JPH08240609A - Capacitance-type acceleration sensor - Google Patents
Capacitance-type acceleration sensorInfo
- Publication number
- JPH08240609A JPH08240609A JP4266095A JP4266095A JPH08240609A JP H08240609 A JPH08240609 A JP H08240609A JP 4266095 A JP4266095 A JP 4266095A JP 4266095 A JP4266095 A JP 4266095A JP H08240609 A JPH08240609 A JP H08240609A
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- acceleration sensor
- movable electrode
- electrode
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、加速度の変化をコンデ
ンサの容量に変換することにより加速度を検出する静電
容量式加速度センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitance type acceleration sensor which detects acceleration by converting a change in acceleration into a capacitance of a capacitor.
【０００２】[0002]
【従来の技術】ガスの遮断器等の安全装置、エアバッ
ク、車体制御などの用途に適用される静電容量式加速度
センサとして図３、図４に示す構造が知られている。図
３に示すような円板状の弾性体よりなるダイヤフラム１
０の中心の斜線を引いて示した部分が可動電極１であ
り、図４に示す固定基板３の下面の固定電極２と対向し
ている。図４に示すように可動電極１裏側には重錘体４
が接合されている。ダイヤフラム１０の外周部１１は、
固定基板３と固定ベース５の間にスペーサ６を介して挟
まれ、ねじ７により締め付けることにより固定されてい
る。スペーサ６により形成された隙間２０には一定の誘
電率を持つ空気などの気体またはシリコーン油などの液
体等が入り、固定電極２と可動電極１との間に静電容量
が発生する。静電容量は固定基板３上に図４ (ａ) のみ
に示すように搭載された電子回路部品１２よりなる信号
処理回路によって電圧に変換される。固定ベース３また
は装置全体に図４ (ｂ) に示す矢印２１方向に加速度の
エネルギーが加わったとき重錘体４の重さが慣性力とな
り、その力がダイヤフラム１０を形成している弾性体を
領域１３において変形させ、隙間２０の距離をｌ0 から
ｌ1 までｘだけ変化させる。その時同時に発生する静電
容量が変化することにより、変化した出力電圧から加速
度を測定する。2. Description of the Related Art The structure shown in FIGS. 3 and 4 is known as a capacitance type acceleration sensor applied to safety devices such as gas circuit breakers, airbags, and vehicle body control applications. A diaphragm 1 made of a disk-shaped elastic body as shown in FIG.
The shaded portion of the center of 0 is the movable electrode 1, which faces the fixed electrode 2 on the lower surface of the fixed substrate 3 shown in FIG. As shown in FIG. 4, a weight 4 is provided on the back side of the movable electrode 1.
Are joined. The outer peripheral portion 11 of the diaphragm 10 is
It is sandwiched between the fixed substrate 3 and the fixed base 5 via a spacer 6, and is fixed by tightening with a screw 7. A gas such as air having a constant dielectric constant or a liquid such as silicone oil enters the gap 20 formed by the spacer 6, and electrostatic capacitance is generated between the fixed electrode 2 and the movable electrode 1. The electrostatic capacitance is converted into a voltage by a signal processing circuit including an electronic circuit component 12 mounted on the fixed substrate 3 as shown in FIG. When acceleration energy is applied to the fixed base 3 or the entire device in the direction of the arrow 21 shown in FIG. 4 (b), the weight of the weight body 4 becomes an inertial force, and the force causes the elastic body forming the diaphragm 10 to move. The region 13 is deformed and the distance of the gap 20 is changed by x from l 0 to l 1 . At that time, the capacitance that is generated at the same time changes, and the acceleration is measured from the changed output voltage.
