JPH08338403A - Automatic hydraulic control device - Google Patents
Automatic hydraulic control deviceInfo
- Publication number
- JPH08338403A JPH08338403A JP14710195A JP14710195A JPH08338403A JP H08338403 A JPH08338403 A JP H08338403A JP 14710195 A JP14710195 A JP 14710195A JP 14710195 A JP14710195 A JP 14710195A JP H08338403 A JPH08338403 A JP H08338403A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- hydraulic
- oil
- hydraulic cylinder
- cylinder shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Servomotors (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は自動油圧制御装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic hydraulic control system.
【0002】[0002]
【従来の技術】高精度な油圧の自動制御の装置には、従
来の油圧ポンプなどでは、微小な圧力の制御ができない
ため利用できない。また圧力校正器として、重錘式圧力
基準器があるが、印加圧力に連続性がなく自動化のため
には、ウエイトの自動交換機構や、印加圧力に応じたウ
エイト枚数の格納機構が必要となり、装置の高コスト化
及び大型化が問題となる。2. Description of the Related Art A conventional hydraulic pump or the like cannot be used as a highly accurate automatic hydraulic control device because it cannot control minute pressure. As a pressure calibrator, there is a weight type pressure reference device, but there is no continuity in the applied pressure and for automation, an automatic weight exchange mechanism and a storage mechanism for the number of weights according to the applied pressure are required. High cost and large size of the device pose a problem.
【0003】[0003]
【発明が解決しようとする課題】高精度な油圧印加は、
定量圧送する油圧ポンプなどでは微小圧力の制御ができ
ないため使用できない。また、重錘式圧力基準器等にみ
られるウエイト式圧力印加方式では、高精度油圧印加は
可能なものの、圧力の連続性がなく、油圧印加系統にス
ローリーク等の外乱要因が発生した場合、安定した油圧
の印加は困難となる。[Problems to be Solved by the Invention]
Hydraulic pumps that deliver constant pressure cannot be used because minute pressures cannot be controlled. Also, with the weight type pressure application method found in the weight type pressure reference device, etc., although high-precision hydraulic pressure application is possible, there is no pressure continuity, and if a disturbance factor such as slow leak occurs in the hydraulic pressure application system, It becomes difficult to apply a stable hydraulic pressure.
【0004】本発明の目的は、油圧の高精度制御を長時
間かつ連続的に行うものであり、油圧シリンダと、シリ
ンダシャフトの送り機構により構成されているため、ウ
エイトを使用しない圧力印加方式により、簡単な油圧制
御機構であり、連続的な圧力印加及び高精度で安定性の
良好な圧力を制御するシステムを提供することにある。An object of the present invention is to perform high-precision control of hydraulic pressure continuously for a long time, and since it is composed of a hydraulic cylinder and a feed mechanism of a cylinder shaft, it is possible to use a pressure application method without using a weight. A simple hydraulic control mechanism is to provide a system for controlling continuous pressure application and pressure with high accuracy and good stability.
【0005】[0005]
【課題を解決するための手段】上記目的を達成するため
の本発明の特徴は、油圧シリンダと油圧反力のかかる油
圧シリンダシャフトを充分に駆動制御できる位置制御機
構により構成し、油圧昇圧後、油圧シリンダシャフトの
微動によるシリンダ容積を制御することである。A feature of the present invention for achieving the above object is that a hydraulic cylinder and a hydraulic cylinder shaft to which a hydraulic reaction force is applied are constituted by a position control mechanism capable of being sufficiently driven, and after the hydraulic pressure is boosted, It is to control the cylinder volume by the fine movement of the hydraulic cylinder shaft.
【0006】また、高速昇圧のための油圧ポンプと、油
圧を検知するための圧力スイッチを設け、油圧系統の昇
圧ができたことを検出し管理するものである。Further, a hydraulic pump for high-speed boosting and a pressure switch for detecting hydraulic pressure are provided to detect and manage the boosting of the hydraulic system.
