JPH0829711A - Optical scanner provided with light beam detecting mechanism - Google Patents

Optical scanner provided with light beam detecting mechanism

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Publication number
JPH0829711A
JPH0829711A JP18175594A JP18175594A JPH0829711A JP H0829711 A JPH0829711 A JP H0829711A JP 18175594 A JP18175594 A JP 18175594A JP 18175594 A JP18175594 A JP 18175594A JP H0829711 A JPH0829711 A JP H0829711A
Authority
JP
Japan
Prior art keywords
light beam
light receiving
receiving means
light
scanned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18175594A
Other languages
Japanese (ja)
Inventor
Toshiyuki Mizuno
利幸 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP18175594A priority Critical patent/JPH0829711A/en
Publication of JPH0829711A publication Critical patent/JPH0829711A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain an optical scanner provided with a light beam detecting mechanism capable of highly accurately measuring deviation amount in a subscanning direction in the case of optically scanning a surface to be scanned. CONSTITUTION:When a light beam is guided on the surface 5 to be scanned through an image forming means 4 and optically scans the surface 5 after the light beam radiated from a light source means 1 is deflected and reflected by a deflecting means 3, the light beam from the means 1 passing through the means 3 is image-formed on a first light receiving means 6a arranged in the vicinity of the surface to be scanned and a second light receiving means 6b arranged in the vicinity of the means 6a by the means 4, and a signal from the means 6b is adjusted based on a signal from the means 6a, so that the deviation amount of a scanning line in the subscanning direction on the surface 5 to be scanned is measured.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光ビーム検出機構を有し
た光走査装置に関し、特に光走査装置を構成する光偏向
器の各偏向面の製造誤差や該光偏向器を駆動させるモー
タの駆動誤差等によって被走査面を光走査する際の光ビ
ームの副走査方向の走査位置の振れ量(ピッチ誤差)を
測定し高精度な光走査を可能とした、例えばレーザービ
ームプリンタ(LBP)等に好適な光ビーム検出機構を
有した光走査装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning device having a light beam detecting mechanism, and more particularly to a manufacturing error of each deflecting surface of an optical deflector which constitutes the optical scanning device and driving of a motor for driving the optical deflector. For example, in a laser beam printer (LBP), which enables high-accuracy optical scanning by measuring the amount of deflection (pitch error) of the scanning position of the light beam in the sub-scanning direction when optically scanning the surface to be scanned due to an error or the like. The present invention relates to an optical scanning device having a suitable light beam detection mechanism.

【0002】[0002]

【従来の技術】従来より複写機やレーザービームプリン
タ(LBP)等の光走査装置においては画像信号に応じ
てレーザ光源(光源手段)から放射した光ビームを光変
調している。そして光変調された光ビームを例えばポリ
ゴンミラーから成る光偏向器により周期的に偏向させf
−θ特性を有する結像光学系により感光性の記録媒体上
にスポット状に集束させ光走査して画像記録を行なって
いる。
2. Description of the Related Art Conventionally, in an optical scanning device such as a copying machine or a laser beam printer (LBP), a light beam emitted from a laser light source (light source means) is optically modulated according to an image signal. Then, the light beam which has been subjected to the light modulation is periodically deflected by an optical deflector composed of, for example, a polygon mirror.
An image is recorded by focusing in a spot shape on a photosensitive recording medium by an image forming optical system having a −θ characteristic and performing optical scanning.

【0003】図9は従来の光走査装置の要部概略図であ
る。
FIG. 9 is a schematic view of a main part of a conventional optical scanning device.

【0004】同図においては光源手段91から光変調さ
れた光ビームをコリメーターレンズ92を介してポリゴ
ンミラーから成る光偏向器93により偏向反射させ、f
θレンズ(結像レンズ)94により光路折り曲げミラー
96を介して感光性の記録媒体(感光体ドラム)95面
上にスポット状に集束させ光走査している。そして光偏
向器93を矢印A方向に一定速度で回転させることによ
って感光体ドラム95面上を矢印B方向(主走査方向)
に等速に光走査し、更に感光体ドラム95を矢印C方向
(副走査方向)に一定速度で回転させることにより画像
記録を2次元的に行なっている。
In the figure, a light beam optically modulated from a light source means 91 is deflected and reflected by a light deflector 93 composed of a polygon mirror through a collimator lens 92, and f
A θ lens (imaging lens) 94 focuses the light on a surface of a photosensitive recording medium (photosensitive drum) 95 via an optical path bending mirror 96 to perform optical scanning. Then, by rotating the optical deflector 93 in the direction of arrow A at a constant speed, the surface of the photosensitive drum 95 is in the direction of arrow B (main scanning direction).
Image scanning is performed two-dimensionally by performing optical scanning at a constant speed and rotating the photosensitive drum 95 in the direction of arrow C (sub-scanning direction) at a constant speed.

【0005】このような光走査装置において光ビームの
感光体ドラム95への入射位置精度は形成画像の画質に
大きく影響する為に入射位置精度を極めて高精度に保つ
必要がある。
In such an optical scanning device, the accuracy of the incident position of the light beam on the photosensitive drum 95 has a great influence on the quality of the formed image, and therefore the accuracy of the incident position must be kept extremely high.

【0006】しかしながら一般には感光体ドラムを駆動
させるモータの回転ムラ(駆動誤差)や、回転多面鏡の
各偏向面やfθレンズ等の製造誤差等によって被走査面
を光走査する際の光ビームの副走査方向の位置振れ(ピ
ッチ誤差)が発生し、高精度な画像が得られないという
問題点があった。この為、従来の光走査装置において文
字や画像等を高精度に記録するにはこのピッチ誤差を高
精度で測定し低減化を図ることが必然的に必要となって
いた。
However, in general, due to uneven rotation (driving error) of the motor for driving the photosensitive drum, manufacturing error of each deflecting surface of the rotary polygon mirror, fθ lens, etc. There is a problem in that a position deviation (pitch error) in the sub-scanning direction occurs and a highly accurate image cannot be obtained. Therefore, in order to record characters, images, etc. with high precision in the conventional optical scanning device, it is inevitably necessary to measure this pitch error with high precision to reduce the pitch error.

