JPH08288570A - Composite laser system - Google Patents

Abstract

PURPOSE: To obtain a composite laser system in which an object can be irradiated with laser light without attenuating the intensity thereof while facilitating the setting operation of optical system and the arranging work of optical units. CONSTITUTION: The composite laser system comprises a laser oscillator 10 including an outgoing side mirror 14 and a reflection side mirror 16 disposed oppositely, a laser unit 30 for marker emitting a laser light in visible light range, and a mechanism 40 for coupling the laser unit 30 integrally with the reflection side mirror 16 in the laser oscillator 10, on the back thereof, such that the laser unit 30 emits a laser light along the optical axis of a laser light emitted from the laser oscillator 10. The outgoing side mirror 14 and the reflection side mirror 16 in the laser oscillator 10 exhibit transparency to the laser light emitted from the laser unit 30. A laser light emitted from the back of the reflection side mirror 16 in the laser oscillator 10 enters into the laser unit 30 and leaves the outgoing side mirror 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite laser device, and more specifically, to a composite laser suitably used for so-called photoluminescence spectroscopy for analyzing fluorescence emitted from a substance irradiated with laser light in the ultraviolet region. Regarding the device.

[0002]

2. Description of the Related Art Conventionally, in photoluminescence spectroscopy, an excitation laser device for emitting laser light in the ultraviolet region has been used as an excitation light source for exciting a sample to be analyzed. However, since the light in the ultraviolet region cannot be visually confirmed, when actually performing the work such as setting the optical system for the photoluminescence spectroscopy experiment and arranging various optical devices, the laser in the ultraviolet region is used. Separately from the excitation laser device that emits light, a marker laser device that emits laser light in the visible light region is provided as a marker light source, and the required work is performed using this laser light in the visible light region as a reference. is necessary.

Specifically, as shown in FIG. 4, an excitation laser device 1 for emitting a laser beam L1 in the ultraviolet region, for example.
Is installed so that the laser light L1 is irradiated onto the sample 5 to be analyzed through the semi-transmissive mirror 3, and the marker laser device 2 that emits the laser light L2 in the visible light region.
Is provided so that the laser beam L2 is irradiated to the sample 5 via the total reflection mirror 4 and the semi-transmissive mirror 3, and the optical axis of the laser beam L2 is for excitation on the emission side of the semi-transmissive mirror 3. It is arranged so as to coincide with the optical axis of the laser beam L1 of the laser device 1. Then, while visually confirming the laser light emitted from the marker laser device 2, the work of setting the optical system and arranging various optical devices is performed with reference to this.

However, in the actual analysis operation, it is often necessary to change the direction of the optical axis of the laser beam L1 emitted from the excitation laser device 1 depending on the size and shape of the sample 5, but in that case. Since the pumping laser device 1 and the marker laser device 2 are separate and independent devices, the adjustment and alignment of the direction of the optical axis of the laser light L2 emitted from the marker laser device 2 is performed each time. Must be performed in accordance with the change of the direction of the laser beam of the excitation laser device 1, and there is a problem that the entire work of setting the optical system and arranging the optical equipment becomes complicated.

Further, since the laser beam L1 emitted from the pumping laser device 1 passes through the semi-transmissive mirror 3,
Since the intensity of the laser light with which the sample 5 is irradiated is considerably attenuated, there is a problem that the light utilization rate decreases.

As the marker laser device 2, for example, a He-Ne laser which emits light with a wavelength of 633 nm is used. However, this is a considerably large shape, and therefore the marker laser device 2 is used. Since it is necessary to secure a large space, there is a problem that the area occupied by the entire device becomes large.

[0007]

The present invention has been made based on the above circumstances, and its purpose is to:
An object of the present invention is to provide a composite laser device capable of easily performing the work of setting an optical system and arranging an optical device and irradiating an irradiation target with laser light without attenuating its intensity. .

[0008]

A composite laser device of the present invention includes a laser oscillator having an emission side mirror and a reflection side mirror which are arranged so as to face each other, and a marker which emits laser light in the wavelength region of visible light. Laser device for a marker, and the laser device for a marker is integrated behind a mirror on the reflection side of the laser oscillator so that the laser beam of the laser device for a marker is emitted along the optical axis of the laser beam of the laser oscillator. The laser oscillation device has an emission side mirror and a reflection side mirror that are transparent to the laser beam emitted from the marker laser device. The laser light of the marker laser device that is incident on the reflection-side mirror of the laser device from behind is emitted from the emission-side mirror of the laser oscillation device. .

