JPH08161712A - Magnetic head and magnetic disc apparatus - Google Patents

Magnetic head and magnetic disc apparatus

Info

Publication number
JPH08161712A
JPH08161712A JP29850994A JP29850994A JPH08161712A JP H08161712 A JPH08161712 A JP H08161712A JP 29850994 A JP29850994 A JP 29850994A JP 29850994 A JP29850994 A JP 29850994A JP H08161712 A JPH08161712 A JP H08161712A
Authority
JP
Japan
Prior art keywords
magnetic
film
head
effect element
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29850994A
Other languages
Japanese (ja)
Inventor
Makoto Aihara
誠 相原
Yoji Maruyama
洋治 丸山
Yoshihiro Shiroishi
芳博 城石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP29850994A priority Critical patent/JPH08161712A/en
Publication of JPH08161712A publication Critical patent/JPH08161712A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a recording/reproducing function separating type magnetic head which achieves common integration of a magnetic gap for recording and a magnetic gap for reproduction. CONSTITUTION: An MR element 19 is retracted from the surface of a magnetic head opposed to a medium and a flux guide 21 is provided between the element and the surface of the magnetic head opposed to the medium to introduce a magnetic flux from a magnetic recording medium to the MR element 19. A part of the flux guide is made thinner to a reproduction head from the surface opposed to the medium to adjust a magnetic reluctance of the flux guide and the tip of the flux guide 21 of a reproduction head is connected to a yoke 22 of a recording head through a gap of a non-magnetic layer 28. This gap layer 28 allows the adjusting of a magnetic path reluctance of the recording head.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気ヘッド及びそれを
用いた磁気ディスク装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head and a magnetic disk device using the same.

【0002】[0002]

【従来の技術】磁気ディスク装置はコンピュータの外部
記憶装置として用いられ、近年その記憶容量の大容量化
が急速に求められている。図3は磁気ディスク装置の概
略平面図、図4はその断面図である。磁気ディスク装置
は、磁性膜を表面に担持して中心軸の回りで回転する磁
気記録媒体2、磁気記録媒体に対してデータの記録及び
再生を行う磁気ヘッド6、磁気ヘッド6を支持して磁気
記録媒体上の所望の半径位置に位置決めする機構、記録
信号や再生信号を処理する信号処理回路から主に構成さ
れる。
2. Description of the Related Art A magnetic disk device is used as an external storage device of a computer, and in recent years, there has been a rapid demand for a large storage capacity. 3 is a schematic plan view of the magnetic disk device, and FIG. 4 is a sectional view thereof. The magnetic disk device has a magnetic recording medium 2 that carries a magnetic film on its surface and rotates around a central axis, a magnetic head 6 that records and reproduces data on and from the magnetic recording medium, and a magnetic head 6 that supports the magnetic recording medium. It mainly comprises a mechanism for positioning at a desired radial position on the recording medium and a signal processing circuit for processing a recording signal and a reproduction signal.

【0003】磁気記録媒体2はスピンドル軸1に固定さ
れ、スピンドル軸1によって回転駆動される。磁気ヘッ
ド6はアーム4に支持されたサスペンション5に支持さ
れており、アーム4はロータリーアクチュエータ3に固
定されている。磁気ヘッド6はロータリーアクチュエー
タ3の回転によって磁気記録媒体2上の所望の位置に位
置決めされる。信号処理回路は、磁気ヘッド6に記録電
流を流してデータを記録したり、磁気ヘッド6より得ら
れる電気信号を処理してデータに変換する処理を行う。
データの記録は、記録電流に応じた記録磁界の変化を利
用して磁気記録媒体上の磁性膜の磁化方向を反転するこ
とにより行われる。また、データの再生は、磁気記録媒
体から発生する漏れ磁界を再生ヘッドで検出し、それを
電気信号に変換することによって行われる。
A magnetic recording medium 2 is fixed to a spindle shaft 1 and is rotationally driven by the spindle shaft 1. The magnetic head 6 is supported by the suspension 5 supported by the arm 4, and the arm 4 is fixed to the rotary actuator 3. The magnetic head 6 is positioned at a desired position on the magnetic recording medium 2 by the rotation of the rotary actuator 3. The signal processing circuit applies a recording current to the magnetic head 6 to record data, or processes an electric signal obtained from the magnetic head 6 to convert it into data.
Data recording is performed by reversing the magnetization direction of the magnetic film on the magnetic recording medium by utilizing the change of the recording magnetic field according to the recording current. Data reproduction is performed by detecting a leak magnetic field generated from the magnetic recording medium with a reproducing head and converting it into an electric signal.

【0004】磁気ディスク装置の性能は、主に記録容
量、データの入出力速度、信頼性によって決まる。より
多くのデータを磁気ディスク装置に保存するためには、
磁気記録媒体にデータを高密度に記録する技術、及び高
密度に記録されたデータを誤りなく再生する技術が必要
である。磁気記録媒体の記録密度を高くすると、記録磁
区の大きさが小さくなり再生信号も小さくなるため、高
感度な再生ヘッドが必要とされる。そこで記録用磁気ヘ
ッドには誘導型薄膜ヘッドを用い、再生用磁気ヘッドに
は磁気抵抗効果素子(MR素子)を用いる記録再生機能
分離型磁気ヘッドが利用されるようになっている。な
お、本明細書では、巨大磁気抵抗効果等も含め磁気抵抗
効果を利用して磁界強度を検出する素子を全て磁気抵抗
効果素子(MR素子)という。
The performance of the magnetic disk device is mainly determined by the recording capacity, the data input / output speed, and the reliability. To store more data on the magnetic disk device,
There is a need for a technology for recording data on a magnetic recording medium at high density and a technology for reproducing data recorded at high density without error. When the recording density of the magnetic recording medium is increased, the size of the recording magnetic domain becomes smaller and the reproduction signal also becomes smaller. Therefore, a highly sensitive reproducing head is required. Therefore, an inductive thin film head is used as the recording magnetic head, and a recording / reproducing function separated type magnetic head using a magnetoresistive effect element (MR element) is used as the reproducing magnetic head. In the present specification, all the elements that detect the magnetic field strength by utilizing the magnetoresistive effect including the giant magnetoresistive effect are called magnetoresistive effect elements (MR elements).

【0005】再生ヘッドの感度を向上する他の手段とし
ては、磁気ヘッドと磁気記録媒体との距離(スペーシン
グ)を狭小化する方法が挙げられる。磁気ヘッドと磁気
記録媒体のスペーシングを狭くすると、磁気記録媒体表
面でのもれ磁界の微小変化を検知できるようになり、再
生ヘッドの感度が上がる。
As another means for improving the sensitivity of the reproducing head, there is a method of narrowing the distance (spacing) between the magnetic head and the magnetic recording medium. When the spacing between the magnetic head and the magnetic recording medium is narrowed, it becomes possible to detect a minute change in the leakage magnetic field on the surface of the magnetic recording medium, and the sensitivity of the reproducing head increases.

【0006】[0006]

【発明が解決しようとする課題】従来の記録再生機能分
離型磁気ヘッドは、基板上に薄膜形成技術によってMR
素子を含む再生ヘッドと、記録用の誘導型薄膜ヘッドと
を積層して形成していた。すなわち従来の記録再生機能
分離型磁気ヘッドは、記録用の磁気ギャップと再生用の
磁気ギャップの2つの磁気ギャップを有し、この2つの
磁気ギャップが記録トラック方向に距離をおいて配置さ
れていた。
A conventional recording / reproducing function-separated type magnetic head is an MR head formed by a thin film forming technique on a substrate.
A reproducing head including an element and an inductive thin film head for recording are formed in layers. That is, the conventional recording / reproducing function separated magnetic head has two magnetic gaps, a recording magnetic gap and a reproducing magnetic gap, and these two magnetic gaps are arranged at a distance in the recording track direction. .

【0007】このように2つの磁気ギャップを有する磁
気ヘッドをヘッド位置決め機構のロータリーアクチュエ
ータに取付けて用いると、磁気記録媒体の半径位置によ
って記録ヘッドと再生ヘッドのトラック間にずれが生じ
る。そのため、記録媒体のトラック幅を狭くすることが
できず、記録媒体のトラック密度を上げることができな
いという問題があった。
When the magnetic head having two magnetic gaps is attached to the rotary actuator of the head positioning mechanism as described above, a deviation occurs between the tracks of the recording head and the reproducing head depending on the radial position of the magnetic recording medium. Therefore, there is a problem that the track width of the recording medium cannot be narrowed and the track density of the recording medium cannot be increased.

【0008】また、磁気ヘッドと記録媒体のスペーシン
グを狭くし、例えば極低浮上状態、あるいは潤滑剤を介
して磁気ヘッドと磁気記録媒体が接触するような状態、
あるいは直接に磁気ヘッドと磁気記録媒体が接触するよ
うな状態にすると、磁気ヘッドと磁気記録媒体の確率的
あるいは連続的な固体接触のために、磁気ヘッド及び磁
気記録媒体の摩耗が発生する。磁気ヘッドの磁極先端が
摩耗すると、一対の磁極の先端部の対向部分で構成され
る磁気ギャップの媒体対向面からの深さが摩耗に伴い次
第に短くなり、記録再生特性が変化する。すなわち、磁
極先端の摩耗に伴い磁気ギャップ内での記録磁界の損失
が減り、ヘッドの発生磁界が強くなることで記録性能は
向上する。再生性能も同様に一旦磁極に吸い込まれた再
生磁束の磁気ギャップ内での損失が減ることにより向上
する。
Further, the spacing between the magnetic head and the recording medium is narrowed, for example, an extremely low flying state, or a state in which the magnetic head and the magnetic recording medium come into contact with each other via a lubricant,
Alternatively, when the magnetic head and the magnetic recording medium are brought into direct contact with each other, the magnetic head and the magnetic recording medium are abraded due to stochastic or continuous solid contact between the magnetic head and the magnetic recording medium. When the tip ends of the magnetic poles of the magnetic head are worn, the depth of the magnetic gap formed by the facing portions of the tip portions of the pair of magnetic poles from the medium facing surface is gradually shortened due to the wear, and the recording / reproducing characteristics are changed. That is, the recording performance is improved by reducing the loss of the recording magnetic field in the magnetic gap as the tip of the magnetic pole is worn and increasing the magnetic field generated by the head. Similarly, the reproducing performance is improved by reducing the loss of the reproducing magnetic flux once absorbed in the magnetic pole in the magnetic gap.

