JPH08220455A - Two axis movable mirror and display device using same - Google Patents

Abstract

PURPOSE: To move a mirror by two axis with a simple configuration by providing a reflection mirror on an upper portion of a conical mirror plate, and arranging plural electrodes orthogonal to a portion opposite to the mirror plate of a mirror table and electrically isolating the electrodes from the mirror table. CONSTITUTION: A dish-spinning type electrostatic movable mirror 23a has a reflection mirror 23a' which is placed on the upper section of a conical mirror plate 23a" constituted of a magnetic metal. A conical recess is provided in the rear side of the mirror 23a' of the mirror plate 23a" and the bottom section of the conical recess is installed on a conical pivot 23b provided in the center section of a mirror table 23c. Plural orthogonal electrodes 23d, which are electrically isolated from the table 23c, are arranged in the portion which is opposed to the plate 23a" of the table 23c. Moreover, a permanent magnet 23e is placed in the lower section of the table 23c and a magnetic yoke 23f is arranged so as to surround the entire table 23c. Thus, a two axis movable micro-mirror (an electrostatic movable mirror) is realized by a very simple part constitution.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a biaxial movable mirror (electrostatic movable mirror), a display device and a portable electronic device using the same, and more particularly to a super-mirror having a biaxial movable mirror (electrostatic movable mirror). The present invention relates to a small-sized display device and a portable electronic device that consume less power.

[0002]

2. Description of the Related Art Conventionally, a portable notebook personal computer or the like has always used a flat display (display device) using liquid crystal or plasma emission for displaying data input / output. This flat display using liquid crystal or plasma light emission requires a display with a corresponding number of pixels in order to display practically necessary, but it is a disk for portable size and weight reduction. Since it is too heavy for a cathode ray tube display that is widely used in top-type computers, it has been selected as a smaller and lighter display mechanism, and it is used because there is no smaller and lighter display device. Is no exaggeration.

In addition to the above-mentioned display device for directly displaying information, there is a device for displaying information by projecting light at a desired position, such as a laser printer / plotter or a large-screen laser display device.

[0004]

However, although the above-mentioned conventional flat display (display device) is lightweight, for example, in a liquid crystal display, pixels are formed on a glass plate having an area corresponding to the display area. Therefore, there is a problem that the larger the display area, the inevitably becomes heavier.
In addition, there is a problem that the backlight requires a lot of power.

Further, in the conventional laser printer / plotter and large-screen laser display device, a light beam whose direction is fixed such as a laser that consumes less power for display is deviated in an arbitrary direction, so basically, It is necessary to use two mirrors that are movable corresponding to the two orthogonal angle parameters θ and φ in the rotating coordinate system. Since the angle parameters θ and φ physically deviate at different positions, the mirror (reflecting mirror) spacing, which is not a problem when viewed from infinity, is a problem in controlling the declination.

[0006] Avoiding this, control is performed with angle parameters θ and φ.
In order to make the mirror have the same degree of freedom as in the same circuit, it is necessary to adopt a gimbal (earth sesame) structure for the supporting mechanism as shown in FIG. 6, which is complicated. was there. In FIG. 6, 61 is a mirror (reflecting mirror), 62 is an inner ring shaft, 63 is an outer ring shaft, 64 is a pivot in the angle parameter θ direction, and 65 is a pivot in the angle parameter φ direction.

Further, the sesame structure of the earth has a large movable mass dynamically, and the inertial mass varies depending on the supporting direction.
Since the mechanical frequency characteristics are different, it is impossible to control both the angle parameters θ and φ with completely the same circuit characteristics and drive power when performing high-performance declination control.

An object of the present invention is to displace a movable part in two axes so that a light spot can be scanned at a constant speed on a screen on which a light beam is to be projected, and with a simple structure, it can be strictly symmetrical. It is to provide a biaxial movable mirror (electrostatic movable mirror) that is biaxially movable.

Another object of the present invention is to provide a display device which is lightweight and has low power consumption.

Another object of the present invention is to provide a lightweight and low power consumption portable display device.

Another object of the present invention is to provide a portable electronic device which is lightweight and has low power consumption.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[0013]

The outline of the representative one of the inventions disclosed in the present application will be briefly described as follows.

(1) A reflecting mirror is provided on the upper part of a slotted mirror plate made of magnetic metal, and the bottom of the slotted recess provided on the back side of the mirror of the mirror plate is the center of the mirror stand. Mounted on a needle-shaped pivot provided in the mirror section, a plurality of electrodes orthogonal to each other are arranged in the portion of the mirror base that faces the mirror plate and insulated from the mirror base, and a permanent magnet is arranged under the mirror base. A biaxial movable mirror (electrostatic movable mirror) in which a magnetic yoke is arranged so as to surround the entire mirror base.

