JPH08318486A - Method for controlling automatic carrying equipment - Google Patents

Abstract

PURPOSE: To improve the traveling reliability by eliminating the traveling error through temporarily traveling automatic carrying equipment in advance at the prescribed part based on the initial traveling information, transmitting the permanent traveling information to be obtained from the temporary traveling to a control device and forming the permanent traveling information. CONSTITUTION: The section traveling, i.e., the temporary traveling of an automatic carrying vehicle 3 is made in advance at the prescribed part based on the initial traveling information. The permanent traveling information such as the traveling distance which is actually measured by the automatic carrying vehicle 3 through the temporary traveling is stored in the carrying part control program 16 in the automatic carrying vehicle 3. Then, the permanent traveling information stored in the station is registered in the control program 10 in a control personal computer 9 which is a control device using the communication control program 21. Even when the traveling error is generated during the adjustment, etc., the traveling data, i.e., the permanent traveling information is available so long as the address of the traveling route is correctly recognized, and the permanent traveling information can be registered by moving the automatic carrying vehicle to the station for the communication.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for conveying an object to be treated such as a semiconductor wafer in a semiconductor manufacturing process, and more particularly to a method for controlling an automatic conveying device equipped with a robot for holding a cassette containing the object to be treated. It is about.

[0002]

2. Description of the Related Art The techniques described below are for studying the present invention,
The present invention was studied by the present inventors upon completion, and its outline is as follows.

With respect to an automatic transfer apparatus for transferring a cassette containing a semiconductor wafer, which is an example of an object to be processed, an automatic transfer vehicle equipped with a transfer robot for holding the cassette is used in the semiconductor manufacturing process.

The automatic guided vehicle is controlled by a control device such as a control personal computer (hereinafter abbreviated as a control personal computer) for controlling the traveling of the automatic guided vehicle.

Here, the control device internally has various programs for controlling the traveling of the automatic guided vehicle, and the traveling route information and the traveling distance information are registered therein to control the traveling of the automatic guided vehicle. .

Therefore, when the automatic guided vehicle is to be traveled, the travel distance information registered in advance in the control device is compared with the travel distance information obtained by the travel in which actual processing is performed (hereinafter referred to as main travel), Checking whether the automated guided vehicle is running normally.

Explaining the travel adjustment of the automatic guided vehicle, first, the travel address is determined, then the power feeding position is adjusted at each station (stop position), and the distance between the addresses is registered in the control personal computer. Then, after that, the automatic guided vehicle is actually driven, and the information obtained thereby is used to repeatedly adjust the power feeding position and the traveled distance.

Regarding an automatic carrier equipped with a robot for carrying a cassette containing semiconductor wafers, etc., May 20, 1993, published by Press Journal, June 1993, "Monthly Semiconductor World"
Introduced on pages 125-127.

[0009]

However, in the above-mentioned technique, when the automatic guided vehicle travels in the designated section, a traveling error may occur.

In this case, it is necessary to judge the situation from the content of the error, the stop position of the automatic guided vehicle, etc., and change the traveling distance information registered in the control personal computer, that is, the control device.

However, since the automatic guided vehicle does not have a function of displaying the distance traveled (the distance measured by the automatic guided vehicle),
The problem is that it is difficult to adjust the control personal computer, that is, it is difficult to grasp the difference between the information and the travel distance information registered in advance in the control device, and it is difficult to adjust the information.

Also, when the control device for the automatic guided vehicle is newly started up, the same error as the above-mentioned traveling error occurs by checking the traveling distance after registering the traveling distance information in the control device. The same adjustment work must be carried out.

As a result, similarly to the above, there is a problem that the adjustment work is difficult.

Therefore, it is an object of the present invention to provide a control method for an automatic carrying apparatus which eliminates running errors and improves running reliability.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0016]

Of the inventions disclosed in the present application, a representative one will be briefly described below.
It is as follows.