【0007】更に、圧力計測を行う圧力センサを一定温
度に制御された恒温室内に設け、圧力センサの圧力媒体
及び外気温度変化による温度ドリフトを防止するもので
ある。Further, a pressure sensor for measuring the pressure is provided in a temperature-controlled room controlled to a constant temperature to prevent temperature drift due to changes in the pressure medium of the pressure sensor and the outside air temperature.
【0008】[0008]
【作用】高精度の油圧制御方法は、油圧ポンプ及び圧力
スイッチによる高速昇圧と、昇圧後の油圧系統内に設け
た油圧シリンダの油圧シリンダシャフトの前後微動によ
る油圧シリンダ容積制御をする。印加圧力の設定及び安
定制御は、圧力センサより取り込んだデータをCPUに
より演算し、出力される位置制御信号を、油圧シリンダ
シャフトの前後微動に変換する。According to the highly accurate hydraulic control method, the hydraulic pump and the pressure switch are used for high-speed boosting, and the hydraulic cylinder volume control is performed by slightly moving the hydraulic cylinder shaft of the hydraulic cylinder provided in the hydraulic system after the boosting. For the setting and stable control of the applied pressure, the CPU takes in the data taken in by the pressure sensor, and the output position control signal is converted into fine forward and backward movement of the hydraulic cylinder shaft.
【0009】[0009]
【実施例】図1にブロック図を示す。本装置は、圧力伝
送器を自動校正する装置である。自動校正装置は、圧力
伝送器への油圧を印加する油圧制御部と、伝送器出力を
計測するインタフェイス部により構成される。校正対象
となる圧力伝送器8は油圧配管3により油圧制御部と接
続される。CPU7の制御信号により圧力弁9をオープ
ンし油圧の導入を開始する。昇圧はCPU7の制御信号
により駆動された油圧ポンプ1により行い、圧力スイッ
チ2の設定圧力まで昇圧された後、圧力スイッチ2によ
り出力される制御信号により昇圧終了する。昇圧の確認
方法は、恒温室10に設置される圧力センサ6の出力信
号をCPU7で判定し、昇圧確認後圧力弁9をクローズ
し、油圧を封止する。油圧の安定制御は、油圧封止の状
態において、圧力センサ6の出力を一定時間毎に、CP
U7によりサンプリングし、油圧の変動量を演算後、そ
の演算結果を油圧シリンダシャフト5の微動信号に変換
する。微動信号出力は、モータ4に伝達され、油圧シリ
ンダシャフト5を前後微動させる。この動作を連続的に
行うことにより、油圧の安定制御が達成される。油圧の
設定は安定制御同様圧力センサ6の出力信号をCPU7
に取り込み、CPU7に記憶されている目標値との差を
演算比較しその偏差量を、油圧シリンダシャフト5の移
動量出力に変換し、移動量出力をモータ4に伝達させ、
油圧シリンダシャフト5を前後移動する。DESCRIPTION OF THE PREFERRED EMBODIMENT A block diagram is shown in FIG. This device is a device for automatically calibrating a pressure transmitter. The automatic calibration device is composed of a hydraulic control unit that applies hydraulic pressure to the pressure transmitter and an interface unit that measures the output of the transmitter. The pressure transmitter 8 to be calibrated is connected to the hydraulic control unit by the hydraulic pipe 3. The pressure valve 9 is opened by the control signal of the CPU 7 and the introduction of hydraulic pressure is started. The pressure is increased by the hydraulic pump 1 driven by the control signal of the CPU 7, and after the pressure is increased to the set pressure of the pressure switch 2, the pressure is completed by the control signal output by the pressure switch 2. As a method of confirming the pressurization, the CPU 7 determines the output signal of the pressure sensor 6 installed in the temperature-controlled room 10, and after confirming the pressurization, the pressure valve 9 is closed and the hydraulic pressure is sealed. The stable control of the hydraulic pressure is performed by changing the output of the pressure sensor 6 at a constant time in the hydraulically sealed state by the CP
After sampling by U7 and calculating the fluctuation amount of the hydraulic pressure, the calculation result is converted into a fine movement signal of the hydraulic cylinder shaft 5. The fine movement signal output is transmitted to the motor 4 to finely move the hydraulic cylinder shaft 5 back and forth. By performing this operation continuously, stable control of the hydraulic pressure is achieved. For the hydraulic pressure setting, the output signal of the pressure sensor 6 is sent to the CPU 7 as in the stable control.