【0007】従来よりこのときのピッチ誤差を測定(検
出)する光ビーム検出機構を有した光走査装置が種々と
提案されている。
Conventionally, various optical scanning devices having a light beam detection mechanism for measuring (detecting) the pitch error at this time have been proposed.

【0008】図6は従来の光ビーム検出機構を有した光
走査装置の要部概略図である。同図において図9に示し
た要素と同一要素には同符番を付している。
FIG. 6 is a schematic view of a main part of an optical scanning device having a conventional light beam detecting mechanism. In the figure, the same elements as those shown in FIG. 9 are designated by the same reference numerals.

【0009】同図においては図9に示した折り曲げミラ
ー96を取り外し被走査面(感光体ドラム面)95の副
走査方向の走査線のピッチ誤差を検出する為の光ビーム
検出機構(受光手段)97を該被走査面95と光学的に
共役な位置に配置している。そして光ビーム検出機構9
7から得られる信号を利用してピッチ誤差を測定してい
る。
In the figure, the bending mirror 96 shown in FIG. 9 is removed, and a light beam detecting mechanism (light receiving means) for detecting a pitch error of a scanning line on the surface to be scanned (photosensitive drum surface) 95 in the sub-scanning direction. 97 is arranged at a position optically conjugate with the surface to be scanned 95. And the light beam detection mechanism 9
The pitch error is measured using the signal obtained from No. 7.

【0010】即ち、同図において光ビームの副走査方向
の走査線のピッチ誤差を測定する際には光偏向器93の
偏向面で反射偏向された光源手段91からの光ビームを
fθレンズ94を介し楔型開口を持つ受光手段(受光素
子)としてのフォトダイオード97a面に入射させ、該
フォトダイオード97aで得られる信号を利用して振れ
量測定手段(不図示)によりピッチ誤差を測定してい
る。
That is, when measuring the pitch error of the scanning line of the light beam in the sub-scanning direction in the figure, the light beam from the light source means 91 reflected and deflected by the deflecting surface of the light deflector 93 is passed through the fθ lens 94. It is made incident on the surface of a photodiode 97a as a light receiving means (light receiving element) having a wedge-shaped opening through, and a pitch error is measured by a shake amount measuring means (not shown) using a signal obtained by the photodiode 97a. .

【0011】図7(A),(B)はこのときの楔型開口
を持つフォトダイオードの形状を示した説明図と該フォ
トダイオードからの出力信号を示した説明図である。
FIGS. 7A and 7B are an explanatory view showing the shape of the photodiode having a wedge-shaped opening and an output signal from the photodiode at this time.

【0012】同図(A),(B)に示すように楔形開口
を持つフォトダイオード97aを光ビームが走査した際
の該フォトダイオード97aからの出力信号を用いて通
過時間(走査時間)を求め、この通過時間と予め設定し
てある基準時間(ピッチ誤差がないときの時間)とを比
較することにより、副走査方向の走査線のピッチ誤差を
求めている。
As shown in FIGS. 3A and 3B, the transit time (scanning time) is obtained using the output signal from the photodiode 97a when the photodiode 97a having a wedge-shaped aperture is scanned by the light beam. By comparing this passage time with a preset reference time (time when there is no pitch error), the pitch error of the scanning line in the sub-scanning direction is obtained.

【0013】例えば同図(B)に示すように光ビームが
正常なときのフォトダイオードからの出力信号(走査時
間)と該光ビームの出力変動やピッチ誤差が生じたとき
のフォトダイオードからの出力信号(走査時間)とをそ
れぞれ比較することにより、該光ビームの副走査方向の
走査線のピッチ誤差(振れ量)を測定している。
For example, as shown in FIG. 2B, the output signal (scanning time) from the photodiode when the light beam is normal and the output from the photodiode when the output fluctuation or pitch error of the light beam occurs. By comparing each with the signal (scanning time), the pitch error (deviation amount) of the scanning line of the light beam in the sub-scanning direction is measured.

【0014】この他、ピッチ誤差を測定する手段(装
置)としては、例えば図8(A)に示すように走査線に
対して垂直方向(副走査方向)に複数の画素を配列した
ラインセンサー(CCD)より成る受光手段87を被走
査面近傍に設け、光偏向器で反射偏向された光源手段か
らの光ビームの一部をfθレンズを介して該ラインセン
サー87面に入射させ、該ラインセンサー87に入射し
た光ビームの位置を検出することにより、副走査方向の
走査線のピッチ誤差を測定している。
In addition, as a means (apparatus) for measuring the pitch error, for example, as shown in FIG. 8A, a line sensor in which a plurality of pixels are arranged in a direction perpendicular to the scanning line (sub-scanning direction) ( A light receiving means 87 composed of a CCD) is provided in the vicinity of the surface to be scanned, and a part of the light beam from the light source means reflected and deflected by the optical deflector is incident on the surface of the line sensor 87 via the fθ lens, By detecting the position of the light beam incident on 87, the pitch error of the scanning line in the sub-scanning direction is measured.

【0015】図8(B)はこのときのラインセンサー8
7からの出力信号を示す説明図である。同図(B)に示
すように副走査方向の走査線が正常なときのラインセン
サー87からの出力(ピーク位置)とピッチ誤差が生じ
たときのラインセンサー87からの出力(ピーク位置)
とを検出し比較することによりピッチ誤差を測定してい
る。
FIG. 8B shows the line sensor 8 at this time.
7 is an explanatory diagram showing an output signal from FIG. As shown in FIG. 7B, the output (peak position) from the line sensor 87 when the scanning line in the sub-scanning direction is normal and the output (peak position) from the line sensor 87 when a pitch error occurs.
The pitch error is measured by detecting and comparing and.

