JPH08236410A - Method and apparatus for eliminating adverse influence, and processor and semiconductor manufacturing device equipped with the same - Google Patents

Abstract

PURPOSE: To provide a method and an apparatus for eliminating adverse influence which reduces adverse influence applied by wave motion such as noise and vibration or gas to human bodies or environments, and a processor and a semiconductor manufacturing device equipped with the same. CONSTITUTION: An apparatus for eliminating adverse influence comprises an acoustic wave sensing means 12 for sensing acoustic waves 11 propagating in the air, an acoustic wave analyzing means 13 for analyzing waveforms of the waves 11, an offset acoustic wave forming means 15 for forming offset acoustic waves 14 having the same intensity as that of the waves 11 with positive/negative components in the waveforms of the waves 11 reversed and an offset wave generating means 16 for generating the waves 14. The apparatus offsets the waves 11 by the waves 14 by generating the waves 14 having the same intensity as that of the waves 11 with positive/negative components in the waveforms of the waves 11 reversed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for reducing (removing) waves or gas such as noise and vibration that adversely affect the human body or the environment, and particularly cancels the waves or gas to reduce the adverse effects. The present invention relates to an adverse effect removing method and apparatus, a processing apparatus including the same, and a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art The techniques described below are for studying the present invention,
The present invention was studied by the present inventors upon completion, and its outline is as follows.

The following two methods are conceivable as methods of eliminating or reducing the adverse effects of noise, vibration, leaked electromagnetic waves, magnetic fields, light, etc. on the human body and environment.

That is, one is to reduce the amount of wave generation from each source, or to weaken its intensity, and the other is to protect the source or its peripheral portion by a protective wall or the like. Covering and blocking from the source.

The above-mentioned noise, vibration, leaked electromagnetic waves,
Among the techniques for reducing the adverse effects of magnetic fields, light, etc. on the human body and environment, particularly those that reduce the adverse effects from leaked electromagnetic waves are described in, for example, “Nikkei Electronics,” June 21, 1993, published by Nikkei BP. See pages 86-93.

[0006]

However, in the above-mentioned technique, the method of reducing the generation amount of the wave from the generation source or weakening the intensity thereof reduces the original function of the generation source. In many cases, it is technically difficult because it can lead to problems.

[0007] Further, a method of covering the above-mentioned generation source or its peripheral portion with a protective wall or the like to shut off from the above-mentioned generation source is as follows:
In many cases, the source is structurally (space-wise) difficult.

Therefore, it is difficult to realize the above two methods, and as a result, there arises a problem that noise, vibration, leaked electromagnetic waves, or the like adversely affect the human body or the environment.

Therefore, an object of the present invention is to provide an adverse effect removing method and apparatus for reducing the adverse effect of waves such as noise and vibration or gas on the human body or the environment, and a processing apparatus and a semiconductor manufacturing apparatus including the same. Especially.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0011]

Of the inventions disclosed in the present application, a representative one will be briefly described below.
It is as follows.

That is, the adverse effect removing method according to the present invention detects a wave propagating in air or in a vacuum, analyzes the waveform of the wave, and reverses the positive / negative of the wave with the same strength as the strength of the wave. By forming the canceling wave and generating the canceling wave, the wave is canceled.

Further, the adverse effect removing device according to the present invention includes a wave detecting means for detecting a wave propagating in air or a vacuum, a wave analyzing means for analyzing a waveform of the wave, and an intensity equal to the intensity of the wave. A canceling wave forming means for forming a canceling wave by reversing positive and negative signs in the waveform of the wave;
And a canceling wave generating means for generating the canceling wave.

Further, the wave or the canceling wave is a wave of sound, vibration, electromagnetic wave leakage, magnetic field or light.

Further, the adverse effect removing device according to the present invention comprises a gas detecting means for detecting the first gas existing in the air,
Gas analyzing means for analyzing the components of the first gas, gas forming means for forming a second gas as a reaction product by reacting with the first gas, and the second gas are generated. It is composed of a gas generating means.

