JPH08220347A - Optical sealed adapter - Google Patents
Optical sealed adapterInfo
- Publication number
- JPH08220347A JPH08220347A JP7051895A JP5189595A JPH08220347A JP H08220347 A JPH08220347 A JP H08220347A JP 7051895 A JP7051895 A JP 7051895A JP 5189595 A JP5189595 A JP 5189595A JP H08220347 A JPH08220347 A JP H08220347A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- fiber core
- core wire
- flange
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 28
- 239000013307 optical fiber Substances 0.000 claims abstract description 78
- 239000002184 metal Substances 0.000 claims abstract description 37
- 229910052751 metal Inorganic materials 0.000 claims abstract description 37
- 239000000835 fiber Substances 0.000 claims abstract description 6
- 238000003780 insertion Methods 0.000 abstract description 19
- 230000037431 insertion Effects 0.000 abstract description 19
- 238000005219 brazing Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 3
- 230000000149 penetrating effect Effects 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 238000005253 cladding Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Mechanical Coupling Of Light Guides (AREA)
- Light Guides In General And Applications Therefor (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、各種の計測制御や物性
測定の際に用いると従来製品に比べて挿入損失が少ない
光気密アダプタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical hermetic adapter which has a smaller insertion loss than conventional products when used in various measurement control and physical property measurements.
【０００２】[0002]
【従来の技術】真空容器内部の計測制御や物性測定を各
種のセンサによって行なうには、該センサで計測したア
ナログ信号をデジタル信号に変調したり又は周波数変調
してから、光ファイバを介して容器外部へ伝送すること
が必要である。光ファイバは、計測値などを正確に伝送
できるので好ましく、且つ細くて防爆性を有するうえに
真空や低温における耐久性の点でも優れている。2. Description of the Related Art In order to perform measurement control and physical property measurement inside a vacuum container by various sensors, an analog signal measured by the sensor is modulated into a digital signal or frequency modulated, and then the container is passed through an optical fiber. It is necessary to transmit to the outside. The optical fiber is preferable because it can accurately transmit a measured value and the like, and is thin and has an explosion-proof property, and is also excellent in durability in vacuum and low temperature.
【０００３】 光ファイバで真空容器の内部から外部へ
信号を伝送するには、真空性を損わないように光気密ア
ダプタを介して行なう。従来の光気密アダプタは、容器
壁に密封取付けするフランジの中央に石英ガラス板を固
着し、該ガラス板の両側に光ファイバ心線の先端部を同
軸状に対向取付けするとともに、各ファイバ心線の先端
に球レンズ又は集束性ロッドレンズを設置する。一方の
球レンズ又は集束性ロッドレンズではマルチモード光フ
ァイバから出る光を一旦拡散させ、この光が石英ガラス
板を通過した後に、他方の球レンズ又は集束性ロッドレ
ンズにおいて光を集束させて光ファイバに結合させる。A signal is transmitted from the inside of the vacuum container to the outside by an optical fiber through an optical hermetic adapter so as not to impair the vacuum property. In the conventional optical hermetic adapter, a quartz glass plate is fixed to the center of a flange that is hermetically attached to a container wall, and the ends of the optical fiber cores are coaxially and oppositely mounted on both sides of the glass plate. Install a spherical lens or focusing rod lens at the tip of the. In one spherical lens or converging rod lens, the light emitted from the multimode optical fiber is once diffused, and after this light passes through the quartz glass plate, the other spherical lens or converging rod lens condenses the light into the optical fiber. Bind to.
【０００４】[0004]
【発明が解決しようとする課題】従来の光気密アダプタ
は、１対の球レンズ又は集束性ロッドレンズの設置によ
って、光ファイバ心線の伝送効率がかなり高いけれど
も、それでもかなりの挿入損失が発生する。この挿入損
失を回避するには、光気密アダプタを介さずに、光ファ
イバ心線が直接真空容器壁を貫通できればよいのは明白
であっても、光ファイバ心線はきわめて折れやすく、プ
ラスチック被覆した程度の光ファイバ心線を直接貫通さ
せることは不可能である。また、光ファイバ心線を補強
用の金属キャピラリに挿入すれば、該ファイバ心線の外
周とキャピラリ内周との間を完全に気密にできない。In the conventional optical hermetic adapter, the transmission efficiency of the optical fiber core wire is considerably high due to the installation of the pair of spherical lenses or the converging rod lens, but the considerable insertion loss still occurs. . In order to avoid this insertion loss, it is obvious that the optical fiber core wire can pass directly through the vacuum vessel wall without going through the optical airtight adapter, but the optical fiber core wire is very fragile and coated with plastic. It is impossible to directly penetrate a certain degree of optical fiber core wire. Further, if the optical fiber core wire is inserted into the reinforcing metal capillary, the space between the outer circumference of the fiber core wire and the inner circumference of the capillary cannot be completely airtight.
