JPH08166547A - Vertical moving device for stage of microscope - Google Patents

Abstract

PURPOSE: To adjust much finer movement of a stage fitting to the high magnification of an objective lens while enabling the more exact adjustment of the vertical motion of the stage by a fine adjusting handle in a motor-driven stage vertical moving device of a microscope. CONSTITUTION: In a motor-driven stage vertical moving device comprising a driving part 100 provided with a DC motor 101 and an operating part 10 provided with a fine adjusting handle 11, a rotating angle detecting means 15 detecting the rotation of the fine adjusting handle 11 and a control circuit 30 for driving the DC motor 101 by the output of the rotating angle detecting means 15, the operating part 10 has a high magnification signal input means 90 outputting a high magnification signal to the control circuit at the time of observing with high magnification and this device has a motor control means 51 outputting a driving signal of a constant low voltage to the DC motor 101 when the high magnification signal is inputted from the high magnification signal input means 90 and a rotation signal is inputted from the rotating angle detecting means 15.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for vertically moving a stage in a microscope, and more particularly to an electric stage up / down device for vertically moving a stage by an electric motor.

[0002]

2. Description of the Related Art Today, in microscopes as optical machines, objects to be inspected have various sizes, and a stage on which an object to be inspected is also enlarged and its operation is electrically driven. In many cases, this electric stage actuating mechanism uses two push switches, one of which is an up switch and the other of which is a down switch, and a pinion that meshes with a rack provided on the stage is rotated by an electric motor. The stage is raised by pressing the switch with a finger, and the stage is lowered by pressing the down switch.

Further, there is also used a stage up-and-down moving device having an operating portion provided with a dial type operation handle which is rotatable by attaching a rotary encoder in place of the push switch. In this stage up-and-down moving device having a rotatable operation handle, the stage is moved up and down in accordance with the direction and amount of rotation of the operation handle by rotating the operation handle. A changeover switch that can select the movement amount of the stage with respect to the amount is provided as a speed selection switch, and the movement speed of the stage with respect to the rotation speed of the dial is changed by switching the speed selection switch. The vertical movement of the stage is adjusted by changing the rotation direction and the rotation amount of the dial while switching between the coarse movement and the fine movement.

Further, the amount of movement of the vertical moving part such as the stage is detected by counting the number of pulses of the pulse signal from the rotary encoder attached to the motor shaft of the vertical moving part, and the position of the vertical moving part is appropriately determined. Display and also
The movement limit of the vertical movement part is set and the movement of the vertical movement part is restricted. The operation unit of the electric stage vertical movement device is not limited to the case where it is provided in the microscope body,
There is also a remote controller that is connected to the microscope main body by a signal line so that the switches can be placed in a position where they can be easily handled when operating the switches.

On the other hand, in many conventional manual type stage up-and-down moving devices, a dial-type coarse movement handle and a fine movement handle are provided coaxially on the left and right sides of the microscope body, and the coarse body penetrating the microscope body is used. A fine movement shaft is coaxially arranged inside the movement shaft, and one of the coarse movement handles provided at both ends of the coarse movement shaft is rotated by engaging a pinion formed on the outer periphery of the coarse movement shaft with the rack of the stage. To move the stage up and down, and to rotate either one of the fine movement handles provided at both ends of the fine movement shaft, the rotation of the fine movement shaft is transmitted to the coarse movement shaft via the reduction gear mechanism so that the stage can be moved slowly up and down. I have to.

There are coarse movement handles that move the stage 5 mm by one rotation, fine movement handles move the stage 0.1 mm by one rotation, and the fine movement handle divides 360 degrees into 100 equal parts. 1 is graduated
It is designed to read 1 μm movement of the stage on the scale. Since this manual type stage up-and-down device is mechanically decelerated by gears etc., the rotation speed of the coarse and fine handles The vertical movement part moves at a speed that matches the above, and regardless of the rotation speed of the handle, that is, the movement speed of the vertical movement part, a constant stage movement amount is always ensured for the rotation amount of the handle and adjusted to the rotation amount. It is possible to move the stage slightly.

[0007]

In the conventional electrically operated stage up-and-down device, the up-and-down movement of the stage is performed by operating an up switch or a down switch, and a manual stage up-and-down device and an operating method. However, sometimes it was difficult to move and adjust the vertical movement part to the desired position before getting used to it.

Further, in an electric stage vertical movement device using a rotation angle detecting means such as a rotary encoder, the minimum feed pitch is small because the depth of focus of the lens is shallow for adjustment when using a high-magnification objective lens. However, if the resolution of the rotation angle detecting means is increased to reduce the minimum feed pitch, the amount of data of the signal output by the rotation angle detecting means during normal operation increases, and the moving speed of the stage becomes slower. There was a drawback that it became difficult to use.

The present invention eliminates such drawbacks, and controls the movement of the stage at an extremely slow and fine speed when using a high-magnification objective lens, and normally moves the stage by general fine and coarse movements. It provides an electric stage up / down device that can be moved and operated with a feeling similar to that of a manually operated stage up / down device that is commonly used, and enables efficient inspection by concentrating on inspection. Is.