(2) A reflecting mirror is provided on an upper part of a mirror-shaped bowl-shaped mirror plate made of a magnetic metal, and the bottom of the bowl-shaped concave recess provided on the back side of the mirror-mirror-shaped mirror plate is the center of the mirror base. Mounted on a needle-shaped pivot provided in the mirror section, a plurality of electrodes orthogonal to each other are arranged in the portion of the mirror base that faces the mirror plate and insulated from the mirror base, and a permanent magnet is arranged under the mirror base. And a biaxial movable mirror in which a magnetic yoke is arranged so as to surround the entire mirror base,
A linear light source that generates light that is deflected by the biaxial movable mirror, and a deflection of the movable mirror that causes the light spot to scan at a constant speed on a screen where the linear light source should project the deflection angle of the mirror. And a means for displaying an image by blinking the light source in synchronization with the scanning.

(3) A portable display device having a structure in which the display device of (2) is incorporated in a foldable manner.

(4) An information input device and an information processing device are provided at predetermined positions of the portable display device of (3), and the information input device and the information processing device are electrically connected to the input / output unit of the portable display device. The portable electronic device is characterized in that the electronic devices are connected to each other.

[0018]

According to the above-described means, when a voltage is applied to a plurality of orthogonal electrodes, a potential difference (potential difference due to static electricity) is generated in the mirror plate, and the mirror plate is centered on the needle-like tip of the pivot so as to approach the electrode direction. Rotate. Further, since the electrodes are arranged orthogonally to each other, a predetermined biaxial rotation around the pivot can be performed by applying a voltage of opposite amplitude to each pair of the orthogonal electrodes. By inputting a normal unbalanced signal, the operation amplification output Q and bar Q are obtained,
The symmetry of its amplitude is very good except that it has the opposite sign, so if the repulsive force on one side increases with the needle-like tip of the pivot as the center, the attractive force on the opposite side will increase by the difference and is applied to the pivot. Force is always constant, and the occurrence of vibration due to moving the electrostatic movable mirror is reduced.

Further, since the magnetic field lines of the permanent magnet form a closed magnetic circuit by using the mirror plate and the magnetic yoke as a magnetic circuit, the electrostatic movable mirror is self-sustaining at a position where the energy of the entire magnetic circuit is minimum when the application of the voltage is released. Is set to. If the mirror plate is designed so that the distance between it and the magnetic yoke is minimum with the mirror plate parallel to the mirror base, the energy at that position will be the minimum, so there will be a restoring force and electrostatic force will always be maintained even if a preset spring is not used. The movable mirror returns to the initial position.

Further, since the permanent magnets are used to make the positions parallel to each other, the mirror plate is naturally attached to the magnets when there is no pivot. This means that the state of being supported by the pivot does not have the minimum energy, and the mirror plate always has a pushing force toward the magnet.
Therefore, even if the movable movable mirror is placed on the pivot and the positions of the electrostatic movable mirror and the mirror base are changed, even if the movable mirror is turned upside down, there is no problem in the operation. (Electrostatic movable mirror) can be realized.

As described above, since a movable mirror (electrostatic movable mirror) which can be moved biaxially with a strict symmetry with a simple structure can be realized very easily, the power consumption and size of the light beam projection display can be reduced. It is extremely advantageous.

Further, by swinging the angle of the electrostatic movable mirror vertically and horizontally, for example, in a sinusoidal manner, the pixel information stored in the video memory for each line is displayed as normal and reverse, and the light spot is displayed. If the display speed and light intensity are modulated in proportion to the speed on the screen, it will be possible to display without any change in the visual sense.

By incorporating the display device in a foldable manner, the display device is lightweight and downsized, so that it can be carried.

An information input / output device and a processing device are provided at predetermined positions of the portable display device of the present invention, and the information input / output device and the information processing device are electrically connected to the input / output unit of the portable display device. By connecting, a portable electronic device such as a portable notebook computer or a portable word processor can be easily obtained.

[0025]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a side view showing a schematic structure of a portable data input / output device according to an embodiment of the present invention, and FIG. 2 is a diagram showing a portable data input / output device according to the present embodiment from a user in an actual use state. 5 is an overhead view schematic diagram, FIG. 3 is an explanatory diagram for explaining the structure of the optical scanning mechanism of the present embodiment, and FIG. 4 is a perspective view showing the structure of a biaxial deflection mirror used for optical scanning.
FIG. 5 is a sectional view taken along line AA of FIG. 4.

