JPH08225912A - Formation of oxide ceramic thermal-sprayed coating - Google Patents
Formation of oxide ceramic thermal-sprayed coatingInfo
- Publication number
- JPH08225912A JPH08225912A JP7030645A JP3064595A JPH08225912A JP H08225912 A JPH08225912 A JP H08225912A JP 7030645 A JP7030645 A JP 7030645A JP 3064595 A JP3064595 A JP 3064595A JP H08225912 A JPH08225912 A JP H08225912A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- base material
- oxide ceramic
- coating
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、金属粉を混合させた酸
化物セラミック粉を原料粉として溶射する酸化物セラミ
ック溶射膜の形成方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming an oxide ceramic sprayed coating by spraying oxide ceramic powder mixed with metal powder as a raw material powder.
【０００２】[0002]
【従来の技術】通常、機械又は装置等の部品及び部材等
は、その表面に耐摩耗性、潤滑性、耐食性、耐熱性又は
断熱性等の性質を付与して、機械又は装置等の機能及び
寿命を向上させるべく、その表面に種々の被膜形成処理
が施される。特に、溶射では、金属材料、セラミック又
は有機材料等の多くの材料を原料粉として使用すること
ができ、また異種材料を混合した被膜を容易に形成する
ことができる。2. Description of the Related Art Usually, parts and members of machines or devices are provided with properties such as wear resistance, lubricity, corrosion resistance, heat resistance or heat insulation properties on their surfaces to provide the functions and functions of machines or devices. In order to improve the life, the surface is subjected to various film forming treatments. In particular, in thermal spraying, many materials such as metal materials, ceramics or organic materials can be used as the raw material powder, and a coating film in which different materials are mixed can be easily formed.
【０００３】図２は通常の溶射方法を示す模式図であ
る。この図２に示すように、プラズマ発生部では、陽極
ノズル１１と陰極１２との間で発生させた直流アークに
より、作動ガスを超高温に熱して、プラズマジェット１
４として陽極ノズル１１から噴出させる。このとき、プ
ラズマジェット１４の中へ原料粉末１３を投入し、加熱
された原料粉末１３は溶融状態又は半溶融状態の溶融粒
子１５となり加速されて、基材１７に衝突すると共に、
付着凝固して被膜１６を形成する。FIG. 2 is a schematic view showing a normal thermal spraying method. As shown in FIG. 2, in the plasma generator, the working gas is heated to an ultrahigh temperature by the DC arc generated between the anode nozzle 11 and the cathode 12, and the plasma jet 1
4 is ejected from the anode nozzle 11. At this time, the raw material powder 13 is put into the plasma jet 14, and the heated raw material powder 13 becomes molten particles 15 in a molten state or a semi-molten state and is accelerated and collides with the base material 17, and
The film is adhered and solidified to form the film 16.
【０００４】しかし、溶射では溶融粒子が基材に付着凝
固して被膜を形成するため、基材に付着した溶融粒子間
に隙間ができ、被膜内を貫通する開口気孔、又は被膜内
に閉ざされた閉口気孔が発生してしまう。このような気
孔が多い被膜では、溶射による被膜形成処理を施して
も、耐摩耗性等の効果をあまり向上させることができな
い。However, in the thermal spraying, the molten particles adhere to the base material and solidify to form a coating film. Therefore, a gap is formed between the molten particles adhered to the base material, and the pores penetrate through the coating film or are closed in the coating film. Closed pores are generated. With such a coating having a large number of pores, the effects such as abrasion resistance cannot be improved so much even if the coating forming treatment by thermal spraying is performed.
【０００５】そこで、従来、酸化物セラミック被膜を形
成する場合において、気孔の発生率、即ち気孔率を低減
して、緻密な被膜を形成するために、直流プラズマの溶
射では、真空雰囲気で溶射したり、プラズマの発生出力
を大きくしたり、溶融粒子の衝突速度を速くすることが
行われている。Therefore, conventionally, in forming an oxide ceramic coating, in order to form a dense coating by reducing the generation rate of porosity, that is, the porosity, in direct current plasma spraying, thermal spraying is performed in a vacuum atmosphere. In addition, the plasma generation output is increased, and the collision speed of molten particles is increased.
【０００６】一方、高周波プラズマの溶射では、プラズ
マの発生出力を大きくしたり、レーザーと共用すること
により、気孔率の低減を図っている。On the other hand, in the thermal spraying of high frequency plasma, the porosity is reduced by increasing the generation output of plasma or by sharing it with a laser.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上述の
気孔率の低減を図る溶射方法であっても、他の成膜法、
例えばフラリー法、ＣＶＤ（化学蒸着）法、ＥＶＤ法又
はスリップキャスト法等に比べて、気孔率が略０％とな
る緻密な被膜を形成させることは困難である。これは、
溶射による被膜形成は、粉体を溶融させると共に、基材
に付着凝固させるものであるため、粉体の溶かしムラ又
は付着ムラ等が生じると、良好な被膜を得ることができ
ないからである。However, even with the above-mentioned thermal spraying method for reducing the porosity, another film forming method,
For example, it is more difficult to form a dense coating having a porosity of about 0% than that of the flurry method, the CVD (chemical vapor deposition) method, the EVD method, or the slip casting method. this is,
This is because the coating film formed by thermal spraying melts the powder and adheres and solidifies it to the base material, so that if the powder is unevenly melted or unevenly adhered, a good film cannot be obtained.