[0010]

SUMMARY OF THE INVENTION The present invention has a drive unit having a DC motor, and a dial type fine movement handle,
In a stage up-and-down moving apparatus having an operation section having a rotation angle detecting means for detecting the rotation of the fine movement handle and a control circuit for driving the DC motor by the output of the rotation angle detecting means, control is performed during high-magnification observation. The operation unit has a high-magnification signal input means for outputting a high-magnification signal to the circuit, and when the high-magnification signal is input from the high-magnification signal input means, when the rotation signal from the rotation angle detection means is input to the DC motor. A stage up-and-down moving device of a microscope having a motor control means for outputting a drive signal having a constant low voltage.

As the high-magnification signal input means, an electric revolver control circuit for driving the revolver and an objective information input means for operating and controlling the electric revolver control circuit may be used.

[0012]

[Operation] Since the present invention is an electric stage up-and-down device having a fine movement handle, the stage can be moved slowly at a fine pitch by the fine movement handle. And since it has a high-magnification signal input means for outputting a high-magnification signal during high-magnification observation, the revolver can be rotated to replace the objective lens, and when the objective lens is for high-magnification, the high-magnification signal can be input to the control circuit, When the high-magnification signal is input, when the rotation signal is input from the rotation angle detection means of the fine-motion handle, the motor control means outputs a constant low voltage as a drive signal. When operated, the DC motor for driving the stage can be driven at a fine speed constant rotation regardless of the resolution of the rotation angle detecting means.

When the electric revolver control circuit and the objective information input means are high-magnification signal input means, when the electric revolver is operated by the objective information input means, the high-magnification signal can be automatically inputted to the control circuit.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 1, an embodiment of an electric stage up-and-down moving device according to the present invention, as shown in FIG.
A first rotation angle detecting means 15 for detecting the rotation angle of the fine movement handle 11 on the fine movement shaft 13 of the fine movement handle 11, and a brake for applying the braking to the fine movement shaft 13 which is the rotation axis of the fine movement handle 11. In addition to the first braking means 19, the left and right fine movement handles 11 as well as the coarse movement handles 21 are provided on the left and right, and the rotary encoder for detecting the rotation angle of the left and right coarse movement handles 21 is the second rotation angle detection means 25. And a second braking means 29 for braking the coarse movement shaft 23 that rotates in accordance with the rotation of the coarse movement handle 21, and further has an objective information input means 91 and a revolver control circuit 93. By controlling the rotation of the electric revolver 95, the objective lens can be exchanged, and the first rotation angle detecting means 15 and the second rotation angle detecting means 15 can be exchanged.
An operation unit 10 having a control circuit 30 for controlling the DC motor 101 of the drive unit 100 based on the input from the rotation angle detection means 25.
And a deceleration mechanism 103 such as a rack and pinion or gear that decelerates the rotation of the DC motor 101 and the DC motor 101 that drives the stage as the up-and-down moving unit 105 to move the stage up and down, and the position of the stage The detection unit 107 is configured by the drive unit 100 having a rotary encoder that detects the rotation of the DC motor 101.

The operation unit 10 is provided with an upper limit position setting switch 39, and the upper and lower position setting switch 39 controls the position of the stage, which is the vertical movement unit 105 in the driving unit 100, by the control circuit 30.
When the stage is raised to a preset predetermined position by rotating the fine movement handle 11 and the coarse movement handle 21 to raise the stage as the vertical movement unit 105, the DC motor 101 is rotated to move the stage. By preventing the control circuit 30 from outputting the driving signal to be raised and by outputting the braking signal from the control circuit 30, the first braking means 19 and the roughing means 19 provided on the fine movement shaft 13 which is the rotation shaft of the fine movement handle 11 are provided. As the second braking means 29 provided on the coarse movement shaft 23, which is the rotation shaft of the movement handle 21, is operated to further rotate the fine movement handle 11 and the coarse movement handle 21 in the ascending direction of the stage, braking is applied. There is.

The control circuit 30 of the operating section 10 includes a first rotation angle detecting means 15 attached to the fine movement shaft 13 of the fine movement handle 11 and a second rotation angle detector 23 attached to the coarse movement shaft 23 of the coarse movement handle 21.
It has a selection switch 31 for selectively switching between the rotation angle detection means 25 and the first rotation angle detection means 15 via this selection switch 31.
It has a comparison means 41 into which the first rotation signal output from the first rotation signal and the second rotation signal output from the second rotation angle detection means 25 are input.

The comparison means 41 is the first rotation angle detection means 15
And the rotation signal output from the second rotation angle detection means 25 and the drive unit 10.
This is to compare the movement signal output by the position detection means 107 provided at 0. Further, the control circuit 30 also has a motor control means 51 for controlling the rotation speed and the rotation direction of the DC motor 101 based on the comparison signal and the difference signal output from the comparison means 41, and the movement signal from the position detection means 107. It also has a position data forming means 35 for forming a position data signal for knowing the position of the stage based on the above.