【0009】磁極先端の摩耗に伴う記録再生特性の変化
を抑制して、摩耗初期にも十分な記録再生性能を確保す
るためには、ヘッド磁極の磁気記録媒体進行方向の長さ
である磁極長の大きい厚ポールヘッドを用いることが有
効である。しかし、厚ポールヘッドをヘッド位置決め機
構のロータリーアクチュエータに取付けて用いると、前
記2つの磁気ギャップを有することによる不都合が顕著
になり、磁気記録媒体の半径位置によって記録ヘッドと
再生ヘッドのトラック間のずれが拡大するため、高密度
記録には適さない。
In order to suppress the change in the recording / reproducing characteristics due to wear of the magnetic pole tip and to ensure sufficient recording / reproducing performance even in the initial stage of wear, the magnetic pole length, which is the length of the head magnetic pole in the magnetic recording medium advancing direction. It is effective to use a thick pole head having a large diameter. However, when the thick pole head is used by being attached to the rotary actuator of the head positioning mechanism, the disadvantage caused by having the two magnetic gaps becomes remarkable, and the gap between the tracks of the recording head and the reproducing head is deviated depending on the radial position of the magnetic recording medium. However, it is not suitable for high density recording.

【0010】さらに、MR素子を用いた再生ヘッドにお
いては、再生ヘッドと磁気記録媒体の衝突によって発生
する熱による熱出力(TA:Thermal Asperity)が発生
する場合がある。このTAによる信号は、その立ち上が
りが急峻な一方で、立ち下がりは熱の拡散に依存して比
較的緩慢であるために信号の周波数帯域が広く、信号処
理回路による除去対策が難しいという問題があった。
Further, in a reproducing head using an MR element, a thermal output (TA: Thermal Asperity) may occur due to heat generated by the collision between the reproducing head and the magnetic recording medium. The signal generated by this TA has a steep rising edge, but its falling edge is relatively slow due to the diffusion of heat, so the frequency band of the signal is wide, and there is the problem that it is difficult to remove it with a signal processing circuit. It was

【0011】本発明の目的は、トラック密度の高い高密
度磁気記録媒体に適した記録再生機能分離型磁気ヘッド
を提供することにある。本発明の他の目的は、磁極先端
の摩耗に備えて厚ポールヘッドとしても記録ヘッドと再
生ヘッドの磁気ギャップにずれが生じることのない記録
再生機能分離型磁気ヘッドを提供することにある。本発
明の他の目的は、再生ヘッドと磁気記録媒体の衝突によ
る熱出力TAを抑制した記録再生機能分離型磁気ヘッド
を提供することにある。本発明の更に他の目的は、記録
容量の大きな磁気ディスク装置を提供することにある。
An object of the present invention is to provide a recording / reproducing function separated type magnetic head suitable for a high density magnetic recording medium having a high track density. Another object of the present invention is to provide a recording / reproducing function-separated type magnetic head in which the magnetic gap between the recording head and the reproducing head does not deviate even if a thick pole head is prepared in case of wear of the magnetic pole tip. Another object of the present invention is to provide a recording / reproducing function-separated type magnetic head in which the thermal output TA due to the collision between the reproducing head and the magnetic recording medium is suppressed. Still another object of the present invention is to provide a magnetic disk device having a large recording capacity.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するた
め、本発明においては、MR素子を磁気ヘッドの媒体対
向面から後退させ、磁気ヘッドの媒体対向面の磁極とM
R素子との間に磁性体薄膜からなるフラックスガイドを
設けて、磁気記録媒体からの磁束をMR素子に導くよう
にした。フラックスガイドは、少なくとも一部を薄くし
て磁気抵抗を調節できるようにした。また、再生ヘッド
の先端磁極は非磁性体層のギャップを介して記録ヘッド
のヨークと接続する構造とし、このギャップによって記
録ヘッドの磁気抵抗を調節できる構造とした。
In order to achieve the above object, in the present invention, the MR element is retracted from the medium facing surface of the magnetic head, and the magnetic pole and M of the magnetic head facing the medium are formed.
A flux guide made of a magnetic thin film is provided between the R element and the magnetic flux to guide the magnetic flux from the magnetic recording medium to the MR element. At least a part of the flux guide was made thin so that the magnetic resistance could be adjusted. The tip magnetic pole of the reproducing head is connected to the yoke of the recording head through the gap of the non-magnetic layer, and the magnetic resistance of the recording head can be adjusted by this gap.

【0013】すなわち、本発明による記録再生機能分離
型磁気ヘッドは、第1の磁極と、第1の磁極と磁気的に
結合されたヨークと、ヨークと磁気的に結合された第2
の磁極と、第1の磁極、ヨーク及び第2の磁極を含む磁
気回路に鎖交するコイルと、磁気抵抗効果素子と、第1
の磁極と磁気抵抗効果素子を磁気的に結合する磁性膜
と、磁気抵抗効果素子と第2の磁極を磁気的に結合する
磁性膜とを含み、記録時には第1の磁極、ヨーク及び第
2の磁極を含む磁気回路に大部分の磁束が通り、再生時
には第1の磁極、磁気抵抗効果素子及び第2の磁極を含
む磁気回路に大部分の磁束が通るように各磁気回路の磁
気抵抗及び飽和磁束密度を調整したことを特徴とする。
That is, the recording / reproducing function separated type magnetic head according to the present invention has a first magnetic pole, a yoke magnetically coupled to the first magnetic pole, and a second magnetically coupled to the yoke.
A magnetic pole, a coil interlinking with a magnetic circuit including a first magnetic pole, a yoke and a second magnetic pole, a magnetoresistive effect element, and a first magnetic pole.
A magnetic film for magnetically coupling the magnetic pole with the magnetoresistive effect element, and a magnetic film for magnetically coupling the magnetoresistive effect element with the second magnetic pole, and at the time of recording, the first magnetic pole, the yoke, and the second magnetic pole. Most of the magnetic flux passes through the magnetic circuit including the magnetic poles, and most of the magnetic flux passes through the magnetic circuit including the first magnetic pole, the magnetoresistive effect element, and the second magnetic pole during reproduction, and the magnetic resistance and saturation of each magnetic circuit. The feature is that the magnetic flux density is adjusted.

【0014】また、本発明による記録再生機能分離型磁
気ヘッドは、非磁性基板上に形成された第1の磁性膜
と、第1の磁性膜上に非磁性絶縁膜を介して配置された
磁気抵抗効果素子と、第1の磁性膜上に絶縁膜を介して
形成され磁気記録媒体と対向する面から磁気抵抗効果素
子の一端に到る第2の磁性膜と、磁気抵抗効果素子の他
端と第1の磁性膜とを磁気的に接続する第3の磁性膜
と、第2の磁性膜上に形成された第4の磁性膜と、第4
の磁性膜上に絶縁膜を介して形成され先端部分が磁気記
録媒体と対向する面から所定距離だけ引っ込み後端が第
1の磁性膜と磁気的に結合されたヨークと、第1の磁性
膜、ヨーク及び第4の磁性膜で形成される磁気回路と鎖
交するコイルとを含み、第1の磁性膜と第2の磁性膜間
の間隙は磁気ギャップを構成し、第2及び第3の磁性膜
は第1及び第4の磁性膜並びにヨークに比較して膜厚が
薄く、また第4の磁性膜からヨークを経て第1の磁性膜
に到る磁気抵抗は第4の磁性膜から第2の磁性膜、磁気
抵抗効果素子及び第3の磁性膜を経て第1の磁性膜に到
る磁気抵抗より大きいことを特徴とする。
The recording / reproducing function-separated type magnetic head according to the present invention has a first magnetic film formed on a non-magnetic substrate and a magnetic film arranged on the first magnetic film via a non-magnetic insulating film. The resistance effect element, the second magnetic film formed on the first magnetic film via the insulating film and facing the magnetic recording medium to one end of the magnetoresistance effect element, and the other end of the magnetoresistance effect element. A third magnetic film for magnetically connecting the first magnetic film and the first magnetic film; a fourth magnetic film formed on the second magnetic film;
A first magnetic film, a yoke formed on the magnetic film via an insulating film, the front end of which is retracted from the surface facing the magnetic recording medium by a predetermined distance, and the rear end of which is magnetically coupled to the first magnetic film. , A yoke and a coil interlinking with the magnetic circuit formed of the fourth magnetic film, and the gap between the first magnetic film and the second magnetic film constitutes a magnetic gap, and the second and third magnetic films are formed. The magnetic film has a smaller film thickness than the first and fourth magnetic films and the yoke, and the magnetic resistance from the fourth magnetic film to the first magnetic film via the yoke is from the fourth magnetic film to the fourth magnetic film. The magnetic resistance is larger than the magnetic resistance reaching the first magnetic film through the second magnetic film, the magnetoresistive effect element, and the third magnetic film.

