JPH08179101A - Glass with optical thin film and its production - Google Patents

Glass with optical thin film and its production

Info

Publication number
JPH08179101A
JPH08179101A JP6323124A JP32312494A JPH08179101A JP H08179101 A JPH08179101 A JP H08179101A JP 6323124 A JP6323124 A JP 6323124A JP 32312494 A JP32312494 A JP 32312494A JP H08179101 A JPH08179101 A JP H08179101A
Authority
JP
Japan
Prior art keywords
thin film
solution
glass plate
glass
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6323124A
Other languages
Japanese (ja)
Inventor
Kenichirou Takahashi
謙一朗 高橋
Kensuke Makita
研介 牧田
Atsushi Takamatsu
敦 高松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP6323124A priority Critical patent/JPH08179101A/en
Publication of JPH08179101A publication Critical patent/JPH08179101A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor
    • C03C17/002General methods for coating; Devices therefor for flat glass, e.g. float glass

Abstract

PURPOSE: To obtain a glass plate having a thin film of which thickness is graded within a specified value in the vertical direction by applying a flow coating method and to make this plate applicable to windshield for automobile as well. CONSTITUTION: This glass plate with on optical thin film is obtd. by providing the surface of the transparent glass plate with thin film layer of graded film thickness increased or decreased in the thickness of at least one layer of the optical thin films in such a manner that the vertical film thickness difference of the thin film change gradually in a perpendicular direction at a value selected within 100nm with respect to a distance 100cm in the perpendicular direction.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、成膜用の溶液を用いる
湿式コーティング法であるフローコート法によりガラス
板状体の片面に特定の傾斜膜厚薄膜層を形成した光学薄
膜付きガラス及びその製法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass with an optical thin film in which a thin film layer having a specific thickness is formed on one surface of a glass plate by a flow coating method which is a wet coating method using a solution for film formation. Regarding manufacturing method.

【0002】[0002]

【従来の技術】従来から、湿式法を用いた基板上への均
一成膜法としては、スピンコート法、ディップコート
法、スプレー法、ロールコート法、フローコート法およ
び刷毛塗り、パッド印刷あるいはペースト印刷などがあ
るが、これらの方法ではこれまで膜厚が揃った均一な薄
膜の成膜を得るため多くの努力が成されてきたが、例え
ば光学特性を基板の一方向に沿って順次変化させるよう
な傾斜膜厚薄膜の作製については検討された例があまり
ない。
2. Description of the Related Art Conventionally, as a uniform film forming method on a substrate using a wet method, spin coating, dip coating, spraying, roll coating, flow coating and brush coating, pad printing or paste is used. Although there are printing methods and the like, many efforts have been made so far in order to obtain a uniform thin film having a uniform film thickness. For example, the optical characteristics are sequentially changed along one direction of the substrate. There have been few studies on the preparation of such a thin film having a gradient film thickness.

【0003】また一般に、基板を立てて成膜を行うディ
ッピング、ノズルコート、スプレーなどでは成膜後から
塗膜乾燥の間に液ダレ現象が発生し膜ムラが発生するこ
とがあった。
Further, generally, in dipping, nozzle coating, spraying, etc. in which a substrate is set up and a film is formed, a liquid sagging phenomenon may occur between the film formation and the film drying, resulting in film unevenness.

【0004】そこで、本出願人が既に出願した特開平1-
43368 号公報では、薄膜のコーティング方法およびその
装置を提案し、1側面を開口した容器の開口面をガラス
基板に密着させた状態で、容器にコーティング溶液を所
定レベルまで満たし、その後コーティング液を所定速度
で抜きとる方法を記載した。
Therefore, Japanese Patent Application Laid-Open No. 1-
In Japanese Patent No. 43368, a thin film coating method and apparatus are proposed, in which a container is filled with a coating solution to a predetermined level in a state where an opening surface of a container having one side opening is closely attached to a glass substrate, and then a predetermined coating liquid is applied. A method for extracting at a speed is described.

【0005】また例えば、本出願人が既に出願した特願
平5-127211号では、成膜法を提案し、基板の大きさまた
は成膜域に応じて基板を水平より僅かな斜めの起き上が
りで起伏自在に傾置し、基板の少なくとも上面側に、1
側面を開口した容器の該開口面を密着させ、密着状態に
ある容器内に溶液を基板の大きさまたは成膜域に応じた
レベルまで満たし、次いで溶液を満たした容器が基板に
密着状態のままで、容器の上部開口側が起きて溶液レベ
ルが移動して行くよう、膜厚に応じて起き上がり速度を
制御しつつ、溶液が基板から遊離するまで、傾置した基
板を回起せしめ塗布することを記載し、成膜開始側もし
くは成膜終了側のいずれから、膜の厚みを所定厚みから
または所定厚みに、一定の幅内で徐々に減衰するように
コントロールしてなる。
Further, for example, in Japanese Patent Application No. 5-127211 filed by the applicant of the present invention, a film forming method is proposed, and the substrate is raised slightly obliquely from the horizontal depending on the size of the substrate or the film forming area. Incline up and down freely, and at least on the upper surface side of the substrate, 1
The side surface of the container is opened and the container is in close contact with the solution, and the container in the close contact state is filled with the solution to a level according to the size of the substrate or the film formation area. Then, the container filled with the solution remains in close contact with the substrate. In order to control the rising speed according to the film thickness so that the solution level moves as the upper opening side of the container rises, the tilted substrate is rotated and coated until the solution is released from the substrate. The thickness of the film is controlled from either the film formation start side or the film formation end side so as to gradually attenuate within a certain width from a predetermined thickness or to a predetermined thickness.

