JPH08326740A - Supporter for heavy goods - Google Patents

Abstract

PURPOSE: To smooth the drive of a frame and prevent the fall by supporting an engaging part, where a spherical support face is made, in a condition that it is in face contact by the receiving face of a seat, and providing a longitudinal guide means between the second link means and the frame, and providing a lateral guide means between the third link means and the frame. CONSTITUTION: An engaging part 47 made at the first link means 39 has a stem 51, which is fixed to the pedestal part 50 to which the spherical part 49 is fixed, and an engaging cavity 54 where the spherical part 49 of the engaging part 47 is to be set is made inside the receiving seat 48, and a receiving face 56 to contact by face with the support face 52 of the spherical part 49 is made in the engaging cavity 54. A longitudinal guide means 42, which guides the frame 35 in the longitudinal directions Z1 and Z2, is provided between the second link means 40 and the frame 35, and a lateral guide means 43, which guides the frame 35 in the longitudinal directions Z1 and Z2 and in the lateral directions X1 and X2, is provided between the third link means 41 and the frame 35.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is capable of highly accurate reproducibility and linearity with respect to displacement of a heavy object such as a precision machine tool and a chemical plant device mounted on a pedestal due to ground fluctuation and temperature change. The present invention relates to a heavy-weight support device called an active support table that can be implemented to compensate.

[0002]

2. Description of the Related Art FIG. 10 is a simplified exploded perspective view of a typical prior art heavy weight support apparatus 1. For example, the support device 1 for supporting the heavy load 2 as described above is disposed on the floor 3 of the building in a flat base 4 and above the base 4 substantially parallel to the base 4. A pedestal 5 on which the heavy load 2 is placed, and three directional axes X, Y, Z which support the pedestal 5 on the base 4 and are orthogonal to each other in the left-right directions X1, X2; Direction Y1, Y2; front-back direction Z
Three drive means 6a, 6b, 6c for driving 1, Z2
And three movable supporting means 7a, 7b, 7c respectively interposed between the drive means 6a, 6b, 6c and the gantry 5.

A movable support means 7a provided at the center of the front Z1 on the base 4 is fixed to the lower surface of the pedestal 5, and a point seat 9 having a conical receiving surface 8 and a driving means 6a. Support member 12 fixed to the lifting body 10 and having a support surface 11 on a truncated cone, and a spherical rolling element 13 interposed between the receiving surface 8 of the point seat 9 and the supporting surface 11 of the support member 12. Have and. Of the two movable supporting means 7b, 7c arranged rearward Z2 on the base 4, the movable supporting means 7b arranged on the left side X1 is fixed to the lower surface of the pedestal 5 and has a V-shaped receiving surface. The conical support surface 1 is fixed to the V-groove receiving seat 15 in which 14 is formed and the elevating body 16 of the driving means 6b.
7 is formed, and the receiving surface 1 of the V-groove seat 15
4 and the support surface 17 of the support member 18 and a spherical rolling element 19 interposed therebetween. Furthermore, on the base 4, the rear Z2
Of the two movable supporting means 7b, 7c arranged on the right side, the movable supporting means 7c arranged on the right side X2 is fixed to the lower surface of the pedestal 5, and the flat seat 2 is formed with a flat receiving surface 20.
1, a support member 24 fixed to the elevating body 22 of the driving means 6c and having a conical support surface 23 formed, and interposed between the support surface 20 of the flat seat 21 and the support surface 23 of the support member 24. And a spherical rolling element 29.

The drive means 6a moves the lifting / lowering body 10 along the respective axes X, Y, Z by arrows X1, X2; Y1, Y2; Z.
The displacement can be driven in the 1 and Z2 directions. The remaining driving means 6b and 6c are arranged such that the lifting bodies 16 and 22 are indicated by the arrow X.
1, X2; displacement driving can be performed in the Y1 and Y2 directions. These driving means 6a, 6b, 6c are used for each lifting body 1
In order to guide the displacement of 0, 16, and 22 in the vertical direction Y1 and Y2 in parallel with the Y axis, four sliding bodies 25 fixed to each lifting body 10, 16, and 22, and the sliding body 25 are fitted. A linear guide 28, which is an elevating guide means having four guide rails 26 to be inserted, is provided.