The processing apparatus according to the present invention includes the adverse effect removing apparatus.

A semiconductor manufacturing apparatus according to the present invention includes the adverse effect removing device.

[0018]

According to the above-mentioned means, the wave detecting means for detecting the wave traveling in the air or the vacuum, the wave analyzing means for analyzing the waveform of the wave, and the wave having the same intensity as the wave and having the waveform of the wave By forming a canceling wave forming means for forming a canceling wave by reversing the positive and negative sides in, and a canceling wave generating means for generating the canceling wave, the wave is detected and the waveform of the wave is analyzed, and the strength of the wave and It is possible to form and generate a canceling wave having the same intensity and inverting the positive and negative signs in the waveform of the wave. As a result, the wave motion can be canceled by the canceling wave motion.

Further, since the wave is a wave of sound, vibration, electromagnetic wave leakage, magnetic field or light, adverse effects of noise, vibration or electromagnetic wave leakage on the human body or environment can be reduced (removed).

Since the processing device is provided with the adverse effect removing device, it is possible to cancel the waves such as noise by the canceling waves when the object to be processed is processed. As a result, it is possible to reduce the adverse effects on the human body or the environment, as described above.

Further, since the semiconductor manufacturing apparatus is provided with the adverse effect removing device, it is possible to cancel a wave such as a vibration by the canceling wave when the object to be processed is processed.

As a result, the vibration can be eliminated, and as a result, manufacturing defects such as semiconductor wafers can be reduced, for example, manufacturing defects due to foreign substances adhering to the products.

[0023]

Embodiments of the present invention will now be described in detail with reference to the drawings.

(Embodiment 1) FIG. 1 is a conceptual diagram showing the basic structure of an embodiment of the adverse effect removing apparatus according to the present invention, and FIG. 2 is a structural concept showing an embodiment of the structure of the adverse effect removing apparatus according to the present invention. FIG. 3 is a waveform conceptual diagram showing an example of a wave detected and generated by the adverse effect removing device according to the present invention.

First, the basic structure of the adverse effect removing device according to the present invention will be described with reference to FIG. 1. A wave detecting means 2 for detecting a wave 1 transmitted in air or vacuum,
The wave analyzing means 3 for analyzing the wave form of the wave 1 and the wave canceling wave forming means 5 for forming the wave canceling wave 4 having the same intensity as the wave 1 and having the positive and negative sign reversed in the wave form of the wave 1 and the wave canceling wave 4 are generated. The deleterious wave removing device 7 includes the canceling wave generating means 6, and the deleterious effect remover 7 is the semiconductor manufacturing apparatus 8.
Attached to.

Next, the configuration of the adverse effect removing apparatus of the first embodiment will be described in detail with reference to FIGS. 2 and 3.

The adverse effect removing device described in the first embodiment is for noise, and a sound wave detecting means (wave detecting means) for detecting a sound wave 11, that is, a sound wave 11, transmitted through the air which is an elastic medium. 12, sound wave analysis means (wave analysis means) 13 for analyzing the waveform 11a of the sound wave 11, and sound wave 1
A canceling sound wave forming means (a canceling wave forming means) 15 for forming a canceling sound wave 14 (a canceling wave) having the same strength as that of 1 and inverting the positive / negative of the waveform 11a of the sound wave 11, and a canceling sound wave generating the canceling sound wave 14. It is composed of means (offset wave generation means) 16.

Here, the sound wave detecting means 12 which is the wave detecting means is, for example, a microphone.

The sound wave analyzing means 1 which is a wave analyzing means.
Reference numeral 3 is a waveform analyzer for analyzing the waveform 11a of the sound wave 11, for example, the frequency (1 / cycle 11b), cycle 11b, amplitude 11c, initial phase 11d, etc. of the sound wave 11.