Then, the first rotation angle detecting means 15 and the second rotation angle detecting means 15
As the rotation angle detecting means 25, a rotary encoder is used, and as shown in FIG. 2, a rotary encoder disk 16 is provided on a fine movement shaft 13 having fine movement handles 11 at both ends thereof, and is coaxial with the fine movement handle 11. The coarse movement shaft 23 having the gears 24 meshing with the gears provided on the outer periphery of the coarse movement handle 21 at both ends is also provided with the rotary encoder disc 26 so that the fine movement handle 11 and the coarse movement handle 21 can be rotated. The detection is performed by the first rotation angle detection means 15 and the second rotation angle detection means 25, respectively.

The disk 16 of the first rotation angle detecting means 15
The number of slits in the disk 26 of the second rotation angle detecting means 25 is 50, the speed increasing ratio of the gear 24 is, for example, 5 times, and the coarse movement handle 21 is rotated by the same rotation amount as the rotation angle of the fine movement handle 11. At this time, the number of pulses output by the second rotation angle detection means 25 is made larger than the number of pulses output by the first rotation angle detection means 15.

Further, the coarse movement handle 21 is set to 360 degrees 10
The coarse movement shaft 23 is provided with a coupling 27 at both ends of the rotation shaft of the DC motor serving as the braking means 29 to extend the rotation shaft, and the gear shaft 24 is provided at both ends. Reference numeral 13 indicates that the couplings 17 are provided at both ends of the rotary shaft of the DC motor serving as the first braking means 19 and the handle shafts of the fine movement handle 11 are coupled to each other so that the fine movement handles 11 are attached to both ends of the fine movement shaft 13. The DC motor incorporated in the fine movement shaft 13 is used as the first braking means 19, and the DC motor incorporated in the coarse movement shaft 23 is used as the second braking means 29.

The comparison means 41 of the control circuit 30 is shown in FIG.
As shown in FIG. 1, one division circuit 42 and a comparison circuit 49, 2
Each of the frequency dividers 45 and 46 and the pulse counters 43 and 48 is formed, and the division circuit 42 includes the first rotation angle detection means 15 and the second rotation angle detection means.
The pulse signal which is the output signal of the rotary encoder 25 is divided into two, the detection accuracy of the first rotation angle detection means 15 and the second rotation angle detection means 25 is increased, and the pulse of the pulse signal output from this division circuit 42 is pulsed. The number is counted by the first pulse counter 43 and is input to the comparison circuit 49 as a 16-bit count value signal, for example.

In this embodiment, the first rotation angle detecting means
Using 15 discs 16 with 50 slits,
A fine handle for doubling the number of pulses by the dividing circuit 42
100 pulses per 1 rotation of 11 1st pulse counter 43
In addition, since the coarse movement handle 21 provided coaxially with the fine movement handle 11 is provided with a scale that divides 360 degrees into 100 equal parts, when the fine movement handle 11 rotates,
The first pulse counter 43 outputs one pulse for each rotation of the scale.
Can be entered.

Further, the position detecting means 107 provided in the driving unit 100
The first frequency divider 45 and the second frequency divider 46 for inputting the movement signal output by each use a frequency divider having an appropriate frequency division ratio, and detect the rotation of the DC motor 101 in the drive unit 100. The movement signal which is the output of the rotary encoder used as the position detection means 107 is frequency-divided, and the rotation of the DC motor 101 causes the vertical movement unit 105 via the reduction mechanism 103 to move by 1 μm. The second frequency divider 46 outputs one pulse signal based on the pulse of the movement signal output by the rotation, and the first frequency divider 45 outputs one pulse signal when the up-and-down moving unit 105 moves by 10 μm, for example. The frequency division ratio of the first frequency divider 45 is changed to the second frequency divider 46 so as to output.
The output of the first frequency divider 45 or the output of the second frequency divider 46 is input to the second pulse counter 48 by setting the frequency division ratio to a value larger than the frequency division ratio.

The second pulse counter 48 uses a 16-bit pulse counter like the first pulse counter 43, and calculates the pulse number of the pulse signal output from the first frequency divider 45 or the second frequency divider 46. It counts and inputs to the comparison circuit 49 as a 16-bit count value signal. still,
The movement signal from the position detecting means 107 is also input to the position data forming means 35, the number of pulses is increased by the dividing circuit 36 and counted by the pulse counter 37 to make the count value a position data signal. Is input to the motor control means 51.

Then, the comparison circuit 49 compares the output value of the first pulse counter 43 with the output value of the second pulse counter 48 and, as shown in FIG. 4, determines the difference value between the count values of both pulse counters. A difference signal is sent to the central processing unit 55 in the motor control means 51, and a comparison signal indicating which of the count value of the first pulse counter 43 and the count value of the second pulse counter 48 is larger is supplied to the motor control means 51. To the logic conversion circuit 57.