[0005]

In the conventional supporting device 1 as described above, when the position of the heavy load 2 is displaced due to the fluctuation of the ground and the temperature change, and when the position of the heavy load 2 is changed. The drive means 6a, 6
It is necessary to drive b and 6c to perform high-precision position correction of the gantry 5 with linear movement in the X-axis, Y-axis, and Z-axis directions and with 6 degrees of freedom in rolling around the X-axis, Y-axis, and Z-axis. is there. However, the seats 9, 15, 21 of the movable support means 7a, 7b, 7c and the support members 12, 18, 2 are provided.
4 and each rolling element 13, 19, 29 have a large friction, and thus each seat 9, 15, 21 and each support member 12,
18 and 24 cannot be slid smoothly with respect to the rolling elements 13, 19 and 29, so that smooth displacement of the distance for the position correction of the gantry 5 is hindered. Therefore, there is a problem that a large driving force is required in order to individually drive and displace each of the seats 9, 15, 21 by each of the driving means 6a, 6b, 6c.

Further, as described above, each of the seats 9, 15, 21
And each support member 12, 18, 24 and each rolling element 13, 1
If the friction between the pedestal 9 and 29 is large, there is a problem that the positioning accuracy of the gantry 5 is reduced. Further, the movable supporting means 7a, 7b, 7c are respectively connected to the supporting members 12, 18,
Since each of the seats 9, 15, and 21 is simply placed on each of the rolling elements 13, 19, and 29 supported by 24, the pedestal 5 is movably supported by an unexpected external force. There is a risk of falling from the means 7a, 7b, 7c, and there is a problem of poor safety.

Further, each drive means 6a, 6b, 6c is
The guide rails 26 are guided in the vertical directions Y1 and Y2 by the linear guides 28 that are fitted to the four sliding bodies 25 that are fixed to the lifting bodies 10, 16 and 22, respectively.
There is a problem that the parallelism of each of the four guide rails 26 at the time of assembly and the work for positioning each sliding body 25 at the mounting position with high precision are complicated, and the workability at the time of assembly is poor.

[0008] Therefore, an object of the present invention is to provide a support device for heavy objects which can smoothly drive a gantry without requiring a large driving force.

Another object of the present invention is to provide a support device for heavy objects which can reliably prevent the pedestal from falling.

Still another object of the present invention is to assemble one or a plurality of elevating guide means without any trouble in positioning each other, and to guide the vertical displacement of the gantry by such elevating guide means with high accuracy. The object of the present invention is to provide a heavy weight supporting device.

[0011]

According to the present invention, there is provided a base, a base arranged above the base and substantially parallel to the base, on which a heavy object is placed, and provided on the base. First driving means for driving the gantry in the up-down direction approaching / separating from the table and in the front-rear direction and the left-right direction orthogonal to each other in a plane perpendicular to the up-down direction, and separated from the first driving means in the front-rear direction and the left-right direction Second driving means provided on the base at a position for driving the gantry in the up-down direction and the left-right direction, and a position separated from the first driving means in the front-rear direction and the left-right direction and separated from the second driving means in the left-right direction. A third drive means provided on the base for driving the gantry in the vertical and horizontal directions, and a first fitting portion driven by the first drive means in the vertical, front-rear and left-right directions. 1 Fitting part is rotatably fitted, A first link means having a first seat fixed to the frame, a second fitting portion driven in the up-down direction and the left-right direction by the second driving means, and the second fitting portion being rotatable. Second link means having a second receiving seat to be fitted therein, a third fitting portion driven in the up-down direction and the left-right direction by the third driving means, and the third fitting portion is rotatably fitted. Third link means having a third seat to be inserted,
Provided between the second seat of the second link means and the pedestal, and provided between the front and rear direction guide means for guiding the gantry in the front-rear direction, and between the third seat and pedestal of the third link means, Mount
Front-rear and left-right direction guiding means for guiding in the front-rear direction and the left-right direction, and the first to third fitting portions include first to third
Spherical support surfaces that fit into and slide on the seats are formed, and the first to third seats have receiving surfaces that are in surface contact with the respective support surfaces of the first to third fitting portions. It is a supporting device for heavy objects, each of which is formed. The first to third driving means of the present invention respectively include an elevating body provided with first to third fitting portions, and elevating guide means for guiding the elevating body up and down by a ball spline mechanism. It is characterized by being provided.

