassettes are arranged and a robot transfer arm for transferring the substrate from the load lock chamber to the etching chamber, for example, an X-ray mask substrate is used. When the thickness of the substrate changes greatly from lot to lot, it is necessary to adjust the transfer position of the robot transfer arm and the transfer position of the substrate, and to prepare a dedicated cassette corresponding to the thickness of each substrate. Therefore, it is an important issue to realize a substrate teaching device that can easily detect the position of the substrate and the thickness of the substrate regardless of the thickness of the substrate.

FIG. 4 is a cross-sectional view of an essential part showing a structure of a conventional substrate teaching apparatus for an etching apparatus having a robot transfer arm for forming a pattern on a semiconductor substrate used for manufacturing a semiconductor device such as a semiconductor integrated circuit. is there. In FIG. 4, reference numeral 1 is a substrate loading cassette, 2 is a stage, 3 is a cassette fixing portion, 4 is a moving mechanism for the stage 2 and the substrate loading cassette 1, 5 is a stepping motor,
6 is a substrate, 7 is a laser light source, 8 is a sensor, 9 is a power source,
Reference numeral 10 is a detection signal processing circuit system, 11 is a light source, 12 is a control circuit system, and 13 is a robot transfer arm.

In the substrate teaching apparatus thus constructed, first, the substrate loading cassette 1 in which a desired number of substrates 6 are loaded at a position determined by the stage 2 and the cassette fixing portion 3 is installed. . Then, the stage 2 and the substrate loading cassette 1 are adjusted so that they can be moved by an amount corresponding to the pitch of the substrate loading cassette 1 whose substrate loading position (hereinafter referred to as pitch) is predetermined. In accordance with the step amount of the stepping motor 5 that is present, the stage 2 and the substrate loading cassette 1 are moved in the vertical direction via the moving mechanism 4.

At this time, in order to detect whether or not the substrate 6 is correctly installed at the substrate transfer position by the robot transfer arm 13, the laser beam 11 from the power source 9 and the laser light source 7 is in the same plane as the laser light source 7. The detection signal processing circuit system 10 determines whether or not the laser beam 11 emitted toward the installed laser beam detection sensor 8 is sensed by the detection sensor 8.

In this way, the substrate 6 is moved to the substrate transfer position by the step amount of the stepping motor 5 set in advance corresponding to the pitch of the substrate loading cassette 1 and at the substrate transfer position. The laser light source 7 installed in the same plane is used to detect whether or not there is
And the detection signal processing circuit system 10 makes a determination through the laser beam detection sensor 8 to form a substrate transfer sequence.

Therefore, when the thickness of the substrate and the pitch of the substrate loading cassette 1 are different, the step amount of the stepping motor 5 for vertically moving the stage 2 and the moving mechanism 4 of the substrate loading cassette 1 is changed. It is necessary to readjust. Further, it is necessary to adjust the positions of the laser light source 7 and the laser light source detection sensor 8 installed on the same plane and to adjust the substrate transfer position by the robot transfer arm 13.

[0010]

However, in the substrate teaching apparatus used in the etching apparatus and the like configured as described above, the thickness of the substrate 6 such as the X-ray mask substrate is, for example, 0.38 mm, 1 mm, When it varies greatly from lot to lot of 2 mm, it is possible to adjust the step amount of the stepping motor 5, adjust the positions of the laser light source 7 and the laser light source detection sensor 8 installed on the same plane, and change the substrate transfer position by the robot transfer arm 13. I spent a lot of time adjusting things.

Further, since the stepping motor 5 has a constant step amount, the vertical movement amount of the moving mechanism 4 of the substrate loading cassette 1 is limited to a positive multiple of the stepping motor 5 one step amount. To be done. Therefore, the usable substrate loading pitch of the substrate loading cassette 1 is limited to a cassette which is a positive multiple of the pitch of the substrate loading cassette 1 with respect to the standard substrate thickness.

