JPH08280177A - High-voltage generating device - Google Patents

Abstract

PURPOSE: To eliminate the attenuation of a polarized charge by making a carrier current larger and suppressing the generation of leak currents by annularly arranging conductive plates so that the front surface of one conductive plate can face the rear surfaces of its adjacent conductive plates and alternately connecting rectifier elements in the forward and reverse directions between the facing surfaces of the conductive plates. CONSTITUTION: A high voltage which is the sum of a positive and negative voltages respectively generated by positive and negative charge transfer is generated across a high-potential part 30 and grounding potential part 29. Since the charge transfer by conductive plates 20 and fixed electrodes 22 facing each other is caused by close facing of large-area conductors to each other, a large quantity of charges can be carried due to the large capacitance between the conductors and a high voltage of a large current quantity is obtained. Because of such a electrode structure and electrode facing structure, the problem of the conventional technology that no large quantity of current is obtained can be solved. In addition, the polarizing power of a high-voltage generating device is not spoiled, because the potential difference caused by the fluctuation of the capacitance does not exceed a specific voltage value.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high voltage generator mainly intended to generate a high voltage for accelerating charged particles in a high energy ion analyzer, an ion implanter or the like. The present invention relates to a high voltage generator that obtains a DC high voltage by multiplying and rectifying an alternating current induced in an electrode on a transfer path that mechanically transfers.

[0002]

2. Description of the Related Art As conventional techniques for generating high DC voltage, pure electric means such as Cockcroft type and Schunkel type for multiplying and rectifying AC voltage to generate high DC voltage and mechanical charge transport are used. The bandegraph type, peretron type, disctron type, etc. used are known. Each of the above-mentioned high voltage generators of the prior art has advantages and disadvantages, and there are problems in practical limit of boosting ability in electric means, maintenance of stability in mechanical means, and the like. The inventors of the present application fuse electric means and mechanical means,
A high voltage generator capable of generating a high voltage stably without mechanical contact was developed, and it was disclosed as Japanese Patent Laid-Open No. 5-324102. This device is constructed as shown in FIG. In FIG. 10, a high voltage generator 1 according to a conventional configuration includes a charge carrier unit 2 in which an even number of metal pellets 6 are arranged on the periphery of an insulating disk 5, and the metal pellets 6 described above.
And a voltage generating unit 3 in which a multiplying rectifier circuit is arranged on an annular body 10 in which an even number of fixed electrodes 7 are arranged in an annular shape as one set, and this combination has a plurality of stages (three stages in the illustrated conventional configuration). ) Is configured. Insulation disks 5a, 5 at each stage
b and 5c are fixed to a common rotary shaft 4, and the drive motor 11
To rotate by. Charge transfer units 2a, 2 at each stage
b and 2c are connected so that adjacent ones of the metal pellets 6 arranged on the insulating disk 5 are connected by a diode K in which the forward direction and the reverse direction are alternately arranged. Further, the voltage generating units 3a, 3b, 3c in each stage are connected between the adjacent fixed electrodes 7 by a multiplying rectifying circuit formed by two diodes K and one capacitor C. Further, the voltage generating units 3a, 3b, 3c of the respective stages are connected so that the generated voltages are added in series.

The connection of each stage of the voltage generating units 3a, 3b, 3c and the connection between each stage are shown in a developed display as shown in FIG. In the voltage generation unit 3, for each stage, 1/2 adds positive voltage from the ground potential part to the high potential part (positive upward arrow) and adds negative voltage from the high potential part to the ground potential part. Negative charge transfer (downward dashed arrow). Furthermore, the positive charge transfer and the negative charge transfer in each voltage generating unit 3a, 3b, 3c are connected so as to be added respectively. The combination of the charge carrier unit 2 and the voltage generating unit 3 formed in three stages is such that the lowermost stage is the ground potential side and the uppermost stage is the high potential side, and the ground potential side voltage generating unit 3c is connected to the ground potential side inductor power source 8a. The high-potential-side inductor power supply 9 is connected to the high-potential-side voltage generating unit 3a. The electric charge applied from the ground potential side inductor power supply 8 to the ground potential side voltage generating unit 3c is positively and negatively charged alternately on the metal pellet 6 of the charge carrier unit 2 and moved to the high potential side, and the high potential side voltage generating unit 3c. An alternating current is generated in the fixed electrode 7 by a mechanical operation in which charges applied from the high-potential-side inductor power source 9 to 3a are alternately charged to the metal pellet 6 of the charge carrier unit 2 and moved to the ground potential side. A high voltage is generated by increasing the voltage of alternating current by a multiplying rectifier circuit including a diode K and a capacitor C, and adding the voltage charged in the capacitor C in series. By this operation, a high voltage is obtained between the ground electrode 12 on the ground potential side and the high voltage electrode 13 on the high potential side.