[0012]

According to the present invention, a gantry is provided above the pedestal substantially in parallel, and a heavy object is placed on the gantry. First to third driving means are provided on the base. The first drive means drives the gantry in the up-down direction, the front-rear direction, and the left-right direction, and the second and third drive means drive the gantry in the up-down direction and the left-right direction. First to third of these
The drive means is provided with first to third link means, respectively. The first to third linking means include first to third fitting portions,
The first to third fitting portions have first to third receiving seats into which the first to third fitting portions are rotatably fitted, and spherical supporting surfaces are formed on the first to third fitting portions, respectively. -The 3rd seat is formed with the receiving surface which comes into surface contact with each support surface of the 1st-3rd fitting parts, respectively.
In this way, since the first to third fitting parts are in surface contact between the support surface and the receiving surface in a state of being fitted in the first to third receiving seats, the first to third parts provided on the pedestal are provided. The seats can be stably supported by the first to third fitting portions, whereby the first to third seats can be moved to the first seat by the action of an external force due to ground fluctuation, temperature change, or contact of an object. ~ There is no fear that it will come off from the third fitting portion easily, and falling of the pedestal can be prevented.

Front-rear direction guiding means is interposed between the second seat of the second link means and the pedestal. With such a front-back direction guiding means, it is possible to guide the movement of the gantry in the front-back direction with high linearity. In addition, front-rear and left-right direction guide means are interposed between the third seat of the third link means and the pedestal. With such front-rear / left-right direction guiding means, it is possible to guide the movement of the gantry in the front-rear direction and the left-right direction with high linearity.

In this way, the front-rear direction guide means and the front-rear / left-right direction guide means are provided between the gantry and the second and third link means, and the first link is provided between the gantry and the first drive means. Means, the second link means is provided between the front-rear direction guide means and the second drive means, and the third link means is provided between the front-rear / left-right direction guide means and the third drive means. It is possible to smoothly absorb the displacement around each axis line in the front-rear direction, the left-right direction, and the up-down direction, and it is also possible to absorb the displacement in the front-rear direction and the left-right direction with high precision linearity, which enables highly accurate positioning of the gantry. Is possible.

According to the invention, the first to third driving means are respectively provided with lifting guide means for guiding the lifting body provided with the first to third fitting portions in the vertical direction by a ball spline mechanism. To be By adopting a ball spline mechanism for such lifting guide means, even in the case of a plurality of lifting guide means, it is possible to perform displacement in the rotational direction by using one or a plurality of lifting guide means without the need for mutual positioning. Since the vertical displacement of the lifting body can be guided with high linearity in a regulated state, adjustment work for ensuring mutual positional accuracy of the lifting guide means during assembly becomes unnecessary, and The labor of adjustment work can be reduced and the workability can be improved.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a perspective view showing a schematic structure of a heavy weight supporting apparatus 31 according to an embodiment of the present invention. In the following description, with respect to the three axes X, Y, and Z that are orthogonal to each other, the support device 31 is viewed from the right side of FIG. 1, and the directions parallel to the Z axis are the front-back directions Z1 and Z2. The directions parallel to the horizontal directions are X1 and X2, and the direction parallel to the Y axis is the vertical direction Y.
1 and Y2. The support device 31 of the present embodiment includes a flat base 33 placed on a concrete floor 32 of a building.
And is arranged above the base 33 and substantially parallel to the base 33,
A gantry 35 on which a heavy load 34 is placed and a front Z of the base 33
The vertical direction Y1, Y2 and the vertical direction Y1, Y2 in which the gantry 35 is provided in the central part of 1 and moves toward / away from the base 33.
A first drive means 36 for driving the gantry 35 in front-rear directions Z1, Z2 and left-right directions X1, X2 that are orthogonal to each other in a plane perpendicular to
2 and the base 3 which is located apart from each other in the left and right directions X1 and X2.
3 is provided at the corner of the left side X1 and is arranged in the vertical direction Y1, Y2.
And a second drive means 37 for driving the gantry 35 in the left and right directions X1 and X2, and a front and rear direction Z from the first drive means 36.
1, Z2 and left and right directions X1 and X2, and away from the second driving means 37 in the left and right directions X1 and X2.
1, Y2 and the left and right directions X1, X2, a third drive means 38 for driving the gantry 35, a first link means 39 for connecting the first drive means 36 and the gantry 35 in a tiltable manner, and a second drive means. The second link means 40 provided at 37, the third link means 41 provided at the third drive means 38, and the second link means 40 provided between the pedestal 35 and the pedestal 3
Front-rear direction guiding means 4 for guiding the front-rear direction Z1 and Z2
2, between the third link means 41 and the gantry 35, the gantry 35 is mounted in the front-back direction Z1, Z2 and the left-right direction X.
1 and X2 for guiding the front-rear and left-right directions.

