JPH08250880A - Cooling apparatus for electronic circuit - Google Patents

Cooling apparatus for electronic circuit

Info

Publication number
JPH08250880A
JPH08250880A JP5542695A JP5542695A JPH08250880A JP H08250880 A JPH08250880 A JP H08250880A JP 5542695 A JP5542695 A JP 5542695A JP 5542695 A JP5542695 A JP 5542695A JP H08250880 A JPH08250880 A JP H08250880A
Authority
JP
Japan
Prior art keywords
cooling
electronic circuit
semiconductor element
circuit board
heat generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5542695A
Other languages
Japanese (ja)
Inventor
Kazuhisa Mizuguchi
和久 水口
Takahiro Oguro
崇弘 大黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Microcomputer System Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Microcomputer System Ltd, Hitachi Ltd filed Critical Hitachi Microcomputer System Ltd
Priority to JP5542695A priority Critical patent/JPH08250880A/en
Publication of JPH08250880A publication Critical patent/JPH08250880A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE: To efficiently cool by a minimum gas volume even if there is a remark able difference among heat from a plurality of semiconductor elements on an electronic circuit board. CONSTITUTION: A semiconductor element 13 large by generating heat and a semiconductor element 14 having a small heat generation are supposed to be mounted on an electronic circuit board 11. A cooling resistor board 12 is placed windward the semiconductor element 14 having a small heat generation which does not need much cooling gas volume. Thus, a part of fluid for cooling the semiconductor element with a smaller heat generation is belocked so that more cooling fluid can be led to the semiconductor element 14 with a larger heat generation. Since a distribution of pressure resistance of the cooling fluid inside the electronic circuit board can be varied and a distribution of gas volume inside the board can freely be changed, thereby cooling an electronic circuit highly efficiently.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子回路の冷却装置に
関し、特に、半導体素子チップあるいは集積回路チップ
から発生する熱を高効率に除去することを可能にした電
子回路の冷却装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic circuit cooling device, and more particularly to an electronic circuit cooling device capable of efficiently removing heat generated from a semiconductor element chip or an integrated circuit chip.

【0002】[0002]

【従来の技術】電子回路の冷却装置に関する従来技術と
して、例えば、特開昭60−108189号公報等に記
載された技術が知られている。この従来技術は、冷却し
ようとする電子回路基板の平均通風面積により冷却流体
の圧力損失を求め、通風部に圧力調整手段を設けること
により冷却効率の最適化を図るというものである。
2. Description of the Related Art As a conventional technique relating to a cooling device for an electronic circuit, for example, a technique disclosed in Japanese Patent Laid-Open No. 60-108189 is known. In this conventional technique, the pressure loss of the cooling fluid is obtained from the average ventilation area of the electronic circuit board to be cooled, and the cooling efficiency is optimized by providing a pressure adjusting means in the ventilation section.

【0003】[0003]

【発明が解決しようとする課題】前記従来技術は、電子
回路基板内部の冷却流体の風量分布比を任意に変化させ
ることができないため、電子回路基板に実装された複数
の半導体素子の発熱量に極端な差がある場合、発熱量の
大きい半導体素子に合わせて、必要な冷却風量を設定し
なければならず、このため、他の部分では不必要な大風
量が要求されるという問題点を有している。
In the above prior art, since the air flow rate distribution ratio of the cooling fluid inside the electronic circuit board cannot be changed arbitrarily, the heat generation amount of a plurality of semiconductor elements mounted on the electronic circuit board is reduced. If there is an extreme difference, it is necessary to set the required cooling air flow rate according to the semiconductor element that generates a large amount of heat, and this causes the problem that an unnecessary large air flow rate is required in other parts. are doing.

【0004】また、前記従来技術は、大発熱量の半導体
素子を冷却しようとすると、大風量が要求され、それに
伴い、ファンの大形化による装置規模の拡大、騒音の増
大、ファン自身の消費電力の増大等が生じるという問題
点を有している。
Further, in the above-mentioned prior art, when trying to cool a semiconductor element having a large heat generation amount, a large amount of air is required, and accordingly, the size of the fan is enlarged to increase the device scale, the noise is increased, and the fan itself is consumed. There is a problem that an increase in electric power occurs.

