JPH0815081A - Transferring device for vacuum chamber - Google Patents

Abstract

PURPOSE:To provide a transferring device for vacuum chamber which can avoid the deterioration of the airtightness maintaining ability of a vacuum chamber and, at the same time, can prevent the device from becoming larger in size and can suppress the prolongation of the cycle time required for carrying in/out objects to be transferred. CONSTITUTION:The shaft 3 of a transferring roller 2 has a recessed section 3a on one end side and is pivotally supported by a bearing 4 inserted into the hole lb of the side wall 1a of a vacuum chamber 1. The shaft 3 is engaged with the projecting section 5b of a flanged shaft 5 coupled to a motor 8. An 0-ring 6 is put on the external surface of the side wall 1a of the chamber 1 and the flange section 5c of the shaft 5 is pressed against the O-ring 6 so as to maintain the inside of the chamber 1 in an airtight state. The motor 8 is coupled to an air cylinder 9 through a coupling member 8a and, at the time of transferring a work, the flange section 5c is separated from the ring 6. When the chamber 1 is evacuated, the flange section 5c is closely adhered to the ring 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum chamber transfer device for moving a vacuum processing object by driving a transfer roller in the vacuum chamber by a shaft provided through a side wall of the vacuum chamber. When exhausting the inside of the chamber, the flange fixed to the shaft is brought into close contact with the sealing member to ensure the airtightness of the chamber, and when the vacuum processing object is moved, by separating the flange from the sealing member, It is intended to prevent wear of the sealing member and maintain the airtight holding performance of the chamber.

[0002]

2. Description of the Related Art Conventionally, for example, in a trace gas type leak detection system, a transfer device is used to carry a vacuum processed product (workpiece) into a vacuum chamber and carry out the vacuum processed product after inspection.

FIG. 3 is a schematic diagram showing an example of a trace gas type leak detection system. Vertically movable doors 22a and 22b are provided at the front and rear of the vacuum chamber 21, and the doors 22a and 22b are raised to carry in or carry out the vacuum processed product 23 into the vacuum chamber 21. It is supposed to do. Further, when the doors 22a and 22b are closed, the chamber 21 is kept airtight and the chamber 2
Chamber 2 by means of exhaust means (not shown) connected to 1
Exhaust in 1 becomes possible. Further, the chamber 21 is connected to a trace gas detecting means (not shown) so that the gas leaked from the vacuum processed material 23 to the chamber 21 can be detected as described later. Chamber 21
The transfer rollers 24 are arranged at a predetermined pitch on the bottom of the vacuum chamber 21.
It is adapted to be rotated by being driven by a driving means (not shown) provided outside the. Also, the vacuum chamber 2
Conveyors 25a and 25b are respectively arranged at the front and rear of 1.

The operation of such a trace gas detection system will be described. First, a trace gas such as helium is enclosed in the vacuum processing object 23 to be leak-checked, and this is transferred to the vacuum chamber 21 by the conveyor 25a. In this case, the doors 22a, 22 of the vacuum chamber 21
By raising b, the carry-in port and the carry-out port of the chamber 21 are opened. When the vacuum-processed object 23 reaches the carry-in port of the chamber 21, the transfer roller 24 is rotated by the driving means,
The entire vacuum processed product 23 is transferred into the chamber 21. When the vacuum processing object 23 moves to a predetermined position in the chamber 21, the transfer roller 24 stops rotating. Then door 2
After 2a and 22b descend and close the inlet and outlet,
The inside of the vacuum chamber 21 is exhausted by the exhaust means.

Next, when the pressure in the vacuum chamber 21 reaches a predetermined value, the presence or absence of the trace gas leaking from the vacuum processed material 23 into the vacuum chamber 21 or the leak amount is detected by the trace gas detecting means.

Next, after the leak detection test is completed, the inside of the vacuum chamber 21 is brought to atmospheric pressure. And the doors 22a, 22
b is opened, the transfer roller 24 is driven, and the vacuum processing object 2
3 is transferred to the conveyor 25. Vacuum processed product 23
Moves from the transfer roller 24 to the conveyor 25, and is further conveyed to the next step by the conveyor 25. At the same time, the next vacuum processed material 23
It is carried into the vacuum chamber 21 by 5a. In this way, the leak detection test can be continuously performed on a plurality of vacuum processed objects.

