JPH08159329A - Gas pressure operated valve - Google Patents

Abstract

PURPOSE: To provide a gas pressure operated valve allowing the fitting of a valve opening limiting mechanism, a valve operation detecting mechanism or the like at low cost and with the freedom of design. CONSTITUTION: An opening limiting mechanism 10 is formed out of a fixed member 11 connected to a diaphragm valve, a shaft 12 screwed to the internal side of the member 11, a lock member 14 to secure the section 12 to the member 11, and the like. Also, the feed section 11b of the member 11 has a connection port 11d formed for connecting a pneumatic joint 15 fitted to a compressed air feed tube 15a. The port lid is communicated to the feed section 11b of the member 11, and the compressed air is supplied from the feed section 11b to a drive section 8 through a feed port 7 via the hollow section 12a of the shaft 12.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas pressure operated valve,
In particular, the present invention relates to a gas pressure operated valve used for fluid control in a gas or fluid control piping system.

[0002]

2. Description of the Related Art Gas pressure operated valves as described above are, for example,
It is used in the gas piping system of ultra-high purity gas used in the production line of semiconductor and liquid crystal production lines. In this type of gas pressure actuated valve, an internal piston is moved by an operation fluid, for example, operation air, to perform an opening / closing operation. Conventionally, in order to limit the valve opening degree in this type of gas pressure operated valve, a configuration may be adopted in which a valve opening degree limiting (flow rate limiting) mechanism that limits the movement of the piston is provided in the gas pressure operated valve.

As such a valve opening degree limiting mechanism, conventionally, a structure in which a stop valve and a flow rate adjusting valve are connected in series is known. In this configuration, the function of restricting the opening of the valve is shared by the flow rate adjusting valve, and the function of shutting off is shared by the stop valve. Further, in this case, the driving portion (cylinder) of the gas pressure operated valve is processed for mounting the valve opening degree limiting mechanism, for example, threaded for screwing in the shaft.

On the other hand, for example, in a system provided with the above gas piping system, it is necessary to detect whether the valve opening / closing operation has been correctly performed for automatic operation of the system. In such a case, conventionally, a configuration has been used in which a drive mechanism of the gas pressure operated valve is provided with a detection mechanism for the opening / closing operation to confirm the opening / closing operation of the gas pressure operated valve. An example of a gas pressure operated valve equipped with this type of valve operation detection mechanism is shown in FIG.

The gas pressure operated valve shown in FIG. 12 is an NC (normally closed) type metal diaphragm valve 100 which is closed when the operating air is shut off. Therefore, when the working air is cut off, the repulsive force of the spring 78 causes the piston 73 to move.
As a result, the output shaft 79 and the drive shaft 80 provided at the lower end of the piston 73 are both pushed down, and the metal diaphragm 81 is pressed against the valve seat 82 to close the valve. Further, an inflow port 83 and an outflow port 84 are formed in the main body 71.

When the working air is supplied from the working air supply hole 72, the working air is supplied to the cylinder chamber 8.
6, the piston 73 is pushed up against the repulsive force of the spring 78, and the downward pushing force of the drive shaft 80 loaded on the metal diaphragm 81 disappears.
Then, in this state, the metal diaphragm 81 separates from the valve seat 82 by its own restoring force and the valve opens. FIG. 12 shows the state in which this valve is open.

Here, the valve operation detecting mechanism has a proximity switch 74, and in the illustrated example, the proximity switch 74 is connected to the control panel CP of the system via a wire (electric wire) 75. Further, the proximity switch 74 is inserted into a through hole 88 formed by punching an outer shell 87 of the drive unit 70 having an air introduction passage 85 at the center,
It is attached to the outer shell 87 by a spacer 77 and a nut 76. When the valve actuation mechanism is provided in the drive unit 70 as described above, the drive unit 70 is usually processed to fix the detection mechanism.

In this conventional example, the rise of the piston 73 when the working air is supplied from the supply hole 72 is detected by the movement of the upper end portion 73a of the piston 73 by the proximity switch 74. And this detection signal (pulse signal)
Is transmitted to the control panel CP via the wiring 75. Conversely, when the piston 73 descends, its movement is also detected by the proximity switch 74 and transmitted to the control panel CP. In this way, the valve operation detection unit can detect that the valve opening / closing operation has been reliably performed.