【0006】さらに例えば、本出願人が既に出願した特
願平6-148938号では、薄膜のコーティング方法を提案
し、2枚の基板の成膜面を対向するように平行に置き、
基板の両側辺部および下辺部の3辺周囲にスペーサーを
介在せしめて間隔を持たせ、基板とスペーサーを密着
し、密着により形成した上辺部の一面のみを開口した給
排液口よりコーティング溶液を所定レベルまで入れ、そ
の後給排液口より所定膜厚に応じた速度で溶液を抜き去
り、成膜槽を分解して被膜基板を取り出すことで被膜す
ることを記載し、成膜開始側もしくは成膜終了側のいず
れから、膜の厚みを所定厚みからまたは所定厚みに、一
定の幅内で逐次減衰するようコントロールすることがで
きる。
Further, for example, in Japanese Patent Application No. 6-148938 filed by the applicant of the present invention, a thin film coating method is proposed, in which the deposition surfaces of two substrates are placed in parallel so as to face each other.
Spacers are placed around the three sides of both sides and the lower side of the substrate to provide a space, and the substrate and the spacer are brought into close contact with each other, and the coating solution is supplied from the supply / drain port that opens only one surface of the upper side formed by the close contact. It is described that the film is put to a predetermined level, then the solution is withdrawn from the supply / drainage port at a speed according to the predetermined film thickness, the film forming tank is disassembled, and the film substrate is taken out to form a film. The thickness of the film can be controlled to be gradually attenuated from a predetermined thickness or to a predetermined thickness within a constant width from either side of the film end.

【0007】他に例えば、特開平6-218311号公報に記載
の薄膜コーティング装置等が開示されている。
In addition, for example, a thin film coating apparatus disclosed in Japanese Patent Laid-Open No. 6-218311 is disclosed.

【0008】[0008]

【発明が解決しようとする問題点】前述した例えば前記
特開平1-43368 号公報に記載の薄膜のコーティング方法
およびその装置ならびに前記特願平5-127211号に記載の
成膜法では、例えば自動車用フロントガラス等で小面積
の薄膜を均一に成膜するのには充分適したものであるも
のの、フロントガラス全面に成膜するものには適用し難
い。
Problems to be Solved by the Invention In the above-mentioned thin film coating method and apparatus described in, for example, Japanese Patent Application Laid-Open No. 1-43368, and the film forming method described in Japanese Patent Application No. 5-127211, for example, an automobile is used. Although it is sufficiently suitable for uniformly forming a thin film having a small area on a windshield for use in a car, it is difficult to apply it to a device for forming a film on the entire surface of a windshield.

【0009】また、例えば特願平6-148938号に記載の薄
膜のコーティング方法では、確かに傾斜膜厚の薄膜を充
分実用できるものとなしうるものの、複雑な形状でかつ
大量生産でしかもタクトアップ等さらに生産性を必要と
する場合には必ずしも充分ではない。
Further, for example, in the thin film coating method described in Japanese Patent Application No. 6-148938, although a thin film having a graded film thickness can be made practical enough, it has a complicated shape and can be mass-produced and the tact time can be improved. It is not always sufficient when productivity is required.

【0010】[0010]

【問題点を解決するための手段】本発明は、従来のかか
る問題点に鑑みてなしたものであって、ガラス板状体を
立て掛けて成膜を行う方法のうち、立て掛けたガラス板
状体の上部から溶液を流下させて成膜を行うノズルフロ
ーコート法において、溶液の濃度、粘度およびガラス板
状体の立て掛け角度をコントロールすれば、上下の膜厚
変化(△t)がほぼ一定値の傾斜となる薄膜が得られ、
自動車用窓ガラス等に採用できる傾斜膜厚薄膜となり、
例えば自動車フロント窓ガラスに施す反射低減膜に用い
て運手者のより広い視野で高い反射低減性能を確保でき
ることとなって、より広い範囲でギラツキ感を抑え、誤
認や違和感が発現しないようになしうる等の有用な光学
薄膜付きガラス及びその製法を提供するものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and is one of the methods of leaning a glass plate to deposit a film. In the nozzle flow coating method in which a solution is made to flow from the upper part of a film to form a film, if the concentration and viscosity of the solution and the leaning angle of the glass plate are controlled, the change in the upper and lower film thicknesses (Δt) is almost constant. A thin film with a slope is obtained,
It is a thin film with a gradient film thickness that can be used for automobile window glass, etc.
For example, by using it as a reflection reduction film applied to the windshield of an automobile, it is possible to secure a high reflection reduction performance in a wider field of view of the driver, so that the glare can be suppressed in a wider range, and no misidentification or discomfort appears. The present invention provides a useful glass with an optical thin film such as Uru and a method for producing the same.

【0011】すなわち、本発明は、透明ガラス板状体の
表面に形成した光学薄膜において、該薄膜の上下の膜厚
差を鉛直方向の距離100cm に対して100nm 以内で選択し
た値で鉛直方向に徐々に変化するように、光学薄膜のう
ちの少なくとも1層を増加もしくは減少させた傾斜膜厚
薄膜層を備えたことで成ることを特徴とする光学薄膜付
きガラス。
That is, according to the present invention, in an optical thin film formed on the surface of a transparent glass plate, the difference in film thickness between the upper and lower sides of the thin film is selected in a vertical direction at a value selected within 100 nm with respect to a vertical distance of 100 cm. A glass with an optical thin film, characterized by comprising at least one of the optical thin films having a graded thin film layer which is increased or decreased so as to gradually change.

【0012】ならびに、垂直もしくは所定の傾斜角を持
たせて立て掛けたガラス板状体の上端部から薄膜形成用
溶液を表面流下させ光学薄膜を形成するフローコート法
において、前記溶液の溶質濃度および粘度ならびにガラ
ス板状体の立て掛けの傾斜角度のうち少なくとも1以上
選択して制御し、ガラス板状体に形成する光学薄膜の上
下方向の膜厚差を鉛直方向の距離100cm に対して100nm
以内で選択した値とするようにすることを特徴とする光
学薄膜付きガラスの製法。
In addition, in a flow coating method for forming an optical thin film by surface-flowing a thin film forming solution from the upper end of a glass plate which is vertical or has a predetermined inclination angle, the solute concentration and the viscosity of the solution. In addition, at least one of the leaning angles of the glass plate-like body is selected and controlled so that the vertical film thickness difference of the optical thin film formed on the glass plate-like body is 100 nm with respect to the vertical distance of 100 cm.
A method for producing glass with an optical thin film, characterized in that the value is selected within the range.