FIG. 4 is a schematic view showing an example of a conventional vacuum chamber transfer device used in the above trace gas type leak detection system. On the outside of the vacuum chamber 21, for example, a plurality of drive motors 30 are arranged corresponding to the respective transfer rollers in the chamber. The drive shaft 30 a of the drive motor 30 is connected to the roller shaft 26 via the coupling 29.
Is connected to one end side of. The roller shaft 26 is inserted through a hole 27 provided in the side wall 21a of the vacuum chamber 21, and the other end of the roller shaft 26 is rotatably supported by a bearing (not shown) provided inside the chamber 21. There is. Also,
The transfer roller 24 is fixed to the roller shaft 26.

A groove 27a extending in the circumferential direction is provided in an intermediate portion of the hole 27 formed in the side wall 21a, and an O-ring 28 is arranged in the groove 27a. The O-ring 28 is fitted on the roller shaft 26,
The airtightness of the chamber 21 is maintained by making airtight contact with the surface of the groove 27a.

In the transfer device constructed as described above,
When the inside of the chamber 21 is exhausted, the airtightness inside the chamber 21 is maintained by the O-ring 28. In addition, when moving the vacuum processing object, the roller shaft 26
Slides, and the driving force of the motor 30 is transmitted to the transfer roller 24.

FIG. 5 is a schematic view showing another example of the trace gas type leak detection system. The vacuum chamber 31 includes front and rear doors 32a, 32 that are vertically movable, respectively.
b is provided, and when the doors 32a and 32b are closed, the inside of the chamber 31 is hermetically sealed. Further, the chamber 31 is connected to an exhaust means and a trace gas detection means (neither is shown). Further, in the chamber 31, a plurality of rotatable rollers 37 are arranged at a predetermined pitch between the front part and the rear part of the chamber.

At the front of the chamber 31, a vacuum processed material transfer device 35 is arranged. The carrying device 35 is movable in the vertical direction and has an arm 34 which is movable in the horizontal direction. Also, at the tip of the arm 34,
A vacuum processed product mounting portion 34a on which the vacuum processed product 33 can be mounted is provided.

In such a trace gas detecting system, first, the vacuum processing object 33 filled with the trace gas.
Is placed on the mounting portion 34a of the vacuum processed material transfer device 35,
The arm 34 is operated to move the vacuum processing object 33 to the chamber 31.
Bring it in. Then, the vacuum processing object 33 is transferred to the chamber 31.
Arm 34 is retracted to the outside of the chamber 31. After that, the doors 32a and 32b of the chamber 31
Descends and holds the chamber 31 airtightly,
1 Start exhausting the inside.

After that, a leak detection test is performed on the vacuum processing object 33 in the same manner as the above-mentioned trace gas detection system. After this test is completed, the pressure inside the chamber 31 is returned to atmospheric pressure, and the doors 32a and 32b of the chamber 31 are opened. Next, the next vacuum processing object 33 is loaded into the vacuum chamber 31 by the transfer device 35. At this time, chamber 3
The vacuum processing object 33 in 1 is pushed out of the chamber 31 by the tip of the mounting portion 34a. The vacuum processed material 33 pushed out from the chamber 31 is moved to the next step by the conveyor 36. In this way, the leak detection test is continuously performed on the plurality of vacuum processed objects.

[0014]

However, the above-mentioned conventional transfer device for a vacuum chamber has the following problems. That is, in the transfer device shown in FIG. 4, the roller shaft 26 is moved by the O-ring 28 when the vacuum processing object 33 is transferred.
Since it slides and rotates on the roller shaft 26 and the O-ring 2,
8 wears. As the wear of these members progresses, it becomes impossible to maintain the airtightness of the vacuum chamber.