【０００３】[0003]
【発明が解決しようとする課題】図３、図４に示した加
速度センサでは、一定の加速度が加わった時の隙間２０
の距離ｌ1 あるいは可動電極の移動量ｘを一定にするた
め、弾性体の形成を円盤状のダイヤフラム１０として形
成している。しかし、加速度が加わった時の変形領域
は、環状の領域１３のみであり、撓みが小さいためにそ
れに伴う静電容量の変化量も小さい。その結果、微小加
速度の検出をする場合は重錘体４を重くして慣性力を大
きくするか、微小変化した静電容量を測定するかのどち
らかしかなかった。しかし、市場の要求としての軽量、
小型化に対しては重錘体４を重くするのは逆行してい
る。また微小変化した静電容量を測定するのは、変換し
た電圧をかなりの倍率で増幅しなければならず、ノイズ
の影響、重錘体のばらつきの影響などが、大きく係わっ
てきてしまい、実用化に対して困難であった。In the acceleration sensor shown in FIGS. 3 and 4, the gap 20 when a constant acceleration is applied.
In order to keep the distance l 1 or the moving amount x of the movable electrode constant, the elastic body is formed as a disk-shaped diaphragm 10. However, the deformation area when acceleration is applied is only the annular area 13, and since the bending is small, the amount of change in capacitance accompanying it is also small. As a result, when the minute acceleration is detected, the weight body 4 is made heavier to increase the inertial force, or the slightly changed capacitance is measured. But light weight as the market demands,
For downsizing, the weight 4 is made heavy. In addition, to measure a slightly changed capacitance, the converted voltage must be amplified by a considerable factor, and the influence of noise and the influence of dispersion of the weight body are greatly involved, and it is put to practical use. Was difficult against.
【０００４】本発明の目的は、上記の問題を解決し、重
錘体重量を増加させることなく微小加速度を高精度で検
出できる、すなわち高感度の静電容量式加速度センサを
提供することにある。An object of the present invention is to solve the above problems and to provide a capacitance type acceleration sensor which can detect minute acceleration with high accuracy without increasing the weight of the weight body, that is, high sensitivity. .
【０００５】[0005]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明は、固定基板上に設けられた固定電極と、
外周部が固定基板と所定の間隔を保って固定され、中央
部の裏面側に重錘体が結合された弾性体の重錘体と反対
側の表面に設けられた可動電極とが誘電体を挟んで対向
してなるコンデンサの静電容量値から、重錘体に加わる
固定基板面に垂直方向の加速度を検出する静電容量式加
速度センサにおいて、弾性体が可動電極と固定される外
周部との間では等間隔で分散配置された梁として形成さ
れたものとする。その梁が可動電極の中心を通る直線と
角度をなして交わる部分を有することも有効である。そ
の場合、梁の可動電極の中心を通る直線となす角度が直
角であることが望ましい。To achieve the above object, the present invention provides a fixed electrode provided on a fixed substrate,
The outer peripheral portion is fixed to the fixed substrate with a predetermined space, and the weight body of the elastic body in which the weight body is coupled to the back side of the central portion and the movable electrode provided on the surface on the opposite side form the dielectric body. In a capacitance type acceleration sensor that detects the acceleration in the direction perpendicular to the fixed substrate surface applied to the weight body from the capacitance value of the capacitors facing each other, the elastic body and the outer peripheral portion fixed to the movable electrode. Between them, it is assumed that they are formed as beams distributed at equal intervals. It is also effective that the beam has a portion that intersects the straight line passing through the center of the movable electrode at an angle. In that case, it is desirable that the angle with the straight line passing through the center of the movable electrode of the beam is a right angle.