[0009]

However, in the conventional gas pressure operated valve described above, it is necessary to perform processing for attaching the valve opening degree limiting mechanism of the drive unit or the valve operation detection unit to the drive unit. Therefore, there is a problem that the cost is increased and freedom in design is limited.

In other words, the necessity of providing the valve opening limiting mechanism and the valve operation detecting mechanism depends on the situation of the process in which the gas pressure operated valve is used, etc., and therefore it is currently handled by changing the specifications. However, when such a specification change is made, it is necessary to perform drilling (screw processing) for screwing these mechanisms at appropriate places on the drive unit. However, in the production process, such processing increases the cost, and after the processing, it is virtually impossible to remove the valve opening degree limiting mechanism and the like, which limits the freedom of design. And when such a processing is not possible when these valve opening limiting mechanisms and valve operation detecting parts are needed after piping due to changes in specifications, etc., the valve opening limiting device and valve operation detecting parts, etc. Cannot be provided.

In addition, in the conventional example in which the valve opening limiting mechanism is provided, the structure in which the stop valve and the flow rate adjusting valve are mounted as described above has a problem that an extra space for installation is required.

The object of the present invention is to eliminate the above-mentioned problems and to provide a valve opening degree limiting mechanism, a valve operation detecting mechanism, etc. at a low cost with a small degree of freedom in design, and in a small space. To provide a gas pressure operated valve.

[0013]

In order to achieve the above object, the main constitution of the first invention according to the present invention is to provide a supply hole for an operation gas, and to use the operation gas pressure introduced from the supply hole to provide the operation gas. A gas pressure operated valve that opens and closes a valve by vertically moving a drive unit provided inside a supply hole, comprising a valve opening degree limiting mechanism attached to the supply hole, wherein the valve opening degree limiting mechanism is It has a connection port for connecting the operation gas to the supply hole, and a valve opening degree regulation member for regulating the range of movement of the drive unit.

Further, the main constitution of the second invention according to the present invention is that it comprises an operation gas supply hole, and a drive portion provided inside the supply hole is moved up and down by the operation gas pressure introduced from the supply hole. A gas pressure operated valve that moves and opens and closes a valve, comprising a valve operation detection mechanism attached to the supply hole, the valve operation detection mechanism having a connection port for connecting the operation gas to the supply hole. And a valve actuation detection unit that is turned on and off by the movement of the drive unit.

[0015]

In the first aspect of the invention, the valve opening degree of the drive unit is adjusted by regulating the upper limit position of the movement of the drive unit of the gas pressure operated valve by the valve opening degree regulating member. Further, in the second aspect of the invention, the operation of the valve can be detected by turning on and off the switch of the valve operation detection unit provided outside by the movement of the drive unit.

By installing the valve opening limiting mechanism and the valve operation detecting mechanism as described above in the gas supply hole for operating the gas pressure operated valve, the valve opening limiting function and the valve operation detecting function are added. Therefore, it is possible to eliminate special processing for this, and thereby it is possible to easily retrofit the valve opening degree limiting mechanism, the valve operation detecting mechanism, and the like when the usage is changed.

Further, if each of the above mechanisms is attached to the supply hole of the gas pressure operated valve, the same valve opening restriction is applied to the gas pressure operated valve having the same structure of the drive part (piston) and the supply hole. A mechanism or a valve operation detection mechanism can be used, and the cost can be reduced.

[0018]

Embodiments of the present invention will be described below.

(Embodiment 1) FIG. 1 shows an embodiment of a gas pressure operated valve having an opening degree limiting mechanism according to the first aspect of the present invention. In this embodiment, the opening degree restricting mechanism 10 is attached to a diaphragm valve. 2 and 3 show other drawings of the opening degree limiting mechanism 10.

This diaphragm valve is a NO (normally open) type valve that opens when the operating air is cut off.
It has a main body 1, a valve seat 2, a seat holder 3, a diaphragm 4, an actuator cover 5, a supply hole 7 for compressed air which is an operation gas, a piston (driving part) 8 and an airtight ring 9.

The body 1 is made of, for example, stainless steel (S
US), an inflow passage 1a and an outflow passage 1b for the fluid.
have. The valve seat 2 is made of, for example, trifluorochloroethylene resin (PCTFE) or the like, and has the above-described inflow passage 1
The seal member is formed concentrically with the opening of a and forms a valve seat of the diaphragm 4, and is compressed by the pressing force of the diaphragm 4.

