JPH08257778A - Laser beam welding machine - Google Patents

Abstract

PURPOSE: To perform laser machining with a high working efficiency by making a laser beam incident on an optical reflector and forming plural machining beams reflected by the second surface. CONSTITUTION: An optical reflector 200 is provided with a base plate 210 and plural prismatic bodies 220 extending opposite to the incident direction of the beam B from the base plate 210. When the beam B is made incident on the optical reflector 200, it is reflected by the total reflection area 221 at the tip end of each prismatic body 220. The beam B so reflected is converged on a work surface by a condensing lens, thereby carrying out perforating. As a result, the number of donor inserting holes is increased that can be machined at a time, reducing time required for machining all donor inserting holes.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing device.

[0002]

2. Description of the Related Art The applicant has already developed a powder jet image forming apparatus as shown in FIG. This powder jet image forming apparatus has a print head 2 that controls passage of toner charged with a predetermined polarity, for example, negative polarity.
A toner supply roller 1 for supplying toner to the print head 2, and the toner passing through the print head 2 on the recording paper P.
A base roller 3 for transferring the toner onto the recording paper P and a fixing roller 4 for fixing the toner transferred onto the recording paper P onto the recording paper P are provided.

As shown in FIGS. 9 to 12, the print head 2 includes an insulating substrate 20, a plurality of first electrodes 21 on the surface of which the toner supply roller 1 of the insulating substrate 20 is formed, and an insulating substrate 20. The recording paper conveying roller 3 of No. 2 is provided with a plurality of second electrodes 22 formed on the surface of the hollow. Multiple first electrodes 2
The one and the plurality of second electrodes 22 form a matrix electrode. Each first electrode 21 and each second electrode 22
A toner passage hole 23 penetrating the print head 2 is formed at each intersection position with and.

An on-voltage (for example -100V) and an off-voltage (for example + 300V) are selectively applied to each first electrode 21. Each second electrode 22 has an on-voltage (for example, 0 V) and an off-voltage (for example, -200 V).
V) and are selectively applied. FIG. 13 shows each first electrode 2
1 shows changes in applied voltage V1-0 to V1-7.
As shown in FIG. 13, each of the first electrodes 21 is subjected to dimic scan control, and the applied voltage is sequentially turned on at predetermined unit time intervals. Then, only when the applied voltage to both the first electrode 21 and the second electrode 22 is the on-voltage, the toner passes through the toner insertion hole 23 at the intersection thereof, and the dot printing is performed.

The recording paper P is conveyed by the base roller 3 in the direction perpendicular to the first electrode 21 and in the direction in which control by the dynamic scanning of the first electrode 21 proceeds (direction shown by arrow A in FIG. 10). +5 on the recording paper transport roller 3.
A voltage of 00V is applied. The toner supply roller 1 is grounded and its surface potential is 0V.

The print head 2 is provided with an ultrasonic vibrator 50 for applying ultrasonic vibration to the print head 2 to prevent the toner insertion hole 23 from being clogged with toner.

FIG. 14 shows a method of manufacturing the print head 2.

First, a double-sided copper-clad printed board having copper foils formed on both sides of an insulating layer 20 made of, for example, a polyimide polymer material is prepared. Then, the second electrode 22 is formed on one surface of the insulating layer 20 by removing the non-electrode forming portions of the copper foil on both surfaces of the insulating layer 20 by etching.
The first electrode 21 is formed on the other surface of the insulating layer 20 (FIG. 14A).

Next, circular holes 23a and 23b are formed at the intersections of the second electrode 22 and the first electrode 21 by the etching process (FIG. 14).
(B)).

Next, one of the second electrode 22 and the first electrode 21 is irradiated with a laser such as an excimer laser to the insulating layer 20 through a mask so that the holes 23a and 23b are communicated with the insulating layer 20. The hole 23c is opened to form the toner insertion hole 23 (FIGS. 14C and 14D).

FIG. 15 shows a processing device for making a hole by an excimer laser.

From the laser oscillator 101, the beam size is about 10 mm × 20 mm and the pulse energy is 200 m.
A beam of about J and a wavelength of 248 nm (KrF) is output.