【０００８】本発明はかかる問題点に鑑みてなされたも
のであって、気孔率が小さく緻密で良好な被膜を形成す
ることができる酸化物セラミック溶射膜の形成方法を提
供することを目的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide a method for forming an oxide ceramic sprayed coating capable of forming a dense and excellent coating having a small porosity. .
【０００９】[0009]
【課題を解決するための手段】本発明に係る酸化物セラ
ミック溶射膜の形成方法は、酸化物セラミック粉に金属
粉を混合させた原料粉を、酸化ガスを付加しつつ基材の
表面に溶射することを特徴とする。A method of forming an oxide ceramic sprayed coating according to the present invention is a method of spraying a raw material powder obtained by mixing oxide ceramic powder with metal powder onto the surface of a base material while adding an oxidizing gas. It is characterized by doing.
【００１０】[0010]
【作用】本発明においては、溶射における原料粉とし
て、酸化物セラミック粉に金属粉を混合させたものを使
用するため、酸化物セラミックに比べ融点が低い金属粉
が気孔の発生個所に浸漬し、気孔の発生を防止すること
ができる。このため、特に酸化物セラミックの融点が高
く、混合される金属との融点差が大きいほど、被膜を緻
密化させることができる。In the present invention, as the raw material powder in the thermal spraying, a mixture of oxide ceramic powder and metal powder is used. Therefore, the metal powder having a lower melting point than that of oxide ceramic is immersed in the place where pores are generated, Generation of pores can be prevented. Therefore, the higher the melting point of the oxide ceramic and the larger the difference between the melting points of the oxide ceramic and the mixed metal, the denser the coating can be.
【００１１】また、溶射の際に酸化ガスを付加するた
め、混合される金属は被膜形成と同時に酸化される。こ
のため、被膜形成後に膨張率等の差に起因して被膜の剥
離等の問題が発生することを防止することができる。Further, since the oxidizing gas is added during the thermal spraying, the mixed metal is oxidized at the same time when the coating film is formed. Therefore, it is possible to prevent problems such as peeling of the coating film due to a difference in expansion coefficient and the like after the coating film is formed.
【００１２】[0012]
【実施例】以下、本発明の実施例について、添付の図面
を参照して具体的に説明する。図１は、本発明の実施例
に係る酸化物セラミック溶射膜の形成方法を示す模式図
である。この図１に示すように、プラズマ発生部では、
陽極ノズル１と陰極２との間で発生させた直流アークに
より、Ａｒ、Ｎ2又はＨ2等の混合ガスからなる作動ガス
を超高温に熱して、プラズマジェット４として陽極ノズ
ル１から噴出させる。このとき、例えばＡｌ2Ｏ3の被膜
を形成させる場合には、原料粉末３を次のようにして生
成する。即ち、Ａｌ2Ｏ3の酸化物セラミック粉に加え
て、Ａｌの金属粉を約２０重量％添加して造粒粉とす
る。このように生成された原料粉末３をプラズマジェッ
ト４の中へ投入する。そして、加熱された原料粉末３は
溶融状態の溶融粒子５となり加速されて、基材７に衝突
すると共に、付着凝固して被膜６を形成する。このと
き、溶射と共に溶融粒子５が基材に付着する部分に対し
て、酸化ガスを吹き付ける。この酸化ガスを吹き付ける
ことにより、溶融状態のＡｌ金属粉がアルミナとして、
溶融状態のＡｌ2Ｏ3の酸化セラミック粉と融合してＡｌ
2Ｏ3の被膜が形成される。このように、溶射による被膜
が形成されると同時に酸化すると、クラックの発生を防
止することができる。Embodiments of the present invention will be specifically described below with reference to the accompanying drawings. FIG. 1 is a schematic diagram showing a method for forming an oxide ceramic sprayed coating according to an embodiment of the present invention. As shown in FIG. 1, in the plasma generator,
A DC arc generated between the anode nozzle 1 and the cathode 2 heats a working gas consisting of a mixed gas of Ar, N 2 or H 2 to a super high temperature, and ejects the plasma jet 4 from the anode nozzle 1. At this time, when forming a film of Al 2 O 3 , for example, the raw material powder 3 is generated as follows. That is, about 20% by weight of Al metal powder is added to the oxide ceramic powder of Al 2 O 3 to obtain a granulated powder. The raw material powder 3 thus generated is put into the plasma jet 4. Then, the heated raw material powder 3 becomes molten particles 5 in a molten state, is accelerated, collides with the base material 7, and adheres and solidifies to form the coating film 6. At this time, the oxidizing gas is blown to the portion where the molten particles 5 adhere to the base material together with the thermal spraying. By blowing this oxidizing gas, the molten Al metal powder becomes alumina,
Al 2 O 3 fused with molten ceramic powder of Al 2 O 3
A film of 2 O 3 is formed. As described above, when the coating film formed by thermal spraying is formed and oxidized at the same time, the occurrence of cracks can be prevented.
