JPH08220161A - Detecting device of capacitance and sensor using the device - Google Patents

Detecting device of capacitance and sensor using the device

Info

Publication number
JPH08220161A
JPH08220161A JP7028059A JP2805995A JPH08220161A JP H08220161 A JPH08220161 A JP H08220161A JP 7028059 A JP7028059 A JP 7028059A JP 2805995 A JP2805995 A JP 2805995A JP H08220161 A JPH08220161 A JP H08220161A
Authority
JP
Japan
Prior art keywords
capacitance
input
logical operation
operation means
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7028059A
Other languages
Japanese (ja)
Inventor
Toshiaki Yatabe
利彰 矢田部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
A & T Kk
Original Assignee
A & T Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by A & T Kk filed Critical A & T Kk
Priority to JP7028059A priority Critical patent/JPH08220161A/en
Publication of JPH08220161A publication Critical patent/JPH08220161A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a detecting device of capacitance to execute a stable measurement even when a high frequency is used and enabling highly-accurate detection of a change in a very small amount of capacitance, such as a floating capacity, and also a sensor to which the detecting device of capacitance is applied, by using a simple circuit structure. CONSTITUTION: This device is equipped with an oscillating means 102 for oscillating a rectangular wave of a prescribed frequency, a two-input logical operation means 105 and first and second resistors 103 and 104 connected in series between an output end of the oscillating means 102 and one and the other inputs of the two-input logical operation means 105 respectively and having the same characteristics. A terminal 111 to be measured is connected to one or the other input of the two-input logical operation means 105 and a change in capacitance 115 (Cp) in the terminal 111 to be measured is detected on the basis of a change in an output voltage of the two-input logical operation means 105.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は静電容量検出装置及びそ
れを用いたセンサに係り,特に,簡単な回路構造によっ
て,高い周波数を使用した場合でも安定した測定が可能
で,微量の静電容量の変化を高精度に検出可能な静電容
量検出装置,並びに,該静電容量検出装置を例えば液面
センサ等に適用することにより,高い周波数を使用した
場合でも安定して微量の浮遊容量等の静電容量の変化を
検出でき,確実に被測定端子位置を認識し得るようにし
たセンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitance detecting device and a sensor using the same, and in particular, a simple circuit structure enables stable measurement even when a high frequency is used. By applying a capacitance detecting device capable of detecting a change in capacitance with high accuracy, and applying the capacitance detecting device to, for example, a liquid level sensor, a small amount of stray capacitance can be stably obtained even when a high frequency is used. The present invention relates to a sensor capable of detecting a change in capacitance such as, and reliably recognizing the position of a terminal to be measured.

【0002】[0002]

【従来の技術】従来,臨床分野では,人体の血清,尿等
を測定対象(以下,検体という)として,各種試薬と反
応させて反応状態を化学的に分析し,各種項目の測定を
行って診断に供する自動化学分析装置が知られている。
この自動化学分析装置には,例えば,バイオセンサ,イ
オンセンサ等が備えられ,各種項目を測定する。
2. Description of the Related Art Conventionally, in the clinical field, human serum, urine, etc. have been used as measurement targets (hereinafter referred to as "samples") to react with various reagents to chemically analyze the reaction state and measure various items. An automatic chemical analyzer used for diagnosis is known.
This automatic chemical analyzer is equipped with, for example, a biosensor, an ion sensor, etc., and measures various items.

【0003】このような自動化学分析装置において,測
定操作を自動化するために不可欠の技術が種々あるが,
その1つに,プローブ(吸い込み針)を検体の入った試
験管に挿入するに当たり,検体の液面を検出して,プロ
ーブが移動し過ぎて試験管や装置に損傷を与えることな
く,またプローブ先端の汚れによるキャリーオーバを防
止するために,プローブを試験管内で液面から一定位置
に設定する技術がある。この際,プローブが液面に触れ
たことの検出は,液面センサによって行われている。
In such an automatic chemical analyzer, there are various techniques indispensable for automating the measuring operation.
One of them is that the probe (suction needle) is inserted into the test tube containing the sample, the liquid level of the sample is detected, and the probe does not move too much to damage the test tube or the device. In order to prevent carry-over due to dirt on the tip, there is a technique to set the probe at a fixed position in the test tube from the liquid level. At this time, the detection of the probe touching the liquid surface is performed by the liquid surface sensor.

【0004】従来,自動化学分析装置においては,液面
センサとして,例えば静電容量式液面センサ等が使用さ
れている。この静電容量式液面センサにおける液面の検
出原理は,プローブの先端に容量検出部(静電容量検出
装置)を設けて,検出される静電容量の変化を認識する
ものである。即ち,空中より検体の液面に液面センサの
容量検出部(金属プローブ等の先端)が触れるときに,
液体の持つ浮遊容量によって検出される静電容量が大き
く変化するのを捉えて,プローブが液面に触れたことを
認識するものである。
Conventionally, in the automatic chemical analyzer, for example, a capacitance type liquid level sensor has been used as the liquid level sensor. The principle of liquid level detection in this capacitance type liquid level sensor is to provide a capacitance detection unit (capacitance detection device) at the tip of the probe to recognize changes in the detected capacitance. That is, when the liquid level sensor's capacitance detector (the tip of a metal probe, etc.) touches the liquid level of the sample from the air,
It recognizes that the capacitance detected by the stray capacitance of the liquid changes significantly and recognizes that the probe has touched the liquid surface.

【0005】また,液面センサには,2本のプローブを
備えた構成で,該2本のプローブ間の電流を検知してプ
ローブが液面に触れたことを認識するものもある。上記
静電容量式液面センサは1本のプローブで構成し得るこ
とから,この2本プローブ式のセンサに比べて検出部の
容積が小さく,より狭い空間における検出が可能となる
という利点を有する。特に,最近の自動化学分析装置に
おいては,内部に備える試験管の径が小さいものが多
く,検出部の容積の小さい静電容量式液面センサが有効
である。
Some liquid level sensors have two probes and detect the current between the two probes to recognize that the probes have touched the liquid level. Since the capacitance type liquid level sensor can be constituted by one probe, it has an advantage that the volume of the detecting portion is smaller than that of the two probe type sensor and detection in a narrower space is possible. . Especially, in recent automatic chemical analyzers, many of the test tubes provided inside have a small diameter, and a capacitance type liquid level sensor having a small detection unit volume is effective.