However, the standard substrate thickness (0.38 m
The standard substrate loading cassette for m) is inexpensive and easily available, but for substrate loading with a pitch that is a positive multiple of the standard substrate loading cassette for 1 mm and 2 mm thick substrates. Due to the fact that it is extremely expensive and difficult to obtain a cassette, if a standard substrate loading cassette is dare to be used, the substrate teaching will vary among workers, and it is difficult to perform highly accurate substrate teaching. There was a problem.

Therefore, the present invention has been made in order to solve the above-mentioned conventional problems, and an object thereof is to stably and easily perform highly accurate substrate teaching regardless of the thickness of the substrate. It is to provide a substrate teaching device that can be efficiently performed.

[0014]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention is a substrate teaching apparatus having a substrate loading cassette and a cassette moving mechanism, wherein the substrate loading cassette has a step movement amount of the cassette moving mechanism. A substrate loading position having a pitch that is a positive multiple is provided.

In another invention, a substrate loading cassette having a substrate loading position having a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism, and a substrate placed in the substrate loading cassette are slanted. And a position detection laser light source for detecting the position of the substrate and a position detection sensor.

In another invention, a substrate loading cassette having a substrate loading position having a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism, and a substrate placed in the substrate loading cassette are slanted. A laser light source for position detection and a sensor for position detection, which are arranged so as to cross the direction and detect the position of the substrate, and in the cassette for loading the substrate in response to the detection / non-detection signal of the laser beam of this position detection sensor. A detection signal processing circuit that determines the presence or absence of a substrate at the transfer position of the arranged substrates and a control circuit that controls the cassette moving mechanism corresponding to the detection result of the detection signal processing circuit are configured.

According to another aspect of the present invention, a substrate loading cassette having a substrate loading position having a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism and a substrate placed in the substrate loading cassette are slanted. A laser light source for position detection and a sensor for position detection, which are arranged so as to cross the direction and detect the position of the substrate, and a height detection multi-sensor arranged axially symmetrical to the laser light source for position detection and for detecting the thickness of the substrate. And a sensor.

In another invention, a substrate loading cassette having a substrate loading position having a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism, and a substrate placed in the substrate loading cassette are slanted. A laser light source for position detection and a sensor for position detection, which are arranged so as to cross the direction and detect the position of the substrate, and in the cassette for loading the substrate in response to the detection / non-detection signal of the laser beam of this position detection sensor. A detection signal processing circuit that determines the presence or absence of the substrate at the arranged substrate transfer position, and a height detection multi-sensor that is arranged axially symmetrical to the position detection laser light source and that detects the thickness of the substrate. It is configured.

[0019]

The substrate loading cassette having the substrate loading position having a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism in the present invention is detected regardless of the thickness of various substrates, and the cassette moving mechanism is detected. Substrate teaching can be automatically performed with high accuracy without the need to adjust the step movement amount.

[0020]

Embodiments of the present invention will now be described in detail with reference to the drawings. (Embodiment 1) FIG. 1 is a cross-sectional view of an essential part showing a configuration of an embodiment of a substrate teaching apparatus according to the present invention.
The same parts as those in FIG. In FIG. 1, 50 is a substrate loading cassette, 51 is a substrate position feedback circuit, 52 is a laser light source, and 53 is a laser beam detection sensor. As the constituent material of the substrate loading cassette 50, a fluororesin, a metal having a very small amount of dust generation, or a coating of this metal with a fluororesin is applied.

The basic structure of the substrate teaching device thus constructed is almost the same as that of the substrate teaching device described with reference to FIG. 4, except that it is a positive multiple of the step movement amount of the cassette moving mechanism 4. And a substrate loading cassette 50 having a structure in which a substrate 6 having a thickness of 0.38 mm to several mm can be loaded, and is arranged in the substrate loading cassette 50 in a load lock chamber (not shown). Position detection laser light source 5 for detecting the position of the substrate 6
2 and the position detection sensor 53 are arranged in the load lock chamber so as to cross the substrate 6 obliquely.