【0013】また、前記表面流下させ、溶液が表面全体
に塗り広がった後、さらにガラス板状体を水平方向に対
して所定角度に傾斜させて行う乾燥工程を伴うことを特
徴とする上述した光学薄膜付きガラスの製法。
Further, after the solution is made to flow down on the entire surface and the solution is spread over the entire surface, a drying step is further performed in which the glass plate is tilted at a predetermined angle with respect to the horizontal direction. Manufacturing method of glass with thin film.

【0014】さらに、前記薄膜形成用溶液が、少なくと
も1種以上の有機金属化合物もしくはその加水分解と溶
媒を含むゾルゲルコーティング溶液であって、該溶液に
おける酸化物換算の溶質濃度が0.01mol /l 〜5mol/l
であり、かつ溶液の粘度が0.1 〜100cP であることを特
徴とする上述した光学薄膜付きガラスの製法をそれぞれ
提供するものである。
Further, the thin film forming solution is a sol-gel coating solution containing at least one organic metal compound or its hydrolysis and a solvent, and the solute concentration in terms of oxide in the solution is 0.01 mol / l. 5 mol / l
And a solution having a viscosity of 0.1 to 100 cP, respectively.

【0015】ここで、前記薄膜の上下の膜厚差を鉛直方
向の距離100cm に対して100nm 以内で選択した値で鉛直
方向に徐々に変化するように、光学薄膜のうちの少なく
とも1層を増加もしくは減少させた傾斜膜厚薄膜層を備
えたことで成るガラスであるとしたのは、例えば薄膜の
上下の膜厚差を鉛直方向の距離100cm に対して100nmを
超えるように鉛直方向に徐々に変化するようになると、
ガラス板状体における膜厚の面内分布、ことに横方向の
膜厚の均一性が徐々に損なわれ、反射低減効果を失うの
みならず、光学的違和感を生じ兼ねないからであり、ま
た光学薄膜のうちの少なくとも1層を増加もしくは減少
させた傾斜膜厚薄膜層としたのは、例えば自動車用窓ガ
ラスで取付け角度ならびにドライバーの視野角に応じて
最適な反射低減等光学特性を発現せしめるよう1層以上
を適宜組み合わすことが必要な場合があるためである。
Here, at least one layer of the optical thin film is increased so as to gradually change in the vertical direction by a selected value within 100 nm with respect to a vertical distance of 100 cm for the vertical thickness difference of the thin film. Or, it is assumed that the glass is provided with a thin film layer with a reduced film thickness, for example, the film thickness difference between the upper and lower parts of the thin film is gradually increased in the vertical direction to exceed 100 nm with respect to the vertical distance of 100 cm. When it comes to change,
This is because the in-plane distribution of the film thickness in the glass plate, especially the uniformity of the film thickness in the lateral direction is gradually impaired, and not only the reflection reducing effect is lost but also an optical discomfort may occur. At least one layer of the thin film is increased or decreased in order to exhibit the optical characteristics such as optimum reflection reduction according to the mounting angle and the viewing angle of the driver in the window glass for automobiles. This is because it may be necessary to appropriately combine one or more layers.

【0016】また、フローコート法において、前記溶液
の溶質濃度および粘度ならびにガラス板状体の立て掛け
の傾斜角度のうち少なくとも1以上選択して制御するこ
ととしたのは、例えばガラス板状体の形状、大きさなら
びに厚みもしくは用いる薄膜形成用溶液等によって適宜
選択し組み合わせ、傾斜膜厚のなかでの膜厚分布の均一
性の確保、焼成後の薄膜におけるクラック、ピンホール
状の欠陥等の発現防止、さらに強固な薄膜を得ることの
ためである。
In the flow coating method, at least one or more of the solute concentration and viscosity of the solution and the leaning angle of the glass plate-shaped body are selected and controlled by, for example, the shape of the glass plate-shaped body. , The size and thickness or the thin film forming solution to be used are appropriately selected and combined to secure the uniformity of the film thickness distribution in the gradient film thickness, and prevent the occurrence of cracks and pinhole-like defects in the thin film after firing. , To obtain a stronger thin film.

【0017】また、前記表面流下させ、溶液が表面全体
に塗り広がった後、さらにガラス板状体を水平方向に対
して所定角度に傾斜させて行う乾燥工程を伴うこととし
たのは、ガラス板状体の形状や大きさあるいは用いる薄
膜形成用溶液の性状によっては塗膜からキュアまでの間
で所謂液ダレ現象を防ぎ、めざす傾斜膜厚薄膜層を正常
に保持するようにし、膜ムラがない最高の傾斜膜厚薄膜
を得るためである。
Further, the glass plate is accompanied by a drying step in which the solution is spread on the entire surface after the solution is allowed to flow down and the glass plate is tilted at a predetermined angle with respect to the horizontal direction. Depending on the shape and size of the thin body or the properties of the thin film forming solution used, the so-called liquid sagging phenomenon is prevented between the coating film and the cure, and the desired gradient film thickness is maintained normally, and there is no film unevenness. This is to obtain the highest graded thin film.

【0018】さらに前記薄膜形成用溶液が、少なくとも
1種以上の有機金属化合物もしくはその加水分解と溶媒
を含むゾルゲルコーティング溶液としたのは、例えば金
属アルコキシド系化合物あるいは金属アセチルアセトネ
ート化合物などのなかから少なくとも1種または2種以
上の化合物を用い、安定性があり、溶液調製の際平均分
子量の制御等が容易であり、耐摩耗性や耐久性さらに光
学特性等にも優れたものであり、比較的安価に入手でき
るものであるからである。
Further, the solution for forming a thin film is a sol-gel coating solution containing at least one or more organic metal compound or its hydrolysis and solvent, for example, among metal alkoxide compounds or metal acetylacetonate compounds. Using at least one compound or two or more compounds, it is stable, it is easy to control the average molecular weight when preparing a solution, and it is excellent in abrasion resistance, durability and optical properties. This is because it can be obtained at a low cost.

【0019】例えば、金属アルコキシド系化合物として
は、金属原子にすべてアルコキシ基のみが結合した場
合、すなわちメトキシド、エトキシド、イソプロポキシ
ド等のみならず、その一部がメチル基、エチル基等に置
換したもの、例えばモノメチルアルコキシド、モノエチ
ルアルコキシド等を含むものであり、あるいは一部が塩
素などのハロゲンに置換したものであってもよい。また
金属アセチルアセトネート系化合物としては、金属原子
にすべてアセチルアセトン基のみが結合した場合のみな
らず、その一部がメチルアルコキシ基、エチルアルコキ
シ基等のアルコキシ基に置換したものを含むものであ
る。
For example, as the metal alkoxide compound, when only an alkoxy group is bonded to all metal atoms, that is, not only methoxide, ethoxide, isopropoxide and the like, but also a part thereof is substituted with a methyl group, an ethyl group and the like. For example, it may contain monomethyl alkoxide, monoethyl alkoxide, or the like, or may be partially substituted with halogen such as chlorine. The metal acetylacetonate compounds include not only compounds in which only acetylacetone groups are bonded to all metal atoms, but also compounds in which some of them are substituted with alkoxy groups such as methylalkoxy groups and ethylalkoxy groups.

【0020】さらに前記金属としては、Si、TiまたはZr
等を選択するのが好ましく、化合物の具体的なものとし
ては、例えばテトラメトキシシラン、テトラエトキシシ
ラン、メチルトリエトキシシラン、メチルトリメトキシ
シラン、チタンテトライソプロポキシド、チタンモノク
ロルトリイソプロポキシド、チタンアセチルアセトネー
ト、ジルコニウムノルマルブトキシド、ジルコニウムア
セチルアセトネート等が好適であり、他に例えばジメチ
ルジエトキシシラン、ジメチルジメトキシシラン、チタ
ンテトラノルマルブトキシド、ジルコニウムテトライソ
プロポキシド、ジルコニウムテトラオクチレート等が挙
げられる。
Further, the metal may be Si, Ti or Zr.
It is preferable to select, for example, tetramethoxysilane, tetraethoxysilane, methyltriethoxysilane, methyltrimethoxysilane, titanium tetraisopropoxide, titanium monochlorotriisopropoxide, and titanium. Acetyl acetonate, zirconium normal butoxide, zirconium acetyl acetonate and the like are preferable, and other examples include dimethyldiethoxysilane, dimethyldimethoxysilane, titanium tetranormal butoxide, zirconium tetraisopropoxide, zirconium tetraoctylate and the like.

【0021】さらにまた加水分解については、触媒の種
類(例えば塩酸、硝酸、酢酸、マレイン酸等)、その添
加量すなわちPH値(例えばPH=1〜6、好ましくは2〜
5)および反応温度(例えば20〜80℃、好ましくは25〜
70℃)等によって、加水分解反応過程をコントロールす
ることで行う。なお化合物によってはそれぞれ反応時間
等もことなり、必ずしもすべてに共通しない場合もあり
得る。さらに本アルコール溶液におけるアルコール溶媒
(溶剤)としては、メチルアルコール、エチルアルコー
ル、イソプロピルアルコールあるいはプチルアルコー
ル、またメトキシプロパノールなどの多価アルコール等
が採用できる。
Further, regarding hydrolysis, the type of catalyst (for example, hydrochloric acid, nitric acid, acetic acid, maleic acid, etc.), the amount of addition thereof, that is, the PH value (for example, PH = 1 to 6, preferably 2 to 2).
5) and reaction temperature (for example, 20 to 80 ° C, preferably 25 to 80 ° C)
70 ° C) and the like to control the hydrolysis reaction process. Depending on the compound, the reaction time and the like may be different and may not necessarily be common to all. Further, as the alcohol solvent (solvent) in the present alcohol solution, methyl alcohol, ethyl alcohol, isopropyl alcohol or butyl alcohol, and polyhydric alcohol such as methoxypropanol can be adopted.

【0022】さらに、前記薄膜形成用溶液における酸化
物換算の溶質濃度が0.01mol /l 〜5mol/l であるとし
たのは、0.01mol /l 未満では薄膜が形成し難くなり、
また5mol/l を超えると、例えばノズルフローコート法
ではディッピング法などに比べ成膜時にガラス板状体面
に塗布される溶液の量が多く、膜厚が厚くなり易く、膜
厚ムラが発現し易くかつ乾燥時等にクラックが生じたり
また剥離したりするためである。
Further, the reason that the solute concentration in terms of oxide in the solution for forming a thin film is 0.01 mol / l to 5 mol / l means that a thin film is difficult to form if the solute concentration is less than 0.01 mol / l.
When it exceeds 5 mol / l, for example, in the nozzle flow coating method, the amount of the solution applied to the surface of the glass plate during film formation is larger than in the dipping method, so that the film thickness tends to become thick and uneven film thickness is likely to occur. In addition, cracks may be generated or peeled off when dried.

【0023】また、溶液の粘度が0.1 〜100cP であるこ
ととしたのは、0.1 cP未満では上下の膜厚差がつき難
く、しかも正常な薄膜を形成され難い、また100cP を超
えると上下の膜厚差が大きくつくがコントロールし難く
なり、しかも面内の膜厚分布が非常に悪くなり、さらに
塗膜の乾燥も遅くなり乾燥時に白濁やクラック現象を生
じたり剥離したりし易いからである。より好ましい粘度
としては約1〜10cP程度である。なお増粘剤の使用もあ
る。
The viscosity of the solution is determined to be 0.1 to 100 cP because when it is less than 0.1 cP, the difference between the upper and lower film thickness is unlikely to occur, and a normal thin film is difficult to be formed. This is because the thickness difference becomes large, but it becomes difficult to control, the in-plane film thickness distribution becomes very poor, and the drying of the coating film becomes slow, and white turbidity, a crack phenomenon, and peeling easily occur during drying. A more preferable viscosity is about 1 to 10 cP. There is also the use of thickeners.