As shown in FIG. 4, the motor control means 51 is connected to the first rotation angle detection means 15 and outputs a switching signal to the selection switch 31 and the changeover switch 47 of the comparison means 41. 53, the central processing unit 55 to which the difference signal from the comparison means 41 and the position data signal from the position data forming means 35 are inputted, and the difference signal from the comparison circuit 49 to the direction change signal to the high magnification fine movement changeover switch 61. And a digital-analog conversion circuit that converts the speed signal of the digital signal output by the central processing unit 55 into a voltage signal and converts the speed signal into an analog signal.
59, the OR circuit as the counter control circuit 63, and the drive unit 10
A motor driver that outputs a drive signal to the 0 DC motor 101
65, a first braking control circuit 71 that outputs a braking signal to the first braking means 19 of the fine movement handle 11, and a second braking control circuit that outputs a braking signal to the second braking means 29 of the coarse movement handle 21.
It is composed of 81.

When the first rotation signal from the first rotation angle detection means 15 provided on the fine movement shaft 13 is input to the direction detection circuit 53, the switching signal is selected from the first output terminal by the selection switch 31 and the comparison means 41. Changeover switch 47 and the motor control means
It outputs to the central processing unit 55 in 51 and the first
The rotation direction of the fine movement handle 11 is determined based on the content of the rotation signal, and when the rotation direction of the rotary encoder used as the first rotation angle detection means 15 is, for example, forward rotation, a direction signal is output from the second output terminal to output the rotary encoder. When the direction of rotation is reverse, the direction signal is output from the third output terminal, and the direction signal is input from the second output terminal and the third output terminal to the high magnification fine movement changeover switch 61.

Further, the logic conversion circuit 57 sends a forward rotation control signal or a reverse rotation control signal to the motor driver 65 via the high magnification fine movement changeover switch 61 based on the comparison signal output from the comparison circuit 49 in the comparison means 41. When the difference signal is input, the central processing unit 55 outputs the speed signal having a value corresponding to the value of the difference signal to the digital-analog conversion circuit 59.

This digital-analog conversion circuit 59 converts the speed signal of the digital signal output by the central processing unit 55 into a voltage signal which is an analog signal, and uses it as a speed determination signal. The motor driver 65 sends the drive signal of a voltage proportional to the voltage of the speed determination signal output from the digital-analog conversion circuit 59 to the motor driver 65 via the DC motor 61.
The signal is output to 101, and the polarity of the drive voltage is inverted when the normal rotation control signal is input as the direction switching signal from the logic conversion circuit 57 and when the reverse rotation control signal is input.

Therefore, in this control circuit 30, when the coarse movement handle 21 is operated, the second rotation signal from the second rotation angle detecting means 25 is transmitted through the selection switch 31 and the division circuit 42 to the first pulse counter 43. Input to the first pulse counter
43 can count the number of pulses of the second rotation signal so as to count up or count down according to the rotation direction of the disk 26 of the rotary encoder used as the second rotation angle detection means 25 and send it to the comparison circuit 49.

In the comparison circuit 49, the first pulse counter
When the count value of 43 is compared with the count value of the second pulse counter 48 and, for example, the count value of the first pulse counter 43 is large, the first comparison signal is sent to the logic conversion circuit 57.
When the count value of the second pulse counter 48 is large, the second comparison signal is output to the logic conversion circuit 57 and
A difference signal indicating the difference between the count value of the first pulse counter 43 and the count value of the second pulse counter 48 is output to the central processing unit 55.

Further, when the first comparison signal is input, the logic conversion circuit 57 outputs a normal rotation control signal as a direction switching signal to the motor driver 65 via the high magnification fine movement changeover switch 61, and the second comparison signal is input. High-precision fine changeover switch
The reverse rotation control signal is output to the motor driver 65 via 61, and the logic conversion circuit 57 does not output the normal rotation control signal when an upper limit signal described later is input.

Further, the central processing unit 55 includes a comparison circuit 49.
The speed signal of the digital signal based on the difference signal output by is output, the speed signal is converted by the digital-analog conversion circuit 59 into the speed determination signal of the voltage corresponding to the value of the difference signal, and the high-speed fine movement changeover switch 61 is set. Motor driver through
It will be input to the speed control terminal of 65. Therefore, the motor driver 65 outputs to the DC motor 101 of the drive unit 100 a drive signal for rotating the DC motor 101 in the forward direction, and the voltage of the drive signal is the speed determination signal, that is, the value of the difference signal output by the comparison circuit 49. The voltage will be according to.

Thus, for example, when the coarse movement handle 21 is normally rotated, the comparison circuit 49 outputs the first comparison signal and the comparison circuit 49 simultaneously outputs the difference signal.
The logic conversion circuit 54 outputs a normal rotation control signal, and the normal rotation control signal from the logic conversion circuit 57 and the speed determination signal from the digital-analog conversion circuit 59 based on the difference signal are input to the motor driver 65, and the motor driver 65 Driver 65
A drive signal for rotating the DC motor 101 of the drive unit 100 in the forward direction is output, and when the coarse movement handle 21 is quickly operated and the value of the difference signal is large, the DC motor 101 outputs a drive signal of a large voltage.
To the DC motor 101 to rotate the DC motor 101 faster.