The seat holder 3 is made of, for example, stainless steel, and serves both as a fixing member for the valve seat 2 and as a stopper for the diaphragm 4.

The diaphragm 4 has a flexible structure made of, for example, a nickel alloy and is a valve for adjusting the flow rate of fluid. In the free state, the diaphragm 4 has the inflow passage 1
It is located above the opening of the flow passage formed between a and the outflow passage 1b, and connects the inflow passage 1a and the outflow passage 1b. Further, when the diaphragm 4 is pressed and comes into contact with the valve seat 2, the opening of the inflow passage 1a is sealed, and thus the inflow passage 1a and the outflow passage 1b are blocked.

The actuator cover 5 is a cover of a piston (driving section) 8 that controls the operation of the diaphragm 4. The diaphragm valve of the embodiment is an air-driven type, and when compressed air is supplied from the supply hole 7, the piston (driving part) 8 is pushed down to bring the diaphragm 4 into pressure contact with the valve seat 2.

On the other hand, the opening limiting mechanism 10 includes a fixing member 11 and a fixing member 11 attached to the diaphragm valve.
Shaft portion 12 screwed into the inside of the shaft, an O-ring 13 arranged between the outer circumference of the shaft portion 12 and the inner circumference of the fixing member 11, and a lock member 14 for fixing the shaft portion 12 to the fixing member 11. Composed of.

The fixing member 11 has a connecting portion 11a in which a screw groove formed on the outer periphery of the screw groove formed on the inner periphery of the supply hole 7 of the diaphragm valve is screwed, and the connecting portion 11a.
And a compressed air supply portion 11b arranged in parallel with each other. A hollow portion 11c that communicates with the supply hole 7 in the screwed state is formed inside the connection portion 11a. A connection port 11 to which the air joint 15 attached to the compressed air supply tube 15a is connected to the supply unit 11b.
d is formed. This connection port 11d has a hollow portion 11c.
Is in communication with.

The shaft portion 12 functions as a valve opening regulating member, and the thread groove formed on the inner circumference of the hollow portion 11c of the fixing member 11 is screwed into the thread groove on the outer circumference thereof. Inside the shaft portion 12, a hollow portion 12a communicating with the connection port 11d is formed. Also, the shaft portion 12
The lower end 12b of the piston 12 is located above the piston (driving portion) 8 with the opening degree restricting mechanism 10 attached to the supply hole 7. Then, by bringing the lower end portion 12b into contact with the upper end of the piston (driving portion) 8 as shown in the figure, the upward movement of the piston (driving portion) 8 is restricted.

The upper end portion 12c of the shaft portion 12 is located outside the opening degree limiting mechanism 10 so that an operator or the like can rotate the central portion by operating the concave groove in the central portion from the outside. Therefore, for example, a worker rotates the shaft portion 12 clockwise or counterclockwise with respect to the fixing member 11, and the thread groove formed on the outer periphery of the shaft portion 12 and the thread groove on the inner periphery of the hollow portion 11b are screwed together. Shaft member 1 by changing
2 moves upward or downward in FIG.

When the shaft portion 12 is moved downward as described above, the lock member 14 is rotated counterclockwise, for example, so that the shaft portion 12 and the fixing member 11 are fixed by the lock member 14. It is necessary to loosen the condition.
Further, when the shaft portion 12 is moved upward in FIG. 1, the fixing of the shaft portion 12 and the fixing member 11 by the locking member 14 is loosened, so that the locking member 14 is turned clockwise, for example, to move the space between them. Need to be fixed again.

In the gas pressure actuated valve of this embodiment having the above construction, the shaft portion 12 of the valve opening degree limiting mechanism 10 is appropriately moved upward or downward in FIG. The distance between the upper end of the piston (driving part) 8 located inside 7 and the lower end of the shaft part 12 is appropriately adjusted. Then, in a normal state in which compressed air that is an operation gas is not supplied to the supply hole 7, the spring 8
The repulsive force of a causes the piston (driving part) 8 to be pushed upward. As a result, the pressing force on the metal diaphragm 4 disappears and the valve is opened.