【0015】また、本発明による記録再生機能分離型磁
気ヘッドは、非磁性基板上に形成された磁気抵抗効果素
子と、磁気記録媒体と対向する面と磁気抵抗効果素子の
一端の間に磁気抵抗効果素子に重ならないように配置さ
れた第1の磁性膜と、磁気抵抗効果素子側方を通り磁気
記録媒体と対向する面と磁気抵抗効果素子の他端の間に
磁気抵抗効果素子と重ならないように配置された第2の
磁性膜と、第1の磁性膜と磁気抵抗効果素子の一端とを
磁気的に接続する第3の磁性膜と、磁気抵抗効果素子の
他端と第2の磁性膜の間を磁気的に接続する第4の磁性
膜と、第1の磁性膜上に絶縁膜を介して形成され先端部
分が磁気記録媒体と対向する面から所定距離だけ引っ込
み後端が第2の磁性膜と磁気的に結合されたヨークと、
第1の磁性膜、ヨーク及び第2の磁性膜で形成される磁
気回路と鎖交するコイルとを含み、第1の磁性膜と第2
の磁性膜間の間隙は磁気ギャップを構成し、第3及び第
4の磁性膜は第1及び第2の磁性膜並びにヨークに比較
して膜厚が薄く、また第1の磁性膜からヨークを経て第
2の磁性膜に到る磁気抵抗は第1の磁性膜から第3の磁
性膜、磁気抵抗効果素子及び第4の磁性膜を経て第2の
磁性膜に到る磁気抵抗より大きいことを特徴とする。
Further, the recording / reproducing function-separated type magnetic head according to the present invention has a magnetoresistive effect element formed on a non-magnetic substrate and a magnetoresistive effect element between a surface facing the magnetic recording medium and one end of the magnetoresistive effect element. The first magnetic film arranged so as not to overlap the effect element, the surface that passes through the side of the magnetoresistive element and faces the magnetic recording medium, and the other end of the magnetoresistive element do not overlap the magnetoresistive element. Arranged in this manner, a third magnetic film for magnetically connecting the first magnetic film and one end of the magnetoresistive effect element, the other end of the magnetoresistive effect element and the second magnetic film. A fourth magnetic film for magnetically connecting the films, and a second end of the first magnetic film that is retracted by a predetermined distance from a surface of the first magnetic film that is formed via an insulating film and faces the magnetic recording medium. A yoke magnetically coupled to the magnetic film of
A first magnetic film, a yoke, and a coil interlinking with a magnetic circuit formed by the second magnetic film;
The gap between the magnetic films constitutes a magnetic gap, the third and fourth magnetic films have a smaller film thickness than the first and second magnetic films and the yoke, and the yoke is formed from the first magnetic film. The magnetic resistance reaching the second magnetic film is larger than the magnetic resistance reaching the second magnetic film through the first magnetic film, the third magnetic film, the magnetoresistive effect element and the fourth magnetic film. Characterize.

【0016】磁気ヘッドを担持するスライダは、磁気記
録媒体に対向する面に1個又は複数個の突起部を備え、
前記突起部の1つに磁気ギャップを構成する磁性膜を含
むことが好ましい。本発明による磁気ディスク装置は、
磁気記録媒体にデータを記録再生する磁気ヘッドとし
て、前記した記録再生機能分離型磁気ヘッドを用いるも
のであり、磁気ヘッドは潤滑膜を介して磁気記録媒体に
接して連続的に摺動してもよいし、磁気記録媒体表面に
浮上してもよい。
The slider carrying the magnetic head has one or a plurality of protrusions on the surface facing the magnetic recording medium.
It is preferable that one of the protrusions includes a magnetic film forming a magnetic gap. The magnetic disk device according to the present invention is
As the magnetic head for recording / reproducing data on / from the magnetic recording medium, the above-mentioned recording / reproducing function-separated type magnetic head is used, and the magnetic head is in contact with the magnetic recording medium through a lubricating film and continuously slides. Alternatively, it may float on the surface of the magnetic recording medium.

【0017】磁気ヘッドと、磁気ヘッドに接続される導
体は、磁気ヘッドを磁気記録媒体に接触させるための負
荷付与手段に一体に集積することが好ましい。磁気記録
媒体は直径が6.35cm(2.5インチ)以下であ
り、磁気ヘッドの有効質量は1.5以上、2.0mg以
下であり、前記負荷付与手段による付与負荷は50mg
以上、500mg以下であることが好ましい。
It is preferable that the magnetic head and the conductor connected to the magnetic head are integrally integrated with a load applying means for bringing the magnetic head into contact with the magnetic recording medium. The diameter of the magnetic recording medium is 6.35 cm (2.5 inches) or less, the effective mass of the magnetic head is 1.5 or more and 2.0 mg or less, and the load applied by the load applying means is 50 mg.
It is preferably 500 mg or less.

【0018】[0018]

【作用】記録時には、フラックスガイドの一部はその膜
厚が薄く磁気抵抗が高いために磁気的に飽和して、MR
素子に加わる磁界が大きくなるのを防ぐことができ、M
R素子の磁区構造の乱れるのを抑えることができる。一
方、再生時には、記録ヘッド側のギャップの磁気抵抗が
大きいために、磁気記録媒体から磁気ヘッド先端に吸い
込まれた磁束のほとんどは記録ヘッド側に流れずにMR
素子に至り、再生信号を得ることができる。
When recording, a part of the flux guide is magnetically saturated due to its thin film thickness and high magnetic resistance, resulting in MR
It is possible to prevent the magnetic field applied to the element from increasing, and
Disturbance of the magnetic domain structure of the R element can be suppressed. On the other hand, during reproduction, since the magnetic resistance of the gap on the recording head side is large, most of the magnetic flux sucked from the magnetic recording medium to the tip of the magnetic head does not flow to the recording head side and MR
A reproduced signal can be obtained by reaching the element.

【0019】本発明による磁気ヘッドは、磁気記録媒体
対向面での記録ギャップと再生ギャップが一つであり、
従来の記録再生機能分離型磁気ヘッドに見られた記録ギ
ャップ、再生ギャップ間に距離があることに起因する記
録ヘッド、再生ヘッドのトラックずれが生じないので、
トラック密度の高い狭トラック幅の磁気記録媒体に適合
する。本発明の磁気ヘッドを用いた磁気ディスク装置の
磁気記録媒体は、10Gb/in2 級の高密度記録が可
能である。また、MR素子がヘッド内部にあって磁気記
録媒体と接触することがないため、MR素子の熱出力T
Aを抑制することができる。
The magnetic head according to the present invention has one recording gap and one reproducing gap on the surface facing the magnetic recording medium.
Since there is no track gap between the recording head and the reproducing head due to the distance between the recording gap and the reproducing gap, which is seen in the conventional recording / reproducing function separated magnetic head,
It is suitable for narrow track width magnetic recording media with high track density. The magnetic recording medium of the magnetic disk device using the magnetic head of the present invention is capable of high density recording of 10 Gb / in 2 class. Further, since the MR element is inside the head and does not come into contact with the magnetic recording medium, the thermal output T of the MR element is
A can be suppressed.

【0020】[0020]

【実施例】以下、実施例に基づき本発明を詳細に説明す
る。 〔実施例1〕図1、2に概略構造を示す磁気ヘッドを作
製した。図1は磁気ヘッドの主要部を判りやすくするた
めに、ヘッドを構成する主要な層毎に分解して示したも
のであり、図2は磁気ヘッドの断面を示したものであ
る。
EXAMPLES The present invention will be described in detail below based on examples. Example 1 A magnetic head having a schematic structure shown in FIGS. FIG. 1 is an exploded view of the main parts of the magnetic head for easy understanding, and FIG. 2 is a cross section of the magnetic head.

【0021】あらかじめ切削加工によって溝11を設け
たZrO2 やAl23−TiCのような非磁性基板12
の上にアルミナなどの絶縁層13を成膜し、その上に下
部磁極14としてパーマロイをスパッタリング法により
2μm形成し、フォトリソグラフィ技術を用いて所望の
形状にパターン化した。次にアルミナなどの絶縁体15
を溝11に充填し、精密研磨を施し、下部磁極14を露
出させたのち、アルミナ絶縁膜16を0.1μm成膜し
た。
A non-magnetic substrate 12 such as ZrO 2 or Al 2 O 3 --TiC in which a groove 11 is previously formed by cutting.
An insulating layer 13 made of alumina or the like was formed thereon, and 2 μm of permalloy was formed as the lower magnetic pole 14 thereon by a sputtering method and patterned into a desired shape by using a photolithography technique. Next, insulator 15 such as alumina
Was filled in the groove 11 and subjected to precision polishing to expose the lower magnetic pole 14, and then an alumina insulating film 16 was formed to a thickness of 0.1 μm.

【0022】その上に、詳細を図5に示すMR素子を形
成した。まず、ソフト膜(SAL)バイアス方式とシャ
ントバイアス方式をあわせた複合方式のバイアスを磁気
抵抗効果膜(MR膜)19に印加する構造、すなわちS
AL膜17としてNi−Fe−Cr系合金を0.02μ
m、シャント膜18としてNbを0.01μm形成し
た。その上に、MR膜19として膜厚0.02μmのパ
ーマロイを、トラック幅方向に対して90度の方向に4
0Oeの直流磁界を印加しながらスパッタリング法によ
り形成した。フォトリソグラフィ技術を用いて、まずバ
イアスを印加する構造17、18及びMR膜19を、媒
体対向面61側からの幅a(以下、素子高さと呼ぶ)が
3μmになるようにパターン化し、次に下部磁極14上
のアルミナ膜16をパターン化した。この際に、この後
に積層されるフラックスガイド21、ヨーク22と磁気
的に接続のできるように、アルミナ膜16に穴を開けて
下部磁極14の一部を媒体対向面61の反対側の位置で
露出させ、いわゆるバックギャップ23とした。
An MR element, the details of which are shown in FIG. 5, was formed thereon. First, a structure in which a composite system bias including a soft film (SAL) bias system and a shunt bias system is applied to the magnetoresistive effect film (MR film) 19, that is, S
Ni-Fe-Cr alloy is 0.02μ as the AL film 17.
m, and 0.01 μm of Nb was formed as the shunt film 18. On top of that, permalloy having a film thickness of 0.02 μm is formed as an MR film 19 in a direction of 90 degrees with respect to the track width direction.
It was formed by a sputtering method while applying a DC magnetic field of 0 Oe. Using the photolithography technique, first, the bias applying structures 17 and 18 and the MR film 19 are patterned so that the width a (hereinafter referred to as element height) from the medium facing surface 61 side is 3 μm. The alumina film 16 on the lower magnetic pole 14 was patterned. At this time, a hole is made in the alumina film 16 so that a part of the lower magnetic pole 14 is formed at a position opposite to the medium facing surface 61 so as to be magnetically connected to the flux guide 21 and the yoke 22 to be laminated thereafter. It was exposed to form a so-called back gap 23.

