JPH08200566A - Fluid coupling and spanner for threadably attaching it - Google Patents

Abstract

PURPOSE: To facilitate fastening work or removing work in a small space. CONSTITUTION: A fluid coupling is composed of a nut member 1 to be fitted to the end of one piping 5 to be allowed to communicate, and in which an internal thread 1a is formed in one end inner peripheral part, and a bolt member 8 fitted to the end of the other piping 7 to be allowed to communicate, and in which an external thread 8a is formed on one end outer peripheral part, and the pipings 5, 7 communicate by screwing the internal thread 1a of the nut member 1 and the external thread 8a of the bolt member 8. A plurality of cylindrical holes 31, 32 formed on the circumference are provided on the other end of the nut member 1 in which the internal thread 1a is formed, or on the other end of the bolt member 8 on which the external thread 8a is formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid coupling used in a gas supply device used in an industrial manufacturing apparatus such as a semiconductor manufacturing apparatus, and more specifically, a space for tightening or removing a connecting portion in a small space. The present invention relates to a fluid coupling that can be performed in.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor manufacturing process, thermal diffusion has been performed on a silicon base using a supertoxic gas such as silane, arsine, phosphine, or diborane as an impurity source. Pyrophoric gases are also used.
For example, the lethal dose of arsine is 0.5 ppm, and since a small amount of leakage causes personal injury, these gas pipes were connected by welding in principle to prevent leakage. On the other hand, the method of connecting pipes without using welding is shown in FIG.
The fitting shown in FIG. 10 was used. Here, FIG. 9 is a perspective view showing a state in which the connection of the conventional joint is removed. On the other hand, FIG. 10 is a view showing a cross section of the joint.

In this joint, pipes 52 and 53 are inserted into both ends of the through hole of the body 51. Male screws 51a are formed on both ends of the body 51, and female screws 54a formed inside the cap nut 54 are fastened to the male screws 51a. Further, a hexagonal surface for applying a spanner when rotating the body 51 and the cap nut 54 is formed. Large chamfers are formed at the inlets of both ends of the through hole of the body 51, and a sleeve 55 having a wedge-shaped cross section is fitted into the chamfers. A through hole is formed at the center of the sleeve 55, and the pipes 52 and 53 are fitted therein. A co-rotating seat 56 is in contact with the bottom surface of the sleeve 55. The opposite end surface of the seat 56 is in contact with the inner end surface of the cap nut 54. A through hole is formed at the center of the sleeve 55 and is fitted to the pipes 52 and 53.

In the joint having such a structure, the cap nut 54 is screwed into the body 51 with a predetermined torque. That is, a spanner is fitted and fixed on the hexagonal surface of the body 51, and a spanner is also fitted on the hexagonal surface of the cap nut 54 and rotated. Then, the cap nut 54 advances in the mounting direction by the female screw 54a and the male screw 51a. The sleeve 55 is pressed inward by the body 51 and pressed against the outer peripheries of the pipes 52 and 53, so that the pipes 52 and 53 are deformed. Therefore, by this, the outer peripheral surfaces of the pipes 52 and 53 and the sleeve 5 are
5, the close contact between the inner surface of the sleeve 5 and the outer surface of the sleeve 55 and the inner surface of the chamfered portion of the body 51 is ensured, and the airtightness of the joint is ensured.

[0005]

However, the conventional joint has the following problems. In the semiconductor process where the fluid coupling is installed, high-density piping is required due to the complicated piping system associated with the highly functional and multi-functional industrial process. That is, it is necessary to narrow the interval between the pipes,
Therefore, the working space for maintenance is small and it is difficult to secure a tool space. However, when fitting the wrench on the hexagonal surface of the cap nut and tightening or removing it, the distance from the adjacent pipe for fitting the wrench and rotation of the size of the tool that rotates the wrench in the predetermined direction Space is needed.

Therefore, if the space cannot be secured, it is very difficult to tighten the cap nut with screws.
It took a long time to remove and install the cap nut.
On the contrary, if the rotation space is wide so that the work can be performed easily, it is against the demand for high-density piping. On the other hand, even when the pipes are densely arranged, the tip of the wrench can be engaged obliquely to tighten at an unreasonable angle. However, in such an unreasonable mounting, even torque is not applied to the cap nut 6, resulting in poor adhesion, and a biased force may be applied to cause damage.

The present invention solves the above problems and provides a fluid coupling used in a semiconductor manufacturing process or the like, which can be easily carried out in a small space for tightening or removing work, and a screwing spanner used therefor. The purpose is to provide.