【0024】さらに、前記被膜後の傾斜膜厚薄膜付きガ
ラス板状体の膜焼成については、例えばラインでの加熱
曲げ処理加工あるいは/および風冷強化処理工程等の各
工程で適宜行うことが好ましい。
Further, the film firing of the glass plate-like body with a thin film having a gradient film thickness after the coating is preferably carried out appropriately in each step such as in-line heating and bending treatment and / or air-cooling strengthening treatment. .

【0025】また、傾斜膜厚薄膜層の薄膜としては、Si
O2、TiO2、ZrO2、Al2O3 、B2O3のうちの1種以上のもの
から成ることが好ましく、屈折率が比較的低いSiO2(1.
45程度)、あるいは屈折率が比較的高いTiO2(2.25程
度)、ZrO2(1.95程度)と屈折率が比較的低いSiO2(1.
45程度)、Al2O3 (1.65程度)、B2O3(1.60程度)とを
種々組み合わせて混合することで、必要に応じて屈折率
を自由にコントロールして、例えば屈折率が1.7 〜1.8
以下になるような薄膜とし、かつ耐久性に優れるものと
なるようにする。
Further, as the thin film of the gradient thin film layer, Si is used.
It is preferable to be composed of one or more of O 2 , TiO 2 , ZrO 2 , Al 2 O 3 , and B 2 O 3 , and SiO 2 (1.
45), or TiO 2 with a relatively high refractive index (about 2.25), ZrO 2 (about 1.95) and SiO 2 with a relatively low refractive index (1.
45), Al 2 O 3 (about 1.65), and B 2 O 3 (about 1.60) are mixed in various ways to freely control the refractive index as needed. 1.8
The following thin film should be used, and the durability should be excellent.

【0026】さらにまた、ガラス板状体としては、透明
ガラスであれば無色あるいは有色のどちらでもよい、す
なわち例えばブルー、ブロンズ、グレーあるいはグリー
ンガラス等でもよく、特に自動車用窓材ではブルー色系
あるいはゴールド色系、グリーン色系、なかでもグリー
ン色系、ゴールド色系色調で熱線・紫外線吸収性能を得
やすいものであればより好ましいものである。また単板
で使用できることはもとより、熱線反射ガラス、また複
層あるいは合せガラスあるいは強化ガラスまたは強度ア
ップガラス、曲げガラス等としても使用できることは言
うまでもない。さらに、ガラス基板が無機質でも有機質
でもよいことは言うに及ばない。
Further, the glass plate may be either colorless or colored as long as it is transparent glass, that is, for example, blue, bronze, gray or green glass, etc. In particular, it is a blue-colored glass or window material for automobiles. It is more preferable that the color tone is a gold color system, a green color system, and especially a green color system or a gold color system, so that it is easy to obtain the heat ray / ultraviolet absorption performance. It goes without saying that it can be used not only as a single plate, but also as a heat ray reflective glass, a multi-layered or laminated glass, a strengthened glass, a strength-up glass, a bent glass and the like. Furthermore, it goes without saying that the glass substrate may be inorganic or organic.

【0027】[0027]

【作用】前述したとおり、本発明の光学薄膜付きガラス
及びその製法は、透明ガラス板状体の表面に、薄膜の上
下の膜厚差を鉛直方向の距離100cm に対して100nm 以内
と特定して選択した値で鉛直方向に徐々に変化するよう
に、光学薄膜のうちの少なくとも1層を増加もしくは減
少させた傾斜膜厚薄膜層を備えるようにしたことで成る
もの、および特定した条件を前記特定した値の傾斜膜厚
薄膜層を備えるよう制御する製法としたことにより、自
動車用窓ガラスや建築用窓ガラス等大面積のガラス板状
体においても、マスキングを基本的に必要とせずに、片
面に傾斜膜厚に沿って膜厚分布のムラがなく優れる膜厚
の制御性でもって光学特性に傾斜機能を持たせることが
でき、光学的均一かつ均質でバリエーシヨンに富んだ被
膜ができ、クラックや剥離または白濁さらには液ダレ現
象等の欠陥もなく高品位であって、強固な密着力で耐摩
耗性あるいは耐久性が優れた薄膜となり、成膜用溶液の
量も従来法に比して節約でき、簡便で安定かつ確実に厄
介な工程もなく生産性よく、より効率的製造ができ、広
い分野において有用な光学薄膜付きガラスならびにその
製法として提供できる。
As described above, the glass with an optical thin film of the present invention and the method for producing the same specify the difference in the thickness of the thin film on the surface of the transparent glass plate within 100 nm with respect to the vertical distance of 100 cm. The specified condition is defined by the provision of a thin film layer having a gradient thickness in which at least one of the optical thin films is increased or decreased so that the selected value gradually changes in the vertical direction. By controlling the manufacturing method so as to provide a thin film layer with a gradient film thickness of the specified value, even in a large area glass plate such as window glass for automobiles and window glass for construction, basically no masking is required In addition, there is no unevenness in the film thickness distribution along the gradient film thickness, and it is possible to give a gradient function to the optical properties with excellent film thickness controllability, resulting in a film that is optically uniform, homogeneous, and rich in variations, and cracks. Or It is a high quality film with no defects such as separation or turbidity, and liquid sagging phenomenon, and a thin film with excellent adhesion resistance and durability due to strong adhesion, saving the amount of film forming solution compared to the conventional method. It is possible to provide a glass with an optical thin film and a method for producing the same, which is simple, stable, reliable, and has no complicated steps, is highly productive, can be produced more efficiently, and is useful in a wide range of fields.

【0028】また例えば、自動車用フロント窓ガラスの
反射低減膜として車内側に採用すれば、車内側から見た
際のフロントガラスへのダッシュボードの映り込みを入
射角度に応じて効果的に低減でき、ギラツキ感を抑える
ことができ、反射が抑制した分透視性が向上し、誤認や
違和感が発現しないようにし、さらに高耐久性であって
運転者等の乗員ならびに人々の環境に優しい、自動車用
の窓材として優れた光学薄膜付きガラス、さらには他の
新しい光学関連製品となるものである。
Further, for example, if it is adopted on the inside of the vehicle as a reflection reducing film of a windshield for automobiles, the reflection of the dashboard on the windshield when viewed from the inside of the vehicle can be effectively reduced according to the incident angle. For automobiles, it can suppress glare, improve transparency by suppressing reflections, prevent misidentification and discomfort, and have high durability, which is friendly to the occupants such as drivers and people and the environment. It will be an excellent glass with an optical thin film as a window material, and other new optical products.