【0016】[0016]

【発明が解決しようとする課題】従来の光ビーム検出機
構を有した光走査装置のうち楔形開口を持つフォトダイ
オード97aを利用してピッチ誤差を測定する装置は、
前記図7(B)に示したように該フォトダイオード97
aからの光強度の出力をある一定の低いレベルのしきい
値(スレッシュレベル)で検出している為、例えば半導
体レーザ91から出射される光ビームの出力変動や結像
レンズ94の焦点位置の変化による変動もピッチ誤差と
して同時に検出されてしまうという問題点があった。
Among the conventional optical scanning devices having a light beam detecting mechanism, a device for measuring a pitch error using a photodiode 97a having a wedge-shaped aperture is as follows.
As shown in FIG. 7B, the photodiode 97
Since the output of the light intensity from a is detected with a certain low level threshold value (threshold level), for example, the output fluctuation of the light beam emitted from the semiconductor laser 91 and the focus position of the imaging lens 94 There is a problem in that fluctuations due to changes are also detected as pitch errors at the same time.

【0017】一方、受光手段としてラインセンサー(C
CD)87を用いてピッチ誤差を測定する装置の場合
は、そのラインセンサーの構造上、検出ピッチを細かく
できない為、検出精度が不十分となり、又検出精度を高
める為には特別の算出回路やメモリー等を必要とし、こ
れは時間的及び経済的な損失が大きい等の問題点があっ
た。
On the other hand, a line sensor (C
In the case of a device for measuring the pitch error using the CD) 87, the detection pitch cannot be made fine due to the structure of the line sensor, so the detection accuracy becomes insufficient, and in order to improve the detection accuracy, a special calculation circuit or It requires a memory and the like, which causes a problem that a time and an economical loss are large.

【0018】本発明は光ビームの副走査方向の走査線の
振れ量(ピッチ誤差)を測定する際、該光ビームの走査
状態等を検出する第1の受光手段とその近傍に設けた副
走査方向の走査線の振れ量を検出する第2の受光手段と
を利用し、該第1の受光手段で得られた信号に基づいて
該第2の受光手段からの信号を調整することにより、該
被走査面上の副走査方向の走査線の振れ量を測定するこ
とにより、光ビームの出力変動や結像レンズの焦点位置
の変化にも関わらず該振れ量を高精度に測定することが
できる光ビーム検出機構を有した光走査装置の提供を目
的とする。
According to the present invention, when measuring the deflection amount (pitch error) of the scanning line of the light beam in the sub-scanning direction, the first light receiving means for detecting the scanning state of the light beam and the sub-scanning provided in the vicinity thereof. By using the second light receiving means for detecting the shake amount of the scanning line in the direction, and adjusting the signal from the second light receiving means based on the signal obtained by the first light receiving means, By measuring the shake amount of the scanning line in the sub-scanning direction on the surface to be scanned, the shake amount can be measured with high accuracy regardless of the output fluctuation of the light beam and the change of the focal position of the imaging lens. An object of the present invention is to provide an optical scanning device having a light beam detection mechanism.

【0019】[0019]

【課題を解決するための手段】本発明の光ビーム検出機
構を有した光走査装置は、 (1−1)光源手段から放射した光ビームを偏向手段で
偏向反射させた後、結像手段を介して被走査面上に導光
し該被走査面上を光走査する際、該偏向手段を介した該
光源手段からの光ビームを該結像手段により、該被走査
面近傍に配置した第1の受光手段と、該第1の受光手段
近傍に配置した第2の受光手段に結像させ、該第1の受
光手段で得られた信号に基づいて該第2の受光手段から
の信号を調整することにより、該被走査面の副走査方向
の走査線の振れ量を測定するようにしたことを特徴とし
ている。
An optical scanning device having a light beam detecting mechanism according to the present invention comprises: (1-1) After deflecting and reflecting the light beam emitted from the light source means by the deflecting means, When the light beam from the light source means via the deflecting means is guided near the scanned surface by guiding the light onto the scanned surface via the deflecting means, An image is formed on the first light receiving means and the second light receiving means arranged in the vicinity of the first light receiving means, and the signal from the second light receiving means is generated based on the signal obtained by the first light receiving means. It is characterized in that the amount of shake of the scanning line in the sub-scanning direction on the surface to be scanned is measured by the adjustment.

【0020】特に前記第1の受光手段は主走査線を境に
して副走査方向に対して2つに分割された矩形開口を持
つ受光素子より成り、前記第2の受光手段は副走査方向
に対して楔型開口を持つ受光素子より成っていることを
特徴としている。
In particular, the first light receiving means comprises a light receiving element having a rectangular opening which is divided into two in the sub scanning direction with respect to the main scanning line, and the second light receiving means in the sub scanning direction. On the other hand, it is characterized in that it is composed of a light receiving element having a wedge-shaped opening.

【0021】(1−2)光源手段から放射した光ビーム
を偏向手段で偏向反射させた後、結像手段を介して被走
査面上に導光し該被走査面上を光走査する際、該偏向手
段を介した該光源手段からの光ビームを該結像手段によ
り少なくとも主走査方向に2つの開口部を有するスリッ
ト板を介して、該2つの開口部に対応して設けた第1の
受光手段と第2の受光手段に導光させ、該第1の受光手
段で得られた信号に基づいて該第2の受光手段からの信
号を調整することにより、該被走査面の副走査方向の走
査線の振れ量を測定するようにしたことを特徴としてい
る。
(1-2) When the light beam emitted from the light source means is deflected and reflected by the deflecting means and then guided onto the surface to be scanned through the image forming means to optically scan the surface to be scanned, The light beam from the light source means via the deflecting means is provided by the image forming means through a slit plate having at least two opening portions in the main scanning direction so as to correspond to the two opening portions. By guiding the light to the light receiving means and the second light receiving means and adjusting the signal from the second light receiving means based on the signal obtained by the first light receiving means, the sub-scanning direction of the surface to be scanned. The feature is that the shake amount of the scanning line is measured.

【0022】特に前記スリット板上に設けた少なくとも
2つの開口部のうち一方の開口部は主走査線を境にして
副走査方向に対して2つに分割された矩形開口より成
り、他方の開口部は副走査方向に対して楔型開口より成
っていることを特徴としている。
Particularly, one of the at least two openings provided on the slit plate is a rectangular opening divided in the sub-scanning direction with the main scanning line as a boundary, and the other opening. The part is characterized in that it comprises a wedge-shaped opening in the sub-scanning direction.