【0005】さらに、前記従来技術は、冷却風量の調節
のために冷却抵抗板が取り付けられるが、冷却抵抗板を
電子回路基板に直接取り付ける方法が最も単純な構造と
して採用されている。このため、電子回路基板内部の配
線の都合あるいは半導体素子の実装位置の制約により、
冷却抵抗板の取り付け穴あるいは直付けができない場合
があるという問題点を生じる。
Further, in the above-mentioned prior art, the cooling resistance plate is attached for adjusting the cooling air volume, but the method of directly attaching the cooling resistance plate to the electronic circuit board is adopted as the simplest structure. For this reason, due to wiring inside the electronic circuit board or restrictions on the mounting position of the semiconductor element,
There arises a problem that the cooling resistance plate may not be directly mounted or attached.

【0006】本発明の目的は、前記従来技術の問題点を
解決し、電子回路基板に実装された複数個の半導体素子
の発熱量に顕著な差がある場合にも、発熱量の大きい半
導体素子にターゲットを合わせて全体の冷却風量の設計
をする必要がなく、それぞれの半導体素子の発熱量に合
わせた風量配分の最適化が可能で、必要最低限の風量に
より効率のよい冷却を行うことができる電子回路の冷却
装置を提供することにある。
An object of the present invention is to solve the above-mentioned problems of the prior art, and even when there is a significant difference in the amount of heat generated by a plurality of semiconductor elements mounted on an electronic circuit board, a semiconductor element having a large amount of heat generated. It is not necessary to design the total cooling air volume by matching the target with the target, and it is possible to optimize the air volume distribution according to the heat generation amount of each semiconductor element, and it is possible to perform efficient cooling with the minimum required air volume. An object of the present invention is to provide a cooling device for an electronic circuit that can be used.

【0007】[0007]

【課題を解決するための手段】本発明によれば前記目的
は、電子回路を構成する電子回路基板上に配置される半
導体素子に対する風量分布を各半導体素子毎に任意に調
整できるように、電子回路基板内部に冷却抵抗板を設置
し、冷却抵抗板を、電子回路基板に直付け、あるいは、
冷却板取り付け板を用いて取り付け、電子回路基板内の
任意の位置に実装し、発熱量の小さな半導体素子を冷却
する流体の一部をせき止め、発熱量の大きな半導体素子
に、より多くの冷却流体を誘導することにより達成され
る。
According to the present invention, the above-mentioned object is to provide an electronic device capable of arbitrarily adjusting the air flow distribution for each semiconductor device arranged on an electronic circuit board constituting an electronic circuit. Install a cooling resistor plate inside the circuit board and attach the cooling resistor plate directly to the electronic circuit board, or
Cooling plate Mounted using a mounting plate and mounted at an arbitrary position in the electronic circuit board to block part of the fluid that cools the semiconductor element with a small heat value, and to use more cooling fluid for a semiconductor element with a large heat value. It is achieved by inducing.

【0008】[0008]

【作用】電子回路基板内部に冷却抵抗板を設置すること
により、基板内部の冷却流体に圧力分布の差を生じさせ
ることができる。本発明は、これにより、風量分布の配
分を積極的に変更することができ、基板内部の全体の風
量が少なくても部分的に大風量を得ることを可能にでき
るので、大風量が要求される大発熱量の半導体素子を効
果的に冷却することが可能となる。
By installing the cooling resistance plate inside the electronic circuit board, it is possible to generate a pressure distribution difference in the cooling fluid inside the board. According to the present invention, it is possible to positively change the distribution of the air volume distribution, and it is possible to partially obtain a large air volume even if the entire air volume inside the substrate is small. Therefore, a large air volume is required. It is possible to effectively cool a semiconductor element having a large amount of heat generation.