[0009]

According to the above construction, since the optical axis of the laser light in the visible light region emitted from the marker laser device coincides with the optical axis of the laser light emitted from the laser oscillator, A laser that is automatically emitted from the laser oscillator by driving the laser device and performing the work of setting the optical system and arranging the optical equipment with reference to the laser light apparently emitted from the laser oscillator. A required optical system setting and arrangement of various optical devices for light are achieved.

Further, since the laser oscillating device and the marker laser device are integrated by the connecting mechanism, when the direction of the optical axis of the laser beam emitted from the laser oscillating device is changed, the marker laser device is used. It suffices to perform the work of only changing the direction of the optical axis of the laser light emitted from the laser.

Further, the laser light emitted from the marker laser device is made incident on the inside of the laser oscillator from behind the reflection side mirror of the laser oscillator so that the optical axis of the laser light from the marker laser device is changed. Since it is aligned with the optical axis of the laser light of the laser oscillator, it is not necessary to use a semi-transmissive mirror. Therefore, the laser light emitted from the laser oscillator can be directly applied to the irradiation target, and the laser light High light utilization is obtained without attenuating the intensity.

[0012]

Embodiments of the composite laser device of the present invention will be described below. FIG. 1 is an explanatory view showing the outline of the configuration of an example of the composite laser device of the present invention used for photoluminescence spectroscopy. This composite laser device includes a laser oscillator device 10 for emitting a laser beam for exciting a sample to be analyzed, specifically, a laser beam in an ultraviolet region.
A marker laser device 3 including a laser diode that emits laser light in a visible light region, for example, red laser light.
0, and the marker laser device 30 is used as the laser oscillation device 1
And a connecting mechanism 40 that is integrally connected to 0.

In the laser oscillating device 10, a capillary 12 for forming a laser oscillation space is provided in a cylindrical laser tube 11 so as to extend along the central axis L of the laser tube 11, and the laser tube 11 is provided. At one end (right end in the figure) of the laser tube 11 is provided a flexible mirror holding cylinder 13.
It is provided so as to project and extend outward along the extension of the central axis L, and an emission side mirror 14 is fixedly provided at the tip of the mirror holding cylinder 13. On the other hand, the laser tube 11
Similarly, a flexible mirror holding cylinder 15 is provided at the other end of the mirror holding cylinder 15 so as to project outward along the extension of the central axis L, and the exit side mirror is provided at the tip of the mirror holding cylinder 15. A reflection-side mirror 16 which constitutes a laser resonator together with 14 is fixedly provided.

The emission side mirror 14 and the reflection side mirror 16 described above each have a known structure.
Although it has high reflectivity for light in the ultraviolet region, it is made of a material that is transparent to light in the visible light region emitted from the marker laser device 30 described later.

The emitting side mirror 14 and the reflecting side mirror 16 of the laser oscillator 10 are fixed by a resonator fixing mechanism 20 so as to face each other on the central axis L of the laser tube 11. That is, the resonator fixing mechanism 20
In the above, the substrate 2 having the through hole 22a in the central portion on one end side (right side in the drawing) which is the emitting side of the laser tube 11
2 and an emission side mirror holder 21 composed of a movable end plate 23 provided so that the tilted state can be arbitrarily adjusted with respect to the substrate 22. Substrate 25 having holes 25a
And an emitting side mirror holder 24 which is composed of a movable end plate 26 provided so that the tilted state can be arbitrarily adjusted with respect to the substrate 25.
The substrate 22 of No. 1 and the substrate 25 of the reflection side mirror holder 24
Are opposed to each other via the laser tube 11, and are integrally connected and fixed to each other by a plurality of rod-shaped tie bars 27 extending in the central axis L direction of the laser tube 11.