【0006】また静電容量式液面センサにおいて,検出
される静電容量の変化を認識する静電容量検出装置とし
ては,従来,オペアンプを利用したものがあり,例え
ば,容量マルチプライヤ方式やブリッジ回路構成のもの
が広く用いられている。またこの他にも,静電容量を利
用した発振回路により,発振周波数または位相の変化を
捉えて静電容量の変化を検出する等々の方法が知られて
いる。
In a capacitance type liquid level sensor, as a capacitance detecting device for recognizing a change in the detected capacitance, there is a conventional one using an operational amplifier, for example, a capacitance multiplier system or a bridge. A circuit configuration is widely used. In addition to this, there are known methods such as capturing a change in oscillation frequency or phase and detecting a change in capacitance by an oscillation circuit using capacitance.

【0007】オペアンプを利用した装置の基本的回路構
成は,オペアンプの一方の入力に接続される静電容量
(プローブ先端の静電容量に相当する)の容量変化を,
オペアンプにより増幅された電圧変化により認識する,
或いは発振周波数の変化により認識するものである。
The basic circuit configuration of a device using an operational amplifier is to measure the capacitance change of the electrostatic capacitance (corresponding to the electrostatic capacitance at the probe tip) connected to one input of the operational amplifier.
Recognize by the voltage change amplified by the operational amplifier,
Alternatively, it is recognized by a change in the oscillation frequency.

【0008】通常,自動化学分析装置等に用いられる静
電容量式液面センサが測定対象とするのは,プローブに
発生する浮遊容量であって非常に微小な容量値である。
一般に,容量検出においては,小さな容量ほど高い周波
数を用いた計測が一定以上の精度を得るためには有利な
方法である。
Normally, the capacitance type liquid level sensor used in an automatic chemical analyzer or the like targets a stray capacitance generated in a probe, which is a very small capacitance value.
Generally, in the capacity detection, the smaller the capacity, the more accurate the measurement using a high frequency is in order to obtain a certain accuracy or more.

【0009】一方,オペアンプは数十[kHz]程度以
下の周波数を扱うものが多く,この通常のオペアンプで
は,高周波になると自己の周波数特性の制約から動作が
不安定となる。また,高い周波数でも安定した動作を行
う高速オペアンプを用いることもできるが,高価であ
り,製品コストに及ぼす影響が大きい。
On the other hand, many operational amplifiers handle frequencies of about several tens [kHz] or less, and the operation of this ordinary operational amplifier becomes unstable at high frequencies due to its own frequency characteristic restriction. A high-speed operational amplifier that operates stably even at a high frequency can be used, but it is expensive and has a large effect on the product cost.

【0010】[0010]

【発明が解決しようとする課題】以上のように,従来の
オペアンプを利用した静電容量検出装置にあっては,高
周波を用いて微小容量を検出する必要性,また高周波で
の安定した動作を保証する要請から,高速オペアンプを
使用して製品コストが高くなるという問題や,或いは補
正回路等が必要となって製品の回路構成が複雑になると
いう問題点があった。また,この静電容量検出装置を使
用した液面センサ等のセンサに至っても同様の問題が生
じていた。
As described above, in the electrostatic capacitance detecting device using the conventional operational amplifier, it is necessary to detect a minute capacitance by using high frequency, and stable operation at high frequency is required. Due to the request for guarantee, there is a problem that a high-speed operational amplifier is used to increase the product cost, or a correction circuit and the like are required to complicate the circuit configuration of the product. Further, even if a sensor such as a liquid level sensor using this capacitance detecting device is reached, the same problem occurs.

【0011】本発明は,上記従来の問題点に鑑みてなさ
れたものであって,簡単な回路構造によって,高い周波
数を使用した場合でも安定した測定が可能で,微量の浮
遊容量等の静電容量の変化を高精度に検出可能な静電容
量検出装置を提供することを目的としている。
The present invention has been made in view of the above problems of the prior art. With a simple circuit structure, stable measurement is possible even when a high frequency is used, and static electricity such as a small amount of stray capacitance is generated. It is an object of the present invention to provide a capacitance detection device capable of detecting a change in capacitance with high accuracy.

【0012】また本発明の他の目的は,本発明で提案す
る静電容量検出装置を,液面センサ等に適用することに
より,高い周波数を使用した場合でも安定して微量の浮
遊容量等の静電容量の変化を検出でき,確実に被測定端
子位置を認識し得るセンサを提供することである。
Another object of the present invention is to apply the electrostatic capacity detection device proposed in the present invention to a liquid level sensor or the like so that even if a high frequency is used, a small amount of stray capacitance or the like can be stably obtained. It is an object of the present invention to provide a sensor capable of detecting a change in electrostatic capacitance and reliably recognizing a position of a terminal to be measured.

【0013】[0013]

【課題を解決するための手段】上記課題を解決するため
に,本発明の請求項1に係る静電容量検出装置は,一定
周波数の矩形波を発振する発振手段と,2入力論理演算
手段と,前記発振手段の出力端と前記2入力論理演算手
段の一の入力及び他の入力との間にそれぞれ直列に接続
され,相互に同一特性を備える第1及び第2の抵抗とを
具備し,被測定端子を前記2入力論理演算手段の一また
は他の入力に接続し,該2入力論理演算手段の出力電圧
の変化に基づいて,前記被測定端子における静電容量の
変化を検出するものである。
In order to solve the above-mentioned problems, an electrostatic capacitance detection device according to claim 1 of the present invention comprises an oscillating means for oscillating a rectangular wave of a constant frequency, and a 2-input logical operation means. A first resistor and a second resistor, which are connected in series between the output end of the oscillating means and one input and the other input of the two-input logical operation means, and have the same characteristics as each other, A terminal to be measured is connected to one or other inputs of the two-input logical operation means, and a change in capacitance at the terminal to be measured is detected based on a change in output voltage of the two-input logical operation means. is there.