【０００５】 一方、従来の光気密アダプタの挿入損失
を改善するために、光ファイバ心線を光気密アダプタの
貫通孔中に挿入しようとしても、前記と同様に光ファイ
バ心線が折れやすく、光ファイバ心線を光気密アダプタ
を貫通させることはできない。この光ファイバ心線を補
強用の金属キャピラリに挿入できたとしても、前記と同
様に該ファイバ心線とキャピラリとの間が気密にならな
いという問題が生じる。On the other hand, even if the optical fiber core wire is inserted into the through hole of the optical airtight adapter in order to improve the insertion loss of the conventional optical airtight adapter, the optical fiber core wire is apt to be broken as in the above case, The fiber core cannot pass through the light tight adapter. Even if this optical fiber core wire can be inserted into the reinforcing metal capillary, the problem arises that the space between the fiber core wire and the capillary is not airtight as described above.
【０００６】 本発明は、金属皮膜をコートした光ファ
イバ心線を用い、該光ファイバ心線をフランジの貫通孔
中へ挿入して密封固着することにより、比較的容易且つ
安価に挿入損失を改善できる光気密アダプタを提供する
ことを目的としている。本発明の他の目的は、光ファイ
バ心線の挿入後に貫通孔の皿座ぐり部に溶融金属を盛り
上げてロウ付けすることにより、耐久性が優れ且つ空気
洩れの発生しない光気密アダプタを提供することであ
る。According to the present invention, an optical fiber core wire coated with a metal film is used, and the optical fiber core wire is inserted into a through hole of a flange and hermetically fixed, thereby relatively easily and inexpensively improving the insertion loss. It is intended to provide a light-tight adapter that can be used. Another object of the present invention is to provide a light-tight adapter that has excellent durability and does not cause air leakage by raising molten metal in the counterbore part of the through hole and brazing it after inserting the optical fiber core wire. That is.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明に係る光気密アダプタ１は、図１及び図２に
示すように、金属皮膜２をコートした光ファイバ心線３
と、容器壁に密封取付けする金属フランジ４とを備え、
該光ファイバ心線は一般にマルチモードの光ファイバ５
上に金属皮膜２をコートして形成する。光気密アダプタ
１は、フランジ４において一端面から他端面へ通じる細
い貫通孔６（図３）を穿孔し、該貫通孔の数は通常１個
であるけれども、図５に例示するように２個又はそれ以
上設けることも可能である。In order to achieve the above object, the optical hermetic adapter 1 according to the present invention has an optical fiber core wire 3 coated with a metal film 2 as shown in FIGS. 1 and 2.
And a metal flange 4 sealingly attached to the container wall,
The optical fiber core is generally a multimode optical fiber 5
It is formed by coating the metal film 2 on the top. The light-tight adapter 1 has a thin through hole 6 (FIG. 3) communicating from one end surface to the other end surface of the flange 4, and the number of the through hole is usually one, but as shown in FIG. It is also possible to provide more than that.
【０００８】 光ファイバ５上にコートする金属皮膜２
は、直接光ファイバ５上にコートしてもよいが、通常は
光ファイバ５に無電解めっき法，真空蒸着法，スパッタ
リング法，イオンめっき法などでまず数μｍ以下の厚さ
に形成し、さらに電気めっき法で所定厚に形成すればよ
い。金属皮膜２の素材は、銅，ニッケル，銀，金などで
ある。A metal film 2 coated on the optical fiber 5
May be coated directly on the optical fiber 5, but usually, the optical fiber 5 is first formed by electroless plating, vacuum deposition, sputtering, ion plating or the like to a thickness of several μm or less, and It may be formed to a predetermined thickness by electroplating. The material of the metal film 2 is copper, nickel, silver, gold or the like.