In the portable data input / output device of this embodiment, as shown in FIG. 1, the screen 1 and the optical scanning mechanism 2 which are folded when not in use are pulled out in this order and set in a predetermined positional relationship. In the example of FIG. 1, the screen 1 is about twice as large as the width of the keyboard (information input device) 3 and is installed at a distance corresponding to the width of the keyboard 3. The optical scanning mechanism 2 may be manually raised or may be automatically popped up to a predetermined position. Since the user is in the position where the keyboard 3 can be operated, when viewed from that point, as shown in FIG. 2, by appropriately setting the height of the optical scanning mechanism 2, the screen 1 (display unit) is not hidden. come.

When a thin light beam (laser beam) is emitted from the light scanning mechanism 2 and raster scanning is performed at high speed so as to draw a predetermined locus on the screen 1, the display surface of the screen 1 is displayed by the user due to the afterimage effect of the eyes. Seems to be illuminated over the entire surface. When this light beam blinks (flickers) corresponding to a predetermined position on the screen 1, FIG.
As shown in the enlarged schematic display diagram of FIG. 1, an image image such as a character can be displayed on the screen 1.

In this case, when a laser beam is used as the light beam, compared with a backlight which requires the most power in a normal liquid crystal display, even if the entire surface of the laser diode is brightly displayed, the liquid crystal display of The display can be performed with a power of several mW, which is 1/1000 or less of the power of the backlight, and the battery life, which is the most problematic in portable devices, can be significantly extended.

Next, the structure and operation of the optical scanning mechanism of this embodiment will be described with reference to FIG. In FIG. 3, 2
1 is a semiconductor laser, 22 is a condenser lens, 23 is a micro biaxial movable mirror, 24 is a transparent window, 25 is a lens barrel, 31 is a laser drive circuit, 32 is a scan synchronization circuit, 33 is a video memory, and 34 is a calculation unit. , 35 are mirror drive circuits.

The arithmetic unit (CPU) 34 is composed of a general computer including a memory and peripheral control circuits, and the display output is output to the video memory 33 in the same manner as the output to the display of a normal personal computer. .

The data input to the video memory 33 is
The laser drive circuit 31 is synchronized with the scan synchronization circuit 32.
And becomes the LD signal that controls the blinking of the laser. At the same time, in synchronization with the signal from the scan synchronization circuit 32, a signal for controlling the deflection angle of the micro biaxial movable mirror (electrostatic movable mirror) 23 vertically and horizontally is sent from the mirror drive circuit 35. This operation is exactly the same as vertical (horizontal) and horizontal (horizontal) deflection of the electron beam in the cathode ray tube. In the case of the cathode ray tube, the electron beam is deflected by the electromagnet, whereas in the case of this embodiment, the micro biaxial movement is possible. Mirror 23
The light is deflected by (a biaxial electrostatic movable mirror).

The angle to be deflected naturally varies depending on the projection position, but it is easy to control because the angle relationship between the screen 1 and the optical scanning mechanism 2 is known in advance.

Conventionally, there has been no example of operating such light. For example, in a laser display or the like, the light of an argon laser is used to draw a line drawing on the wall of a building, clouds, etc., and it is used at a public address. It was being done. However, conventionally, two uniaxial mirrors are controlled by making them orthogonal to each other, so that the device becomes large in size and the angular velocity required for operation is small, which is very small and portable.
It could not be applied to a lightweight raster scan type display device.

The present invention has a different idea from the above-mentioned conventional technique, and simplifies the control by using a biaxial movable mirror having biaxial degrees of freedom, and makes the deflection center of light the center of swing of the mirror. By matching, the light can be scanned by swinging only the focal point, so the mirror can be extremely small, and it is a very lightweight and compact micro-mirror (micro biaxial movable mirror 2).
It is realized by using 3).

Micro biaxial movable mirror 23 of this embodiment
For example, as shown in FIG. 4, a dish-turning electrostatic movable mirror 23a is used. This dish-turning electrostatic movable mirror 23a
Is a bowl-shaped mirror plate 23a ″ made of magnetic metal
A reflecting mirror 23a 'is provided on the upper part of the mirror plate 2
A slot-shaped recess is provided on the back side of the reflecting mirror 23a 'of 3a ", and the bottom of the slot-shaped recess is mounted on a needle-shaped pivot 23b provided at the center of the mirror base 23c. In the portion facing the mirror plate 23a ″, a plurality of orthogonal electrodes 23d are arranged so as to be insulated from the mirror base 23c. Further, a permanent magnet 23e is arranged below the mirror base 23c, and a magnetic yoke 23f is arranged so as to surround the entire mirror base 23c.