【0014】また,請求項2に係る静電容量検出装置
は,請求項1記載の静電容量検出装置において,前記2
入力論理演算手段の一の入力及び他の入力と前記第1及
び第2の抵抗との間に,それぞれ相互に同一特性を備え
る第1及び第2のインバータ回路を具備するものであ
る。
According to a second aspect of the present invention, there is provided the electrostatic capacitance detecting device according to the first aspect, wherein:
First and second inverter circuits having the same characteristics as each other are provided between one and the other inputs of the input logic operation means and the first and second resistors, respectively.

【0015】また,請求項3に係る静電容量検出装置
は,請求項1または2記載の静電容量検出装置におい
て,前記2入力論理演算手段または前記第1及び第2の
インバータ回路は,C−MOS集積回路で構成され,ヒ
ステリシス特性を備えるものである。
According to a third aspect of the present invention, there is provided the electrostatic capacitance detection device according to the first or second aspect, wherein the two-input logical operation means or the first and second inverter circuits is C. -It is composed of a MOS integrated circuit and has a hysteresis characteristic.

【0016】また,請求項4に係る静電容量検出装置
は,請求項1,2または3記載の静電容量検出装置にお
いて,前記第1及び第2のインバータ回路は,同一チッ
プ上に形成されたものである。
According to a fourth aspect of the present invention, there is provided the capacitance detecting device according to the first, second or third aspect, wherein the first and second inverter circuits are formed on the same chip. It is a thing.

【0017】また,請求項5に係るセンサは,請求項
1,2,3または4記載の静電容量検出装置を具備し,
液体の液面または物品の表面に対して前記被測定端子を
近づけていく場合に,前記静電容量検出装置により得ら
れる静電容量の変化に基づいて,前記被測定端子が前記
液面または前記表面に所定距離まで近接したこと,或い
は前記液面または前記表面に触れたことを検知するもの
である。
A sensor according to a fifth aspect comprises the capacitance detecting device according to the first, second, third or fourth aspect,
When the terminal to be measured is brought close to the liquid surface of the liquid or the surface of the article, the terminal to be measured is set to the liquid surface or the surface of the article based on a change in capacitance obtained by the capacitance detection device. It is to detect that the surface has come close to a predetermined distance or that the liquid surface or the surface is touched.

【0018】[0018]

【作用】本発明の請求項1に係る静電容量検出装置で
は,発振手段により一定周波数の矩形波を発振し,第1
及び第2の抵抗を介して2入力論理演算手段の一の入力
及び他の入力との間にそれぞれ供給する。2入力論理演
算手段の一または他の入力は被測定端子と接続されて,
2入力論理演算手段の一方には,第1または第2の抵抗
と被測定端子にかかる静電容量とで決定される遅延時間
だけ遅れた位相の電圧が印加されることになる。
In the electrostatic capacitance detecting device according to the first aspect of the present invention, the oscillating means oscillates a rectangular wave having a constant frequency,
And the second input and the second input, and is supplied between one input of the two-input logical operation means and the other input, respectively. One or the other input of the 2-input logical operation means is connected to the terminal to be measured,
A voltage having a phase delayed by a delay time determined by the first or second resistance and the capacitance applied to the terminal to be measured is applied to one of the two-input logical operation means.

【0019】2入力論理演算手段の論理演算により,2
つの入力の位相差に応じたパルス幅を持つ出力波形を得
ることとなり,該2入力論理演算手段の出力電圧の変
化,例えば出力電圧の積分値に基づいて,被測定端子に
かかる浮遊容量等の静電容量の変化を検出することが可
能となる。尚,第1及び第2の抵抗を相互に同一特性の
ものを使用することにより,2入力論理演算手段の出力
電圧を,被測定端子にかかる静電容量の変化によっての
み変化させることができ,より高精度な検出が可能とな
る。
By the logical operation of the 2-input logical operation means, 2
An output waveform having a pulse width corresponding to the phase difference between the two inputs is obtained, and based on the change in the output voltage of the 2-input logical operation means, for example, the integrated value of the output voltage, the stray capacitance or the like applied to the measured terminal is measured. It is possible to detect a change in capacitance. By using the first and second resistors having the same characteristics as each other, the output voltage of the two-input logical operation means can be changed only by the change in the capacitance applied to the measured terminal, Higher precision detection is possible.

【0020】また,請求項2または3に係る静電容量検
出装置では,2入力論理演算手段をC−MOS集積回路
で構成し,ヒステリシス特性を備えるものを使用するの
が望ましい。つまり,被測定端子にかかる浮遊容量等の
静電容量を検出する場合には,該被測定端子は電気的に
浮いた状態にあり,入力の微小変化を高精度に検出する
ためには,高い入力インピーダンスを備えるC−MOS
集積回路の素子を使用するのが望ましい。また,入力さ
れる電圧波形は第1または第2の抵抗と静電容量とで積
分された電圧波形となることから,ヒステリシス特性を
備えるものを使用するのが望ましい。
Further, in the electrostatic capacity detecting device according to the second or third aspect, it is preferable that the two-input logical operation means is composed of a C-MOS integrated circuit and has a hysteresis characteristic. That is, when detecting the electrostatic capacitance such as the stray capacitance applied to the terminal to be measured, the terminal to be measured is in an electrically floating state, and is high in order to detect minute changes in the input with high accuracy. C-MOS with input impedance
It is desirable to use integrated circuit devices. Moreover, since the input voltage waveform is a voltage waveform integrated by the first or second resistance and the electrostatic capacitance, it is desirable to use one having a hysteresis characteristic.

【0021】また,請求項2または3に係る静電容量検
出装置では,2入力論理演算手段の一の入力及び他の入
力と第1及び第2の抵抗との間に,それぞれ相互に同一
特性を備える第1及び第2のインバータ回路を備えた構
成とし,第1及び第2のインバータ回路をC−MOS集
積回路で構成し,ヒステリシス特性を備えるものを使用
することとしてもよい。
Further, in the electrostatic capacitance detecting device according to the second or third aspect, one input and the other input of the two-input logical operation means and the first and second resistors have the same characteristics, respectively. It is also possible to adopt a configuration including the first and second inverter circuits including the above, the first and the second inverter circuits including C-MOS integrated circuits, and the one including the hysteresis characteristic.