That is, as shown in FIG. 1, the substrate loading cassette 50 has a substrate loading pitch that is a positive multiple of the stepping amount of the stepping motor 5, and the substrate 6 has a thickness of 0.38 mm. It is configured to have a substrate loading position that can accommodate several mm. Also, this substrate loading cassette 5
A laser beam detecting sensor in which the laser beam 11 from the laser light source 52 is installed so as to face the laser light source 52 at a position deviated by θ from the same plane as the laser light source 52 in order to detect the position of the substrate 6 arranged in 0. The detection signal processing circuit system 10 determines whether or not the laser beam 11 emitted toward 53 is detected by the detection sensor 53.

In this case, the position where the laser light source 52 is arranged is higher than the position where the substrate 6 is arranged at the substrate transfer position by the robot transfer arm 13 (not shown), and the position where the laser beam detection sensor 53 is arranged. Is lower than the position of the substrate 6 arranged at the substrate transfer position by the robot transfer arm 13 (not shown).

Further, the detection signal processing circuit system 10 is connected to the substrate position feedback circuit 51, and the detection result of the detection signal processing circuit system 10 is fed back to the stepping motor 5 via the feedback circuit 51, and the stepping motor 5 is fed. The stage 2, the substrate loading cassette 50, and the substrate 6 are moved in the vertical direction by the cassette moving mechanism 4 which is interlocked with.

In such a configuration, when the thickness of the substrate 6 changes, for example, the substrate transfer position by the regular robot transfer arm 13 is cut off by the laser beam 11 at the central position on the surface of the substrate 6 as shown in FIG. When it is done,
When the substrate 6 is thin, the cutoff position of the laser beam 11 is shifted to the laser beam detection sensor 53 side, and when the substrate 6 is thick, the cutoff position of the laser beam 11 is moved to the laser light source 52 side. It will shift.

At this time, the inclination between the laser light source 52 and the laser beam detection sensor 53 can be set to a desired value θ from the substrate loading pitch of the substrate loading cassette 50, the thickness range of the substrate or the diameter of the substrate. For example, even when the thickness of the substrate changes in the same substrate loading cassette 50, the presence or absence of the substrate can be detected at the accurate substrate transfer position.

Therefore, according to this structure, the stepping amount of the stepping motor 5 is adjusted with respect to various substrates, the laser light source 52 and the laser beam detection sensor 53.
Position adjustment, adjustment of the substrate transfer position by the robot transfer arm 13 and replacement of the substrate loading cassette 50 are unnecessary, and highly accurate substrate teaching can be performed automatically, stably and efficiently.

In the first embodiment described above, the substrate transfer position by the regular robot transfer arm 13 is set to
The case where the laser beam 11 is set when the laser beam 11 is blocked at the center position of the surface of the substrate 6 has been described, but the case where the laser beam blocking position is set in the thickness direction of the substrate or any position in the plane is also described above. Needless to say, the same effect as can be obtained.

(Embodiment 2) FIG. 2 is a cross-sectional view of an essential part showing the structure of a substrate teaching apparatus according to another embodiment of the present invention. The same parts as those in FIG. To do. In FIG. 2, 62 is a laser light source and 53 is a laser beam detection sensor.

The substrate teaching device thus constructed has a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism 4 and has a thickness of 0.38 mm, as in the first embodiment.
A substrate loading cassette 50 having a structure in which a substrate 6 of several mm can be loaded is provided, and for position detection for detecting the position of the substrate 6 arranged in the substrate loading cassette 50 in a load lock chamber (not shown). The laser light source 62 and the position detection sensor 63 are arranged in the load lock chamber so as to cross the substrate 6 obliquely.