【０００９】 フランジ４では、一般に貫通孔６を端面
中央に穿孔し、該貫通孔の内径は光ファイバ心線３が挿
入可能な範囲で可能な限り小さいと好ましい。貫通孔６
は、図３に示すように両端部をそれぞれ皿座ぐりし、光
ファイバ心線３を挿入した後に皿座ぐり部に溶融金属７
を盛り上げてロウ付けする。In the flange 4, a through hole 6 is generally bored in the center of the end face, and the inner diameter of the through hole is preferably as small as possible within a range in which the optical fiber core wire 3 can be inserted. Through hole 6
As shown in FIG. 3, both ends are countersunk, and after inserting the optical fiber core wire 3, the molten metal 7 is placed in the countersunk part.
And braze.
【００１０】 光ファイバ心線３の両端面は、フランジ
４の貫通孔６中に挿入して固着した後に平滑に研磨し、
これによって両端面における金属皮膜２を完全に除去す
る。図４に示すように、光ファイバ心線３の一方の端面
を平滑に研磨するとともに、該ファイバ心線の他方をピ
ッグテイル８とすることも可能である。光ファイバ心線
３の平滑な両端面には、光気密アダプタ１を真空容器
（図示しない）などにボルト止めした後に、光コネクタ
（図示しない）などで接続すればよい。Both end faces of the optical fiber core wire 3 are inserted into the through holes 6 of the flange 4 and fixed, and then polished smoothly.
As a result, the metal film 2 on both end surfaces is completely removed. As shown in FIG. 4, it is possible to polish one end surface of the optical fiber core wire 3 smoothly and use the other end of the fiber core wire 3 as a pigtail 8. The light-tight adapter 1 may be bolted to a vacuum container (not shown) or the like, and then connected to the smooth both ends of the optical fiber core wire 3 with an optical connector (not shown) or the like.
【００１１】[0011]
【作用】光気密アダプタ１では、フランジ４を貫通した
光ファイバ心線３だけを介してデジタル信号又は周波数
変調したアナログ信号を容器外部へ伝送し、この際の挿
入損失が従来よりも相当に少なくなる。光ファイバ心線
３は、十分な厚みの金属皮膜２をコートすることによ
り、貫通孔６への挿入時及び使用時に曲ったり折れたり
することがない。また、貫通孔６の皿座ぐり部には、光
ファイバ心線３を挿入した後に溶融金属７を埋め込むこ
とにより、ロウ付け金属７によって気密性が増すことに
なる。In the optical airtight adapter 1, the digital signal or the frequency-modulated analog signal is transmitted to the outside of the container only through the optical fiber core wire 3 penetrating the flange 4, and the insertion loss at this time is considerably smaller than the conventional one. Become. Since the optical fiber core wire 3 is coated with the metal film 2 having a sufficient thickness, the optical fiber core wire 3 does not bend or break during insertion into the through hole 6 and during use. Further, by inserting the optical fiber core wire 3 into the counterbore portion of the through hole 6 and then burying the molten metal 7, the brazing metal 7 increases airtightness.
【００１２】[0012]
【実施例】次に、本発明を実施例に基づいて説明する。 実施例１ 図１から明らかなように、光気密アダプタ１は外径５０
ｍｍ，厚さ１０ｍｍのステンレス鋼製のフランジ４から
なり、フランジ周辺に４個のボルト孔９を等間隔に設け
るとともに、高圧側の端面に軸径２１ｍｍ，穴外径２５
ｍｍで幅２ｍｍの環状溝１０を形成する。環状溝１０に
は、運動用Ｏリング（ＪＩＳ・Ｂ２４０１、Ｐ２１）１
１を嵌め込んで固着する。フランジ４の端面中央におい
て、一端面から他端面へ通じる径０.６ｍｍの細い貫通
孔６を穿孔し、さらに直径１ｍｍのドリル（図示しな
い）を用いて貫通孔６の両端部にそれぞれ皿座ぐり部１
２，１２を形成する（図３参照）。EXAMPLES Next, the present invention will be explained based on examples. Example 1 As is apparent from FIG. 1, the light-tight adapter 1 has an outer diameter of 50.
mm, 10 mm thick stainless steel flange 4, four bolt holes 9 are provided at equal intervals around the flange, and the high pressure side end face has a shaft diameter of 21 mm and a hole outer diameter of 25.