【0022】また,請求項4に係る静電容量検出装置で
は,第1及び第2のインバータ回路は,同一チップ上に
形成されたものを使用するのが望ましい。これにより,
製造プロセスが同一であることから,入力特性や温度ド
リフト等の特性ばらつきをより低減させることができ,
より高精度な検出が可能となる。例えば,第1及び第2
のインバータ回路の入力容量は同一プロセスであるので
ほぼ同一値となり,これら入力容量による影響は相殺さ
れて,2入力論理演算手段の出力電圧を,被測定端子に
かかる静電容量の変化によってのみ変化させることがで
き,より高精度な検出が可能となる。
Further, in the electrostatic capacitance detection device according to the fourth aspect, it is desirable that the first and second inverter circuits are formed on the same chip. By this,
Since the manufacturing process is the same, it is possible to further reduce characteristic variations such as input characteristics and temperature drift.
Higher precision detection is possible. For example, the first and second
Since the input capacitances of the inverter circuits are almost the same since they are in the same process, the influences of these input capacitances are canceled out, and the output voltage of the 2-input logical operation means is changed only by the change in the capacitance applied to the measured terminal. Therefore, it is possible to perform detection with higher accuracy.

【0023】また,請求項5に係るセンサでは,請求項
1,2,3または4記載の静電容量検出装置を備えて構
成し,液体の液面または物品の表面に対して被測定端子
を近づけていく場合に,静電容量検出装置により得られ
る静電容量の変化に基づいて,被測定端子が液面または
表面に所定距離まで近接したこと,或いは液面または表
面に触れたことを検知するようにしている。これによ
り,液面または表面に至るまでの距離が被測定端子の移
動と共に逐次検出することができ,また請求項1,2,
3または4記載の静電容量検出装置を用いることによ
り,高い周波数を使用した場合でも安定して微量の浮遊
容量等の静電容量の変化を検出でき,確実に被測定端子
の位置を認識し得るセンサを実現できる。
Further, a sensor according to a fifth aspect is configured by including the capacitance detecting device according to the first, second, third or fourth aspect, and a measured terminal is provided for a liquid surface of a liquid or a surface of an article. When approaching, it is detected that the measured terminal is close to the liquid surface or surface for a predetermined distance or touches the liquid surface or surface based on the change in the electrostatic capacity obtained by the electrostatic capacity detection device. I am trying to do it. With this, the liquid level or the distance to the surface can be sequentially detected along with the movement of the terminal to be measured.
By using the electrostatic capacitance detection device described in 3 or 4, it is possible to stably detect a small change in electrostatic capacitance such as a stray capacitance even when a high frequency is used, and to reliably recognize the position of the measured terminal. The sensor to obtain can be realized.

【0024】[0024]

【実施例】以下,本発明の静電容量検出装置及びそれを
用いたセンサの実施例について,図面を参照して詳細に
説明する。
Embodiments of the electrostatic capacitance detection device of the present invention and a sensor using the same will be described below in detail with reference to the drawings.

【0025】〔実施例1〕図1は本発明の実施例1に係
る静電容量検出装置とそれを用いた静電容量式液面セン
サの構成図である。
[Embodiment 1] FIG. 1 is a configuration diagram of an electrostatic capacitance detection device according to Embodiment 1 of the present invention and an electrostatic capacitance type liquid level sensor using the same.

【0026】同図において,本実施例の静電容量検出装
置101は,水晶発振器(請求の範囲にいう発振手段)
102,第1抵抗103,第2抵抗104,2入力排他
的論理和ゲート回路(2入力論理演算手段)105,処
理部106及びプローブ(被測定端子)111を備えて
構成されている。尚,当該静電容量検出装置101の測
定対象(静電容量)は,プローブ111にかかる浮遊容
量115(Cp)であり,以下,測定対象の静電容量を
浮遊容量115(Cp)として説明する。
In the figure, a capacitance detecting device 101 of this embodiment is a crystal oscillator (oscillating means in claims).
102, a first resistor 103, a second resistor 104, a 2-input exclusive OR gate circuit (2-input logical operation means) 105, a processing unit 106, and a probe (terminal to be measured) 111. The measurement target (capacitance) of the capacitance detection device 101 is the stray capacitance 115 (Cp) applied to the probe 111, and hereinafter, the capacitance of the measurement target is described as the stray capacitance 115 (Cp). .

【0027】また図1は,静電容量検出装置101を用
いた静電容量式液面センサの構成をも示しており,静電
容量式液面センサは,静電容量検出装置101と判定部
121とを備えて構成されている。
FIG. 1 also shows the configuration of a capacitance type liquid level sensor using the capacitance detecting device 101. The capacitance type liquid level sensor includes a capacitance detecting device 101 and a judging section. And 121.

【0028】本実施例では,装置小型化の観点から,発
振手段として水晶発振器を用いているが,これに限定さ
れるものではない。また,第1抵抗103及び第2抵抗
104には,相互に同一特性のものを使用する。
In the present embodiment, a crystal oscillator is used as the oscillating means from the viewpoint of miniaturization of the device, but it is not limited to this. The first resistor 103 and the second resistor 104 have the same characteristics.

【0029】更に,2入力論理演算手段として2入力排
他的論理和ゲート回路105を使用しているが,これに
限定されるものではなく,AND,OR,NAND,N
OR等のゲート回路を使用することも可能である。但
し,排他的論理和演算素子を使用する場合には,信号の
立ち上がり及び立ち下がりの2箇所について別々に認識
できるので,他の論理演算素子に比べてより効率的であ
る。
Further, although the 2-input exclusive OR gate circuit 105 is used as the 2-input logical operation means, it is not limited to this, and AND, OR, NAND, N.
It is also possible to use a gate circuit such as an OR. However, when using the exclusive OR operation element, it is possible to recognize the rising and falling points of the signal separately, which is more efficient than other logical operation elements.