FIG. 12 shows an equivalent circuit on the side where positive charges are pulled from the ground potential side to the high potential side. The rotation of the insulating disk 5 causes the metal pellets 6 to move one by one with respect to the fixed electrode 7. The states are shown in order of (a), (b), (c), and (d). In FIG. 12A, in the metal pellets 6a and 6b near the positions of the fixed electrodes 7a and 7b to which the ground potential side inductor power supply 8 is connected, the forward conduction of the diode K connecting the metal pellets 6a and 6b is established. As a result, the charge is polarized and charged as shown in the figure. The charged state of the metal pellets 6a and 6b is maintained by the forward and reverse alternating connection of the diodes K. Charged metal pellets 6
Since a and 6b are sequentially moved to the positions shown in (b), (c) and (d) in the figure, the positive and negative alternately charged metal pellets 6b, 6a ... Come close to the fixed electrodes 7c, 7d. That is, an AC voltage is induced in each fixed electrode 7. The generated AC voltage is connected to each fixed electrode 7
The capacitor C is charged by being multiplied and rectified by a multiplying rectifier circuit composed of two diodes K and a capacitor C. Since the charging direction of the capacitors C is the same direction with the high potential side being positive as shown in the figure, the charging charges of the capacitors C connected in series on the ground potential side and the high potential side are added, and the high potential side is added. The positive charge is pulled up to the high voltage electrode 13 on the side.

On the other hand, by the voltage applied from the high-potential-side inductor power source 9, positive and negative alternating charges are charged and held in each metal pellet 6 moving from the high-potential side to the ground potential side, and the charged metal pellet 6 moves. An AC voltage is generated in each fixed electrode 7, and a voltage obtained by multiplying and rectifying the AC voltage is charged in each capacitor C. This capacitor C
Since the charging direction to the positive potential side is the same as the positive direction, the charging charge of each capacitor C connected in series from the high potential side to the ground potential side is added, and the negative charge is shifted from the high potential side to the ground potential side. Will be withdrawn. Thus, by pulling the positive charge to the high potential side and pulling the negative charge to the ground potential side between the ground potential side and the high potential side,
A high voltage is generated between the high voltage electrode 24 and the ground container 25. In the high voltage generator having the above configuration, since there is no mechanical contact, the insulating disk 5 can be rotated at high speed,
Since the charge transfer speed is increased, the charge transfer capability is improved, and the generation of dust is suppressed, so the frequency of failures is low and the regular maintenance intervals can be extended. Further, since the AC voltage generated by the electric charge mechanically transferred to each fixed electrode 7 is multiplied and rectified, a voltage drop may occur due to an increase in the number of stages as in the Cockcroft type that performs rectification of a unitary AC voltage. Absent. Furthermore, since the potential gradient is folded due to the structure in which the disc structures are laminated, it is excellent in discharge resistance in the direction of the rotation axis and has the feature of enabling miniaturization.

[0006]

However, there is a limit to the formation of the facing area between the metal pellets 6 arranged on the peripheral edge of the rotating disk 5 and the fixed electrodes 7 arranged on the inner edge of the insulating annular ring 10. Therefore, there is the first problem that charge transfer is small and a large carrier current amount cannot be obtained. Further, at the transition position where one set of metal pellets 6 charged with positive and negative charges due to the rotation of the rotary disk 5 separates from one set of fixed electrodes 7 facing each other, the capacitance (C) between the positive and negative charged metal pellets 6 As a result, according to the formula of charge Q = CV, the potential difference (V) between the metal pellets 6 becomes very high temporarily, and a reverse leakage current flows in the diode K connecting between the metal pellets 6 and the metal pellets 6 The polarization charge of is attenuated.
For this reason, the polarization performance of alternately charging positive and negative charges to the metal pellets 6 and carrying is deteriorated, and particularly, the boosting capability decreases as the voltage generating unit is configured in a plurality of stages.
There was a problem. An object of the present invention is to provide a high voltage generator having a structure that solves the problems of the carrier current amount and the polarization performance in the above-mentioned conventional configuration.