Further, the canceling sound wave forming means 15 which is the canceling wave forming means is, for example, a function generator, and based on the result analyzed by the frequency analyzer, the frequency (1 / cycle 14b), cycle 14b,
The canceling sound wave 14 having the waveform 14a with the amplitude 14c and the initial phase 14d is formed.

The canceling sound wave generating means 16 which is the canceling wave generating means is, for example, a speaker and generates the canceling sound wave 14.

Further, the adverse effect removing device 17 of the first embodiment.
Is, for example, a semiconductor manufacturing apparatus 1 such as a dry etching apparatus in which a vacuum pump for evacuating the processing chamber is installed.
It is attached to 8.

Next, the adverse effect removing method of the first embodiment will be described.

First, a sound wave detecting means 1 such as a microphone
2 detects the sound wave 11 transmitted in the air, and
The waveform 11a of the sound wave 11, for example, the frequency of the sound wave 11 (1 / cycle 11b), the cycle 11b, the amplitude 11c, and the initial phase 11d by the sound wave analysis means 13 such as a frequency analyzer.
Etc.

Subsequently, the canceling sound wave forming means 15 such as a function generator 15 has the same strength as that of the sound wave 11 (for example, the periods 11b and 14b and the amplitude 11).
c, 14c, and the initial phases 11d, 14d are equal to each other), and a canceling sound wave 14 in which the positive / negative of the waveform 11a of the sound wave 11 is reversed is formed.

After that, the canceling sound wave 14 is generated by the canceling sound wave generating means 16 such as a speaker.

As a result, the sound wave 11 and the canceling sound wave 14 have the same intensity, and the canceling sound wave 14 is the waveform 11 of the sound wave 11.
Since the sign of a is reversed, the canceling sound wave 1
4 can cancel the sound wave 11 and eliminate the sound wave 11. Thereby, noise can be reduced (removed).

Next, according to the adverse effect removing method and apparatus of the first embodiment and the semiconductor manufacturing apparatus including the same, the following effects can be obtained.

That is, the sound wave detecting means 12 for detecting the sound wave 11, the sound wave analyzing means 13 for analyzing the waveform 11a of the sound wave 11, and the offset having the same strength as that of the sound wave 11 but the positive and negative sides of the waveform 11a of the sound wave 11 are reversed. Since the canceling sound wave forming means 15 that forms the sound wave 14 and the canceling sound wave generating means 16 that generates the canceling sound wave 14 are included, the sound wave 11 can be canceled by the canceling sound wave 14.

As a result, since the sound of the sound wave 11 can be eliminated, noise and the like can be reduced, and as a result, adverse effects on the worker (human body) and the surrounding environment can be reduced (removed). .

(Embodiment 2) FIG. 4 is a conceptual diagram showing an example of the structure of an adverse effect removing apparatus which is another embodiment of the present invention, and FIG. 5 is a diagram which is detected by the adverse effect removing apparatus which is another embodiment of the present invention. It is a wave form conceptual diagram which shows one Example of the generated wave.

The adverse effect eliminating device described in the second embodiment is for vibration.

First, the structure of the adverse effect removing device 27 according to the second embodiment will be described.
Vibration detecting means (wave detecting means) 22 for detecting (wave)
And a vibration analysis means (wave analysis means) 23 for analyzing the waveform 21a of the vibration 21 and a canceling vibration 24 (cancellation wave) having the same strength as that of the vibration 21 and having the positive and negative signs reversed in the waveform 21a of the vibration 21. It is composed of a canceling vibration forming means (a canceling wave forming means) 25 and a canceling vibration generating means (a canceling wave generating means) 26 for generating the vibration 21.

Here, the vibration detecting means 22 which is the wave detecting means is, for example, a vibration frequency measuring device or the like.

Further, the vibration analysis means 2 which is a wave analysis means
Reference numeral 3 is a frequency analyzer for analyzing the waveform 21a of the vibration 21, for example, the frequency of the vibration 21 (1 / cycle 21b), cycle 21b, amplitude 21c, initial phase 21d, and the like.