That is, according to the control method of the automatic carrying apparatus of the present invention, the automatic carrying apparatus is temporarily run in advance at a predetermined position based on the initial running information, and the main running information obtained by the temporary running is stored in the automatic carrying apparatus. The main travel information is formed in the control means in the control device by transmitting the travel information to the control device that performs travel control.

Furthermore, the control method of the automatic transporting apparatus of the present invention is to automatically update the main traveling information formed in the control means every time the temporary traveling or the main traveling is performed once or a plurality of times.

Further, in the control method of the automatic carrying apparatus of the present invention, initial traveling information is registered in advance in the carrying section control means in the automatic carrying apparatus, and the automatic carrying apparatus is temporarily set at a predetermined location based on the initial running information. The vehicle is caused to travel, main travel information obtained by the provisional traveling is formed in the transport section control means, and the travel control of the automatic transport device is performed by the transport section control means.

According to the control method of the automatic carrier of the present invention, the initial traveling information of the automatic carrier is registered in advance in the control device for controlling the traveling of the automatic carrier, and the automatic traveling is performed based on the initial traveling information. The transport device is caused to travel, and the deceleration operation or the stop operation of the automatic transport device is controlled by the deceleration detection means or the stop detection means provided on the travel route of the automatic transport device.

[0021]

According to the above-mentioned means, the main traveling information obtained by the provisional traveling of the automatic carrier such as the automatic carrier is transmitted to the control device for controlling the traveling of the automatic carrier, and the main information is transmitted to the control means in the controller. By forming the travel information, the main travel information can be automatically set in the control means.

With this, it is not necessary to compare the traveling distance information between the automatic conveying device and the control device, so that the traveling of the automatic conveying device can be stabilized without causing a traveling error. Become.

Further, since a traveling error does not occur, traveling adjustment can be facilitated.

Further, the main traveling information formed in the control means is automatically updated every time the provisional traveling or the main traveling is performed once or a plurality of times, respectively, so that the traveling distance information and the main traveling distance registered in advance in the control device can be obtained. Eliminates the need to match information.

[0025]

Embodiments of the present invention will now be described in detail with reference to the drawings.

FIG. 1 is a partial side view showing an embodiment of the structure of a robot-mounted automatic carrier used in the control method of the automatic carrier of the present invention and its operating state. FIG. 2 is an automatic carrier of the present invention. FIG. 3 is a structural conceptual diagram showing an example of the structure of the control means in the control device and the conveyance section control means in the automatic guided vehicle used in the control method of FIG.

The automatic transfer apparatus according to this embodiment is an automatic transfer vehicle 3 equipped with a transfer robot 2 for accommodating and transferring the semiconductor wafer 1 which is the object to be processed.

First, referring to FIG. 1, the structure of the automatic carrier according to the present embodiment, that is, the automatic carrier 3, will be described. A gripper 5 for gripping a cassette 4 which is a carrier jig in which the semiconductor wafer 1 is housed is provided. An arm portion 6 to which the grip portion 5 is attached and a transport vehicle main body portion 7 which is a main body portion on which the transport robot 2 is mounted.

Here, the automatic carrier 3 according to the present embodiment is
For example, in an ion implantation process of the semiconductor wafer 1 or the like, the cassette 4 containing the semiconductor wafer 1 is mounted on the carrier body 7 and conveyed, and each cassette 4 is placed in a wafer processing apparatus 8 that processes the semiconductor wafer 1. Semiconductor wafer 1
It is self-propelled.

Next, referring to FIGS. 1 and 2, a control personal computer 9 which is a control device for controlling the traveling of the automatic guided vehicle 3 will be described.
A control program 10 which is a control means written in a memory installed in the vehicle, and a transport section control program 16 which is a transport section control means written in a memory installed in the vehicle body 7; The main configuration will be described.

First, the control program 10 is a main program 11 for managing initial data such as initial running information.
An upper communication program 12 for managing upper data such as processing conditions of the semiconductor wafer 1, an automatic carrier control program 13 for managing data transmission of the upper data to and from the automatic carrier 3, and charging of the automatic carrier 3. A power supply control program 14 that manages information related to information about a power supply, and a set value input program 15 that manages data to be registered in advance such as mileage information.
Etc., and stores various other programs.