[0007]

The means adopted by the present invention to achieve the above object is to transfer charges between a ground potential part and a high potential part insulated from the ground potential part. , In a high voltage generator for generating a high voltage between the high potential part and the ground potential part, electrically isolated from each other on both front and back surfaces orthogonal to the rotation axis of a disk fixed on the rotation axis. A plurality of body plates are arranged in an annular shape at equal intervals, and rectifying elements are connected between the front and back sides of the conductor plate such that the forward direction and the reverse direction are alternated, and the rotating disk rotates. A charge carrier means which is fixed at an arbitrary number on the rotating shaft to be driven and is fixed, and a front surface side annular body and a back surface side which are arranged to face each other on the front surface and the back surface of each of the rotating discs with a predetermined interval. Each of the above conductors of the torus A plurality of fixed electrodes that are insulated from each other are arranged at a position facing each other, and the fixed electrodes of the front-side annular body and the back-side annular body are connected by a multiplying rectifier circuit composed of a rectifying element and a capacitor. Voltage generating means in which the capacitor is connected in series between the ground potential part and the high potential part, and the surface side ring located on the ground potential part side and / or the high potential part side A high voltage generator comprising a body and a voltage applying means for applying charges to the fixed electrode at one end of the backside annular body. In the above configuration,
The rotating disk and / or the front surface side annular body and the back surface side annular body can be formed by an integrated circuit manufacturing process.

[0008]

According to the present invention, a plurality of conductor plates formed in a required area on both front and back surfaces of a disk driven to rotate are arranged in an annular shape so as to face each other from both front and back surfaces.
A rectifying element is connected between each pair of electrodes so that the forward direction and the reverse direction are alternately arranged to form a rotating disk. With respect to this rotating disk, the two annular bodies on the front surface side and the back surface side, on which a plurality of fixed electrodes are formed so as to face each of the plurality of conductor plates formed on the front and back sides of the rotating disk, are rotated. It is arranged on both the front and back sides of the disk. A multiplying rectifier circuit is connected to each fixed electrode of the two annular bodies. Rotate the rotating disk by combining the rotating disk having the above-mentioned configuration with the charge carrying means, and the front-side annular body and the back-side annular body having the above-mentioned configuration as one unit of the voltage generating means to obtain the desired high voltage. When electric charges are applied from the voltage applying means to the fixed electrode at one end while being driven, the electric charges are alternately charged to the conductive plates and conveyed. The arranged fixed electrodes are alternately charged with the positive and negative electrically charged conductor plates, and an alternating voltage is induced in each fixed electrode. This alternating voltage is generated by a multiplying rectifier circuit that combines a rectifying element and a capacitor. It is multiplied and rectified to charge the capacitor. Since this capacitor is connected in series for each unit and is also connected in series between each unit, a high voltage can be obtained between the ground potential part and the high voltage part.