【0023】図5に示したように、MR膜19のパター
ンの端部にFeMnからなる反強磁性膜24、及び厚さ
0.06μmのNb、厚さ0.13μmのAu、厚さ
0.02μmのCrからなる一対の電極25をリフトオ
フ法によって作製した。その際、電極25間距離(内側
の縁同士の距離)は3.6μmとした。続いて膜厚0.
02μmのアルミナ絶縁膜26を成膜した後、上記MR
膜19の素子高さaの内の、媒体対向面61側とバック
ギャップ23側にMR膜19が露出するようにしてMR
膜19の中央付近を被い、また、その外形は下部磁極1
4とほぼ対応する形状に露出部の空いたフォトレジスト
パターンを形成した。このフォトレジストパターン上に
膜厚0.1μmのパーマロイを成膜した後、このフォト
レジストパターンをリフトオフマスクとして膜厚0.1
μmのパーマロイからなるフラックスガイド膜21をパ
ターン化した。次に、フラックスガイド膜21を、MR
膜19の素子高さaよりも広く素子完成後にMR膜19
とフラックスガイド膜21のみとなる部分とを被い、ま
た、その外形は下部磁極14とほぼ対応する形状に露出
部の空いたフォトレジストパターンを形成した。このフ
ォトレジストパターンをリフトオフマスクとして膜厚2
μmのパーマロイからなる磁極27を成膜し、パターン
化した。
As shown in FIG. 5, the antiferromagnetic film 24 made of FeMn is formed at the end of the pattern of the MR film 19, the Nb having a thickness of 0.06 μm, the Au having a thickness of 0.13 μm, and the thickness of 0. A pair of electrodes 25 made of Cr having a thickness of 02 μm were manufactured by a lift-off method. At that time, the distance between the electrodes 25 (the distance between the inner edges) was set to 3.6 μm. Subsequently, the film thickness is 0.
After forming the alumina insulating film 26 of 02 μm, the MR
The MR film 19 is exposed on the medium facing surface 61 side and the back gap 23 side of the element height a of the film 19 so that the MR film 19 is exposed.
It covers the vicinity of the center of the film 19 and its outer shape is the lower magnetic pole 1.
A photoresist pattern having an exposed portion was formed in a shape substantially corresponding to 4. After forming a 0.1 μm-thick permalloy film on this photoresist pattern, the photoresist pattern is used as a lift-off mask to obtain a film thickness of 0.1 μm.
The flux guide film 21 made of μm permalloy was patterned. Next, the flux guide film 21
After the element is completed, the MR film 19 is wider than the element height a of the film 19.
And a portion of the flux guide film 21 which covers only the flux guide film 21 is covered with a photoresist pattern having an exposed portion having a shape substantially corresponding to that of the lower magnetic pole 14. Using this photoresist pattern as a lift-off mask, the film thickness is 2
A magnetic pole 27 made of permalloy having a thickness of μm was formed and patterned.

【0024】以上の工程により、媒体対向面61形成後
に露出する磁極27の膜厚が比較的厚い一方で、MR膜
19に磁束を導くフラックスガイド膜21の膜厚の薄
い、いわゆるヨーク型MR再生ヘッドを構成することが
できた。次に、磁極27上に非磁性絶縁膜28、記録電
流を流す導体コイル29及び導体コイル29を他の部分
から絶縁するための絶縁膜30、記録ヘッドのヨーク部
22となる磁性膜などを順次、所望の形状となるように
パターニングしながら、積み重ねて記録ヘッド部分を形
成した。このときに、ヨーク部22の先端は、上記の媒
体対向面61に露出するフラックスガイド21及びこれ
に積層した磁極27の上に厚さ0.2μmの非磁性絶縁
膜28を介して積層し、また媒体対向面61加工後に露
出することのないように後退させて形成した。媒体対向
面61からヨーク部22の先端までの距離は1μmとし
た。
Through the above steps, the magnetic pole 27 exposed after the medium facing surface 61 is formed is relatively thick, while the flux guide film 21 for guiding the magnetic flux to the MR film 19 is thin, that is, so-called yoke type MR reproduction. The head could be constructed. Next, on the magnetic pole 27, a non-magnetic insulating film 28, a conductor coil 29 for passing a recording current, an insulating film 30 for insulating the conductor coil 29 from other parts, a magnetic film to be the yoke portion 22 of the recording head, and the like are sequentially formed. Then, the recording head portion was formed by stacking while patterning to have a desired shape. At this time, the tip of the yoke portion 22 is laminated on the flux guide 21 exposed on the medium facing surface 61 and the magnetic pole 27 laminated on the flux guide 21 via a non-magnetic insulating film 28 having a thickness of 0.2 μm, Further, it was formed by retreating so as not to be exposed after processing the medium facing surface 61. The distance from the medium facing surface 61 to the tip of the yoke portion 22 was 1 μm.

【0025】しかる後に、以上のようにして形成された
磁気ヘッド素子を保護するためのアルミナ膜(図示せ
ず)を積層した後、基板を切断して個々のスライダに切
り離し、回転する磁気記録媒体2上に浮揚するあるいは
摺動するのに適した形状に加工し、また、最適な記録再
生性能を発揮できるようにギャップ深さbを調整する媒
体対向面61研磨加工を施して、記録再生機能の分離し
た磁気ヘッド6を得た。
Then, after laminating an alumina film (not shown) for protecting the magnetic head element formed as described above, the substrate is cut into individual sliders, and the magnetic recording medium is rotated. 2 is processed into a shape suitable for levitating or sliding on the surface 2, and the medium facing surface 61 is polished to adjust the gap depth b so that optimum recording / reproducing performance can be achieved, and the recording / reproducing function is performed. The separated magnetic head 6 was obtained.

【0026】本実施例の磁気ヘッド6の動作は、次の通
りである。記録時には、コイル29に電流を流すことで
発生した磁束は、バックギャップ23から上部ヨーク2
2を経て、ギャップ28を介して磁極27に流れ込み、
ヘッドの媒体対向面61から空間に出て記録磁界を形成
する。このようにして空間に出た磁束は、磁極14を経
てバックギャップ23に戻る。なお、記録時に必要な磁
束量は通常極めて大きいために、この磁束が磁極27に
接続されてMR膜19に磁束を導くフラックスガイド2
1に流れ込もうとすると、フラックスガイド21は磁気
的に飽和してしまい、結果としてこのフラックスガイド
21部分の磁気抵抗は大きくなり、MR膜19に磁束が
流れ込むのを防ぎ、また、コイル29で発生した磁束を
再生ヘッド部分で短絡することなく、磁極27、14の
媒体対向面61側先端に導くことができる。
The operation of the magnetic head 6 of this embodiment is as follows. During recording, the magnetic flux generated by passing a current through the coil 29 causes the back gap 23 to pass through the upper yoke 2.
2 and then flows into the magnetic pole 27 through the gap 28,
A recording magnetic field is formed in a space from the medium facing surface 61 of the head. The magnetic flux thus generated in the space returns to the back gap 23 via the magnetic pole 14. Since the amount of magnetic flux required for recording is usually extremely large, this magnetic flux is connected to the magnetic pole 27 and guides the magnetic flux to the MR film 19.
1, the flux guide 21 is magnetically saturated, and as a result, the magnetic resistance of the flux guide 21 portion becomes large, preventing the magnetic flux from flowing into the MR film 19, and the coil 29. The generated magnetic flux can be guided to the tips of the magnetic poles 27 and 14 on the medium facing surface 61 side without short-circuiting in the reproducing head portion.

【0027】一方、再生時には、磁気記録媒体から発生
した磁束は、磁極27から磁気ヘッドに吸い上げられた
後、フラックスガイド21を経て、MR膜19に流れ込
み、バックギャップ23を経て、磁極14を経て媒体側
に戻る。再生時にヘッドに得られる磁束量は極めてわず
かであるためにフラックスガイド21は磁気的に飽和す
ることがなく、したがって磁気抵抗が小さいために、磁
極27に吸い込まれた磁束は、磁気抵抗の高いギャップ
28を経て上部ヨーク22に流れ込まずに、ほぼすべて
がMR膜19に導かれる。
On the other hand, at the time of reproduction, the magnetic flux generated from the magnetic recording medium is absorbed by the magnetic head from the magnetic pole 27, then flows into the MR film 19 via the flux guide 21, passes through the back gap 23, and passes through the magnetic pole 14. Return to the medium side. Since the amount of magnetic flux obtained in the head at the time of reproduction is extremely small, the flux guide 21 is not magnetically saturated. Therefore, since the magnetic resistance is small, the magnetic flux sucked by the magnetic pole 27 is a gap having a high magnetic resistance. Almost everything is guided to the MR film 19 without flowing into the upper yoke 22 via 28.