[0008]

SUMMARY OF THE INVENTION A fluid coupling of the present invention is fitted to one of the communicating pipe ends, and has a nut member having an internal thread formed at one end inner periphery thereof and the other pipe communicating with the nut member. A bolt member fitted to an end portion and having a male screw formed on an outer peripheral portion at one end. The female screw of the nut member and the male screw of the bolt member are screwed to each other to connect the pipes. In addition, the other end of the nut member formed with the female screw or the other end of the bolt member formed with the male screw has a plurality of cylindrical holes formed on the circumference. Further, in the fluid coupling of the present invention, it is desirable that the plurality of cylindrical holes be formed at four or more locations at equal angles.

The threaded spanner of the present invention comprises a bar member having a predetermined length, and a substantially semicircular main body which is curved according to the size of a pipe into which a fluid coupling having a male screw or a female screw is fitted. , A plurality of cylindrical holes formed on the same circumference on the end face of the fluid coupling are inserted into the cylindrical holes at the same position as the two or more cylindrical holes on one or both surfaces of the main body. And a plurality of cylindrical protrusions. In addition, it is preferable that the screw-on wrench of the present invention is such that the two cylindrical protrusions are locked to the curved surface portion of the main body by one set screw.

[0010]

According to the fluid coupling of the present invention, each of the fluid couplings is fitted to two communicating pipe ends, and the nut member forming the fluid coupling and the bolt having the male thread are formed. The two pipes are connected by screwing a female screw and a male screw with the member. Then, when the fluid coupling is screwed, the other end of the nut member on which the female screw is formed, the other end of the bolt member on which the male screw is formed, or a circle at both ends thereof Fit the protrusions of the screwing spanner into the multiple cylindrical holes formed on the circumference and rotate the rod member fixed to the main body to rotate the nut member or bolt member for tightening or removing. The spanner can be suppressed to have a diameter equal to or smaller than the diameter of the nut member and the bolt member that form the body of the fluid coupling, and the fluid coupling can be tightened or removed in a small space. Further, the threaded spanner of the present invention can be independently fixed as a fixing member by screwing with a set screw portion formed on the curved surface portion of the main body, without having to hold the rod member.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment embodying the fluid coupling and the screwing spanner of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing a cross section of a fluid coupling of this embodiment for connecting pipes. Then, FIG. 2 is an exploded perspective view showing the configuration of the main parts of the fluid coupling of the present embodiment. The present embodiment is a fluid coupling in which the cap nut 1 is used as a nut member and the body 8 is used as a bolt member to connect a set of pipes. Therefore, the configuration will be described below with reference to the drawings.

The cap nut 1 has a female screw 1a formed on the inner side thereof, and a thrust ball bearing 9a provided on the inner closed end side thereof.
The first ferrule part 3a is fitted so as to abut. A pipe 5, which is a first pipe, is attached to the inside of the first ferrule part 3a. The end surface of the pipe 5 is
As shown in FIG. 3, the tip portion is chamfered, and the tip end surface 5b is formed.
Is mirror-finished by roll burnishing.
On the other hand, the thrust ball bearing 9 is provided on the inner open end side of the cap nut 1.
It is formed so that b may fit. A second ferrule part 3b is fitted inside the cap nut 1 so as to come into contact with the thrust ball bearing 9b. Further, the inside of the second ferrule part 3b is also attached with a pipe 7 which is a second pipe, the tip end thereof is chamfered, and the surface is mirror finished by roll burnishing. The thrust ball bearing 9b is brought into contact with the end surface of the body 8 having the male screw 8a formed on the outer circumference.

Grooves 7a or 7b are cut on the peripheral surfaces of the pipes 5 and 7, respectively, as shown in FIG. Further, the pipes 5 and 7 are fitted with the sleeve 2a or the sleeve 2b having six grooves formed in the longitudinal direction and having a wedge-shaped cross section. Furthermore, the sleeves 2a, 2b
The first ferrule part 3a having the same inclination as the wedge-shaped inclination on the inner surface is fitted to the sleeve 2a, and the second ferrule part 3b is fitted to the sleeve 2b. in this way,
The first ferrule part 3a and the sleeve 2a are fitted together, and the second ferrule part 3b and the sleeve 2b are fitted together to form a ferrule. The sleeves 2a and 2b have wedge-shaped cross-sections and small end surfaces located on the thrust ball bearing 9a and 9b sides, respectively, as shown in FIG. on the other hand,
The first ferrule part 3a and the second ferrule part 3b are
The trapezoidal cross section is attached so that the end surface having a large area comes into contact with the thrust ball bearings 9a and 9b. A gasket 4 is provided at the connecting portion between the pipe 5 and the pipe 7, and the end portion of the pipe 5 is attached so as to abut on the inner surface side.