FIG. 2 is a sectional view showing a specific structure of the first link means 39. The first link means 39 has a first
By the driving means 36, the vertical direction Y1, Y2, the front-back direction Z
1, Z2 and the first fitting portion 47 driven in the left and right directions X1, X2, and the first receiving seat 48 into which the first fitting portion 47 is fitted and fixed to the gantry 35. The first fitting portion 47 includes a spherical portion 49 made of steel and the spherical portion 49.
Has a pedestal portion 50 fixed by, for example, welding, and a shaft 51 fixed to pedestal portion 50 by, for example, welding. The spherical portion 49 has a spherical support surface 52. The first receiving seat 48 is made of steel, and an outer screw 53 is engraved on the outer peripheral surface thereof, and the first fitting portion 4 is provided inside.
Fitting recess 54 into which the spherical portion 49 of 7 is partially fitted
And a through hole 55 communicating with the fitting recess 54 is formed. A receiving surface 56 that forms a part of a spherical surface that is in surface contact with the support surface 52 of the spherical portion 49 is formed on an inner peripheral portion that surrounds the fitting recess 54. The structure of the first link means 39 is similar to that of the second and third link means 40 and 41 described above.

FIG. 3 is a plan view showing a specific structure of the supporting device 31 shown in FIG. 1, FIG. 4 is a front view of the supporting device 31 as seen from below in FIG. 1, and FIG. 5 is shown in FIG. It is a left side view of the support apparatus 31 seen from the left side. Note that, in FIG. 5, the second and third driving means 3 are provided to facilitate the illustration.
7, 38 are omitted. The first drive means 36 is
An abutment 58 to which a pair of parallel front-rear direction guide rails 57a and 57b extending in the front-rear directions Z1 and Z2 are fixed, and a lower surface which is fitted to the front-rear direction guide rails 57a and 57b and can travel in the front-rear directions Z1 and Z2. Slider 59 guided by
a and 59b are fixed, and a pair of left and right guide rails 60a extending in parallel to the left and right directions X1 and X2 are provided on the upper surface.
A front-back direction moving table 61 to which 60b is fixed, and a pair of moving bodies 62a and 62b that are movably fitted to the left-right direction guide rails 60a and 60b are fixed to the lower surface, and the first fitting portion 47 is fixed to the upper surface. A pair of first elevating means 64 for elevating and lowering the elevating body 63 provided with
And a left-right direction moving table 65 provided with.

A bracket 66 is fixed to one side of the abutment 58 near the front Z1. The bracket 66 has a first front-rear direction for moving the front-rear movement table 61 in the front-rear directions Z1 and Z2. A moving bolt 67 and a second front-rear direction moving bolt 69 are provided. As shown in FIG. 6, the first front-rear direction moving bolt 67 is screwed into a screw hole 66 a formed in the bracket 66, and the tip 67 a of the shaft portion thereof is located at one side 6 of the front-rear direction moving table 61.
It is rotatably locked to 1a. The second front-rear direction moving bolt 69 is provided with its axis parallel to the axis of the first front-rear direction moving bolt 67, and is moved in the front-rear direction while being inserted into the insertion hole 66b formed in the bracket 66. It is screwed into the screw hole 61b formed in the table 61.
Such first and second front-rear direction moving bolts 67,
The forward / backward movement table 61 can be moved in the forward / backward directions Z1 and Z2 by screwing / retracting 69, and the forward / backward movement table 61 can be moved in the forward / backward directions Z1 and Z2.
The position of 2 can be adjusted. That is, the first and second front-rear direction moving bolts 67, 69 are so-called push-pull bolts, and move the front-rear direction moving table 61 forward Z.
When moving to 1, the first front-rear direction moving bolt 67 is first screwed back to form a gap with the front-rear direction moving table 61, and then the second front-rear direction moving bolt 69 is screwed forward. The direction moving table 61 is moved. When moving the front-rear movement table 61 backward Z2,
First, the second front-rear direction moving bolt 69 is screwed back to form a gap with the bracket 66, and then the first front-rear direction moving bolt 67 is screwed to move the front-rear direction moving table 61.