【0028】本実施例の記録再生機能分離型磁気ヘッド
6を図3、4に示した磁気ディスク装置に組み込み、記
録再生特性を評価した。保磁力が1600Oe、磁性体
膜厚tmag が20nm、残留磁束密度Brと磁性体膜厚
の積(Br×tmag )が80G・μmのCo−Ta−C
r系のスパッタ磁気記録媒体に、始めに記録密度12k
FCIの信号を記録し、次に媒体の同じ部分に重ねて記
録密度50kFCIの信号を記録したところ、オーバー
ライト(重ね書き)性能が約26dB以上あり、十分な
記録性能のあることがわかった。また、このようにして
記録された磁気記録媒体に、本実施例の磁気ヘッドが潤
滑剤を介して接するようにして連続的に摺動させなが
ら、センス電流密度7×106 A/cm2 で再生し、そ
の再生出力を評価したところ、約110μVの出力が得
られ、磁気ヘッドと磁気記録媒体間の衝突発熱によるサ
ーマルアスペリティノイズ及びバルクハウゼンノイズは
観測されなかった。
The recording / reproducing function-separated type magnetic head 6 of the present embodiment was incorporated in the magnetic disk device shown in FIGS. Co-Ta-C having a coercive force of 1600 Oe, a magnetic film thickness t mag of 20 nm, and a product of residual magnetic flux density Br and magnetic film thickness (Br × t mag ) of 80 G · μm.
Recording density of 12k on r-type sputtered magnetic recording medium
When an FCI signal was recorded and then a signal having a recording density of 50 kFCI was recorded over the same portion of the medium, the overwrite (overwriting) performance was about 26 dB or more, and it was found that there was sufficient recording performance. Further, while continuously sliding the magnetic head of this embodiment on the magnetic recording medium thus recorded so as to come into contact with the magnetic head through a lubricant, the sense current density was 7 × 10 6 A / cm 2 . When reproduction was performed and the reproduction output was evaluated, an output of about 110 μV was obtained, and thermal asperity noise and Barkhausen noise due to collision heat generation between the magnetic head and the magnetic recording medium were not observed.

【0029】再生波形の周波数成分を解析して得られた
ヘッド磁極先端と磁気記録媒体磁性膜表面の間の距離は
約50nmであった。更に高い密度で情報を記録するた
めには、このスペーシングを小さくすることが有効であ
り、磁気記録媒体及び磁気記録ヘッド表面の保護膜厚を
小さくし、表面の平滑性を改善し、硬さのバランスをと
り、適切な潤滑剤を塗布することにより約10nmにま
で低減できた。
The distance between the head magnetic pole tip and the magnetic film surface of the magnetic recording medium obtained by analyzing the frequency component of the reproduced waveform was about 50 nm. In order to record information at a higher density, it is effective to reduce this spacing, reduce the protective film thickness on the surface of the magnetic recording medium and the magnetic recording head, improve the surface smoothness, and improve the hardness. It was possible to reduce the thickness to about 10 nm by balancing the above and applying a suitable lubricant.

【0030】〔実施例2〕図6〜9に概略構造を示す磁
気ヘッドを作製した。図6は、磁気ヘッドの主要部を判
りやすくするために、ヘッドを構成する主要な層毎に分
解して示したものであり、図7は図6の磁気ヘッド構造
から記録ヘッドを構成するヨークを取り除いて示したも
のである。図8は図7に示した部分の平面図であり、図
9は磁気ヘッドの断面図である。
Example 2 A magnetic head having a schematic structure shown in FIGS. FIG. 6 is an exploded view of each of the main layers forming the head in order to make the main part of the magnetic head easier to understand, and FIG. 7 is a yoke forming a recording head from the magnetic head structure of FIG. Is shown by removing. 8 is a plan view of the portion shown in FIG. 7, and FIG. 9 is a sectional view of the magnetic head.

【0031】磁気ヘッドの製作に当たっては、アルミナ
などの絶縁層13を薄膜形成し、精密研磨を施したZr
2 やAl23−TiCのような非磁性基板12の上
に、詳細を図5に示すMR素子を形成した。まず、ソフ
ト膜(SAL)バイアス方式とシャントバイアス方式を
あわせた複合方式のバイアスをMR膜に印加する構造、
すなわちSAL膜17としてNi−Fe−Cr系合金を
0.02μm、シャント膜18としてNbを0.01μ
mを形成した。その上に、MR膜19として膜厚0.0
2μmのパーマロイをトラック幅方向に対して90度の
方向に40Oeの直流磁界を印加しながらスパッタリン
グ法により作製した。
In manufacturing the magnetic head, Zr is formed by forming a thin film of an insulating layer 13 such as alumina and performing precision polishing.
An MR element whose details are shown in FIG. 5 was formed on a non-magnetic substrate 12 such as O 2 or Al 2 O 3 —TiC. First, a structure for applying a combined bias to the MR film, including a soft film (SAL) bias system and a shunt bias system,
That is, the SAL film 17 is made of Ni—Fe—Cr alloy of 0.02 μm, and the shunt film 18 is made of Nb of 0.01 μm.
m was formed. An MR film 19 having a thickness of 0.0
A 2 μm permalloy was produced by a sputtering method while applying a DC magnetic field of 40 Oe in the direction of 90 ° with respect to the track width direction.

【0032】フォトリソグラフィ技術を用いて、バイア
スを印加する構造17、18及びMR膜19を、媒体対
向面61側からの幅a、すなわち素子高さが3μmにな
るようにパターン化した。次に、図5に示すようにMR
膜19のパターンの端部にFeMnからなる反強磁性膜
24、及び厚さ0.06μmのNb、厚さ0.13μm
のAu、厚さ0.02μmのCrからなる電極25をリ
フトオフ法によって作製した。その際、電極25間距離
(内側の縁同士の距離)は、3.6μmとした。
The structures 17 and 18 for applying a bias and the MR film 19 were patterned by photolithography so that the width a from the medium facing surface 61 side, that is, the element height was 3 μm. Next, as shown in FIG.
An antiferromagnetic film 24 made of FeMn at the end of the pattern of the film 19, Nb having a thickness of 0.06 μm, and a thickness of 0.13 μm
An electrode 25 made of Au and Cr having a thickness of 0.02 μm was manufactured by a lift-off method. At that time, the distance between the electrodes 25 (the distance between the inner edges) was set to 3.6 μm.

【0033】続いて、膜厚0.02μmのアルミナ絶縁
膜26を成膜後、MR膜19の素子高さaの内の媒体対
向面61側とバックギャップ23側にMR膜19が露出
するようにしてMR膜19の中央付近を被い、また、そ
の外形はこの後に形成する下部磁極34とほぼ対応する
形状に露出部の空いたフォトレジストパターンを形成し
た。このフォトレジストパターン上に膜厚0.1μmの
パーマロイを成膜した後、このフォトレジストパターン
をリフトオフマスクとして膜厚0.1μmのパーマロイ
からなるフラックスガイド膜21をパターン化した。次
に、フラックスガイド膜21を、MR膜19の素子高さ
aよりも大きく素子完成後にMR膜19とフラックスガ
イド膜21のみとなる部分とを被い、また、その外形は
フラックスガイド膜21とほぼ対応する形状に露出部の
空いたフォトレジストパターンを形成した。このフォト
レジストパターンをリフトオフマスクとして膜厚2μm
のパーマロイからなる下部磁極34を成膜し、パターン
化した。
Subsequently, after forming the alumina insulating film 26 with a thickness of 0.02 μm, the MR film 19 is exposed on the medium facing surface 61 side and the back gap 23 side within the element height a of the MR film 19. Then, a photoresist pattern having an exposed portion was formed so as to cover the center of the MR film 19 and to have an outer shape substantially corresponding to the lower magnetic pole 34 to be formed later. After forming a 0.1 μm-thick permalloy film on this photoresist pattern, the flux guide film 21 made of a 0.1 μm-thick permalloy film was patterned using this photoresist pattern as a lift-off mask. Next, the flux guide film 21 covers the MR film 19 and the portion which is only the flux guide film 21 after the element is completed and is larger than the element height a of the MR film 19, and its outer shape is the same as the flux guide film 21. A photoresist pattern having an exposed portion was formed in a shape substantially corresponding thereto. A film thickness of 2 μm using this photoresist pattern as a lift-off mask
The lower magnetic pole 34 made of permalloy was deposited and patterned.

【0034】図6及び図8に示すように、下部磁極34
は、MR素子19の媒体対向面61と反対側のバックギ
ャップ23側においてMR素子19に重なることなく、
MR素子19との間は上記フラックスガイド膜21が接
続し、MR素子19の側方を経て媒体対向面61に到る
形状を有する。MR素子19の媒体対向面61側の上記
フラックスガイド膜21の上には、上記下部磁極34を
形成するのと同じプロセスで膜厚2μmからなる磁極3
6を形成する。磁極36は、上記下部磁極34と磁気ギ
ャップ35を介して隣接する。
As shown in FIGS. 6 and 8, the lower magnetic pole 34
Does not overlap the MR element 19 on the back gap 23 side opposite to the medium facing surface 61 of the MR element 19,
The flux guide film 21 is connected between the MR element 19 and the MR element 19 and has a shape reaching the medium facing surface 61 through the side of the MR element 19. The magnetic pole 3 having a film thickness of 2 μm is formed on the flux guide film 21 on the medium facing surface 61 side of the MR element 19 by the same process as that for forming the lower magnetic pole 34.
6 is formed. The magnetic pole 36 is adjacent to the lower magnetic pole 34 via a magnetic gap 35.