【0030】尚,この2入力論理演算手段(2入力排他
的論理和ゲート回路105)は,C−MOS集積回路で
構成し,ヒステリシス特性を備えるものを使用するのが
望ましい。
It is desirable that the 2-input logical operation means (2-input exclusive OR gate circuit 105) is composed of a C-MOS integrated circuit and has a hysteresis characteristic.

【0031】これは,プローブ111にかかる浮遊容量
115(Cp)を検出する場合には,該プローブ111
は電気的に浮いた状態にあり,当該2入力排他的論理和
ゲート回路105の入力電圧の微小変化を高精度に検出
するためには,高い入力インピーダンスを備えたC−M
OS集積回路の素子を使用するのが望ましいからであ
る。
This is because when the stray capacitance 115 (Cp) applied to the probe 111 is detected, the probe 111 is
Is in an electrically floating state, and in order to detect a minute change in the input voltage of the two-input exclusive OR gate circuit 105 with high accuracy, CM having a high input impedance is used.
This is because it is desirable to use the elements of the OS integrated circuit.

【0032】また,2入力論理演算手段に入力される電
圧波形は,第2の抵抗104(R)と浮遊容量115
(Cp)とで積分された電圧波形となるため,確実な論
理動作を保証するには,ヒステリシス特性を備えるもの
を使用するのが望ましいからである。
The voltage waveform input to the 2-input logical operation means is the second resistor 104 (R) and the stray capacitance 115.
This is because a voltage waveform integrated with (Cp) is obtained, and therefore it is desirable to use one having a hysteresis characteristic in order to guarantee a reliable logical operation.

【0033】処理部106は,例えば積分回路であり,
2入力排他的論理和ゲート回路105の排他的論理和演
算により得られた,2つの入力の位相差に応じたパルス
幅を持つ出力波形を積分して,位相差を電圧値に加工す
るものである。つまり,該電圧値がプローブ111にか
かる浮遊容量115(Cp)の変化に対応した物理量と
なる。
The processing unit 106 is, for example, an integrating circuit,
The output waveform having a pulse width corresponding to the phase difference between the two inputs obtained by the exclusive OR operation of the two-input exclusive OR gate circuit 105 is integrated, and the phase difference is processed into a voltage value. is there. That is, the voltage value becomes a physical quantity corresponding to the change in the stray capacitance 115 (Cp) applied to the probe 111.

【0034】また,本実施例の静電容量検出装置101
を用いて,静電容量式液面センサを構成することができ
る。静電容量式液面センサは,容器112内の検体(血
清,尿等)113の液面に対してプローブ111を近づ
けていく場合に,静電容量検出装置101により得られ
る静電容量の変化に基づいて,プローブ111が液面に
所定距離まで近接したこと,或いは液面に触れたことを
検知するものである。即ち,判定部121が,処理部1
06によって得られた積分値等に基づいてプローブ11
1にかかる浮遊容量115(Cp)の変化を判断する。
Further, the electrostatic capacitance detection device 101 of this embodiment
Can be used to configure a capacitance type liquid level sensor. The capacitance type liquid level sensor changes the capacitance obtained by the capacitance detection device 101 when the probe 111 is brought close to the liquid level of the sample (serum, urine, etc.) 113 in the container 112. Based on the above, it is detected that the probe 111 has approached the liquid surface to a predetermined distance or has touched the liquid surface. That is, the determination unit 121 is
Probe 11 based on the integrated value and the like obtained by
The change in the stray capacitance 115 (Cp) associated with 1 is determined.

【0035】次に,本実施例の静電容量検出装置101
の動作を,図2に示すタイミングチャートを用いて詳細
に説明する。
Next, the electrostatic capacitance detection device 101 of this embodiment
The operation will be described in detail with reference to the timing chart shown in FIG.

【0036】図2(a)は第1抵抗103と2入力排他
的論理和ゲート回路105の一の入力との接続ノードA
の電圧波形であり,水晶発振器102からの基準信号入
力波形でもある。また,図2(b)は第2抵抗104と
2入力排他的論理和ゲート回路105の他の入力との接
続ノードBの電圧波形であり,該接続ノードBはプロー
ブ111にかかる浮遊容量115との接続ノードでもあ
る。
FIG. 2A shows a connection node A between the first resistor 103 and one input of the 2-input exclusive OR gate circuit 105.
Is also the waveform of the reference signal input from the crystal oscillator 102. 2B shows a voltage waveform of the connection node B between the second resistor 104 and the other input of the 2-input exclusive OR gate circuit 105, and the connection node B is a stray capacitance 115 applied to the probe 111. It is also the connection node of.

【0037】従って,図2(b)の接続ノードBの電圧
波形は,図2(a)の接続ノードAの電圧波形に対し
て,遅延時間td分だけ遅れた位相を持つ。つまり,接
続ノードBの信号は,第2抵抗104(R)と浮遊容量
115(Cp)とによる積分回路によって,積分された
電圧波形となり,2入力排他的論理和ゲート回路105
の入力におけるしきい値(”L”レベルから”H”レベ
ルに切り替わる)タイミングが時間tdだけ遅延するこ
とになる。ここで,遅延時間tdは,第2抵抗104の
抵抗値Rと浮遊容量115の容量値Cpによって決定さ
れる。
Therefore, the voltage waveform at the connection node B in FIG. 2B has a phase delayed from the voltage waveform at the connection node A in FIG. 2A by the delay time td. That is, the signal at the connection node B becomes a voltage waveform integrated by the integrating circuit formed by the second resistor 104 (R) and the stray capacitance 115 (Cp), and the 2-input exclusive OR gate circuit 105
The threshold value (switching from "L" level to "H" level) at the input of is delayed by the time td. Here, the delay time td is determined by the resistance value R of the second resistor 104 and the capacitance value Cp of the stray capacitance 115.