The exit side mirror 1 at the tip of the mirror holding cylinder 13 extending so as to pass through the through hole 22a of the substrate 22.
4 and the reflection-side mirror 16 at the tip of the mirror holding cylinder 15 extending so as to pass through the through hole 25a of the substrate 25 are opposed to each other in the front direction on the central axis L of the laser tube 11 of the movable end plate 23. The tilted state with respect to the substrate 22 and the tilted state of the movable end plate 26 with respect to the substrate 25 are adjusted.

The movable end plate 26 related to the reflection side mirror holder 24 in the resonator fixing mechanism 20 is provided with a marker laser device positioning base 28 at the center of the outer surface thereof, and this marker laser device positioning base 28 is provided. A laser device 30 for a marker is integrally provided via the connecting mechanism 40.

More specifically, as shown in FIG.
The coupling mechanism 40 is provided with a flanged cylinder 43 having a flange 41 at one end, and the flange 41 of the flanged cylinder 43 is fixed to the marker laser positioning table 2 by a fixing member such as a bolt.
It is attached to 8. Four sets (eight in total) of set screws 44 are threadedly engaged with the wall surface of the cylinder part 42 at one end side and the other end side of the cylinder part 42 of the flanged cylinder 43, respectively, and penetrate in the radial direction. In addition, it is provided so that it can be moved forward and backward. Here, as shown in FIG. 3, the set screws 44 in groups of four are installed in the circumferential direction of the flanged cylinder 43, respectively.
They are provided at equal intervals of 0 °.

In the marker laser device 30, the tip of each of the set screws 44 abuts on the outer peripheral wall, so that the cylinder portion 42 of the flanged cylinder 43.
It is held coaxially with the central axis of.

In this marker laser device 30,
A laser diode 32 is fixedly arranged in a cylinder 31 forming a housing so that an emitting portion 33 thereof faces the laser oscillation device 10 side, and collects laser light so as to face the emitting portion 33 of the laser diode 32. The collimator 34 is fixedly arranged.

By moving each of the set screws 44 in the coupling mechanism 40 forward or backward, the optical axis of the laser light from the laser diode 32 and the optical axis of the laser light emitted from the laser oscillation device 10 and its position and The arrangement position of the marker laser device 30 and the direction of its central axis are adjusted so that the directions coincide with each other.

In this way, the marker laser device 30 is
It is integrally connected to the laser oscillation device 10 by a connection mechanism 40 including a cylinder 43 with a flange and a set screw 44 whose position and direction can be adjusted.

In the above composite laser device, when the laser oscillation device 10 is driven, light having a specific wavelength in the ultraviolet region generated by the discharge in the laser tube 11 is transmitted to the capillary tube 12 by the emission side mirror 14 and the reflection side mirror 16. Along the central axis L, the laser light in the ultraviolet region is emitted from the emitting side mirror 14 along the central axis L,
This laser light is used for photoluminescence spectroscopy experiments.

On the other hand, when the marker laser device 30 is driven without driving the laser oscillation device 10, the laser light in the visible light region emitted from the emitting portion 33 of the laser diode 32 is condensed by the collimator 34, and thereafter, The laser light is incident on the inside of the laser oscillation device 10 from behind the reflection-side mirror 16 of the laser oscillation device 10, passes through the capillary 12, and is emitted from the emission-side mirror 14 of the laser oscillation device 10 to the outside. Since the axis coincides with the optical axis of the laser light of the laser oscillation device 10, the laser oscillation device 10
Therefore, the laser light is emitted through the same path.

Moreover, since the laser light from the laser diode 32 is in the visible light region, the laser light emitted from the laser oscillation device 10 can be changed by changing the direction of the entire device using this laser light. The directions of will be changed at the same time. Therefore, the adjustment work for making the directions of the optical axes of the respective laser beams in both the laser oscillation device 10 and the marker laser device 30 unnecessary is unnecessary.

As described above, according to the above-described composite laser device, the optical axis of the laser light in the visible light region emitted from the marker laser device 30 and the optical axis of the laser light emitted from the laser oscillator device 10. Therefore, by performing the work of setting the optical system and arranging the optical equipment with reference to the optical axis of the laser light emitted from the marker laser device 30, the laser oscillation device 10 is automatically The required setting of the optical system with respect to the excitation laser light emitted from is achieved.