In this way, the front-rear moving table 6
The position of the front-rear direction moving table 61 can be fixed by moving 1 and then tightening the first and second front-rear direction moving bolts 67 and 69 together.

X2 to the right of the front-rear moving table 61
An L-shaped mounting body 68 is fixed to one side (on the left side of FIG. 5), and the first left-right direction driving motor M1 is fixed to the mounting body 68, and the output shaft thereof is a coupling 83. Screw shaft 70 that is screwed into the left-right direction moving table 65 via
And the left-right direction moving table 65 is connected to the left-right direction X.
It can be moved to 1, X2.

The first elevating means 64 is provided on the horizontal movement table 65. This first elevating means 64
On the horizontal movement table 65, the horizontal directions X1 and X2
A pair of support members 71 fixed to opposite sides of each other,
72, each of the supports 71, 72 has a front-back direction Z1, Z
The two connecting plates 73 and 74 are arranged on both sides of the two. Each support 71, 72 is provided with a pair of spline shafts 75, 76 extending in the vertical directions Y1, Y2, and nuts 77, 78 are attached to the spline shafts 75, 76 so as to be displaceable in the vertical directions Y1, Y2, respectively. To be done. Each nut 7
The lifting body 63 is fixed to 7, 78.

A first vertical drive motor M2 is provided on one side of the rear Z2 of the horizontal movement table 65. The output shaft of the motor M2 is connected to a screw shaft 80 via a coupling 79, and the rotation of the screw shaft 80 raises and lowers a support shaft 81 whose upper end is fixed to the elevating body 63 in the vertical directions Y1 and Y2. Can be driven. The first link means 39 is provided on the top plate 82 of the lifting and lowering body 63, and the front Z of the mount 35 is provided by the first link means 39.
One end nearer to 1 is supported.

FIG. 7 shows a supporting device 31 viewed from the right side of FIG.
FIG. In addition, in order to facilitate the illustration in the figure, the first drive means 36 and the first link means 39
Are omitted. The second drive means 37 includes a base 33.
Has an abutment 85 provided at the other end near the rear Z2 and at a position near the left X1. A pair of second left and right directions extending parallel to the left and right directions X1 and X2 are provided on the upper part of the abutment 85. The guide rails 86a and 86b are fixed, and the rails 86a and 86b are fixed.
A pair of moving bodies 87a and 87b are fitted in the 86b so as to be movable in the left and right directions X1 and X2. Each moving body 87a,
87b is fixed to the lower surface of the second horizontal movement table 88, and a pair of second elevating means 89 is provided on the upper surface of the second horizontal movement table 88. Left side X1 of the abutment 85
A substantially L-shaped mounting body 90 is fixed to one end of the side,
The mounting body 90 is provided with a second front-rear direction driving motor M3. A screw shaft 92 is connected to the output shaft of the motor M3 via a coupling 91.
The second horizontal movement table 88 can be driven in the left and right directions X1 and X2 by the rotation. Second lifting means 8
9 has a pair of support bodies 93 provided on both sides of the second left-right direction moving table 88, and the support bodies 93 include:
A pair of spline shafts 94 extending in the vertical direction is provided. A nut 95 is attached to each spline shaft 94 in the vertical direction Y.
1 and Y2 are displaceably mounted, and each nut 95 is fixed to an elevating body 96. The output shaft of the second vertical drive motor M4 is coupled to the screw shaft 98 via the coupling 97, and the rotation of the screw shaft 98 drives the support shaft 99 up and down to be fixed to the upper end of the support shaft 99. The elevating body 96 is driven up and down. The lifting body 96 is provided with the second link means 40, and the second link means 40 is provided with the front-back direction guiding means 42.