【0009】また、冷却抵抗板を基板に直接取り付ける
ことができない場合、基板サイドに冷却板取り付け板を
設置し、そこに冷却抵抗板を橋渡しして取り付けるよう
にすることにより、任意の位置に冷却抵抗板を取り付け
ることができる。
Further, when the cooling resistance plate cannot be directly attached to the substrate, a cooling plate attachment plate is installed on the side of the substrate, and the cooling resistance plate is attached to the cooling plate to bridge the cooling resistance plate. A resistance plate can be attached.

【0010】前述のように、本発明は、風量分布が、そ
こに流れる冷却気体の圧力抵抗分布の勾配差によって決
まり、流体は圧力抵抗の大きいところで流れにくく、逆
に、圧力抵抗の小さいところで流れやすいという性質を
利用し、電子回路基板内部に任意の冷却抵抗板を設置す
ることにより冷却気体の圧力抵抗分布を制御し、任意の
風量分布を生成することができるものである。
As described above, according to the present invention, the air flow distribution is determined by the gradient difference in the pressure resistance distribution of the cooling gas flowing therethrough, and it is difficult for the fluid to flow where the pressure resistance is large, and conversely when the pressure resistance is small. Utilizing the property of being easy, by installing an arbitrary cooling resistance plate inside the electronic circuit board, it is possible to control the pressure resistance distribution of the cooling gas and generate an arbitrary air volume distribution.

【0011】[0011]

【実施例】以下、本発明による電子回路の冷却装置の一
実施例を図面により詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an electronic circuit cooling device according to the present invention will be described in detail below with reference to the drawings.

【0012】図1は電子回路基板に設置した設けた冷却
抵抗板による風量配分の様子を説明する図、図2は冷却
抵抗板による冷却効果を説明する図、図3は電子回路基
板に対する冷却抵抗板の具体的な取り付け例を示す本発
明の実施例を示す図である。図1、図3において、11
は電子回路基板、12は冷却抵抗板、13、14は半導
体素子、33は冷却板取り付け板、34はねじである。
FIG. 1 is a diagram for explaining the distribution of air volume by a cooling resistance plate provided on an electronic circuit board, FIG. 2 is a diagram for explaining the cooling effect by the cooling resistance plate, and FIG. 3 is a cooling resistance for the electronic circuit board. It is a figure which shows the Example of this invention which shows the specific example of attachment of a board. In FIGS. 1 and 3, 11
Is an electronic circuit board, 12 is a cooling resistance plate, 13 and 14 are semiconductor elements, 33 is a cooling plate mounting plate, and 34 is a screw.

【0013】電子回路基板11には、図1に示すよう
に、大発熱量の半導体素子13と小発熱量の半導体素子
14とが実装されており、この電子回路基板11上の半
導体素子13、14の冷却を行うものとする。本発明の
一実施例は、冷却のために流体(空気)の大風量を要求
する半導体素子13に大風量を配分するため、図1に示
すように、小発熱量の半導体素子14の風上に、任意の
材質で作られた冷却抵抗板12を実装して構成される。
冷却抵抗板12は、小発熱量の半導体素子14を冷却す
る流体の一部をせき止め、発熱量の大きな半導体素子1
3に、より多くの冷却流体を誘導する。
As shown in FIG. 1, a semiconductor element 13 having a large heat generation amount and a semiconductor element 14 having a small heat generation amount are mounted on the electronic circuit board 11, and the semiconductor element 13 on the electronic circuit board 11 is mounted on the electronic circuit board 11. 14 shall be cooled. In one embodiment of the present invention, a large amount of air is distributed to the semiconductor device 13 that requires a large amount of fluid (air) for cooling, so that as shown in FIG. In addition, the cooling resistance plate 12 made of an arbitrary material is mounted and configured.
The cooling resistance plate 12 blocks a part of the fluid for cooling the semiconductor element 14 having a small heat generation amount, and the semiconductor element 1 having a large heat generation amount.
Induce more cooling fluid into 3.