【0023】[0023]

【実施例】図1は本発明の実施例1の要部概略図であ
る。
Embodiment 1 FIG. 1 is a schematic view of the essential portions of Embodiment 1 of the present invention.

【0024】同図において1は光源手段であり、半導体
レーザより成っており、画像情報により光変調された光
ビームを放射している。2はコリメーターレンズであ
り、光源手段1から放射した光ビームを略平行光束とし
ている。3は偏向手段としての光偏向器であり、複数の
偏向面を有した回転多面鏡より成っており、モータ等の
駆動手段(不図示)により矢印A方向に等速回転してい
る。4は結像手段としてのfθレンズ(結像レンズ)で
あり、球面レンズ4aとトーリックレンズ4bの2つの
レンズより成っており、光偏向器3によって偏向反射さ
れた画像情報に基づいて光変調された光ビームを被走査
面5上に結像させている。被走査面5は例えば複写機や
LBP等では感光体ドラム面に相当している。
In the figure, reference numeral 1 denotes a light source means, which is composed of a semiconductor laser and emits a light beam optically modulated by image information. Reference numeral 2 denotes a collimator lens, which converts the light beam emitted from the light source means 1 into a substantially parallel light flux. Reference numeral 3 denotes an optical deflector as a deflecting means, which is composed of a rotary polygonal mirror having a plurality of deflecting surfaces and is rotated at a constant speed in the direction of arrow A by a driving means (not shown) such as a motor. Reference numeral 4 denotes an fθ lens (imaging lens) as an image forming means, which is composed of two lenses, a spherical lens 4a and a toric lens 4b, and is optically modulated based on image information deflected and reflected by the optical deflector 3. The formed light beam is imaged on the surface 5 to be scanned. The surface 5 to be scanned corresponds to the surface of the photoconductor drum in a copying machine or LBP, for example.

【0025】6は光ビーム検出機構であり、被走査面5
の中心部近傍に設けており、図2(A)に示すように走
査開始側から順に主走査線又は主走査面を境に2つに分
割された矩形開口を持つ第1のフォトダイオード(受光
素子)P1と第2のフォトダイオード(受光素子)P2
より成る第1の受光手段6aと、その近傍に配置した副
走査方向に対して楔型開口を持つ第3のフォトダイオー
ド(受光素子)P3より成る第2の受光手段6bとを有
している。
Reference numeral 6 denotes a light beam detecting mechanism, which is a surface to be scanned 5
2A, which is provided near the center of the first photodiode having a rectangular opening which is divided into two in order from the scanning start side with the main scanning line or the main scanning surface as a boundary (light receiving Element) P1 and second photodiode (light receiving element) P2
And a second light receiving means 6b formed of a third photodiode (light receiving element) P3 having a wedge-shaped opening in the sub-scanning direction and disposed in the vicinity of the first light receiving means 6a. .

【0026】本実施例においては後述するように光ビー
ムが第1、第2のフォトダイオードP1,P2を走査し
た際に得られる該第1、第2のフォトダイオードP1,
P2からの出力信号を利用して、該光ビームの副走査方
向の走査線のピッチ誤差(振れ量)の有無を検出(判
定)し、かつ該光ビームのビーム径の状態等を検出して
いる。そして第1の受光手段6aで得られた信号に基づ
いて光ビームが第3のフォトダイオードP3を走査した
際に得られる該第3のフォトダイオードP3からの出力
信号を調整して被走査面の副走査方向の走査線のピッチ
誤差(振れ量)を測定している。
In the present embodiment, as will be described later, the first and second photodiodes P1 and P1 obtained when the light beam scans the first and second photodiodes P1 and P2.
By using the output signal from P2, it is possible to detect (determine) the presence or absence of a pitch error (amount of shake) of the scanning line in the sub-scanning direction of the light beam, and to detect the state of the beam diameter of the light beam. There is. Then, the output signal from the third photodiode P3 obtained when the light beam scans the third photodiode P3 is adjusted based on the signal obtained by the first light receiving means 6a to adjust the output signal of the surface to be scanned. The pitch error (deflection amount) of the scanning line in the sub-scanning direction is measured.

【0027】尚、本実施例において光源手段1から放射
された光ビームはコリメーターレンズ2により略平行光
束にされ、光偏向器3の偏向面に入射している。そして
光偏向器3を図中矢印A方向に回転させることにより偏
向面で反射偏向された光ビームをfθレンズ4により被
走査面5上に結像させ光走査している。そして光偏向器
3を矢印A方向に一定速度で回転させることによって被
走査面5上を矢印B方向(主走査方向)に等速に光走査
して画像記録を行なっている。
In the present embodiment, the light beam emitted from the light source means 1 is made into a substantially parallel light flux by the collimator lens 2 and is incident on the deflecting surface of the optical deflector 3. Then, by rotating the optical deflector 3 in the direction of arrow A in the figure, the light beam reflected and deflected by the deflecting surface is imaged on the scan surface 5 by the fθ lens 4 and optically scanned. By rotating the optical deflector 3 in the direction of arrow A at a constant speed, the surface to be scanned 5 is optically scanned in the direction of arrow B (main scanning direction) at a constant speed to perform image recording.

【0028】このとき本実施例においては被走査面5上
を光走査する前に予め光偏向器3の偏向面で反射偏向さ
れた光源手段1からの光ビームをfθレンズ4を介して
第1、第2のフォトダイオードP1,P2と第3のフォ
トダイオードP3面上に入射させている。このとき各フ
ォトダイオードP1,P2,P3からは例えば図2
(B)に示す出力信号が得られる。ここで本実施例にお
いては各フォトダイオードP1,P2,P3から得られ
た検出信号を増幅器を介して電気的処理を行なう演算回
路に入力する。
At this time, in the present embodiment, the light beam from the light source means 1 which has been reflected and deflected by the deflecting surface of the optical deflector 3 in advance before optically scanning the surface to be scanned 5 passes through the f.theta. , The second photodiodes P1 and P2 and the third photodiode P3 are incident on the surface. At this time, from the photodiodes P1, P2 and P3, for example, as shown in FIG.
The output signal shown in (B) is obtained. Here, in the present embodiment, the detection signals obtained from the photodiodes P1, P2 and P3 are input to an arithmetic circuit that performs electrical processing via an amplifier.

