JPH08169730A - Glass plate enhanced in comfortability - Google Patents

Glass plate enhanced in comfortability

Info

Publication number
JPH08169730A
JPH08169730A JP31368894A JP31368894A JPH08169730A JP H08169730 A JPH08169730 A JP H08169730A JP 31368894 A JP31368894 A JP 31368894A JP 31368894 A JP31368894 A JP 31368894A JP H08169730 A JPH08169730 A JP H08169730A
Authority
JP
Japan
Prior art keywords
glass
film
visible light
thin film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31368894A
Other languages
Japanese (ja)
Other versions
JP3352256B2 (en
Inventor
Masaaki Yonekura
正明 米倉
Masaya Takayama
昌也 高山
Shinichi Araya
眞一 荒谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP31368894A priority Critical patent/JP3352256B2/en
Publication of JPH08169730A publication Critical patent/JPH08169730A/en
Application granted granted Critical
Publication of JP3352256B2 publication Critical patent/JP3352256B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)

Abstract

PURPOSE: To obtain a glass plate having well-balanced transparency, mirror property and insulating property with a simple film structure, etc., good for the human body comfortability and environment, exhibiting a light-bluish glass face-reflected color tone and capable of transmitting an electric wave. CONSTITUTION: A thin-film layer is formed on the surface of this glass plate. A TiNx thin film having 7.5-11.0nm thickness as a first layer and an SnOx thin film having 40-55nm thickness as a second layer are simultaneously laminated on the glass surface, the visible light transmittance is controlled to 57-63%, the visible light reflectance between the glass surface and film surface to <=25% and the visible light reflectance difference to <=6.0%, and further the thermal shielding coefficient is controlled to <=0.77. A glass plate enhanced in comfortability is obtained in this way.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、簡単な2層の積層膜を
被膜し、ガラス板の透明性とミラー効果ならびに断熱性
をバランスよく持たせ、同時に満足しうるものとするこ
とで、人や環境に優しくかつガラスらしさと存在観を発
現せしめ、淡いブルー系のガラス面反射色調を呈しかつ
電波透過性を有する居住性を高めたガラス板に関し、建
築用窓材としてはもちろん、ビルディング等各種の用途
においてその機能を活かすことができる居住性や環境性
に優れたガラス板を提供するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention coats a simple two-layer laminated film to give a well-balanced transparency, mirror effect and heat insulating property of a glass plate, and at the same time, satisfy the requirements. A glass plate that is eco-friendly and has a glass-like appearance and presence, and has a light blue glass surface reflection color tone and radio wave transmission that enhances habitability. The present invention provides a glass plate excellent in habitability and environment, which can make full use of its function in the use of.

【0002】[0002]

【従来技術】一般に反射率を高くした高性能熱線反射ガ
ラスは数多く提案されかつ商品化されており、そのなか
で高透過率を有する赤外線反射ガラスがあり、またさら
に無反射ガラス等が知られている。
2. Description of the Related Art In general, many high performance heat ray reflective glasses having a high reflectance have been proposed and commercialized. Among them, there are infrared ray reflective glasses having a high transmittance, and further, non-reflective glass and the like are known. There is.

【0003】例えば、特開昭63ー134232号公報には、高
透過率を有する赤外反射物品が記載されており、透明基
板上に基板側から順次透明酸化物の第1層、銀の第2
層、透明酸化物の第3層、銀の第4層、透明酸化物の第
5層から成る5層コーティングが設けられた赤外反射物
品において、該銀層の厚みが11nm以下であり、可視光線
透過率が70%以上であるものが開示され、実施例として
例えばガラス基板/TiO2(膜厚35nm)/Ag(膜厚10nm)
/TiO2(膜厚70nm)/Ag(膜厚10nm)/TiO2(膜厚35n
m)で、可視光線透過率が78.7%、可視光線反射率が8.5
%、太陽エネルギー透過率が53.2%、太陽エネルギー
反射率が28.2%、10μにおける反射率が95%で反射色が
グリーン色である等、赤外域で高い反射率と可視域で高
い透過率を有し、反射色をかなり自由に変化させること
ができるというものが記載されている。
For example, Japanese Laid-Open Patent Publication No. 63-134232 describes an infrared reflecting article having a high transmittance, in which a transparent oxide first layer and a silver first layer are successively formed on a transparent substrate from the substrate side. Two
Layer, a third layer of transparent oxide, a fourth layer of silver, and a fifth layer of transparent oxide, the infrared reflective article provided with a five-layer coating, wherein the thickness of the silver layer is 11 nm or less, It is disclosed that the light transmittance is 70% or more, and as an example, for example, glass substrate / TiO 2 (film thickness 35 nm) / Ag (film thickness 10 nm)
/ TiO 2 (film thickness 70 nm) / Ag (film thickness 10 nm) / TiO 2 (film thickness 35 n
m), visible light transmittance is 78.7%, visible light reflectance is 8.5
%, The solar energy transmittance is 53.2%, the solar energy reflectance is 28.2%, the reflectance at 10μ is 95%, and the reflected color is green.It has high reflectance in the infrared region and high transmittance in the visible region. However, it is described that the reflection color can be changed quite freely.

【0004】また例えば、特開昭63ー218513号公報に
は、TiO X 薄膜及びそれを用いた光学素子が記載されて
おり、分子式:TiO X (ただし1<x<2)で表わされ
る薄膜状酸化チタン系物質、ならびに基板上に該薄膜を
形成した光学素子が開示され、蒸発源としてTiO を用
い、一旦真空チャンバー内を高真空にした後、酸素ガス
を導入して酸素分圧を5×10-3〜8×10-4Torrに設定し
て真空蒸着を行うことによって基板上に形成し、紫色を
呈しないしかも帯電しないようにするとともに、ことに
合成樹脂基板ではスキン層とともに薄膜が基板から剥離
するようなこともない、膜厚が0.001 〜20μm程度で屈
折率ndが2.2 〜2.4 であるものであって、実施例とし
て、PMMA基板/TiO X (1<x<2)〔膜厚488nm 、nd
=2.32 〕の無色透明で帯電なしかつ密着性良好なもの、
PMMA基板/TiO X (1<x<2)〔膜厚488nm 、nd=2.3
2 〕/SiO X 〔膜厚488nm 、nd=1.46 〕あるいはPMMA基
板/SiO X (1<x<2)〔膜厚550nm 、nd=1.65 〕/T
iO X (1<x<2)〔膜厚550nm 、nd=2.32 〕/SiO
X 〔膜厚550nm 、nd=1.46 〕の反射防止膜、さらにPMMA
基板/SiO X (1<x<2)〔膜厚632.8nm nd=1.46 〕
/TiO X (1<x<2)〔膜厚632.8nm 、nd=2.3〕の反
射膜が開示されている。
Further, for example, in JP-A-63-218513.
Is TiOXThe thin film and the optical element using it are described
Cage, molecular formula: TiOX(However, 1 <x <2)
Thin film titanium oxide based material, and the thin film on the substrate
A formed optical element is disclosed, which uses TiO 2 as an evaporation source.
Once the inside of the vacuum chamber is made high vacuum, oxygen gas
To introduce oxygen partial pressure of 5 × 10-3~ 8 x 10-FourSet to Torr
Formed on the substrate by vacuum evaporation to produce a purple color.
In addition to not presenting and not charging, especially
On synthetic resin substrates, the thin film peels off from the substrate along with the skin layer
If the film thickness is 0.001 to 20 μm,
The folding rate nd is 2.2 to 2.4, and
PMMA substrate / TiOX(1 <x <2) [Film thickness 488 nm, nd
= 2.32], colorless and transparent, with no charge and good adhesion,
PMMA substrate / TiOX(1 <x <2) [Film thickness 488 nm, nd = 2.3
2] / SiOX[Film thickness 488 nm, nd = 1.46] or PMMA group
Plate / SiO X(1 <x <2) [Film thickness 550nm, nd = 1.65] / T
iOX(1 <x <2) [film thickness 550nm, nd = 2.32] / SiO
X[Film thickness 550 nm, nd = 1.46] anti-reflection film, PMMA
Substrate / SiOX(1 <x <2) [film thickness 632.8nm nd = 1.46]
/ TiOXThe opposite of (1 <x <2) [film thickness 632.8 nm, nd = 2.3]
A spray film is disclosed.