【0038】更に,図2(c)は,上記2つの信号を入
力として排他的論理和を取った,2入力排他的論理和ゲ
ート回路105の出力ノードCの電圧波形である。この
ように,2入力排他的論理和ゲート回路105の出力に
は,2つの入力の位相差,即ち遅延時間tdに応じたパ
ルス幅を持つ矩形波信号が得られる。
Further, FIG. 2C shows a voltage waveform of the output node C of the 2-input exclusive OR gate circuit 105, which is obtained by performing an exclusive OR with the above two signals as inputs. In this way, at the output of the 2-input exclusive OR gate circuit 105, a rectangular wave signal having a pulse width corresponding to the phase difference between the two inputs, that is, the delay time td is obtained.

【0039】以上のように,本実施例の静電容量検出装
置101では,水晶発振器102,第1抵抗103,第
2抵抗104及び2入力排他的論理和ゲート回路105
を備えた簡単な回路構造によって実現しており,従来の
オペアンプを使用した静電容量検出装置が高周波におい
て動作が不安定となるのに対して,周波数依存性の低い
素子を使用する本実施例では,高い周波数を使用した場
合でも安定した測定が可能となり,微量の浮遊容量等の
静電容量の変化を高精度に検出することができる。
As described above, in the electrostatic capacitance detection device 101 of this embodiment, the crystal oscillator 102, the first resistor 103, the second resistor 104, and the two-input exclusive OR gate circuit 105.
This embodiment is realized by a simple circuit structure provided with, and a capacitance detecting device using a conventional operational amplifier becomes unstable in operation at high frequencies, whereas this embodiment uses an element with low frequency dependence. With this, stable measurement is possible even when a high frequency is used, and it is possible to detect changes in electrostatic capacitance such as a small amount of stray capacitance with high accuracy.

【0040】また,静電容量検出装置101を,液面セ
ンサに適用することにより,高い周波数を使用した場合
でも安定して微量の浮遊容量等の静電容量の変化を検出
でき,確実に被測定端子の位置を認識し得るセンサを実
現できる。
Further, by applying the electrostatic capacitance detection device 101 to a liquid level sensor, even when a high frequency is used, it is possible to stably detect a slight change in electrostatic capacitance such as a stray capacitance, and to reliably detect the capacitance. A sensor that can recognize the position of the measurement terminal can be realized.

【0041】〔実施例2〕図3は本発明の実施例2に係
る静電容量検出装置の構成図である。
[Embodiment 2] FIG. 3 is a block diagram of a capacitance detecting device according to Embodiment 2 of the present invention.

【0042】本実施例の静電容量検出装置が実施例1と
異なる点は,2入力排他的論理和ゲート回路305の一
の入力及び他の入力と第1抵抗103及び第2抵抗10
4との間に,それぞれ相互に同一特性を備える第1イン
バータ回路307及び第2インバータ回路308を備え
た点,第1インバータ回路307及び第2インバータ回
路308をC−MOS集積回路で構成し,ヒステリシス
特性を備えるものを使用した点,並びに,2入力排他的
論理和ゲート回路305をC−MOS集積回路で構成
し,ヒステリシス特性を備えるものとする制約が無い点
である。
The electrostatic capacitance detection device of this embodiment is different from that of the first embodiment in that one input and the other input of the two-input exclusive OR gate circuit 305, the first resistor 103 and the second resistor 10 are provided.
4, a first inverter circuit 307 and a second inverter circuit 308 having the same characteristics as each other are provided, and the first inverter circuit 307 and the second inverter circuit 308 are configured by a C-MOS integrated circuit, The point is that one having a hysteresis characteristic is used, and that the two-input exclusive-OR gate circuit 305 is composed of a C-MOS integrated circuit and there is no restriction to have a hysteresis characteristic.

【0043】第1インバータ回路307及び第2インバ
ータ回路308は,集積回路で実現する場合,同一チッ
プ上に形成されたものを使用するのが望ましい。製造プ
ロセスが同一となり,入力特性や温度ドリフト等の特性
ばらつきをより低減させることができ,より高精度な検
出を可能とすることができるからである。
When the first inverter circuit 307 and the second inverter circuit 308 are realized by an integrated circuit, it is desirable to use those formed on the same chip. This is because the manufacturing process is the same, it is possible to further reduce characteristic variations such as input characteristics and temperature drift, and it is possible to perform detection with higher accuracy.

【0044】その他の構成要素,本実施例の静電容量検
出装置の動作及び効果については,実施例1と同様であ
る。
The other components, the operation and effect of the capacitance detecting device of this embodiment are the same as those of the first embodiment.

【0045】[0045]

【発明の効果】以上説明したように,本発明の請求項1
に係る静電容量検出装置によれば,発振手段により一定
周波数の矩形波を発振して第1及び第2の抵抗を介して
2入力論理演算手段の一の入力及び他の入力との間にそ
れぞれ供給し,2入力論理演算手段の一方に,第1また
は第2の抵抗と被測定端子にかかる浮遊容量等の静電容
量とで決定される遅延時間だけ遅れた位相の電圧を印加
し,2入力論理演算手段の論理演算により,2つの入力
の位相差に応じたパルス幅を持つ出力波形を得ることと
したので,該2入力論理演算手段の出力電圧の変化,例
えば出力電圧の積分値に基づいて,被測定端子にかかる
浮遊容量等の静電容量の変化を検出することが可能とな
り,また,第1及び第2の抵抗を相互に同一特性のもの
を使用することにより,2入力論理演算手段の出力電圧
を,被測定端子にかかる浮遊容量等の静電容量の変化に
よってのみ変化させることができ,より高精度な検出が
可能となる。
As described above, claim 1 of the present invention
According to the electrostatic capacitance detection device of the present invention, the oscillating means oscillates a rectangular wave having a constant frequency, and the rectifying wave is generated between the one input and the other input of the two-input logical operation means via the first and second resistors. A voltage having a phase delayed by a delay time determined by the first or second resistance and the electrostatic capacitance such as the stray capacitance applied to the terminal to be measured is applied to one of the two-input logical operation means, Since the output waveform having the pulse width corresponding to the phase difference between the two inputs is obtained by the logical operation of the 2-input logical operation means, the change of the output voltage of the 2-input logical operation means, for example, the integrated value of the output voltage It is possible to detect the change of electrostatic capacitance such as stray capacitance applied to the terminal to be measured based on the above. Also, by using the first and second resistors of the same characteristics, two inputs The output voltage of the logic operation means It can only be changed by the change in the electrostatic capacitance, such as mowing the stray capacitance, thereby enabling more accurate detection.