Here, when the valve is opened as described above, since the lower end of the shaft portion 12 is located above the piston (driving portion) 8 as described above, the upward movement of the piston (driving portion) 8 is The upper end of the piston (driving part) 8 is the shaft part 1.
It is stopped when it abuts the lower end of 2. Therefore, in the gas pressure operated valve of this embodiment, the degree of upward movement of the piston (driving portion) 8 can be limited by the opening degree limiting mechanism 10 to adjust the degree of valve opening, that is, the valve opening degree.

On the other hand, when compressed air is supplied from the supply unit 11b in this state, the compressed air is supplied to the supply unit 11b.
Is supplied to the piston (driving unit) 8 through the supply hole 7 through the hollow portion 12a of the shaft portion 12. Then, the piston (driving part) 8 is pushed down against the repulsive force of the spring 8a, and as a result, the metal diaphragm 4 is pushed down and brought into pressure contact with the valve seat 2 to close the valve.

When the supply of compressed air to the supply portion 11b is stopped, the downward pressing force on the metal diaphragm 4 disappears, so that the metal diaphragm 4 separates from the valve seat 2 by its own restoring force. The valve is opened again as shown in.

(Embodiment 2) FIG. 4 shows another embodiment of the first invention. In this embodiment, the opening degree limiting mechanism 30 is attached to an NC type diaphragm valve.

The diaphragm valve includes a main body 21 and a valve seat 2
2, a sheet holder 23, a diaphragm 24, an actuator cover 25, a compressed air supply hole 27, a piston (driving portion) 28, and an airtight ring 29. Here, the piston (driving unit) 28, as shown in the drawing, in a state where compressed air is not supplied from the supply hole 27,
It is pushed down by the repulsive force of the spring 28a, and as a result, the metal diaphragm 4 is pushed down and pressed against the valve seat 2, and the valve is closed. The other configuration of this diaphragm valve is the same as that of the diaphragm valve described in the first embodiment, and therefore the description thereof is omitted.

The opening restriction mechanism 30 includes a fixing member 31 attached to the diaphragm valve, a piston stopper 32 screwed into the fixing member 31, and a piston stopper 3.
2 and the O-ring 33 arranged between the outer circumference of the fixing member 31 and the inner circumference of the fixing member 31, and the piston stopper 32.
The lock member 34 for fixing to 1 and the like.

The fixing member 31 has a connecting portion 31a in which a screw groove formed on the outer circumference of the screw groove formed on the inner circumference of the supply hole 27 of the diaphragm valve is screwed, and the shaft 31 is formed on the inner circumference thereof. A thread groove 31b into which a thread groove formed on the outer circumference of the portion 32 is screwed is formed.

The piston stopper 32 functions as a valve opening regulating member, and as described above, the thread groove 31b of the fixing member 31 is screwed with the thread groove on the outer periphery thereof. Inside the piston stopper 32, the supply hole 2 of the diaphragm valve
A hollow portion 32a communicating with 7 is formed. The lower end portion 32b of the piston stopper 32 has an opening degree restricting mechanism 3
When 0 is attached to the supply hole 27, it is located above the piston (driving portion) 28. Then, as shown in the drawing, the lower end portion 32b is connected to the piston (driving portion) 2
The piston (driving part) 28
Movement is restricted in the upward direction.

Further, the upper end 32 of the piston stopper 32
c has a large diameter, and a nut portion as shown is formed on the outer periphery thereof. An operator or the like can operate the nut portion from the outside to rotate the piston stopper 32. Therefore, for example, when the worker rotates the piston stopper 32 in the clockwise direction or the counterclockwise direction with respect to the fixing member 31, the piston stopper 32 moves upward or downward in FIG. Here, the upper end 32 of the piston stopper 32
For example, an air joint attached to a compressed air supply tube is connected to c.

Incidentally, when moving the piston stopper 32 downward, it is necessary to rotate the lock member 34 counterclockwise, for example, to loosen the piston stopper 32 from the fixing member 31, as in the case of the above embodiment. . Also, when the piston stopper 32 is moved upward, the locking member 34 is rotated, for example, clockwise to fix the piston stopper 32 to the fixing member 31.

In the gas pressure operated valve of this embodiment, the shaft portion 32 of the valve opening degree limiting mechanism 30 is appropriately moved in the vertical direction so that the distance between the upper end of the piston (driving portion) 28 and the lower end of the shaft portion 32 is increased. Adjust accordingly. When the working air is cut off, the piston (driving part) 28 is pushed downward by the repulsive force of the spring 28a, and as a result, the metal diaphragm 24 is pressed by the valve seat 22 to close the valve.