【0035】次に、下部磁極34及び磁極36上に非磁
性絶縁膜28、記録電流を流す導体コイル29、導体コ
イル29を他の部分から絶縁するための絶縁膜30、ヨ
ーク31となる磁性膜などを順次、所望の形状となるよ
うにパターニングしながら積み重ねて記録ヘッドを形成
した。このときに、ヨーク31の先端は、媒体対向面6
1に露出するフラックスガイド膜21及びこれに積層し
た磁極36の上に厚さ0.2μmの非磁性絶縁膜28を
介して積層し、また媒体対向面61を形成する研磨加工
後に露出することのないように後退させて形成した。媒
体対向面61からヨーク31の先端までの距離は1μm
とした。
Next, on the lower magnetic pole 34 and the magnetic pole 36, a non-magnetic insulating film 28, a conductor coil 29 for passing a recording current, an insulating film 30 for insulating the conductor coil 29 from other parts, and a magnetic film serving as a yoke 31. A recording head was formed by sequentially stacking the above with patterning so as to have a desired shape. At this time, the tip of the yoke 31 has the medium facing surface 6
1 is exposed on the flux guide film 21 and the magnetic pole 36 laminated on the flux guide film 21 via the non-magnetic insulating film 28 having a thickness of 0.2 μm, and is exposed after the polishing process for forming the medium facing surface 61. It was formed by retracting it so that it would not exist. The distance from the medium facing surface 61 to the tip of the yoke 31 is 1 μm
And

【0036】本実施例では、磁気ヘッドのトラック幅を
下部磁極34、磁極36及びフラックスガイド21の膜
厚で決めることができ、媒体対向面61形成後に露出す
る磁極の磁気記録媒体進行方向の長さが長く、MR素子
に接続するフラックスガイドの膜厚の薄い、ヨーク型M
R再生ヘッドを備えた記録再生機能分離型磁気ヘッドを
得ることができた。
In this embodiment, the track width of the magnetic head can be determined by the film thicknesses of the lower magnetic pole 34, the magnetic pole 36 and the flux guide 21, and the length of the magnetic pole exposed after the medium facing surface 61 is formed in the magnetic recording medium traveling direction. With a long length and a thin film thickness of the flux guide connected to the MR element
It was possible to obtain a recording / reproducing function separated type magnetic head having an R reproducing head.

【0037】この後、磁気ヘッド素子を保護するための
アルミナ膜を積層した後、基板を切断して個々のスライ
ダに切り離し、回転する磁気記録媒体上に浮揚あるいは
摺動するのに適した形状に加工し、また、最適な記録再
生性能を発揮できるようにギャップ深さを調整する媒体
対向面研磨加工を施して、記録再生機能の分離した磁気
ヘッド6を得た。
After that, after laminating an alumina film for protecting the magnetic head element, the substrate is cut into individual sliders and formed into a shape suitable for floating or sliding on the rotating magnetic recording medium. The magnetic head 6 having a separated recording / reproducing function was obtained by processing and polishing the medium facing surface to adjust the gap depth so as to exert the optimum recording / reproducing performance.

【0038】本実施例の記録再生機能分離型磁気ヘッド
6を図3、4に示した磁気ディスク装置に組み込み、記
録再生特性を評価した。保磁力が1600Oe、磁性体
膜厚tmag が20nm、残留磁束密度Brと磁性体膜厚
の積(Br×tmag )が80G・μmのCo−Ta−C
r系のスパッタ磁気記録媒体に、始めに記録密度12k
FCIの信号を記録し、次に媒体の同じ部分に重ねて記
録密度50kFCIの信号を記録したところ、オーバー
ライト(重ね書き)性能が約26dB以上あり、十分な
記録性能のあることがわかった。また、このようにして
記録された磁気記録媒体に、本実施例の磁気ヘッドが潤
滑剤を介して接するようにして連続的に摺動させなが
ら、センス電流密度7×106 A/cm2 で再生し、そ
の再生出力を評価したところ、約110μVの出力が得
られ、磁気ヘッドと磁気記録媒体間の衝突発熱によるサ
ーマルアスペリティノイズ及びバルクハウゼンノイズは
観測されなかった。
The recording / reproducing function-separated type magnetic head 6 of the present embodiment was incorporated in the magnetic disk device shown in FIGS. Co-Ta-C having a coercive force of 1600 Oe, a magnetic film thickness t mag of 20 nm, and a product of residual magnetic flux density Br and magnetic film thickness (Br × t mag ) of 80 G · μm.
Recording density of 12k on r-type sputtered magnetic recording medium
When an FCI signal was recorded and then a signal having a recording density of 50 kFCI was recorded over the same portion of the medium, the overwrite (overwriting) performance was about 26 dB or more, and it was found that there was sufficient recording performance. Further, while continuously sliding the magnetic head of this embodiment on the magnetic recording medium thus recorded so as to come into contact with the magnetic head through a lubricant, the sense current density was 7 × 10 6 A / cm 2 . When reproduction was performed and the reproduction output was evaluated, an output of about 110 μV was obtained, and thermal asperity noise and Barkhausen noise due to collision heat generation between the magnetic head and the magnetic recording medium were not observed.

【0039】再生波形の周波数成分を解析して得られた
ヘッド磁極先端と磁気記録媒体磁性膜表面の間の距離は
約50nmであった。更に高い密度で情報を記録するた
めには、このスペーシングを小さくすることが有効であ
り、磁気記録媒体及び磁気記録ヘッド表面の保護膜厚を
小さくし、表面の平滑性を改善し、硬さのバランスをと
り、適切な潤滑剤を塗布することにより約10nmにま
で低減できた。
The distance between the head magnetic pole tip and the magnetic film surface of the magnetic recording medium obtained by analyzing the frequency component of the reproduced waveform was about 50 nm. In order to record information at a higher density, it is effective to reduce this spacing, reduce the protective film thickness on the surface of the magnetic recording medium and the magnetic recording head, improve the surface smoothness, and improve the hardness. It was possible to reduce the thickness to about 10 nm by balancing the above and applying a suitable lubricant.

【0040】〔実施例3〕図10に外観を示す磁気ヘッ
ドを作製し、図3、4に示した磁気ディスク装置に組み
込んだ。図11は、判りやすくするために磁気ヘッド構
造の断面を示したものである。本実施例の磁気ヘッド
は、アルミナなどの非磁性絶縁体中に導体部41を形成
した後に短冊状に切り出した構造体の負荷付与手段42
の端面に、図1及び図2に示した構造を有するヘッド素
子43を形成したものである。磁気ヘッドの軽量化、小
型化とともに加工マージン、接続のマージンは小さく、
厳しいものになるのに対して、このように負荷付与手段
42と接続導体部41を一体に集積することにより、負
荷付与手段42と記録再生に係るヘッド素子43との機
械的、及び電気的な接続の工程の短縮と、接続のマージ
ンの確保をすることができる。
Example 3 A magnetic head having the appearance shown in FIG. 10 was produced and incorporated into the magnetic disk device shown in FIGS. FIG. 11 shows a cross section of the magnetic head structure for the sake of clarity. In the magnetic head of the present embodiment, the load applying means 42 of the structure cut out in a strip shape after the conductor portion 41 is formed in a non-magnetic insulator such as alumina.
The head element 43 having the structure shown in FIGS. 1 and 2 is formed on the end face of the head. As the magnetic head becomes lighter and smaller, the processing margin and connection margin are smaller,
In contrast to this, the load applying means 42 and the connecting conductor portion 41 are integrally integrated in this way, so that the load applying means 42 and the head element 43 for recording and reproduction are mechanically and electrically integrated. The connection process can be shortened and the connection margin can be secured.

【0041】磁気ヘッド43の磁気記録媒体2に対向す
る面に少なくとも1つ、望ましくは3つの突起44、4
5、46を設けることで、磁気ヘッド43が磁気記録媒
体2に接する面積を小さくすることができ、その結果、
停止した期間の後の磁気ディスク装置の起動時に、磁気
ヘッド43と磁気記録媒体2が粘着することを低減する
ことができる。突起44〜46の形状は円柱、円錐台あ
るいは台形状とし、その高さは20μm程度とするのが
好ましい。この場合、磁気ヘッド43は、基板51上に
磁性膜52、保護膜53及び潤滑膜54を積層した磁気
記録媒体2の表面に接触摺動して情報の記録及び再生を
行う。
At least one, preferably three protrusions 44, 4 are provided on the surface of the magnetic head 43 facing the magnetic recording medium 2.
By providing Nos. 5 and 46, the area in which the magnetic head 43 contacts the magnetic recording medium 2 can be reduced, and as a result,
It is possible to reduce the adhesion between the magnetic head 43 and the magnetic recording medium 2 when the magnetic disk device is started after the stopped period. The shape of the protrusions 44 to 46 is a cylinder, a truncated cone or a trapezoid, and the height thereof is preferably about 20 μm. In this case, the magnetic head 43 contacts and slides on the surface of the magnetic recording medium 2 in which the magnetic film 52, the protective film 53, and the lubricating film 54 are laminated on the substrate 51 to record and reproduce information.

【0042】また、突起を3つ設け、これらの3つの突
起を磁気記録媒体2の表面に負荷付与手段42を用いて
押し付けることで、磁気ヘッド43の姿勢を一定に保つ
ことができ、その結果、磁気ヘッド43の磁極先端47
と磁気記録媒体2のスペーシングが変動することを抑え
ることができる。3つの突起の内の1つ46に磁気ヘッ
ド磁極47先端を配置すると、磁気ヘッド43と磁気記
録媒体2のスペーシングを小さくすることができ、さら
に、この突起部46の磁気記録媒体2に対向する面の面
積を小さくすることで記録媒体2表面の凹凸に載った時
に生ずる磁気ヘッド43先端と磁気記録媒体2のスペー
シングの増加を抑えることができる。
Further, by providing three protrusions and pressing these three protrusions against the surface of the magnetic recording medium 2 using the load applying means 42, the attitude of the magnetic head 43 can be kept constant, and as a result, , The magnetic pole tip 47 of the magnetic head 43
Therefore, it is possible to prevent the spacing of the magnetic recording medium 2 from varying. When the tip of the magnetic head magnetic pole 47 is arranged on one of the three protrusions 46, the spacing between the magnetic head 43 and the magnetic recording medium 2 can be reduced, and the protrusion 46 faces the magnetic recording medium 2. By reducing the area of the surface of the magnetic recording medium 2, it is possible to suppress an increase in the spacing between the tip of the magnetic head 43 and the magnetic recording medium 2 which occurs when the recording medium 2 is placed on the uneven surface.