An annular groove 10 having a width of 2 mm and a width of 2 mm is formed. O-ring for movement (JIS B2401, P21) 1 in the annular groove 10
Insert 1 and fix. In the center of the end face of the flange 4, a small through hole 6 having a diameter of 0.6 mm is formed from one end face to the other end face, and further, using a drill (not shown) having a diameter of 1 mm, countersunk counterbore at each end of the through hole 6. Part 1
2 and 12 are formed (see FIG. 3).
【００１３】 一方、光ファイバ５として、コア径５０
μｍ，クラッド径１２５μｍのマルチモードのＧＩ形光
ファイバを用いる。光ファイバ５に無電解めっき法で下
地金属を薄くコートしてから、電気めっき法によってニ
ッケル２をめっきし、得た光ファイバ心線３の外径を５
５０μｍに定める。光ファイバ心線３は１５ｍｍ程度に
切断して使用する。On the other hand, as the optical fiber 5, a core diameter of 50
A multimode GI optical fiber having a μm and a cladding diameter of 125 μm is used. The optical fiber 5 is coated with a base metal thinly by an electroless plating method, and then nickel 2 is plated by an electroplating method so that the outer diameter of the obtained optical fiber core wire 3 is 5
Set to 50 μm. The optical fiber core wire 3 is used after being cut to about 15 mm.
【００１４】 切断した光ファイバ心線３をフランジ４
の貫通孔６中に挿入した後に、該フランジを加熱して約
２６０℃まで昇温させる。昇温した時点で、錫鉛はんだ
とフラックスによって光ファイバ心線３を固定し、さら
に両皿座ぐり部１２，１２に錫鉛はんだ７を盛り上げ
る。ついでフランジ４を常温に冷却してから、光ファイ
バ心線３の両端面を研磨し、光ファイバ心線３の両端面
とフランジ表面とを平滑にする。The cut optical fiber core wire 3 is provided with a flange 4
After being inserted into the through hole 6 of FIG. 1, the flange is heated to a temperature of about 260 ° C. When the temperature is raised, the optical fiber core wire 3 is fixed with tin-lead solder and flux, and the tin-lead solder 7 is heaped up on the counterbore portions 12 and 12 of both plates. Then, after cooling the flange 4 to room temperature, both end faces of the optical fiber core wire 3 are polished to make both end faces of the optical fiber core wire 3 and the flange surface smooth.
【００１５】 得た光気密アダプタ１の挿入損失を測定
するために、光軸を合わせながらレセプタクル（図示し
ない）を光ファイバ心線３に片端ずつ取り付けた後に、
該光ファイバ心線の両端面をそれぞれＦＣコネクタ付き
光ファイバに接続する。この態様で挿入損失を測定する
と１.４ｄＢの結果を得、従来の光気密アダプタの挿入
損失約３ｄＢよりも相当に優れている。また、光気密ア
ダプタ１の気密性を常法によって測定すると、リーク量
が１×１０-6ａｔｍ・ｃｃ／ｓｅｃ以下にすぎない。In order to measure the insertion loss of the obtained optical hermetic adapter 1, after attaching receptacles (not shown) to the optical fiber core wire 3 one by one while aligning the optical axes,
Both end faces of the optical fiber core are connected to optical fibers with FC connectors. When the insertion loss is measured in this manner, a result of 1.4 dB is obtained, which is considerably superior to the insertion loss of the conventional optical hermetic adapter of about 3 dB. When the airtightness of the light-tight adapter 1 is measured by a conventional method, the leak amount is only 1 × 10 −6 atm · cc / sec or less.