That is, as shown in FIG. 2, the substrate loading cassette 50 has a substrate loading pitch which is a positive multiple of the stepping amount of the stepping motor 5, and the substrate 6 has a thickness of 0.38 mm. It is configured to have a substrate loading position that can accommodate several mm. Also, this substrate loading cassette 5
A laser beam detection sensor in which the laser beam 11 from the laser light source 62 is placed so as to face the laser light source 62 at a position shifted by θ from the same plane as the laser light source 62 in order to detect the position of the substrate 6 arranged in the position 0. The detection signal processing circuit system 10 determines whether or not the laser beam 11 emitted toward 63 is detected by the detection sensor 63.

In this case, the position where the laser light source 62 is arranged is lower than the position of the substrate 6 which is arranged at the substrate transfer position by the robot transfer arm 13 (not shown), and the position where the laser beam detection sensor 63 is arranged. Is higher than the position of the substrate 6 arranged at the substrate transfer position by the robot transfer arm 13 (not shown).

Further, the detection signal processing circuit system 10 is connected to the substrate position feedback circuit 51, and the detection result of the detection signal processing circuit system 10 is fed back to the stepping motor 5 via the feedback circuit 51, and the stepping motor 5 is fed. The stage 2, the substrate loading cassette 50, and the substrate 6 are moved in the vertical direction by the cassette moving mechanism 4 which is interlocked with.

In such a structure, assuming that the substrate transfer position by the regular robot transfer arm 13 is when the laser beam 11 is blocked at the center position of the back surface of the substrate 6, even when the substrate 6 is thick. The cutoff position of the laser beam 11 does not change. Therefore, if the inclination θ between the laser light source 62 and the laser beam detection sensor 63 is set to a desired value from the substrate loading pitch of the substrate loading cassette 50, the thickness of the substrate changes in the same substrate loading cassette 50. It can be applied in some cases.

Therefore, according to this structure, the stepping amount of the stepping motor 5 is adjusted for various substrates, the laser light source 62 and the laser beam detection sensor 63 are used.
Position adjustment, adjustment of the substrate transfer position by the robot transfer arm 13 and replacement of the substrate loading cassette 50 are unnecessary, and highly accurate substrate teaching can be performed automatically, stably and efficiently.

In the second embodiment described above, the substrate transfer position by the regular robot transfer arm 13 is set to
The case where the laser beam 11 is set when the laser beam 11 is blocked at the center position of the back surface of the substrate 6 has been described. However, even when the laser beam blocking position is set in the thickness direction of the substrate or any position in the plane, Needless to say, the same effect as can be obtained.

(Embodiment 3) FIG. 3 is a cross-sectional view of an essential part showing the structure of a substrate teaching apparatus according to still another embodiment of the present invention. The same parts as those in FIG. Omit it. In FIG. 3, reference numeral 70 denotes a control system, 71
Is a multi-sensor for height detection.

The substrate teaching device thus constructed has a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism 4 and has a thickness of 0.38 mm, as in the first embodiment.
A substrate loading cassette 50 having a structure in which a substrate 6 of several mm can be loaded is provided, and for position detection for detecting the position of the substrate 6 arranged in the substrate loading cassette 50 in a load lock chamber (not shown). The laser light source 52 and the position detection sensor 53 are arranged in the load lock chamber so as to cross the substrate 6 obliquely.

A position detecting laser light source 52 and an axially symmetric height detecting multi-sensor 71 are arranged in the load lock chamber in order to detect the thickness of the substrate 6 arranged in the substrate loading cassette 50. The laser light source 52, the position detection sensor 53, and the substrate height detection multi-sensor 71 have a structure and are connected to the control system 70 via the power supply 9 and the signal detection processing circuit system 10, respectively, and the control system 70. Has a structure for controlling the stage moving mechanism 4 which is interlocked with the stepping motor 5.