Further, the canceling vibration forming means 25 which is the canceling wave forming means is, for example, a function generator, and based on the result analyzed by the frequency analyzer, the frequency (1 / cycle 24b), the cycle 24b,
A canceling vibration 24 having a waveform 24a with an amplitude 24c and an initial phase 24d is formed.

In addition, the adverse effect removing device 27 of the second embodiment.
Is attached to a semiconductor manufacturing apparatus 28 such as a wafer transfer apparatus that transfers a semiconductor wafer, which is an example of an object to be processed, between various steps.

Next, the adverse effect removing method of the second embodiment will be described.

First, a vibration detecting means 2 such as a vibration frequency measuring device.
2 detects a vibration 21 generated from an object (for example, a semiconductor manufacturing apparatus 28 to which a motor or the like is attached),
Further, the vibration analysis means 23 such as a frequency analyzer analyzes the waveform 21a of the vibration 21, for example, the frequency of the vibration 21 (1 / cycle 21b), cycle 21b, amplitude 21c, initial phase 21d, and the like.

Then, by the canceling vibration forming means 25 such as a function generator, the same strength as the strength of the vibration 21 (for example, the periods 21b and 24b, and the amplitude 21).
c, 24c, and the initial phases 21d, 24d are equal to each other), and a canceling vibration 24 in which the positive / negative of the waveform 21a of the vibration 21 is reversed is formed.

After that, the canceling vibration 24 is generated by the canceling vibration generating means 26.

As a result, the vibration 21 and the canceling vibration 24 have the same strength, and the canceling vibration 24 is the waveform 21 of the vibration 21.
Since the positive and negative in a are reversed, the canceling vibration 2
4 can cancel the vibration 21, and the vibration 21 can be eliminated.

Next, according to the adverse effect removing method and apparatus of the second embodiment and the semiconductor manufacturing apparatus including the same, the following effects can be obtained.

That is, the vibration detection means 22 for detecting the vibration 21, the vibration analysis means 23 for analyzing the waveform 21a of the vibration 21, and the offset having the same strength as the vibration 21 and the positive / negative polarity of the waveform 21a of the vibration 21 are reversed. The vibration 21 can be canceled by the canceling vibration 24 by being composed of the canceling vibration forming means 25 for forming the vibration 24 and the canceling vibration generating means 26 for generating the vibration 21.

As a result, the vibration 21 can be eliminated, and as a result, adverse effects on the worker (human body) and the surrounding environment can be reduced (removed).

Further, when the semiconductor wafer, which is an example of the object to be processed, is conveyed, the vibration 21 can be eliminated, so that the foreign matter adhering to the cassette containing the semiconductor wafer can be prevented from peeling off. .

As a result, it is possible to reduce the adhesion of foreign matter to products such as semiconductor wafers, and to reduce manufacturing defects of the products. As a result, the yield of the product can be improved.

Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, the adverse effect removing device according to the present invention is
Not only dry etching equipment and wafer transfer equipment, it may be attached to other semiconductor manufacturing equipment such as wire bonding equipment and ion implantation equipment, and when processing semiconductor wafers by installing it in a clean room etc. Is effective in.

Further, not only the semiconductor manufacturing apparatus,
It may be attached to a processing device that processes an object to be processed, such as a washing machine or a belt conveyor that generates vibration or a printing device that generates noise.

By the way, the processing apparatus equipped with the adverse effect removing apparatus (in this case, the semiconductor manufacturing apparatus 8 shown in FIG. 1 is used as the processing apparatus) can obtain the same effects as those described in the above-mentioned embodiment. it can.

The adverse effect removing apparatus according to the present invention may be installed in advance (built-in type) in the semiconductor manufacturing apparatus, the processing apparatus, or the like, or may be installed in the semiconductor manufacturing apparatus or the processing apparatus. And may be connected later (external type).