On the other hand, the transfer device shown in FIG. 5 has a problem that the cost of the device is high because the transfer device itself is large-scaled. Further, there is a problem that the arm that has carried the vacuum processed product into the chamber needs to be retracted to the outside of the vacuum chamber, and the cycle time required to carry in and carry out the vacuum processed product into the vacuum chamber becomes long.

The present invention has been made in view of the above problems, and it is possible to suppress the wear of the sealing member and the like, avoid the deterioration of the airtight holding performance of the vacuum chamber, and avoid the enlargement of the transfer device. Another object of the present invention is to provide a transfer device for a vacuum chamber, which has a short cycle time required for loading and unloading a vacuum processed product.

[0017]

A transfer device for a vacuum chamber according to the present invention is provided with a transfer roller provided in the vacuum chamber and a side wall of the vacuum chamber inserted therein to drive the transfer roller. Shaft, a flange fixed to the shaft, a shaft driving means for driving the shaft, and a side wall of the vacuum chamber, which is sandwiched between the side wall and the flange to hermetically seal the vacuum chamber. And a shaft moving means for moving the shaft in the axial direction thereof.

[0018]

In the vacuum chamber transfer device according to the present invention, when the vacuum processed object is transferred in the vacuum chamber, the pressure in the vacuum chamber is set to the atmospheric pressure, and then the shaft is moved by the shaft moving means. Separate the flange from the sealing member. Then, the shaft is rotated by the shaft driving means to rotate the transfer roller to transfer the vacuum processed product.

On the other hand, in the case of vacuum processing, the shaft is moved by the shaft moving means to press the flange against the sealing member to keep the inside of the vacuum chamber airtight. Then, the inside of the vacuum chamber is evacuated and vacuum processing is performed.

In the present invention, since the sealing member is separated from the rotating flange during transfer, the sealing member is not worn. Further, since it is sufficient to move the shaft in the axial direction, the device does not become large.

[0021]

Embodiments of the present invention will now be specifically described with reference to the accompanying drawings. 1 and 2 are schematic views showing states of a vacuum chamber transfer device according to an embodiment of the present invention during transfer of a vacuum processed product and exhaust, respectively. The side wall 1a of the vacuum chamber 1 is provided with a through hole 1b. A cylindrical bearing 4 is fitted inside the through hole 1b inside the vacuum chamber. One end of the roller shaft 3 is fitted to the bearing 4, and the other end of the roller shaft 3 is rotatably supported by a bearing (not shown) provided in the vacuum chamber 1 and disposed in the chamber 1. A concave portion 3a extending in the diametrical direction is provided at one end of the roller shaft 3. Further, the transfer roller 2 is fitted and fixed to the roller shaft 3, and the vacuum processed material 11 is transferred by the rotation of the transfer roller 2.

A drive motor 8 is provided outside the vacuum chamber 1.
The drive shaft 8a is directed toward the chamber 1 and is supported by a support member (not shown) so as to be movable in the central axis direction of the drive shaft 8a. Also, the drive shaft 8a of the motor 8
Are connected to the flanged shaft 5 via a coupling 7. The flanged shaft 5 includes a shaft portion 5d fixed to the coupling 7, a disc-shaped flange portion 5c fixed to the shaft portion 5d, and a hole 1
6 and a shaft portion 5a to be inserted into
The convex portion 5b is provided at the tip of a, and the convex portion 5b is fitted in the concave portion 3a of the roller shaft 3. The side wall 1a of the vacuum chamber 1 is provided with a ring-shaped groove 1c corresponding to the edge of the flange 5c, and an O-ring 6 is fitted in the groove 1c. In this embodiment, one motor 8 is provided for each roller shaft 3, and therefore, the number of motors 8 provided is equal to the number of roller shafts 3 in the chamber 1.

These motors 8 are connected to a cylinder shaft 9a of one air cylinder 9 via a connecting member 8b. By this air cylinder 9, each motor 8 moves in the axial direction of its drive shaft 8a. The cylinder shaft 9a
The moving range is restricted by the retreat end stopper 10, so that the motor 8 cannot be separated from the vacuum chamber 1 by a certain distance or more.