On the other hand, when compressed air is supplied from the supply unit 31b in this state, the compressed air is supplied to the supply unit 31b.
Through the hollow portion 32a of the shaft portion 32 from the supply hole 27
And is supplied to the piston (driving unit) 28 via. For this reason, the piston (driving part) 28 is pushed up against the repulsive force of the spring, the downward pressing force applied to the metal diaphragm 24 disappears, and the metal diaphragm 24 separates from the valve seat 22 by its own restoring force. Valve opens.

Then, as described above, the piston (drive unit)
Since the lower end of the shaft portion 32 is located above the piston 28, the piston (driving portion) 28 moves upward when the piston (driving portion) 2 moves.
It is stopped when the upper end of 8 comes into contact with the lower end of the shaft portion 32. In this way, the valve opening restriction mechanism 30 regulates the upward movement of the piston (driving part) 28, and the valve opening of the diaphragm valve is adjusted.

Incidentally, FIG. 5 shows a similar opening limiting mechanism 30.
An example is shown in which the is attached to the NO type diaphragm valve described in FIG.

(Embodiment 3) Next, an embodiment of a gas pressure operated valve having a valve operation detecting mechanism according to the present invention will be described. Figure 6
FIG. 4 is a sectional view showing a valve operation detecting mechanism 40 of this embodiment. FIG. 7 is a view of FIG. 6 viewed from the arrow A, and FIG. 8 is a plan view of the same viewed from the arrow B. Further, FIG. 9 shows a state in which the valve operation detecting mechanism shown in FIG. 6 is mounted on an NC type metal diaphragm valve 100 having the same structure as that of FIG.

The valve operation detecting mechanism 40 includes a fixing member 41 attached to the diaphragm valve 100, a shaft portion 42 provided inside the fixing member 41 so as to be vertically movable or slidable, and a micro switch (limit). Switch) 43 and the like. An O-ring 48 is arranged between the outer circumference of the shaft portion 42 and the inner circumference of the fixing member 41. As the switch, a proximity switch or the like may be used instead of the micro switch (limit switch).

The fixed member 41 includes a diaphragm valve 100.
The connecting portion 41a screwed into the operation gas supply hole of the piston (driving portion) is provided. Also, this connecting portion 41
The a is formed integrally with a compressed air supply portion 41c that is formed in parallel with the supply portion 41a. In the supply section 41c,
A connection port 41d is formed to which an air joint 45 attached to a compressed air supply tube or the like (not shown) is connected. The connection port 41d communicates with the operation gas supply hole of the piston (driving part) of the diaphragm valve 100 via the connection part 41a. In FIG. 7, 41b
Is a supply part 41c and a connection part 41 in processing the compressed air flow path.
It forms a hole blindness that communicates with a.

The shaft portion 42 functions as a sliding member, and the lower end portion 42a thereof has a diaphragm valve 100.
Is in contact with the upper end of the piston (driving part). A bushing 41e press-fitted into the fixing member 41 is slidably inserted around the lower end of the shaft portion 42. Also,
The inner periphery of the fixing member 41 and the shaft portion 4 in the substantially central portion
A spring 47 arranged between the outer periphery of the shaft 2 and the outer periphery of the second presses the shaft portion 42 downward at its step portion 42c.
The upper end portion 42b of the shaft portion 42 projects from the upper portion of the fixing member 41. A thread groove is formed on the outer periphery of the upper end portion 42b, and two nuts 41 are formed in the thread groove.
f is fixed by sandwiching one end of the lever 46 between them and tightening.

By adjusting the fixing position of the shaft 42 by this fixing portion, the lower end portion 4 of the shaft portion 42 is adjusted.
The position of 2a is adjusted. Further, by adjusting the fixing position, the lower end portion 42a of the shaft portion 42 is brought into close contact with the upper portion of the piston (driving portion) of the diaphragm valve 100 in this manner, and as described later, the lower surface of the other end portion of the lever 46 and the micro switch. The contact state of 43 with the contact 43a is adjusted.

The other end of the lever 46 opposes the switch 43a of the micro switch 43 so that it can come into contact with and separate from the switch 43a. As shown in FIGS. 7 and 8, the micro switch 43 is a holder 4 that is screwed and fixed to a fixing member 41 with a bolt 43b.
4c is screwed by a bolt 44a and a nut 44b. As a result, the micro switch 43 is turned on and off by the vertical movement of the shaft portion 42, and the operation signal is input to the control panel CP.