【0029】この演算回路では後述するように第1、第
2のフォトダイオードP1,P2からの信号を用いてそ
の出力信号の差(出力差信号)を取ることによりピッチ
誤差が発生したか否かの信号(有無信号)を発する。又
第1、第2のフォトダイオードP1,P2からの信号を
用いてその出力信号の和(出力和信号)を取ることによ
り、例えば光ビームの強度や結像レンズの焦点位置に変
動が生じたときには出力波形が変化するのでその変化量
を検出することにより変動を補正する信号(補正量)を
発する。
In this arithmetic circuit, as will be described later, it is determined whether or not a pitch error has occurred by taking the difference between the output signals (output difference signal) using the signals from the first and second photodiodes P1 and P2. Signal (presence signal) is emitted. Further, by taking the sum of the output signals (output sum signal) using the signals from the first and second photodiodes P1 and P2, for example, the intensity of the light beam and the focal position of the imaging lens have changed. Since the output waveform sometimes changes, a signal (correction amount) for correcting the fluctuation is issued by detecting the change amount.

【0030】又一方、第3のフォトダイオードP3から
の信号を用いてその出力信号を測定することにより光ビ
ームの副走査方向の走査線のピッチ誤差(振れ量)を求
める。例えば光走査により副走査方向のピッチ誤差が発
生すると、光ビームは楔形開口を光走査する際の走査時
間が基準時間(ピッチ誤差がないときの時間)からズレ
てくるので、このときのズレた時間(走査時間)と光ビ
ームの出力時間の相関を予め求めてある基準時間とを比
較し、その比較した時間差から副走査方向の走査線のピ
ッチ誤差(誤差量)を測定する。
On the other hand, by measuring the output signal from the signal from the third photodiode P3, the pitch error (deviation amount) of the scanning line of the light beam in the sub-scanning direction is obtained. For example, if a pitch error in the sub-scanning direction occurs due to optical scanning, the scanning time of the light beam when optically scanning the wedge-shaped aperture deviates from the reference time (time when there is no pitch error). The time (scanning time) is compared with a reference time which is obtained in advance by correlating the output time of the light beam, and the pitch error (error amount) of the scanning line in the sub-scanning direction is measured from the compared time difference.

【0031】但し、このピッチ誤差は光ビームの強度や
結像レンズの焦点位置の変動を加味したものではないの
で第1、第2のフォトダイオードP1,P2側から発っ
せられた変動を補正した信号(補正量)との演算により
正確なピッチ誤差の信号を発する。
However, since this pitch error does not take into consideration variations in the intensity of the light beam and the focal position of the imaging lens, the variations generated from the first and second photodiodes P1 and P2 are corrected. An accurate pitch error signal is emitted by calculation with the signal (correction amount).

【0032】図3は本実施例の演算回路の構成を示した
要部ブロック図である。
FIG. 3 is a principal block diagram showing the configuration of the arithmetic circuit of this embodiment.

【0033】同図においては第1、第2、第3のフォト
ダイオードP1,P2,P3に対してそれぞれ増幅器を
個別に設けており、該第1、第2、第3のフォトダイオ
ードP1,P2,P3からの出力を各増幅器31,3
2,33によって増幅した後に信号処理を行なう。ここ
で第1、第2のフォトダイオードP1,P2からの出力
信号は各々の第1、第2の増幅器31,32により増幅
されそれぞれ減算器34と加算器36にて所定の出力に
変換される。このうち減算器34により得られた信号は
所定値(基準値)と比較する為の比較器35に入力さ
れ、比較結果に応じて出力信号を発する。
In the figure, amplifiers are individually provided for the first, second and third photodiodes P1, P2 and P3 respectively, and the first, second and third photodiodes P1 and P2 are provided. , P3 output from each amplifier 31,3
After amplification by 2, 33, signal processing is performed. Here, the output signals from the first and second photodiodes P1 and P2 are amplified by the first and second amplifiers 31 and 32, respectively, and converted into predetermined outputs by the subtractor 34 and the adder 36, respectively. . Of these, the signal obtained by the subtractor 34 is input to a comparator 35 for comparing with a predetermined value (reference value), and an output signal is emitted according to the comparison result.

【0034】例えばこの比較結果によりピッチ誤差が発
生しないと判定された場合はそのまま変位量0(ピッチ
誤差無し信号)を出力すると共に信号発生器39からの
指示によりスイッチング回路40を作動させ比較補正計
算回路38からの出力を停止する。
For example, if it is determined from this comparison result that no pitch error occurs, the displacement amount 0 (pitch error-free signal) is output as it is, and the switching circuit 40 is operated by an instruction from the signal generator 39 to perform a comparison correction calculation. The output from the circuit 38 is stopped.

【0035】又、この比較結果によりピッチ誤差が発生
したと判定された場合は信号発生器39からの指示によ
りスイッチング回路40を開き比較補正計算回路38か
らの出力が発せられるようにする。
If it is determined from the comparison result that a pitch error has occurred, the switching circuit 40 is opened by the instruction from the signal generator 39 so that the output from the comparison correction calculation circuit 38 is generated.

【0036】一方、加算器36で得られた信号はその出
力から、例えば光ビームの出力の変動や結像レンズの焦
点位置の変動を検出できるので得られた波形を基に第1
の変換器37aで時間的変位量に変換し比較補正計算回
路38に出力する。
On the other hand, the signal obtained by the adder 36 can detect the variation of the output of the light beam and the variation of the focal position of the imaging lens from the output thereof.
The converter 37a converts the time displacement into a temporal displacement amount and outputs it to the comparison correction calculation circuit 38.

【0037】次に第3のフォトダイオードP3で得られ
た信号は第3の増幅器33により増幅されて第2変換器
37bで時間的変位量に変換され比較補正計算回路38
に出力される。比較補正計算回路38では第1変換器3
7aからの出力に対して予め決められた基準値と比較し
光ビームの出力変動や結像レンズの焦点位置の変化に伴
なう補正量を求め、第2の変換器37bからの出力に対
して補正を行なう処理をする。そして比較補正計算回路
38で補正された信号はスイッチング回路40が開かれ
ているのでピッチ誤差量(ピッチ誤差信号)として出力
される。
Next, the signal obtained by the third photodiode P3 is amplified by the third amplifier 33, converted into a temporal displacement amount by the second converter 37b, and compared and calculated by the comparison correction calculation circuit 38.
Is output to In the comparison correction calculation circuit 38, the first converter 3
The output from 7a is compared with a predetermined reference value to obtain the correction amount associated with the output fluctuation of the light beam and the change in the focal position of the imaging lens, and the output from the second converter 37b is compared. To perform correction. The signal corrected by the comparison correction calculation circuit 38 is output as the pitch error amount (pitch error signal) because the switching circuit 40 is open.

【0038】このように本実施例においては前述の如く
第1、第2のフォトダイオードP1,P2からの出力信
号の差(出力差信号)を求めることにより、副走査方向
の走査線のピッチ誤差の有無を容易に検出し、又第1、
第2のフォトダイオードP1,P2からの出力信号の和
(出力和信号)を求めることにより、光ビームの立上り
及び立下り時間の間隔を検出し、該光ビームの出力の変
動や結像レンズの焦点位置の変動を検出している。
As described above, in this embodiment, as described above, the difference between the output signals from the first and second photodiodes P1 and P2 (output difference signal) is obtained, so that the pitch error of the scanning line in the sub-scanning direction is obtained. The presence or absence of
By obtaining the sum (output sum signal) of the output signals from the second photodiodes P1 and P2, the interval between the rising and falling times of the light beam is detected, and the fluctuation of the output of the light beam and the imaging lens Changes in focus position are detected.

【0039】そして第1、第2のフォトダイオードP
1,P2(第1の受光手段)からの検出信号を第3のフ
ォトダイオードP3(第2の受光手段)で得られる出力
信号に反映させることにより、光ビームの出力変動や焦
点位置の変動にも関わらず副走査方向の走査線のピッチ
誤差を高精度で測定することができる。これにより高精
度な光走査を可能としている。
Then, the first and second photodiodes P
By reflecting the detection signals from P1, P2 (first light receiving means) in the output signal obtained by the third photodiode P3 (second light receiving means), it is possible to reduce the output fluctuation of the light beam and the fluctuation of the focal position. Nevertheless, the pitch error of the scanning line in the sub-scanning direction can be measured with high accuracy. This enables highly accurate optical scanning.

【0040】尚、本実施例においては走査開始側に矩形
開口を持つ第1の受光手段6aを設けたが、楔形開口を
持つ第2の受光手段6bを走査開始側に設けても良い。
この場合は信号処理の手順が上記とは変わるが基本的に
は同一の出力信号が得られる。
Although the first light receiving means 6a having a rectangular opening is provided on the scanning start side in this embodiment, the second light receiving means 6b having a wedge-shaped opening may be provided on the scanning start side.
In this case, the signal processing procedure is different from the above, but basically the same output signal is obtained.

【0041】即ち、第3のフォトダイオードP3からの
出力信号が第3の増幅器33で増幅され第2の変換器3
7bに入力し変換された後、ホールド回路(不図示)に
入力し、第1の変換器37aからの信号が入力した後、
比較補正計算回路38で補正値が決定される。
That is, the output signal from the third photodiode P3 is amplified by the third amplifier 33, and the second converter 3
After being input to 7b and converted, and then input to a hold circuit (not shown), the signal from the first converter 37a is input,
The comparison correction calculation circuit 38 determines the correction value.

【0042】又、本実施例においては矩形開口を持つフ
ォトダイオードと楔形開口を持つフォトダイオードを用
いたが、前述の如く副走査方向の走査線のピッチ誤差を
高精度に測定することができるなら、特にその開口の形
状は限定しない。
In this embodiment, the photodiode having the rectangular aperture and the photodiode having the wedge-shaped aperture are used. However, as described above, if the pitch error of the scanning line in the sub-scanning direction can be measured with high accuracy. The shape of the opening is not particularly limited.

【0043】図4は本発明の実施例2の要部概略図であ
る。図5は図4に示したスリット板近傍の拡大説明図で
ある。図4、図5において図1に示した要素と同一要素
には同符番を付している。
FIG. 4 is a schematic view of the essential portions of Embodiment 2 of the present invention. FIG. 5 is an enlarged explanatory view of the vicinity of the slit plate shown in FIG. 4 and 5, the same elements as those shown in FIG. 1 are designated by the same reference numerals.

【0044】図4、図5において46はスリット板であ
り、少なくとも2つの開口部46a,46bを有してお
り、被走査面5の走査開始側に設けた一方の開口部46
aは主走査線を境にして副走査方向に対して分割された
2つの矩形開口より成り、走査終了側に設けた他方の開
口部46bは副走査方向に対して楔型開口より成ってい
る。
4 and 5, a slit plate 46 has at least two openings 46a and 46b, and one opening 46 provided on the scanning start side of the surface 5 to be scanned.
Reference character a is composed of two rectangular openings divided in the sub-scanning direction with respect to the main scanning line, and the other opening 46b provided on the scanning end side is composed of a wedge-shaped opening in the sub-scanning direction. .

