JPH08261706A - Galvanomagnetic equipment and position detection device using the equipment - Google Patents

Abstract

PURPOSE: To widen a detection width with less magnetoresistance effect elements by arranging a plurality of magnetoresistance effect elements in parallel and without completely overlapping in the longitudinal direction. CONSTITUTION: In a galvanomagnetic equipment 20, magnetoresistance effect elements 1a, 1a are arranged in parallel on a substrate 2 so that they do not completely overlap in the longitudinal direction. Connection electrodes 1d and 1e are connected to both edges of the elements 1a, 1a and the elements 1a, 1a are connected to a middle electrode 1f via connection electrodes 1d, 1d. Since the equipment 20 is arranged while it is in parallel and does not completely overlap in the longitudinal direction, the detection width is made longer than the length in the longitudinal direction of the element 1. Namely, a detection width which is longer than the length of one element of a magnetic resistance effect element can be obtained by the single two-element three-terminal type equipment 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetoelectric converter which outputs an electric signal in response to a change in position and a position detecting device using the same.

[0002]

2. Description of the Related Art Conventionally, a device utilizing a magnetoelectric converter has been put into practical use as a position detecting device for detecting a change in position. A conventional magnetoelectric converter 95 and a conventional position detecting device 90 will be described with reference to FIGS. 8 is a plan view of the magnetoelectric converter 95, FIG. 9 is a plan view of the position detection device 90,
10 and 11 are explanatory views showing the operation of the magnetoelectric converter.

As shown in FIG. 8, a magnetoelectric converter 95 includes two rectangular magnetoresistive effect elements 1a and 1a which are parallel to each other on a substrate 2 which is made of a magnetic material such as ferrite or glass and whose length is long. It is placed so as to completely overlap in the lateral direction. Connection electrodes 1d and 1e are respectively connected to both ends of the magnetoresistive effect elements 1a and 1a, and the two connection electrodes 1d are connected to each other by an intermediate electrode 1f. The input terminal 3a is connected to the one connection electrode 1e, the output terminal 3b is connected to the intermediate electrode 1f, and the ground terminal 3c is connected to the other connection electrode 1e. Further, permanent magnets (not shown) are provided adjacent to the magnetoresistive effect elements 1a and 1a for applying a magnetic bias.

Magnetoresistive effect elements 1a, 1a, connection electrode 1
e, 1e and the intermediate electrode 1f are a well-known magnetoresistive film formed in a thin film by adhering bulk InSb or NiFe whose resistance value changes with respect to magnetism to the substrate 2 and then grinding. It is composed of a conductive metal film. Further, the magnetoresistive effect elements 1a, 1a,
In order to protect the connection electrode 1d and the intermediate electrode 1f, a protective film (not shown) is formed by sputtering silica or silicon nitride, or by using a spin-on-glass method or the like.

Since the resistance value of the magnetoresistive effect element greatly changes with temperature, two magnetoresistive effect elements 1a and 1a having the same characteristics as described above are connected in series. It is generally used as a terminal type.

Next, the operation of the magnetoelectric converter will be described with reference to FIGS.

As shown in FIG. 10, when the magnetic body 4 approaches the magnetoelectric converter 95, the magnetic field applied to the magnetoresistive effect elements 1a, 1a changes, and the resistance value of the applied portion increases. Then, the voltage corresponding to the difference between the resistance values of the magnetoresistive effect elements 1a and 1a as shown in FIG. 11 is output from the output terminal 3b. That is, it functions as a magnetoelectric converter 95 that converts the position of the magnetic body into an output voltage.

Further, when a detection width wider than that of the position detecting device composed of a single magnetoelectric converter is required, a plurality of magnetoelectric converters 95, 95. ． ． The position detecting device 90 using the is put into practical use.

As shown in FIG. 9, the position detecting device 90 is
A plurality of magnetoelectric converters 95, 95. ． ． However, it has a configuration in which the magnetoresistive effect elements forming the same are arranged in a line in the long side direction. The input terminal 3a, output terminal 3b, and ground terminal 3c of each magnetoelectric converter are independently connected to an external detection device (not shown).

[0010]

In a two-element three-terminal type magnetoelectric converter used in a conventional position detecting device, two rectangular magnetoresistive effect elements 1a and 1a are parallel to each other,
And since it is arranged so that its long side direction is completely overlapped,
Only the length of one magnetoresistive element could be detected. In order to further widen the detection width, a large number of magnetoelectric converters must be arranged side by side to form a position detection device.