The beam output from the laser oscillator 101 passes through an attenuator 102 for adjusting the power, an expander 103 for converting the beam cross section into a square, and a homogenizer 104 for uniformizing the power in the beam cross section. The beam that has passed through the homogenizer 104 is shaped by a mask 105 and then reflected by a total reflection mirror 106 so that its optical axis is directed to the work surface (surface of the insulating layer 20) W. The beam reflected by the total reflection mirror 106 is condensed on the work surface W by the condensing lens 107, so that a hole is formed. The focused beam involved in processing has an energy density of about 1 J / cm ² and a processing area of about 3 mm × 3 mm.

[0014] FIG. 16 shows the mask 105. Ma
A part of the pattern of the toner insertion hole 23 is provided on the disk 105.
Holes 110 of the same pattern as
It In FIG. 10, the area within the broken line B is the beam size.
is there. In this mask 105, a total of 40 (8 columns x 5 rows)
A hole 110 is opened. That is, 40 at a time
The beam can be applied to the work surface W. Being able to irradiate at once
The number of frames is the magnification of the condenser lens 107 (
Gee density is determined) and the laser oscillator 101 outputs
Depending on the size of the beam homogenized by various optical elements
Decided.

Regarding the diameter of each hole 110 of the mask 105, the diameter of the toner insertion hole 23 is set to 160 μm, the irradiation beam diameter on the work surface W is set to 200 μm in consideration of the positioning margin during irradiation, and the condenser lens 107 is used. If the magnification of 3 is 3, it becomes 600 μm.

[0016]

By the way, the mask 10 is used.
In the case of forming the beam by using No. 5, as shown in FIG. 16, among the beams B incident on the mask 105, the beam that does not pass through the mask 105 does not participate in the processing, so that the processing efficiency is very poor.

For example, the mask 105 has 10 mm × 10
If a beam of about mm is irradiated and 40 holes with a diameter of 0.6 mm are made in the mask 105,
The processing efficiency η is about 11% as shown in the following equation.

[0018]

(1) η = (0.3 ² × π × 40) / (10 × 10)
= 0.113

That is, about 90% of the beam incident on the mask 105 is not involved in the processing.

An object of the present invention is to provide a laser processing apparatus which can perform laser processing with high processing efficiency.

[0021]

A first laser processing apparatus according to the present invention comprises a first surface parallel to a laser beam incident direction,
A light reflector is provided which has a stepwise step surface in which a second surface inclined by a predetermined angle with respect to the laser light incident direction appears alternately, and the second surface is formed as a light reflecting surface. A plurality of processing beams reflected by the respective second surfaces are generated by injecting laser light into the.

The light reflector includes, for example, a plurality of columnar bodies which extend in parallel to the laser light incident direction and whose tip is formed on the second surface inclined by a predetermined angle with respect to the laser light incident direction. The columnar bodies are arranged in a plurality of rows and a plurality of columns when viewed from the laser beam incident direction, and the position of the second surface of the columnar body group arranged in the laser beam reflection direction is changed stepwise. To be

The second laser processing apparatus according to the present invention is
A surface provided with a plurality of light-transmissive members having a surface inclined at a predetermined angle with respect to the laser light incident direction, and a surface arranged at a predetermined angle with respect to the laser light incident direction in each light-transmissive member. , A plurality of light reflection parts are formed,
The light-reflecting members are combined to form a light-reflecting member so that the light-reflecting portions of the respective light-transmitting members do not overlap with each other when viewed from the laser-light incident direction. By this, a plurality of processing beams reflected by the respective light reflecting portions are generated.

On the surface of each light transmitting member which is inclined with respect to the laser light incident direction by a predetermined angle, for example,
A plurality of light reflecting portions are formed in the same pattern in each light transmitting member in a plurality of rows and a plurality of columns when viewed from the laser light incident direction. And, between each light transmitting member,
The respective light transmissive members are combined so that the light reflecting portions arranged in the laser light reflecting direction are displaced in the laser light reflecting direction when viewed from the laser light incident direction.

A third laser processing apparatus according to the present invention is
2 arranged at a predetermined angle with respect to the laser beam incident direction
A light-transmissive member having two surfaces, and a plurality of light-transmissive members, which are inclined at a predetermined angle with respect to the laser light incident direction, are arranged so as not to overlap with each other when viewed from the laser light incident direction. Light reflecting portions are respectively formed, and a plurality of processing beams reflected by the respective light reflecting portions are generated by making laser light incident on the light transmitting member.

