JPH082576Y2 - 極細流路層流型流量計 - Google Patents

極細流路層流型流量計

Info

Publication number
JPH082576Y2
JPH082576Y2 JP8781890U JP8781890U JPH082576Y2 JP H082576 Y2 JPH082576 Y2 JP H082576Y2 JP 8781890 U JP8781890 U JP 8781890U JP 8781890 U JP8781890 U JP 8781890U JP H082576 Y2 JPH082576 Y2 JP H082576Y2
Authority
JP
Japan
Prior art keywords
laminar flow
flow meter
flow
less
matrix
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8781890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445925U (OSRAM
Inventor
茂 柳原
Original Assignee
株式会社司測研
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社司測研 filed Critical 株式会社司測研
Priority to JP8781890U priority Critical patent/JPH082576Y2/ja
Publication of JPH0445925U publication Critical patent/JPH0445925U/ja
Application granted granted Critical
Publication of JPH082576Y2 publication Critical patent/JPH082576Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP8781890U 1990-08-22 1990-08-22 極細流路層流型流量計 Expired - Lifetime JPH082576Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8781890U JPH082576Y2 (ja) 1990-08-22 1990-08-22 極細流路層流型流量計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8781890U JPH082576Y2 (ja) 1990-08-22 1990-08-22 極細流路層流型流量計

Publications (2)

Publication Number Publication Date
JPH0445925U JPH0445925U (OSRAM) 1992-04-20
JPH082576Y2 true JPH082576Y2 (ja) 1996-01-29

Family

ID=31820514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8781890U Expired - Lifetime JPH082576Y2 (ja) 1990-08-22 1990-08-22 極細流路層流型流量計

Country Status (1)

Country Link
JP (1) JPH082576Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192220A (ja) * 2008-02-12 2009-08-27 Hitachi Metals Ltd 流量センサおよびこれを用いた質量流量制御装置

Also Published As

Publication number Publication date
JPH0445925U (OSRAM) 1992-04-20

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