JPH08289549A - High-voltage power source system - Google Patents

Abstract

PURPOSE: To provide a small-size high-voltage power source system for generating high-voltage pulses using high frequencies wherein insulation breakdown of a secondary winding of a high-frequency transformer hardly occurs. CONSTITUTION: A secondary winding 4 of a high-frequency transformer 1 is divided into a plurality of sections. By means of rectifying device blocks 5 which are as many as the divisions of the secondary winding 4 and a capacitor 6, the voltage appearing in each of the divisions of the secondary winding 4 is rectified by the correspondent rectifying device block 5. After that, the rectified voltage is smoothed by a capacitor 6 which is connected in parallel with a serial circuit of circuits to output the rectified voltages. By this method, the distribution of the potential in the secondary winding is uniformed. By using an iron core 2 which is made by integrally molded and has a jointless annular structure, the resonance of voltages in the secondary winding is prevented and instantaneous voltage is made low and no-load voltage is lowered, too, and insulation breakdown of the secondary winding can be prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high voltage power supply device for generating a high voltage pulse.

[0002]

2. Description of the Related Art In recent years, a high voltage power supply device using a high frequency has been widely used for obtaining a high voltage pulse for discharge-exciting a laser medium in a gas laser oscillator.

A conventional high voltage power supply device will be described below. FIG. 6 shows a circuit of a conventional high voltage power supply device. In FIG. 6, reference numeral 21 is a high frequency transformer, which is an annular iron core 22 with a small high frequency loss, and 1 wound around the iron core 22.
It comprises a secondary winding 23 and a secondary winding 24 wound coaxially with the primary winding 23. 25 is a high voltage diode block,
26 is a smoothing capacitor. The primary winding 23 of the high-frequency transformer 21 is connected to a low-voltage high-frequency power source of about 200V, and the secondary winding 2 generates a high-frequency high voltage of several tens of kV.
4 is connected to the high voltage diode block 25. The output circuit of the high voltage diode block 25 is a smoothing capacitor 2
6 and the output terminal.

The operation of the high-voltage power supply device configured as described above will be described below. First, 200
The high frequency voltage of about V is calculated by the high frequency transformer 21
The voltage is boosted to a high frequency high voltage of 0 kV, rectified by the high voltage diode block 25, smoothed by the smoothing capacitor 26, and output.

When this high-voltage power supply device is used as a power supply for a gas laser oscillator, the current-voltage characteristics between the discharge electrodes of the gas laser oscillator are as shown in FIG. Hour discharge voltage is about 20k
Since it exhibits a negative resistance characteristic that changes with V, a moderate drooping characteristic is required for the output characteristic of the high-voltage power supply device. However, in the conventional high-voltage power supply device, the maximum no-load voltage is 70 to 80 kV.
It is boosted up to. This is because the iron core 22 has windings 23 and 24.
Since the structure in which the divided windings are spliced is joined together because it is necessary to wind the windings, the coupling between the primary winding 23 and the secondary winding 24 is somewhat rough due to the leakage magnetic flux. It has a large drooping characteristic.

[0006]

However, in the above-mentioned conventional configuration, the no-load voltage of the high frequency transformer is too high, and the potential distribution in the secondary winding of the high frequency transformer is dependent on the stray capacitance in the winding. Therefore, it is not uniform and may reach 2 to 3 times the average potential gradient in the vicinity of the central portion of the winding where the potential gradient is maximum. In addition, the leakage magnetic flux at the seam of the iron core increases the harmonic component contained in the voltage waveform of the secondary winding, and this harmonic component resonates due to the inductance and stray capacitance of the winding. The instantaneous value of the voltage may be extremely high. For these reasons, there has been a problem that the secondary winding of the high frequency transformer is likely to cause dielectric breakdown. Or, if it is attempted to ensure sufficient insulation of the secondary winding, the secondary winding becomes large, and as a result, not only the high frequency transformer becomes large, but also the inductance and stray capacitance of the secondary winding increase. There has been a problem that it becomes difficult to improve the dielectric breakdown strength because resonance occurs in lower harmonic components.

The present invention solves the above-mentioned problems of the prior art by equalizing the potential distribution in the secondary winding of a high frequency transformer and suppressing the harmonic components of the voltage of the secondary winding to prevent resonance. It is therefore an object of the present invention to provide a small high-voltage power supply device by suppressing the instantaneous voltage to a low level and also reducing the no-load voltage to prevent dielectric breakdown of the secondary winding of the high frequency transformer.

[0008]

In order to achieve this object, a high voltage power supply device of the present invention comprises a high frequency transformer comprising an iron core, a primary winding, and a plurality of divided secondary windings, and a split. The same number of rectifying element blocks as the secondary windings and capacitors are provided, and the voltage generated in the divided secondary windings is rectified by the rectifying element block for each divided unit, and then the rectified output for each divided unit. It has a configuration in which capacitors are connected in parallel to a circuit in which the circuits are connected in series to smooth the circuit.

