JPH08174825A - Ink-jet type recording head - Google Patents

Abstract

PURPOSE: To prevent a flow path unit from being attached on a positioning jig by an adhesive during bonding work. CONSTITUTION: An ink-jet type recording head is provided with a flow path unit consisting of a nozzle plate 1, a spacer 3 and a second plate 7 that are bonded together by an adhesive S. The nozzle plate 1, the spacer 3 and the second plate 7 have positioning holes 9, 23 and 19 respectively and adhesive absorbing recessed parts 28 and 29 are provided along the circumference of the spacer 3 and the edge of the positioning holes 23 of the spacer 3 to absorb the adhesive S that flows out when the nozzle plates 1 and the second plate 7 are bonded on the spacer 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head for ejecting ink droplets from nozzle openings by pressurizing ink in a pressure generating chamber by pressure generating means, and more specifically, applying adhesive on both sides of spacers The present invention relates to an ink jet recording head having a flow path unit.

[0002]

2. Description of the Related Art As is well known, an ink jet recording head has a nozzle plate having a plurality of nozzle openings, a pressure generating chamber, an ink supply port, a spacer for partitioning a common ink chamber, and a second plate. Are laminated and fixed, and pressure is generated in the pressure generating chamber by the piezoelectric vibrator and the heating element,
The pressure causes the ink droplets to be ejected from the nozzle openings.

In order to improve the recording density of the recording head, the pitch of the nozzle opening rows tends to be small. Therefore, a silicon single crystal wafer is anisotropically etched, and another method is used. The nozzle plate and the second plate are fixed with an adhesive to form a flow path unit, and a piezoelectric vibrator and a heating element are provided on the flow path unit to form an ink jet recording head.

Since the nozzle plate, the spacer, and the second plate are bonded to each other with the adhesive as described above, the adhesive overflows and adheres to the positioning jig, so that the flow path unit is fixed to the jig. There is.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to prevent the passage unit from being fixed to the jig during the bonding work. It is an object of the present invention to provide an ink jet type recording head which can be used.

[0006]

In order to solve such a problem, in the present invention, a nozzle plate having a nozzle opening, a pressure generating chamber, an ink supply port, and a common ink chamber are formed. In an ink jet recording head including a flow path unit formed by joining a spacer and a second plate with an adhesive, and a pressure generating unit for ejecting ink droplets into the pressure generating chamber, a positioning hole is formed in the spacer. While being formed, a step portion for absorbing the adhesive is formed around and around the positioning hole of the spacer.

[0007]

When the nozzle plate and the second plate are bonded together, the overflowing adhesive flows into the stepped portion and is absorbed in the space here, so that it is prevented from flowing out to the positioning hole and the outer periphery.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the illustrated embodiments. 1 and 2 each show an embodiment of an ink jet recording head of the present invention. In the drawings, reference numeral 1 is a nozzle plate having nozzle openings 2, 2, 2, ... Are pressure generation chambers 4, 4, 4,
Spacers for partitioning the ink supply ports 5, 5, 5, ... And the reservoir 6 are second plates, and the nozzle plate 1 and the second plate 7 are bonded so as to seal both surfaces of the spacer member 3. The flow path unit is configured by being bonded with an agent.

Reference numeral 10 in the figure denotes a vibrator unit constituted by fixing a plurality of piezoelectric vibrators 11 having a longitudinal vibration mode to a fixing plate 12, and a vibrator unit accommodating hole formed in a base 13. 14 and the tip is the second plate 7
Is fixed to the base 13 via the fixing plate 12 while being in contact with the region facing the pressure generating chamber 4.

The base 13 is provided with an ink supply pipe 15 connected to an ink tank (not shown), and the tip of the ink supply pipe 15 communicates with a common ink chamber 6 formed by a spacer 3. Reference numeral 16 in the figure is a frame body for fixing the flow path unit constituted by the nozzle plate 1, the spacer 3, and the second plate 7 and the base 13, and the reference numeral 1
Reference numerals 7 denote substrates for fixing the head to the carriage.

Next, the spacer 3 described above will be described in more detail. FIG. 3 shows a large-sized silicon single crystal wafer 20 whose surface has been satinized in advance by etching.
Shows a pattern formed by exposing a plurality of spacer patterns to anisotropic etching and forming a perforation 21 at the boundary between the adjacent spacers 3, 3, 3, ....
A large number of through-holes are formed at the same time so as to match the outer shape of the spacer.

When the etching is completed, the perforation 2
1 by folding the spacer 3 to the wafer 20.
It is possible to easily and surely separate from.

FIG. 4 is an enlarged view of the spacer separated from the wafer 20, and the reference numeral 23 in the drawing indicates
Positioning holes formed on one side in accordance with the positioning holes 9 and 19 also provided in the nozzle plate 1 and the second plate 7 to the positioning pin P planted in the jig B in the assembly process. It is inserted and used for alignment to bond these three parts together.