【0014】前述の位置に冷却抵抗板12を設置した電
子回路基板12に対して、いま、任意のFAN出力特性
を持つFANにより、電子回路基板11の入り口から冷
却流体として空気を送風するものとする。このとき、電
子回路基板11の入り口の全風量をQ0、そのときの電
子回路基板11の全体圧力抵抗値をP0とする。また、
大発熱量の半導体素子13に対する風量をQ1、そのと
きの圧力抵抗値をP1、小発熱量の半導体素子14に対
する風量をQ2、そのときの圧力抵抗値をP2とする。
With respect to the electronic circuit board 12 in which the cooling resistance plate 12 is installed at the above-mentioned position, it is assumed that a fan having an arbitrary FAN output characteristic blows air as a cooling fluid from the inlet of the electronic circuit board 11. To do. At this time, the total air volume at the entrance of the electronic circuit board 11 is Q0, and the total pressure resistance value of the electronic circuit board 11 at that time is P0. Also,
The air flow rate with respect to the semiconductor element 13 having a large heat generation amount is Q1, the pressure resistance value at that time is P1, the air flow rate with respect to the semiconductor element 14 having a small heat generation amount is Q2, and the pressure resistance value at that time is P2.

【0015】前述した条件の下での風量配分は図2に示
すような関係となる。すなわち、入り口の風量Q0は、
大発熱量の半導体素子13に対する風量Q1と小発熱量
の半導体素子14に対する風量Q2の合計の風量であ
る。一方、電子回路基板11上に流れる風量の配分比
は、内部圧力勾配の差によって決まるので、小発熱量の
半導体素子14の風上側に取り付けた冷却抵抗板12の
形状を変えることにより変化させることができる。
The air volume distribution under the above-mentioned conditions has a relationship as shown in FIG. That is, the air volume Q0 at the entrance is
It is the total air volume of the air volume Q1 for the semiconductor element 13 having a large heat generation amount and the air volume Q2 for the semiconductor element 14 having a small heat generation amount. On the other hand, the distribution ratio of the amount of airflow flowing over the electronic circuit board 11 is determined by the difference in the internal pressure gradient, so it can be changed by changing the shape of the cooling resistance plate 12 mounted on the windward side of the semiconductor element 14 having a small heat generation amount. You can

【0016】例えば、図2に示すように、冷却抵抗板1
2により、小発熱量の半導体素子14に対する圧力抵抗
値P2をP2’のように変化させることができ、それに
伴い風量Q2もQ2’に変化させることができる。そし
て、風量Q1とQ2との配分比は、冷却抵抗板12の圧
力抵抗値を増減させるにより自由に変えることができる
ので、小発熱量の半導体素子14に対する圧力抵抗値P
2を大きくするほど、大発熱量の半導体素子13に対す
る風量Q1が増加し、大発熱量の半導体素子13の冷却
効率を向上させることができる。
For example, as shown in FIG. 2, the cooling resistance plate 1
By 2, the pressure resistance value P2 with respect to the semiconductor element 14 having a small heat generation amount can be changed like P2 ′, and accordingly, the air flow rate Q2 can also be changed to Q2 ′. Since the distribution ratio between the air flow rates Q1 and Q2 can be freely changed by increasing or decreasing the pressure resistance value of the cooling resistance plate 12, the pressure resistance value P for the semiconductor element 14 having a small heat generation amount.
As 2 is increased, the air flow rate Q1 for the semiconductor element 13 having a large heat generation amount is increased, and the cooling efficiency of the semiconductor element 13 having a large heat generation amount can be improved.

【0017】次に、図3を参照して本発明の実施例を電
子回路基板に対する冷却抵抗板の具体的な取り付け例に
より説明する。
Next, with reference to FIG. 3, an embodiment of the present invention will be described with reference to a specific mounting example of a cooling resistance plate on an electronic circuit board.

【0018】図3(a)に示す例は、略L字状に形成さ
れ基板取り付け用の鍔を有する冷却抵抗板12を、電子
回路基板11の側部に設けた冷却板取り付け板33と電
子回路基板11との間にねじ34により取り付けた例で
ある。
In the example shown in FIG. 3 (a), a cooling resistance plate 12 having a substantially L-shape and having a flange for mounting a substrate is provided on a side portion of the electronic circuit board 11 with a cooling plate mounting plate 33 and an electronic device. In this example, the screw 34 is attached to the circuit board 11.