With the above structure, since the conductor plate and the fixed electrode face each other in a required area, a large electrostatic capacitance can be obtained between them, so that the amount of charge carrier, that is, the carrier current can be increased. Here, the first problem in the conventional configuration is solved. Further, since the conductor plates are arranged so as to face each other from the front and back of the rotating disk, a large electrostatic capacitance fixed between them can be obtained. The capacitance between the facings of the conductor plate and the fixed electrode is added in parallel between these facings, and this capacitance changes with the rotation of the rotating disk. Since it is sufficiently large, a large change in capacitance (C) does not occur. Therefore, since the electric charge (Q) is constant, the potential difference (V) in the reverse direction applied to the rectifying element connected between the facing conductor plates does not become excessive from the formula of Q = CV, and the leakage current Is suppressed, so there is no attenuation of polarization charge,
The boosting performance does not deteriorate even when the voltage generating unit is configured in multiple stages. Here, the second problem in the conventional configuration is solved. Also, the rotating disc and / or the surface side torus,
By forming the backside torus by the integrated circuit manufacturing process, there are no irregularities that expose parts such as diodes or wiring on the surface, so the proximity distance between the rotating disk and the front and back torus is small. Since it can be made smaller to increase the charge carrying amount and the rotating disk can be rotated at a higher speed, the efficiency of high voltage generation can be increased, the manufacturing man-hours can be reduced, and the maintenance workability can be improved.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments of the present invention will be described below with reference to the accompanying drawings for the understanding of the present invention. still,
The following example is an example embodying the present invention and does not limit the technical scope of the present invention. Figure 1
FIG. 2 is a structural diagram showing a configuration of a high voltage generator according to an embodiment of the present invention, FIG. 2 is a side view (a), a front surface side plan view (b) and a back surface side plan view showing a configuration of a rotating disk according to the embodiment. (C),
FIG. 3 is a side view (a) and a plan view (b) showing the configuration of the front side torus according to the embodiment, and FIG. 4 is a plan view (a) showing the configuration of the back side torus according to the example. FIG. 5 is a side view (b), FIG. 5 is a connection circuit diagram showing the electrical configuration of the high voltage generator according to the embodiment, and FIG. 6 is an operation explanatory diagram showing the operations of charge transfer and voltage generation in the order of rotational movement of the rotating disk. FIG. 7 is an explanatory view for explaining the effect of preventing the attenuation of polarization charges by the embodiment configuration, FIG. 8 is an equivalent circuit diagram for explaining the prevention of attenuation of the polarization charges, and FIG. 9 is a side view showing the configuration according to another embodiment. is there. In FIG. 1, a high voltage generator 15 according to the embodiment has a rotating shaft driven by a motor 31 in which conductor plates 20 are annularly arranged at equal intervals on both front and back surfaces of a disk 21 formed of an insulator. The rotating disk 18 fixed to 19 and the annular plates 23 and 24 formed of an insulator are the rotating disk 18 described above.
The ring-shaped plate 2 is arranged so as to face each other on both the front and back sides.
A combination of a front surface side annular body 25 and a back surface side annular body 26 in which the fixed electrodes 22 are arranged at equal intervals on the surface of the 3, 24 facing the rotating disk 18 is configured in three stages as shown in the drawing. ing.

As shown in FIG. 2, the rotating disk 18 is arranged such that conductor plates 20, 20 ... Formed on both front and back surfaces face each other from both front and back surfaces. ) K is connected in alternating forward and reverse directions. In the configuration of this embodiment, the rotary shaft 19
3 rotating disks 18a, 18b, 1 with a predetermined interval
8c is fixed, and the three plates rotate simultaneously to charge the conductive plate 20 with polarization to charge the rotating disks 18 respectively.
The front surface side annular body 25a, 25b, 25c and the back surface side annular body 26 which are respectively combined with a, 18b and 18c.
A charge carrier means for carrying charges to the fixed electrodes 22 of a, 26b, and 26c is configured. In addition, the front side annular body 2
As shown in FIG. 3 and FIG. 4, the backside annular member 26 has a plurality of fixed electrodes 22 arranged at equal intervals on the surface facing the rotating disk 18 and facing the conductor plate 20, respectively. And the fixed electrodes 22 of the front surface side circular ring body 25 and the back surface side circular ring body 26 are connected to each other to form a multiplication rectification circuit including a diode K and a capacitor C. The front side annular body 25 and the back side annular body 26
When the rotating disk 18 rotates, the conductive plates 20 that are alternately charged positively and negatively come close to the fixed electrodes 22 one after another, so that the AC voltage generated at each fixed electrode 22 is rectified by the rectifying circuit. The capacitor C is charged. The front surface side annular body 25 and the back surface side annular body 2
6 is provided for each rotating disk 18a, 18b, 18c, is connected between each front surface side annular body 25 and back surface side annular body 26, and is also connected between each stage. Is connected in series between the ground potential side and the high potential side, and constitutes a voltage generating means for generating a high voltage between the ground potential part 29 and the high potential part 30 as a result of adding the charging voltage. .

