JPH08168145A - Structure for fixing conductor to wall of hermetically sealed chamber - Google Patents

Abstract

PURPOSE: To prevent resin, provided at a wiring hole part of a wall in order to fix a conductor, from causing immediate deterioration of quality even under severe temperature and pressure environment where a hermetically sealed chamber is used. CONSTITUTION: A plurality of conductors 4 are molded while keeping a predetermined interval by means of a conductor support 3 bonded to the inner circumferential surface of a hole 2 made in the wall 1 of a hermetically sealed chamber. The conductor support 3 comprises a central layer 5 and an outer circumferential layer 6 overlapped in the direction from the central axis of the plurality of conductors 4 toward the outer circumferential side face. Each layer is composed of a material of different elasticity and irregularities are provided on the interface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire mounting structure for a wall of an airtight chamber, and more particularly to a wire mounting structure for drawing a power source such as a lighting and a manipulator into an airtight chamber such as a greenhouse or a vacuum chamber. is there.

[0002]

2. Description of the Related Art When adjusting or stirring a resin material or a ceramic material before molding, for example, to prevent air from being mixed in or to prevent material from being denatured,
It is necessary to perform the work in an airtight chamber such as a vacuum chamber or a greenhouse. At this time, in such a working room, a power supply line must be introduced to drive a working device and a monitor device and perform lighting.

Conventionally, in introducing the power supply line into the airtight chamber as described above, the conductor wire passing through the hole provided in the wall of the airtight chamber is molded at the portion passing through the hole, and the molded body itself is inside the hole. It is done by being attached to the peripheral surface.

[0004]

However, in such a wire mounting structure for the airtight chamber wall, a large stress is applied to the resin for molding the wire. That is, when the heating work or the cooling work is performed in such an airtight chamber, a stress due to a difference in coefficient of thermal expansion occurs between the airtight chamber wall and the mold resin, and when the chamber is kept in a vacuum, the wall itself Is pulled inward, and the conductor wire connected to the equipment placed in the room is pushed outward relatively, so that the wiring hole portion of the airtight chamber wall is also stressed.

For this reason, the mold resin cracks in a short period of time to reduce the airtightness in the room, or slips occur at the joint between the inner peripheral surface of the hole formed in the wall surface and the wall surface. There is a problem of doing.

The present invention has been made in order to solve such a problem, and is provided in a wiring hole portion of a wall for attaching a conductor even under a severe temperature environment and pressure environment where an airtight chamber is used. It is an object of the present invention to provide a conductive wire mounting structure for an airtight chamber wall in which the quality of the resin does not immediately deteriorate.

[0007]

SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, a structure for mounting a wire on an airtight chamber wall according to the present invention includes a wire support member fixed to an inner peripheral surface of a hole provided on the airtight chamber wall. The conductor is molded, and the conductor support is
The plurality of materials are layered in a direction from the central axis in the direction in which the conducting wire extends toward the outer peripheral side surface, and the plurality of materials have different elasticity at least in the adjacent ones, and the interface between the adjacent materials is It is characterized in that it is a surface having irregularities.

It is preferable that the conductor support is a two-layered body composed of a center layer and an outer peripheral layer, the center layer of which is made of a curable resin that molds the plurality of conductors, and the outer layer of which is made of elastic rubber.

It is preferable that the interface between the adjacent materials has a shape of a side surface of a column body in which cylinders having different radii are stacked alternately by a predetermined length with their central axes aligned.

When there are a plurality of conductors, it is preferable that the plurality of conductors be molded with the conductor support at a predetermined interval.

[0011]

According to the present invention, since the conductor support for attaching the conductor passing through the hole of the airtight chamber wall to the hole is composed of a plurality of material layers, it is possible to interpose a layer for absorbing stress by elasticity. It will be possible. For example, for the part where the conductor is molded in the center, a material that easily cures the resin is selected, and the stress absorption characteristics of the conductor support can be increased simply by surrounding it with a layer of large elasticity and attaching it to the hole described above. Be improved.

The material of such a layer that absorbs stress is appropriately selected from known elastic materials, and the position and thickness of the layer can be designed arbitrarily.
For example, a resin layer may be provided around the core with a material having a large elasticity to mold the conductive wire, and a material having a good compatibility with the material of the wall may be provided on the outer surface in contact with the inner peripheral surface of the hole of the wall. It is also possible to place such an absorber layer between the central layer that molds the conductors. In any case, in addition to the resin material required for molding the conductor, another highly durable resin material is included as a constituent member of the conductor support, so that it is transmitted through the joint surface with the airtight chamber wall. Absorption of stress is performed.

Further, in the present invention, since the material layers that are overlapped in the conductor support are in contact with each other on the surface having irregularities, even if a force is applied in the extending direction of the conductor, the force is efficiently applied. It is transmitted to and absorbed. Since the displacement and distortion between the material layers are unlikely to occur, the increase in the number of constituent materials causes an increase in the number of joints, which does not cause a defect such as damage.

Further, when the interface having the irregularities has a shape of a side surface of a pillar body in which cylinders having different radii are stacked alternately by a predetermined length with their central axes coincided with each other, the surfaces are perpendicular to the wall of the hermetic chamber. With respect to the force applied in the direction, the force is transmitted particularly effectively, and the structure in which the displacement between the materials is easily prevented can be obtained.