【0045】47aは第1の受光手段であり、分割され
た2つの矩形開口に対応した2つのフォトダイオードよ
り成っており、スリット板46に近接して配置してい
る。第1の受光手段47aはスリット板46の開口部4
6aを通過した光ビームを受光して副走査方向の走査線
のピッチ誤差(振れ量)の有無を検出し、かつ該光ビー
ムのビーム径の状態を検出している。
Reference numeral 47a denotes a first light receiving means, which is composed of two photodiodes corresponding to the two divided rectangular openings, and is arranged close to the slit plate 46. The first light receiving means 47 a is provided in the opening 4 of the slit plate 46.
The light beam that has passed through 6a is received to detect the presence or absence of a pitch error (amount of shake) of the scanning line in the sub-scanning direction, and to detect the state of the beam diameter of the light beam.

【0046】47bは第2の受光手段であり、フォトダ
イオードより成っており、スリット板46に近接でかつ
第1の受光手段47aの近傍に配置している。第2の受
光手段47bは第1の受光手段47aで得られた信号を
利用して、スリット板46の開口部46bを通過した光
ビームを受光して被走査面の副走査方向の走査線のピッ
チ誤差(振れ量)を検出している。尚47は光ビーム検
出機構である。
Reference numeral 47b is a second light receiving means, which is composed of a photodiode and is arranged in the vicinity of the slit plate 46 and in the vicinity of the first light receiving means 47a. The second light receiving means 47b uses the signal obtained by the first light receiving means 47a to receive the light beam that has passed through the opening 46b of the slit plate 46 and to detect the scanning line in the sub-scanning direction on the surface to be scanned. Pitch error (amount of shake) is detected. Reference numeral 47 is a light beam detection mechanism.

【0047】本実施例においてピッチ誤差を測定する際
にはfθレンズ4を通過した光源手段1からの光ビーム
でスリット板46を光走査する。そして該スリット板4
6の2つの開口部46a,46bを通過した光ビームは
第1の受光手段47aと第2の受光手段47b面上にそ
れぞれ入射する。
When measuring the pitch error in this embodiment, the slit plate 46 is optically scanned with the light beam from the light source means 1 which has passed through the fθ lens 4. And the slit plate 4
The light beams having passed through the two openings 46a and 46b of No. 6 are incident on the surfaces of the first light receiving means 47a and the second light receiving means 47b, respectively.

【0048】このとき本実施例においては前述の実施例
1と同様に第1の受光手段47aで得られた信号を用い
て光ビームの副走査方向の走査線のピッチ誤差(振れ
量)の有無を検出し、かつ該光ビームのビーム径の状態
を検出している。そして第1の受光手段47aで得られ
た信号に基づいて第2の受光手段47bからの信号を調
整して被走査面の副走査方向の走査線のピッチ誤差(振
れ量)を測定している。これにより前述の実施例1と同
様な効果を得ている。
At this time, in this embodiment, as in the case of the above-described first embodiment, the presence or absence of the pitch error (deviation amount) of the scanning line of the light beam in the sub-scanning direction is determined by using the signal obtained by the first light receiving means 47a. And the state of the beam diameter of the light beam is detected. Then, the signal from the second light receiving means 47b is adjusted based on the signal obtained by the first light receiving means 47a to measure the pitch error (deviation amount) of the scanning line in the sub-scanning direction on the surface to be scanned. . As a result, the same effect as that of the above-described first embodiment is obtained.

【0049】尚、本実施例においてはそれぞれの開口部
に対応して複数のフォトダイオードを設けたが、これら
を1つにまとめて単一の受光素子(例えばフォトダイオ
ード)から構成しても良い。
Although a plurality of photodiodes are provided corresponding to the respective openings in this embodiment, they may be combined into a single light receiving element (for example, a photodiode). .

【0050】又、スリット板に設けた2つの開口部の形
状は矩形及び楔形開口に限らず、例えば前述の如く被走
査面の副走査方向の走査線の振れ量を高精度で検出する
ことができる形状なら特に限定することはない。
Further, the shapes of the two openings provided in the slit plate are not limited to the rectangular and wedge-shaped openings, and for example, the shake amount of the scanning line in the sub-scanning direction on the surface to be scanned can be detected with high accuracy as described above. The shape is not particularly limited as long as it can be formed.

【0051】[0051]

【発明の効果】本発明によれば前述の如く被走査面上
に、該光ビームの走査状態等を検出する第1の受光手段
と、その近傍に設けた該被走査面の副走査方向の走査線
の振れ量を検出する第2の受光手段とを設け、該第1の
受光手段で得られた信号に基づいて該第2の受光手段か
らの信号を調整して、該副走査方向の走査線の振れ量を
測定することにより、光ビームの出力変動や結像レンズ
の焦点位置の変化にも関わらず振れ量(ピッチ誤差)を
高精度で測定することができる光ビーム検出機構を有し
た光走査装置を達成することができる。
According to the present invention, as described above, the first light receiving means for detecting the scanning state and the like of the light beam on the surface to be scanned and the scanning surface of the surface to be scanned provided in the vicinity thereof in the sub-scanning direction. A second light receiving means for detecting the amount of deflection of the scanning line is provided, and the signal from the second light receiving means is adjusted based on the signal obtained by the first light receiving means to adjust the signal in the sub-scanning direction. It has a light beam detection mechanism that can measure the shake amount (pitch error) with high accuracy by measuring the shake amount of the scanning line, regardless of the output fluctuation of the light beam and the change of the focus position of the imaging lens. The optical scanning device can be achieved.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の実施例1の要部概略図FIG. 1 is a schematic view of a main part of a first embodiment of the present invention.

【図2】 本発明の実施例1の各受光手段の形状を示す
説明図とその受光手段からの出力信号を示す説明図
FIG. 2 is an explanatory diagram showing the shape of each light receiving means and an output signal from the light receiving means according to the first embodiment of the present invention.

【図3】 本発明の実施例1の演算回路の構成を示す要
部ブロック図
FIG. 3 is a principal block diagram showing the configuration of an arithmetic circuit according to the first embodiment of the present invention.

【図4】 本発明の実施例2の要部概略図FIG. 4 is a schematic view of the essential portions of Embodiment 2 of the present invention.

【図5】 図4に示したスリット板近傍の要部概略図5 is a schematic view of a main part near the slit plate shown in FIG.