【0046】一般に,一定以上の精度を得るためには,
測定対象の静電容量が小容量であるほど,高い周波数を
用いた計測が有利であるが,本発明の請求項1に係る静
電容量検出装置によれば,高い周波数を使用した場合で
も安定した測定が可能であり,結果として,微量の浮遊
容量等の静電容量の変化を高精度に検出し得る静電容量
検出装置を簡単な回路構造で提供することができる。
Generally, in order to obtain a certain degree of accuracy,
The smaller the capacitance of the object to be measured is, the more advantageous the measurement using the high frequency is. However, according to the capacitance detection device according to claim 1 of the present invention, the measurement is stable even when the high frequency is used. Therefore, it is possible to provide an electrostatic capacitance detection device having a simple circuit structure, which can detect a change in electrostatic capacitance such as a small amount of stray capacitance with high accuracy.

【0047】また,請求項2または3に係る静電容量検
出装置によれば,2入力論理演算手段をC−MOS集積
回路で構成し,ヒステリシス特性を備えるものを使用す
ることとしたので,2入力論理演算手段の入力電圧波形
が,第1または第2の抵抗及び被測定対象である静電容
量によって積分された電圧波形であっても確実な論理動
作が可能となると共に,電気的に浮遊した微量の静電容
量の変化についても高精度に検出し得る静電容量検出装
置を提供することができる。
Further, according to the capacitance detecting device of the second or third aspect, since the 2-input logical operation means is composed of the C-MOS integrated circuit and the one having the hysteresis characteristic is used, Even if the input voltage waveform of the input logic operation means is a voltage waveform integrated by the first or second resistance and the capacitance to be measured, a reliable logic operation is possible and electrically floating. It is possible to provide an electrostatic capacitance detection device that can detect even a small amount of change in electrostatic capacitance with high accuracy.

【0048】また,請求項2または3に係る静電容量検
出装置によれば,2入力論理演算手段の一の入力及び他
の入力と第1及び第2の抵抗との間に,それぞれ相互に
同一特性を備える第1及び第2のインバータ回路を備え
た構成とし,第1及び第2のインバータ回路をC−MO
S集積回路で構成し,ヒステリシス特性を備えるものを
使用することとしたので,2入力論理演算手段の入力電
圧波形が,第1または第2の抵抗及び被測定対象である
静電容量によって積分された電圧波形であっても確実な
論理動作が可能となると共に,電気的に浮遊した微量の
静電容量の変化についても高精度に検出することがで
き,また高い周波数を使用した場合でも安定した測定を
行い得る静電容量検出装置を提供することができる。
Further, according to the capacitance detecting device of the second or third aspect, one input and the other input of the two-input logical operation means and the first and second resistors are mutually connected. The first and second inverter circuits having the same characteristics are provided, and the first and second inverter circuits are C-MO.
Since an S integrated circuit having hysteresis characteristics is used, the input voltage waveform of the 2-input logical operation means is integrated by the first or second resistance and the capacitance to be measured. It is possible to perform a reliable logical operation even with a different voltage waveform, and it is possible to detect even a small change in the electrostatic capacitance that has strayed electrically with high accuracy, and it is stable even when a high frequency is used. It is possible to provide a capacitance detection device that can perform measurement.

【0049】また,請求項4に係る静電容量検出装置に
よれば,第1及び第2のインバータ回路は,同一チップ
上に形成されたものを使用することとしたので,入力特
性や温度ドリフト等の特性ばらつきをより低減させるこ
とができ,より高精度な検出が可能となる。
Further, according to the capacitance detecting device of the fourth aspect, since the first and second inverter circuits are formed on the same chip, the input characteristic and the temperature drift are not generated. It is possible to further reduce variations in characteristics such as, and it is possible to perform detection with higher accuracy.

【0050】また,請求項5に係るセンサによれば,請
求項1,2,3または4記載の静電容量検出装置を備え
て構成し,液体の液面または物品の表面に対して被測定
端子を近づけていく場合に,静電容量検出装置により得
られる静電容量の変化に基づいて,被測定端子が液面ま
たは表面に所定距離まで近接したこと,或いは液面また
は表面に触れたことを検知することとしたので,液面ま
たは表面に至るまでの距離を被測定端子の移動と共に逐
次検出することができ,また請求項1,2,3または4
記載の静電容量検出装置を用いることにより,高い周波
数を使用した場合でも安定して微量の浮遊容量等の静電
容量の変化を検出でき,確実に被測定端子の位置を認識
し得るセンサを提供することができる。
According to a fifth aspect of the present invention, the sensor according to the first aspect, the second aspect, the third aspect, or the fourth aspect of the present invention is provided with the capacitance detecting device, and the liquid level of the liquid or the surface of the article is measured. When the terminals are brought close to each other, the measured terminal has come close to the liquid surface or the surface by a predetermined distance or touches the liquid surface or the surface based on the change in the electrostatic capacity obtained by the electrostatic capacity detection device. Is detected, the liquid surface or the distance to the surface can be sequentially detected along with the movement of the terminal to be measured.
By using the described capacitance detection device, a sensor that can stably detect a small change in capacitance such as a stray capacitance even when a high frequency is used and can reliably recognize the position of the terminal to be measured is provided. Can be provided.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1に係る静電容量検出装置とそ
れを用いた静電容量式液面センサの構成図である。
FIG. 1 is a configuration diagram of a capacitance detection device according to a first embodiment of the present invention and a capacitance type liquid level sensor using the same.

【図2】実施例1の静電容量検出装置の動作を説明する
タイミングチャートである。
FIG. 2 is a timing chart illustrating the operation of the electrostatic capacitance detection device according to the first exemplary embodiment.