【0005】[0005]

【発明が解決しようとする問題点】上記した従来の各公
報に開示されている、例えば特開昭63ー134232号公報に
記載の高透過率を有する赤外反射物品では、5層と多層
で複雑であり、かつ赤外域で高い反射率と可視域で高い
透過率を有するとしたとしても、銀層を備えるため耐薬
品性あるいは耐候性が劣り、単板での使用にたえるもの
ではない。また銀層の可視域における反射を防止するた
め透明酸化物層を用い、光学的干渉作用を利用すること
により可視域の透過率を上昇させる必要があり、実施例
に見られるように、例えばTiOx膜を合計140nm の膜厚で
積層するため生産性に優れるとは言い難く、しかも銀層
のため電波シールド性であるというものであって、必ず
しも簡単な膜構成で、あくまでもガラスらしさを充分に
アピールし、そのなかでバランスよい光学特性を有し、
しかも電波透過性を有するものとは言い難いものであ
る。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention In the infrared reflective article disclosed in each of the above-mentioned conventional publications and having a high transmittance as disclosed in, for example, JP-A-63-134232, five layers and multiple layers are used. Even if it is complicated and has a high reflectance in the infrared region and a high transmittance in the visible region, since it has a silver layer, it has poor chemical resistance or weather resistance and is not suitable for use as a single plate. . In addition, it is necessary to use a transparent oxide layer to prevent reflection of the silver layer in the visible region, and to increase the transmittance in the visible region by utilizing an optical interference effect. Since it is difficult to say that the film is laminated with a total film thickness of 140 nm and the productivity is excellent, and because it is a radio wave shielding property due to the silver layer, it is not necessarily a simple film structure, and it is enough to appeal to glassiness. Among them, it has well-balanced optical characteristics,
Moreover, it is hard to say that it has radio wave transparency.

【0006】また例えば特開昭63ー218513号公報に記載
のTiO X 薄膜及びそれを用いた光学素子では、真空蒸着
法により作成したTiO X (ただし1<x<2)薄膜は成
膜時ならびに成膜後において充分安定したものであると
は言い難く、耐薬品性、耐候性あるいは耐摩耗性等耐久
性に不安があって、必ずしも建築用窓材等屋外には採用
し難いものである。
Further, for example, in the TiO X thin film and the optical element using the same described in JP-A-63-218513, the TiO X (1 <x <2) thin film formed by the vacuum deposition method is used at the time of film formation and It is hard to say that it is sufficiently stable after the film is formed, and there is concern about durability such as chemical resistance, weather resistance, and abrasion resistance, and it is not always easy to use it outdoors such as a window material for construction.

【0007】[0007]

【問題点を解決するための手段】従来のかかる問題点に
鑑みてなしたものであって、本発明は、特定した簡単な
膜構成とその膜厚の組み合わせでなり、可視光透過率と
可視光反射率ならびに熱的遮蔽係数を特定することで、
ガラスらしさを充分発揮してアピールし、透明感と存在
観、意匠性ならびに透視性とミラー性および断熱性を発
現するなかで、バランスよい光学特性を有し、耐薬品
性、耐候性あるいは耐摩耗性等耐久性を備え、しかもソ
フトな淡いブルー系ガラス面反射色調を呈しかつ電波透
過性を有する居住性を高めたガラス板を安価に提供する
ことができるものである。
SUMMARY OF THE INVENTION The present invention has been made in view of such problems as described above, and the present invention is a combination of the specified simple film structure and its film thickness. By specifying the light reflectance and the thermal shielding coefficient,
It has a well-balanced optical property, while exhibiting a glass-like appearance and exhibiting transparency, appearance, designability, see-through property, mirror property and heat insulation property, and chemical resistance, weather resistance or abrasion resistance. It is possible to provide at low cost a glass plate that has durability such as properties, exhibits a soft pale blue-based glass surface reflection color tone, and has radio wave transparency and enhanced comfortability.

【0008】すなわち本発明は、薄膜層を表面に形成し
たガラス板において、ガラス面側から第1層目として膜
厚が7.5nm 以上11.0nm以下であるTiNx薄膜、第1層の上
に第2層目として膜厚が40nm以上55nm以下であるSnOx薄
膜の積層膜からなり、可視光透過率が57〜63%であっ
て、しかもガラス面と膜面の可視光反射率を25%以下で
かつガラス面と膜面の可視光反射率差が6.0 %以下であ
り、さらに熱的遮蔽係数が0.77以下であるものとしたこ
とを特徴とする居住性を高めたガラス板。
That is, according to the present invention, in a glass plate having a thin film layer formed on its surface, a TiNx thin film having a film thickness of 7.5 nm or more and 11.0 nm or less as a first layer from the glass surface side, and a second layer on the first layer. It is composed of a laminated film of SnOx thin films having a thickness of 40 nm or more and 55 nm or less as a layer, the visible light transmittance is 57 to 63%, and the visible light reflectance of the glass surface and the film surface is 25% or less and A glass plate with enhanced habitability, characterized in that the visible light reflectance difference between the glass surface and the film surface is 6.0% or less and the thermal shielding coefficient is 0.77 or less.

【0009】ならびに、前記居住性を高めたガラス板に
おける刺激純度が、19%以下であることを特徴とする上
述した居住性を高めたガラス板。さらに、前記透明基板
の板厚が、5〜19mmであることを特徴とする上述した居
住性を高めたガラス板。
Further, the above-mentioned glass plate with enhanced habitability is characterized in that the stimulus purity of the glass plate with enhanced habitability is 19% or less. Furthermore, the transparent substrate has a plate thickness of 5 to 19 mm.