The rotation of the DC motor 101 raises the stage, which is the up-and-down moving unit 105, and the position detecting means 107 outputs a movement signal, and the pulse of the movement signal divided by the first frequency divider 45. The second pulse counter 48 counts the number, and the first pulse counter 43 and the second pulse counter 48
If the count values of the two match, the comparison circuit 49 sets the value of the difference signal to 0.
And the output of the first comparison signal is stopped, and thus the output of the normal rotation signal from the logic conversion circuit 57 is also stopped,
The motor driver 65 stops outputting the drive signal.

Also, when the coarse movement handle 21 is rotated in the opposite direction, the first pulse counter 43 also down-counts, outputs the second comparison signal together with the difference signal, and outputs the second comparison signal together with the motor driver 65. When the stage descends and the count value of the second counter and the count value of the first counter match, the stage movement stops, and the stage moves up and down at a movement distance corresponding to the rotation amount of the coarse movement handle 21. It can be moved.

When the fine movement handle 11 is operated, the first rotation signal from the first rotation angle detection means 15 is input to the direction detection circuit 53, and the direction detection circuit 53 receives the rotation signal at its input terminal. When input, a switching signal is output from the first output terminal, the rotation signal is used to identify the rotation direction of the rotary encoder that is the first rotation angle detection means 15, and in the case of forward rotation, a direction signal is output from the second output terminal. If the rotary encoder is rotating in the reverse direction, the direction signal is output from the third output terminal.

Therefore, when the fine movement handle 11 is operated and the first rotation angle detecting means 15 outputs the first rotation signal,
The selection switch 31 and the changeover switch 47 are switched by the changeover signal, the first rotation signal is input to the first pulse counter 43 through the selection switch 31, and the second pulse counter 48 includes the second frequency divider 46. The movement signal divided by is input.

Then, the comparison circuit 49 compares the count value of the first pulse counter 43 with the count value of the second pulse counter 48, and similarly to the above, the central processing unit 55, the logic conversion circuit 57 and the motor driver 65. Driven by 100
The DC motor is rotated and the stage is moved up and down. However, when the fine movement handle 11 is operated, as shown in FIG. 2, the first rotation angle detecting means 15 provided in the fine movement handle 11 with respect to the coarse movement handle 21 is directly connected to the fine movement handle 11. 50 pulses per one rotation, and one-fifth the number of pulses output per rotation of the coarse movement handle 21 is output per rotation, and the second frequency divider Since the division ratio 46 is 1/10 of the division ratio of the first frequency divider 45 as described above, when the fine movement handle 11 is rotated, the first pulse counter 43 is moved by a slight movement of the stage. And the count value of the second pulse counter 48 become equal to each other, and the fine movement handle 11 has 50 times the control accuracy with respect to the coarse movement handle 21. In this embodiment, one rotation of the fine movement handle 11 causes Move the stage 0.1 mm to move the coarse In one revolution of $ 21 it is set to be 5mm moving the stage.

Further, the position data forming means 35 makes the moving signal from the position detecting means 107 double the number of pulses by the dividing circuit 36, and the moving signal is converted into a 20-bit pulse counter 37.
Accurately detect the position of the stage as a position data signal, and send this position data signal to the central processing unit 55, which is the position data when the upper limit position setting switch 39 is operated. The value of the signal is stored in the memory as a set value, and based on this preset set value, the position that the position data forming means 35 outputs while the coarse movement handle 21 or the fine movement handle 11 is operated to move the stage. When the value of the data signal becomes equal to the set value, the upper limit signal is set to the counter control circuit 63 or the logic conversion circuit.
57, and the first braking control circuit 81 and the second braking control circuit 71.

Since the logic conversion circuit 57 does not output the forward rotation control signal when the upper limit signal is input from the central processing unit 55, the stage as the up-and-down moving unit 105 is raised and the position data signal is raised. When the value of reaches the set value, the output of the forward rotation control signal is stopped and the motor driver 65
The output of the drive signal from is also stopped, and the ascending of the stage is stopped.

Further, this upper limit signal is the second braking control circuit 81.
The second braking control circuit 81 is composed of a second AND circuit 85, a second braking switch 87, and an upward direction detection circuit 83. The upward direction detection circuit 83 uses the second rotation signal to input the coarse movement handle 21.
The upper signal and the upper limit signal are input to the second AND circuit 85 when the coarse movement handle 21 is rotated in the direction for moving the stage upward by detecting the rotation direction of the second AND circuit 85. , The second AND switch 85 makes the second braking switch 87 conductive, and the voltage from the braking power source 89 is changed to the second voltage.
As a braking signal, a torque for rotating the coarse-movement handle 21 in the direction of lowering the stage is applied by the direct-current motor used as the second braking means 29.

Therefore, when the stage reaches the upper limit, not only the DC motor 101 of the drive unit 100 stops but also
When the coarse movement handle 21 is further rotated in the ascending direction of the stage, the second braking switch 87 is turned on by the upper signal and the upper limit signal from the upward direction detection circuit 83, and the second rotating means 29 produces a reverse rotating torque. It can be immediately understood that the coarse movement handle 21 becomes heavy and the stage reaches the upper limit.