On the two surfaces of the light transmissive member which are inclined at a predetermined angle with respect to the laser light incident direction, for example, a plurality of light reflections are provided in a plurality of rows and a plurality of columns when viewed from the laser light incident direction. The parts are formed in the same pattern on each surface. The light reflecting portions on both sides are arranged so that the light reflecting portions arranged in the laser light reflecting direction are displaced from each other in the laser light reflecting direction when viewed from the laser light incident direction.

[0027]

In the first laser processing apparatus according to the present invention, the step-like step surface in which the first surface parallel to the laser light incident direction and the second surface inclined by a predetermined angle with respect to the laser light incident direction appear alternately. And a light reflector having a second surface formed as a light reflecting surface is provided. When a laser beam is made incident on this light reflector, a plurality of processing beams reflected by each second surface are generated.

In the second laser processing apparatus according to the present invention, a plurality of light transmissive members having a surface arranged at a predetermined angle with respect to the laser light incident direction are provided. A plurality of light reflecting portions are formed on the surfaces of the respective light transmissive members that are inclined with respect to the laser light incident direction by a predetermined angle. The light reflectors are formed by combining the light transmissive members so that the light reflection portions of the light transmissive members do not overlap with each other when viewed from the laser light incident direction. When a laser beam is made incident on the light reflector, a plurality of processing beams reflected by the respective light reflectors are generated.

In the third laser processing apparatus according to the present invention, the light transmissive member having two surfaces arranged at a predetermined angle with respect to the laser light incident direction is provided. A plurality of light reflecting portions are formed on the two surfaces of the light transmissive member that are inclined at a predetermined angle with respect to the laser light incident direction so as not to overlap with each other when viewed from the laser light incident direction. When a laser beam is incident on the light transmissive member, a plurality of processing beams reflected by the respective light reflecting portions are generated.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a laser processing apparatus for processing a toner insertion hole of a print head of a powder jet image forming apparatus will be described below with reference to FIGS.

FIG. 1 shows a laser processing apparatus. In FIG. 1, the same parts as those in FIG. 15 are designated by the same reference numerals and the description thereof will be omitted.

In this laser processing apparatus, a light reflector 200 is used instead of the mask 105 and the total reflection mirror 106 shown in FIG.

As shown in FIGS. 2 and 3, the light reflector 200 includes a substrate 210 and a plurality of columnar bodies 220 extending from the substrate 210 in the direction opposite to the incident direction of the beam B. In this example, the light reflector 200 includes 88 columnar bodies 2.
Equipped with 20. The columnar body 220 is made of glass, metal, or the like.

Each columnar body 220 is formed in an arrangement of 8 columns × 11 rows when viewed from the direction in which the beam B is incident. The columnar bodies 220 in each row are formed at a lower position toward the left side so that the columnar bodies 220 are leftwardly downward when viewed from the direction in which the beam B is incident. The columnar bodies 220 in the same row have the same length. The columnar body 220 in the lower row has a shorter length.

The diameter of each columnar body 220 is 60 in this example.
0 μm, and the tip of the
A total reflection surface 221 inclined at 5 ° is formed. The total reflection surface 221 is formed by coating the tip surface of the columnar body 220 with, for example, a dielectric film.

When the beam B is incident on such a light reflector 200, as shown in FIG. 4, the beam is reflected by the total reflection surface 221 at the tip of each columnar body 220. Each columnar body 22
The beam reflected by the total reflection surface 221 at the front end of 0 is focused on the work surface (surface of the insulating layer 20 of the print head 2) W by the condenser lens 107, and perforation processing is performed by this.

In this example, the magnification of the condenser lens 107 is 3
And the diameter of each beam on the work surface W is 200μ.
m. In addition, in this example, the insulating layer 20 has eight layers at a time.
The toner insertion holes 23 of (column × 11 rows) can be opened.
The cross section of the beam B incident on the light reflector 200 is 10 m.
Assuming a square of m × 10 mm, the processing efficiency η is
It becomes like the following formula.

[0038]

(2) η = (0.3 ² × π × 88) / (10 × 10)
= 0.249

That is, the processing efficiency η is about 25%, which is higher than the processing efficiency of about 11% of the conventional laser processing apparatus shown in FIG.

Further, by performing processing by the laser processing apparatus of FIG. 1, the processing area that can be processed at one time becomes large, that is, the number of toner insertion holes 23 that can be processed at one time increases, and all the toner insertion holes 23 can be processed. It is possible to reduce the time required to process the.