The carrier control program 16 includes a speed control program 17 for controlling the speed of the automatic carrier 3.
It comprises a travel distance control program 18 for controlling the travel distance of the automated guided vehicle 3, a state monitoring program 19 for monitoring the travel route of the automated guided vehicle 3, a stop control program 20 for controlling the stop position of the automated guided vehicle 3, and the like. In addition, various programs are stored.

Further, regarding the information from the transport section control program 16, the communication control program 21 exchanges the information with the control means 10 of the control personal computer 9.

The communication control program 21 is a robot control program 22 for controlling the operation of the transfer robot 2.
Is also connected.

Here, the automatic carrier 3 and the control personal computer 9
The data communication with is performed using, for example, modem communication or wireless communication.

Next, a method of controlling the automatic carrier (automatic carrier) according to this embodiment will be described.

First, the section of the automatic carrier 3 which is an automatic carrier is preliminarily set at the predetermined location based on initial traveling information (mainly information such as traveling route and stop position of traveling map of the automatic vehicle 3). Running, that is, temporary running.

After that, by the temporary running, the automatic carrier 3
The actual traveling information such as the actually traveled distance is stored in the transport section control program 16 in the automatic guided vehicle 3.

Then, for example, the main traveling information stored at a station (a place where the automatic guided vehicle 3 is stopped to work) or a place where work communication can be performed is controlled by the control device using the communication control program 21. It is transmitted to the control personal computer 9 and the main traveling information is automatically registered (formed) in the control program 10 in the control personal computer 9.

As a result, even if a traveling error occurs during adjustment or the like, the traveling data, that is, the actual traveling information can be acquired if the address of the traveling route can be normally recognized. Alternatively, the main travel information can be registered by moving to a place where work communication can be performed and communicating.

Further, the data, that is, the main travel information is registered by classifying the data after the provisional travel of a predetermined section or after the provisional travel of all the sections, thereby improving the usability when correcting the information. be able to.

Further, the main travel information at the time of registration is
High-precision information can be registered by using the control program 10 in the automatic guided vehicle 3 and setting the average value after tentative traveling any number of times (for example, 10 times).

Further, during traveling such as during processing of the semiconductor wafer 1, that is, during main traveling, the main traveling information is registered in the same manner as during the temporary traveling, so that maintenance of traveling data can be easily performed.

Even in the case of the main running, the main running information can be automatically updated by automatically transmitting the data, that is, the main running information after the main running for a predetermined number of times as in the temporary running. it can.

As a result, it becomes possible to correct the deviation (error) in the main running information due to the change over time, and further, the modes are different for the start adjustment such as the temporary running and the main running. By setting, it becomes easy to correct the information.

Here, the main running information registered (formed) in the control program 10 in the control personal computer 9 may be automatically updated every time the temporary running or the main running is performed once.
Alternatively, it may be automatically updated every time it is performed a plurality of times.

Next, according to the control method for the automatic carrier (automatic carrier) of this embodiment, the following operational effects can be obtained.

That is, the main traveling information obtained by the temporary traveling of the automatic guided vehicle 3 is transmitted to the control personal computer 9 for controlling the traveling of the automatic guided vehicle 3, and the main traveling information is stored in the control program 10 in the control personal computer 9. By forming
The main travel information can be automatically set in the control program 10.

As a result, since it is not necessary to check the traveling distance between the automatic guided vehicle 3 and the control personal computer 9, the traveling of the automatic guided vehicle 3 can be stabilized without causing a running error. As a result, the traveling reliability of the automated guided vehicle 3 can be improved.

Since no running error occurs,
The travel adjustment can be facilitated, and as a result, the work time can be shortened even when the automatic guided vehicle 3 is newly started up.

When starting up a plurality of automatic guided vehicles 3, the working time can be greatly shortened.