【００１６】実施例２ 図５から明らかなように、光気密アダプタ１５は外径７
５ｍｍ，厚さ１２ｍｍのステンレス鋼製のフランジ１６
からなり、フランジ周辺に４個のボルト孔１７を等間隔
に設けるとともに、高圧側の端面に軸径３４ｍｍ，穴外
径４０ｍｍで幅３ｍｍの環状溝１８を形成する。環状溝
１８には、運動用Ｏリング（ＪＩＳ・Ｂ２４０１、Ｐ３
４）１９を嵌め込んで固着する。フランジ１６の端面に
おいて、中心点から６ｍｍ離れた点対称位置に一端面か
ら他端面へ通じる径０.６ｍｍの細い貫通孔２０，２０
を穿孔し、さらに直径１ｍｍのドリル（図示しない）を
用いて各貫通孔２０の両端部にそれぞれ皿座ぐり部（図
示しない）を形成する。Embodiment 2 As is apparent from FIG. 5, the light-tight adapter 15 has an outer diameter of 7
5 mm, 12 mm thick stainless steel flange 16
4 bolt holes 17 are provided around the flange at equal intervals, and an annular groove 18 having a shaft diameter of 34 mm, a hole outer diameter of 40 mm and a width of 3 mm is formed on the end surface on the high pressure side. O-ring for movement (JIS B2401, P3
4) Insert 19 and fix. On the end face of the flange 16, a thin through hole 20, 20 having a diameter of 0.6 mm that communicates from one end face to the other end face at a point symmetrical position 6 mm away from the center point.
And a counterbore (not shown) is formed at each end of each through hole 20 using a drill (not shown) having a diameter of 1 mm.
【００１７】 実施例１で用いた光ファイバ心線３を適
宜の長さに切断し、フランジ１６の貫通孔２０，２０中
にそれぞれ挿入した後に、実施例１と同様に処理して光
気密アダプタ１５を得る。得た光気密アダプタ１５の挿
入損失及びリーク量ともに実施例１と同様であり、従来
の光気密アダプタの挿入損失よりも優れている。The optical fiber core wire 3 used in the first embodiment is cut to an appropriate length, inserted into the through holes 20, 20 of the flange 16, and then processed in the same manner as in the first embodiment to perform the optical hermetic adapter. Get 15. The insertion loss and the leak amount of the obtained optical hermetic adapter 15 are the same as those of the first embodiment, and are superior to the insertion loss of the conventional optical hermetic adapter.
【００１８】実施例３ 光ファイバとして、コア径５０μｍ，クラッド径１２５
μｍのマルチモードのＧＩ形光ファイバを用いる。この
光ファイバ１ｍの全長にわたってニッケルを５μｍコー
トしてから、光ファイバ心線の端部２０ｃｍに電気めっ
き法によってニッケル２をめっきし、この端部の外径を
５５０μｍとする。Example 3 An optical fiber having a core diameter of 50 μm and a cladding diameter of 125
A μm multimode GI optical fiber is used. After coating 5 μm of nickel over the entire length of 1 m of the optical fiber, 20 cm of the end of the optical fiber core is plated with nickel 2 by electroplating, and the outer diameter of this end is set to 550 μm.
【００１９】 得た光ファイバ心線３の端部を実施例１
で用いたフランジ４の貫通孔６中に挿入した後に、該フ
ランジを加熱して約２６０℃まで昇温させる。昇温した
時点で錫鉛はんだとフラックスによって光ファイバ心線
３を固定し、さらに両皿座ぐり部１２，１２に錫鉛はん
だ７を盛り上げてから、フランジ４を常温に冷却する。
得た光気密アダプタ２５（図４）は、光ファイバ心線３
の片端面２６のみを研磨して平滑にし、他方はピッグテ
イル８の態様とする。The end portion of the optical fiber core wire 3 thus obtained was used in Example 1.
After being inserted into the through hole 6 of the flange 4 used in step 1, the flange is heated to a temperature of about 260 ° C. When the temperature is raised, the optical fiber core wire 3 is fixed by tin-lead solder and flux, the tin-lead solder 7 is further raised in both counterbore parts 12, 12, and then the flange 4 is cooled to room temperature.
The obtained optical hermetic adapter 25 (FIG. 4) is used for the optical fiber core wire 3
Only one end surface 26 of No. 1 is polished to be smooth, and the other end is formed into a pigtail 8.
【００２０】 得た光気密アダプタ２５は、実施例１と
同様に挿入損失を測定すると、片側がピッグテイル８で
あるために実施例１の約半分となり、挿入損失０.６ｄ
Ｂの結果を得る。また、光気密アダプタ２５の気密性を
常法によって測定すると、実施例１及び２と同様にリー
ク量は１×１０-6ａｔｍ・ｃｃ／ｓｅｃ以下である。When the insertion loss of the obtained optical airtight adapter 25 was measured in the same manner as in Example 1, it was about half that in Example 1 due to the pigtail 8 on one side, and the insertion loss was 0.6d.