FIG. 5 shows a modification of the light reflector.

The light reflector 300 is a combination of a first light transmissive member 311 and a second light transmissive member 312, and its cross section is a right-angled isosceles triangle as a whole.

The first light transmissive member 311 has a cross section of an isosceles right triangle, and a surface S1 corresponding to the hypotenuse thereof.
Is inclined at 45 ° with respect to the incident direction of the beam B.

The second light transmissive member 312 has a trapezoidal cross section, and the surface corresponding to the upper bottom thereof is aligned with the surface corresponding to the hypotenuse of the cross section of the first light transmissive member 311. And is combined with the first light transmissive member 311.
The surface S2 corresponding to the lower bottom of the cross section of the second light transmissive member 312 is, with respect to the plane orthogonal to the incident direction of the beam B,
It is inclined at 45 °.

The first light transmitting member 311 and the second light transmitting member 312 are made of a material having a high light transmittance such as synthetic quartz glass. Then, the first light transmissive member 3
On the surface S1 of 11, the beam B is
48 light reflecting portions 321 are formed in an arrangement pattern of 8 columns and 6 rows when viewed from the incident direction of. Further, as shown by the solid line in FIG. 6, 48 light reflection portions 322 are formed on the surface S2 of the second light transmissive member 312 in an arrangement pattern of 8 columns and 6 rows as viewed from the incident direction of the beam B. Has been done. Then, as shown in FIG. 6, when viewed from the incident direction of the beam B,
As a whole, the arrangement pattern of 8 columns and 12 rows,
The light-reflecting portion 321 of the first light-transmissive member 311 and the light-reflecting portion 322 of the second light-transmissive member 312 are formed at positions vertically offset from each other (light-reflecting direction).

When the beam B is incident on such a light reflector 300, as shown in FIG.
The beam is reflected by each of the light reflecting portions 321 and 322 of the first and the third 312. The beams reflected by the respective light reflecting portions 321 and 322 are condensed on the work surface W by the condenser lens 107,
As a result, punching is performed.

In this example, the magnification of the condenser lens 107 is 3
And the diameter of each beam on the work surface W is 200μ.
m. In addition, in this example, the insulating layer 20 has eight layers at a time.
The toner insertion holes 23 of (column × 12 rows) can be opened.

When the incident beam enters the inside of the second light transmissive member 312 from the surface S2 of the second light transmissive member 312, and at the light reflecting portion 322 of the first light transmissive member 311.
When the light reflected by is emitted from the surface S2 of the second light transmissive member 312, its beam incident surface and beam emitting surface are inclined with respect to the optical axis of the beam directed to each surface. Therefore, refraction of light occurs.

When such refraction of light poses a problem in optical design, as in the light transmissive member 400 shown in FIG.
The beam entrance surface and the beam exit surface of the surface S2 of the second light transmissive member 312 may be formed on the flat surfaces 331 and 332 that are perpendicular to the optical axes of the entrance beam and the exit beam, respectively. In FIG. 7, the same parts as those in FIG. 5 are designated by the same reference numerals and the description thereof will be omitted.

By the way, two light transmissive members 311 and 31 such as the light reflectors 300 and 400 shown in FIG. 5 or FIG.
By combining the two, each reflecting portion 32
When obtaining the reflection part pattern in which 1 and 322 are combined, the two light transmissive members 311 and 312 must be aligned with high accuracy. Therefore, only one light transmissive member having two surfaces parallel to each other may be used, and the reflective portions may be formed on the two surfaces parallel to each other of the light transmissive member. For example, in the light reflector 300 of FIG. 5, the surface S of the second light transmissive member 322 is
The light reflecting portion may be formed on the surface parallel to 2 in the same pattern as the reflecting portion formed on the surface S1 of the first light transmitting member 322, and the second light transmitting member 312 may be omitted.

In the above embodiment, the number of processed holes is increased in the vertical direction of the cross section of the beam B, but the number of processed holes is also increased in the horizontal and vertical directions of the cross section of the beam B. Can be made.

That is, as shown in FIG. 8, first, the beam B1 is directed to the first stage light reflector 5 having a stepwise cross section.
Reflected at 01, a vertically split beam B2 is obtained. Next, the beam B2 is reflected by the second stage light reflector 502 having a stepwise cross section to obtain a horizontally divided beam B3.