Further, the running distance information registered in advance in the control personal computer 9 is automatically updated by automatically updating the main running information formed in the control program 10 each time the provisional running or the main running is performed once or a plurality of times. There is no need to compare the actual travel distance information with.

As a result, similarly to the above, since the traveling error does not occur, the traveling of the automatic guided vehicle 3 can be stabilized, and as a result, the reliability of the traveling of the automatic guided vehicle 3 can be improved. .

Although the present invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, although the automatic carrier described in the above embodiment is an automatic carrier equipped with a carrier robot,
The automatic carrier may be an automatic carrier having only a trolley function without a carrier robot. In this case, the robot control program 22 shown in FIG. 2 is unnecessary.

Further, the automatic carrier device has a function of displaying information of traveling data such as a traveling distance on the carrier body 7 like the automatic carrier of another embodiment shown in FIG. It may be.

In this system, for example, a display unit 23 such as a screen is provided in the main body 7 of the transport vehicle, a display area 23a is formed in the display section 23, and the traveling distance and the like are constantly displayed in the display area 23a.

As a result, the information such as the traveling distance displayed in the display area 23a can be registered in the control device such as the controlling personal computer, so that the traveling adjustment work can be easily performed.

Further, as another control method capable of eliminating a traveling error, there is a method of controlling the traveling by an automatic carrier device itself such as an automatic carrier vehicle.

That is, initial travel information such as travel route and stop position is registered in advance in the transport section control program which is the transport section control means in the automatic transport apparatus.

Then, the automatic transporting device is provisionally run at a predetermined position based on the initial running information.

After that, the main travel information such as the travel distance obtained by the temporary travel is registered (formed) in the transfer section control means, and the travel control of the automatic transfer device is performed by the transfer section control means. .

In this case, the control personal computer, which is the control device, has only the information on the traveling route. Therefore,
Since the information on the traveling distance is not checked, the frequency of occurrence of traveling errors can be greatly reduced.

Further, if charging or the like is required for the automatic conveying device at the stop position, a sensor or the like is provided at the stop position, and if the position is normally detected, charging work is started.

Further, as another control method which makes it possible to eliminate a traveling error, there is a method of performing traveling control without using the traveling distance information at all.

First, initial travel information such as a travel route of the automatic carrier is registered in advance in a controller for controlling the travel of the automatic carrier such as an automatic carrier.

Thereafter, the automatic transport device is caused to travel based on the initial travel information, and the deceleration operation or stop of the automatic transport device is performed by the deceleration detection means or the stop detection means provided in the traveling path of the automatic transport device. It controls the operation.

That is, as in the automatic carrying apparatus of another embodiment shown in FIG. 4, a deceleration area is set before the stop position of the traveling route of the automatic guided vehicle 3, and the deceleration serving as deceleration detecting means is set in the deceleration area. The sensor 24 for use is installed. Further, a stop area is set at the stop position, and a stop sensor 25, which is a stop detecting means, is installed in the stop area.

The deceleration sensor 24 and the stop sensor 25 are, for example, non-contact type sensors such as optical sensors, and the automatic carrier 3 has receiver members for receiving signals from the respective sensors. Install 26.

At this time, the signals for deceleration and stop are discriminated by changing the frequency of the signal to be transmitted or by the receiver member 2
The input port of 6 is designated, and the determination is performed.

As a result, the deceleration sensor 24 and the stop sensor 25 monitor the automatic guided vehicle 3, decelerate it when the automatic guided vehicle 3 arrives at the deceleration area, and stop it when it arrives at the stopped area. be able to.

Further, in the above-mentioned embodiment, the object to be processed is explained as a semiconductor wafer, but the object to be processed may be other electronic parts such as a magnetic disk or a liquid crystal substrate, and the automatic transfer according to the present invention. The device is not limited to the one used in the semiconductor manufacturing process, and may be, for example, an automatic transfer device that stores a machined component in a carrier jig or the like and transfers it.

[0073]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.