As shown in the sectional view (a) and the plan view (b) of FIG. 4, the end face of such a cap nut 1 is provided with a spanner hole 31 which is a feature of the present invention. There is. Further, the body 8 is also provided with a wrench hole 32 as shown in the sectional view (a) and the plan view (b) of FIG. The spanner holes 31 and 32 are shown in FIGS.
As shown in (b), six end faces of the cap nut 1 and the end face of the body 8 are similarly formed on the circumference at equal angles. Further, both the wrench hole 31 and the wrench hole 32 are formed on the circumference of the same diameter. In the present embodiment, the dimensions of the spanner holes 31, 32 are made the same so that the spanner for screwing the cap nut 1 and the body 8 which are fluid couplings can be shared.

As the spanner, those shown in FIGS. 6 to 8 are used. The first spanner 40 is composed of a spanner body 41 and a handle 42. The wrench body 41 is
It has a relief portion 44 formed in a curved shape so as to avoid a pipe passing through the center of the cap nut 1 and the body 8. The wrench main body 41 has four protrusions 43 formed on the same circumference having the same diameter and corresponding to the wrench hole 31 of the cap nut 1. Further, in the second spanner 45 shown in FIG. 7, the handle 42 is integrally fixed to the spanner main body 41 and the projection 43 is provided, like the spanner 40. Further, as its characteristic, similar protrusions 43 are provided at the same positions on both sides of the spanner main body 41, and the handle 42 is attached at a predetermined angle θ (half the pitch of the spanner holes) with respect to the radial direction of the spanner main body 41. ing.

The third spanner 46 shown in FIG. 8 is composed of a spanner body 41, a handle 42, and a protrusion 43 like the spanner 40, and a screw hole 48 for a set screw 47 is further formed in the spanner body 41. It is formed in two places. That is, the spanners 40 and 45 can be used for both cases where the cap nut 1 and the body 8 are rotated or fixed, but the spanner 46 can be fixed by the screw 47 to limit the rotation.

Next, the operation of the fluid coupling having the above structure will be described. The sleeves 2a and 2b are mounted in the grooves 5a and 7a of the pipes 5 and 7, respectively. At this time, pipes 5, 7
Although the outer diameters of the sleeves and the inner diameters of the sleeves 2a and 2b are substantially the same, six grooves are formed at equal intervals on the outer circumferences of the sleeves 2a and 2b, and the outer wall has a thin thickness of 0.15 mm. Is elastically deformed, so that the sleeves 2a and 2b are fitted in the groove 5
It can be easily attached to a and 7a. Sleeve 2
The first ferrule part 3a and the second ferrule part 3b are mounted so as to fit with the inclinations of the outer surfaces of a and 2b. Further, the gasket 4 is fitted to the ends of the pipe 5 and the pipe 7.

The pipes 5 and 7 with the sleeves 2a and 2b and the gasket 4 mounted respectively are inserted into the cap nut 1 in which the first ferrule part 3a and the second ferrule part 3b are mounted, and the cap nut 1 And the body 8 are screwed together. At this time, one of the cap nut 1 and the body 8 is fixed by the spanners 40, 45, 46 (hereinafter, represented by the spanner 40), and the other is similarly rotated by the spanner 40. For example, the protrusion 43 of the wrench 40 is engaged with the cap nut 1 and the wrench holes 31 and 32 of the body 8, and the handle 32 of the wrench 40 engaged with the body 8 is fixed to limit the rotation of the body 8. Spanner 40 engaged with the cap nut 1
By rotating the handle 32, the cap nut 1 and the body 8 can be screwed together.

Since the wrench 40 can be engaged with and screwed into the wrench holes 31 and 32 formed in the end face of the cap nut 1, another pipe can be mounted close to the target pipe. Even when it is provided, it is possible to work in a space corresponding to the diameter of the cap nut 1 and the body 8. Further, by shifting the handle 42 by a predetermined angle θ with respect to the wrench body 41 like the wrench 45, the wrench 45 is rotated in one direction, and then the wrench 41 is inverted and rotated to rotate the handle 42. It is possible to work in a narrow area with no space to rotate.