【０００６】[0006]
【作用】裏面に重錘体が結合される可動電極と外周の固
定部との間の弾性体の変形する部分を梁とすることによ
り、可動電極と固定部の間隔および重錘体の重さが一定
のときに加速度が加わって重錘体の重さによって発生す
る応力が梁部に集中するため、弾性体の撓みが大きくな
る。さらに、同一加速度による弾性体の変位量を梁の幅
と長さから容易に算出することができるため、センサ感
度を梁部の幅によって制御することが可能になる。ま
た、梁に可動電極の中心を通る直線と角度をなして交わ
る部分を設けることにより、梁のたわむ部分の長さを調
整することができ、感度の一層の向上を図ることができ
る。その場合、梁のたわむ部分の長さを長くするために
は、可動電極の中心を通る直線となる角度が直角に近い
ほど有利である。[Function] By using a beam as the deformable portion of the elastic body between the movable electrode to which the weight body is coupled on the back surface and the fixed portion on the outer periphery, the distance between the movable electrode and the fixed portion and the weight of the weight body are set. Is constant, the stress generated by the weight of the weight body is concentrated on the beam portion, so that the elastic body is largely bent. Furthermore, since the displacement amount of the elastic body due to the same acceleration can be easily calculated from the width and length of the beam, the sensor sensitivity can be controlled by the width of the beam portion. Further, by providing the beam with a portion that intersects the straight line passing through the center of the movable electrode at an angle, the length of the flexible portion of the beam can be adjusted, and the sensitivity can be further improved. In that case, in order to increase the length of the flexible portion of the beam, it is advantageous that the angle of the straight line passing through the center of the movable electrode is closer to a right angle.
【０００７】[0007]
【実施例】以下、図２、図３を含めて共通の部分に同一
の符号を付した図を引用して本発明の実施例について述
べる。図１は、本発明の一実施例の加速度センサのダイ
ヤフラムを示し、弾性体であるステンレス鋼よりなる厚
さ0.２５ｍｍのダイヤフラム１０は、図４に示したよう
に固定電極２と対向する斜線を引いて示した従来と同様
の直径１６ｍｍの可動電極１となる円形部分とスペーサ
６と固定ベースに挟着される環状部１１との間が４本の
梁８で連結されている。可動電極２の裏側には、加速度
センサ装置全体の断面図である図５ (ｂ) に示すように
ステンレス鋼よりなる重錘体４がレーザ溶接により接合
されている。ねじ７によりスペーサ６、ダイヤフラム固
定部１１を介して固定ベース５に固定されている固定基
板３は、ガラスエポキシ基板またはセラミック基板によ
り形成されている。その上に搭載された電子回路部品１
２が信号処理回路を形成し、その回路にはんだ付けさ
れ、キャップ９を接着されたブッシュ１５の中のガラス
シール部１６を介して引き出される導線１４により出力
信号を取り出すことができる。キャップ９は、ベース５
に溶接、固定され、その間の空間１７には不活性ガスと
してちっ素が充てんされる。固定電極２は、銀、銅ある
いは銀パラジウム層からなり、固定基板３上に配線パタ
ーンと同時に形成される。図５ (ａ) は加速度センサ装
置の平面図である。このような構造にすることにより、
ダイヤフラム１０の外径は従来同様２３ｍｍであって
も、梁８のたわみが大きいため、微小加速度でも静電容
量の変化が大きくなる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS. 2 and 3 in which common parts are designated by the same reference numerals. FIG. 1 shows a diaphragm of an acceleration sensor according to an embodiment of the present invention. A diaphragm 10 made of elastic stainless steel and having a thickness of 0.25 mm has diagonal lines facing the fixed electrode 2 as shown in FIG. A circular portion, which is the same as the conventional one and has a diameter of 16 mm, which is the movable electrode 1 and is drawn, is connected by four beams 8 between the spacer 6 and the annular portion 11 sandwiched by the fixed base. A weight body 4 made of stainless steel is joined to the back side of the movable electrode 2 by laser welding as shown in FIG. 5 (b) which is a sectional view of the entire acceleration sensor device. The fixed substrate 3 fixed to the fixed base 5 via the spacer 6 and the diaphragm fixing portion 11 with the screw 7 is formed of a glass epoxy substrate or a ceramic substrate. Electronic circuit component 1 mounted on it
2 forms a signal processing circuit, and the output signal can be taken out by a conductor 14 which is soldered to the circuit and is drawn out through a glass seal portion 16 in a bush 15 to which a cap 9 is adhered. The cap 9 is the base 5
Are welded and fixed to the space, and the space 17 between them is filled with nitrogen as an inert gas. The fixed electrode 2 is made of a silver, copper or silver palladium layer and is formed on the fixed substrate 3 at the same time as the wiring pattern. FIG. 5A is a plan view of the acceleration sensor device. With this structure,
Even if the outer diameter of the diaphragm 10 is 23 mm as in the conventional case, since the deflection of the beam 8 is large, the change in capacitance becomes large even with a minute acceleration.