[0011]

Means for Solving the Problems A magnetoelectric converter according to claim 1 of the present invention is a two-element three-terminal type magnetoelectric converter constituted by two rectangular magnetoresistive effect elements,
It is characterized in that the two magnetoresistive effect elements are arranged parallel to each other and do not completely overlap each other in the long side direction.

A position detecting device according to claim 2 of the present invention is
A plurality of the magnetoelectric converters according to claim 1 are arranged in a line in the long side direction of the magnetoresistive effect element forming the magnetoelectric converter.

A position detecting device according to claim 3 of the present invention is
A plurality of rectangular magnetoresistive elements are arranged in two parallel rows.
Further, the magnetoresistive effect elements in different columns are arranged so as not to completely overlap each other in the long side direction, and the arbitrary magnetoresistive effect elements arranged in one row and the arbitrary magnetoresistive effect elements arranged in the other row are arranged. And a plurality of two-element three-terminal type magnetoelectric converters are connected to each other, and the plurality of magnetoelectric converters are combined together.

[0014]

The magnetoelectric transducer according to claim 1 of the present invention is a two-element three-terminal type magnetoelectric transducer constituted by two rectangular magnetoresistance effect elements, wherein the magnetoresistance effect element is
Since they are arranged parallel to each other and do not completely overlap each other in the long side direction, the detection width becomes wide.

A position detecting device according to claim 2 of the present invention is
Since the plurality of magnetoelectric converters according to claim 1 are arranged in a line in the long side direction of the magnetoresistive effect element which constitutes the magnetoelectric converter, the detection width becomes wide.

A position detecting device according to claim 3 of the present invention is
A plurality of rectangular magnetoresistive elements are arranged in two parallel rows.
Further, the magnetoresistive effect elements in different columns are arranged so as not to completely overlap each other in the long side direction, and the arbitrary magnetoresistive effect elements arranged in one row and the arbitrary magnetoresistive effect elements arranged in the other row are arranged. Since a plurality of two-element three-terminal type magnetoelectric converters are connected to the magnetoresistive effect element and the plurality of magnetoelectric converters are combined, the detection width is widened. [Detailed Description of the Invention]

[0017]

【Example】

(Embodiment 1) Magnetoelectric converter 20 according to an embodiment of the present invention
Will be described with reference to the plan view of FIG. The same parts as those in the conventional example are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIG. 1, in a magnetoelectric converter 20 according to the present invention, a magnetoresistive effect element 1a, 1a is provided on a substrate 2.
It has a configuration in which they are arranged in parallel with each other and do not completely overlap in the long side direction. Magnetoresistive effect element 1a, 1a
The connection electrodes 1d and 1e are connected to both ends of the magnetoresistive effect element 1a and 1a, respectively.
It is connected to the intermediate electrode 1f via d and 1d. One of the connection electrodes 1e has an input terminal 3a, the intermediate electrode 1f has an output terminal 3b, and the other connection electrode 1e has a ground terminal 3c.
Are connected respectively.

Since the magnetoelectric converters are arranged parallel to each other and not completely overlapped in the long side direction, the detection width becomes longer than the length of the magnetoresistive effect element 1a in the long side direction. That is, with a single two-element three-terminal type magnetoelectric converter, it is possible to obtain a detection width longer than the length of one magnetoresistive effect element. In this embodiment, the magnetoresistive effect elements 1a, 1a are
Are arranged so that they do not completely overlap in the long side direction, but they may be arranged so as to partially overlap.

(Embodiment 2) A position detecting device 30 according to a second embodiment of the present invention will be described with reference to the plan view of FIG.

As shown in FIG. 2, the position detecting device 30 according to the present invention includes a holder 5 having a plurality of magneto-electric converters 20, 2.
0. ． ． However, the magnetoresistive effect element that constitutes the magnetoelectric converter 20 is mounted in the long side direction. The magnetoelectric converter 20 uses the one described in the first embodiment. The input terminal 3a, the output terminal 3b, and the ground terminal 3c provided in each magnetoelectric converter 20 are independently connected to a detection circuit (not shown). In the present embodiment, a large number of magnetoelectric converters 20 are arranged in the holder 5 in order to widen the detection width of the position detection device 30. The individual magnetoelectric converters 20 are magnetoelectric converters composed of a small number of magnetoresistive effect elements, because the magnetoresistive effect elements forming the magnetoelectric effect elements are arranged in parallel with each other and are not completely overlapped in the long side direction. Since a detection width longer than the length of one element of the magnetoresistive effect element 1a can be obtained, a position detection device having a wide detection width can be configured.

