JPH08206405A - Regenerator for dried liquid - Google Patents

Abstract

PURPOSE: To regenerate a high purity dried nonaqueous liquid mixed with a hydrophilic solvent such as alcohol. CONSTITUTION: Dried liquid 5 mixed with a hydrophilic solvent is led from a cleaning tank 1 into a mixing tank 7 to be agitated forcibly with separated liquid 16. The hydrophilic solvent is extracted at a high efficiency into the separated liquid by the forcible agitation. The mixed liquid is passed through the ultrafine fiber oil/water separating filter 13 of a separation tank 10 to separate into the dried liquid and the separated liquid.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to metal parts, optical parts,
The present invention relates to a regenerating device for a dry liquid used for precision cleaning of electronic parts and the like.

[0002]

2. Description of the Related Art Chlorine organic solvents such as CFCs and trichloroethane have been used for cleaning industrial products. However, since the use of CFCs and trichloroethane causes the destruction of the ozone layer in the atmosphere, the use of CFC and trichloroethane tends to be prohibited worldwide. Therefore, many alternatives to chlorine-based organic solvents have been developed. In parallel with this, the regeneration of the dry liquid used for cleaning has also been developed. JP-A-5-309205 and 5-18.
Japanese Patent Nos. 4808 and 6-142403 describe conventional techniques for regenerating the dried liquid. Both of these regeneration methods, after mixing the separation liquid in the non-aqueous dry liquid mixed with the hydrophilic solvent, by static separation by the difference in specific gravity, the dry liquid, a mixture of the hydrophilic solvent and the separation liquid. It separates and regenerates the dried liquid.

[0003]

However, the above-mentioned prior art is to mix a dry product consisting of a non-aqueous solvent into the separation liquid, and the separation is simply raised along the lower part of the separation plate or to the pipe. The structure is such that the liquid is discharged from the small holes provided. In these methods, since the particles of the dried liquid in the separated liquid are large, the contact interface between the dried liquid and the separated liquid is small, and the extraction efficiency is poor. Further, since the three mixed liquids are allowed to stand for a certain period of time and then subjected to specific gravity separation, the treatment amount per unit time is limited to about 2 liters / minute, and there is a problem that the treatment amount is small.

The present invention has been made in consideration of the above circumstances, and provides a regenerating apparatus for a dry liquid capable of separating the dry liquid with good purity and increasing the throughput per unit time. With the goal. Another object of the present invention is to provide a regenerating apparatus for a dried liquid that enables effective use of the regenerated dried liquid and the separated liquid used for the separation in a circulating manner.

[0005]

The present invention is a device for regenerating a dry liquid by separating and removing a hydrophilic solvent mixed in a non-aqueous dry liquid, and a cleaning tank for containing the dry liquid, A mixed solution having a low compatibility with the dry liquid and a high compatibility with a hydrophilic solvent is mixed with the dry liquid to forcibly stir to form a mixed liquid, and the mixed liquid is passed to pass through the mixed liquid. It is characterized by comprising an ultrafine fiber oil / water separation filter for aggregating and coarsening the separated liquid, and a separation tank for separating the dried liquid and the separated liquid.

By the way, the compatibility between different kinds of liquids depends on their SP values (solubility parameter; Solu).
The closer they are, the more likely they are to mix. For example, silicone (SP value =
7.0) and alcohol (for example, in the case of IPA, SP value =
11.45), alcohol and water (SP value = 23.4) are mixed, but silicone and water are separated. Then, when the three components of silicone, alcohol and water are mixed, the alcohol and water are mixed with each other, and the mixed liquid thereof is separated from silicone. By utilizing this phenomenon, that is, by adding water to the silicone mixed with alcohol, the alcohol can be extracted with water, separated and removed, and the silicone of the non-aqueous solvent as the drying liquid can be regenerated.

In the present invention, the three liquids are sufficiently mixed by the forced stirring means such as a scroller. As the forced stirring means, any means may be used as long as it makes the non-aqueous dry liquid into particles as small as possible. This is because as the particles are smaller, the contact interface with the separated liquid increases and the extraction efficiency improves.

As the ultrafine fiber oil-water separation filter having the above structure, for example, the product name "U-Tech (T series)" manufactured by Asahi Kasei Co., Ltd. can be used. This oil-water separation filter is a filter having a single fiber diameter of 1 to 3 μm, and when two kinds of incompatible liquids pass through the filter, one of the liquids, which are very small particles, agglomerates and enlarges. The specific gravity is separated immediately after passing through the filter. Therefore, efficient separation can be performed.