When a voltage is applied to each of the orthogonal electrodes 23d through the lead wire 23g, the mirror plate 2 is passed through the mirror base 23c and the pivot 23b electrically connected.
A potential difference (potential difference due to static electricity) is generated in 3a ″, and the mirror plate 23a ″ (micro biaxial movable mirror 23) rotates about the needle tip of the pivot 23b so as to approach the electrode direction. Since the electrodes are arranged orthogonally to each other, the orthogonal electrodes 23 are arranged through a circuit having a differential amplifier configuration as shown in FIG.
By applying a voltage of opposite amplitude to each pair of d's, a predetermined biaxial rotation about the pivot 23b can be achieved. In FIG. 4, the operation amplification output Q and bar Q are obtained by inputting a normal unbalanced signal, and the symmetry of the amplitude is very good except that it has the opposite sign.
When the repulsive force on one side with respect to the needle-shaped tip of b increases, the attractive force on the opposite side increases by the difference, and the force applied to the pivot 23b is always constant and vibration is generated by moving the mirror. And so on.

Since the magnetic field lines of the permanent magnet 23e form a closed magnetic circuit by using the mirror plate 23a "and the magnetic yoke 23f as a magnetic circuit, the mirror plate 23a" (at the position where the energy of the entire magnetic circuit is minimized when the voltage application is canceled. The micro biaxial movable mirror 23) is set independently. Mirror plate 23
a "(micro biaxial movable mirror 23) is a mirror base 23c
If the distance between the magnetic yoke 23f and the magnetic yoke 23f is designed to be the minimum in a state parallel to, the position will have the minimum energy. Therefore, even if the preset spring is not used, the preset spring always returns to the initial position with a restoring force.

Further, since the permanent magnets 23e are used to make the positions parallel, the mirror plate 23a "is naturally attached to the magnets when the pivot 23b is not provided.
This means that the state of being supported by the pivot does not have the minimum energy, and the mirror plate 23a ″ always has a pushing force in the magnet direction.
Simply place a "on the pivot 23b and the mirror plate 23a"
There is no problem in the operation even if the position of the mirror base 23c is changed or it is turned upside down, and the biaxial micro biaxial movable mirror (electrostatic movable mirror) has an extremely simple component structure.
23 can be realized.

By swinging the angle of the micro biaxial movable mirror (electrostatic movable mirror) 23 vertically and horizontally, for example, sinusoidally, the light spot on the screen 1 (FIG. 1) is as if it were a cathode ray tube. Moves at high speed like an electron beam,
Scan the surface. For example, in the case of NTSC television, the upper and lower scans are performed 60 times per second, the line scan from left to right is 63 microseconds, and the return is several microseconds. Instead of sinusoidal movement, a triangular wave movement is performed. Is also well known. Unfortunately, no matter how lightweight the micromirror is, it requires a large driving force to scan with an electron beam, and a cathode ray tube display is not a good idea for the purpose of reducing power consumption. However, the micro biaxial movable mirror (electrostatic movable mirror) 23 is sinusoidally oscillated, and the pixel information stored in the video memory 33 is displayed for each line as normal or reverse, and the screen 1 of the light spot is displayed.
(Fig. 1) If the display speed and the light intensity are modulated in proportion to the above speed, the display can be made without any change in the sight.

As for the size of the reflecting mirror 23a ", since the beam diameter of light is 0.1 to 0.3 mm, 1 mmφ is sufficient, and the mirror plate 23 only reflects light.
The thickness of a ”is also extremely thin, and even if it is, for example, about 10 μm, there is no problem at all, and it is possible to make an extremely lightweight movable mirror. Therefore, in general, even if an electrostatic force with a small generated force is used, it can operate without problems. Is clear even after recalling Leidenbin's experiments taught by junior high school science without waiting for micromachine operation analysis.

Further, it is one of the characteristics of the movable mirror of the present invention that it consumes extremely little power because it is electrostatically driven.

Further, since the characteristics can be made completely the same in the angle parameters θ and φ directions, it is only necessary to prepare two identical circuits, and when two conventional uniaxial mirrors are combined or the earth sesame type movable mirror is used. Since it is not necessary to use circuits having different characteristics as in the case where they are used, adjustment is easy.