When there are a plurality of conductors, the conductors can be effectively insulated by molding the plurality of conductors with the conductor support member at predetermined intervals.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A concrete embodiment of the structure for mounting a wire on an airtight chamber wall according to the present invention will be described with reference to the drawings.

FIG. 1 shows a structure for mounting a conducting wire on a wall of an airtight chamber which is an embodiment of the present invention. 1 is a sectional view, and FIG. 2 is a side view seen from the outside of the airtight chamber.

The present embodiment is applied to a casting tank in which a synthetic resin is poured into a columnar mold in a vacuum for molding.
In the present embodiment, a hole 2 is provided in the airtight chamber wall 1, a cylindrical conductor support 3 is fixed to the inner peripheral surface of the hole 2, and inside and outside the airtight chamber so as to penetrate the conductor support 3. A plurality of conducting wires 4 communicating with each other are molded at a predetermined interval.

The conductor support 3 comprises a central layer 5 for molding a plurality of conductors 4 and an outer peripheral layer 6 surrounding the central layer 5. The center layer 5 is made of a curable resin that is easy to mold, and the outer peripheral layer 6 is made of an elastic rubber suitable for efficiently absorbing the force transmitted from the airtight chamber wall 1 by elastic deformation. In this embodiment, the airtight chamber wall 1 is made of metal, but is completely insulated from the conductor 4 by the conductor support 3.

The interface between the central layer 5 and the outer peripheral layer 6 has the shape of the side surface of a column body in which a large-diameter cylinder and a small-diameter cylinder are alternately stacked with their central axes aligned. With such a shape, even if the airtight chamber wall 1 slightly moves in the extending direction of the conducting wire 4 in accordance with the pressure difference between the inside and the outside of the airtight chamber wall 1, the movement of the outer peripheral layer 6 is suppressed. The stress that is absorbed by the conductive wire 4 and is applied to the conductive wire 4 can be reduced.
Further, since the interface has the above-described shape, the adhesion area between the central layer 5 and the outer peripheral layer 6 may become large, so that the conductive wire support 3 is composed of a plurality of materials. Regardless, it is treated as an integral component,
In addition, the strength is the same as that of a single molded member.

Inside the airtight chamber wall 1, a greenhouse greenhouse 7 containing a heat insulating material is defined by a greenhouse greenhouse wall 8.
Between the airtight chamber wall 1 and the greenhouse chamber wall 8 are these chamber walls 1, 8
An O-ring 9 that seals the space is inserted.

This embodiment can be carried out by simply replacing the conductor support which is conventionally made of a single resin with the conductor support having a two-layer structure as described above. Under the conditions, the conductor support that needs to be replaced every two years in the conventional structure can be replaced with the one shown in this embodiment so that it can be used without being replaced for seven years or more.

Further, although the present embodiment has been described as being applied to a casting tank, the present invention can be applied to almost all hermetic chambers in which conducting wires such as power supply lines and signal lines need to be drawn. . For example, working rooms related to manufacturing processes of industrial products such as various material producing industries and semiconductor manufacturing industries, various laboratories, and the like are targets of the airtight chamber to which the present invention can be applied.

[0024]

According to the present invention, the durability against the stress generated in the portion where the conductor is introduced into the airtight chamber is greatly enhanced, and even when the airtight chamber is used under severe temperature and pressure conditions, It is possible for the conductive wire attachment portion to continue to maintain high airtightness for a long period of time.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of an embodiment of a wire attachment structure for an airtight chamber wall according to the present invention.

FIG. 2 is a side view of the lead wire mounting structure for the airtight chamber wall in FIG. 1 as seen from outside the airtight chamber.

[Explanation of symbols]

 1 Airtight chamber wall 2 Hole 3 Conductor support 4 Conductor 5 Center layer 6 Outer layer 7 Greenhouse 8 Greenhouse wall 9 O-ring

Claims (4)

[Claims] 1. A structure for mounting at least one conductor wire extending inside and outside of an airtight chamber through a hole provided in a wall of the airtight chamber, wherein the conductor wire is fixed by a conductor wire support fixed to an inner peripheral surface of the hole. The conductive wire support is made of a plurality of materials that are layered in a direction from the central axis in the direction in which the conductive wire extends toward the outer peripheral side surface, and these multiple materials are different in at least the elasticity of adjacent materials. Cage,
A wire mounting structure for an airtight chamber wall, wherein the interface between the adjacent materials is a surface having irregularities. 2. The conductive wire support is a two-layer body including a center layer and an outer peripheral layer, the center layer is made of a curable resin that molds the conductive wire, and the outer peripheral layer is made of elastic rubber. Conductive wire mounting structure for the airtight chamber wall described. 3. The interface between adjacent materials has a shape of a side surface of a column body in which cylinders having different radii are stacked alternately by a predetermined length with their central axes aligned. Conductive wire mounting structure for the airtight chamber wall. 4. The conductor mounting structure for an airtight chamber wall according to claim 1, wherein a plurality of the conductors are provided, and the plurality of conductors are molded by the conductor support at a predetermined interval.