【0029】[0029]

【実施例】以下、実施例により本発明を具体的に説明す
る。ただし本発明は係る実施例に限定されるものではな
い。
The present invention will be described below in detail with reference to examples. However, the present invention is not limited to the embodiment.

【0030】実施例1 SiのアルコキシドとTiのアルコキシドとを酸化物換算の
モル比が95:5となるように混合し、微量の水および酸
触媒を加えて加水分解させ、さらにこれをイソプロピル
アルコールで酸化物換算の溶質濃度が約0.04wt%となる
ように希釈し約1時間攪拌した。この溶液の粘度は約2.
4cP であった。この溶液を洗瓶に入れ塗布溶液とした。
Example 1 Si alkoxide and Ti alkoxide were mixed so that the molar ratio in terms of oxide was 95: 5, a small amount of water and an acid catalyst were added and hydrolyzed, and this was further mixed with isopropyl alcohol. Then, the solute concentration in terms of oxide was diluted to about 0.04 wt% and the mixture was stirred for about 1 hour. The viscosity of this solution is about 2.
It was 4 cP. This solution was put into a washing bottle to give a coating solution.

【0031】次に、温度約25℃、湿度約55%に保ったク
リンルーム内において、縦が約1m、横が1.5 m、厚み
が約2mmのガラス板状体を水平からの角度(傾斜角)が
10°になるよう支持具に立て掛け、洗瓶中の塗布溶液を
ガラス板状体の上端部に沿って一定圧力で流下させてガ
ラス板状体のほぼ片面全面に塗膜を形成した。溶液が全
てガラス板状体上を流下した後も、この塗膜が充分乾燥
するように約10分間そのままの状態で保持した。
Next, in a clean room kept at a temperature of about 25 ° C. and a humidity of about 55%, a glass plate having a length of about 1 m, a width of 1.5 m, and a thickness of about 2 mm was set at an angle (tilt angle) from the horizontal. )But
The coating solution in the washing bottle was flown down along the upper end of the glass plate at a constant pressure so as to be 10 °, and a coating film was formed on almost the entire one surface of the glass plate. Even after the entire solution flowed down on the glass plate, the coating film was kept as it was for about 10 minutes so that it was sufficiently dried.

【0032】得られた塗膜付きガラス板状体を一旦約 2
50℃の乾燥機中に入れ約30分間キュアーリングを行った
後、さらに雰囲気温度を約650 ℃に保った焼成炉に入れ
約90秒間焼成した。
The glass plate body with a coating film thus obtained was once about 2
After being placed in a dryer at 50 ° C. for curing for about 30 minutes, it was further placed in a baking furnace whose ambient temperature was kept at about 650 ° C. and baked for about 90 seconds.

【0033】得られたSiO2・TiO2膜付きガラス板状体を
充分冷却して薄膜の膜厚を測定したところ、ガラス板状
体上端部から150mm の位置で37〜38nm、450mm の位置で
46〜48nm、750mm の位置で57〜58nmと徐々に膜厚が増加
しており、増加率は上下差60cmに対して約20nmであっ
て、所期のめさす傾斜膜厚薄膜層を有するガラス板状体
を得ることができた。
The obtained SiO 2 TiO 2 film-coated glass plate was sufficiently cooled and the thickness of the thin film was measured. At a position 150 mm from the upper end of the glass plate, 37 to 38 nm and 450 mm were measured.
The film thickness gradually increases from 46 to 48 nm and 57 to 58 nm at the position of 750 mm, and the rate of increase is about 20 nm with respect to the vertical difference of 60 cm. A plate-shaped body could be obtained.

【0034】実施例2 実施例1で調製したSiのアルコキシドとTiのアルコキシ
ドとの混合、加水分解した溶液を、さらにこれをイソプ
ロピルアルコールで酸化物換算の溶質濃度が約0.03wt%
となるように希釈し約1時間攪拌した後洗瓶に入れ塗布
溶液とした。この溶液の粘度は約2.1cP であった。
Example 2 A solution obtained by mixing and hydrolyzing an Si alkoxide and a Ti alkoxide prepared in Example 1 was further added, and the solute concentration in terms of oxide was about 0.03 wt% with isopropyl alcohol.
The resulting solution was diluted with water and stirred for about 1 hour, and then placed in a washing bottle to give a coating solution. The viscosity of this solution was about 2.1 cP.

【0035】次に、温度約25℃、湿度約55%に保ったク
リンルーム内において、実施例1と同じ、縦が約1m、
横が1.5 m、厚みが約2mmのガラス板状体を水平からの
角度(傾斜角)が80°になるよう支持具に傾斜して寝か
せた状態とし、洗瓶中の塗布溶液をガラスの上端部に沿
って一定圧力で流下させてガラス板状体のほぼ片面全面
に塗膜を形成した。溶液が全てガラス基板上を流下した
後も、この塗膜が充分乾燥するように約15分間そのまま
の状態で保持した。
Next, in a clean room kept at a temperature of about 25 ° C. and a humidity of about 55%, the same as in Example 1, the vertical length is about 1 m,
A glass plate with a width of 1.5 m and a thickness of about 2 mm is laid on a support so that the angle (tilt angle) from the horizontal is 80 °, and the coating solution in the washing bottle is placed on the top of the glass. It was made to flow down along a part with a constant pressure, and the coating film was formed on substantially the entire one surface of the glass plate. Even after all the solution had flowed down on the glass substrate, it was kept as it was for about 15 minutes so that this coating film was sufficiently dried.