【0043】本実施例に基づく磁気ディスク装置におい
ては、磁気ヘッド43及び負荷付与手段42の質量を小
さくすることで、また、付与する負荷を大きくすること
で媒体2表面の凹凸によって磁気ヘッド素子43が磁気
記録媒体2表面から飛び離れることを防ぐことができ、
磁気記録媒体2表面をヘッド先端46で安定に追従する
ことができる。しかしながら、付与する負荷を大きくす
ると、突起部44、45及び46の先端の磁気記録媒体
2に対向する面の面積が小さいために、単位面積あたり
の荷重、すなわち面圧が大きくなって突起44、45及
び46の摩耗が大きくなるという問題がある。
In the magnetic disk device according to the present embodiment, the magnetic head element 43 is formed by the unevenness of the surface of the medium 2 by reducing the mass of the magnetic head 43 and the load applying means 42 and increasing the applied load. Can be prevented from flying away from the surface of the magnetic recording medium 2.
The head tip 46 can stably follow the surface of the magnetic recording medium 2. However, when the applied load is increased, the load per unit area, that is, the surface pressure is increased because the area of the surfaces of the tips of the protrusions 44, 45, and 46 facing the magnetic recording medium 2 is small, and the protrusions 44, There is a problem that the wear of 45 and 46 becomes large.

【0044】一方、このような摩耗の少ない荷重の範囲
で、たとえば磁気ヘッド素子43及び負荷付与手段42
の加工の誤差や負荷付与手段42の取り付けの誤差に起
因する、3つの突起のうちの1〜2個しか磁気記録媒体
2に接しないという片当たり状態を解決して、3つの突
起44、45及び46が磁気記録媒体2表面にすべて接
するようにするためには、3つの突起の中心間隔を大き
くしなければならないことがわかった。これらの制約を
考慮して、磁気ヘッド43及び負荷付与手段42の有効
質量、すなわち磁気ヘッド43及び負荷付与手段42の
質量を磁気ヘッドと磁気記録媒体の接触点が作る三角形
の重心点に働く集中荷重として換算して得られる質量を
検討したところ、1.5〜2.0mgの範囲であり、一
方付与すべき負荷は50〜500mgの範囲であること
がわかった。
On the other hand, in such a load range with less wear, for example, the magnetic head element 43 and the load applying means 42.
Of the three protrusions 44, 45 by solving the one-sided contact state in which only one or two of the three protrusions are in contact with the magnetic recording medium 2 due to an error in the processing of the above and an error in the attachment of the load applying means 42. It was found that the distance between the centers of the three protrusions must be increased in order that all of the projections 46 and 46 contact the surface of the magnetic recording medium 2. Considering these restrictions, the effective mass of the magnetic head 43 and the load applying means 42, that is, the mass of the magnetic head 43 and the load applying means 42 acts on the center of gravity of the triangle formed by the contact point between the magnetic head and the magnetic recording medium. When the mass obtained as a load was examined, it was found to be in the range of 1.5 to 2.0 mg, while the load to be applied was in the range of 50 to 500 mg.

【0045】[0045]

【発明の効果】本発明によると、記録再生の磁気ギャッ
プを一つにすることができ、従来の記録再生機能分離型
磁気ヘッドに見られた記録ギャップ、再生ギャップ間に
距離があることに起因する記録ヘッド、再生ヘッドのト
ラックずれを防ぐことができる。また、MR素子が直接
磁気記録媒体に接触しない構造であるため、MRヘッド
の熱出力(TA:Thermal Asperity)を抑制することが
できる。更に、本発明の磁気ヘッドを用いるとトラック
密度を高くすることができるため、大容量の磁気ディス
ク装置を実現することができる。
According to the present invention, the magnetic gaps for recording and reproduction can be made to be one, and there is a distance between the recording gap and the reproduction gap found in the conventional magnetic head with separated recording and reproduction functions. It is possible to prevent track deviations of the recording head and the reproducing head that operate. Further, since the MR element does not directly contact the magnetic recording medium, the thermal output (TA: Thermal Asperity) of the MR head can be suppressed. Furthermore, since the track density can be increased by using the magnetic head of the present invention, a large-capacity magnetic disk device can be realized.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による磁気ヘッドの一実施例の主要部の
説明図。
FIG. 1 is an explanatory diagram of a main part of an embodiment of a magnetic head according to the present invention.

【図2】図1に示した磁気ヘッドの断面図。2 is a cross-sectional view of the magnetic head shown in FIG.

【図3】磁気ディスク装置の概略平面図。FIG. 3 is a schematic plan view of a magnetic disk device.

【図4】磁気ディスク装置の概略断面図。FIG. 4 is a schematic cross-sectional view of a magnetic disk device.

【図5】MR素子の構造を示す図。FIG. 5 is a diagram showing a structure of an MR element.

【図6】本発明による磁気ヘッドの他の実施例の主要部
の説明図。
FIG. 6 is an explanatory diagram of a main part of another embodiment of the magnetic head according to the present invention.

【図7】図6に示した磁気ヘッドの説明図。7 is an explanatory view of the magnetic head shown in FIG.

【図8】図7に対応する磁気ヘッドの平面図。8 is a plan view of the magnetic head corresponding to FIG.

【図9】本発明による磁気ヘッドの他の実施例の断面
図。
FIG. 9 is a sectional view of another embodiment of the magnetic head according to the present invention.

【図10】本発明による磁気ヘッドの他の実施例の概観
図。
FIG. 10 is a schematic view of another embodiment of the magnetic head according to the present invention.

【図11】図10に示した磁気ヘッドの断面説明図。11 is a cross-sectional explanatory diagram of the magnetic head shown in FIG.

【符号の説明】[Explanation of symbols]

1…スピンドル軸、2…磁気記録媒体、3…ロータリー
アクチュエータ、4…アーム、5…サスペンション、6
…磁気ヘッド、11…溝、12…非磁性基板、13…絶
縁層、14…下部磁極、15…絶縁体、16…アルミナ
絶縁膜、17…SAL膜、18…シャント膜、19…M
R膜、21…フラックスガイド、22…ヨーク部、23
…バックギャップ、24…反強磁性膜、25…電極、2
6…絶縁膜、27…磁極、28…非磁性絶縁膜、29…
導体コイル、30…絶縁膜、31…ヨーク部、34…下
部磁極、35…磁気ギャップ、36…磁極、41…導
体、42…負荷付与手段、43…磁気ヘッド素子、4
4,45,46…突起、47…磁気ヘッド磁極先端部、
51…基板、52…磁性膜、53…保護膜、54…潤滑
膜、61…媒体対向面、a…素子高さ、b…ギャップ深
1 ... Spindle shaft, 2 ... Magnetic recording medium, 3 ... Rotary actuator, 4 ... Arm, 5 ... Suspension, 6
... magnetic head, 11 ... groove, 12 ... non-magnetic substrate, 13 ... insulating layer, 14 ... lower magnetic pole, 15 ... insulator, 16 ... alumina insulating film, 17 ... SAL film, 18 ... shunt film, 19 ... M
R film, 21 ... Flux guide, 22 ... Yoke part, 23
... back gap, 24 ... antiferromagnetic film, 25 ... electrode, 2
6 ... Insulating film, 27 ... Magnetic pole, 28 ... Non-magnetic insulating film, 29 ...
Conductor coil, 30 ... Insulating film, 31 ... Yoke part, 34 ... Lower magnetic pole, 35 ... Magnetic gap, 36 ... Magnetic pole, 41 ... Conductor, 42 ... Load applying means, 43 ... Magnetic head element, 4
4, 45, 46 ... Protrusion, 47 ... Magnetic head magnetic pole tip,
51 ... Substrate, 52 ... Magnetic film, 53 ... Protective film, 54 ... Lubrication film, 61 ... Medium facing surface, a ... Element height, b ... Gap depth

