JPH08279326A - Hybrid integrated circuit device - Google Patents

Abstract

PURPOSE: To miniaturize the whole of a device, and to reduce the weight thereof by embedding a projection made of the strong magnetic body in a container cover so as to face to an electromagnetic converting element. CONSTITUTION: A protecting cap 5 is adhered to a board 1 to be loaded with a chip 2 of an electromagnetic converting integrated circuit, on which an electromagnetic converting element 3 is integrated, and a circular projection, which is made of the strong magnetic body 8 and which has the T-shaped cross section, is provided at a position just over the element 5 of the cap 5. With this structure, external magnetic line of force between the N and the S poles of a permanent magnet 6, which is arranged under the board 1, is easy to pass through the strong magnetic body 8, and the magnetic line of force is concentrated to the element 3 so as to heighten the magnetic flux density of the position of the element 3. Consequently, the permanent magnet 6 for trigger can be miniaturized. Furthermore, since arrangement of a concentrator outside of a container is unnecessary, whole of the device is miniaturized, and the weight is reduced. The projection is made of the permanent magnet desirably having a polarity different from the polarity of the permanent magnet 6, of which pole faces to the tip of projection.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hybrid integrated circuit device including a magnetoelectric conversion element such as a Hall element or a magnetoresistive element.

[0002]

2. Description of the Related Art In order to trigger the operation of a circuit including a magnetoelectric conversion element, it is necessary to change the magnetic field at the location of the element. Usually such a change in magnetic field is caused by the movement of the permanent magnet. FIG. 2 shows a conventional hybrid integrated circuit device including a magnetoelectric conversion element. A magnetoelectric conversion element 3 is integrated on a semiconductor IC chip 2 mounted on a substrate 1 made of a non-magnetic material. The non-wiring and the terminal of the IC chip 3 are connected by the bonding of the conducting wire 4.
The cap 5 for sealing the IC chip 3 is made of a non-magnetic material and is fixed to the substrate 1 with an adhesive or the like. Permanent magnet 6 for changing the magnetic field at the location of the magnetoelectric conversion element 3
Faces the IC chip 2 with the substrate 1 in between,
In order to increase the magnetic field lines passing through the magnetoelectric conversion element 3, the cap 5
A concentrator 10 made of a ferromagnetic material is fixed on the top. The strength of the magnetic field of the magnetoelectric conversion element 3 portion generated by moving the magnet 6 up and down as shown by the arrow 11 triggers the operation of the circuit.

[0003]

However, in order to generate the magnetic flux density required by the magnetoelectric conversion element 3, as shown in FIG. 2, the magnet 6 and the concentrator 10 which are larger than the container of the hybrid integrated circuit are provided outside the container. To prepare for
There is a problem that the hybrid integrated circuit device becomes large. Further, an IC in which a magnetoelectric conversion element is integrated tends to have an increased degree of integration and a chip size by incorporating an accessory circuit, and a magnetic change by the magnet 6 may affect a peripheral circuit to cause a malfunction.

An object of the present invention is to solve the above problems and to provide a small-sized and lightweight hybrid integrated circuit device by reducing the magnetic flux generating means.

[0005]

In order to achieve the above object, the present invention provides a semiconductor element including a magnetoelectric conversion element, which is housed in a container made of a non-magnetic substrate and a lid, respectively. In a hybrid integrated circuit device in which a permanent magnet is placed outside so that one pole of the permanent magnet faces the magnetoelectric conversion element with the substrate sandwiched between the permanent magnet and the magnet, the lid of the magnetoelectric conversion element is opposite to the pole of the permanent magnet. It is assumed that a protrusion made of a magnetic material is installed. It is effective that the protrusion projects toward the magnetoelectric conversion element. The protrusion may be a permanent magnet, and the tip may have a polarity different from the pole of the permanent magnet outside the container that faces the magnetoelectric conversion element and is opposed to the pole. The magnetoelectric conversion element may be integrated with another semiconductor element in one semiconductor element body.