Get the result of B. Further, when the airtightness of the light-tight adapter 25 is measured by a conventional method, the leak amount is 1 × 10 −6 atm · cc / sec or less as in the first and second embodiments.
【００２１】[0021]
【発明の効果】本発明に係る光気密アダプタは、フラン
ジを貫通した光ファイバ心線だけを介して信号を容器外
部へ伝送し、石英ガラス板及び対向取付けした球レンズ
又は集束性ロッドレンズを介していないので挿入損失が
従来よりも相当に少なくなる。本発明の光気密アダプタ
を用いると、金属皮膜をコートした光ファイバ心線だけ
で真空容器の内部から外部へ直接伝送することになり、
該心線の一方をピッグテイルとすると挿入損失をいっそ
う軽減することができる。The optical airtight adapter according to the present invention transmits a signal to the outside of the container only through the optical fiber core wire that penetrates the flange, and through the quartz glass plate and the ball lens or the converging rod lens that are mounted opposite to each other. The insertion loss is significantly lower than before. When the optical hermetic adapter of the present invention is used, it is possible to directly transmit from the inside of the vacuum container to the outside only by the optical fiber core wire coated with the metal film,
If one of the core wires is a pigtail, the insertion loss can be further reduced.
【００２２】 本発明の光気密アダプタでは、光ファイ
バ心線の貫通孔を皿座ぐりしてロウ付け金属を盛り上げ
ることにより、該アダプタの気密性が増して貫通孔から
の空気洩れは殆ど発生しない。この光気密アダプタは、
貫通孔の皿座ぐり部に盛り上げるロウ付け金属を適宜に
選択すれば、光ファイバ心線が高温域において不安定に
なるようなことも発生しない。In the optical airtight adapter of the present invention, the through hole of the optical fiber core is countersunk to raise the brazing metal to raise the airtightness of the adapter, and the air leakage from the through hole hardly occurs. . This light tight adapter
If the brazing metal to be raised on the counterbore part of the through hole is appropriately selected, the optical fiber core will not become unstable in the high temperature region.
【００２３】 本発明の光気密アダプタで用いる光ファ
イバ心線は、光ファイバを十分な厚みの金属皮膜で覆っ
ているので耐久性及び耐屈曲性も優れ、貫通孔への挿入
時及び使用時に曲ったり折れたりしない。この光ファイ
バ心線は、貫通孔への挿入部分の金属皮膜が特に厚くて
十分な耐熱性と機械強度を有し、一方、ピッグテイル部
分は金属皮膜が比較的薄くて柔軟性が殆ど低下しない。The optical fiber core wire used in the optical hermetic adapter of the present invention has excellent durability and bending resistance because the optical fiber is covered with a metal film having a sufficient thickness, and is bent at the time of insertion into the through hole and during use. It does not break or break. In this optical fiber core wire, the metal coating at the portion inserted into the through hole is particularly thick and has sufficient heat resistance and mechanical strength, while the pigtail portion has a relatively thin metal coating, and flexibility is hardly reduced.
【図１】 本発明に係る光気密アダプタを示す平面図で
ある。FIG. 1 is a plan view showing a light-tight adapter according to the present invention.
【図２】 本発明で用いる光ファイバ心線を示す拡大縦
断面図である。FIG. 2 is an enlarged vertical sectional view showing an optical fiber core wire used in the present invention.
【図３】 図１の光気密アダプタの要部を拡大して示す
縦断面図である。FIG. 3 is a longitudinal sectional view showing an enlarged main part of the optical hermetic adapter of FIG.
【図４】 光気密アダプタの変形例を示す側面図であ
る。FIG. 4 is a side view showing a modified example of the light-tight adapter.
【図５】 光気密アダプタの別の変形例を示す平面図で
ある。FIG. 5 is a plan view showing another modification of the light-tight adapter.