(1). The main traveling information obtained by the provisional traveling of the automatic transporting device is transmitted to the control device that controls the traveling of the automatic transporting device, and the main traveling information is formed in the control means in the control device, whereby the control means is automatically operated. The actual travel information can be set.

As a result, it becomes possible to stabilize the running of the automatic carrier without causing a running error, and as a result, the reliability of the running of the automatic carrier can be improved.

(2). Since a traveling error does not occur, traveling adjustment can be facilitated, and as a result, the work time can be shortened even when a new automatic conveyance device is started up.

(3). Each time the provisional traveling or the main traveling is performed once or a plurality of times, the main traveling information formed in the control means is automatically updated to collate the traveling distance information previously registered in the control device with the main traveling distance information. There is no need. As a result, a traveling error does not occur, so that the traveling of the automatic transport device can be stabilized, and as a result, the traveling reliability of the automatic transport device can be improved.

[Brief description of drawings]

FIG. 1 is a partial side view showing an embodiment of the structure of a robot-mounted automatic carrier used in a method for controlling an automatic carrier of the present invention and its operating state.

FIG. 2 is a structural conceptual diagram showing an embodiment of the configurations of a control means in a control device and a conveyance section control means in an automatic guided vehicle, which are used in a control method for an automatic guided apparatus of the present invention.

FIG. 3 is a partial front view showing an example of the structure of an automated guided vehicle used in a method for controlling an automated guided machine according to another embodiment of the present invention.

FIG. 4 is a partial plan view showing an example of the structure of an automated guided vehicle used in a method for controlling an automated guided machine according to another embodiment of the present invention.

[Explanation of symbols]

 1 semiconductor wafer (object to be processed) 2 transfer robot 3 automatic transfer vehicle (automatic transfer device) 4 cassette (carrier jig) 5 gripping part 6 arm part 7 transfer vehicle main part 8 wafer processing device 9 control PC (control device) 10 Control Program (Control Means) 11 Main Program 12 Upper Communication Program 13 Automatic Vehicle Control Program 14 Power Supply Control Program 15 Set Value Input Program 16 Conveyor Control Program (Conveyor Control Means) 17 Speed Control Program 18 Traveling Distance Control Program 19 Status monitoring program 20 Stop control program 21 Communication control program 22 Robot control program 23 Display section 23a Display area 24 Deceleration sensor (deceleration detection means) 25 Stop sensor (stop detection means) 26 Receiver member

Claims (4)

[Claims] 1. A method of controlling an automatic transfer device for transferring an object to be processed such as a semiconductor wafer, which is obtained by temporarily moving the automatic transfer device at a predetermined location in advance based on initial travel information. By transmitting this travel information to the control device that controls the travel of the automatic carrier,
A method of controlling an automatic carrier, wherein the main traveling information is formed in a control means in the controller. 2. The control method for an automatic transport apparatus according to claim 1, wherein the main traveling information formed in the control means is automatically updated every time the provisional traveling or the main traveling is performed once or a plurality of times, respectively. A method for controlling an automatic carrier, comprising: 3. A method of controlling an automatic transfer apparatus for transferring an object to be processed such as a semiconductor wafer, wherein initial traveling information is registered in advance in a transfer section control means in the automatic transfer apparatus to initialize the automatic transfer apparatus. A feature is that provisional traveling is performed at a predetermined location based on traveling information, main traveling information obtained by the provisional traveling is formed in the conveyance unit control unit, and traveling control of the automatic conveyance device is performed by the conveyance unit control unit. A method for controlling an automatic carrier. 4. A control method for an automatic transfer device for transferring an object to be processed such as a semiconductor wafer, wherein initial running information of the automatic transfer device is registered in advance in a control device for controlling travel of the automatic transfer device, Based on the initial traveling information, the automatic transporting device is caused to travel, and the deceleration operation or the stopping operation of the automatic transporting device is controlled by the deceleration detecting means or the stopping detecting means provided on the traveling path of the automatic transporting device. A method for controlling an automatic carrier, comprising: