JPH0821469A - Slidable member for suspension for vehicle having titanium oxide film and manufacture thereof - Google Patents
Slidable member for suspension for vehicle having titanium oxide film and manufacture thereofInfo
- Publication number
- JPH0821469A JPH0821469A JP18089594A JP18089594A JPH0821469A JP H0821469 A JPH0821469 A JP H0821469A JP 18089594 A JP18089594 A JP 18089594A JP 18089594 A JP18089594 A JP 18089594A JP H0821469 A JPH0821469 A JP H0821469A
- Authority
- JP
- Japan
- Prior art keywords
- titanium oxide
- suspension
- vehicle
- ion plating
- sliding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Fluid-Damping Devices (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、イオンプレーティング
法により形成した、耐摩耗性、低摩擦抵抗性等に優れる
とともに、意匠性にも優れた酸化チタン被膜を有する車
両用サスペンションの摺動部材、及びその製造方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sliding member for a vehicle suspension, which is formed by an ion plating method and has a titanium oxide coating film which is excellent in wear resistance, low friction resistance and the like and which is also excellent in design. And a manufacturing method thereof.
【０００２】[0002]
【従来の技術】従来、車両用サスペンションの摺動部
材、例えば自動二輪車や自転車のフロントフォークに用
いられるインナーチューブ、の表面には、摺動性や耐蝕
性を向上させるため硬質クロムメッキを施すのがその表
面処理方法として一般的であった。また、特殊なものと
して、イオンプレーティング法により金色を呈する窒化
チタン被覆を施したものがある。2. Description of the Related Art Conventionally, the surface of a sliding member of a vehicle suspension, for example, an inner tube used for a front fork of a motorcycle or a bicycle, is hard chrome plated to improve slidability and corrosion resistance. Was a common surface treatment method. Further, as a special one, there is a titanium nitride coating which exhibits a gold color by an ion plating method.
【０００３】[0003]
【発明が解決しようとする課題】しかし、かかるインナ
ーチューブ等の車両用サスペンションの摺動部材は、そ
の外表面の一部が外部に露出しており、従来の硬質クロ
ムメッキ面では銀白色の金属光沢に限られ、意匠性に乏
しいものであった。また、イオンプレーティング法によ
り窒化チタンを被覆したものは、耐摩耗性、低摩擦抵抗
性等に優れるとともに、金色を呈しその意匠性を高める
ものであるが、色調は金色に限られている。However, in the sliding member of the vehicle suspension such as the inner tube, a part of the outer surface is exposed to the outside, and the conventional hard chrome-plated surface has a silver-white metal. It was limited to gloss and poor in design. Further, a material coated with titanium nitride by an ion plating method is excellent in wear resistance, low friction resistance and the like and exhibits a gold color to enhance its designability, but the color tone is limited to gold color.
【０００４】そこで、本発明は、高硬度、耐摩耗性等を
保持しつつ、各種色彩の付加が可能で高度な装飾性を付
与できるといった優れた諸特性をもつ酸化チタン被膜を
その外周摺動面に有する車両用サスペンションの摺動部
材、及びその製造方法を提供することを目的とする。In view of the above, the present invention provides a titanium oxide coating having excellent characteristics such that various colors can be added and a high degree of decorativeness can be imparted while maintaining high hardness and abrasion resistance, and the like, and sliding around the outer periphery thereof. An object of the present invention is to provide a sliding member for a vehicle suspension having a surface and a manufacturing method thereof.
【０００５】[0005]
【課題を解決するための手段】上記の課題を解決するた
めに、本発明の酸化チタン被膜を有する車両用サスペン
ションの摺動部材は、その外周摺動面に、イオンプレー
ティング法により形成した酸化チタンからなる膜厚０．
５〜１０μｍの有色の耐摩耗層を有すること、を特徴と
している。In order to solve the above-mentioned problems, a sliding member for a vehicle suspension having a titanium oxide coating of the present invention has an oxidation formed on the outer peripheral sliding surface by an ion plating method. Titanium film thickness 0.
It is characterized by having a colored abrasion resistant layer of 5 to 10 μm.
【０００６】また本発明の酸化チタン被膜を有する車両
用サスペンションの摺動部材の製造方法は、その外周摺
動面に、イオンプレーティング法により酸化チタンから
なる膜厚０．５〜１０μｍの有色の耐摩耗層を形成する
こと、を特徴としている。The method for manufacturing a sliding member for a vehicle suspension having a titanium oxide coating according to the present invention provides a colored sliding surface having a thickness of 0.5 to 10 μm and made of titanium oxide by an ion plating method. It is characterized by forming an abrasion resistant layer.
【０００７】発明の具体的説明 本発明の酸化チタン被膜を有する車両用サスペンション
の摺動部材２は、図１の断面説明図に示すように、筒状
の摺動部材の母材４の外周摺動面に、酸化チタンからな
る有色の耐摩耗層６を有してなるもので、かかる酸化チ
タン被膜６はイオンプレーティング法により形成された
ものである。なお、８は同様にイオンプレーティング法
により形成されるチタンからなるアンダーコート層であ
る。車両用サスペンションの摺動部材としては、自動二
輪車のフロントフォークのインナーチューブやリヤサス
ペンションのピストンロッド、自転車のフロントフォー
クのインナーチューブ、自動車のショックアブソーバー
のインナーチューブ等がある。 Detailed Description of the Invention A sliding member 2 for a vehicle suspension having a titanium oxide coating according to the present invention has an outer peripheral slide of a base material 4 of a cylindrical sliding member, as shown in a sectional explanatory view of FIG. The moving surface has a colored abrasion-resistant layer 6 made of titanium oxide, and the titanium oxide coating 6 is formed by an ion plating method. Reference numeral 8 is an undercoat layer made of titanium which is also formed by the ion plating method. The sliding member of a vehicle suspension includes an inner tube of a front fork of a motorcycle, a piston rod of a rear suspension, an inner tube of a front fork of a bicycle, an inner tube of a shock absorber of an automobile, and the like.
【０００８】イオンプレーティング法は、放電によりイ
オン化した蒸発金属及び反応ガスが負に印加した母材に
対して適度な衝撃を繰返しながら金属或いはセラミック
スの被膜として被覆される現象を利用した真空蒸着法で
あり、蒸発物質が電気的に活性であり、しかも電場によ
るエネルギーを与えられることによって、非常につきま
わりがよく、密着性に優れているのが特徴である。The ion plating method is a vacuum deposition method utilizing a phenomenon in which evaporated metal ionized by discharge and reaction gas are coated as a metal or ceramic film while repeating a moderate impact on a negatively applied base material. In addition, the vaporized substance is electrically active, and since the vaporized substance is given energy by an electric field, the vaporized substance is very smooth and has excellent adhesiveness.
【０００９】かかるイオンプレーティング法により摺動
部材の母材４の表面に形成される酸化チタン被膜６の膜
厚は、０．５〜１０μｍ、好ましくは１〜３μｍの範囲
が望ましい。膜厚が０．５μｍ未満では摩耗のため長持
ちせず、一方、上限は特に限定されるわけではないが、
厚くなるほど処理時間を要しコスト高となり、極端に厚
くなる（数１０μｍ以上）と衝撃により剥離しやすくな
る。１〜３μｍの範囲が、十分な耐摩耗性を有しかつコ
スト的にも有利で実用的な範囲である。なお、車両用サ
スペンションの摺動部材の母材４の材質としては、特に
構造用合金鋼が、靭性に優れる点から一般的である。又
は、かかる構造用合金鋼に硬質クロムメッキを施したも
のでもよい。The film thickness of the titanium oxide film 6 formed on the surface of the base material 4 of the sliding member by the ion plating method is in the range of 0.5 to 10 μm, preferably 1 to 3 μm. When the film thickness is less than 0.5 μm, it does not last long due to abrasion, while the upper limit is not particularly limited,
The thicker the coating, the longer the treatment time and the higher the cost. The range of 1 to 3 μm is a practical range that has sufficient wear resistance and is advantageous in terms of cost. As a material of the base material 4 of the sliding member of the vehicle suspension, structural alloy steel is generally used because of its excellent toughness. Alternatively, such structural alloy steel may be plated with hard chrome.
【００１０】本発明による酸化チタン被膜は有色（茶色
系、紺色系）を呈する。イオンプレーティング法による
処理条件、特に、イオンプレーティング装置の真空槽内
への酸素ガスの導入量とビーム出力を適宜コントロール
することにより、所望の色彩に着色できる。ビーム出力
（３００〜５００Ａ）に応じて酸素ガス導入量を調整し
真空槽内の酸素ガス分圧が５×１０-5〜１×１０-4Torr
の範囲になるように制御する。この場合の傾向として、
ビーム出力が小さいときはＴｉの蒸発量も少ないので酸
素ガス導入量も少なくし、ビーム出力を増すにつれてＴ
ｉの蒸発量も増すので酸素ガス導入量を多くするように
する。ビーム出力が高いと反応性が高くなるため、酸素
ガス導入量を多くしても酸素ガス消費量も多くなって真
空槽内の酸素ガス分圧が低くなる場合もあると推定され
る。なお、ビーム出力は高い方が、同じ厚さの被膜を形
成するのに短時間の処理ですみ有利である。ビーム出力
が３００Ａ未満では処理に長時間を要し生産性が低下
し、一方５００Ａを越えるとハースの温度が高くなり過
ぎてハースを損傷するおそれがある。The titanium oxide film according to the present invention exhibits a color (brown or dark blue). A desired color can be obtained by appropriately controlling the treatment conditions by the ion plating method, particularly the amount of oxygen gas introduced into the vacuum chamber of the ion plating apparatus and the beam output. The oxygen gas introduction amount is adjusted according to the beam output (300 to 500 A), and the partial pressure of oxygen gas in the vacuum chamber is 5 × 10 −5 to 1 × 10 −4 Torr.
Control to be within the range. The trend in this case is
When the beam output is small, the amount of Ti vaporized is small, so the amount of oxygen gas introduced is also small.
Since the evaporation amount of i also increases, the oxygen gas introduction amount should be increased. It is estimated that if the beam output is high, the reactivity becomes high, so that even if the oxygen gas introduction amount is increased, the oxygen gas consumption amount also increases and the oxygen gas partial pressure in the vacuum chamber may decrease. It should be noted that a higher beam output is advantageous in that a short treatment time is required to form a film having the same thickness. If the beam output is less than 300 A, it takes a long time to process and the productivity is lowered. On the other hand, if it exceeds 500 A, the temperature of the hearth becomes too high and the hearth may be damaged.
【００１１】具体的には、薄茶色〜焦茶色の茶色系の色
彩を得るには、例えば、ビーム出力が４５０Ａのとき
は、酸素ガス分圧を５．６×１０-5〜６．５×１０-5To
rrに制御する。ビーム出力が３００Ａのときは、酸素ガ
ス分圧を５．９×１０-5〜６．２×１０-5Torrに制御す
る。酸素ガスの導入初期段階では、色調は黄色、赤色、
青色へと順次変化し、再び黄色、赤色、青色と変化し、
これを何回か繰り返すが、膜厚が大きくなるにつれて次
第に色調が濁ってきて茶色系の色調を呈するようにな
り、以後は膜厚が大きくなっても色調は一定となる。薄
紺色〜紫紺色の紺色系の色調を得るには、ビーム出力が
４５０Ａのときは、酸素ガス分圧を７×１０-5〜９．８
×１０-5Torrに制御する。ビーム出力が３００Ａのとき
は、酸素ガス分圧を６．４×１０-5〜６．５×１０-5To
rrに制御する。上記茶色系の場合と同様に、酸素ガスの
導入初期段階では、色調は黄色、赤色、青色と順次変化
し、再び黄色、赤色、青色と変化し、これを何回か繰り
返すが、膜厚が大きくなるにつれて次第に色調が濁って
きて紺色系の色調を呈するようになり、以後は膜厚が大
きくなっても色調は一定となる。上記酸素ガス分圧範囲
内で適宜分圧を選択することにより、茶色系では薄茶色
から焦茶色まで、紺色系では薄紺色から紫紺色までのう
ち所望の色調のものを得ることができる。Specifically, in order to obtain a light brown to dark brown color, for example, when the beam output is 450 A, the oxygen gas partial pressure is 5.6 × 10 −5 to 6.5 ×. 10 -5 To
Control to rr. When the beam output is 300 A, the partial pressure of oxygen gas is controlled to 5.9 × 10 −5 to 6.2 × 10 −5 Torr. At the initial stage of introducing oxygen gas, the color tone is yellow, red,
It changes to blue, then yellow, red and blue again,
This is repeated several times, but as the film thickness increases, the color tone gradually becomes cloudy and exhibits a brownish color tone. After that, even if the film thickness increases, the color tone becomes constant. To obtain a dark blue to purple navy color tone, when the beam output is 450 A, the partial pressure of oxygen gas is 7 × 10 −5 to 9.8.
Control to × 10 -5 Torr. When the beam output is 300 A, the partial pressure of oxygen gas is 6.4 × 10 −5 to 6.5 × 10 −5 To.
Control to rr. Similar to the case of the brown type, in the initial stage of introduction of oxygen gas, the color tone sequentially changes to yellow, red, and blue, and then changes again to yellow, red, and blue, and this is repeated several times, but the film thickness is The color tone gradually becomes cloudy as it becomes larger, and a dark blue color tone is exhibited. After that, the color tone becomes constant even if the film thickness becomes large. By appropriately selecting the partial pressure within the oxygen gas partial pressure range, it is possible to obtain a desired color tone from light brown to dark brown in the brown type and from navy blue to violet in the navy type.
【００１２】[0012]
【実施例】以下に、本発明の実施例を図面を参照しなが
ら説明する。本発明に使用するＨＣＤ（Hollow Cathode
Discharge) 型イオンプレーティング装置１０の概要を
図２に示す。図２において、真空槽１２内には被覆処理
対象物であるワーク１４を配し、その下方に蒸発させる
べき金属であるＴｉ原料１６を受ける水冷銅ハース１８
を配してある。ハース１８の直上にはＴｉ原料１６を溶
融、蒸発させる中空陰極型の電子銃（ホローカソード）
２０を設けてあり、これにＡｒガス導入管２２を接続し
てある。ハース１８とホローカソード２０との間には、
電子ビームを集束してＴｉ原料１６に照射するための集
束コイル２３を配置してある。２４は反応ガスＯ2 を導
入するための導入管であり、２６はワーク１４にバイア
ス電圧を印加するための直流バイアス電源、２８はホロ
ーカソード２０とハース１８間に高周波を重畳させた直
流を流す直流電源、３０は排気口である。真空槽１２内
には、ワーク１４を加熱するために適所にヒータ３２を
設けるとともに、ワーク１４と中空陰極型の電子銃２０
との間にシャッター３４を設けてある。Embodiments of the present invention will be described below with reference to the drawings. HCD (Hollow Cathode) used in the present invention
The outline of the Discharge type ion plating apparatus 10 is shown in FIG. In FIG. 2, a water-cooled copper hearth 18 is provided with a work 14 which is an object to be coated in a vacuum chamber 12, and a Ti raw material 16 which is a metal to be evaporated is received below the work 14.
Is arranged. Directly above the hearth 18, a hollow cathode type electron gun (hollow cathode) for melting and evaporating the Ti raw material 16
20 is provided, and an Ar gas introducing pipe 22 is connected to this. Between the hearth 18 and the hollow cathode 20,
A focusing coil 23 for focusing the electron beam and irradiating the Ti raw material 16 is arranged. Reference numeral 24 is an introduction pipe for introducing the reaction gas O 2 , 26 is a DC bias power source for applying a bias voltage to the work 14, and 28 is a direct current in which a high frequency wave is superposed between the hollow cathode 20 and the hearth 18. DC power source, 30 is an exhaust port. In the vacuum chamber 12, a heater 32 is provided in an appropriate place for heating the work 14, and the work 14 and the hollow cathode type electron gun 20 are provided.
A shutter 34 is provided between and.