【図6】 従来の光ビーム検出機構を有した光走査装置
の要部概略図
FIG. 6 is a schematic view of a main part of an optical scanning device having a conventional light beam detection mechanism.

【図7】 従来の光ビーム検出機構を有した光走査装置
の受光手段の形状を示す説明図とその受光手段からの出
力信号を示す説明図
FIG. 7 is an explanatory view showing a shape of a light receiving means of an optical scanning device having a conventional light beam detecting mechanism and an explanatory view showing an output signal from the light receiving means.

【図8】 従来の光ビーム検出機構を有した光走査装置
の受光手段の形状を示す説明図とその受光手段からの出
力信号を示す説明図
FIG. 8 is an explanatory view showing a shape of a light receiving means of an optical scanning device having a conventional light beam detection mechanism and an explanatory view showing an output signal from the light receiving means.

【図9】 従来の光ビーム検出機構を有した光走査装置
の要部概略図
FIG. 9 is a schematic view of a main part of an optical scanning device having a conventional light beam detection mechanism.

【符号の説明】[Explanation of symbols]

1 光源手段 2 コリメーターレンズ 3 偏向手段 4 結像手段 5 被走査面 6,47 光ビーム検出機構 6a,47a 第1の受光手段 6b,47b 第2の受光手段 P1 第1のフォトダイオード P2 第2のフォトダイオード P3 第3のフォトダイオード 46 スリット板 DESCRIPTION OF SYMBOLS 1 light source means 2 collimator lens 3 deflecting means 4 image forming means 5 surface to be scanned 6,47 light beam detecting mechanism 6a, 47a first light receiving means 6b, 47b second light receiving means P1 first photodiode P2 second Photodiode P3 Third Photodiode 46 Slit plate

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 光源手段から放射した光ビームを偏向手
段で偏向反射させた後、結像手段を介して被走査面上に
導光し該被走査面上を光走査する際、 該偏向手段を介した該光源手段からの光ビームを該結像
手段により、該被走査面近傍に配置した第1の受光手段
と、該第1の受光手段近傍に配置した第2の受光手段に
結像させ、該第1の受光手段で得られた信号に基づいて
該第2の受光手段からの信号を調整することにより、該
被走査面の副走査方向の走査線の振れ量を測定するよう
にしたことを特徴とする光ビーム検出機構を有した光走
査装置。
1. A deflecting means for deflecting and reflecting a light beam emitted from a light source means by a deflecting means, and then guiding the light beam onto a surface to be scanned through an image forming means to optically scan the surface to be scanned. The light beam from the light source means via the image forming means forms an image on the first light receiving means arranged near the surface to be scanned and the second light receiving means arranged near the first light receiving means by the image forming means. By adjusting the signal from the second light receiving means based on the signal obtained by the first light receiving means, the shake amount of the scanning line in the sub-scanning direction on the surface to be scanned is measured. An optical scanning device having a light beam detection mechanism characterized by the above.
【請求項2】 前記第1の受光手段は主走査線を境にし
て副走査方向に対して2つに分割された矩形開口を持つ
受光素子より成り、前記第2の受光手段は副走査方向に
対して楔型開口を持つ受光素子より成っていることを特
徴とする請求項1の光ビーム検出機構を有した光走査装
置。
2. The first light receiving means comprises a light receiving element having a rectangular opening which is divided into two in the sub scanning direction with respect to the main scanning line, and the second light receiving means is in the sub scanning direction. 2. An optical scanning device having a light beam detecting mechanism according to claim 1, wherein said optical scanning device comprises a light receiving element having a wedge-shaped opening.
【請求項3】 光源手段から放射した光ビームを偏向手
段で偏向反射させた後、結像手段を介して被走査面上に
導光し該被走査面上を光走査する際、 該偏向手段を介した該光源手段からの光ビームを該結像
手段により少なくとも主走査方向に2つの開口部を有す
るスリット板を介して、該2つの開口部に対応して設け
た第1の受光手段と第2の受光手段に導光させ、該第1
の受光手段で得られた信号に基づいて該第2の受光手段
からの信号を調整することにより、該被走査面の副走査
方向の走査線の振れ量を測定するようにしたことを特徴
とする光ビーム検出機構を有した光走査装置。
3. The deflecting means when the light beam emitted from the light source means is deflected and reflected by the deflecting means and then guided to the surface to be scanned through the image forming means to optically scan the surface to be scanned. A light beam from the light source means via the first image receiving means and a first light receiving means provided corresponding to the two openings through a slit plate having at least two openings in the main scanning direction by the image forming means; The first light is guided to the second light receiving means,
By adjusting the signal from the second light receiving means based on the signal obtained by the second light receiving means, the deflection amount of the scanning line in the sub-scanning direction on the surface to be scanned is measured. An optical scanning device having a light beam detection mechanism.
【請求項4】 前記スリット板上に設けた少なくとも2
つの開口部のうち一方の開口部は主走査線を境にして副
走査方向に対して2つに分割された矩形開口より成り、
他方の開口部は副走査方向に対して楔型開口より成って
いることを特徴とする請求項3の光ビーム検出機構を有
した光走査装置。
4. At least two provided on the slit plate
One of the two openings is a rectangular opening divided in the sub-scanning direction with respect to the main scanning line.
4. The optical scanning device having a light beam detecting mechanism according to claim 3, wherein the other opening is a wedge-shaped opening in the sub scanning direction.
JP18175594A 1994-07-11 1994-07-11 Optical scanner provided with light beam detecting mechanism Pending JPH0829711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18175594A JPH0829711A (en) 1994-07-11 1994-07-11 Optical scanner provided with light beam detecting mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18175594A JPH0829711A (en) 1994-07-11 1994-07-11 Optical scanner provided with light beam detecting mechanism

Publications (1)

Publication Number Publication Date
JPH0829711A true JPH0829711A (en) 1996-02-02

Family

ID=16106326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18175594A Pending JPH0829711A (en) 1994-07-11 1994-07-11 Optical scanner provided with light beam detecting mechanism

Country Status (1)

Country Link
JP (1) JPH0829711A (en)

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