【０００８】図２に示す本発明の別の実施例の加速度セ
ンサのダイヤフラム１０では、可動電極１が一辺１６ｍ
ｍの方形であり、各辺の中央に梁８が連結されている。
図１、図２の加速度センサの感度を上げるには、梁８の
長さＬを長くするのが最も簡単な方法である。しかし、
Ｌを長くするとダイヤフラム１０の固定部１１の内径あ
るいは内辺の長さＭを大きくしなければならず、ダイヤ
フラムの寸法ひいてはセンサ全体の寸法が大きくなり、
センサ小形化の要求に反する。図６、図７は外形寸法を
大きくしないで感度を高めた本発明の実施例であり、梁
８を屈曲した形状にし、可動電極１すなわち重錘体の外
周と平行な長さＬ1 の部分８１を設けて、この部分を加
速度によりたわませる。梁８の幅ｗは約２ｍｍであり、
たわみ部８１と可動電極１およびダイヤフラム固定部１
１との間の間隔ｄも約２ｍｍである。可動電極１の外径
あるいは一辺の長さは図１、図２と同様１６ｍｍであ
り、ダイヤフラムの外径あるいは一辺の長さを図１、図
２と同様２３ｍｍであっても、たわみ部８１の長さＬ1
を変化させることにより、たわみ量を調整してセンサの
感度を任意に設定することが可能になる。In the diaphragm 10 of the acceleration sensor of another embodiment of the present invention shown in FIG. 2, the movable electrode 1 has a side of 16 m.
It is a square of m, and the beam 8 is connected to the center of each side.
To increase the sensitivity of the acceleration sensor of FIGS. 1 and 2, increasing the length L of the beam 8 is the simplest method. But,
If L is increased, the inner diameter or inner side length M of the fixed portion 11 of the diaphragm 10 must be increased, and the size of the diaphragm and thus the size of the entire sensor increases.
Contrary to the demand for smaller sensors. 6 and 7 show an embodiment of the present invention in which the external dimensions are not increased and the sensitivity is increased. The beam 8 is bent and the length L 1 is parallel to the outer periphery of the movable electrode 1, that is, the weight body. 81 is provided, and this portion is bent by acceleration. The width w of the beam 8 is about 2 mm,
Bending part 81, movable electrode 1 and diaphragm fixing part 1
The distance d between 1 and 1 is also about 2 mm. The outer diameter or the length of one side of the movable electrode 1 is 16 mm as in FIGS. 1 and 2, and the outer diameter or the length of one side of the diaphragm is 23 mm as in FIGS. Length L 1
By changing, it becomes possible to adjust the amount of deflection and set the sensitivity of the sensor arbitrarily.
【０００９】[0009]
【発明の効果】本発明によれば、中央部に重錘体が結合
され、周囲が固定される弾性体のたわむ部分を梁状にす
ることにより、同一加速度でたわみ量を大きくすること
ができ、小形で高感度の静電容量式加速度センサを得る
ことができた。さらに梁部を屈曲させ、重錘体あるいは
可動電極と固定部との間隙の長手方向に任意の長さで存
在するようにすることにより、たわみ部分を長くするこ
とができ、より感度を高くすることが可能になった。According to the present invention, the weight portion is coupled to the central portion, and the bending portion of the elastic body whose periphery is fixed is made into a beam shape, whereby the deflection amount can be increased at the same acceleration. , A compact and highly sensitive capacitive acceleration sensor was obtained. Further, by bending the beam portion so that the weight portion or the gap between the movable electrode and the fixed portion is present at an arbitrary length in the longitudinal direction, the flexible portion can be lengthened and the sensitivity is further enhanced. It has become possible.