A combination of the one rotating disk 18 and the front-side annular body 25 and the back-side annular body 26 arranged to face the rotating disk 18 is used as a power generating unit 16, and in this embodiment, the power generating unit 16a, It has three stages of 16b and 16c. The power generation unit 16 may have a single-stage configuration when the desired high voltage may be relatively small, and may be configured by increasing the number of stages according to the demand for a higher high voltage. In the high voltage generator 1 in which the power generation unit 16 has three stages, the ground potential portion 2
The power generation unit 1 located on the ground potential side from the ground potential inductor power supply (voltage applying means) 27 arranged in FIG.
A high-potential-side inductor power supply (voltage application means) 28 disposed in the high-potential portion 30 while applying a starting voltage to the 6a.
By applying a starting voltage to the power generation unit 16c located on the high potential side, the positive charge is transferred from the ground potential site 29 to the high potential site 30, and the negative charge transfer is performed from the high potential site 30 to the ground potential site 29. As a result, a high voltage is generated between the high potential part 30 and the ground potential part 29. This operation will be described with reference to FIGS.

FIG. 5 shows the rotary disk 18 and the front and rear toroids 25.
Each power generation unit 16 composed of a combination with 26 is developed two-dimensionally to clarify the electrical connection relationship, and is shown as a two-stage configuration in order to avoid complexity of the illustration. It should be understood that the configuration of the second stage in the case of the three-stage configuration shown in FIG. 1 is omitted. In the case of the three-stage configuration shown in FIG. 1, a similar configuration of the power generation unit 16b is arranged between the power generation unit 16a and the power generation unit 16c shown in the figure. In FIG. 5, each power generation unit 16a, 16c
½ of each is a positive charge transfer (upward broken line arrow in FIG. 5) for transporting positive charges from the ground potential side to the high potential side as shown by the broken line arrow in the figure, and ½ is the high potential side. To the ground potential side, a negative charge transfer (downward dashed arrow in FIG. 5) is formed. In addition, the ground potential side inductor power supply 2 arranged in the ground potential portion 29
A starting voltage is applied from 7 to the fixed electrodes 22 of the front surface side annular body 25a and the back surface side annular body 26a. The conductor plate 20 of the rotating disk 18a located at a position facing the fixed electrode 22 to which the voltage is applied by the application of the starting voltage is charged, and is moved by the rotation of the rotating disk 18a, so that the fixed electrodes 22 in the rotating direction are sequentially moved. Induce a voltage. This situation will be described with reference to FIG.

FIG. 6 linearly shows a partial facing relationship between the rotary disc 18a and the front surface side annular body 25a and the back surface side annular body 26a. From the state shown in FIG. 6 (a), The state in which the rotating disk 18a rotates and the conductor plate 20 moves one by one is shown in order in FIGS. 6B, 6C, 6D, and 6E. In FIG. 6A, the fixed electrodes 22 of the front surface side annular body 25a and the back surface side annular body 26a
A ground potential side inductor power supply 27 is connected to a, 22b, 22c and 22d, and conductor plates 20 facing each other are arranged on the front and back sides.
Since a diode K is connected between a and 20b, 20c and 20d in the conduction direction, a voltage is applied to each fixed electrode 22a, 22b, 22c, 22d with the polarity shown in the figure, The conductor plates 20a, 20b, 20c, 20d facing each other are charged with electric charges of opposite polarities. That is, electric charges of opposite polarities are charged between the adjacent conductor plates 20a and 20c, 20b and 20d and between the conductor plates 20a and 20b and 20c and 20d facing each other.

