JPH08201316A - X-ray element analyzer - Google Patents

Abstract

PURPOSE: To provide an X-ray element analyzer capable of detecting various dangerous objects easily transmitting X-rays. CONSTITUTION: This X-ray element analyzer is provided with an X-ray generator 10 generating X-rays having a wide wavelength area under fixed conditions, an X-ray detector 13 having the X-ray wavelength resolution and position resolution and arranged to receive the X-rays generated by the X-ray generator 10 and transmitting an inspected object 12, an X-ray image processor 14 analyzing the elements in the inspected object 12 based on the output of the X-ray detector 13 to obtain an X-ray image, and a display means 15 displaying the output of the X-ray image processor 14.

Description

Detailed Description of the Invention

[0001]

The present invention relates to an airport baggage inspection device,
The present invention relates to an X-ray elemental analysis device applied to a vapor deposition device, a medical CT device, an industrial CT device, and the like.

[0002]

2. Description of the Related Art A conventional X-ray analysis apparatus has been designed to detect an X-ray irradiation and an X-ray transmission image by using an X-ray image detector having no wavelength analysis function. As another device, there is a synchrotron radiation device using an elemental analysis method capable of obtaining monochromatic X-rays, but the device is large and expensive, and lacks versatility.

FIG. 5 is a diagram showing the principle of a conventional X-ray analysis apparatus. The primary X-ray XA emitted from the X-ray source 11 of the X-ray generator 10 is applied to the baggage 12. X-rays transmitted through the baggage 12 are X-ray image intensifier 51.
, And the two-dimensional X-ray transmission image is converted into visible light. The converted visible light is converted into an electric signal by the CCD element 52 and then sent to the monitor 53 for display.

[0004]

In the conventional X-ray analyzer, metal such as a pistol and a knife is detected and detected.
Drugs and plastic bombs hidden inside 2a 12b
Is difficult to detect because X-rays pass through,
I had no choice but to rely on the smell of police dogs. It is an object of the present invention to provide an X-ray elemental analyzer that can detect various dangerous substances that easily transmit X-rays.

[0005]

In order to solve the above problems and achieve the object, the X-ray elemental analysis device of the present invention is constructed as follows. The X-ray elemental analysis device of the present invention is capable of injecting an X-ray generator that generates X-rays having a wide wavelength range under certain conditions, and an X-ray that is generated by this X-ray generator and transmitted through an object to be inspected. The X-ray detector having the X-ray wavelength resolution and the position resolution arranged as described above, and the X-ray image for obtaining the X-ray image by performing the elemental analysis in the inspection object based on the output of the X-ray detector It is composed of a processing device and display means for displaying the output of the X-ray image processing device.

[0006]

As a result of taking the above-mentioned means, the following effects occur. In the X-ray elemental analyzer of the present invention, the X-rays that have passed through the object to be inspected are converted into the X-ray absorption wavelength, the secondary excitation X-ray wavelength, and the like, which are peculiar to the element. These are two-dimensionally imaged by an X-ray detector having an X-ray wavelength resolution and a position resolution, and then the X-ray image processing device compares and determines the elemental components of the inspection object, so that even if X-rays do not pass through. Even an object to be inspected that may be detected can be accurately detected and identified as long as its components and composition ratios are known.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing the configuration of an apparatus according to a first embodiment in which the present invention is applied to an airport baggage inspection apparatus. X-rays XA emitted from the X-ray source 11 of the X-ray generator 10 are irradiated on the dangerous material 12b in the case 12a of the baggage 12, and the X-rays XB after passing through the CCD element having wavelength resolution and position resolution. It is incident on the X-ray detector 13 including a two-dimensional solid-state image sensor. The X-ray incident on the X-ray detector 13 becomes an image signal. This X-ray image signal is sent to the image processing device 14
The elemental component is determined by wavelength analysis or the like, and the result is displayed on the monitor 15. Thus, the X-ray image 15b of the dangerous material 12b is displayed on the screen 15a of the monitor 15.

FIG. 2 is a diagram showing the configuration of a second embodiment in which the present invention is applied to a vapor deposition apparatus. In a vacuum container 20 kept in a vacuum by a vacuum pump 21, an electron gun 23 controlled by a power supply section 22. When the electron beam EB emitted from the laser beam enters the molten metal 25 in the crucible 24 and is heated, the metal vapor 25
X-ray Xc is generated together with a.