【００１３】なお、基材７がＬａＳｒＭｎＯ等のポーラ
ス質板（多孔質板）である場合には、図１に示すよう
に、基材７を挟んで、溶射機と反対側に空気発生機を設
置して、被膜形成面の裏面に空気吹き出し口８から吹き
出す空気９を吹き付けることができる。また、基材がポ
ーラス質板でない場合には、溶射機が設置されている側
から、プラズマジェット４と平行に被膜形成部に空気を
吹き付けることもできる。When the base material 7 is a porous plate (porous plate) such as LaSrMnO, as shown in FIG. 1, an air generator is placed on the opposite side of the thermal spray machine with the base material 7 interposed therebetween. It is possible to install and blow the air 9 blown out from the air blowing port 8 on the back surface of the film forming surface. Further, when the substrate is not a porous plate, air can be blown to the coating film forming portion in parallel with the plasma jet 4 from the side where the thermal spraying machine is installed.
【００１４】次に、第２の実施例として、ＳＯＦＣ（固
体電解質型燃料電池）の被膜を形成する場合について説
明する。この場合には、原料粉末として、ＹＳＺの粉末
にイットリア金属及びジルコニア金属の合金粉末を約２
０重量％添加し、約４０μｍの粉体に造粒する。この原
料粉末を使用して、上述の実施例と同様に溶射を行うこ
とにより、基材の表面に緻密で良好な溶射被膜を形成す
ることができる。Next, as a second embodiment, a case of forming a SOFC (solid oxide fuel cell) coating film will be described. In this case, as the raw material powder, YSZ powder and alloy powder of yttria metal and zirconia metal are used in about 2 parts.
Add 0 wt% and granulate to a powder of about 40 μm. By using this raw material powder and performing thermal spraying in the same manner as in the above-described examples, a dense and favorable thermal spray coating can be formed on the surface of the base material.
【００１５】[0015]
【発明の効果】以上説明したように、本発明によれば、
適量の金属粉が混合された酸化セラミックを原料粉とし
て、溶射時に酸化ガスを付加することにより、気孔率が
小さく緻密で良好な被膜を基材の表面に形成することが
できる。As described above, according to the present invention,
By using an oxide ceramic mixed with an appropriate amount of metal powder as a raw material powder and adding an oxidizing gas at the time of thermal spraying, it is possible to form a fine and fine coating film with small porosity on the surface of the base material.
【図１】本発明の実施例に係る酸化物セラミック溶射膜
の形成方法を示す模式図である。FIG. 1 is a schematic view showing a method for forming an oxide ceramic sprayed coating according to an example of the present invention.
【図２】通常の溶射方法を示す模式図である。FIG. 2 is a schematic view showing a normal thermal spraying method.
１、１１；陽極ノズル ２、１２；陰極 ３、１３；原料粉末 ４、１４；プラズマジェット ５、１５；溶融粒子 ６、１６；被膜 ７、１７；基材 ８；空気吹き出し口 ９；空気 1, 11; Anode nozzle 2, 12; Cathode 3, 13; Raw material powder 4, 14; Plasma jet 5, 15; Molten particle 6, 16; Coating film 7, 17; Substrate 8; Air blowout port 9; Air
───────────────────────────────────────────────────── フロントページの続き (72)発明者 山岡 悟 東京都江東区木場１丁目５番１号 株式会 社フジクラ内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Satoru Yamaoka 1-5-1, Kiba, Koto-ku, Tokyo Inside Fujikura Ltd.
Claims (1)
た原料粉を、酸化ガスを付加しつつ基材の表面に溶射す
ることを特徴とする酸化物セラミック溶射膜の形成方
法。1. A method for forming an oxide ceramic sprayed film, which comprises spraying a raw material powder obtained by mixing oxide ceramic powder with metal powder onto the surface of a base material while adding an oxidizing gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7030645A JPH08225912A (en) | 1995-02-20 | 1995-02-20 | Formation of oxide ceramic thermal-sprayed coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7030645A JPH08225912A (en) | 1995-02-20 | 1995-02-20 | Formation of oxide ceramic thermal-sprayed coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08225912A true JPH08225912A (en) | 1996-09-03 |
Family
ID=12309563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7030645A Pending JPH08225912A (en) | 1995-02-20 | 1995-02-20 | Formation of oxide ceramic thermal-sprayed coating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08225912A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002069606A (en) * | 2000-09-05 | 2002-03-08 | Tocalo Co Ltd | Anticorrosion spraying film member and its production method |
-
1995
- 1995-02-20 JP JP7030645A patent/JPH08225912A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002069606A (en) * | 2000-09-05 | 2002-03-08 | Tocalo Co Ltd | Anticorrosion spraying film member and its production method |
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