JPH082998Y2 - Exposure position calculation device for laser light exposure device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an interference exposure apparatus that performs exposure using laser light, a so-called laser light exposure apparatus, and particularly for calculating an exposure position at which the best exposure can be performed. It relates to the device.

[Conventional technology]

Conventionally, when trying to determine the best exposure position in a laser light exposure device, the laser light is applied to a paper or the like and the position where the laser light is strong is searched by eye to find the exposure position, or the detector of the laser power meter is manually operated. It is common to find the exposure position by reading the value on the power meter while moving with.

[Problems to be solved by the device]

However, the above-described conventional exposure position indexing has the following problems. That is, (i) Since the human is visually or power meter reading to check the intensity of the laser light to determine the optimum exposure position, there are many errors and there is a drawback that it takes time.

Also, (ii) because the laser power cannot be measured on the sample stage, the exposure position determined by the measurement is not accurate, and when the sample stage is actually moved, the best exposure position There are some drawbacks when they are misaligned.

[Means for solving the problem]

In order to solve such a problem, an exposure position calculation device of a laser light exposure device according to the present invention is provided with a laser power measuring detector attached to a part of a sample table on which a sample to be exposed is placed, and an analog from the detector. A data conversion unit that converts a signal into digital data, a data storage unit that stores the digitally converted data, an exposure position calculation unit that calculates the best exposure position based on the stored digital data, and the sample. It is provided with a sample table controller for controlling the movement of the table and a main controller for managing the automatic control of the whole.

[Action]

In the present invention, since the detector can be mounted on a movable sample table and the laser power can be automatically measured, the exposure position error can be reduced and the measurement time can be shortened.

〔Example〕

 Next, the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of an exposure position calculation apparatus for a laser light exposure apparatus according to the present invention. In FIG. 1, reference numeral 1 denotes a laser power measuring detector as a data reading unit, and the detector 1 is detachably attached to a part of a sample table (not shown) on which a sample to be exposed is placed. 2 and an example thereof is shown in FIG. That is, as shown in FIG. 2, the laser power measuring detector 1 is housed in a detector cover 11 having a light passage hole 12 for receiving the laser light emitted from the laser light source (not shown) onto the sample surface. At the same time, the suction plate 13 is attached to the lower position, and by this suction plate 13,
It is supposed to be detachably mounted on the sample table having a function of moving in the XY directions.

Reference numeral 2 is a data conversion unit for converting an analog signal from the detector 1 into digital data, which uses an analog / digital conversion board. 3 is a data storage unit for storing the data 21 digitally converted by the data conversion unit 2, and 4 is this stored digital data.
31 is an exposure position calculation unit for calculating the best exposure position, 5 is a sample stage control unit for controlling the movement of the sample stage, and 6 is a main control unit for managing the overall automatic control. The exposure position calculation unit 4, the sample stage control unit 5, and the main control unit 6 are composed of a personal computer and a control program. Then, based on the measurement result of the laser power detected by the detector 1, the exposure position calculation section 4 automatically calculates the best position of the laser light exposure and outputs the exposure position data 41. There is.

According to the exposure position calculation device configured as described above, the laser power is automatically measured without using a human hand, so that the error can be reduced and the measurement time can be shortened in determining the best exposure position. . Further, the detector 1 for laser power measurement has a structure directly attached to the sample table, and the sample table is moved during the laser power measurement, so that the calculated optimum exposure position and the actual exposure position are set. It has the advantage of less deviation.

[Effect of device]

As described above, according to the present invention, the laser power can be measured and the data can be automatically stored, so that the error during measurement can be reduced and the measurement time can be shortened. Further, since the measuring detector has a structure to be attached to the sample table, there is an effect that the calculated optimal exposure position and the positional deviation during actual exposure can be reduced.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a detailed perspective view of the laser power measuring detector of FIG. 1 ... Detector for laser power measurement (data reading unit), 2 ... Data conversion unit, 3 ... Data storage unit, 4 ...
… Exposure position calculation unit, 5 …… Sample stage control unit, 6 …… Main control unit, 11 …… Detector cover, 12 …… Light passage hole,
13 ... Suction plate.

Claims (1)

[Scope of utility model registration request] 1. A laser beam exposure apparatus for exposing a sample placed on a sample stage with a laser beam, wherein a laser power measuring detector attached to a part of the sample stage and an analog signal from the detector are digitalized. A data conversion unit that converts the data, a data storage unit that stores the digitally converted data, an exposure position calculation unit that calculates the best exposure position based on the stored digital data, and movement of the sample table. An exposure position calculation apparatus for a laser light exposure apparatus, comprising: a sample table control unit for controlling; and a main control unit for managing overall automatic control.