The front-rear direction guide means 42 has a support body 102 to which the second receiving seat 101 of the second link means 40 is fixed, and the support body 102 is fixed to the lower surface of the front-rear direction guide table 103. On the upper surface of the front-rear direction guide table 103, a rail guide member 105 into which a front-rear direction guide rail 104 extending in the front-rear directions Z1 and Z2 is fitted is provided. The front-rear direction guide rail 104 is the rail mounting body 10.
6, the rail mounting body 106 is fixed to the liner plate 1
The liner plate 107 is fixed to the frame 35.
Is welded to the lower surface of the frame and forms a part of the pedestal 35. A fitting recess 54 (see FIG. 2) is formed in the second receiving seat 101 of the second link means 40 similarly to the first link means 39 shown in FIG. 2 described above. The spherical portion 49 of the second fitting portion 108 fits in the portion 54. The second fitting portion 108 also has the same structure as the first fitting portion 47 of the first link means 39.

The gantry 35 is movably supported in the longitudinal directions Z1 and Z2 by the longitudinal guide means 42,
Moreover, the pedestal 35 is moved to each axis X, by the second link means 40.
It can be rotatably supported around Y and Z. Such a second link means 40 also has a second link as described above.
The outer surface of the spherical portion 49 of the fitting portion 108 is formed into a spherical shape, and the receiving surface 56 of the second receiving seat 101 makes surface contact with this outer surface. As a result, the gantry 35 is rotatably supported with the center of the spherical portion 49 as the center of rotation, and the Z
It is possible to allow only the displacements of 1 and Z2 and reliably transmit the displacements of the second driving means 37 in the vertical directions Y1 and Y2 and the horizontal directions X1 and X2.

The base 33 also has the second driving means 37.
The third drive means 38 is provided adjacent to the. The third driving means 38 has a support 111 fixed to the base 33, and a pair of left and right guide rails 112a and 112b extending parallel to the left and right directions X1 and X2 are fixed to the support 111. . A pair of moving bodies 113a and 113b are fitted into the guide rails 112a and 112b so as to be movable in the left and right directions X1 and X2, and the moving bodies 113a and 113b are fixed to the lower surface of the third left and right moving table 114. It
An L-shaped mounting body 115 is also fixed to the abutment 111, and the third lateral movement motor M is attached to the mounting body 115.
5 are provided. The output shaft of the motor M5 is coupled to the screw shaft 117 by a coupling 116, and the third horizontal moving table 1 is rotated by the rotation of the screw shaft 117.
14 is moved in the left and right directions X1 and X2. A third lifting / lowering unit 118 is provided on the third horizontal movement table 114.

The third elevating means 118 has a pair of supports 120 having a spline shaft 119 extending in the axial direction parallel to the Y-axis, and each spline shaft 119 has a nut 121.
Is fitted and guided, and each nut 121 is attached to the lifting body 12
Fixed to 2. An upper end of a support shaft 123 is fixed to the lifting body 122, and the support shaft 123 is a screw shaft 1 extending in the Z-axis direction.
It is driven up and down by 24. As shown in FIG. 3, the screw shaft 124 is coupled to the output shaft of the third vertical drive motor M6 via the coupling 125. Therefore, the lift 122 is driven up and down by the power of the third vertical drive motor M6.

Each of the motors M1 to M6 described above is, for example, a stepping motor, and is automatically controlled by a control computer (not shown).

The third link means 41 is provided on the elevating body 122, and the front-rear / left-right direction guide means 43 is provided on the third link means 41. The third link means 41 is the first and second link means 39, 4 described above.
It has a configuration similar to that of 0, and has a third receiving seat 126 and a third fitting portion 127 that are rotatably fitted and connected to each other. The front / rear / left / right direction guiding means 43 includes the third receiving seat 126.
Is fixed, a swing table 129 to which the support 128 is fixed, a horizontal guide rail 130 fixed to the upper surface of the swing table 129 and extending in the horizontal directions X1 and X2, and a horizontal guide rail. 130 left and right direction X
1, a movable body 131 that is movably fitted in X2, a horizontal movement table 132 to which the movable body 131 is fixed,
A rail guide member 133 fixed to the upper surface of the left-right direction moving table 132, a front-rear direction guide rail 134 fitted in the rail guide member 133 and extending in the front-rear direction Z,
The front and rear direction guide rails 134 are fixed, and the pedestal 3
5 and a liner plate 135 which is welded to the lower surface of the frame 5 and forms a part of the pedestal 35.

The pedestal 35 is movably supported in the front-rear directions Z1 and Z2 and the left-right directions X1 and X2 by the front-rear and left-right direction guiding means 43, and the axes X, Y, and It can be rotatably supported around Z. This third link means 41
It is possible to prevent the third receiving seat 126 from coming off from the fitting portion 127, and thus to prevent the pedestal 35 from falling off.

FIG. 8 is a sectional view perpendicular to the axis showing the spline shaft 75 provided in the first drive means 36 and the nut 77 mounted on the spline shaft 75. A plurality of (six in this embodiment) spline grooves 138 are formed parallel to the axis on the outer peripheral portion of the spline shaft 75 at equal intervals in the circumferential direction, and each of the spline grooves 138 is realized by, for example, a steel ball. The rolling element 139 is partially fitted,
The rolling elements 139 are held by the cage 140 at regular intervals in the circumferential direction. The nut 77 is mounted as an outer cylinder on the outer periphery of the rolling element 139 and the cage 140. Each spline groove 13 is provided on the inner peripheral portion of the nut 77.
8, a plurality of guide grooves 141 are formed at the same intervals in the circumferential direction and are parallel to each other in the axial direction. By the inner surface of the guide groove 141 of the nut 77 and the outer surface of the spline groove 138 of the spline shaft 75, the rolling element 139 is axially contacted in a circular arc shape and rotatably held, and the nut 77 is highly linear.
Can be moved linearly with respect to the spline shaft 75 only in the axial direction without any rotational movement. By adopting such a ball spline mechanism, it is possible to simultaneously achieve regulation of the rotation direction and high-precision linearity, so that the lifting bodies 63, 96, 122 are moved in the vertical directions Y1, Y.
It is possible to reduce the number of guide shafts for guiding to 2, and the configuration can be simplified.

Although the spline mechanism shown in FIG. 8 is a non-circulating ball spline mechanism, another embodiment of the present invention is to use a circulating ball spline mechanism as defined in JIS B 1193, for example. May be.

The above-described ball spline mechanism is similarly configured with respect to the remaining spline shafts 76 and 94, and the mount 35 can be displaced with high accuracy in the vertical directions Y1 and Y2.

Although the first link means 39 as shown in FIG. 2 is provided in the above embodiment, as another embodiment of the present invention, the first link means 15 as shown in FIG.
You may make it provide 0. First link means 150
Is a spherical surface forming member 151 instead of the spherical portion 49 described above.
And the first receiving seat 1 into which the spherical surface forming member 151 of the first fitting portion 152 is partially fitted.
And 53. The spherical surface forming member 151 is made of steel, has an annular shape, and has an annular supporting surface 154 that forms a part of a spherical shape that is an outer peripheral surface, and is fitted to a cylindrical pedestal portion 155 having a step 155a. It is positioned by the step 155a and is retained by the retaining ring 156. The first seat 153 is made of steel, has an annular shape,
Cylindrical support 1 having an annular receiving surface 157 forming a part of a spherical inner surface and a step 158a on the inner surface.
58, and is positioned by the step 158a,
The retaining ring 159 prevents the retaining ring 159.

The spherical surface forming member 151 is placed in the space 160 sandwiched by the receiving surfaces 157 of the first receiving seat 153.
Partially fit into the support surface 154 and the receiving surface 15
7 is in surface contact. The same effect can be obtained by arranging the thus configured first link means 150 in the same manner as the above-mentioned first link means 39. Also,
The above-mentioned second and third linking means 40, 41 may be configured similarly to the first linking means 150.

[0037]

As described above, according to the present invention, the first to third fitting portions having the spherical support surface are brought into surface contact with the receiving surfaces of the first to third receiving seats. Since the support is provided, it is possible to prevent the pedestal from falling off due to the action of external force, and to improve safety and reliability. Further, by supporting the first to third fitting portions on the first to third seats by surface contact, friction is reduced, and thereby, it becomes possible to smoothly absorb the rotation of each portion of the gantry. Further, since the front-rear direction guiding means is provided between the second link means and the gantry, and the front-rear and left-right direction guiding means is provided between the third link means and the gantry, the gantry is provided with high-precision linearity. It is possible to smoothly move with a small driving force, and therefore it is possible to accurately correct the displacement of the gantry due to the fluctuation of the ground, the temperature change, and the like.

Further, according to the present invention, since the elevating body of the first to third drive means is configured to be guided in the vertical direction by the ball spline mechanism, the linearity of the vertical displacement of the elevating body can be made highly accurate. In addition, it is possible to prevent the problem that the positioning accuracy between the linear guides for guiding the elevating body in the vertical direction is complicated as in the conventional case, and the assembling property is good. Moreover, since the elevating guide means adopting such a ball spline mechanism is provided in the first to third drive means, it is not necessary to provide a plurality of linear guides as in the conventional case, the number of parts is reduced, and the structure is reduced. It is possible to simplify. As a result, the supporting device of the present invention can be realized at a low manufacturing cost.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a schematic configuration of a heavy object support device 31 according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a specific configuration of first link means 39.

FIG. 3 is a plan view showing a specific configuration of a supporting device 31 shown in FIG.

FIG. 4 is a front view of the support device 31 as seen from below in FIG.

5 is a left side view of the support device 31 as viewed from the left side of FIG.

FIG. 6 shows first and second front-rear direction moving bolts 67, 6
It is sectional drawing which expands and shows 9 vicinity.

7 is a right side view of the support device 31 as viewed from the right side of FIG.

FIG. 8 is a spline shaft 7 included in the first elevating means 64.
5 is a sectional view of a nut 77 mounted on the spline shaft 75 and the spline shaft 75 at right angles to the shaft. FIG.

FIG. 9 is a cross-sectional view showing a specific configuration of the first link means 150 according to another embodiment of the present invention.

FIG. 10 is a perspective view showing a schematic configuration of a typical prior art support device 1.

[Explanation of symbols]

 31 Heavy load support device 33 Base mount 34 Heavy load 35 Frame 36 First driving means 37 Second driving means 38 Third driving means 39,150 First linking means 40 Second linking means 41 Third linking means 42 Front-back direction guide Means 43 Front-rear / left-right direction guiding means 47,152 First fitting portion 48,153 First receiving seat 49 Spherical portion 50,155 Base portion 51 Shaft 52,154 Supporting surface 54 Fitting recess 56,157 Receiving surface 64th 1 Lifting means 75, 76, 94, 119 Spline shaft 151 Spherical surface forming member

Claims (2)

[Claims] 1. A pedestal, a pedestal placed above the pedestal and substantially parallel to the pedestal, on which a heavy object is placed, and a vertical direction provided on the pedestal so that the pedestal approaches and separates from the pedestal. And first drive means for driving the gantry in the front-rear direction and the left-right direction orthogonal to each other in a plane perpendicular to the up-down direction, and provided on the base at a position apart from the first drive means in the front-rear direction and the left-right direction Second drive means for driving the gantry in the up-down direction and the left-right direction, and a base provided at a position separated from the first drive means in the front-rear direction and the left-right direction and separated from the second drive means in the left-right direction, Third for driving the gantry in the left and right directions
A driving unit; a first fitting unit that is driven in the up-down direction, the front-rear direction, and the left-right direction by the first driving unit; and the first fitting unit that is rotatably fitted and fixed to the gantry. A first link means having a first seat, a second fitting portion driven in the up-down direction and the left-right direction by the second drive means, and a second receiving portion into which the second fitting portion is rotatably fitted. Second link means having a seat, a third fitting portion driven in the up-down direction and the left-right direction by the third driving means, and a third receiving seat into which the third fitting portion is rotatably fitted. A third linking means having a second linking means, a second receiving means of the second linking means, and a front-back direction guiding means for guiding the base in the front-rear direction; Proposed in the front and back / left / right direction, which is installed between the frame and guides the frame in the front / rear and left / right directions. Means, each of the first to third fitting portions is formed with a spherical support surface that fits into and slides on the first to third receiving seats. A support device for heavy objects, wherein each of the support devices has a receiving surface that comes into surface contact with each of the supporting surfaces of the first to third fitting portions. 2. The first to third drive means includes an elevating body provided with first to third fitting portions, and elevating guide means for guiding the elevating body up and down by a ball spline mechanism. The heavy object supporting device according to claim 1, wherein the heavy object supporting device is provided respectively.