When the cap nut 1 and the body 8 are screwed together by using the spanner 40 as described above, the propulsive force when the cap nut 1 is screwed into the body 8 is the sleeves 2a, 2b.
Is transmitted to the pipes 5 and 7 via the ferrule parts 3a and 3b. That is, the sleeve 2 constituting the ferrule is fitted into the groove 5b formed on the outer circumference of the pipe, and the ferrule parts 3a and 3b are wedge-shaped by the action of the wedge.
Since the propulsive force is transmitted by the a and 2b, the ferrule parts 3a and 3b can transmit the strong propulsive force to the pipe. Here, since the wrench 40 is engaged with the wrench hole 31 formed in the end surface of the cap nut 1 and screwed in, the torque can be evenly transmitted to the cap nut 1, and thus the ferrule part. The propulsive force transmitted to 3a and 3b can be made constant, and the pipes can be connected in an airtight state. The pipes 5 and 7 are cap nuts 1.
On the other hand, the ferrule parts 3a and 3b and the sleeve 2a,
Since it is positioned by 2b, the end surface 5 of the pipe
b and the end surface 6b of the body 6 are accurately aligned.

According to the fluid coupling and the spanner which is the screwing spanner having the above-mentioned structure, the spanner is the cap nut 1 or the body 8.
Since the wrench protrusions are inserted into and engaged with the end face of the wrench to tighten or remove the wrench, the wrench body can be pressed within the diameter of the cap nut and body, and there is no problem when the pipes come close to each other. Work in space is possible. If the protrusion is inserted into the wrench holes 31, 32, it can be surely and easily performed without slipping during rotation.

The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention. For example, the wrench hole 3 shown in the above embodiment
The diameter may be different from 1, 32, and the number is 6 but there is no problem as long as it is 2 or more.

[0023]

As is apparent from the above description, according to the fluid coupling of the present invention, the nut member having the female screw formed on the inner peripheral portion at one end and the bolt having the male screw formed on the outer peripheral portion at the one end. A pipe is communicated by screwing with a member, and the other end of the nut member formed with a female screw or the other end of the bolt member formed with a male screw is circumferentially formed. Since it has a plurality of cylindrical holes formed,
A threaded spanner can be engaged with the end face side of the fluid coupling, so that the tightening or removing work can be performed easily in a small space. Further, according to the threaded spanner of the present invention, with respect to the fluid coupling, a rod member having a predetermined length, a curved substantially semicircular body, and the two or more cylindrical holes at the same position as the cylinder It has a plurality of cylindrical projections inserted into the holes, and the projections are inserted into the cylindrical holes and rotated for tightening or removal, so that the threaded spanner can be engaged with the end face side of the fluid coupling, The tightening or removing work can be done easily in a small space.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a configuration of a fluid coupling which is an embodiment of the present invention.

FIG. 2 is an exploded perspective view showing a configuration of a main part of the embodiment.

FIG. 3 is a cross-sectional view of a pipe end portion.

FIG. 4 is a cross-sectional view showing the shape of a cap nut.

FIG. 5 is a cross-sectional view showing the shape of a body.

FIG. 6 is an external view showing the shape of a first spanner.

FIG. 7 is an external view showing the shape of a second spanner.

FIG. 8 is an external view showing the shape of a third spanner.

FIG. 9 is an external view showing a configuration of a conventional fluid coupling.

FIG. 10 is a sectional view showing a configuration of a conventional fluid coupling.

[Explanation of symbols]

 1 Cap nut 2a, 2b Sleeve 3a, 3b Ferrule part 4 Gasket 5,7 Pipe 8 Body 9 Thrust bearing 31 Spanner hole 40, 45, 46 Spanner 41 Spanner body 42 Handle 43 Protrusion 44 Relief part 47 Set screw 48 Screw hole

Claims (4)

[Claims] 1. A pipe fitted to one of the communicating pipe ends,
A female thread of the nut member, which comprises a nut member having an internal thread formed at one end thereof and a bolt member having a male thread formed at the outer circumference of one end, which is fitted to the other pipe end communicating with the nut member. And a male thread of the bolt member, in a fluid coupling for connecting pipes by screwing, the other end of the nut member having a female thread, or the other end of the bolt member having a male thread. A fluid coupling characterized in that it has a plurality of cylindrical holes formed on its circumference. 2. The fluid coupling according to claim 1, wherein the plurality of cylindrical holes are formed at four or more locations at equal angles. 3. A rod member having a predetermined length, a substantially semicircular body curved according to the dimensions of a pipe into which a fluid coupling having a male screw or a female screw is fitted, and an end surface of the fluid coupling. In addition, with respect to a plurality of cylindrical holes formed on the same circumference, a plurality of cylindrical projections that are inserted into the cylindrical holes at the same position as the two or more cylindrical holes on one or both surfaces of the main body. And a threaded spanner for threading a fluid coupling. 4. The screw-on spanner according to claim 3, wherein the two cylindrical protrusions are locked to the curved surface portion of the main body by one set screw.