[0053]

According to the present invention, it is possible to obtain a laser processing apparatus capable of performing laser processing with high processing efficiency.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a configuration of a laser processing apparatus.

FIG. 2 is a partial perspective view showing a light reflector 200.

3 is a front view showing a light reflector 200. FIG.

FIG. 4 is a cross-sectional view showing how a beam is reflected by a light reflector 200.

5 is a cross-sectional view showing a light reflector 300. FIG.

6 is a front view showing a light reflector 300. FIG.

7 is a cross-sectional view showing a light reflector 400. FIG.

FIG. 8 is a schematic diagram showing a method of obtaining a plurality of beams divided in the vertical and horizontal directions by reflecting the beams by a light reflector in two steps.

FIG. 9 is a configuration diagram showing a schematic configuration of a powder jet image forming apparatus.

FIG. 10 is a partially enlarged plan view showing the arrangement of first electrodes and second electrodes in the print head.

11 is a cross-sectional view taken along the line bb of FIG.

FIG. 12 is a partially enlarged perspective view of the print head.

FIG. 13 is a time chart showing changes in applied voltage to each first electrode.

FIG. 14 is a process chart showing a manufacturing process of a conventional print head.

FIG. 15 is a configuration diagram showing a configuration of a conventional laser processing apparatus.

16 is a front view showing the mask 105. FIG.

17 is a total reflection mirror 106 that passes through the mask 105. FIG.
It is a schematic diagram which shows a mode that a beam is reflected by.

[Explanation of symbols]

 101 laser oscillator 105 mask 106 total reflection mirror 200, 300, 400, 501, 502 light reflector 220 columnar body 221 light reflecting surface 311, 312 light transmissive member 321, 322 light reflecting section

Claims (6)

[Claims] 1. A first surface parallel to the laser light incident direction and a second surface inclined by a predetermined angle with respect to the laser light incident direction,
A light reflector having alternating stepped surfaces and a second surface formed on the light reflecting surface is provided, and a laser beam is incident on this light reflector to be reflected by each second surface. A laser processing device that generates multiple processing beams. 2. The light reflector comprises a plurality of columnar bodies extending parallel to the laser light incident direction and having a tip end formed on a second surface inclined by a predetermined angle with respect to the laser light incident direction. The body is arranged in a plurality of rows and a plurality of columns when viewed from the laser light incident direction, and the position of the second surface of the columnar body group arranged in the laser light reflection direction changes stepwise. The laser processing device described. 3. A plurality of light transmissive members each having a surface arranged to be inclined at a predetermined angle with respect to the laser light incident direction, wherein each light transmissive member is inclined at a predetermined angle with respect to the laser light incident direction. A plurality of light reflecting parts are formed on the surface that is arranged as a light reflecting member, and each light transmitting member is combined so that the light reflecting parts in each light transmitting member do not overlap when viewed from the laser light incident direction. A laser processing apparatus in which a body is configured and a plurality of processing beams reflected by the respective light reflecting portions are generated by making laser light incident on the light reflector. 4. A plurality of light reflecting portions arranged in a plurality of rows and a plurality of columns when viewed from the laser light incident direction on a surface of each light transmitting member that is inclined at a predetermined angle with respect to the laser light incident direction. Is formed in the same pattern in each light-transmitting member, between each light-transmitting member, the light reflection portion arranged in the reflection direction of the laser light, in the reflection direction of the laser light when viewed from the laser light incident direction. The laser processing apparatus according to claim 3, wherein the respective light transmissive members are combined so as to be displaced. 5. A light transmissive member having two surfaces arranged at a predetermined angle with respect to the laser light incident direction, the light transmissive member being inclined at a predetermined angle with respect to the laser light incident direction. A plurality of light-reflecting portions are respectively formed on the two arranged surfaces so as not to overlap each other when viewed from the laser-light incident direction. A laser processing apparatus that generates a plurality of reflected processing beams. 6. The two surfaces of the light transmissive member, which are inclined with respect to the laser light incident direction by a predetermined angle, have a plurality of light reflections in a plurality of rows and a plurality of columns when viewed from the laser light incident direction. The parts are respectively formed in the same pattern on each surface, and between each surface, the light reflecting portions arranged in the reflection direction of the laser light are shifted in the reflection direction of the laser light when viewed from the laser light incident direction, The laser processing apparatus according to claim 5, wherein the light reflecting portions on both sides are arranged.