An example in which the valve operation detecting mechanism 40 of the above embodiment is mounted on the same metal diaphragm valve 100 as the conventional example is shown in FIG. In this case, the connecting portion 41a of the fixing member 41 constituting the valve operation detecting mechanism is the metal diaphragm valve 100.
Of the piston (driving part) 70 is screwed into and connected to the working air supply hole 72.

In the gas pressure actuated valve thus constructed, the lever 46 is operated in a normal state in which compressed air is not supplied.
The other end of the micro switch 43 presses the switch 43a of the micro switch 43, whereby the ON signal of the micro switch 43 is output to the control panel CP.

On the other hand, from the air joint 45 to the connection port 41d,
When compressed air is supplied through the lower end 42a of the shaft member 42 and the supply hole 72, the diaphragm valve 1
At 00, the piston (driving part) 70 has a spring 78.
Moves upward against the repulsive force of. This upward movement pushes up the lower end portion 42a of the shaft portion 42, so that the shaft portion 42 moves upward together with the lever 46 while resisting the spring 47. Then, since the other end of the lever 46 fixed to the upper end of the shaft portion 42 and the contact point of the micro switch 43 are separated from each other, the micro switch 43
Is turned off, and this off signal is sent to the control panel CP.
Is output to

In this way, the valve operation detection mechanism 40 causes the piston (driving section) of the diaphragm valve 100.
The up-and-down movement of 70 and the opening / closing movement of the valve associated therewith are detected.

(Embodiment 4) FIG. 10 shows another embodiment of the valve operation detecting mechanism. In this valve operation detection mechanism, the supply portion 41c of compressed air or the like formed on the fixed member 41 in the valve operation mechanism 40 of the third embodiment is formed at a right angle to the extending direction of the shaft member 42. Other configurations are similar to those of the third embodiment. Therefore, the same reference numerals as those of the valve actuating mechanism 40 of the third embodiment are used for the respective constituent members.

(Embodiment 5) FIG. 11 shows another embodiment of the valve operation detecting mechanism. Also in this embodiment, the same reference numerals are used for the same components as in the third embodiment.

This valve operation detecting mechanism is basically the same as that of the above-mentioned fourth embodiment, but the fixing member 41 is provided in two parts, a connecting part 41A to the diaphragm valve 100 and a compressed air supplying part 41B. It is divided. And the supply portion 41
By making B rotatable with respect to the connection portion 41A, the joint direction of the supply air can be freely changed by 360 °. In order to be rotatable in this way, the connecting portion 41A is formed by the pair of spring pins 49.
And the supply part are connected.

Here, a rotation groove 49a in which the spring pin 49 is located is formed on the outer periphery of the connection portion 41A, and a fixing hole 49b for the spring pin 49 is formed in the supply portion 41B. Then, with the connecting portion 41A, the shaft member 42, and the like incorporated in the supply portion 41B, the spring pin 49 is driven into the fixing hole 49b of the supply portion 41B from the side, whereby the supply portion 41B rotates with respect to the connection member 41A. Can be freely attached.

[0059]

According to the present invention, the valve opening limiting mechanism and the valve operation detecting mechanism are attached to the operation gas supply hole of the gas pressure operated valve, and the upper limit position of the drive section is regulated by the valve opening regulating member to drive the valve. The valve opening by the part is adjusted,
Alternatively, the valve operation is detected by operating a switch provided outside by the movement of the drive unit. Therefore, special processing for adding the valve opening limit function, the valve operation detection function, etc. can be eliminated, and the valve opening restriction mechanism, the valve operation detection mechanism, etc. can be easily retrofitted.

Further, since each of the above-mentioned mechanisms is attached to the supply hole of the gas pressure operated valve, the same valve opening limiting mechanism and valve operation detection mechanism are installed in the gas pressure operated valve having the same structure of the drive unit and the supply hole. The cost can be reduced by being attached, and the valve opening degree limiting mechanism, the valve operation detecting mechanism, and the like can be provided at low cost with flexibility in design.