１ 光気密アダプタ ２ 金属皮膜 ３ 光ファイバ心線 ４ 金属フランジ ５ 光ファイバ ６ 貫通孔 ７ ロウ付け金属 ８ ピッグテイル 1 Optical Hermetic Adapter 2 Metal Film 3 Optical Fiber Core 4 Metal Flange 5 Optical Fiber 6 Through Hole 7 Brazing Metal 8 Pigtail
フロントページの続き (72)発明者 近藤 礼志 神奈川県横浜市鶴見区江ケ崎町４番１号 東京電力株式会社電力技術研究所内 (72)発明者 宇田 芳人 大阪府寝屋川市楠根北町２番５号 協和電 線株式会社内 (72)発明者 黒羽 敏明 大阪府寝屋川市楠根北町２番５号 協和電 線株式会社内Front page continuation (72) Inventor Reishi Kondo 4-1, Egasaki-cho, Tsurumi-ku, Yokohama-shi, Kanagawa Electric Power Technology Research Institute, TEPCO (72) Inventor Yoshito Uda 2-5, Kusunekita-machi, Neyagawa-shi, Osaka Kyowa Electric Wire Co., Ltd. (72) Inventor Toshiaki Kurobane 2-5, Kusunekita-machi, Neyagawa City, Osaka Kyowa Electric Wire Co., Ltd.
Claims (4)
と、容器壁に密封取付けする金属フランジとからなり、
該フランジにおいて一端面から他端面へ通じる細い貫通
孔を穿孔し、光ファイバ心線をフランジの貫通孔中へ挿
入して密封固着し、さらに光ファイバ心線の両端面を平
滑に研磨する光気密アダプタ。1. An optical fiber core wire coated with a metal film, and a metal flange hermetically attached to a container wall,
A thin through hole communicating from one end surface to the other end surface of the flange is bored, the optical fiber core wire is inserted into the through hole of the flange and hermetically fixed, and both end surfaces of the optical fiber core wire are smooth-polished light tight. adapter.
と、容器壁に密封取付けする金属フランジとからなり、
該フランジにおいて一端面から他端面へ通じる細い貫通
孔を穿孔し、光ファイバ心線をフランジの貫通孔中へ挿
入して密封固着し、光ファイバ心線の一方の端面を平滑
に研磨するとともに、該ファイバ心線の他方をピッグテ
イルとする光気密アダプタ。2. An optical fiber core wire coated with a metal film and a metal flange hermetically attached to a container wall,
In the flange, a thin through hole communicating from one end face to the other end face is punched, the optical fiber core wire is inserted into the through hole of the flange and hermetically fixed, and one end surface of the optical fiber core wire is smoothly polished, A light-tight adapter using the other end of the fiber core as a pigtail.
と、容器壁に密封取付けする金属フランジとからなり、
該フランジにおいて一端面から他端面へ通じる細い貫通
孔を穿孔して皿座ぐりし、光ファイバ心線を挿入した後
に皿座ぐり部に溶融金属を盛り上げてロウ付けすること
により、該貫通孔を完全に密封する光気密アダプタ。3. An optical fiber core wire coated with a metal film and a metal flange hermetically attached to a container wall,
In the flange, a thin through hole communicating from one end face to the other end face is punched to countersink, and after inserting the optical fiber core wire, the molten metal is raised and brazed to the countersunk spot to braze the through hole. A light-tight adapter that completely seals.
ジに穿孔し、各貫通孔中へ光ファイバ心線を挿入して密
封固着する請求項１、２又は３記載の光気密アダプタ。4. The optical hermetic adapter according to claim 1, 2 or 3, wherein two or more thin through holes are bored in the flange, and an optical fiber core wire is inserted into each through hole and hermetically fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05189595A JP3542842B2 (en) | 1995-02-15 | 1995-02-15 | Light tight adapter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05189595A JP3542842B2 (en) | 1995-02-15 | 1995-02-15 | Light tight adapter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08220347A true JPH08220347A (en) | 1996-08-30 |
| JP3542842B2 JP3542842B2 (en) | 2004-07-14 |
Family
ID=12899621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05189595A Expired - Fee Related JP3542842B2 (en) | 1995-02-15 | 1995-02-15 | Light tight adapter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3542842B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110908249A (en) * | 2019-11-29 | 2020-03-24 | 中国科学院微电子研究所 | Light transmission device used in EUV vacuum environment and photoetching machine |
-
1995
- 1995-02-15 JP JP05189595A patent/JP3542842B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110908249A (en) * | 2019-11-29 | 2020-03-24 | 中国科学院微电子研究所 | Light transmission device used in EUV vacuum environment and photoetching machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3542842B2 (en) | 2004-07-14 |
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