When the coarse movement handle 21 is rotated in the reverse direction, since the upward direction detection circuit 83 does not output the upward direction signal, the first AND circuit 85 does not output the braking control signal, and the second braking switch 87 is in the off state, and the coarse movement handle 21 can be normally rotated to lower the stage. The first braking control circuit 71 is also the first AND circuit.
75 and the first braking switch 77, an upper limit signal and a signal from the second output terminal of the direction detection circuit 53 are input to the first AND circuit 75, and the first AND circuit 75 outputs the braking control signal The first braking switch 77 is controlled so that the voltage of the braking power source 79 can be applied to the DC motor serving as the first braking means 19.

Therefore, when the stage reaches the upper limit and stops rising, if the fine movement handle 11 is rotated so as to further raise the stage, the fine movement handle 11 also becomes like the coarse movement handle 21. Braking can be applied to the rotation of the fine movement handle 11. Further, in this embodiment, the electric revolver is constituted by the objective information input means 91 which is the high-magnification signal input means 90 and the electric revolver control circuit 93.
The objective lens can be converted by rotating 95, the operation signal is sent to the electric revolver control circuit 93 via the central processing unit 55 by the objective information input means 91, and the signal for selecting the objective lens of a specific number is transmitted. Higher signal,
When the switching signal from the direction detection circuit 53 is input to the central processing unit 55, the central processing unit 55 outputs the high-precision fine movement control signal.

That is, when the operation signal is input from the objective information input means 91, the central processing unit 55 outputs the operation signal to the electric revolver control circuit 93 to use a predetermined objective lens and the objective lens. When the signal input from the information input means 91 is a high-magnification signal indicating an objective lens of a specific number, it is stored that the objective lens has a high magnification, and the motor control is performed in this high-magnification observation state. When the switching signal from the direction detection circuit 53 in the means 51 is input to the central processing unit 55, the central processing unit 55
To output a high-precision fine movement control signal.

Then, the high-precision fine-movement control signal is sent to the OR circuit used as the counter control circuit 63 and the high-precision fine-motion selector switch 61.
The high magnification fine movement changeover switch 61 receives the first and second switch terminals of the high magnification fine movement changeover switch 61 from the output terminal of the logic conversion circuit 57 when the high magnification fine movement changeover control signal is inputted. To the second and third output terminals of the direction detection circuit 53, and the third switch terminal is switched from the digital-analog conversion circuit 59 to the fine movement power supply 67.

Therefore, when the high magnification fine movement control signal is input to the control terminal of the high magnification fine movement changeover switch 61, the direction detected by the direction detection circuit 53 is output to the motor driver 65 in place of the direction changeover signal from the logic conversion circuit 57. A signal is output, and the third switch terminal is switched from the digital-analog conversion circuit 59 to the fine-motion power supply 67 to output a constant voltage instead of the speed determination signal.

As described above, when the objective information input means 91 is operated to select a high-magnification objective lens and the fine movement handle 11 is operated, the high-magnification signal input means 90 causes the central processing unit 55 to operate.
When the high-magnification signal is input to the central processing unit 55 and the switching signal is input to the central processing unit 55 from the direction detecting means, the central processing unit 55 outputs the high-magnification fine movement control signal to output the high-magnification fine movement changeover switch 61 from the first to the third. It is to change the switch.

Therefore, the direction signal from the direction detection circuit 53 is input to the motor driver 65, and the voltage from the power source 67 for fine movement is input instead of the speed determination signal. When rotated in the normal direction, a direction signal for moving the stage, which is the up-and-down moving unit 105, is output from the second output terminal of the direction detection circuit 53, and the motor driver 65 outputs a drive signal for rotating the DC motor 101 in the normal direction. When the fine movement handle 11 is rotated in the reverse direction, a direction signal for moving the movable portion downward is output from the third output terminal of the direction detection circuit 53, and the motor driver 65 causes the DC motor to move.
The drive signal for reversing 101 is output.

The power source 67 for fine movement is a power source which outputs a constant voltage which is a low voltage for rotating the DC motor at an extremely fine speed. Therefore, when a high-magnification lens is used as the objective lens, the handle for fine movement is
When 11 is operated, the vertical movement unit 105 moves up or down at a very slow and constant speed in accordance with the rotation of the fine movement handle 11.

At this time, when the high-magnification fine movement control signal is input to the counter control circuit 63, the counter control circuit 63 outputs a count stop signal to the first pulse counter 43 and the second pulse counter 48 of the comparison means 41. However, since the counts of the first pulse counter 43 and the second pulse counter 48 are stopped, the fine rotation handle 11 rotates and the stage moves up and down, so that the fine rotation handle 11 makes the first rotation from the first rotation angle detecting means 15. Even if a signal or a movement signal from the position detection means 107 of the drive unit 100 is input to the comparison means 41, the comparison circuit 49 of the comparison means 41 is not operated at all.