【0010】さらにまた、前記居住性を高めたガラス板
が、電波透過性を有することを特徴とする上述した居住
性を高めたガラス板をそれぞれ提供するものである。こ
こで、ガラス板としては、例えば建築用窓材としてはも
ちろん、ビルディング等各種のガラス板状体等に用いら
れる市販のソーダライムガラスである無機質ガラス板状
体、ことにフロートガラスが最適であり、またはポリカ
ーボネートやアクリルなどである有機質からなる所謂ガ
ラス板状体等であってもよく、平板状あるいは曲げ板ガ
ラスであり、さらに強化ガラス、合わせガラス、複層ガ
ラスならびに表面処理ガラス等各種加工処理ガラスまた
は各種用途ガラスであってもよい。また、該ガラス板の
形状としては、とくに限定するものではないが、長辺と
短辺でなる略四辺形でなるものが最も好ましく採用でき
るものである。
Furthermore, the above-mentioned glass plate with improved habitability is provided with the above-mentioned glass plate with improved habitability, characterized in that it has radio wave permeability. Here, as the glass plate, for example, as an architectural window material, an inorganic glass plate body which is commercially available soda lime glass used for various glass plate bodies such as buildings, etc., especially float glass is most suitable. It may be a so-called glass plate made of an organic material such as polycarbonate or acrylic, or a flat plate or bent plate glass, and further various processed glass such as tempered glass, laminated glass, double glazing and surface treated glass. Alternatively, it may be glass for various purposes. The shape of the glass plate is not particularly limited, but a substantially quadrangular shape having long sides and short sides can be most preferably adopted.

【0011】また、前記表面に薄膜層を形成したガラス
板において、薄膜層がガラス面側から第1層目として膜
厚が7.5nm 以上11.0nm以下であるTiNx薄膜、第1層の上
に第2層目として膜厚が40nm以上55nm以下であるSnOx薄
膜の積層膜からなるとしたのは、まずTiNx(x について
は、スパッタ時のArガスとN2ガスの流量比で決まる。例
えば x=0.5 〜1.0 )薄膜については、熱線吸収ガラス
程度の熱的性能である遮蔽係数0.77以下を確保しつつ、
他の光学特性についても例えば熱線反射ガラスの光学特
性の可視光反射率ほど高くにはいたらないものとでき、
断熱性能等を有する機能性膜として量産に適しておりか
つガラスとの密着性もよいため、第1層目に選び。つぎ
にSnOx(1<x≦2)薄膜については、TiNx薄膜の保護
膜となって耐久性を高めしかも干渉膜として有用であっ
て、居住性の一つとしてガラス面の可視光反射率が25%
以下という低反射性能が必要なため、断熱薄膜/酸化物
薄膜の構成のなかでTiOx薄膜やTaOx薄膜と比較してガラ
ス面での可視光反射率に影響が少なく、しかも他の酸化
物薄膜に比べて成膜速度が速く生産性に優れる等のた
め、第2層目に選び。該両者の2層の積層膜として簡単
な膜構成とし、複雑な工程も要しないようにすること
で、コスト低減ができるものとした。
Further, in the glass plate having a thin film layer formed on the surface, the thin film layer is the first layer from the glass surface side, the TiNx thin film having a film thickness of 7.5 nm or more and 11.0 nm or less, and the first layer on the first layer. The second layer is made of a laminated film of SnOx thin films having a thickness of 40 nm or more and 55 nm or less. First, TiNx (x is determined by the flow rate ratio of Ar gas and N 2 gas during sputtering. For example, x = 0.5. ~ 1.0) For thin films, while securing a shielding coefficient of 0.77 or less, which is the thermal performance of heat absorbing glass,
For other optical characteristics, for example, it can be made as high as the visible light reflectance of the optical characteristics of heat ray reflective glass,
It is suitable for mass production as a functional film with heat insulating properties and has good adhesion to glass, so it is selected as the first layer. Next, for SnOx (1 <x ≤ 2) thin film, it becomes a protective film of TiNx thin film to enhance durability and is also useful as an interference film. As one of the comfortability, the visible light reflectance of the glass surface is 25 %
Since low reflection performance as below is required, the visible light reflectance on the glass surface is less affected than the TiOx thin film and TaOx thin film in the structure of the heat insulating thin film / oxide thin film, and other oxide thin films can be used. The film forming speed is faster and the productivity is superior, so it is selected as the second layer. The two-layer laminated film of the both has a simple film structure and does not require a complicated process, so that the cost can be reduced.

【0012】また、前記TiNx薄膜層の膜厚を7.5nm 以上
11.0nm以下とし、前記SnOx薄膜層の膜厚を40nm以上55nm
以下としたのは、TiNx薄膜層の膜厚が7.5nm 未満でSnOx
薄膜層の膜厚が40nm未満であれば、例えば可視光透過率
が63%を超え透視性が強くなってしまい、熱的性能であ
る遮蔽係数が0.77を超えて断熱性が満足するものでなく
なり、またTiNx薄膜層の膜厚が11.0nmを超えかつSnOx薄
膜層の膜厚が55nmを超えるものであれば、例えばことに
可視光透過率が低くなり、可視光反射率も高くなり過
ぎ、ガラス面と膜面の可視光反射率差を6.0 %を大きく
超えることとなって到底居住性を高めたガラス板とは言
えないものとなるためである。好ましくはTiNx薄膜層の
膜厚が7.5nm 以上10.5nm以下とし、SnOx薄膜層の膜厚が
40nm以上50nm以下程度である。
The thickness of the TiNx thin film layer is 7.5 nm or more.
11.0 nm or less, the thickness of the SnOx thin film layer is 40 nm or more and 55 nm
The following is SnOx when the thickness of the TiNx thin film layer is less than 7.5 nm.
If the thickness of the thin film layer is less than 40 nm, for example, the visible light transmittance exceeds 63% and the transparency becomes strong, and the shielding coefficient that is thermal performance exceeds 0.77 and the heat insulation becomes unsatisfactory. If the thickness of the TiNx thin film layer is more than 11.0 nm and the thickness of the SnOx thin film layer is more than 55 nm, the visible light transmittance is particularly low and the visible light reflectance is too high. This is because the visible light reflectance difference between the film surface and the film surface greatly exceeds 6.0%, and it cannot be said that the glass plate is extremely comfortable. Preferably, the thickness of the TiNx thin film layer is 7.5 nm or more and 10.5 nm or less, and the thickness of the SnOx thin film layer is
It is about 40 nm or more and 50 nm or less.