【００１３】上記の装置を用いてインナーチューブの外
周摺動面上に酸化チタン被膜を被覆する工程の一例を示
す。先ず、ワークたる硬質クロムメッキを施した構造用
合金鋼製のインナーチューブ母材の汚れや油脂を除去す
るとともに、外周面上の酸化膜を除去する前処理を行
い、かかる前処理を施したワーク１４を真空槽１２内の
図示しない治具に取り付け、ハース１８にＴｉ原料１６
を装入する。An example of the step of coating the outer peripheral sliding surface of the inner tube with the titanium oxide film using the above apparatus will be described. First, the inner tube made of hard chrome-plated structural alloy steel, which is a workpiece, is pre-treated to remove dirt and oil from the base metal, as well as the oxide film on the outer peripheral surface, and the workpiece subjected to such pre-treatment. 14 is attached to a jig (not shown) in the vacuum chamber 12, and the hearth 18 is made of Ti raw material 16
Charge.
【００１４】かかる前準備が完了したならば、真空槽１
２内を３５０℃以上（３５０〜５００℃程度、なお、ワ
ークの材質によって鈍らない程度の温度であればこれ以
上の温度であってもよい。）に加熱しながら５×１０-6
Torr程度以下の圧力に減圧し、ワークが所定温度に達し
てから一定時間（３０〜６０分程度）保持する。次い
で、高純度のアルゴンガスを真空槽１２内に導入し、
３．５×１０-4Torr程度の圧力下で、ワーク１４に７５
０Ｖ程度の負電圧を印加し、イオンボンバード処理によ
るワーク表面のクリーニングを行う。When such preparation is completed, the vacuum chamber 1
5 × 10 −6 while heating the inside of 2 to 350 ° C. or higher (about 350 to 500 ° C., if it is a temperature that does not dull depending on the material of the work, it may be higher)
The pressure is reduced to about Torr or less, and the work is held for a certain time (about 30 to 60 minutes) after reaching a predetermined temperature. Then, high-purity argon gas is introduced into the vacuum chamber 12,
Under the pressure of 3.5 × 10 -4 Torr, 75
A negative voltage of about 0 V is applied to clean the work surface by ion bombardment.
【００１５】次に、Ｔａ製ホローカソード２０にアルゴ
ンガスを導入し点火する（電流は３００Ａ程度）。ホロ
ーカソード２０下のハース１８中のチタン１６が溶解さ
れチタンが蒸発し、安定化したのち電流を４５０Ａ程度
に上げる。一定時間（３〜５分程度）保持することによ
ってハース中のチタン１６の表面の酸化物等の不純物を
飛ばし除去する。ここまでの処理工程では、不純物がワ
ーク１４に蒸着するのを防ぐため、ハース１８とワーク
１４との間のシャッター３４を閉じておく。なお、上述
において示した温度、圧力、電圧、電流値等の数値は一
例を示したものであって、上記の数値に限られるもので
はない。Next, argon gas is introduced into the Ta hollow cathode 20 and ignited (current is about 300 A). After the titanium 16 in the hearth 18 under the hollow cathode 20 is melted and the titanium is evaporated and stabilized, the current is increased to about 450A. By holding for a certain period of time (about 3 to 5 minutes), impurities such as oxides on the surface of titanium 16 in the hearth are removed and removed. In the processing steps so far, the shutter 34 between the hearth 18 and the work 14 is closed in order to prevent impurities from being deposited on the work 14. The numerical values such as the temperature, the pressure, the voltage, and the current value shown above are examples, and are not limited to the above numerical values.
【００１６】次いで、シャッター３４を開け、先ず、チ
タンのみを蒸発させ、チタンのみをワーク１４上にアン
ダーコートし、密着性の向上を図る。アンダーコート層
の厚さは０．０５〜０．２μm 程度が、密着性の向上の
点で好ましい。任意の時間（２〜５分程度）チタンをア
ンダーコートしたのち、反応ガス導入管２４から酸素ガ
スを導入し、酸化チタンからなる被膜を形成する。この
ときの処理条件として、アルゴンガス分圧を８×１０-5
Torr、集束電流を０．８Ｖ，３００Ａ、バイアス電圧を
６０Ｖ、加熱温度を３５０℃、蒸着時間を４０分と一定
とし、ビーム出力と導入する酸素ガス分圧を種々変更し
て得た試料の密着度、硬度及び膜厚の測定結果を表１に
示す。なお、比較例として、酸素ガスを導入するのに代
えて窒素ガスを導入し金色の窒化チタン被膜を形成した
場合も併せて示した。Next, the shutter 34 is opened, and first, only titanium is evaporated to undercoat only the titanium on the work 14 to improve the adhesion. The thickness of the undercoat layer is preferably about 0.05 to 0.2 μm from the viewpoint of improving adhesion. After undercoating titanium for an arbitrary time (about 2 to 5 minutes), oxygen gas is introduced from the reaction gas introducing pipe 24 to form a film made of titanium oxide. Argon gas partial pressure is 8 × 10 −5 as processing conditions at this time.
Torr, focusing current 0.8 V, 300 A, bias voltage 60 V, heating temperature 350 ° C., vapor deposition time constant at 40 minutes, adhesion of sample obtained by variously changing beam output and oxygen gas partial pressure to be introduced Table 1 shows the measurement results of the degree, hardness, and film thickness. In addition, as a comparative example, a case where a nitrogen-colored titanium nitride film was formed by introducing nitrogen gas instead of introducing oxygen gas is also shown.
【００１７】[0017]
【表１】 色調 ビーム出力 酸素ガス分圧 密着度 硬度 膜厚 V A Torr N Hv μm 実施例１ 紺色系 32 300 6.5 ×10-5 49 1990 0.5 〃 ２ 〃 35 450 7.2 ×10-5 78 2410 1.0 〃 ３ 〃 40 500 7.8 ×10-5 78 2570 1.3 〃 ４ 茶色系 32 300 6.2 ×10-5 59 1660 0.5 〃 ５ 〃 35 450 6.3 ×10-5 78 2620 1.2 〃 ６ 〃 40 500 6.4 ×10-5 78 2320 1.3 比較例１ 金色 32 300 4 ×10-4（窒素） 59 2180 0.6 〃 ２ 〃 35 450 4.7 ×10-4（窒素） 78 2460 0.8 〃 ３ 〃 40 500 5.1 ×10-4（窒素） 76 2460 1.0 [Table 1] Color tone Beam output Oxygen gas partial pressure Adhesion degree Hardness Film thickness VA Torr N Hv μm Example 1 Dark blue 32 300 6.5 × 10 -5 49 1990 0.5 〃 2 〃 35 450 7.2 × 10 -5 78 2410 1.0 〃 3 〃 40 500 7.8 × 10 -5 78 2570 1.3 〃 4 Brown type 32 300 6.2 × 10 -5 59 1660 0.5 〃 5 〃 35 450 6.3 × 10 -5 78 2620 1.2 〃 6 〃 40 500 6.4 × 10 -5 78 2320 1.3 Comparative Example 1 Gold 32 300 4 × 10 -4 (nitrogen) 59 2180 0.6 〃 2 〃 35 450 4.7 × 10 -4 (nitrogen) 78 2460 0.8 〃 3 〃 40 500 5.1 × 10 -4 (nitrogen) 76 2460 1.0
【００１８】ここで密着性の試験は、次のようなスクラ
ッチ（引っかき）試験による摩擦力測定から密着度を評
価した。すなわち、図３に概略を示すスクラッチ試験機
（株式会社レスカ製スクラッチ試験機 ＣＳＲ０１２
０）４０を用い、ダイヤモンド圧子４２の半径：0.2mm
、コーン角：120 °、垂直方向荷重： 0〜20kgf 、引
っかき距離：10mmの条件で、定速移動するステージ４４
上に載置した試料４６に対して垂直な方向に直線的に増
加する荷重Ｆｚ（Ｎ）を与えるダイヤモンド圧子４２
を、さらに定速平行移動させて試料４６をスクラッチす
る（引っかく）。このときのスクラッチ方向に生ずる摩
擦力が急激に上昇したときの垂直荷重値Ｆｚ（Ｎ）によ
って求めた。なお、硬度（Ｈｖ）は５ｇ荷重での測定値
である。In the adhesion test, the adhesion was evaluated by measuring the frictional force by the following scratch (scratch) test. That is, a scratch tester (a scratch tester CSR012 manufactured by Lesca Co., Ltd.
0) 40, radius of diamond indenter 42: 0.2 mm
, Cone angle: 120 °, Vertical load: 0-20kgf, Scratch distance: 10mm, Stage 44 moves at constant speed
Diamond indenter 42 that applies a load Fz (N) that linearly increases in a direction perpendicular to the sample 46 placed on
Is moved in parallel at a constant speed to scratch (scratch) the sample 46. The vertical load value Fz (N) when the frictional force generated in the scratch direction at this time rapidly rises was obtained. The hardness (Hv) is a measured value under a load of 5 g.
【００１９】これらの結果からわかるように、上記実施
例に係る酸化チタン被膜を有するインナーチューブは、
硬度が窒化チタン被膜のそれと略同程度であり従来の硬
質クロムメッキの８００〜１０００／Ｈｖに比べ２倍程
度以上と高く耐摩耗性に優れ摺動性も良好である。ま
た、密着性においても従来法で形成した窒化チタン被膜
では６０〜７０Ｎ程度といわれているのに対し、本実施
例では膜厚の薄い場合を除き同程度以上と高く（なお上
記の比較例における窒化チタン被膜では本実施例のそれ
と同程度であった）耐剥離性に優れ、しかも所望の色彩
を有する極めて意匠性に優れたものである。As can be seen from these results, the inner tube having the titanium oxide coating according to the above-mentioned embodiment is
The hardness is about the same as that of the titanium nitride coating, which is more than twice as high as that of the conventional hard chrome plating of 800 to 1000 / Hv, and has excellent wear resistance and slidability. Further, the adhesion is said to be about 60 to 70 N in the titanium nitride film formed by the conventional method, but in this example, it is as high as or higher than the same except for the case where the film thickness is thin (note that in the comparative example above). The titanium nitride coating film has excellent peeling resistance, which was about the same as that of the present embodiment), and also has excellent designability with a desired color.
【００２０】なお、上記の処理工程において、ワークを
回転したり左右に動かしたりして、ワークに蒸着する酸
化膜の膜厚が全ての部分で均一になるように調整するの
が望ましい。また、蒸発源から飛散するＴｉの量がハー
スの状態により一定でないと、再現性のある色調を得難
いので、バッチ毎のＴｉ飛散量が一定になるように、ハ
ース内のＴｉ補給量を毎回調整することが好ましい。In the above processing step, it is desirable that the work is rotated or moved left and right so that the film thickness of the oxide film deposited on the work is uniform in all parts. Also, if the amount of Ti scattered from the evaporation source is not constant due to the state of the hearth, it is difficult to obtain a reproducible color tone, so the Ti supply amount in the hearth is adjusted every time so that the amount of Ti scattered in each batch becomes constant. Preferably.
【００２１】[0021]
【発明の効果】本発明によれば、酸化チタン被膜の有す
る高硬度、耐摩耗性等を保持しつつ、各種色彩の付加が
可能で高度な装飾性を付与することができるといった優
れた諸特性を最大限に生かした酸化チタン被膜をその外
周摺動面に有する車両用サスペンションの摺動部材及び
その製造方法を提供することができる。EFFECTS OF THE INVENTION According to the present invention, while maintaining the high hardness and abrasion resistance of the titanium oxide coating, various colors can be added and various excellent characteristics can be imparted. It is possible to provide a sliding member for a vehicle suspension having a titanium oxide coating film on the outer peripheral sliding surface that makes the most of the above, and a method for manufacturing the sliding member.
【図１】本発明の酸化チタン被膜を有する車両用サスペ
ンションの摺動部材の断面説明図。FIG. 1 is an explanatory cross-sectional view of a sliding member of a vehicle suspension having a titanium oxide coating of the present invention.
【図２】本発明を実施するために使用するイオンプレー
ティング装置を示す説明図。FIG. 2 is an explanatory view showing an ion plating device used to carry out the present invention.
【図３】密着性試験法の説明図。FIG. 3 is an explanatory diagram of an adhesion test method.