Since the laser oscillator 10 and the marker laser device 30 are integrated by the connecting mechanism 40, when changing the direction of the optical axis of the laser light emitted from the laser oscillator 10, The direction of the optical axis may be changed by using the laser light emitted from the marker laser device 30.

The laser light emitted from the marker laser device 30 is reflected by the reflection side mirror 1 of the laser oscillator 10.
6 is incident from behind and is emitted from the emission side mirror 14 of the laser oscillation device 10 along the same optical axis,
Since it is not necessary to use a semi-transmissive mirror, it is possible to directly irradiate the sample to be analyzed with the laser light emitted from the laser oscillation device 10, and the intensity of the light is not attenuated and the high light utilization rate Is obtained.

Further, by using the laser device 32 for the marker as the laser diode 32, the size of the entire device can be reduced and the occupied area can be reduced. Further, the connection mechanism 40 in the illustrated example
In the above, the marker laser device 30 is integrally provided on the movable end plate 26 of the reflection side mirror holder 24, and the marker laser device 3 is provided by the connecting mechanism 40.
Since the position and direction of 0 can be adjusted, the optical axis of the light from the laser diode 32 is adjusted to the laser oscillation device 10.
It is possible to easily and surely achieve the work of matching the laser light emitted from the laser.

In the above, the marker laser light emitted from the marker laser device 30 is emitted from the laser oscillation device 10.
Although the intensity thereof is attenuated by passing through the reflection side mirror 16 and the emission side mirror 14, there is no problem as long as the marker laser light has an intensity that can be visually confirmed.

Although one embodiment of the composite laser device of the present invention has been described above, the present invention is not limited to the above embodiment and is not particularly limited. For example, as the laser oscillation device, various devices can be used as long as they have an emission side mirror and a reflection side mirror. Further, as the connecting mechanism, one having another configuration can be used. Other semiconductor laser devices can be used as the marker laser device.

[0032]

According to the composite laser device of the present invention, the setting and arrangement of the optical system can be easily performed, and the laser beam is applied to the irradiation object without attenuating the intensity thereof. It is possible to obtain a high light utilization rate.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an outline of a configuration in an example of a composite laser device of the present invention.

2 is a vertical cross-sectional view of a marker laser device in the composite laser device of FIG.

3 is a cross-sectional view of a marker laser device in the composite laser device of FIG.

FIG. 4 is an explanatory view schematically showing the arrangement of a conventional excitation laser device and marker laser device used in photoluminescence spectroscopy.

[Explanation of symbols]

 1 Excitation Laser Device 2 Marker Laser Device 3 Semi-Transparent Mirror 4 Total Reflection Mirror 5 Sample 10 Laser Oscillator 11 Laser Tube 12 Capillary Tube 13 Mirror Holding Tube 14 Emission Side Mirror 15 Mirror Holding Tube 16 Reflection Side Mirror 20 Resonator Fixing Mechanism 21 emitting side mirror holder 22 substrate 23 movable end plate 24 reflective side mirror holder 25 substrate 26 movable end plate 27 tie bar 28 marker laser device positioning table 30 marker laser device 31 cylinder 32 laser diode 33 emitting part 34 collimator 40 coupling mechanism 41 Flange 42 Cylinder part 43 Cylinder with flange 44 Set screw

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Keiichi Ujiie 1194 Sado, Bessho-cho, Himeji-shi, Hyogo Ushio Denki Co., Ltd. (72) Hironari Haneda 1194 Sado, Bessho-cho, Himeji-shi, Hyogo Ushio Electric Co., Ltd. In the company

Claims (1)

[Claims] 1. A laser oscillating device having an emitting-side mirror and a reflecting-side mirror arranged to face each other, a marker laser device for emitting laser light in a wavelength region of visible light, and a laser of the marker laser device. Light is emitted along the optical axis of the laser light of the laser oscillation device, comprising a connection mechanism that integrally connects the marker laser device behind the reflection-side mirror of the laser oscillation device, The emission side mirror and the reflection side mirror of the laser oscillation device are transparent to the laser light emitted from the marker laser device, and the reflection side mirror of the laser oscillation device is incident from behind. A compound laser device, wherein the laser light of the marker laser device is emitted from an emission side mirror of the laser oscillation device.