On the other hand, the film 27 wound on the roller 26
When passing through the cooling roll 28, the metal vapor 2 on the surface
The vapor deposition film 25b of 5a is formed, and the take-up roller 29
To be wound up. At this time, when the generated X-rays XC enter the vapor deposition film 25b, the X-rays are converted into secondary X-rays XD having a wavelength peculiar to the elements forming the vapor deposition film 25b. This secondary X-ray XD enters the X-ray detector 13 having wavelength resolution and position resolution through the beryllium window 20a of the vacuum container 20. The output of the X-ray detector 13, that is, the X-ray image including the X-ray wavelength information, is subjected to wavelength analysis or the like to determine the elemental component by the image processing device 14, and the result is displayed on the monitor 15.

FIG. 3 is a diagram showing the configuration of a third embodiment in which the present invention is applied to a medical X-ray CT apparatus. X-rays XE emitted from the X-ray generator 10 attached to the CT rotating mechanism 30 are applied to harmful substances 32 such as cancer cells and stones in the body of the patient M on the stage 31. The irradiated X-rays XE are converted into secondary X-rays XF having a wavelength peculiar to the elements forming the harmful substance 32. The secondary X-rays XF enter the X-ray detector 13 having wavelength resolution and position resolution, the image processing device 14 determines the elemental components by wavelength analysis and the like, and the results are displayed on the monitor 15. As shown in the figure, the harmful substance 32 is projected in the cross-sectional image of the patient M.

FIG. 4 is an operation principle diagram showing the effect peculiar to the present invention. As shown in (a), when the dangerous substance 12b is irradiated with the X-ray XA emitted from the X-ray generator 10, the transmitted X-ray XB is incident on the X-ray detector 13. The spectrum 41 of X-ray XA has the characteristics shown in FIG. When this X-ray XA passes through the dangerous substance 12b, the transmitted X-ray XB has element distribution information. FIG. 4C shows the spectrum 42 of the transmitted X-ray XB. The spectrum 42 includes a characteristic X-ray 43 unique to the element generated secondarily and an X-ray absorption edge 44 unique to the element. The information peculiar to these elements is detected and analyzed by the X-ray detector 13 as each image, and the determination is detected.

[0012]

According to the present invention, it is possible to provide an X-ray elemental analyzer capable of detecting various dangerous substances which easily transmit X-rays.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a baggage inspection device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a vapor deposition device according to a second embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a medical X-ray CT apparatus according to a third embodiment of the present invention.

FIG. 4 is an operation principle diagram showing a unique effect of the present invention.

FIG. 5 is a principle diagram showing a configuration of a conventional X-ray analysis apparatus (baggage inspection apparatus).

[Explanation of symbols]

10 ... X-ray generator 11 ... X-ray source 12 ... Baggage 12a ... Case 12b ... Dangerous goods 13 ... X-ray detector 14 ... Image processing device 15 ... Monitor 15a ... Screen 15b ... X-ray image 20 ... Vacuum container 20a ... Beryllium Window 21 ... Vacuum pump 22 ... Power supply 23 ... Electron gun 24 ... Crucible 25 ... Molten metal 25a ... Metal vapor 25b ... Vapor deposition film 26 ... Roller 27 ... Film 28 ... Cooling roll 29 ... Winding roller EB ... Electron beam 30 ... CT Rotation mechanism 31 ... Stage 32 ... Hazardous substance M ... Patient 41 ... X-ray XA spectrum 42 ... Transmitted X-ray XB
Spectrum 43 ... Characteristic X-ray 44 ... X-ray absorption edge

Claims (1)

[Claims] 1. An X-ray generator for generating X-rays having a wide wavelength range under a fixed condition, and an X-ray generator which is arranged so that X-rays generated by the X-ray generator and transmitted through an object to be inspected can be incident. An X-ray detector having an X-ray wavelength resolution and a position resolution, an X-ray image processing device for obtaining an X-ray image by performing elemental analysis of an object to be inspected based on the output of the X-ray detector, and the like. An X-ray elemental analysis device comprising: a display unit for displaying the output of the X-ray image processing device.