【0013】さらに、可視光透過率を57〜63%とし、し
かもガラス面と膜面の平均可視光反射率を25%以下でか
つガラス面と膜面の可視光反射率差を6.0 %以下であ
り、さらに熱的遮蔽係数が0.77以下であるものとしたの
は、可視光透過率が57%未満もしくは可視光反射率が25
%を超える範囲においては、可視光反射性能、特にガラ
ス面の反射性能が高くなりすぎ、透視性が下がり、可視
光透過率が63%を超えもしくは熱的遮蔽係数が0.77以上
の範囲においては、反射性能が下がりすぎ、所定のミラ
ー効果を得ることができなくなり、例えば日射透過率が
60%を超えるあるいは熱的性能である遮蔽係数が0.77を
超えるようになってめざす断熱性を発揮することができ
なくなるからである。
Further, the visible light transmittance is 57 to 63%, the average visible light reflectance between the glass surface and the film surface is 25% or less, and the visible light reflectance difference between the glass surface and the film surface is 6.0% or less. Furthermore, the reason why the thermal shielding coefficient is 0.77 or less is that the visible light transmittance is less than 57% or the visible light reflectance is 25%.
In the range of more than%, the visible light reflection performance, especially the reflection performance of the glass surface becomes too high, the transparency is lowered, and the visible light transmittance exceeds 63% or the thermal shielding coefficient is 0.77 or more in the range. Reflection performance deteriorates too much, and it becomes impossible to obtain a predetermined mirror effect.
This is because when the shielding coefficient exceeds 60% or the thermal performance exceeds 0.77, the desired heat insulation cannot be achieved.

【0014】またガラス面と膜面の可視光反射率差を6.
0 %以下としたのは、可視光反射率差が6.0 %を超える
と透明性能が活かされなくなるという問題、例えばガラ
ス中での吸収あるいは多重反射等があるからである。可
視光反射率差として好ましいのは5.7 %程度以下、より
好ましくは5.0 %程度以下であり、より格段に透視性と
ミラー性をバランスせしめることとなる。
The visible light reflectance difference between the glass surface and the film surface is 6.
The reason why it is set to 0% or less is that there is a problem that the transparent performance is not utilized when the visible light reflectance difference exceeds 6.0%, such as absorption in glass or multiple reflection. The visible light reflectance difference is preferably about 5.7% or less, more preferably about 5.0% or less, and the transparency and the mirror property are more remarkably balanced.

【0015】また熱的遮蔽係数が0.77以下であるものと
したのは、積層薄膜付きガラスでありながら、熱線吸収
ガラス程度の可視光透過率と可視光反射率と遮蔽係数等
を持たせ確保するようにするなかで断熱性を付与せしめ
るためである。
The thermal shielding coefficient of 0.77 or less is ensured by providing the laminated thin film glass with the visible light transmittance, the visible light reflectance, the shielding coefficient and the like of the heat ray absorbing glass. This is because the heat insulating property is imparted in the process.

【0016】一般に光学的特性は透過率、反射率、吸収
率の組み合わせであり、そのバランスにより異なる面も
あるが、上述の範囲内にあれば、透過性と反射性すなわ
ちミラー性ならびに断熱性を同時にバランスよく、人や
環境に優しいものとなってより居住性を満足することが
できる。
Generally, the optical characteristics are a combination of transmittance, reflectance and absorptance, and there are different surfaces depending on the balance, but within the above range, the transmittance and reflectance, that is, the mirror property and the heat insulating property are obtained. At the same time, it is well-balanced and friendly to people and the environment, and can be more comfortable to live in.

【0017】さらに、前記刺激純度を19%以下であるも
のとしたのは、刺激純度が19%を超えると、可視光反射
率や断熱性を考慮したなかでも、ギラツキ感が発現し易
くなり、違和感が生じ易く、人や環境に優しいものとは
言い難くなるためである。
Furthermore, the reason why the stimulation purity is set to 19% or less is that if the stimulation purity exceeds 19%, a glaring feeling is likely to appear even in consideration of visible light reflectance and heat insulation. This is because it is easy for people to feel uncomfortable and it is difficult to say that it is kind to people and the environment.

【0018】またさらに、電波透過性を有するガラス板
としたのは、電波反射型であると周辺の住民にTVにゴ
ースト現象等の所謂電波障害を発生させるためである。
さらに、前記薄膜の積層膜がTiNx薄膜とSnOx薄膜の組み
合わせとしたのは、ガラス面反射色調では若干青味がか
った色合いを呈するもののどちらかと言えば透過光では
ニュートラル色調に近い色合いとなるためでもあり、2
層でデザイン的にも所期の可視光透過性を得て必要な透
視性を持ち、所期の可視光反射性を有してミラー効果を
適当にもたらすようにでき、しかも断熱性を付与するこ
とができるからである。
Furthermore, the reason why the glass plate having radio wave transmission property is used is that the radio wave reflection type glass plate causes a so-called radio wave interference such as a ghost phenomenon on the TV in the surrounding residents.
Furthermore, the laminated film of the thin film is a combination of the TiNx thin film and the SnOx thin film, because the glass surface reflection tone has a slightly bluish tint, even if the transmitted light has a tone close to the neutral tone. Yes 2
In terms of design, the layer also has the desired visible light transparency and the required transparency, and also has the desired visible light reflectivity so as to appropriately provide the mirror effect, and also imparts heat insulation. Because you can.

【0019】さらにまた、前記透明基板の板厚が、5〜
19mmであるとしたのは、例えば4mm以下は風荷重からみ
てビル用の外壁材としては使用できない場合が大半であ
り、また例えば19mmを超えるとガラス内の吸収率が高く
なるので透過率と反射率の両面を同時に満足することが
できない。好ましい板厚としては例えば約6〜15mm程度
である。
Furthermore, the plate thickness of the transparent substrate is 5 to 5.
The reason why it is 19 mm is that, for example, if it is 4 mm or less, it cannot be used as an outer wall material for buildings in view of wind load, and if it exceeds 19 mm, the absorptivity in the glass becomes high, so the transmittance and reflection It is not possible to satisfy both sides of the rate at the same time. A preferable plate thickness is, for example, about 6 to 15 mm.

【0020】[0020]