Furthermore, the adverse effect removing method and apparatus according to the present invention may be applied not only to noise and vibration, but also to waves such as leaked electromagnetic waves, light, or magnetic fields that adversely affect the human body and environment. With respect to these waves, the same effect as that described in the above embodiment can be obtained.

In particular, when the wave is a leaking electromagnetic wave, there is a concern in recent years that the low frequency and the high frequency generated from various electronic devices have an adverse effect on the human body. It is effective.

When the wave is generated by light, the adverse effect removing method and apparatus of the present invention can be used not only in air but also in vacuum.

Further, the adverse effect removing apparatus according to the present invention may be for a gas as shown in the conceptual diagram of the adverse effect removing apparatus which is another embodiment of the present invention in FIG.

Here, the structure of the adverse effect removing device 37 shown in FIG. 6 will be described. A gas detecting means 32 for detecting the first gas 31 existing in the air and a gas for analyzing the components of the first gas 31. The analysis means 33 and the second gas 34 which becomes a reaction product by reacting with the first gas 31
And a gas generating means 36 for generating the second gas 34.

Thus, for example, when a toxic first gas 31 such as CO is generated, the gas detecting means 32 detects the first gas 31, and the gas analyzing means 3 further detects the first gas 31.
The component of the first gas 31 is analyzed by 3 (recognizing that it is CO).

Thereafter, the gas forming means 35 forms a second gas 34 such as oxygen radicals which reacts with the first gas 31 and becomes a reaction product, and the gas generating means 36 forms a second gas such as oxygen radicals. 34 is generated.

As a result, the first gas 31 (CO) and the second gas 31 (CO)
Reacts with the gas (oxygen radical) 34 to produce CO ₂ as a reaction product.

As a result, toxic CO is converted into harmless CO
By setting it to ₂ , detoxification or its adverse effect can be reduced (removed).

[0072]

Advantageous effects obtained by typical ones of the inventions disclosed in the present application will be briefly described.
It is as follows.

(1). A wave detecting means for detecting a wave,
Wave analysis means for analyzing the waveform of the wave, a canceling wave forming means for forming a canceling wave having the same strength as the wave and having the positive and negative polarity reversed in the waveform of the wave, and a canceling wave generating means for generating the canceling wave. With the above configuration, the wave can be canceled by the canceling wave. As a result, it is possible to reduce (remove) the adverse effects of noise, vibration, leaked electromagnetic waves, or the like on the human body or the environment.

(2). A sound wave detecting means for detecting a sound, a sound wave analyzing means for analyzing a waveform of a sound wave which is a wave of the sound, and a canceling sound wave for forming a canceling sound wave having the same strength as the strength of the sound wave and inverting the positive and negative signs in the waveform of the sound wave With the forming means and the canceling sound wave generating means for generating the canceling sound wave, the sound wave can be canceled by the canceling sound wave.

As a result, for example, when the adverse effect removing device is attached to a processing device that generates noise, it is possible to eliminate the noise, so that noise and the like can be prevented, and as a result, a worker or the like can be prevented. The adverse effect on the human body can be reduced.

(3). Vibration detection means for detecting the vibration generated from the object, vibration analysis means for analyzing the waveform of the vibration, and cancellation vibration formation for forming a canceling vibration having the same strength as the vibration and reversing the positive and negative signs in the waveform of the vibration By virtue of the means and the canceling vibration generating means for generating the canceling vibration, the vibration can be canceled by the canceling vibration.

As a result, for example, when the adverse effect removing device is attached to the semiconductor manufacturing apparatus, vibration can be eliminated, so that manufacturing defects due to foreign matter adhering to a product such as a semiconductor wafer can be reduced. As a result, the yield of the product can be improved.

(4). When the wave is a leakage electromagnetic wave, there is concern that the low frequency and the high frequency generated from various electronic devices may adversely affect the human body. Therefore, by removing the adverse effect of the wave, the adverse effect on the human body is reduced. be able to.