That is, as shown in FIG. 3, the substrate loading cassette 50 has a substrate loading pitch that is a positive multiple of the stepping amount of the stepping motor 5, and the substrate 6 has a thickness of 0.38 mm. It is configured to have a substrate loading position that can accommodate several mm. Also, this substrate loading cassette 5
A laser beam detecting sensor in which the laser beam 11 from the laser light source 52 is installed so as to face the laser light source 52 at a position deviated by θ from the same plane as the laser light source 52 in order to detect the position of the substrate 6 arranged in 0. The detection signal processing circuit system 10 determines whether or not the laser beam 11 emitted toward 53 is detected by the detection sensor 53.

In this case, the position where the laser light source 52 is arranged is higher than the position where the substrate 6 is arranged at the substrate transfer position by the robot transfer arm 13 (not shown), and the position where the laser beam detection sensor 53 is arranged. Is lower than the position of the substrate 6 arranged at the substrate transfer position by the robot transfer arm 13 (not shown).

Further, the detection signal processing circuit system 10 is connected to the control system 70, feeds back the detection result of the detection signal processing circuit system 10 to the stepping motor 5, and the cassette moving mechanism which is interlocked with the stepping motor 5. 4, the stage 2, the substrate loading cassette 50, and the substrate 6 are moved in the vertical direction.

On the other hand, a position detecting laser light source 52 for detecting the substrate 6 placed in the substrate loading cassette 50.
A height detection multi-sensor 71 is arranged in a load lock chamber (not shown) in an axially symmetric manner, and the laser beam 11 is directed from the laser light source 52 to the position detection laser light source 52 toward the height detection multi-sensor 71. The detection signal processing circuit system 10 determines whether or not the laser beam 11 emitted is sensed by the height detecting multi-sensor 71.

Since the detection signal processing circuit system 10 is connected to the control system 70, the detection signal is detected by a feedback system similar to the position detection of the substrate 6 arranged in the substrate loading cassette 50 in the load lock chamber. The height detection result of the processing circuit system 10 is fed back to the stepping motor 5, and the cassette moving mechanism 4 interlocked with the stepping motor 5 is used to mount the stage 2 and the substrate loading cassette 50.
And the substrate 6 is moved in the vertical direction.

In such a structure, when the thickness of the substrate 6 changes, for example, the substrate transfer position by the regular robot transfer arm 13 is set at the center position of the surface of the substrate 6 by the laser beam 11 as shown in FIG. When the substrate 6 is cut off, when the substrate 6 is thin, the cutoff position of the laser beam 11 is shifted to the laser beam detection sensor 53 side, and when the substrate 6 is thick, the laser beam 11 is cut off. The cutoff position of is shifted to the laser light source 52 side.

In this case, the inclination θ between the laser light source 52 and the laser beam detection sensor 53 can be set to a desired value from the substrate loading pitch of the substrate loading cassette 50, the substrate thickness range, the substrate diameter, and the like. For example, even when the thickness of the substrate 6 is changed in the same substrate loading cassette 50, it can be dealt with.

Further, in order to detect the thickness of the substrate 6 placed in the substrate loading cassette 50, the inclination of the height detecting multi-sensor 71 is preliminarily adjusted between the laser light source 52 and the laser beam detecting sensor 53. Tilt θ, substrate loading cassette 50
If the desired value is set based on the substrate loading pitch, the substrate thickness range, the substrate diameter, etc., it is possible to cope with the case where the thickness of the substrate 6 changes in the same substrate loading cassette 50.

In this case, the value of the inclination θ between the laser light source 52 and the laser beam detection sensor 53 is equal to or greater than the incident angle at which the laser beam 11 causes total reflection on the substrate 6 and the loading substrate 6
It is necessary that the incident angle is less than or equal to the angle at which the laser beam 11 is blocked at the edge of.

With such a configuration, the step amount of the stepping motor 5 is adjusted for various substrates, the position of the laser light source 52 and the laser beam detection sensor 53 is adjusted, and the substrate transfer position by the robot transfer arm 13 is adjusted. Also, it is not necessary to replace the substrate loading cassette 50, and highly accurate substrate teaching can be performed automatically, stably and efficiently.