In addition, the iron core has a seamless annular structure integrally formed, and bobbins of the primary winding and the secondary winding are provided with holes at one end faces thereof, respectively, and a plane parallel to the axis through the axis core. As a structure to be divided by, the primary winding bobbin is assembled to the iron core, the bobbin is rotated around the iron core to wind the primary winding, and the winding start and end terminals are connected to the primary winding. After the bobbin for the secondary winding is coaxially assembled with the bobbin for the primary winding after the bobbin is projected outside from the hole provided on the one end surface of the bobbin for use, the bobbin is rotated around the iron core.
It has a structure for winding a secondary winding.

[0010]

In this structure, the secondary voltage equal to each of the secondary windings divided into a plurality of high frequency transformers, that is, the total of two secondary voltages.
A secondary voltage, which is a fraction of the next voltage, is generated, and the maximum potential gradient inside the secondary winding decreases. In addition, the magnetic flux leaking from the iron core is reduced, the no-load voltage is reduced, and the stray capacitance in the winding and the harmonic components of the voltage are reduced due to the reduction in the number of secondary windings. The voltage resonance is prevented, and the instantaneous voltage is suppressed to a low level.

[0011]

【Example】

(Embodiment 1) An embodiment of the present invention will be described below with reference to the drawings.

In FIGS. 1 and 2, reference numeral 1 denotes a high frequency transformer, which is an annular iron core 2 which is integrally formed with a circular cross section with a small high frequency loss, and a primary winding 3 wound around the iron core 2. And a secondary winding 4 wound coaxially with the primary winding 3. The secondary winding 4 is insulated from each other by 6
It is divided into individual windings 4a to 4f. Similarly, 5a to 5f are six high voltage diode blocks, and 6 is a smoothing capacitor. The primary winding 3 of the high frequency transformer 1 is about 280
Each of the secondary windings 4a to 4f, which are connected to a low-voltage high-frequency power source of V and generate a high-frequency high voltage of about 6 kV, are connected to high-voltage diode blocks 5a to 5f, respectively. The output circuits of the six high voltage diode blocks 5a to 5f are all connected in series, and then connected in parallel to the capacitor 6 and also connected to the output terminal. 7
Is a bobbin for the primary winding, and 8 is a bobbin for the secondary winding.

The bobbin 7 for the primary winding is made of fluororesin,
It is divided into halves on a plane that passes through the axis and is parallel to the axis.One half of the split surface has a strip-shaped protrusion, and the other half of the split surface has a strip-shaped groove. It is supposed to meet. The combined primary winding bobbin 7 smoothly rotates around the iron core 2 having a circular cross section. A groove 9 for a belt is provided at one end of the bobbin 7 for the primary winding, the iron core 2 is fixed when the coil is wound, and a motor and a belt (both not shown) are used. It can be driven to rotate around the iron core 2. In addition, a hole 10 through which a winding start and a winding end pass is formed on one end surface of the primary winding bobbin.

The bobbin 8 for the secondary winding is also the bobbin 7 for the primary winding.
The structure is similar to that of the above, but there is no groove for the driving belt, and the bobbin 7 for the primary winding is coupled to rotate.

That is, at the contact surface between the primary winding bobbin 7 and the secondary winding bobbin 8, there is a protrusion (not shown) at one location on the outer peripheral surface of the primary winding bobbin 7, and There is a groove (not shown) on the inner peripheral surface of the bobbin 8 for the next winding, and they are engaged with each other and fixed so as not to move in the circumferential direction. In addition, the secondary winding bobbin 8 is fixed by the collars at both ends of the primary winding bobbin 7 so as not to move in the axial direction with respect to the primary winding bobbin 7.

The operation of the high-voltage power supply device configured as described above will be described below. First, the high-frequency voltage of about 280 V applied to the primary winding 3 is boosted by the high-frequency transformer 1, and a high-frequency high voltage of about 6 kV is generated in each of the six secondary windings 4a to 4f. The high frequency high voltage is applied to the high voltage diode block 5a individually.
After being rectified by ~ 5f, they are connected in series and added, and smoothed by the smoothing capacitor 6 and output.

Next, a method of winding the windings 3 and 4 on the seamless annular iron core 2 will be described. First of all, 1 in half
Combine the bobbin 7 for the next winding so as to surround the iron core 2,
A belt is put in the groove 9 at one end of the bobbin, and the primary winding 3 is wound while rotating around the iron core 2 by a motor. The winding start and winding end of the primary winding 3 are exposed outside through holes provided in the end surface of the bobbin 7 for the primary winding, and are shortened so that they do not get entangled with the iron core 2 when the bobbin rotates. Next, the half-divided bobbin 8 for the secondary winding is mounted coaxially with the bobbin 7 for the primary winding and fixed thereto. The secondary winding 4 is wound by rotating the primary winding bobbin 7 with a motor and a belt.