２ 酸化チタン被膜を有する車両用サスペンションの摺
動部材 ４ 摺動部材の母材 ６ 耐摩耗層 ８ アンダーコート層 １０ ＨＣＤ型イオンプレーティンング装置 １２ 真空槽 １４ ワーク １６ Ｔｉ原料 １８ ハース ２０ 中空陰極型の電子銃（ホローカソード） ２２ Ａｒガス導入管 ２３ 集束コイル ２４ 反応ガス導入管 ２６ 直流バイアス電源 ２８ 直流電源 ３０ 排気口 ３２ ヒータ ３４ シャッター ４０ スクラッチ試験機 ４２ ダイヤモンド圧子 ４４ 定速移動するステージ ４６ 試料2 Sliding member of vehicle suspension having titanium oxide coating 4 Base material of sliding member 6 Wear-resistant layer 8 Undercoat layer 10 HCD type ion plating device 12 Vacuum tank 14 Work 16 Ti raw material 18 Hearth 20 Hollow cathode type Electron gun (hollow cathode) 22 Ar gas introduction tube 23 Focusing coil 24 Reactive gas introduction tube 26 DC bias power supply 28 DC power supply 30 Exhaust port 32 Heater 34 Shutter 40 Scratch tester 42 Diamond indenter 44 Constant moving stage 46 Sample
Claims (2)
動面に、イオンプレーティング法により形成した酸化チ
タンからなる膜厚０．５〜１０μｍの有色の耐摩耗層を
有することを特徴とする、酸化チタン被膜を有する車両
用サスペンションの摺動部材。1. A colored wear-resistant layer of titanium oxide formed by an ion plating method and having a film thickness of 0.5 to 10 μm is provided on an outer peripheral sliding surface of a sliding member of a vehicle suspension. A sliding member for a vehicle suspension having a titanium oxide coating.
動面に、イオンプレーティング法により酸化チタンから
なる膜厚０．５〜１０μｍの有色の耐摩耗層を形成する
ことを特徴とする、酸化チタン被膜を有する車両用サス
ペンションの摺動部材の製造方法。2. A colored wear-resistant layer made of titanium oxide and having a film thickness of 0.5 to 10 μm is formed on the outer peripheral sliding surface of a sliding member of a vehicle suspension by an ion plating method. A method for manufacturing a sliding member for a vehicle suspension having a titanium oxide coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6180895A JP3023530B2 (en) | 1994-07-07 | 1994-07-07 | Method for manufacturing sliding member of vehicle suspension having titanium oxide coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6180895A JP3023530B2 (en) | 1994-07-07 | 1994-07-07 | Method for manufacturing sliding member of vehicle suspension having titanium oxide coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0821469A true JPH0821469A (en) | 1996-01-23 |
| JP3023530B2 JP3023530B2 (en) | 2000-03-21 |
Family
ID=16091205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6180895A Expired - Fee Related JP3023530B2 (en) | 1994-07-07 | 1994-07-07 | Method for manufacturing sliding member of vehicle suspension having titanium oxide coating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3023530B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017217506A1 (en) * | 2016-06-17 | 2017-12-21 | 株式会社アールシーロゴ | Sliding member for vehicular suspension, and method for manufacturing sliding member |
-
1994
- 1994-07-07 JP JP6180895A patent/JP3023530B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017217506A1 (en) * | 2016-06-17 | 2017-12-21 | 株式会社アールシーロゴ | Sliding member for vehicular suspension, and method for manufacturing sliding member |
| JPWO2017217506A1 (en) * | 2016-06-17 | 2019-05-16 | 株式会社アールシーロゴ | Sliding member for vehicle suspension and method of manufacturing the same |
| US20190301005A1 (en) * | 2016-06-17 | 2019-10-03 | Rc-Logo Co., Ltd. | Sliding member for vehicular suspension and method for producing same |
| EP3473886A4 (en) * | 2016-06-17 | 2020-03-11 | RC-Logo Co., Ltd. | Sliding member for vehicular suspension, and method for manufacturing sliding member |
| US10844471B2 (en) | 2016-06-17 | 2020-11-24 | Rc-Logo Co., Ltd. | Sliding member for vehicular suspension and method for producing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3023530B2 (en) | 2000-03-21 |
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