[0050]

As described above, according to the present invention,
The adjustment time of the board teaching device can be shortened,
Highly accurate substrate teaching can be easily performed regardless of the thickness of the substrate, and highly accurate substrate teaching can be automatically and stably performed efficiently.

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part showing the configuration of a substrate teaching apparatus according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of essential parts showing a configuration of a substrate teaching apparatus according to a second embodiment of the present invention.

FIG. 3 is a cross-sectional view of essential parts showing a configuration of a substrate teaching device according to a third embodiment of the present invention.

FIG. 4 is a cross-sectional view of essential parts showing the configuration of a conventional substrate teaching device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Cassette for loading substrate, 2 ... Loading stage, 3 ... Cassette fixing part, 4 ... Cassette moving mechanism, 5 ... Stepping motor, 6 ... Substrate, 9 ... Power supply, 10 ... Detection signal processing circuit system,
11 ... Laser beam, 50 ... Substrate loading cassette, 51 ...
Substrate position feedback circuit, 52 ... Laser light source, 53
... detection sensor, 62 ... laser light source, 63 ... detection sensor,
70 ... Control system, 71 ... Multi sensor for height detection.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shinji Yamagami 1-11-11 Kudankita, Chiyoda-ku, Tokyo Oxford Instruments Stock Company In-house

Claims (5)

[Claims] 1. A substrate teaching apparatus having a substrate loading cassette for loading a plurality of substrates and a cassette moving mechanism, wherein the substrate loading cassette has a pitch that is a positive multiple of a step movement amount of the cassette moving mechanism. A substrate teaching device having a loading position. 2. A substrate teaching apparatus having a substrate loading cassette for loading a plurality of substrates and a cassette moving mechanism, wherein a substrate loading position having a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism is provided. Cassette, a position detection laser light source and a position detection sensor that are arranged so as to diagonally cross the substrate arranged in the substrate loading cassette and that detect the position of the substrate,
A substrate teaching device comprising: 3. A substrate teaching apparatus having a substrate loading cassette for loading a plurality of substrates and a cassette moving mechanism, wherein a substrate loading position having a pitch which is a positive multiple of the step movement amount of the cassette moving mechanism is provided. Cassette, a position detection laser light source and a position detection sensor that are arranged so as to diagonally cross the substrate arranged in the substrate loading cassette and that detect the position of the substrate, and the position detection sensor A detection signal processing circuit that determines the presence or absence of the substrate at the substrate transfer position arranged in the substrate loading cassette in response to the laser beam detection and non-detection signals, and the detection result of the detection signal processing circuit. And a control circuit for controlling the cassette moving mechanism corresponding to the above. 4. A substrate teaching apparatus having a substrate loading cassette for loading a plurality of substrates and a cassette moving mechanism, wherein a substrate loading position having a pitch which is a positive multiple of the step movement amount of the cassette moving mechanism is provided. Cassette, a position detection laser light source and a position detection sensor that are arranged so as to diagonally cross the substrate arranged in the substrate loading cassette and that detect the position of the substrate, and the position detection laser A multi-sensor for height detection, which is arranged in axial symmetry with a light source and detects the thickness of the substrate. 5. A substrate teaching apparatus having a substrate loading cassette for loading a plurality of substrates and a cassette moving mechanism, wherein a substrate loading position having a pitch that is a positive multiple of the step movement amount of the cassette moving mechanism is provided. Cassette, a position detection laser light source and a position detection sensor that are arranged so as to diagonally cross the substrate arranged in the substrate loading cassette and that detect the position of the substrate, and the position detection sensor A detection signal processing circuit for determining the presence or absence of the substrate at the substrate transfer position arranged in the substrate loading cassette in response to the laser beam detection / non-detection signal, and the position detection laser light source and axis. A multi-sensor for height detection, which is symmetrically arranged and detects the thickness of the board, and a board tee. Packaging equipment.