【0036】得られた塗膜付きガラス板状体を実施例1
と同じ熱履歴処理を行った。得られたSiO2・TiO2膜付き
ガラス板状体を充分冷却して薄膜の膜厚を測定したとこ
ろ、ガラス板状体上端部から150mm の位置で約35nm、45
0mm の位置で56〜58nm、750mm の位置で84〜86nmと徐々
に膜厚が増加しており、増加率は上下差60cmに対して約
40nmであって、所期のめさす傾斜膜厚薄膜層を有するガ
ラス板状体を得ることができた。
The obtained coated glass plate was used in Example 1.
The same heat history process was performed. The obtained glass plate with SiO 2 / TiO 2 film was sufficiently cooled and the thickness of the thin film was measured. As a result, about 35 nm and 45 nm were measured at a position 150 mm from the upper end of the glass plate.
The film thickness gradually increases from 56 to 58 nm at the 0 mm position and from 84 to 86 nm at the 750 mm position.
A glass plate having a thickness of 40 nm and having a desired thin film layer having a gradient film thickness could be obtained.

【0037】実施例3 Siのアルコキシドを出発原料として調製された市販のシ
リカゾル溶液〔例えば日本コルコート社製の「コルコー
トP」、あるいは日本曹達社製の「アトロンNSi」な
ど〕をエチルアルコールと酢酸エチルおよびノルマルブ
チルアルコールの混合溶液で0.1mol/l となるように希
釈し約30分間攪拌した。この溶液の粘度は約3.0cP であ
った。この溶液を洗瓶に入れ塗布溶液とした。
Example 3 A commercially available silica sol solution prepared using an alkoxide of Si as a starting material [eg, "Colcoat P" manufactured by Nippon Corcoat Co., Ltd., or "Atron NSi" manufactured by Nippon Soda Co., Ltd.] was mixed with ethyl alcohol and ethyl acetate. The mixture was diluted with a mixed solution of normal butyl alcohol and 0.1 mol / l and stirred for about 30 minutes. The viscosity of this solution was about 3.0 cP. This solution was put into a washing bottle to give a coating solution.

【0038】次に、温度約27℃、湿度約50%に保ったク
リンルーム内において、縦が約50cm、横が50cm、厚みが
約1.1mm のガラス板状体を水平からの角度(傾斜角)が
80°になるよう支持具に立て掛け、洗瓶中の塗布溶液を
ガラス板状体の上端部に沿って一定圧力で流下させてガ
ラス板状体のほぼ片面全面に塗膜を形成した。溶液が全
てガラス板状体上を流下した後、このガラス基板を傾斜
角が45°になるよう傾きを変え、この塗膜を充分乾燥す
るよう約8分間そのままの状態で保持した。
Next, in a clean room kept at a temperature of about 27 ° C. and a humidity of about 50%, a glass plate having a length of about 50 cm, a width of 50 cm, and a thickness of about 1.1 mm was set at an angle (tilt angle) from the horizontal. )But
The coating solution in the washing bottle was caused to flow down along the upper end of the glass plate at a constant pressure so as to be 80 °, and a coating film was formed on almost the entire one surface of the glass plate. After all the solution flowed down on the glass plate, the glass substrate was tilted so that the tilt angle was 45 °, and the coating film was held for about 8 minutes so that it was sufficiently dried.

【0039】得られた塗膜付きガラス板状体を一旦約 2
50℃の乾燥機中に入れ約30分間キュアーリングを行った
後、さらに雰囲気温度を約550 ℃に保った焼成炉に入れ
約15分間焼成した。
The glass plate with a coating film thus obtained was once about 2
After being placed in a dryer at 50 ° C. for curing for about 30 minutes, it was further placed in a baking furnace whose ambient temperature was kept at about 550 ° C. and baked for about 15 minutes.

【0040】得られたSiO2・TiO2膜付きガラス板状体を
充分冷却して薄膜の膜厚を測定したところ、ガラス板状
体上部から下部に向かって膜厚が徐々に増加しており、
ガラス板状体上端部から75mmの位置で約30nm、375mm の
位置で約55nm、増加率は上下差30cmに対して約25nmであ
った。所期のめさす傾斜膜厚薄膜層を有するガラス板状
体を得ることができた。
The obtained glass plate with a SiO 2 TiO 2 film was sufficiently cooled and the film thickness was measured. The film thickness gradually increased from the upper part to the lower part of the glass plate. ,
About 30 nm at a position 75 mm from the upper end of the glass plate and about 55 nm at a position 375 mm from the upper end of the glass plate, and the rate of increase was about 25 nm for a vertical difference of 30 cm. It was possible to obtain a glass plate having a desired thin film layer having a gradient film thickness.

【0041】[0041]