In addition, in the gas pressure operated valve having the valve operation detecting mechanism, the switch for outputting the opening / closing signal of the valve is exposed to the outside of the drive unit, so that the maintenance is easy and the operation of the valve can be confirmed. Can be easily performed and the safety of the entire system can be expected to be improved.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of a gas pressure operated valve with a valve opening degree limiting mechanism according to the present invention.

FIG. 2 is a top view of a valve opening degree limiting mechanism used in the embodiment of FIG.

FIG. 3 is a cross-sectional view of a valve opening degree limiting mechanism used in the embodiment of FIG.

FIG. 4 is a cross-sectional view showing another embodiment of a gas pressure operated valve with a valve opening degree limiting mechanism according to the present invention.

FIG. 5 is a cross-sectional view showing another embodiment of the gas pressure operated valve with the valve opening degree limiting mechanism according to the present invention.

FIG. 6 is a cross-sectional view of a valve operation detector used in an embodiment of a gas pressure operated valve having a valve operation detector according to the present invention.

FIG. 7 is an explanatory diagram of the valve operation detection unit of FIG. 6 viewed from the right side in FIG.

FIG. 8 is an explanatory diagram of the valve operation detection unit of FIG. 6 viewed from above in FIG.

9 is a cross-sectional view showing a state in which the gas pressure operated valve of FIG. 8 is attached to the valve.

FIG. 10 is a cross-sectional view of another valve operation detector according to the present invention.

FIG. 11 is a cross-sectional view of another valve operation detection unit according to the present invention.

FIG. 12 is a cross-sectional view showing a conventional example of a gas pressure operated valve having a valve operation detector.

[Explanation of symbols]

 1, 21, 71 Main body, 2, 22, 82 Valve seat, 3, 33, 81 Diaphragm, 7, 27, 72 Supply hole, 8, 28, 70 Drive part (piston), 10, 20 Opening restriction mechanism, 11 , 31, 41 fixing member, 12, 42 shaft member, 14, 34 locking member, 32 piston stopper, 43 micro switch.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koichi Murakami 5-1 Omemura, Kurokawa-gun, Miyagi Prefecture Kameoka 5-1 Motoyama Manufacturing Co., Ltd.

Claims (11)

[Claims] 1. A gas pressure operation which has a supply hole for an operation gas, and opens and closes a valve by vertically moving a drive unit provided inside the supply hole by the operation gas pressure introduced from the supply hole. A valve, comprising a valve opening degree restricting mechanism attached to the supply hole, wherein the valve opening degree restricting mechanism has a connection port for connecting the operation gas to the supply hole, and a range of movement of the drive unit. A gas pressure actuated valve having a valve opening regulating member for regulating the gas pressure. 2. A lower end portion of the valve opening regulating member is located above the drive portion, and an upper end portion of the valve opening regulating member is located outside the valve opening limiting mechanism. The gas pressure actuated valve according to claim 1. 3. The valve opening restricting mechanism has a fixing member connected to the supply hole, and the valve opening restricting member is movably attached to the fixing member. Or the gas pressure actuated valve according to 2. 4. The gas pressure operated valve according to claim 1, wherein the connection port is formed in the fixing member. 5. The gas pressure operated valve according to any one of claims 1 to 3, wherein the connection port is formed in the valve opening regulating member. 6. The gas pressure actuated valve according to claim 3, further comprising a lock member that fixes the valve opening degree regulation member to the fixed member. 7. A gas pressure operation which comprises a supply hole for an operation gas, and opens and closes a valve by vertically moving a drive unit provided inside the supply hole by the operation gas pressure introduced from the supply hole. A valve, comprising a valve operation detection mechanism attached to the supply hole, wherein the valve operation detection mechanism is turned on and off by moving a connection port for connecting the operation gas to the supply hole and the drive unit. A gas pressure operated valve having a valve operation detector that operates. 8. The valve operation detection mechanism includes a fixed member having the connection port formed therein, and the valve operation detection unit movable with respect to the fixed member, and the valve operation detection unit has a lower end portion thereof. A slidable sliding member that is in contact with the upper end of the drive unit,
The gas pressure operated valve according to claim 7, further comprising a switch that is operated by vertical movement of the sliding member. 9. The gas pressure operated valve according to claim 8, wherein the switch is a limit switch. 10. The gas pressure operated valve according to claim 8, wherein the switch is a proximity switch. 11. The gas pressure operated valve according to claim 8, wherein the switch is detachably attached.