Charged conductor plates 20a, 20b,
20c, 20d (positions shown by hatching) and the subsequent conductor plates 20e, 20f ... Are charged and moved in the same manner as described above, as shown in (b), (c) and (d) of FIG.
It is as shown in (e). Charged conductor plate 20
Of the fixed electrode 22e, as shown in FIG.
At 22f, the positive and negative alternately charged conductor plates 20 face each other, and positive and negative alternating voltages are induced, so that an AC voltage is generated. This AC voltage is multiplied and rectified by each of the multiplying rectification circuits connected between the front surface side annular body 25a and the back surface side annular body 26a, and each capacitor C is charged. The voltage charged in each capacitor C is
Since the capacitors C are connected in series from the ground potential side to the high potential side and the capacitors C of the power generation units 16a and 16c are connected in series, the addition is performed, and a large positive potential is added to the high potential portion 30. The voltage is obtained. Furthermore,
High-potential-side inductor power supply 2 arranged in the high-potential region 30
The starting voltage applied from 8 to the fixed electrodes 22 of the front surface side annular body 25c and the back surface side annular body 26c is polarized and charged to each conductor plate 20 of the rotating disk 18c in the same manner as described above, and each fixed electrode 22. Generate an alternating voltage on. This AC voltage is multiplied and rectified by each of the multiplying rectification circuits connected between the front surface side annular body 25c and the back surface side annular body 26c, and each capacitor C is charged. The voltage charged in each capacitor C is added because each capacitor C is connected in series from the high potential side to the ground potential side, and a large negative voltage is obtained on the ground potential side.

As described above, the mechanism for carrying the charges by the charge carrying unit 16 and generating the voltage from the carried charges by the voltage generating unit 17 is as shown by the broken line arrow in FIG. Half of positive charge transfer adds positive voltage from ground potential side to high potential side (upward dashed arrow in FIG. 5), and half negative charge transfer adds negative voltage from high potential side to ground potential side (Downward dashed arrow in FIG. 5). Furthermore,
The voltage generation units 17a and 17c of each stage are connected so that positive charge transfer and negative charge transfer are added respectively. Therefore, a high voltage obtained by adding the positive voltage due to the positive charge transfer and the negative voltage due to the negative charge transfer is generated between the high potential part 30 and the ground potential part 29. In the above-mentioned configuration, the charge transfer by the facing of the conductor plate 20 and the fixed electrode 22 is performed by the close facing surfaces of the conductors having a large area, so that the capacitance between the facings is large and the charge carrying amount is large. A high voltage with a large amount of current can be obtained. This electrode structure and the opposing structure between the electrodes solve the problem that a large amount of current cannot be obtained in the conventional technique. Further, in the prior art, the electrically conductive plate 20 (the metal pellet 6 in the prior art) is leaked from the diode K due to the high reverse potential generated at the transition position away from the position facing the fixed electrode 22. There was a problem that the polarization charge of 20 was attenuated.
This problem is also solved by the above configuration.
The reason why the attenuation of the polarization charge does not occur will be described below.

As shown in FIG. 7, one set of front and back conductor conductors
The seats 20a and 20b are installed facing each other from the front and back of the disk 21.
Have been killed. Therefore, it is proportional to the facing area between this facing
Large capacitance C₁Exists in a fixed state.
In addition, the conductor plates 20a and 20b are both the front and back torus 2
Fixed electrodes 22a and 22b formed on the electrodes 5 and 26, respectively
Since they face each other, the conductor plate 20a and the fixed electrode 22
a, between the facing of the conductor plate 20b and the fixed electrode 22b
Also the capacitance C₂, C₃Exists, which is the rotating disk 18
Of the conductors causes the conductor plates 20a and 20b to move.
It changes depending on the situation. The conductor plates 20a and 2
Diode K connected between 0b₁Centered on
Each capacitance C₁, C₂, C₃The equivalent circuit showing the existence of
As shown in 8. That is, the conductor plate 20a is
The lath and conductor plate 20b are negatively polarized and charged.
Therefore, a diode is provided between the fixed electrodes 22a and 22b.
K ₂And the capacitance C₂, C
₃Is a diode K when connected in series₁Exist in parallel with
Will be done. As the rotary disk 18 rotates,
The rates 20a and 20b are fixed electrodes 22a and 22 respectively.
When moving away from b, the capacitance C₂, C₃Is small
Diode K₁The capacitance between the two ends of is small.
However, the fixed capacitance C₁Is the changing capacitance
C₂, C₃Is sufficiently larger than the capacitance connected in series
So diode K₁Large change in capacitance between both ends of
There is no. Therefore, the relationship between the charge Q, the capacitance C, and the potential difference V
From the formula Q = CV, the charge Q is constant and the capacitance C is large.
Since it does not change significantly, the potential difference V changes little and
K₁Therefore, a large reverse potential difference is not applied.
Generally, the leakage current due to the reverse voltage applied to the diode is
The reverse voltage causes the current to rapidly increase from around a certain voltage value.
However, there is a tendency for the capacitance to change due to the configuration of this embodiment.
The accompanying potential difference is below the specified voltage value, and
There is no loss.