【発明の効果】以上詳述したように、本発明は特定した
傾斜膜厚薄膜層を少なくとも1層備えた光学薄膜付きガ
ラスならびに溶液の溶質濃度、粘度、ガラス板状体の傾
斜角度の条件を特定した傾斜膜厚薄膜層になるよう制御
する製法としたことにより、大面積で高グレードのガラ
ス板状体においても、優れた光学的特性に傾斜機能を持
たせることができ、高品位で耐久性を有する薄膜を、マ
スキングを不要として片面に、簡便で安定かつ確実に厄
介な工程もなくスピーディにより効率よく製造すること
ができることとなり、自動車用窓ガラス等に採用した
際、ドライバーに対しより広域で透視性の向上、目の疲
労等を防いで安全性を向上し、人的物的の両面に対して
もまたその環境に対しても優しいものとなる等、幅広い
分野において有用な光学薄膜付きガラス及びその製法を
提供できるものである。
As described above in detail, the present invention provides a glass with an optical thin film having at least one specified thin film layer with a gradient film thickness, a solute concentration of a solution, a viscosity, and a condition of a tilt angle of a glass plate. By adopting a manufacturing method that controls to a specified thin film layer with a graded film thickness, it is possible to provide a graded function with excellent optical characteristics even in a large-area, high-grade glass plate, and it has high quality and durability. It is possible to produce a thin film with good properties on one side without masking, simply, stably, reliably and speedily and efficiently, and when applied to automobile window glass, etc. It is useful in a wide range of fields, such as improved transparency, preventing eye fatigue, etc., and improving safety, and being friendly to both human and physical aspects and the environment. Those capable of providing a university with a thin film glass and its manufacturing method.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 透明ガラス板状体の表面に形成した光学
薄膜において、該薄膜の上下の膜厚差を鉛直方向の距離
100cm に対して100nm 以内で選択した値で鉛直方向に徐
々に変化するように、光学薄膜のうちの少なくとも1層
を増加もしくは減少させた傾斜膜厚薄膜層を備えたこと
で成ることを特徴とする光学薄膜付きガラス。
1. In an optical thin film formed on the surface of a transparent glass plate, the difference in film thickness between the upper and lower parts of the thin film is measured by a vertical distance.
It is characterized by comprising at least one of the optical thin films having a gradient thin film layer which is increased or decreased so as to gradually change in the vertical direction at a selected value within 100 nm with respect to 100 cm. Glass with optical thin film.
【請求項2】 垂直もしくは所定の傾斜角を持たせて立
て掛けたガラス板状体の上端部から薄膜形成用溶液を表
面流下させ光学薄膜を形成するフローコート法におい
て、前記溶液の溶質濃度および粘度ならびにガラス板状
体の立て掛けの傾斜角度のうち少なくとも1以上選択し
て制御し、ガラス板状体に形成する光学薄膜の上下方向
の膜厚差を鉛直方向の距離100cm に対して100nm 以内で
選択した値とするようにすることを特徴とする光学薄膜
付きガラスの製法。
2. A solute concentration and viscosity of the solution in a flow coating method in which an optical thin film is formed by surface-flowing a thin film-forming solution from the upper end of a glass plate which is vertical or leans against a predetermined inclination angle. In addition, at least one of the inclination angles of the leaning of the glass plate is selected and controlled, and the vertical film thickness difference of the optical thin film formed on the glass plate is selected within 100 nm for a vertical distance of 100 cm. A method for producing glass with an optical thin film, which is characterized in that
【請求項3】 前記表面流下させ、溶液が表面全体に塗
り広がった後、さらにガラス板状体を水平方向に対して
所定角度に傾斜させて行う乾燥工程を伴うことを特徴と
する請求項2記載の光学薄膜付きガラスの製法。
3. A drying step, which is carried out after the solution is spread on the entire surface by allowing the solution to flow down on the surface and further tilting the glass plate at a predetermined angle with respect to the horizontal direction. A method for producing glass having an optical thin film as described above.
【請求項4】 前記薄膜形成用溶液が、少なくとも1種
以上の有機金属化合物もしくはその加水分解と溶媒を含
むゾルゲルコーティング溶液であって、該溶液における
酸化物換算の溶質濃度が0.01mol /l 〜5mol/l であ
り、かつ溶液の粘度が0.1 〜100cP であることを特徴と
する請求項2乃至3記載の光学薄膜付きガラスの製法。
4. The thin film-forming solution is a sol-gel coating solution containing at least one organic metal compound or its hydrolysis and a solvent, and the solute concentration in terms of oxide in the solution is 0.01 mol / l to 4. The method for producing a glass with an optical thin film according to claim 2, wherein the viscosity of the solution is 5 mol / l and the viscosity of the solution is 0.1 to 100 cP.
JP6323124A 1994-12-26 1994-12-26 Glass with optical thin film and its production Pending JPH08179101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6323124A JPH08179101A (en) 1994-12-26 1994-12-26 Glass with optical thin film and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6323124A JPH08179101A (en) 1994-12-26 1994-12-26 Glass with optical thin film and its production

Publications (1)

Publication Number Publication Date
JPH08179101A true JPH08179101A (en) 1996-07-12

Family

ID=18151358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6323124A Pending JPH08179101A (en) 1994-12-26 1994-12-26 Glass with optical thin film and its production

Country Status (1)

Country Link
JP (1) JPH08179101A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007137748A (en) * 2005-11-22 2007-06-07 Asahi Glass Co Ltd Glass sheet with coating film and method of manufacturing the same
JP2007176443A (en) * 2005-12-28 2007-07-12 Nippon Sheet Glass Co Ltd Vehicular window glass and manufacturing method thereof
EP1975133A1 (en) * 2006-01-17 2008-10-01 Nippon Sheet Glass Company Limited Window glass for vehicle and process for producing the same
JP2015107453A (en) * 2013-12-04 2015-06-11 旭化成株式会社 Production method of functional film
WO2017002592A1 (en) * 2015-06-30 2017-01-05 セントラル硝子株式会社 Method for producing substrate provided with coating film, and substrate provided with coating film
US11059743B2 (en) 2015-06-30 2021-07-13 Central Glass Company, Limited Substrate provided with coating film

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007137748A (en) * 2005-11-22 2007-06-07 Asahi Glass Co Ltd Glass sheet with coating film and method of manufacturing the same
JP2007176443A (en) * 2005-12-28 2007-07-12 Nippon Sheet Glass Co Ltd Vehicular window glass and manufacturing method thereof
WO2007077905A1 (en) * 2005-12-28 2007-07-12 Nippon Sheet Glass Company, Limited Window glass for vehicle and method for manufacturing the same
US8367187B2 (en) 2005-12-28 2013-02-05 Nippon Sheet Glass Company, Limited Vehicle window pane and manufacturing method therefor
EP1975133A1 (en) * 2006-01-17 2008-10-01 Nippon Sheet Glass Company Limited Window glass for vehicle and process for producing the same
EP1975133A4 (en) * 2006-01-17 2009-12-30 Nippon Sheet Glass Co Ltd Window glass for vehicle and process for producing the same
US8445096B2 (en) 2006-01-17 2013-05-21 Nippon Sheet Glass Company, Limited Vehicle window glass and manufacturing method therefor
JP2015107453A (en) * 2013-12-04 2015-06-11 旭化成株式会社 Production method of functional film
WO2017002592A1 (en) * 2015-06-30 2017-01-05 セントラル硝子株式会社 Method for producing substrate provided with coating film, and substrate provided with coating film
US11059743B2 (en) 2015-06-30 2021-07-13 Central Glass Company, Limited Substrate provided with coating film

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