【0019】また、図3(b)に示す例は、矩形状の冷
却抵抗板12を電子回路基板11上に、ねじ34により
直接取り付けた例である。
Further, the example shown in FIG. 3B is an example in which the rectangular cooling resistance plate 12 is directly attached to the electronic circuit board 11 by the screw 34.

【0020】さらに、図3(c)に示す例は、電子回路
基板11に直接冷却抵抗板を取り付けることができない
場合の冷却抵抗板の取り付け例である。すなわち、この
例は、電子回路基板11の両側部に冷却板取り付け板3
3を設置し、これらの冷却板取り付け板33の間に冷却
抵抗板12を橋渡しするように、ねじ34により取り付
けた例である。
Further, the example shown in FIG. 3 (c) is an example of mounting the cooling resistance plate when the cooling resistance plate cannot be directly mounted on the electronic circuit board 11. That is, in this example, the cooling plate mounting plates 3 are provided on both sides of the electronic circuit board 11.
3 is installed, and the cooling resistance plate 12 is mounted between the cooling plate mounting plates 33 with the screws 34 so as to bridge the cooling resistance plates 12.

【0021】前述の図3(a)〜図3(c)に示す例
は、電子回路基板11の上に、図1に示すように半導体
素子が配置されている場合に対する例であり、小発熱量
の半導体素子14への風量が少なくなるように、冷却抵
抗板12の形状と配置位置とが設定される。そして、冷
却抵抗板は、半導体素子を冷却する流体の一部をせき止
める部分が平板、あるいは、多孔板、金網等であってよ
い。また、電子回路基板上の半導体素子の配置が、さら
に複雑になった場合にも、配置される半導体素子の発熱
量を考慮して、冷却抵抗板12の形状と配置位置とを最
適に設定すればよい。
The above-described examples shown in FIGS. 3A to 3C are examples for the case where the semiconductor element is arranged on the electronic circuit board 11 as shown in FIG. The shape and the arrangement position of the cooling resistance plate 12 are set so that the amount of air flow to the semiconductor element 14 is reduced. The cooling resistance plate may be a flat plate, a perforated plate, a wire net, or the like at a portion for stopping a part of the fluid for cooling the semiconductor element. Further, even when the arrangement of the semiconductor elements on the electronic circuit board becomes more complicated, the shape and arrangement position of the cooling resistance plate 12 should be set optimally in consideration of the heat generation amount of the arranged semiconductor elements. Good.

【0022】なお、前述の例において、ねじ34は、冷
却抵抗板を固定するのが目的であり、冷却抵抗板を固定
できる方法であれば、ねじ以外にも、ナット締め、接
着、半田付け、あるいは、溶接による直付等の方法を使
用することができる。
In the above-mentioned example, the screw 34 is intended to fix the cooling resistance plate, and if the cooling resistance plate can be fixed, besides the screw, nut tightening, adhesion, soldering, Alternatively, a method such as direct attachment by welding can be used.

【0023】[0023]

【発明の効果】以上説明したように本発明によれば、電
子回路基板に実装された複数個の半導体素子の発熱量に
顕著な差がある場合にも、発熱量の大きい半導体素子に
ターゲットを合わせて電子回路全体に対する冷却風量の
設計を行う必要がなく、それぞれの半導体素子の発熱量
に合わせた風量配分の最適化が可能となり、必要最低限
の全風量により、効率的な電子回路の冷却を行うことが
できる。
As described above, according to the present invention, even when there is a significant difference in the heat generation amount of a plurality of semiconductor elements mounted on an electronic circuit board, the target is applied to the semiconductor element having a large heat generation amount. It is not necessary to design the cooling air flow for the entire electronic circuit, and it is possible to optimize the air flow distribution according to the heat generation amount of each semiconductor element, and the effective minimum cooling of the electronic circuit It can be performed.