In the configuration of the embodiment described above, FIG.
As shown in Nos. 2, 3 and 4, a large number of diodes K and capacitors C are arranged on the surfaces of the rotary disk 18 and the front and rear toroids 25 and 26. Therefore, an uneven portion is formed on each surface by the arranged parts, wiring, etc.
Is constrained by the distance that the fixed electrode 22 and the fixed electrode 22 closely face each other,
Further, the rotating disk 18 that is driven to rotate impedes high-speed rotation. There are also problems such as an increase in the number of manufacturing steps, a decrease in insulation due to the adhesion of dust, and a decrease in workability of maintenance work. Another embodiment for solving the problems of the above-described embodiments will be described below.

The rotating disk 18 shown in FIG. 2 has a conductive disk 20 formed on both sides of a disk 21 made of an insulating material.
Diodes K are arrayed by connecting the facing conductor plates 20 on both front and back surfaces thereof. In the state shown in FIG. 2, it can be easily manufactured by etching or printed wiring, which is generally a manufacturing technique for printed wiring boards. However, in order to solve the above problem, it is ideal that only the conductor plates 20 are formed on both surfaces of the disk 21. Therefore, the disk 21 is formed of, for example, a silicon wafer, and the diode K and the conductor plate 20 are formed on the silicon wafer by using an integrated circuit manufacturing process to form a rotating disk having no uneven portion. You can Similarly, both front and back torus 2
By manufacturing the integrated circuits 5 and 26 using the manufacturing process of the integrated circuit, it is possible to form an annular body having no irregularities. Rotating disk 33 manufactured in this way
When a high voltage generator having the same three-stage configuration as that of the embodiment shown in FIG. 1 is constructed by using both the front and back torus 34, 35, a form as shown in FIG. 9 is obtained. With the configuration shown in FIG. 9, not only is it possible to rotate the rotary disk 33 at high speeds, but also effects such as downsizing, maintenance of performance, and improvement of maintenance workability are exhibited.

[0020]

As described above, according to the present invention, a plurality of conductor plates formed in a required area on both front and back surfaces of a rotationally driven disk are arranged in an annular shape so as to face each other from the front and back surfaces. Then, a rectifying element is connected between each pair of the positive and negative directions alternately to form a rotating disk. With respect to this rotating disk, the two annular bodies on the front surface side and the back surface side, on which a plurality of fixed electrodes are formed so as to face each of the plurality of conductor plates formed on the front and back sides of the rotating disk, are rotated. It is arranged on both the front and back sides of the disk. 2 above
A multiplying rectifier circuit is connected to each fixed electrode of the torus. Combining the above configuration into one unit for charge transfer and voltage generation to obtain the desired high voltage,
When the rotating disk is driven to rotate and electric charges are applied from the voltage applying means to the fixed electrode at one end, the electric charges are transferred as positive and negative alternating charged charges to the respective conductor plates. AC electrodes are induced in each fixed electrode by positively and negatively charged conductor plates facing each other in sequence in the arrayed fixed electrodes, and this AC voltage is multiplied by a multiplying rectifier circuit that combines a rectifying element and a capacitor. It is rectified and charges the capacitor. Since this capacitor is connected in series for each unit and is also connected in series between each unit, a high voltage can be obtained between the ground potential part and the high voltage part.

With the above structure, since the conductor plate and the fixed electrode face each other in a required area, a large electrostatic capacitance can be obtained between them, so that the amount of charge carrier, that is, the carrier current can be increased. Further, since the conductor plates are arranged so as to face each other from the front and back of the rotating disk, a large electrostatic capacitance can be obtained between them. The capacitance between the facing surfaces of the conductor plate and the fixed electrode is added in parallel between these facings, and this capacitance changes with the rotation of the rotating disk. Since it is sufficiently large, a large change in electrostatic capacitance (C) does not occur, and the potential difference (V) in the reverse direction applied to the rectifying element connected between the facing conductor plates is Q = CV. Therefore, the leakage current is suppressed and the polarization charge is not attenuated.
The boosting performance does not deteriorate even when the voltage generating unit is configured in multiple stages. Therefore, since there is no attenuation of polarization charging, it is possible to provide a high voltage generator that generates a higher voltage with a large amount of current. Further, by forming the rotating disk and / or both the front and back annular bodies by an integrated circuit manufacturing process, a disk or an annular body having no uneven portion is formed on each surface, and a high voltage is generated by high-speed rotation of the rotating disk. The effects of efficiency, miniaturization, maintenance of performance, and improvement of maintenance workability are demonstrated.