【作用】前述したように、本発明の居住性を高めたガラ
ス板によれば、透明基板の表面に薄膜層を形成したガラ
ス板において、ガラス面側から第1層目として膜厚が7.
5nm 以上11.0nm以下であるTiNx薄膜、第1層の上に第2
層目として膜厚が40nm以上55nm以下であるSnOx薄膜の積
層膜からなり、可視光透過率が57〜63%であって、しか
もガラス面と膜面の可視光反射率を25%以下でかつガラ
ス面と膜面の可視光反射率差が6.0 %以下であるものと
し、さらに熱的遮蔽係数が0.77以下であるものとしたこ
とにより、積層薄膜付きガラスでありながら、クリアガ
ラスの優れた特性と熱線反射ガラスの特性とを活かしつ
つ、熱線吸収ガラスに匹敵する特性を発現せしめるよう
にし、ガラスらしさを充分発揮して意匠性をアピール
し、透明感と存在観ならびに透視性とミラー性を発現す
るなかで、断熱性をも含めバランスよい光学特性を有し
同時に満足しうるものとなし、耐薬品性、耐候性あるい
は耐摩耗性等耐久性を備え、しかも淡いブルー系のガラ
ス面反射色調を呈しかつ電波透過性を有する居住性を高
めたガラス板を簡単な膜構成等で安価に提供することが
でき、例えば中庭において、ビルディング内の中庭を大
きく見せることができるミラー性、室内からよく見える
ようにする透視性を同時に達成でき、さらに例えば省エ
ネルギー効果を持ちながらホテル等での室内からの夜景
を楽しむという、人や環境に快適でかつ最適なるものと
することができる卓効を奏する。
As described above, according to the glass plate of the present invention with improved comfortability, in the glass plate having the thin film layer formed on the surface of the transparent substrate, the film thickness of the first layer from the glass surface side is 7.
TiNx thin film with a thickness of 5 nm or more and 11.0 nm or less, a second layer on the first layer
It is composed of a laminated film of SnOx thin films having a thickness of 40 nm or more and 55 nm or less as a layer, the visible light transmittance is 57 to 63%, and the visible light reflectance of the glass surface and the film surface is 25% or less and The visible light reflectance difference between the glass surface and the film surface is 6.0% or less, and the thermal shielding coefficient is 0.77 or less. While utilizing the properties of heat-reflecting glass and the properties of heat-reflecting glass, it is possible to exhibit properties comparable to those of heat-absorbing glass, exhibiting a glass-like appearance and appealing the design, and expressing transparency, presence, and transparency and mirror property. Among them, it has a well-balanced optical characteristic including heat insulation and is satisfactory at the same time. It has durability such as chemical resistance, weather resistance or abrasion resistance, and has a light blue glass surface reflection color tone. Present and radio wave It is possible to provide a glass plate with a high degree of living comfortably at a low cost with a simple film structure, etc. For example, in a courtyard, a mirror property that can make the inside of the building look larger It is possible to achieve transparency and at the same time, it has the effect of being comfortable and optimal for people and the environment, such as enjoying the night view from the room in a hotel while having an energy saving effect.

【0021】[0021]

【実施例】以下、実施例により本発明を具体的に説明す
る。ただし本発明は係る実施例に限定されるものではな
い。
The present invention will be described below in detail with reference to examples. However, the present invention is not limited to the embodiment.

【0022】実施例1 大きさ300 ×300mm2、厚さ6mmのフロートクリアガラス
(Fl6) を中性洗剤、水すすぎ、イソプロピルアルコール
で順次洗浄し、乾燥した後、DCマグネトロンスパッタリ
ング装置の真空槽内にセットしてあるTiとSnのターゲッ
トに対向して上方を往復できるようセットし、次に前記
槽内を真空ポンプで約5×10-6Torrまでに脱気した後、
該真空槽内にN2ガスとArガス〔但し、ArガスとN2ガスの
ガス流量比はN2/(Ar+N2) の値が0.5 〜1.0 (なお、該
1.0 の値の際はArガス流量が零である)の範囲であれば
よい。〕を導入して真空度を約2×10-3Torrに保持し、
前記Tiのターゲットに約1.0kw の電力を印加し、前記混
合ガスによるDCマグネトロン反応スパッタの中を、前記
Tiのターゲット上方においてスピード約340mm /min で
前記板ガラスを搬送することによって約10nm厚さのTiNx
(例えば、x が0.8程度)薄膜を第1層として成膜し
た。成膜が完了した後、Tiターゲットへの印加を停止し
た。
Example 1 Float clear glass having a size of 300 × 300 mm 2 and a thickness of 6 mm
(Fl6) is washed with a neutral detergent, water rinse, isopropyl alcohol in order, dried, and then set so that it can reciprocate upwards facing the Ti and Sn targets set in the vacuum chamber of the DC magnetron sputtering system. Then, after degassing the inside of the tank with a vacuum pump to about 5 × 10 −6 Torr,
In the vacuum chamber, N 2 gas and Ar gas (however, the gas flow rate ratio of Ar gas and N 2 gas has a value of N 2 / (Ar + N 2 ) of 0.5 to 1.0 (note that
When the value is 1.0, the Ar gas flow rate is zero). ] To maintain the vacuum at about 2 × 10 −3 Torr,
A power of about 1.0 kW was applied to the Ti target, and the DC magnetron reactive sputtering with the mixed gas was performed to
By transporting the plate glass at a speed of about 340 mm / min above the Ti target, TiNx with a thickness of about 10 nm can be obtained.
(For example, x is about 0.8) A thin film was formed as the first layer. After the film formation was completed, the application to the Ti target was stopped.

【0023】次いで、前記板ガラスを前記真空槽中にお
いたまま、前記槽内を真空ポンプで約5×10-6Torrまで
に脱気した後、該真空槽内にO2ガスとArガス〔但し、Ar
ガスとO2ガスのガス流量比はO2/(Ar+O2) の値が0.5 〜
1.0 (なお、該1.0 の値の際はArガス流量が零である)
の範囲であればよい。〕を導入して真空度を約2×10 -3
Torrに保持し、前記Snのターゲットに約1.0kw の電力を
印加し、前記混合ガスによるDCマグネトロン反応スパッ
タの中を、前記Snのターゲット上方においてスピード約
182mm /min で前記板ガラスを搬送することによって前
記板ガラスのTiNx薄膜表面上に約50nm厚さのSnOx(1<
x≦2)薄膜を第2層として積層成膜した。成膜が完了
した後、Snターゲットへの印加を停止した。
Next, the plate glass is placed in the vacuum chamber.
Approximately 5 × 10 inside the tank with a vacuum pump-6Up to Torr
After degassing to2Gas and Ar gas (however, Ar
Gas and O2Gas flow rate ratio of gas is O2/ (Ar + O2) Has a value of 0.5 to
1.0 (Note that the Ar gas flow rate is zero when the value is 1.0)
It should be in the range of. ] To introduce a vacuum of about 2 × 10 -3
Hold on to Torr and apply about 1.0kw power to the Sn target.
Apply the DC magnetron reaction spatter with the mixed gas.
Speed above the target of Sn.
By transporting the sheet glass at 182 mm / min
About 50 nm thick SnOx (1 <
x ≦ 2) A thin film was laminated and formed as a second layer. Film formation is completed
After that, the application to the Sn target was stopped.

【0024】得られた積層薄膜付き板ガラスについて、
可視光透過率(Tv:380 〜780nm )、可視光反射率(R
v:380 〜780nm )、可視光反射率差、刺激純度(Pv:3
80 〜780nm )ならびに日射透過率(Ts:340 〜1800n
m)と日射反射率(Rs:340 〜1800nm)等については340
型自記分光光度計(日立製作所製)により測定し、所
定の波長毎の透過率、反射率の各データとJIS Z 8722、
JIS R 3106によってそれぞれその光学的特性(光源:D
65 2°視野)を求め、その一部を表1に可視光透過
率、平均可視光反射率、可視光反射率差および刺激純度
について示した。
Regarding the obtained laminated glass with thin film,
Visible light transmittance (Tv: 380-780nm), visible light reflectance (R
v: 380-780nm), visible light reflectance difference, stimulation purity (Pv: 3
80 to 780nm) and solar radiation transmittance (Ts: 340 to 1800n)
m) and solar reflectance (Rs: 340 to 1800 nm), etc.
Type self-recording spectrophotometer (manufactured by Hitachi, Ltd.), each data of transmittance and reflectance for each predetermined wavelength and JIS Z 8722,
According to JIS R 3106, its optical characteristics (light source: D
65 2 ° visual field) was determined, and a part of them was shown in Table 1 for visible light transmittance, average visible light reflectance, visible light reflectance difference, and stimulus purity.

【0025】また、熱的性能としては、JIS R 3106に基
づいて日射熱取得率を求め、3mmの厚さのフロート板ガ
ラス(透明)の日射熱取得率(η値=太陽の日射を受け
たガラスから、どの程度の日射が室内に入ってくるかを
示す数値=0.88)を1とした場合の日射熱取得率の相対
値を求め、遮蔽係数(Shading Coefficient=S.C.) とし
て示した。なお例えば、3mmの厚さのフロート板ガラス
(透明)の日射透過率は約0.86程度である。また例えば
6mmの厚さのフロート板ガラス(透明)の遮蔽係数(S.
C.) は約0.95程度である。
As for the thermal performance, the solar heat gain rate was calculated based on JIS R 3106, and the solar heat gain rate (η value = glass that was exposed to the solar radiation of the sun) of a 3 mm thick float plate glass (transparent). From the above, the relative value of the solar heat gain coefficient was calculated when the numerical value indicating how much solar radiation enters the room = 0.88) was set as 1, and shown as the shading coefficient (SC). Incidentally, for example, the solar radiation transmittance of a float plate glass (transparent) having a thickness of 3 mm is about 0.86. Also, for example, the shielding coefficient (S.
C.) is about 0.95.

【0026】また、耐久性としては、JIS R 3221に基づ
いて、耐薬品性テストについては、酸とアルカリの各1
規定、25℃溶液に約6時間浸漬後の可視光透過率の変化
量(△Ts, %)で評価し、例えば△Tsが4.0 %以下であ
れば合格とした。さらに、テーバーテストについては、
摩耗輪(CS-10F)、荷重 500g、100 回回転後の可視光
透過率の変化量(△Ts, %)で評価し、例えば△Tsが4.
0 %以下であれば合格とした。
The durability is based on JIS R 3221, and for the chemical resistance test, 1 for each of acid and alkali.
It was evaluated by the change amount (ΔTs,%) of the visible light transmittance after being dipped in a 25 ° C. solution for about 6 hours. For example, if ΔTs was 4.0% or less, it was regarded as acceptable. For the Taber test,
The wear wheel (CS-10F), a load of 500 g, and the amount of change in visible light transmittance (ΔTs,%) after 100 rotations were evaluated. For example, ΔTs was 4.
If it was 0% or less, it was determined to be acceptable.

【0027】また、表面抵抗率については、105 Ω/口
以下のものは四探針抵抗測定装置RT-8(NAPSON社製)、
105 Ω/口〜105 MΩ/口のものは表面高抵抗計HIREST
A HT-210(三菱油化社製)によって測定し、1kΩ/口
以上であるものを電波透過性を有するものとした。
Regarding the surface resistivity, those with a resistance of 10 5 Ω / port or less are four-point probe resistance measuring device RT-8 (manufactured by NAPSON),
10 5 Ω / port to 10 5 MΩ / port for the surface high resistance meter HIREST
It was measured by A HT-210 (manufactured by Mitsubishi Petrochemical Co., Ltd.), and one having a resistance of 1 kΩ / mouth or more was determined to have radio wave transparency.

【0028】さらに、生産性等を加味したコスト上良好
なもの、および上述した各特性ならびに外観上等から所
期の居住性を高めたガラス板となったものを総合的な評
価として○印、所期のものではないものを×印でそれぞ
れ表1に示した。
[0028] Furthermore, the ones having good cost in consideration of productivity and the glass plate having desired habitability from the above-mentioned characteristics and appearances are given as a comprehensive evaluation. Those that are not expected are shown in Table 1 by crosses.

【0029】その結果、G(ガラス) /TiNx(10nm)/Sn
Ox(50nm)と2層膜の構成でなる積層薄膜付き板ガラス
は、表1に示すように、可視光透過率(Tv)が61.3%、
ガラス面の可視光反射率(Rv)が24.3%かつガラス面と
膜面の可視光反射率差(△Rv)が4.9%であって、ガラ
ス面の刺激純度も13.9%であり、透明性とミラー効果を
バランスよく持ち、人や環境に対して優しく、しかも日
射透過率(Ts)が55.4%、遮蔽係数(S.C.)が0.74であ
る等断熱性を持ち、例えば冷房負荷軽減効果も大きく発
揮するものである。
As a result, G (glass) / TiNx (10 nm) / Sn
As shown in Table 1, the glass plate with a laminated thin film composed of Ox (50 nm) and a two-layer film has a visible light transmittance (Tv) of 61.3%,
The visible light reflectance (Rv) on the glass surface is 24.3%, the visible light reflectance difference (△ Rv) between the glass surface and the film surface is 4.9%, and the stimulus purity on the glass surface is 13.9%. It has a well-balanced mirror effect, is kind to people and the environment, and has thermal insulation properties such as a solar radiation transmittance (Ts) of 55.4% and a shielding coefficient (SC) of 0.74. It also greatly reduces the cooling load, for example. It is a thing.

【0030】さらに、耐久性も例えば耐薬品性およびテ
ーバーのテストでの可視光透過率の変化量(△Ts)も約
0.5 %以下と合格するものであり、ガラス面の反射色調
が淡いブルー系であって電波透過性もあり、所期の居住
性を高めたガラス板であった。
Further, the durability, for example, the chemical resistance and the change amount (ΔTs) of the visible light transmittance in the Taber test are also about
It was a glass plate that passed 0.5% or less, had a light blue reflection tone on the glass surface, had radio wave transparency, and had a desired comfort level.

【0031】実施例2〜3 表1に示すように、実施例1においるフロートクリアガ
ラスの板厚のみ、実施例2で8mm(Fl8) と実施例3で12
mm(FL12) と替え、実施例1と同様の方法で同様の膜構
成として実施例1と同様の積層薄膜付き板ガラスを得
た。
Examples 2 to 3 As shown in Table 1, only the plate thickness of the float clear glass in Example 1 was 8 mm (Fl8) in Example 2 and 12 in Example 3.
mm (FL12) was used, and a laminated glass with laminated thin film similar to that of Example 1 was obtained in the same manner as in Example 1 with the same film structure.