(5). The adverse effect removing device according to the present invention,
Even if it is used for gas, not for wave motion, it reduces the harmful effect on the human body by reacting toxic gas with other gas to detoxify it, as in the case of wave motion. be able to.

[Brief description of drawings]

FIG. 1 is a basic configuration conceptual diagram showing an embodiment of a basic structure of an adverse effect removing device according to the present invention.

FIG. 2 is a structural conceptual diagram showing one embodiment of the structure of the adverse effect removing device according to the present invention.

FIG. 3 is a waveform conceptual diagram showing an example of a wave detected and generated by the adverse effect removing device according to the present invention.

FIG. 4 is a structural conceptual diagram showing an example of the structure of an adverse effect removing device which is another embodiment of the present invention.

FIG. 5 is a waveform conceptual diagram showing an example of a wave detected and generated by an adverse effect removing device which is another example of the present invention.

FIG. 6 is a structural conceptual diagram showing an example of the structure of an adverse effect removing device which is another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 wave 2 wave detecting means 3 wave analyzing means 4 canceling wave 5 canceling wave forming means 6 canceling wave generating means 7 adverse effect removing device 8 semiconductor manufacturing apparatus 11 sound wave (wave) 11a waveform 11b cycle 11c amplitude 11d initial phase 12 sound wave detecting means ( Wave detecting means 13 Sound wave analyzing means (wave analyzing means) 14 Canceling sound wave (cancelling wave) 14a Waveform 14b Period 14c Amplitude 14d Initial phase 15 Canceling sound wave forming means (cancellation wave forming means) 16 Canceling sound wave generating means (cancellation wave generating means) ) 17 adverse effect removing device 18 semiconductor manufacturing device 21 vibration (wave) 21a waveform 21b cycle 21c amplitude 21d initial phase 22 vibration detection means (wave detection means) 23 vibration analysis means (wave analysis means) 24 destructive vibration (cancellation wave) 24a waveform 24b period 24c amplitude 24d initial phase 25 phase Destruction vibration formation means (destruction wave formation means) 26 Depletion vibration generation means (depletion wave generation means) 27 Detrimental effect removal device 28 Semiconductor manufacturing device 31 First gas 32 Gas detection means 33 Gas analysis means 34 Second gas 35 Gas formation Means 36 Gas Generating Means 37 Negative Effect Removal Device

Claims (7)

[Claims] 1. A wave which propagates in air or a vacuum is detected, the waveform of the wave is analyzed, and a canceling wave having the same intensity as the wave and having the positive and negative signs reversed in the waveform of the wave is formed. A method of removing an adverse effect, which comprises canceling the wave by generating the cancel wave. 2. The adverse effect removing method according to claim 1, wherein the wave or the canceling wave is a wave of sound, vibration, a leak electromagnetic wave, a magnetic field, or light, and the canceling wave cancels the wave. Characteristic adverse effect removal method. 3. A wave detecting means for detecting a wave propagating in air or a vacuum, a wave analyzing means for analyzing a waveform of the wave, an intensity equal to the intensity of the wave, and a positive / negative sign in the waveform of the wave. An adverse effect removing device comprising: a canceling wave forming unit that forms a reverse canceling wave; and a canceling wave generating unit that generates the canceling wave. 4. The deleterious effect removing device according to claim 3, wherein the wave or the canceling wave is a wave of sound, vibration, a leak electromagnetic wave, a magnetic field, or light. 5. A gas detecting means for detecting a first gas existing in the air, a gas analyzing means for analyzing a component of the first gas, and a reaction product by reacting with the first gas. And a gas generating means for generating the second gas, and a harmful effect removing device. 6. A processing apparatus comprising the adverse effect removing device according to claim 3, 4, or 5. 7. A semiconductor manufacturing apparatus comprising the adverse effect removing device according to claim 3, 4, or 5.