Although not shown, if an information processing device is connected to the input / output processing circuit of the portable data input / output device of this embodiment, a portable electronic device such as a portable notebook personal computer or a portable word processor will be provided. The device is easy to obtain.

Although the present invention has been specifically described based on the embodiments above, it is needless to say that the present invention is not limited to the above embodiments and various modifications can be made without departing from the scope of the invention. Absent.

[0046]

The effects of the typical ones of the inventions disclosed in this application will be briefly described as follows.

(1) A biaxial movable mirror (electrostatic movable mirror) which can be biaxially moved with a strict symmetry with a simple structure can be obtained very easily. According to this biaxial movable mirror (electrostatic movable mirror), it is possible to displace the movable portion biaxially and scan the light spot on the screen onto which the light beam should be projected at a constant speed.

(2) By using the biaxial movable mirror (electrostatic movable mirror) of (1) above, it is possible to obtain a light beam projection type display device which is lightweight and has low power consumption.

(3) A lightweight and low power consumption portable display device can be obtained by adopting a structure in which the light beam projection display device of the present invention of the above (2) is incorporated in a foldable manner.

(4) An information input device and an information processing device are provided at predetermined positions of the portable display device of (3), and the information input / output device and the information processing device are electrically connected to the input / output unit of the portable display device. It is possible to easily obtain a light weight and low power consumption portable personal computer by being electrically connected.

[Brief description of drawings]

FIG. 1 is a side view showing a schematic configuration of a portable data input / output device according to an embodiment of the present invention.

FIG. 2 is a schematic view from the user's perspective of the portable data input / output device of this embodiment in an actual use state.

FIG. 3 is an explanatory diagram for explaining the structure of the optical scanning mechanism of the present embodiment.

FIG. 4 is a perspective view showing the structure of a biaxial deflecting mirror used for optical scanning in this embodiment.

5 is a cross-sectional view taken along the line AA of FIG.

FIG. 6 is a perspective view showing a schematic configuration of a conventional rotating mirror having a sesame structure.

[Explanation of symbols]

1 ... Screen, 2 ... Optical scanning mechanism, 3 ... Keyboard, 21 ... Semiconductor laser, 22 ... Condensing lens, 23 ...
Micro 2-axis movable mirror, 24 ... Transparent window, 25 ... Lens barrel,
31 ... Laser drive circuit, 32 ... Scan synchronization circuit, 3
3 ... video memory, 34 ... arithmetic unit, 35 ... mirror drive circuit, 23a ... statically movable mirror, 23a "... mirror plate, 2
3a '... Reflective mirror (mirror), 23b ... Pivot, 23c
... mirror stand, 23d ... electrode, 23e ... permanent magnet, 23f
... magnetic yoke, 23g ... lead wire.

Claims (4)

[Claims] 1. A mirror (reflecting mirror) is provided on an upper part of a bowl-shaped mirror plate made of a magnetic metal, and a bottom of the bowl-shaped recess provided on the back side of the mirror of the mirror plate is a mirror stand. Is mounted on a needle-shaped pivot provided in the central part of the mirror base, and a plurality of electrodes orthogonal to each other are arranged in a portion of the mirror base facing the mirror plate so as to be insulated from the mirror base. And a magnetic yoke is arranged so as to surround the entire mirror stand. 2. A reflection mirror is provided on an upper part of a bowl-shaped mirror plate made of magnetic metal, and a bottom of the bowl-shaped recess provided on the back side of the mirror plate has a central portion of a mirror stand. Mounted on a needle-shaped pivot provided on the mirror base, a plurality of electrodes orthogonal to each other are arranged in a portion of the mirror base that faces the mirror plate so as to be insulated from the mirror base, and a permanent magnet is disposed below the mirror base. A biaxial movable mirror in which a magnetic yoke is arranged so as to surround the entire mirror base;
A linear light source that generates light that is deflected by an axially movable mirror, and the deflection of the movable mirror is controlled so that the linear light source scans the deflection angle of the mirror on a screen onto which light should be projected at a constant speed. And a means for displaying an image by blinking a light source in synchronization with the scanning. 3. A portable display device having a structure in which the display device according to claim 2 is incorporated in a foldable manner. 4. An information input / output device and an information processing device are provided at predetermined positions of the portable display device according to claim 3, and the information input / output device and the information processing device and an input / output unit of the portable display device are provided. A portable electronic device characterized in that it is electrically connected.