【0032】得られた積層薄膜付き板ガラスについて実
施例1と同様に各機器を用いて各測定を行い評価した。
その結果、得られた積層薄膜付き板ガラスは、表1に示
すように、板厚が増大するにつれ、可視光透過率が少々
低下し、可視光反射率が同等か多少低下し、ガラス面と
膜面の可視光反射率差が減少し、日射透過率ならびに遮
蔽係数も少々低下する等の変化はあるものの、色調や電
波透過性も含めいずれも所期のめざす値内であり、実施
例1と同様に所期の居住性を高めたガラス板であった。
With respect to the obtained laminated glass with laminated thin film, each measurement was performed using each device in the same manner as in Example 1 and evaluated.
As a result, as shown in Table 1, the obtained laminated glass with laminated thin film had a slight decrease in visible light transmittance and a decrease in visible light reflectance as the plate thickness increased. Although the visible light reflectance difference of the surface is decreased and the solar radiation transmittance and the shielding coefficient are slightly decreased, the color tone and the radio wave transmittance are all within the intended values, and the results are shown in Example 1. Similarly, it was a glass plate with a desired habitability.

【0033】実施例4〜7 実施例1と同様に厚さ6mmのフロートクリアガラス(Fl
6) を用い、実施例1と同様の膜構成で膜厚のみ表1に
示すような値に変化させ、積層薄膜付き板ガラスを得
た。
Examples 4 to 7 As in Example 1, a float clear glass (Fl) having a thickness of 6 mm was used.
6) was used, and with the same film configuration as in Example 1, only the film thickness was changed to a value as shown in Table 1 to obtain a plate glass with a laminated thin film.

【0034】得られた積層薄膜付き板ガラスについて実
施例1と同様に各機器を用いて各測定を行い評価した。
その結果、得られた積層薄膜付き板ガラスは、表1に示
すようになり、実施例1と同様に可視光透過率、可視光
反射率、可視光反射率差および刺激純度等の各光学特性
はもちろん、日射透過率や遮蔽係数等の熱的性能、色調
や電波透過性も含めいずれもめざす範囲内にあり、めざ
す所期の居住性を高めたガラス板であった。
The plate glass with a laminated thin film thus obtained was measured and evaluated in the same manner as in Example 1 using each device.
As a result, the obtained laminated glass with laminated thin film was as shown in Table 1, and each optical property such as visible light transmittance, visible light reflectance, visible light reflectance difference and stimulus purity was the same as in Example 1. Of course, the thermal conductivity such as the solar radiation transmittance and the shielding coefficient, the color tone, and the radio wave transmission were all within the desired range, and the glass plate was a desired habitability.

【0035】比較例1 実施例1と同様にして板ガラス上に成膜し、表1に示す
ように、TiNx薄膜の膜厚を約7.5nm とし、SnOx薄膜の膜
厚を約60nmとやや厚めとした。
Comparative Example 1 A film was formed on a plate glass in the same manner as in Example 1, and as shown in Table 1, the TiNx thin film had a thickness of about 7.5 nm and the SnOx thin film had a thickness of about 60 nm, which was slightly thicker. did.

【0036】得られた積層薄膜付きガラスについて実施
例1と同様に各機器を用いて各測定をし評価した。その
結果、積層薄膜付き板ガラスは、ガラス面側の可視光反
射率が25%を超え、しかもガラス面と膜面の可視光反射
率差が6.0 %を超えるようになり、ミラー性が生じ過ぎ
てバランスがよいものとは言い難く、ギラツキ感もあ
り、必ずしも所期の居住性を高めたガラス板とは言い難
いものであった。
The glass with a laminated thin film thus obtained was measured and evaluated in the same manner as in Example 1 using each device. As a result, the laminated glass with laminated thin film has a visible light reflectance of more than 25% on the glass surface side and a visible light reflectance difference of more than 6.0% between the glass surface and the film surface, resulting in too much mirror property. It is hard to say that it is well-balanced and there is a feeling of glare, so it was not always possible to say that it is a glass plate that has improved the desired habitability.

【0037】比較例2 実施例1と同様にして板ガラス上に成膜し、表1に示す
ように、TiNx薄膜の膜厚を約5.5nm とやや薄めとし、Sn
Ox薄膜の膜厚を約40nmとした。
Comparative Example 2 A film was formed on a plate glass in the same manner as in Example 1, and as shown in Table 1, the thickness of the TiNx thin film was slightly reduced to about 5.5 nm, and Sn was used.
The thickness of the Ox thin film was set to about 40 nm.

【0038】得られた積層薄膜付きガラスについて実施
例1と同様に各機器を用いて各測定をし評価した。その
結果、積層薄膜付き板ガラスは、可視光透過率が63%を
超え、しかも熱的性能である遮蔽係数が0.77を超えるよ
うになり、必ずしも所期の居住性を高めたガラス板とは
言い難いものであった。
The glass with a laminated thin film thus obtained was measured and evaluated in the same manner as in Example 1 using each device. As a result, the laminated glass with laminated thin film has a visible light transmittance of more than 63% and a shielding coefficient of 0.77 which is a thermal performance, and it cannot be said that it is a glass plate with improved desired habitability. It was a thing.

【0039】比較例3 実施例1と同様にして板ガラス上に成膜し、表1に示す
ように、TiNx薄膜の膜厚を約11.5nmとやや厚めとし、Sn
Ox薄膜の膜厚も約60nmとやや厚めとした。
Comparative Example 3 A film was formed on a plate glass in the same manner as in Example 1, and as shown in Table 1, the thickness of the TiNx thin film was set to about 11.5 nm, which was slightly thicker.
The film thickness of the Ox thin film was about 60 nm, which was slightly thicker.

【0040】得られた積層薄膜付きガラスについて実施
例1と同様に各機器を用いて各測定をし評価した。その
結果、積層薄膜付き板ガラスは、ガラス面側の可視光反
射率が25%を大きく超えかつガラス面と膜面の可視光反
射率差が6.0 %を大きく超えるようになり、ミラー性が
勝ち過ぎることとなってバランスがとれたものとは言い
難く、人や環境に優しいとは言い難く、所期の居住性を
高めたガラス板とは言い難いものであった。
The glass with a laminated thin film thus obtained was measured and evaluated in the same manner as in Example 1 using each device. As a result, in the laminated glass with laminated thin film, the visible light reflectance on the glass surface side greatly exceeds 25% and the visible light reflectance difference between the glass surface and the film surface greatly exceeds 6.0%, and the mirror property is too high. It was hard to say that it was a well-balanced thing, it was hard to say that it was friendly to people and the environment, and it was hard to say that it was a glass plate that has improved the desired habitability.

【0041】比較例4 表1に示すように、実施例1と同様の板ガラスを用い、
実施例1と同様にしてTiターゲットのみセットし、スピ
ード約286mm /min で前記板ガラスを搬送することによ
って約9.5nm 厚さのTiNx薄膜を第1層として成膜した。
成膜が完了した後、Tiターゲットへの印加を停止した。
Comparative Example 4 As shown in Table 1, the same plate glass as in Example 1 was used,
In the same manner as in Example 1, only the Ti target was set and the plate glass was conveyed at a speed of about 286 mm / min to form a TiNx thin film having a thickness of about 9.5 nm as the first layer.
After the film formation was completed, the application to the Ti target was stopped.