(Embodiment 3) A position detecting device 40 according to another embodiment of the present invention will be described with reference to the layout diagrams of FIGS.

As shown in FIG. 3, the position detecting device 40 includes
A plurality of rectangular magnetoresistive effect elements 1a, 1a. ． ．
In parallel two rows, but in different rows
It has a structure mounted on the holder 5 so that a and 1a do not overlap each other in the long side direction. Magnetoresistive effect element 1a arranged in one row and the magnetoresistive effect element 1a
Is connected to the magnetoresistive effect element 1a arranged in the other row, and the two-element three-terminal type magnetoelectric converter 50 is connected.
Is configured in plural. Further, the input terminal 3a, the output terminal 3b, and the ground terminal 3c, which are connected to the respective magnetoelectric converters 50, are independently connected to a detection circuit (not shown). Note that, as shown in FIG. 4, the magnetoresistive effect element arranged in one row and the magnetoresistive effect element arranged in the other row may partially overlap each other.

In the position detecting device having the above-mentioned structure, since the magnetoresistive effect elements are arranged in this way, a position detecting device having a wider detection width can be formed by using a smaller number of magnetoresistive effect elements than the conventional one.

(Embodiment 4) A position detecting device 60 according to another embodiment of the present invention will be described with reference to the plan view of FIG.

As shown in FIG. 5, the position detecting device 60 includes
A plurality of rectangular magnetoresistive effect elements 1a are arranged in two parallel rows in the long side direction and are not completely overlapped in the long side direction. The magnetoresistive element 1 arranged in one row
a and the magnetoresistive effect element 1a arranged in the other row may partially overlap.

An arbitrary magnetoresistive effect element 1a selected from one row and an arbitrary magnetoresistive effect element 1a selected from the other row are connected in series to form a two-element three-terminal type magnetoelectric converter 50. It is configured. Furthermore, the input terminal 3a and the output terminal 3 of each magnetoelectric converter 50
b and the ground terminal 3c are independently connected to a detection circuit (not shown).

In the position detecting device having the above structure, since the magnetoresistive effect elements are arranged in this way, a position detecting device having a wider detection range can be constructed by using less magnetoresistive effect elements than the conventional one.

(Embodiment 5) A position detecting device 70 according to another embodiment of the present invention will be described with reference to the layout diagram of FIG.

As shown in FIG. 6, the position detecting device 70 according to the present invention comprises a plurality of magnetoresistive effect elements 1a, 1a. ． ． However, it has a structure in which a material having a magnetoresistive effect is formed by sputtering or grinding from a bulk and then formed by photolithography. Hereinafter, the structure of the position detecting device 70 according to the embodiment of the present invention will be described in detail.

As shown in the figure, the position detecting device 70 includes a plurality of magnetoresistive effect elements 1a, 1a. ． ． Are arranged in two parallel rows, and the magnetoresistive effect elements in different rows are arranged so as not to overlap each other in the long side direction, and the magnetoresistive effect elements arranged in one row and the other row are arranged. The magnetoresistive effect element adjacent to the magnetoresistive effect element is connected to form a two-element three-terminal type magnetoelectric converter 55. In this embodiment, an input electrode 3d, an output electrode 3e and a ground electrode 3f are formed instead of the input terminal 3a, the output terminal 3b and the ground terminal 3c. The magnetoresistive effect element arranged in one row and the magnetoresistive effect element arranged in the other row may partially overlap each other.

In this embodiment, since a plurality of magnetoresistive effect elements are formed on the insulating substrate by photolithography, the manufacturing process is simplified and the mutual positions of the magnetoelectric converters are accurately determined.

Since the magnetoresistive effect element is arranged in this way in the position detecting device having the above-mentioned structure, the position detecting device having a wider detection width can be constituted by the magnetoresistive effect element which is smaller than the conventional one.

(Sixth Embodiment) A position detecting device 80 according to another embodiment of the present invention will be described with reference to the layout diagram of FIG.

As shown in FIG. 7, the position detecting device 80 according to the present invention comprises a plurality of magnetoresistive effect elements 1a, 1a. ． ． However, a material having a magnetoresistive effect is formed by sputtering or grinding from a bulk and then formed by photolithography. The structure of the position detecting device 80 according to the embodiment of the present invention will be described in detail below.

As shown in the figure, the position detecting device 80 includes a plurality of magnetoresistive effect elements 1a, 1a. ． ． Is arranged in two parallel rows so that magnetoresistive effect elements in different rows do not completely overlap each other in the long side direction, and an arbitrary magnetoresistive effect element arranged in one row and the other Is connected to an arbitrary magnetoresistive effect element arranged in the column to form a two-element three-terminal type magnetoelectric converter. Further, the magnetoresistive effect element arranged in one row and the magnetoresistive effect element arranged in the other row may partially overlap each other.