【図3】本発明の実施例2に係る静電容量検出装置の構
成図である。
FIG. 3 is a configuration diagram of a capacitance detection device according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

101 静電容量検出装置 102 水晶発振器(発振手段) 103 第1抵抗(R) 104 第2抵抗(R) 105,305 2入力排他的論理和ゲート回路(2入
力論理演算手段) 106 処理部 307 第1インタフェース回路 308 第2インタフェース回路 111 プローブ(被測定端子) 112 容器 113 検体 115 プローブにかかる浮遊容量(Cp) 121 判定部
101 Capacitance Detection Device 102 Crystal Oscillator (Oscillation Means) 103 First Resistor (R) 104 Second Resistance (R) 105,305 2 Input Exclusive OR Gate Circuit (2 Input Logical Operation Means) 106 Processing Unit 307 1 Interface Circuit 308 Second Interface Circuit 111 Probe (Terminal to be Measured) 112 Container 113 Sample 115 Stray Capacitance (Cp) on Probe 121 Judgment Unit

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 一定周波数の矩形波を発振する発振手段
と,2入力論理演算手段と,前記発振手段の出力端と前
記2入力論理演算手段の一の入力及び他の入力との間に
それぞれ直列に接続され,相互に同一特性を備える第1
及び第2の抵抗と,を有し,被測定端子を前記2入力論
理演算手段の一または他の入力に接続し,該2入力論理
演算手段の出力電圧の変化に基づいて,前記被測定端子
における静電容量の変化を検出することを特徴とする静
電容量検出装置。
1. An oscillating means for oscillating a rectangular wave having a constant frequency, a two-input logical operation means, and an output terminal of the oscillating means and one input and the other input of the two-input logical operation means, respectively. First connected in series and having the same characteristics as each other
And a second resistor, the measured terminal is connected to one or the other inputs of the two-input logical operation means, and the measured terminal is based on the change of the output voltage of the two-input logical operation means. An electrostatic capacitance detection device, which detects a change in electrostatic capacitance in the.
【請求項2】 前記2入力論理演算手段の一の入力及び
他の入力と前記第1及び第2の抵抗との間に,それぞれ
相互に同一特性を備える第1及び第2のインバータ回路
を有することを特徴とする請求項1記載の静電容量検出
装置。
2. A first and a second inverter circuit having mutually the same characteristics are provided between one input and the other input of the two-input logical operation means and the first and second resistors, respectively. The electrostatic capacitance detection device according to claim 1, wherein:
【請求項3】 前記2入力論理演算手段または前記第1
及び第2のインバータ回路は,C−MOS集積回路で構
成され,ヒステリシス特性を備えることを特徴とする請
求項1または2記載の静電容量検出装置。
3. The two-input logical operation means or the first
3. The electrostatic capacitance detection device according to claim 1, wherein the second inverter circuit is composed of a C-MOS integrated circuit and has a hysteresis characteristic.
【請求項4】 前記第1及び第2のインバータ回路は,
同一チップ上に形成されたものであることを特徴とする
請求項1,2または3記載の静電容量検出装置。
4. The first and second inverter circuits,
The electrostatic capacitance detection device according to claim 1, wherein the electrostatic capacitance detection device is formed on the same chip.
【請求項5】 請求項1,2,3または4記載の静電容
量検出装置を有し,液体の液面または物品の表面に対し
て前記被測定端子を近づけていく場合に,前記静電容量
検出装置により得られる静電容量の変化に基づいて,前
記被測定端子が前記液面または前記表面に所定距離まで
近接したこと,或いは前記液面または前記表面に触れた
ことを検知することを特徴とするセンサ。
5. The electrostatic capacitance detecting device according to claim 1, 2, 3 or 4, wherein the electrostatic capacitance is provided when the measured terminal is brought closer to a liquid surface of a liquid or a surface of an article. Detecting that the terminal to be measured comes close to the liquid surface or the surface to a predetermined distance, or that the liquid surface or the surface is touched, based on the change in the capacitance obtained by the capacitance detection device. Characteristic sensor.
JP7028059A 1995-02-16 1995-02-16 Detecting device of capacitance and sensor using the device Pending JPH08220161A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7028059A JPH08220161A (en) 1995-02-16 1995-02-16 Detecting device of capacitance and sensor using the device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7028059A JPH08220161A (en) 1995-02-16 1995-02-16 Detecting device of capacitance and sensor using the device

Publications (1)

Publication Number Publication Date
JPH08220161A true JPH08220161A (en) 1996-08-30

Family

ID=12238196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7028059A Pending JPH08220161A (en) 1995-02-16 1995-02-16 Detecting device of capacitance and sensor using the device

Country Status (1)

Country Link
JP (1) JPH08220161A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002054979A (en) * 2000-08-14 2002-02-20 Aloka Co Ltd Liquid level detecting device
JP2003035615A (en) * 2001-07-24 2003-02-07 Nitta Ind Corp Electrostatic capacitive sensor
JP2006038699A (en) * 2004-07-28 2006-02-09 Yosoji Tanji Liquid level measuring apparatus using capacitance
JP2007220453A (en) * 2006-02-16 2007-08-30 Matsushita Electric Ind Co Ltd Fuel cell system
CN115790777A (en) * 2023-01-05 2023-03-14 山东康华生物医疗科技股份有限公司 Liquid level detection device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002054979A (en) * 2000-08-14 2002-02-20 Aloka Co Ltd Liquid level detecting device
JP4550978B2 (en) * 2000-08-14 2010-09-22 アロカ株式会社 Liquid level detector
JP2003035615A (en) * 2001-07-24 2003-02-07 Nitta Ind Corp Electrostatic capacitive sensor
JP2006038699A (en) * 2004-07-28 2006-02-09 Yosoji Tanji Liquid level measuring apparatus using capacitance
JP4514117B2 (en) * 2004-07-28 2010-07-28 與宗治 丹治 Liquid level measuring device using capacitance
JP2007220453A (en) * 2006-02-16 2007-08-30 Matsushita Electric Ind Co Ltd Fuel cell system
CN115790777A (en) * 2023-01-05 2023-03-14 山东康华生物医疗科技股份有限公司 Liquid level detection device

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