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 第1の磁極と、前記第1の磁極と磁気的
に結合されたヨークと、前記ヨークと磁気的に結合され
た第2の磁極と、前記第1の磁極、ヨーク及び第2の磁
極を含む磁気回路に鎖交するコイルと、磁気抵抗効果素
子と、前記第1の磁極と前記磁気抵抗効果素子を磁気的
に結合する磁性膜と、前記磁気抵抗効果素子と前記第2
の磁極を磁気的に結合する磁性膜とを含み、記録時には
前記第1の磁極、ヨーク及び第2の磁極を含む磁気回路
に大部分の磁束が通り、再生時には前記第1の磁極、磁
気抵抗効果素子及び第2の磁極を含む磁気回路に大部分
の磁束が通るように各磁気回路の磁気抵抗及び飽和磁束
密度を調整したことを特徴とする記録再生機能分離型磁
気ヘッド。
1. A first magnetic pole, a yoke magnetically coupled to the first magnetic pole, a second magnetic pole magnetically coupled to the yoke, the first magnetic pole, the yoke and the first magnetic pole. A coil interlinking with a magnetic circuit including two magnetic poles, a magnetoresistive effect element, a magnetic film magnetically coupling the first magnetic pole and the magnetoresistive effect element, the magnetoresistive effect element and the second magnetic field.
Most magnetic flux passes through the magnetic circuit including the first magnetic pole, the yoke and the second magnetic pole during recording, and the first magnetic pole and magnetic resistance during reproduction. A recording / reproducing function separated type magnetic head, wherein the magnetic resistance and saturation magnetic flux density of each magnetic circuit are adjusted so that most of the magnetic flux passes through the magnetic circuit including the effect element and the second magnetic pole.
【請求項2】 非磁性基板上に形成された第1の磁性膜
と、前記第1の磁性膜上に非磁性絶縁膜を介して配置さ
れた磁気抵抗効果素子と、前記第1の磁性膜上に絶縁膜
を介して形成され磁気記録媒体と対向する面から前記磁
気抵抗効果素子の一端に到る第2の磁性膜と、前記磁気
抵抗効果素子の他端と前記第1の磁性膜とを磁気的に接
続する第3の磁性膜と、前記第2の磁性膜上に形成され
た第4の磁性膜と、前記第4の磁性膜上に絶縁膜を介し
て形成され先端部分が磁気記録媒体と対向する面から所
定距離だけ引っ込み後端が前記第1の磁性膜と磁気的に
結合されたヨークと、前記第1の磁性膜、ヨーク及び第
4の磁性膜で形成される磁気回路と鎖交するコイルとを
含み、前記第1の磁性膜と第2の磁性膜間の間隙は磁気
ギャップを構成し、前記第2及び第3の磁性膜は前記第
1及び第4の磁性膜並びに前記ヨークに比較して膜厚が
薄く、また前記第4の磁性膜から前記ヨークを経て前記
第1の磁性膜に到る磁気抵抗は前記第4の磁性膜から前
記第2の磁性膜、磁気抵抗効果素子及び前記第3の磁性
膜を経て前記第1の磁性膜に到る磁気抵抗より大きいこ
とを特徴とする記録再生機能分離型磁気ヘッド。
2. A first magnetic film formed on a non-magnetic substrate, a magnetoresistive effect element arranged on the first magnetic film via a non-magnetic insulating film, and the first magnetic film. A second magnetic film formed on the upper surface of the magnetoresistive effect element from an opposite surface facing the magnetic recording medium to one end of the magnetoresistive effect element; the other end of the magnetoresistive effect element; and the first magnetic film. And a fourth magnetic film formed on the second magnetic film, and a tip portion formed on the fourth magnetic film via an insulating film is magnetic. A magnetic circuit formed by a yoke whose rear end retracted by a predetermined distance from the surface facing the recording medium is magnetically coupled to the first magnetic film, and the first magnetic film, the yoke, and the fourth magnetic film. And a gap between the first magnetic film and the second magnetic film to form a magnetic gap. The second and third magnetic films have a smaller film thickness than the first and fourth magnetic films and the yoke, and the fourth magnetic film passes through the yoke to the first magnetic film. The magnetic resistance reaching the first magnetic film is higher than the magnetic resistance reaching the first magnetic film from the fourth magnetic film through the second magnetic film, the magnetoresistive effect element, and the third magnetic film. Separate recording / playback function type magnetic head.
【請求項3】 非磁性基板上に形成された磁気抵抗効果
素子と、磁気記録媒体と対向する面と前記磁気抵抗効果
素子の一端の間に磁気抵抗効果素子に重ならないように
配置された第1の磁性膜と、前記磁気抵抗効果素子側方
を通り磁気記録媒体と対向する面と前記磁気抵抗効果素
子の他端の間に磁気抵抗効果素子と重ならないように配
置された第2の磁性膜と、前記第1の磁性膜と前記磁気
抵抗効果素子の一端とを磁気的に接続する第3の磁性膜
と、前記磁気抵抗効果素子の他端と前記第2の磁性膜の
間を磁気的に接続する第4の磁性膜と、前記第1の磁性
膜上に絶縁膜を介して形成され先端部分が磁気記録媒体
と対向する面から所定距離だけ引っ込み後端が前記第2
の磁性膜と磁気的に結合されたヨークと、前記第1の磁
性膜、ヨーク及び第2の磁性膜で形成される磁気回路と
鎖交するコイルとを含み、前記第1の磁性膜と第2の磁
性膜間の間隙は磁気ギャップを構成し、前記第3及び第
4の磁性膜は前記第1及び第2の磁性膜並びに前記ヨー
クに比較して膜厚が薄く、また前記第1の磁性膜から前
記ヨークを経て前記第2の磁性膜に到る磁気抵抗は前記
第1の磁性膜から前記第3の磁性膜、磁気抵抗効果素子
及び前記第4の磁性膜を経て前記第2の磁性膜に到る磁
気抵抗より大きいことを特徴とする記録再生機能分離型
磁気ヘッド。
3. A magnetoresistive effect element formed on a non-magnetic substrate, and a magnetoresistive effect element arranged between a surface facing a magnetic recording medium and one end of the magnetoresistive effect element so as not to overlap the magnetoresistive effect element. No. 1 magnetic film, a second magnetic layer disposed between the surface of the magnetoresistive effect element that is lateral to the magnetoresistive effect element and the other end of the magnetoresistive effect element so as not to overlap the magnetoresistive effect element. A film, a third magnetic film that magnetically connects the first magnetic film and one end of the magnetoresistive effect element, and a magnetic field between the other end of the magnetoresistive effect element and the second magnetic film. Electrically connected to the fourth magnetic film, and the tip end portion formed on the first magnetic film via an insulating film is retracted from the surface facing the magnetic recording medium by a predetermined distance, and the rear end is the second magnetic film.
A magnetically coupled yoke with the first magnetic film, and a coil interlinking with the magnetic circuit formed by the first magnetic film, the yoke and the second magnetic film. The gap between the two magnetic films constitutes a magnetic gap, and the third and fourth magnetic films are thinner than the first and second magnetic films and the yoke, and the first and second magnetic films are thin. The magnetic resistance from the magnetic film to the second magnetic film via the yoke is the second magnetic film from the first magnetic film to the third magnetic film, the magnetoresistive effect element and the fourth magnetic film. A recording / reproducing function-separated type magnetic head having a magnetic resistance higher than that of a magnetic film.
【請求項4】 磁気ヘッドを担持するスライダの磁気記
録媒体に対向する面に1個又は複数個の突起部を備え、
前記突起部の1つに磁気ギャップを構成する磁性膜を含
むことを特徴とする請求項1、2又は3記載の記録再生
機能分離型磁気ヘッド。
4. A slider carrying a magnetic head is provided with one or a plurality of protrusions on a surface facing a magnetic recording medium,
4. The recording / reproducing function separated type magnetic head according to claim 1, wherein one of the protrusions includes a magnetic film forming a magnetic gap.
【請求項5】 磁気記録媒体と、磁気記録媒体にデータ
を記録再生する磁気ヘッドと、前記磁気記録媒体上で磁
気ヘッドを移動させるアクチュエータとを備えてなる磁
気ディスク装置おいて、磁気ヘッドとして請求項1〜4
のいずれか1項記載の記録再生機能分離型磁気ヘッドを
用いたことを特徴とする磁気ディスク装置。
5. A magnetic disk device comprising a magnetic recording medium, a magnetic head for recording and reproducing data on and from the magnetic recording medium, and an actuator for moving the magnetic head on the magnetic recording medium. Items 1 to 4
A magnetic disk drive using the recording / reproducing function-separated type magnetic head described in any one of 1.
【請求項6】 磁気ヘッドと磁気記録媒体が潤滑膜を介
して接して連続的に摺動することを特徴とする請求項5
記載の磁気ディスク装置。
6. The magnetic head and the magnetic recording medium are in contact with each other through a lubricating film and continuously slide.
The magnetic disk device described.
【請求項7】 磁気ヘッド磁極先端と磁気記録媒体磁性
膜表面の間の距離が10nm以上、50nm以下である
ことを特徴とする請求項5記載の磁気ディスク装置。
7. The magnetic disk drive according to claim 5, wherein the distance between the magnetic pole tip of the magnetic head and the magnetic film surface of the magnetic recording medium is 10 nm or more and 50 nm or less.
【請求項8】 磁気ヘッドと、前記磁気ヘッドを磁気記
録媒体に接触させるための負荷付与手段と前記磁気ヘッ
ドに接続される導体を一体に集積したことを特徴とする
請求項5、6又は7記載の磁気ディスク装置。
8. A magnetic head, a load applying means for bringing the magnetic head into contact with a magnetic recording medium, and a conductor connected to the magnetic head, which are integrated together. The magnetic disk device described.
【請求項9】 磁気記録媒体は直径が6.35cm以下
であり、磁気ヘッドの有効質量は1.5以上、2.0m
g以下であり、前記負荷付与手段による付与負荷は50
mg以上、500mg以下であることを特徴とする請求
項6記載の磁気ディスク装置。
9. The magnetic recording medium has a diameter of 6.35 cm or less, and the effective mass of the magnetic head is 1.5 or more and 2.0 m.
g or less, and the load applied by the load applying means is 50
7. The magnetic disk device according to claim 6, wherein the amount is not less than mg and not more than 500 mg.
JP29850994A 1994-12-01 1994-12-01 Magnetic head and magnetic disc apparatus Pending JPH08161712A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29850994A JPH08161712A (en) 1994-12-01 1994-12-01 Magnetic head and magnetic disc apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29850994A JPH08161712A (en) 1994-12-01 1994-12-01 Magnetic head and magnetic disc apparatus

Publications (1)

Publication Number Publication Date
JPH08161712A true JPH08161712A (en) 1996-06-21

Family

ID=17860643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29850994A Pending JPH08161712A (en) 1994-12-01 1994-12-01 Magnetic head and magnetic disc apparatus

Country Status (1)

Country Link
JP (1) JPH08161712A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6888705B2 (en) * 2002-01-18 2005-05-03 Hitachi Global Storage Technologies Netherlands B.V. High linear density tunnel junction flux guide read head with in-stack longitudinal bias stack (LBS)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6888705B2 (en) * 2002-01-18 2005-05-03 Hitachi Global Storage Technologies Netherlands B.V. High linear density tunnel junction flux guide read head with in-stack longitudinal bias stack (LBS)

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