With the above configuration, the magnetoresistive effect elements 1a, 1a which are not adjacent to each other form the two-element three-terminal type magnetoelectric converter 55, and the position detecting device 80 is constituted. In this embodiment, the input terminal 3a and the output terminal 3
b, input electrode 3d, output electrode 3 instead of ground terminal 3c
e, the ground electrode 3f is formed. In the present embodiment, since a plurality of magnetoelectric converters are formed on the insulating substrate in one step, the manufacturing process is simplified and the positions of the magnetoelectric converters are accurately determined.

Since the magnetoresistive effect element is arranged in this way in the position detecting device having the above-described structure, the position detecting device having a wider detection width can be constituted by using less magnetoresistive effect element than the conventional one.

In this embodiment, since the electrode films connecting the magnetoresistive effect elements and the connection electrodes have portions intersecting with each other, they are formed by a so-called multi-layer thin film technique of alternately forming insulating layers. It

In the position detecting devices described in the first to fourth embodiments, the terminals are used to input or output signals, but it goes without saying that input / output electrodes may be used. .

[0041]

EFFECTS OF THE INVENTION In the magnetoelectric converter according to the present invention, two rectangular magnetoresistive effect elements are arranged in parallel with each other and do not completely overlap each other in the long side direction. Can be widened.

In the position detecting device according to the present invention, a large number of magnetoelectric converters are arranged in the holder in order to widen the detection width, and the magnetoresistive effect elements constituting the individual magnetoelectric converters are parallel to each other. In addition, since it is arranged so that it does not completely overlap in the long side direction, it is possible to obtain a detection width that is longer than the length of one magnetoresistive effect element with a small number of magnetoelectric converters. A detector can be configured.

In the position detecting device according to the present invention, the plurality of rectangular magnetoresistive effect elements are arranged in two parallel rows so that the magnetoresistive effect elements in different rows do not completely overlap in the long side direction. , A two-element three-terminal type magnetoelectric conversion device in which any magnetoresistive effect element arranged in one row and any magnetoresistive effect element arranged in the other row are connected in series to each other. Since it has a vessel, it is possible to form a position detection device having a wide detection width with a small number of magnetoelectric conversion elements.

[Brief description of drawings]

FIG. 1 is a plan view of an example magnetoelectric converter according to the present invention.

FIG. 2 is a plan view of a position detection device according to an embodiment of the present invention.

FIG. 3 is a plan view of a position detecting device according to another embodiment of the present invention.

FIG. 4 is a plan view of a position detecting device according to another embodiment of the present invention.

FIG. 5 is a plan view of a position detecting device according to another embodiment of the present invention.

FIG. 6 is a plan view of a position detecting device according to another embodiment of the present invention.

FIG. 7 is a plan view of a position detecting device according to another embodiment of the present invention.

FIG. 8 is a plan view of a conventional magnetoelectric converter.

FIG. 9 is a plan view of a conventional position detection device.

FIG. 10 is an explanatory diagram of a conventional position detection device.

FIG. 11 is an explanatory diagram of a conventional position detection device.

[Explanation of symbols]

1a Magnetoresistive element 1d, 1e Connection electrode 1f Intermediate electrode 2 Substrate 3a Input terminal 3b Output terminal 3c Ground terminal 3d Input electrode 3e Output electrode 3f Ground electrode 4 Magnetic body 5 Holder 20, 50, 95 Magnetoelectric converter 30, 40, 60, 70, 80, 90 Position detection device

Claims (3)

[Claims] 1. A two-element three-terminal type magnetoelectric converter composed of two rectangular magnetoresistive effect elements, wherein the two magnetoresistive effect elements are completely parallel to each other and in the long side direction. Magnetoelectric converter characterized in that they are arranged without overlapping. 2. A plurality of magnetoelectric converters according to claim 1,
A position detection device, which is arranged in a line in a long side direction of a magnetoresistive effect element that constitutes the magnetoelectric converter. 3. A plurality of rectangular magnetoresistive effect elements are arranged in two parallel rows so that magnetoresistive effect elements in different rows do not completely overlap each other in the long side direction. A plurality of two-element three-terminal type magnetoelectric converters are configured by connecting any magnetoresistive effect element arranged in the row and any magnetoresistive effect element arranged in the other row. A position detecting device comprising a combination of the above-mentioned magnetoelectric converters.