The nozzle plate 1 and the second plate 7
Since the outer shape of and is selected to be smaller than the outer shape of the spacer 3, the nozzle plate 1 and the second plate 7 are bonded in the state of the wafer 20 shown in FIG. 3, and then they are separated in accordance with the perforations 21. It becomes possible and productivity is improved.

A window 24 that forms a common ink chamber 6 on three sides
Thus, the frame portion 25 and the tongue-shaped region 26 are separated from each other, and the pressure generating chamber 4 and the ink supply port 5 described above are formed in the central region 26. In addition, the tip of the region 26 (downward in the figure) and the frame portion 25 are connected to each other, and the partition 27 having a substantially “+” shape with which the tip of the ink supply tube 15 contacts.
a and 27b are formed, and the frame portion 25 and the tip of the region 26 are continuous via the partition 27a.

Since the partitions 27a and 27b are present in this manner, the tongue-shaped region 26 and the frame portion 25 are prevented from being cantilevered with each other, and not only the strength can be secured, but also
It is possible to stably support the ink supply pipe 15 at four points. As a result, the base 13 and the thin second plate 7 are securely bonded and bonded, and it is possible to prevent ink from leaking from the bonded portion and invasion of the atmosphere.

On the other hand, the peripheral edge of the positioning hole 23 and the peripheral edge of the frame portion 25 (area indicated by hatching in the figure) are shown in FIG.
As shown in (a) and (b), the step portions 28 and 29 are formed by half etching or the like so as to form a step enough to accommodate the adhesive.

An amino silane coupling agent is applied to the surface and the ink flow path of the spacer 3 thus constructed. As a result, the wetting characteristics of the ink and the spacer in the ink flow path are improved, the bubbles can be quickly eliminated, and the familiarity with the adhesive on the surface is improved, and the nozzle plate 1 and the second plate 7 are Strong adhesion is possible. In addition, reference numerals 30 and 31 in the figure denote stepped portions 2
The reference numeral 8 designates a pyramidal recess for absorbing the adhesive formed on the inside of 8, 29, and the reference numeral 32 designates a pyramidal recess for absorbing the adhesive formed at the base of the tongue portion 26.

FIG. 6 shows an embodiment of the pressure generating chamber 4 and the ink supply port 5 formed on the tongue portion 26 described above, and a partition wall 40 partitioning the pressure generating chambers 4 and 4, 40
Is formed with one slit 41, 41 extending from the ink supply port 2 side to the end on the nozzle opening 2 side, and a plurality of slits 43, 41 are formed in the wall 42 defining the ink supply port 5. 43, 43 are formed.

In this embodiment, as shown in FIG. 7, the positioning hole 9 of the nozzle plate 1 is inserted into the pin P of the jig B and set in the jig B.

On the other hand, a flexible film coated with a layered adhesive is pressed against both surfaces of the spacer 3 to apply the adhesive S in advance, and then the positioning hole 23 of the spacer 3 is inserted into the pin P of the jig B. And the nozzle plate 1 is overlaid.

By the way, when the adhesive S is applied, the positioning hole 23 of the spacer 3 and the step portions 28, 2 on the periphery thereof are provided.
Since the adhesive sheet 9 is provided, the adhesive agent of the transfer sheet comes into contact with the space, and the adhesive agent S is applied to the positioning hole 23 and the peripheral edge.
Are prevented from adhering.

When a required pressure is applied in this state, the adhesive S overflowing from the wall 40 partitioning the pressure generating chamber 4 will flow into the slit 41 formed here and the ink supply port 5 as well.
The adhesive S that overflows from the wall 42 that partitions the partition is contained in the grooves 43 and 43 formed therein, and is prevented from flowing into the pressure generating chamber 4 and the ink supply port 5.

On the other hand, in the vicinity of the positioning hole 23 and the frame portion 25
The adhesive S that overflows at the peripheral edge of is accommodated in the recesses 30 and 31 formed in the vicinity thereof.

The adhesive S that cannot be completely absorbed by the recesses 30 and 31 flows out to the outside of the positioning hole 23 and the frame portion 25, but the step portion 28 formed on the periphery of the positioning hole 23 and the frame portion 25. , 29, nozzle plate 1
The positioning hole 23 is housed in the space formed between
And leakage to the outside of the spacer is prevented.

When the bonding between the spacer 3 and the nozzle plate 1 is completed, the second plate 7 is fixed to the positioning hole 1 thereof.
9 is inserted into the pin P and overlapped with the spacer 3.

Also in this case, the adhesive S overflowing from the wall 40 defining the pressure generating chamber 4 defines the slit 41 formed here and the ink supply port 5 as in the step of adhering the nozzle plate 1. The adhesive S that overflows from the wall 42 is stored in the grooves 43 and 43 formed here, and is prevented from flowing into the pressure generating chamber 4 and the ink supply port 5.

On the other hand, the vicinity of the positioning hole 23 and the frame portion 25
The adhesive S that overflows at the peripheral edge of is accommodated in the recesses 30 and 31 formed in the vicinity thereof.

The adhesive S that cannot be completely absorbed by the recesses 30 and 31 flows out to the outside of the positioning hole 23 and the frame portion 25, but the step formed on the periphery of the positioning hole 23 and the frame portion 25. It is prevented that the fluid flows into the portions 28 and 29, is accommodated in the space formed between the second plate 7 and the portion, and leaks out of the positioning hole 23 and the spacer 3.

As a result, the adhesive S does not adhere to the positioning pins P of the jig B and the inconvenience that the flow path unit is fixed to the jig B is eliminated, and the work efficiency can be improved. it can.

In the above embodiment, the recording head using the longitudinal vibration mode piezoelectric vibrator is taken as an example, but it is also possible to use a flexural vibration piezoelectric vibrator or a heating element. It is obvious that the same effect can be obtained even when applied.

In the above embodiment, the nozzle plate, the spacer, and the second plate are formed as separate members, but the nozzle plate or the second plate is integrally formed on one surface of the spacer. It is obvious that the same effect can be obtained when the other member, that is, the second plate or the nozzle plate is applied to the spacer by the adhesive. Of course, in this case, it is clear that the stepped portions 28 and 29 and the recessed portions 30 and 31 may be formed only on the side where the adhesive is applied.

[0033]

As described above, in the present invention, the nozzle plate having the nozzle openings, the spacer for forming the pressure generating chamber, the ink supply port, and the common ink chamber, and the second plate are provided. In the ink jet recording head including a flow path unit formed by bonding the above with an adhesive and a pressure generating means for ejecting ink droplets into the pressure generating chamber, positioning holes are formed in the nozzle plate, the spacer, and the second plate. In addition, since the step portion for absorbing the adhesive is formed around and around the positioning hole of the spacer, it is possible to prevent the adhesive from being applied around the positioning hole and the periphery of the spacer.
When the nozzle plate and the second plate are attached, even if the adhesive flows out, it can be absorbed by the step,
It is possible to prevent the liquid from flowing out to the positioning hole or the outer periphery, and prevent it from being fixed to the positioning jig.

[Brief description of drawings]

FIG. 1 is an assembled perspective view showing an embodiment of an ink jet recording head of the present invention.

FIG. 2 is a sectional view showing an embodiment of the present invention.

FIG. 3 is a diagram showing a state in which a plurality of spacers are formed on a single crystal silicon wafer by etching.

FIG. 4 is a view showing an example of a spacer separated from a wafer.

5A and 5B are cross-sectional views showing, in an enlarged manner, a positioning hole and a stepped portion formed on the peripheral edge, respectively.

FIG. 6 is an enlarged view showing the vicinity of a pressure generating chamber and an ink supply port.

FIG. 7 is a diagram showing a state of the vicinity of a positioning hole and a peripheral portion at the time of assembling the flow path unit.

[Explanation of symbols]

 1 Nozzle Plate 3 Spacer 7 Second Plate 9, 19, 23 Positioning Holes 28, 29 Steps 30, 31 Recess B B Positioning Jig P Positioning Pin S Adhesive

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kazumi Kamoi 3-3-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation

Claims (7)

[Claims] 1. A flow formed by bonding a nozzle plate having a nozzle opening, a spacer forming a pressure generating chamber, an ink supply port, and a common ink chamber, and a second plate with an adhesive. In an ink jet recording head including a channel unit and a pressure generating unit that ejects ink droplets into the pressure generating chamber, a positioning hole is formed in the spacer,
An ink jet recording head in which a step portion for absorbing an adhesive is formed around and around the positioning hole of the spacer. 2. The ink jet recording head according to claim 1, wherein the spacer is formed by anisotropically etching single crystal silicon. 3. The ink jet recording head according to claim 2, wherein a concave portion is formed around the step portion. 4. The ink jet recording head according to claim 2, wherein the surface of the spacer is satin finished and a silane coupling agent is applied to the surface. 5. The ink jet recording head according to claim 1, wherein a slit is formed in a partition wall that partitions the pressure generating chamber and the ink supply port. 6. The ink jet recording head according to claim 2, wherein perforations for cutting from the wafer are formed on the outer periphery of the spacer. 7. The ink jet recording head according to claim 2, wherein the outer shape of the spacer is set to be larger than at least one of the nozzle plate and the second plate.