[Brief description of drawings]

FIG. 1 is a structural diagram showing a configuration of a high voltage generator according to an embodiment of the present invention.

FIG. 2 is a side view (a), a front side plan view (b) and a back side plan view (c) showing a configuration of a rotating disk according to an embodiment.

FIG. 3 is a side view (a) and a plan view (b) showing a configuration of a front surface side torus according to an embodiment.

FIG. 4 is a side view (a) and a plan view (b) showing a configuration of a back side annular member according to an embodiment.

FIG. 5 is a connection circuit diagram showing an electrical configuration of the high voltage generator according to the embodiment.

FIG. 6 is an operation explanatory diagram showing operations of charge transfer and voltage generation in the order of rotational movement of a rotating disk.

FIG. 7 is an explanatory diagram for explaining the effect of preventing the attenuation of polarized charges according to the embodiment configuration.

FIG. 8 is an equivalent circuit diagram for explaining the prevention of polarization charge attenuation.

FIG. 9 is a side view showing a configuration according to another embodiment.

FIG. 10 is a structural diagram showing a configuration of a high voltage generator according to a conventional example.

FIG. 11 is a connection circuit diagram showing an electrical configuration of a high voltage generator according to a conventional example.

FIG. 12 is an operation explanatory view illustrating an operation of charge transfer and voltage generation according to a conventional example.

[Explanation of symbols]

15, 32 ... High-voltage generator 18, 18a, 18b, 18c, 33 ... Rotating disk (charge carrying means) 19 ... Rotating shaft 20 ... Conductor plate 21 ... Disk 22 ... Fixed electrode 25, 25a, 25b, 25c, 34 Front surface side annular body (voltage generating means) 26, 26a, 26b, 26c, 35 ... Back surface side annular body (voltage generating means) 27 ... Ground potential side inductor power source (voltage applying means) 28 ... High potential side inductor power source (Voltage applying means) 29 ... Ground potential part 30 ... High potential part

Front page continuation (72) Inventor Kazushi Yokoyama 1-5-5 Takatsukadai, Nishi-ku, Kobe-shi, Hyogo Kobe Steel Works, Ltd. Kobe Research Institute

Claims (2)

[Claims] 1. A high voltage for generating a high voltage between the high potential part and the ground potential part by transferring charges between the ground potential part and the high potential part insulated and separated from the ground potential part. In the voltage generator, a plurality of electrically conductive plates, which are insulated from each other, are arrayed in an annular shape at equal intervals on both front and back surfaces of a disk fixed on the rotating shaft and orthogonal to the rotational axis. Rectifiers are connected between the front and back sides so that the forward and reverse directions are alternated.
A charge carrier means having an arbitrary number fixed on a rotary shaft on which the rotary disc is driven to rotate, and a front side circle arranged so as to face each other on the front surface and the back surface of each of the rotary discs at a predetermined interval. A plurality of fixed electrodes insulated from each other are arranged at positions facing the conductor plate of each of the ring body and the back side annular body, and the fixed electrodes of the front side ring body and the back side ring body are arranged between the fixed electrodes. Voltage generating means, which is connected by a multiplying rectifier circuit composed of a rectifying element and a capacitor, wherein the capacitor is connected in series between the ground potential portion and the high potential portion, and the ground potential portion side and / or A high voltage generator comprising: voltage applying means for applying charges to the fixed electrodes at one ends of the front surface side annular body and the back surface side annular body located on the high potential region side. 2. The rotating disk and / or surface side torus,
The high-voltage generator according to claim 1, wherein the back-side annular body is formed by an integrated circuit manufacturing process.