The characteristics of the high-voltage power supply device according to the present embodiment thus constructed will be described in comparison with the characteristics of the conventional high-voltage power supply device. First, since the iron core 2 of the high-frequency transformer 1 is seamless, the leakage of magnetic flux is small, so that the harmonic components of the voltage due to the leakage flux generated in the secondary winding 4 are reduced and the primary windings 3 and 2 The secondary winding 4 is tightly coupled, the drooping characteristic of the secondary output voltage is improved, and the no-load voltage can be reduced to 50 kV as shown in FIG. This is a necessary and sufficient value for the current-voltage characteristic between the discharge electrodes of the gas laser oscillator.

Next, since the secondary winding 4 of the high frequency transformer 1 is divided into six parts, each of which is rectified and its output circuit is connected in series, the six divided windings generate the same voltage. The output potential distribution in the secondary winding 4 becomes as shown in FIG. 5, and the maximum potential gradient in the winding is smaller than that in the conventional high voltage power supply device.

As described above, according to this embodiment, the secondary winding of the high frequency transformer is divided into six, and six high voltage diode blocks are provided so that the voltages generated in the respective secondary windings are respectively provided. After rectifying with a high voltage diode block,
By connecting a capacitor in parallel to the circuit in which the rectified output circuits are connected in series and smoothing, the potential distribution in the secondary winding can be improved and the maximum potential gradient can be reduced. Also, by making the iron core of the high frequency transformer an annular iron core which is integrally molded with a circular cross section and has no seam,
The no-load voltage generated in the secondary winding can be reduced. As a result, the total number of turns of the secondary winding is reduced by about 20% as compared with the conventional example.

Further, the winding bobbin of the high frequency transformer is divided into halves, and the primary winding bobbin and the secondary winding bobbin are fixed, and a belt groove is provided on the primary winding bobbin. The winding operation of the primary winding and the secondary winding can be facilitated.

(Second Embodiment) A second embodiment of the present invention will be described below with reference to the drawings.

Also in the second embodiment, as shown in FIG. 1, a secondary 1 is divided into an iron core 2 and a primary winding 3 and six windings 4a to 4f insulated from each other. The high-frequency transformer including the winding 4 includes 5 high-voltage diode blocks 5a to 5f, 6 smoothing capacitors, and 6 has the same configuration as that of the first embodiment. The difference from the configuration of the first embodiment is that the high frequency transformer 1 is divided into six parts.
The configuration of the bobbins of the secondary windings 4a to 4f and the six high voltage diode blocks 5a to 5f are housed in the grooves provided in the bobbins of the secondary windings 4a to 4f, and each of the six bobbins is accommodated. The point is that one metal pin 9a to 9f is provided.

FIG. 3 shows an end view and a cross-sectional view of one of the six secondary windings 4a to 4f, and another five 4b.
~ 4f have the same structure. In FIG. 3, a groove is provided on one end surface of the bobbin 8a for the secondary winding of the fluororesin, and the high voltage diode block 5a for rectification is housed therein. Further, one metal pin terminal 9a is vertically erected on the bottom surface of the groove of the bobbin 8a and penetrates to the back surface, and the groove side end portion of this pin terminal 9a corresponds to the AC side terminal of the high voltage diode block 5a. One of them is connected, and the coil end on the back side of the secondary winding 4a is connected to the other end reaching the back side. The other AC side terminal of the high voltage diode block 5a is directly connected to the other coil end of the secondary winding 4a.
The + end of the DC side terminal of the high voltage diode block 5a is connected to one of the output terminals together with the + end of the capacitor 6, and the other end is the + side of the DC side terminal of the next high voltage diode block 5b.
Connected to the end. Although detailed description of the connection of the DC side terminals of the other five high voltage diode blocks 5b to 5f is omitted, all the DC side circuits of the high voltage diode blocks 5a to 5f are connected in series as shown in FIG. After being connected
It is connected in parallel to the capacitor 6 and is also connected to the output terminal. In this way, the high voltage diode block 5a
Groove for storing ~ 5f and metal pin 9a penetrating both end surfaces
Secondary windings 4a to 4f wound around six bobbins 8a to 8f each having .about.9f are fixed coaxially with a primary winding 3 which is coaxially combined with an annular iron core 2.

The operation of the high-voltage power supply device configured as described above is the same as the operation of the first embodiment, and the explanation is omitted.