【図１】本発明の一実施例の加速度センサに用いられた
ダイヤフラムの平面図FIG. 1 is a plan view of a diaphragm used in an acceleration sensor according to an embodiment of the present invention.
【図２】本発明の別の実施例の加速度センサに用いられ
たダイヤフラムの平面図FIG. 2 is a plan view of a diaphragm used in an acceleration sensor according to another embodiment of the present invention.
【図３】従来の静電容量式加速度センサに用いられたダ
イヤフラムの平面図FIG. 3 is a plan view of a diaphragm used in a conventional capacitive acceleration sensor.
【図４】従来の静電容量式加速度センサの動作を示し、
(ａ) が加速度０における断面図、 (ｂ) が加速度印加
時の断面図FIG. 4 shows the operation of a conventional capacitive acceleration sensor,
(a) is a sectional view at zero acceleration, and (b) is a sectional view when acceleration is applied.
【図５】本発明の実施例の加速度センサを収容した加速
度センサ装置を示し、 (ａ) が平面図、 (ｂ) が断面図5A and 5B show an acceleration sensor device accommodating an acceleration sensor according to an embodiment of the present invention, in which FIG. 5A is a plan view and FIG. 5B is a sectional view.
【図６】本発明のさらに別の実施例の加速度センサに用
いられたダイヤフラムの平面図FIG. 6 is a plan view of a diaphragm used in an acceleration sensor according to still another embodiment of the present invention.
【図７】本発明のさらに異なる実施例の加速度センサに
用いられたダイヤフラムの平面図FIG. 7 is a plan view of a diaphragm used in an acceleration sensor according to another embodiment of the present invention.
１ 可動電極 ２ 固定電極 ３ 固定基板 ４ 重錘体 ５ 固定ベース ６ スペーサ ７ ねじ ８ 梁 ８１ 梁のたわみ部 １０ ダイヤフラム １１ 固定部 １２ 電子回路部品 1 movable electrode 2 fixed electrode 3 fixed substrate 4 weight body 5 fixed base 6 spacer 7 screw 8 beam 81 beam deflection part 10 diaphragm 11 fixed part 12 electronic circuit parts
Claims (3)
部が固定基板と所定の間隔を保って固定され、中央部の
裏面側に重錘体が結合された弾性体の重錘体と反対側の
表面に設けられた可動電極とが、誘電体を挟んで対向し
てなるコンデンサの静電容量値から、重錘体に加わる固
定基板面に垂直方向の加速度を検出する静電容量式加速
度センサにおいて、弾性体が可動電極と固定される外周
部との間では等間隔で分散配置された複数の梁として形
成されたことを特徴とする静電容量式加速度センサ。1. An elastic weight body in which a fixed electrode provided on a fixed substrate and an outer peripheral portion of the fixed electrode are fixed to the fixed substrate at a predetermined distance, and a weight body is coupled to a rear surface side of a central portion. Capacitance that detects acceleration in the direction perpendicular to the fixed substrate surface added to the weight body from the capacitance value of the capacitor, which is opposed to the movable electrode on the opposite side with the dielectric material sandwiched between them. In the acceleration sensor, the capacitive acceleration sensor is characterized in that the elastic body is formed as a plurality of beams distributed at equal intervals between the movable electrode and the fixed outer peripheral portion.
して交わる部分を有する請求項１記載の静電容量式加速
度センサ。2. The capacitance type acceleration sensor according to claim 1, wherein the beam has a portion intersecting with a straight line passing through the center of the movable electrode at an angle.