【0042】次いで、前記板ガラスを前記真空槽中にお
いたまま、前記槽内を真空ポンプで約5×10-6Torrまで
に脱気した後、該真空槽内にO2ガスとArガス〔但し、Ar
ガスとO2ガスのガス流量比はO2/(Ar+O2) の値が0.5 〜
1.0 (なお、該1.0 の値の際はArガス流量が零である)
の範囲であればよい。〕を導入して真空度を約2×10 -3
Torrに保持し、前記Tiのターゲットに約3.0kw の電力を
印加し、前記混合ガスによるDCマグネトロン反応スパッ
タの中を、前記Snのターゲット上方においてスピード約
93mm/min で前記板ガラスを搬送することによって、前
記板ガラスのTiNx薄膜表面上に約30nm厚さのTiOx(1<
x≦2)薄膜を第2層として積層成膜した。成膜が完了
した後、Tiターゲットへの印加を停止した。
Then, the plate glass is placed in the vacuum chamber.
Approximately 5 × 10 inside the tank with a vacuum pump-6Up to Torr
After degassing to2Gas and Ar gas (however, Ar
Gas and O2Gas flow rate ratio of gas is O2/ (Ar + O2) Has a value of 0.5 to
1.0 (Note that the Ar gas flow rate is zero when the value is 1.0)
It should be in the range of. ] To introduce a vacuum of about 2 × 10 -3
Hold on to Torr and apply about 3.0kw power to the Ti target.
Apply the DC magnetron reaction spatter with the mixed gas.
Speed above the target of Sn.
By transporting the plate glass at 93 mm / min,
Approximately 30 nm thick TiOx (1 <
x ≦ 2) A thin film was laminated and formed as a second layer. Film formation is completed
After that, the application to the Ti target was stopped.

【0043】得られた積層薄膜付きガラスについて実施
例1と同様に各機器を用いて各測定をし評価した。その
結果、積層薄膜付き板ガラスは、可視光透過率が57%よ
り低く、ガラス面側の可視光反射率が25%を超え、しか
もガラス面の刺激純度が19%を超えるようになり、ギラ
ツキ感が強まり必ずしも人や環境に優しいものとは言い
難く、所期の居住性を高めたガラス板とは言い難いもの
であった。
The glass with a laminated thin film thus obtained was measured and evaluated in the same manner as in Example 1 using each device. As a result, the glass sheet with laminated thin film has a visible light transmittance of less than 57%, a visible light reflectance on the glass surface side of more than 25%, and a stimulus purity of the glass surface of more than 19%. It is hard to say that it is environmentally friendly to people and the environment, and it is hard to say that it is a glass plate that has improved the desired habitability.

【0044】[0044]

【表1】 [Table 1]

【0045】[0045]

【発明の効果】以上前述したように、本発明によれば、
積層薄膜層を表面に形成したガラス板の膜構成ならびに
その膜厚を特定し、可視光透過率、可視光反射率ならび
に可視光反射率差、さらには熱的遮蔽係数等を特定した
ものとしたことにより、ガラスらしさを充分発揮して意
匠性をアピールし、透明感と存在観ならびに透視性とミ
ラー性を発現させて断熱性とともにバランスよく同時に
満足しうるものとでき、耐久性を備え、しかも淡いブル
ー系色調のガラス面反射色でニュートラルの透過色調を
呈しかつ電波透過性を有する等、人や環境に優しく居住
性を高めたガラス板を簡単な膜構成等で安価に提供する
ことができ、建築用窓材としてはもちろん、ビルディン
グ等各種の用途にその機能を発揮する、居住性と環境性
に優れたガラス板を提供するものである。
As described above, according to the present invention,
The film structure of the glass plate having the laminated thin film layer formed on the surface and the film thickness thereof are specified, and the visible light transmittance, the visible light reflectance and the visible light reflectance difference, and the thermal shielding coefficient are specified. As a result, the glass-likeness can be sufficiently exhibited to appeal the design, and the transparency and the presence, as well as the transparency and the mirror property, can be achieved at the same time in a well-balanced manner with the heat insulation property, and the durability is provided. It is possible to provide a glass plate that is friendly to people and the environment and has enhanced habitability at a low cost with a simple film structure, such as a neutral blue transmission color tone with a light blue color tone and a radio wave transmission property. The present invention provides a glass plate excellent in habitability and environmental performance, which exhibits its function not only as a window material for construction but also in various applications such as a building.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 薄膜層を表面に形成したガラス板におい
て、ガラス面側から第1層目として膜厚が7.5nm 以上1
1.0nm以下であるTiNx薄膜、第1層の上に第2層目とし
て膜厚が40nm以上55nm以下であるSnOx薄膜の積層膜から
なり、可視光透過率が57〜63%であって、しかもガラス
面と膜面の可視光反射率を25%以下でかつガラス面と膜
面の可視光反射率差が6.0 %以下であり、さらに熱的遮
蔽係数が0.77以下であるものとしたことを特徴とする居
住性を高めたガラス板。
1. A glass plate having a thin film layer formed on the surface thereof, having a film thickness of 7.5 nm or more as the first layer from the glass surface side.
It consists of a TiNx thin film with a thickness of 1.0 nm or less and a SnOx thin film with a thickness of 40 nm or more and 55 nm or less as a second layer on the first layer, and has a visible light transmittance of 57 to 63%. The visible light reflectance between the glass surface and the film surface is 25% or less, the visible light reflectance difference between the glass surface and the film surface is 6.0% or less, and the thermal shielding coefficient is 0.77 or less. A glass plate with improved habitability.
【請求項2】 前記居住性を高めたガラス板における刺
激純度が、19%以下であることを特徴とする請求項1記
載の居住性を高めたガラス板。
2. The glass sheet with enhanced habitability according to claim 1, wherein the glass sheet with enhanced habitability has a stimulation purity of 19% or less.
【請求項3】 前記透明基板の板厚が、5〜19mmである
ことを特徴とする請求項1乃至2記載の居住性を高めた
ガラス板。
3. The glass plate with enhanced habitability according to claim 1, wherein the transparent substrate has a plate thickness of 5 to 19 mm.
【請求項4】 前記居住性を高めたガラス板が、電波透
過性を有することを特徴とする請求項1乃至3記載の居
住性を高めたガラス板。
4. The glass plate with enhanced habitability according to claim 1, wherein the glass plate with enhanced habitability has radio wave transparency.
JP31368894A 1994-12-16 1994-12-16 Glass plate with enhanced livability Expired - Lifetime JP3352256B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31368894A JP3352256B2 (en) 1994-12-16 1994-12-16 Glass plate with enhanced livability

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31368894A JP3352256B2 (en) 1994-12-16 1994-12-16 Glass plate with enhanced livability

Publications (2)

Publication Number Publication Date
JPH08169730A true JPH08169730A (en) 1996-07-02
JP3352256B2 JP3352256B2 (en) 2002-12-03

Family

ID=18044324

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3352256B2 (en)

Also Published As

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