As described above, according to this embodiment, the secondary windings are brought close to each other by embedding the high-voltage diode blocks for rectification in the grooves of the divided secondary winding bobbins of the high frequency transformer. Insulation can be secured even if fixed by
The high frequency transformer will be smaller and more compact than before.

Although the number of divisions of the secondary winding is 6, it is 6
It goes without saying that a plurality of pieces other than the pieces can be used.

The material of the winding bobbin is fluorine resin, but it does not prevent the use of other materials. Further, the fitting of the half bobbin is carried out by means of the belt-shaped projections and grooves on the split surface, and the fixing of the bobbin for the primary winding and the bobbin for the secondary winding is carried out by the projections and grooves on the outer and inner peripheral surfaces and the primary winding. Although it depends on the brim of the wire bobbin, the same effect can be obtained with other configurations. Although the groove for the belt is provided on the bobbin for the primary winding, a gear or the like may be provided instead of the groove to transmit the rotational driving force.

[0029]

As described above, according to the present invention, the secondary winding of the high frequency transformer is divided into a plurality of pieces, and the divided secondary windings are provided with the same number of rectifying element blocks and capacitors. After the voltage generated in the winding is rectified by the rectifying element block for each division unit, the divided rectification output circuit is connected in series and the capacitor is connected in parallel to smooth the potential distribution in the secondary winding. Are uniformized, and the iron core has an integrally molded seamless ring structure, which reduces the magnetic flux leakage from the iron core and suppresses harmonic components of the voltage, resulting in resonance of the secondary winding voltage. It is possible to realize an excellent high-voltage power supply device capable of preventing the occurrence of the above-mentioned phenomenon and suppressing the instantaneous voltage to a low level and also reducing the no-load voltage to prevent the dielectric breakdown of the secondary winding.

By embedding the rectifying element block in the bobbin of each divided secondary winding of the high frequency transformer,
It is possible to realize an excellent high-voltage power supply device capable of ensuring insulation even if the respective secondary windings are fixed close to each other and making the high-frequency transformer compact.

[Brief description of drawings]

FIG. 1 is a circuit diagram of a high voltage power supply device according to a first embodiment of the present invention.

FIG. 2A is a top sectional view of a high frequency transformer of the high voltage power supply device according to the first embodiment of the present invention, and FIG. 2B is a side sectional view of the same high frequency transformer.

FIG. 3A is an end view of a secondary winding of a high voltage power supply device according to a second embodiment of the present invention, and FIG. 3B is a sectional view of the same secondary winding.

FIG. 4 is a comparison diagram of the output characteristics of the high-voltage power supply device according to the first embodiment of the present invention applied to a gas laser oscillator and a conventional high-voltage power supply device.

FIG. 5 is a comparison diagram of the potential distributions in the secondary windings of the high frequency power supply device according to the first embodiment of the present invention and the conventional high voltage power supply device.

FIG. 6 is a circuit diagram of a conventional high voltage power supply device.

[Explanation of symbols] 1 high frequency transformer 2 iron core 3 primary winding 4 secondary winding 5 high voltage diode block (rectifier element block) 6 capacitor 7 primary winding bobbin 8 secondary winding bobbin

Claims (4)

[Claims] 1. A high frequency transformer comprising an iron core, a primary winding, and a plurality of divided secondary windings, a rectifying element block having the same number as the divided secondary windings, and a capacitor, and divided. The voltage generated in the secondary winding is rectified by the rectification element block for each division unit, and the capacitor is connected in parallel to the circuit in which the rectification element blocks for each division unit are connected in series to smooth the voltage. Voltage power supply. 2. Each of the divided secondary windings is wound on an independent bobbin having a groove on one end face thereof, the rectifying element block is embedded in the groove of the bobbin, and the winding start and winding end are wound. The high-voltage power supply device according to claim 1, wherein the terminals of the device are connected to the rectifying element block by collecting the terminals on the end face. 3. An iron core is integrally formed into a seamless annular structure, and bobbins of the primary winding and the secondary winding are provided with holes at one end faces thereof, respectively, and are planes passing through the shaft core and parallel to the shaft. As a structure to be divided by, the primary winding bobbin is assembled to the iron core, the bobbin is rotated around the iron core to wind the primary winding, and the winding start and end terminals are
After the bobbin for the secondary winding is brought out from the hole provided at one end surface of the bobbin for the secondary winding, the bobbin for the secondary winding is assembled coaxially with the bobbin for the primary winding, and then the bobbin is rotated around the iron core. The high voltage power supply device according to claim 1 or 2, wherein a secondary winding is wound. 4. The high voltage power supply device according to claim 3, wherein the bobbin for the primary winding has a groove or a gear for a rotary drive belt at one end or both ends thereof.