The counter control circuit 63 also receives the above-mentioned upper limit signal, and when the stage, which is the vertical movement unit 105, is at the upper limit position, the fine movement handle 11 and the coarse movement handle 21 are further raised. The first pulse counter 43 and the second pulse counter 48 also stop counting when they are rotated so as to rotate. As described above, in this embodiment, the stage, which is the up-and-down moving unit 105, can be largely moved according to the rotation amount of the coarse movement handle 21, and the stage can be moved up and down by a small amount according to the rotation amount of the fine movement handle 11. When an objective lens of magnification is used, the stage can be moved up and down at an extremely slow speed in accordance with the rotation direction of the fine movement handle 11 regardless of the rotation amount of the fine movement handle 11.

In the above embodiment, the high-magnification signal input means 90
As objective information input means 91 and electric revolver control circuit 93
However, when a manual switch is used as the high-magnification signal input means 90 and the revolver is rotated to select a high-magnification objective lens, the high-magnification signal input means 90 of the manual switch is
May be operated to input a high-magnification signal to the motor control means 51.

The braking means attached to the fine movement shaft 13 and the coarse movement shaft 23 is not limited to the DC motor, and the rotation of the coarse movement shaft 23 and the fine movement shaft 13 may be stopped by using an electromagnetic brake. In addition, the handle 11 for fine movement and the handle 21 for coarse movement
Is provided at both ends of the fine movement shaft 13 and the coarse movement shaft 23, the fine movement shaft 13
There is a case where one fine movement handle 11 is provided at one end and one coarse movement handle 21 is provided at one end of the coarse movement shaft 23 so that the fine movement handle 11 and the coarse movement handle 21 are arranged side by side. .

Likely, coarse movement handle 21 and fine movement handle 11
When and are provided coaxially, as with the conventional manual type,
It is possible to easily identify the coarse movement handle 21 and the fine movement handle 11 with the fingertips and easily perform the coarse and fine movement operation of the stage. Further, in the above-mentioned embodiment, although the rotary encoder is attached to the rotary shaft of the DC motor as the position detecting means 107, it is also possible to use the linear encoder as the position detecting means 107 and detect the vertical movement of the stage with the linear encoder. Needless to say.

Further, when an electromagnetic brake or the like is used as the braking means, as shown in FIG. 5, the coarse movement shaft 23 having a cylindrical shape is used and the fine movement shaft 13 is coaxially arranged inside the coarse movement shaft 23. A first rotation angle detecting means 15 and a braking means attached to 13 are also provided inside the coarse movement shaft 23, and a braking signal is applied to the braking means via the slider 12 provided on the coarse movement shaft 23. The second rotation signal from the angle detecting means 15 may be extracted.

The present embodiment is an electric stage up-and-down moving device having the dial type fine movement handle 11 and the coarse movement handle 21 as described above, and includes position detecting means 107 for detecting the movement of the stage and fine movement. The first rotation angle detecting means 15 for detecting rotation of the handle 11 and the second rotation angle detecting means 25 for detecting rotation of the coarse movement handle 21 are provided, and the first rotation angle detecting means 15 and the second rotation angle detecting means are provided. Since the comparison means 41 compares the output of the means 25 and the output of the position detection means 107 with the control circuit 30 configured to control the DC motor 101 for driving the stage by the motor control means 51, Movable handle
It is possible to move the stage up and down accurately according to the rotation amounts of the fine movement handle 11 and the coarse movement handle 21, respectively, so that the stage can be moved quickly by the fine movement handle 11 and the stage which is the vertical movement unit 105 can be finely moved by the fine movement handle 11. It is possible.

Motor control means of the control circuit 30
As the reference numeral 51, when the rotation signal is inputted from the first rotation angle detecting means 15 provided on the fine movement shaft 13 of the fine movement handle 11 when the high magnification signal is inputted from the high magnification signal input means 90, the direct current motor 101 is fed. Since a constant low voltage is output as a drive signal, when the magnification of the objective lens is high, the stage can be moved slowly regardless of the amount of rotation of the fine-motion handle 11, and a high-magnification with a shallow depth of focus can be used. The material can be easily moved and adjusted to the correct focus position with respect to the objective lens.

Further, since this fine adjustment is a fine adjustment irrelevant to the resolution of the first rotation angle detecting means 15 at the time of high magnification inspection, it is usually adjusted to the rotation amount of the fine movement handle 11 or the coarse movement handle 21. The coarse and fine adjustment is performed by finely adjusting the fine movement while also performing the rapid coarse adjustment. During high-magnification inspection, the stage is moved slowly by fine adjustment that exceeds the resolution of the first rotation angle detection means 15. The material placed on the can be accurately adjusted to the focal position of the lens. The high-magnification signal input unit 90 is not limited to the objective information input unit 91 and the electric revolver control circuit 93, and any device capable of detecting the magnification of the objective lens is sufficient, but the electric revolver control circuit 93 and the objective information. Input means 91
When the electric revolver control circuit 93 rotates the electric revolver 95 to replace the objective lens with a high-magnification lens, the high-magnification signal is automatically input to the central processing unit 55 of the motor control means 51. When the fine movement handle 11 is operated, there is an advantage that the stage can be moved by fine movement adjustment exceeding the resolution of the first rotation angle detection means 15.