が直角である請求項２記載の静電容量式加速度センサ。3. The capacitance type acceleration sensor according to claim 2, wherein an angle formed with a straight line passing through the center of the movable electrode of the beam is a right angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4266095A JPH08240609A (en) | 1995-03-02 | 1995-03-02 | Capacitance-type acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4266095A JPH08240609A (en) | 1995-03-02 | 1995-03-02 | Capacitance-type acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08240609A true JPH08240609A (en) | 1996-09-17 |
Family
ID=12642178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4266095A Pending JPH08240609A (en) | 1995-03-02 | 1995-03-02 | Capacitance-type acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08240609A (en) |
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|---|---|---|---|---|
| JP2003052690A (en) * | 2001-08-20 | 2003-02-25 | Akoo:Kk | Electrostatic capacitance type heart sound microphone by detection of acceleration with weight stuck on mobile film |
| JP2004012326A (en) * | 2002-06-07 | 2004-01-15 | Hiroaki Niitsuma | Physical quantity detector and its manufacturing method |
| WO2005111555A1 (en) * | 2004-05-18 | 2005-11-24 | Hosiden Corporation | Vibration sesor |
| WO2006082716A1 (en) * | 2005-02-01 | 2006-08-10 | Matsushita Electric Works, Ltd. | Semiconductor acceleration sensor |
| WO2007029878A1 (en) * | 2005-09-09 | 2007-03-15 | Yamaha Corporation | Capacitor microphone |
| WO2007085017A1 (en) * | 2006-01-20 | 2007-07-26 | Analog Devices, Inc. | Support apparatus for condenser microphone diaphragm |
| US7449356B2 (en) | 2005-04-25 | 2008-11-11 | Analog Devices, Inc. | Process of forming a microphone using support member |
| WO2008156018A1 (en) * | 2007-06-18 | 2008-12-24 | Alps Electric Co., Ltd. | Capacitance type acceleration sensor |
| US7825484B2 (en) | 2005-04-25 | 2010-11-02 | Analog Devices, Inc. | Micromachined microphone and multisensor and method for producing same |
| US7885423B2 (en) | 2005-04-25 | 2011-02-08 | Analog Devices, Inc. | Support apparatus for microphone diaphragm |
| US8270634B2 (en) | 2006-07-25 | 2012-09-18 | Analog Devices, Inc. | Multiple microphone system |
| CN113985072A (en) * | 2021-09-18 | 2022-01-28 | 电子科技大学 | Double-parallel spiral beam and MEMS accelerometer thereof |
-
1995
- 1995-03-02 JP JP4266095A patent/JPH08240609A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| JP2004012326A (en) * | 2002-06-07 | 2004-01-15 | Hiroaki Niitsuma | Physical quantity detector and its manufacturing method |
| WO2005111555A1 (en) * | 2004-05-18 | 2005-11-24 | Hosiden Corporation | Vibration sesor |
| WO2006082716A1 (en) * | 2005-02-01 | 2006-08-10 | Matsushita Electric Works, Ltd. | Semiconductor acceleration sensor |
| KR100856179B1 (en) * | 2005-02-01 | 2008-09-03 | 마츠시다 덴코 가부시키가이샤 | Semiconductor acceleration sensor |
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| US8309386B2 (en) | 2005-04-25 | 2012-11-13 | Analog Devices, Inc. | Process of forming a microphone using support member |
| US7449356B2 (en) | 2005-04-25 | 2008-11-11 | Analog Devices, Inc. | Process of forming a microphone using support member |
| US7885423B2 (en) | 2005-04-25 | 2011-02-08 | Analog Devices, Inc. | Support apparatus for microphone diaphragm |
| WO2007029878A1 (en) * | 2005-09-09 | 2007-03-15 | Yamaha Corporation | Capacitor microphone |
| US8059842B2 (en) | 2005-09-09 | 2011-11-15 | Yamaha Corporation | Capacitor microphone |
| WO2007085017A1 (en) * | 2006-01-20 | 2007-07-26 | Analog Devices, Inc. | Support apparatus for condenser microphone diaphragm |
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| WO2008156018A1 (en) * | 2007-06-18 | 2008-12-24 | Alps Electric Co., Ltd. | Capacitance type acceleration sensor |
| CN113985072A (en) * | 2021-09-18 | 2022-01-28 | 电子科技大学 | Double-parallel spiral beam and MEMS accelerometer thereof |
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