, A difference from the target value stored in the CPU 7 is calculated and compared, the deviation amount is converted into a movement amount output of the hydraulic cylinder shaft 5, and the movement amount output is transmitted to the motor 4,
The hydraulic cylinder shaft 5 is moved back and forth.
【0010】[0010]
【発明の効果】本発明は、油圧シリンダシャフトの前後
微動制御により油圧を制御する方法で、簡単な構造とな
っており、分解,保守点検,清掃等必要としない。ま
た、重錘式圧力印加方式を採用していないため、高精度
のウエイトの必要もなく、連続性のある油圧を印加でき
る。The present invention is a method of controlling the hydraulic pressure by controlling the fine movement of the hydraulic cylinder shaft in the front-rear direction, and has a simple structure and does not require disassembly, maintenance, inspection or cleaning. Further, since the weight type pressure applying method is not adopted, it is possible to apply a continuous hydraulic pressure without the need for highly accurate weight.
【図1】本発明の一実施例の高精度油圧制御装置のブロ
ック図。FIG. 1 is a block diagram of a high precision hydraulic control device according to an embodiment of the present invention.
1…油圧ポンプ、2…圧力スイッチ、3…油圧配管、4
…モータ、5…油圧シリンダシャフト、6…圧力セン
サ、7…CPU、8…圧力伝送器、9…圧力弁、10…
恒温室。1 ... hydraulic pump, 2 ... pressure switch, 3 ... hydraulic piping, 4
... motor, 5 ... hydraulic cylinder shaft, 6 ... pressure sensor, 7 ... CPU, 8 ... pressure transmitter, 9 ... pressure valve, 10 ...
Constant temperature chamber.
Claims (1)
置において、 油圧を任意の値に設定し、設定された値にまで油圧を昇
圧させる手段と、一定温度に制御された恒温室内に設け
られた圧力検知手段と、油圧を一定時間毎にサンプリン
グし、油圧の変動量を演算する手段と、前記演算結果に
基づき油圧シリンダと油圧シリンダシャフトとを駆動制
御して油圧の調整を行う油圧制御手段とを含むことを特
徴とする自動油圧制御装置。1. A device for controlling a hydraulic pressure applied to a pressure sensor, wherein the hydraulic pressure is set to an arbitrary value, the means for raising the hydraulic pressure to a set value, and a constant temperature controlled constant temperature chamber are provided. And a means for calculating the amount of fluctuation of the hydraulic pressure by sampling the hydraulic pressure at regular time intervals, and a hydraulic control for controlling the hydraulic pressure by driving and controlling the hydraulic cylinder and the hydraulic cylinder shaft based on the calculation result. And an automatic hydraulic control device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14710195A JPH08338403A (en) | 1995-06-14 | 1995-06-14 | Automatic hydraulic control device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14710195A JPH08338403A (en) | 1995-06-14 | 1995-06-14 | Automatic hydraulic control device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08338403A true JPH08338403A (en) | 1996-12-24 |
Family
ID=15422531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14710195A Pending JPH08338403A (en) | 1995-06-14 | 1995-06-14 | Automatic hydraulic control device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08338403A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014021881A (en) * | 2012-07-23 | 2014-02-03 | Ebara Corp | Pressure controller, and polishing device equipped with the pressure controller |
-
1995
- 1995-06-14 JP JP14710195A patent/JPH08338403A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014021881A (en) * | 2012-07-23 | 2014-02-03 | Ebara Corp | Pressure controller, and polishing device equipped with the pressure controller |
CN103567852A (en) * | 2012-07-23 | 2014-02-12 | 株式会社荏原制作所 | Pressure controller, polishing apparatus having the pressure controller, and polishing method |
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