Further, in the above embodiment, the first rotation angle detecting means 15 is used.
Is provided with a fine-movement handle 11 provided on the fine-movement shaft 13 and a coarse-movement handle 21 provided with the second rotation angle detection means 25 on the coarse-movement shaft 23, but one rotatable operation handle 11 is provided, The rotation shaft 13 of the operation handle 11 is provided with a braking means 19 and a rotation angle detection means 15 and a speed selection switch.
When switching the number of pulses of the rotation signal output by the rotation angle detection means 15 provided in, or the number of pulses of the rotation signal output by the rotation angle detection means 15 by the speed selection switch and the pulse of the movement signal output by the position detection means 107 By changing the ratio to the number, the operating handle 11 can be used as both a fine-moving handle and a coarse-moving handle, and when the operating handle 11 is used as a fine-moving handle, the signal from the speed selection switch and the high-magnification signal are combined to achieve high magnification. It is also possible to apply a certain low voltage as a drive signal to the DC motor 101 when the operation handle 11 which is a fine adjustment handle is operated as a fine adjustment control signal.

[0062]

The present invention is an electric stage up-and-down device having a fine movement handle, which has a rotation angle detecting means for detecting the rotation of the fine movement handle. Since it has a control circuit that controls the DC motor that drives the parts with the motor control means, the stage can be moved finely by rotating the fine movement handle, which is relatively easy to operate with the conventional manual operation handle. You can adjust the position of the stage with a similar feeling.

As the motor control means of this control circuit, when the high-magnification signal is inputted from the high-magnification signal input means, a rotation signal is inputted from the rotation angle detection means provided on the rotation shaft of the fine movement handle. Since the motor control means outputs a constant low voltage to the DC motor as a drive signal, when the objective lens has a high magnification, the stage can be moved slowly regardless of the rotation amount of the fine movement handle, and the focus depth can be increased. The material can be easily moved and adjusted to the correct focus position with respect to a shallow high-magnification objective lens.

Since this fine adjustment is a fine adjustment irrelevant to the resolution of the rotation angle detecting means, the fine movement of the stage is carried out as a normal fine movement adjustment at times other than the high magnification observation, and the high magnification is high. During high-magnification observation using an objective lens, fine adjustment that exceeds the resolution of the rotation angle detection means can be used to align the material placed on the stage so that it is accurately positioned at the focal position of the lens.

When the electric revolver control circuit and the objective information input means are used as the high-magnification signal input means, when the electric revolver is rotated to replace the objective lens with a high-magnification one, the fine movement handle is automatically moved. When operated, the stage can be moved by fine adjustment that exceeds the resolution of the rotation angle detection means.

[Brief description of drawings]

FIG. 1 is a block diagram showing an entire stage vertical movement device according to the present invention.

FIG. 2 is a view showing a mechanism of an operation handle of the stage vertical movement device according to the present invention.

FIG. 3 is a block diagram showing a control circuit of the stage vertical movement device according to the present invention.

FIG. 4 is a block diagram showing a control circuit of the stage vertical movement device according to the present invention.

FIG. 5 is a view showing another embodiment of the operation handle of the stage vertical movement device according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 Operation part 11 Fine movement handle 12 Slider 13 Fine movement shaft 15 First rotation angle detection means 16 Disc 17 Coupling 19 First braking means 21 Coarse movement handle 23 Coarse movement shaft 24 Gear 25 Second rotation angle detection means 26 Disc 27 Coupling 29 Second Braking Means 30 Control Circuit 31 Selection Switch 25 Position Data Forming Means 36 Dividing Circuit 37 Pulse Counter 39 Upper Limit Position Setting Switch 41 Comparing Means 42 Dividing Circuit 43 First Pulse Counter 45 First Frequency Divider 46 Second Frequency divider 47 Changeover switch 48 Second pulse counter 49 Comparison circuit 51 Motor control means 53 Direction detection circuit 55 Central processing unit 57 Logic conversion circuit 59 Digital analog conversion circuit 61 High-precision fine movement changeover switch 63 Counter control circuit 65 Motor driver 67 Fine Power supply 71 first braking control circuit 75 first AND circuit 77 first braking switch 79 braking power supply 81 second braking control circuit 83 upward direction detection circuit 85 second AND circuit 87 second braking switch 89 braking power supply 90 high multiplication signal Input means 91 Objective information input means 93 Electric revolver control circuit 95 Electric revolver 100 Drive part 101 DC motor 103 Reduction mechanism 105 Vertical movement part 107 Position detection means

Claims (2)

[Claims] 1. A drive unit having a DC motor, and a fine movement handle, a rotation angle detection unit for detecting rotation of the fine movement handle, and an output of the rotation angle detection unit for driving the DC motor. In an electric stage up-and-down device having an operating section provided with a control circuit, the operating section has a high-magnification signal input means for outputting a high-magnification signal to the control circuit during high-magnification observation. When the signal is input, when the rotation signal from the rotation angle detection means is input, the control circuit has motor control means for outputting a drive signal having a constant low voltage to the DC motor. Vertical movement device for microscope. 2. The stage up / down device for a microscope according to claim 1, wherein an electric revolver control circuit for driving a revolver and an objective information input means are used as the high-magnification signal input means.