In the present invention, the dry liquid separated in the separation tank may be introduced into the washing tank by a pipe, or the separated liquid separated in the separation tank may be introduced into the mixing tank by a pipe. By these, the dried liquid and the separated liquid can be reused and their effective use becomes possible.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an example of a cleaning procedure of a cleaning object composed of optical components such as lenses will be described with reference to FIG. In the first cleaning step, cutting oil, organic stains such as fingerprints, or inorganic stains such as cerium oxide and dust adhering to the washed object are removed with a detergent. In the second rinse step, the detergent is washed off with water or pure water. In the third dehydration step, the water attached to the washed product is replaced with IPA. In the fourth drying step, the washed product is immersed in a drying liquid to replace IPA with the drying liquid. Then, after pulling up, drying with warm air with clean air or drying under reduced pressure is completed. In the fourth drying step, the drying liquid regenerating apparatus of the present invention is used.

(Embodiment 1) FIG. 1 shows Embodiment 1 of the present invention, in which a cleaning tank 1 and a mixing tank 7 are connected by a recovery pipe 6, and a mixing tank 7 and a separation tank 10 are connected by a connecting pipe 12. The separation tank 10 and the cleaning tank 1 are connected by the circulation pipe 18.

The cleaning tank 1 is a double tank including an inner tank 2 and an outer tank 3, and an ultrasonic oscillator 4 is provided at the bottom. In the cleaning tank 1 having the two-tank structure, the dry liquid 5 overflowing from the inner tank 2 flows out to the outer tank 3. One end of a recovery pipe 6 is connected to the bottom of the outer tank 3, and the dry liquid 5 overflowing from the inner tank 2 flows into the mixing tank 7 from the recovery pipe 6. As the drying liquid 5, a non-aqueous solvent containing silicone as a main component is used.

The mixing tank 7 mixes the dry liquid 5 and the separated liquid 16, and a supply pipe 8 for supplying the separated liquid 16 is connected to the upper part thereof. Water, pure water, or the like is used as the separated liquid. In addition, a scroller 9 for mixing and stirring is arranged inside the mixing tank 7. This mixing tank 7
The mixed liquid mixed in (1) is supplied to the separation tank 10 from a connecting pipe 12 having a pump 11.

An ultrafine fiber oil / water separation filter 13 is arranged inside the separation tank 10, and a connecting pipe 12 from the mixing tank 7 is connected to a portion where the filter 13 is arranged. Therefore, the mixed liquid from the mixing tank 7 flows into the separation tank 10 after passing through the ultrafine fiber oil / water separation filter 13. As the filter 13, a product name “U-Tech (T series)” (manufactured by Asahi Kasei Corporation) can be used. This filter has a characteristic that, when a mixed liquid having incompatibility passes through, one of the liquids, which are in the form of small particles, is aggregated and enlarged. Therefore, this filter 13
When passing through, the separated liquid in the mixed liquid aggregates and enlarges. Therefore, after passing through the filter 13, the separated liquid is separated from the dried liquid due to the difference in specific gravity. Such a separation tank 10
Has a closed structure as a whole, and a discharge pipe 15 having a valve 14 is connected to the lower side surface. 17 is a separation tank 1
0 is a float switch provided in the separation tank 10
The interface between the dried liquid separated inside and the separated liquid 16 is detected.
The float switch 17 detects that the liquid level of the separated liquid 16 has risen, so that the valve 14 is opened and the separated liquid 16 is discharged from the discharge pipe 15.

The circulation pipe 1 is provided on the upper side surface of the separation tank 16.
8 is connected to one end, and the other end of the circulation pipe 18 is connected to the bottom of the inner tank 2 of the cleaning tank 1. As a result, the dry liquid 5 in the separation tank 10 is supplied again to the cleaning tank 5.

The cleaning tank 1 in this configuration is used in the step of dipping the dry liquid shown in FIG. 3, and the dry liquid 5 in the cleaning tank 1 contains IPA used for water replacement. The IPA-mixed drying liquid 5 overflows from the inner tank 2 and then is introduced into the mixing tank 7 through the recovery pipe 6. In the mixing tank 7, the dried liquid is continuously supplied to the separated liquid 16
Mixed with. During this mixing, the IPA that was compatible with the dry liquid 5 is attracted to the separation liquid 16, and the small particles of the separation liquid 16 with which the IPA is compatible floats without being mixed with the dry liquid 5. Becomes This mixed liquid is pumped from the lower part of the separation tank 10 to the ultrafine fiber oil water separation filter 1
It is introduced into the inside of 3 in a circulation amount of 5 liters, and while passing through the filter 13, the separation liquid 16 aggregates and becomes large, and thus the separation liquid 16 is separated in specific gravity instantly after passing through the filter 13. The separated upper layer dried liquid 5 is re-supplied to the cleaning tank 1 through the regeneration circulation pipe 18, and the lower layer separated liquid 16 in which IPA is compatible is discharged intermittently to the outside through the discharge pipe 15. .

IPA in the dried liquid regenerated according to this example
As a result of analyzing the concentration using gas chromatography,
It was confirmed that when continuously washed without using this example, the dried liquid 5 whose purity gradually decreased can be maintained at a purity of 99.9% or more.

(Embodiment 2) FIG. 2 shows Embodiment 2 of the present invention, in which the same elements as those of Embodiment 1 are designated by the same reference numerals and correspond to each other, thereby omitting redundant description. In this embodiment, the lower part of the separation tank 19 and the upper part of the mixing tank 20 are connected by a connecting pipe 22 having a valve 21.
Further, a throttle valve 25 is provided in the supply pipe 23 for supplying the separation liquid 16 to the mixing tank 20, and the supply amount of the separation liquid 16 is adjusted.

In this embodiment, the same operation as in Embodiment 1 is carried out, but generally, the separation ability of the separation liquid is higher as the amount of the liquid is larger than that of the dry liquid. In Example 1, in order to increase the separation and the capacity, it is necessary to increase the supply amount of the separation liquid, and as a result, the drainage amount increases. On the other hand, in this embodiment, the separated liquid is separated into the separation tank 19 and the mixing tank 2.
It is circulated between 0 and used to supply a small amount of separation liquid to the supply pipe 23.
It can be sufficiently separated only by supplying from. Therefore, in this embodiment, there is an advantage that the amount of separated liquid discharged can be reduced.

In the above description, three types of alcohol, water and silicone have been described, but the present invention is not limited to this, and it is possible to appropriately combine and use the solvents utilized in the solvent extraction of analytical chemistry. Of course. For example, hydrocarbons, ethers and esters may be used instead of alcohol.

[0021]

EFFECT OF THE INVENTION In the apparatus for regenerating a dried liquid according to the present invention, the separated liquid having a small compatibility and the dried liquid are forcibly stirred to form a mixed liquid while extracting the hydrophilic solvent in the dried liquid into the separated liquid. The mixed solution is passed through an ultrafine fiber oil / water separation filter for separation, and the dry solution and the separated solution can be efficiently separated. For this reason, the dried liquid can be regenerated with high purity, and the amount of regeneration treatment is increased.

Further, according to the present invention, the regenerated dry liquid can be effectively used by introducing it again into the washing tank, and the separated liquid can be effectively used by introducing it into the mixing tank again. .

[Brief description of drawings]

FIG. 1 is a sectional view of a first embodiment of the present invention.

FIG. 2 is a sectional view of a second embodiment of the present invention.

FIG. 3 is a block diagram of a cleaning system.

[Explanation of symbols]

 1 Washing tank 5 Dry liquid 7 Mixing tank 9 Scroller 10 Separation tank 16 Separation liquid

Claims (4)

[Claims] 1. A device for regenerating a dry liquid by separating and removing a hydrophilic solvent mixed in a non-aqueous dry liquid, which has a low compatibility with a cleaning tank for containing the dry liquid and the dry liquid. A mixing tank that mixes a separated liquid with high compatibility with a reactive solvent into a dry liquid and forcibly stirs it to form a mixed liquid, and an ultrafine particle that aggregates and separates the separated liquid in the mixed liquid by passing this mixed liquid An apparatus for regenerating a dried liquid, comprising a fiber oil / water separation filter and a separation tank for separating the dried liquid and the separated liquid. 2. The regenerating apparatus for a dry liquid according to claim 1, further comprising a pipe for guiding the dry liquid separated in the separation tank to the cleaning tank. 3. The apparatus for regenerating a dry liquid according to claim 1, further comprising a pipe for guiding the separated liquid separated in the separation tank to the mixing tank. 4. The dry liquid according to claim 1, wherein the dry liquid is a non-aqueous solvent containing silicone as a main component, the hydrophilic solvent is alcohol, and the separated liquid is water. Playback device.