【0024】また、本発明によれば、冷却抵抗板の取り
付けを、電子回路基板に直付けあるいは冷却板取り付け
板を用いて、何れの方法によっても行うことができるの
で、電子回路基板内の任意の位置に冷却抵抗板を実装す
ることが可能である。
Further, according to the present invention, the cooling resistance plate can be mounted directly on the electronic circuit board or by using the cooling plate mounting plate by any method. It is possible to mount the cooling resistance plate at the position.

【図面の簡単な説明】[Brief description of drawings]

【図1】電子回路基板に設置した設けた冷却抵抗板によ
る風量配分の様子を説明する図である。
FIG. 1 is a diagram illustrating a state of air volume distribution by a cooling resistance plate provided on an electronic circuit board.

【図2】冷却抵抗板による冷却効果を説明する図であ
る。
FIG. 2 is a diagram illustrating a cooling effect of a cooling resistance plate.

【図3】電子回路基板に対する冷却抵抗板の具体的な取
り付け例を示す本発明の実施例を示す図である。
FIG. 3 is a diagram showing an example of the present invention showing a specific mounting example of a cooling resistance plate on an electronic circuit board.

【符号の説明】[Explanation of symbols]

11 電子回路基板 12 冷却抵抗板 13、14 半導体素子 33 冷却板取り付け板 34 ねじ 11 Electronic Circuit Board 12 Cooling Resistance Plate 13, 14 Semiconductor Element 33 Cooling Plate Mounting Plate 34 Screw

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 発熱量の異なる半導体素子を多数実装し
た電子回路基板を有する電子回路の冷却装置において、
発熱量の小さな半導体素子を冷却する流体の一部をせき
止め、発熱量の大きな半導体素子により多くの冷却流体
を誘導する冷却抵抗板を、発熱量の小さな半導体素子の
上流側に設置したことを特徴とする電子回路の冷却装
置。
1. A cooling device for an electronic circuit having an electronic circuit board on which a large number of semiconductor elements having different heat generation values are mounted,
A cooling resistance plate that blocks a part of the fluid that cools the semiconductor element that generates a small amount of heat and guides more cooling fluid to the semiconductor element that generates a large amount of heat is installed upstream of the semiconductor element that generates a small amount of heat. Cooling device for electronic circuits.
JP5542695A 1995-03-15 1995-03-15 Cooling apparatus for electronic circuit Withdrawn JPH08250880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5542695A JPH08250880A (en) 1995-03-15 1995-03-15 Cooling apparatus for electronic circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5542695A JPH08250880A (en) 1995-03-15 1995-03-15 Cooling apparatus for electronic circuit

Publications (1)

Publication Number Publication Date
JPH08250880A true JPH08250880A (en) 1996-09-27

Family

ID=12998262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5542695A Withdrawn JPH08250880A (en) 1995-03-15 1995-03-15 Cooling apparatus for electronic circuit

Country Status (1)

Country Link
JP (1) JPH08250880A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001347027A (en) * 2000-06-08 2001-12-18 Heiwa Corp Game machine
US6888725B2 (en) 2000-12-11 2005-05-03 Fujitsu Limited Electronics device unit
JP2011103413A (en) * 2009-11-11 2011-05-26 Fujitsu Telecom Networks Ltd Rectifying apparatus, multilayer substrate and electronic apparatus including the same, and method of cooling electronic apparatus
JP2019160892A (en) * 2018-03-09 2019-09-19 ファナック株式会社 Motor drive device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001347027A (en) * 2000-06-08 2001-12-18 Heiwa Corp Game machine
US6888725B2 (en) 2000-12-11 2005-05-03 Fujitsu Limited Electronics device unit
JP2011103413A (en) * 2009-11-11 2011-05-26 Fujitsu Telecom Networks Ltd Rectifying apparatus, multilayer substrate and electronic apparatus including the same, and method of cooling electronic apparatus
JP2019160892A (en) * 2018-03-09 2019-09-19 ファナック株式会社 Motor drive device
US11043872B2 (en) 2018-03-09 2021-06-22 Fanuc Corporation Motor driving device

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