[0006]

[Function] A large concentrator is placed outside the container by placing a ferromagnetic protrusion on the container lid so as to face the permanent magnet outside the container with the magnetoelectric conversion element interposed therebetween, and further projecting toward the magnetoelectric conversion element. Lines of magnetic force can be concentrated on the magnetoelectric conversion element more than when they are arranged. Also, due to the concentration of the lines of magnetic force, the magnetic flux density passing through the peripheral auxiliary circuits and other electronic circuit parts is reduced. Further, by magnetizing the ferromagnetic material embedded in the lid to make it a permanent magnet, and by making the poles of different polarities from those of the permanent magnet outside the container face each other, magnetic bias is applied and the magnetic flux density in the magnetoelectric conversion element section increases. .

[0007]

Embodiments of the present invention will be described below with reference to the drawings in which the same parts as those in FIG. FIG.
In the embodiment shown in FIG. 1, a magnetoelectric conversion IC in which a magnetoelectric conversion element 3 such as a Hall element or a magnetoresistive element is integrated on a substrate.
2 is mounted together with other circuit components 12, and a non-magnetic protective cap 5 for sealing the IC chip is adhered by an adhesive 7. Magnetoelectric conversion element 3 of this cap 5
A circular ferromagnetic material 7 having a T-shaped cross section is embedded in a position directly above the magnetic field conversion element side so as to project in a protruding shape. As a result, the external magnetic field lines between the NS poles of the permanent magnet 6 arranged under the substrate 1 easily pass through the ferromagnetic body 8, so that the magnetic flux density at the location of the magnetoelectric conversion element 3 increases. Then, the amount of change in the magnetic flux density due to the movement of the permanent magnet in the arrow direction 11 increases.

In another embodiment, only a portion of which is shown in FIG.
The ferromagnetic material shown in FIG. 1 is replaced with a permanent magnet 9 whose end of the protrusion is magnetized to have an S pole. N of the permanent magnet 6 under the substrate 1
Most of the magnetic field lines from the pole to the S pole of the permanent magnet 9 embedded in the cap 5 pass near the magnetoelectric conversion element 3, so that even if the magnetic force of the permanent magnet 6 is reduced, the required magnetic flux density in the magnetoelectric conversion element portion is reduced. A secure and inexpensive permanent magnet can be used.

[0009]

According to the present invention, by embedding the protrusion of the ferromagnetic material facing the magnetoelectric conversion element in the container lid, the magnetic field lines emitted from the magnet for the circuit operation trigger outside the container are penetrated to obtain the magnetoelectric effect. The magnetic flux density in the conversion element section can be increased. As a result, the concentrator does not need to be arranged outside the container, and the permanent magnet for the trigger is also small, so that the hybrid integrated circuit device can be made compact and lightweight. Further, although the cost of the permanent magnet for trigger can be reduced, this effect is particularly remarkable when the ferromagnetic body is made into a permanent magnet. Further, due to the concentration of the lines of magnetic force, the magnetic field in the peripheral portion of the magnetoelectric conversion element is weakened, and malfunction due to magnetic influence on the peripheral circuit components can be prevented. This effect is particularly remarkable when the magnetoelectric conversion element is integrated with another semiconductor element in one IC chip.

[Brief description of drawings]

FIG. 1 is a sectional view of a hybrid integrated circuit device according to an embodiment of the present invention.

FIG. 2 is a sectional view of a conventional hybrid integrated circuit device.

FIG. 3 is a sectional view showing a part of a hybrid integrated circuit device according to another embodiment of the present invention.

[Explanation of symbols]

 1 Substrate 2 IC Chip 3 Magnetoelectric Converter 5 Cap 6, 9 Permanent Magnet 7 Adhesive 8 Ferromagnetic 12 Circuit Parts

Claims (4)

[Claims] 1. A semiconductor element including a magnetoelectric conversion element is housed in a container composed of a substrate made of a non-magnetic material and a lid, and a permanent magnet is provided outside the container with a magnetic pole interposed between the pole and the substrate. In the hybrid integrated circuit device arranged to face the element, a protrusion made of a ferromagnetic material is provided on the lid at a position opposite to the pole of the permanent magnet of the magnetoelectric conversion element. apparatus. 2. The hybrid integrated circuit device according to claim 1, wherein the protrusion projects toward the magnetoelectric conversion element. 3. The hybrid integrated circuit device according to claim 1, wherein the protrusion is a permanent magnet, and the tip of the protrusion has a polarity different from the pole of the opposing permanent magnet outside the container. 4. The hybrid integrated circuit device according to claim 1, wherein the magnetoelectric conversion element is integrated with another semiconductor element in one semiconductor element body.