Next, the operation of the vacuum chamber transfer device thus constructed will be described. First, when the vacuum processing object 11 is transferred into the vacuum chamber 1, the pressure in the vacuum chamber 1 is set to atmospheric pressure. Then, as shown in FIG. 1, the air cylinder 9 is operated to move the motor 8 in a direction away from the vacuum chamber 1 to a position determined by the backward end stopper 10. Then, the flange portion 5c of the flanged shaft 5 is separated from the O-ring 6 on the side wall 1a of the vacuum chamber 1. In this case, the convex portion 5 provided on the shaft portion 5a of the flanged shaft 5
b is still fitted in the concave portion 3a of the roller shaft 3.

When the motor 8 is operated in this state, the driving force of the motor 8 is transmitted to the roller shaft 3 through the coupling 7 and the flanged shaft 5, the transfer roller 2 rotates, and the vacuum processed material 11 is transferred. Can be transferred. In this case, since the flange portion 5c is separated from the O-ring 6, even if the flanged shaft 5 rotates, the O-ring 6 does not wear.

When the vacuum chamber 1 is evacuated for vacuum processing, as shown in FIG. 2, the cylinder shaft 9a of the air cylinder 9 is moved toward the vacuum chamber 1. As a result, the motor 8, the coupling 7, and the flanged shaft 5 move toward the vacuum chamber 1, the flange portion 5c presses the O-ring 6 provided on the outer surface of the side wall 1a, and the O-ring 6 forms the flange portion. 5c and side wall 1
It is sandwiched by the groove 1c provided on the outer surface of a. As a result, the inside of the vacuum chamber 1 is kept airtight. Then, the vacuum chamber 1 is evacuated. In this case, as the pressure inside the vacuum chamber 1 decreases, the flange portion 5c is pressed against the O-ring 6 more strongly due to the difference between the atmospheric pressure outside the vacuum chamber 1 and the pressure inside the vacuum chamber 1, The airtightness in the vacuum chamber is more reliably maintained.

In this embodiment, when exhausting the inside of the chamber 1, the flange portion 5c comes into close contact with the O-ring 6,
The airtightness of the chamber 1 can be reliably maintained, and since the flange portion 5c rotates away from the O-ring 6 when the vacuum processed object is transferred, wear of the O-ring 6 can be avoided. Thereby, the vacuum chamber 1
It is possible to obtain the effect of avoiding the deterioration of the airtightness retaining performance of Further, in the present embodiment, since the vacuum processed product is transferred by the transfer roller 2, unlike the transfer device of the arm system shown in FIG. 5, the cycle time can be shortened and the size of the device is large. Can be avoided.

A recess corresponding to the flange may be provided on the side wall of the chamber, and an O-ring may be arranged in this recess. In this case, it is possible to suppress the intrusion of dust into the vacuum chamber and to prevent the dust from adhering to the O-ring.
There is an advantage that the durability of the O-ring is improved. Also,
In the above-mentioned embodiment, the case where one motor rotates one roller shaft has been described, but one motor may rotate a plurality of roller shafts. Further, in the above-described embodiment, the flanged shaft 5
The case where the driving force is transmitted from the motor 8 to the roller shaft 3 through the connecting portion formed by fitting the convex portion 5b of the roller shaft 3 and the concave portion 3a of the roller shaft 3 has been described. The shaft and the flange fixed to the shaft are not limited to the above, and other mechanisms can be used as long as the shaft and the flange fixed to the shaft can move in the axial direction and the rotational driving force can be transmitted to the transfer roller when the transfer roller rotates. It may be. Examples of such a mechanism include a spline mechanism (spline shaft and boss) or a combination of a key and a key groove.

[0029]

As described above, the vacuum chamber transfer device according to the present invention has the flange fixed to the shaft that penetrates the chamber side wall and the axial moving means that moves the shaft in the axial direction. However, when exhausting the inside of the chamber, the flange and the sealing member are brought into close contact with each other, and at the time of transfer, the flange and the sealing member are separated from each other, so that wear of the sealing member can be avoided and the airtightness of the vacuum chamber is reduced. It can be avoided. Further, since it is only necessary to move the shaft in the axial direction, it is possible to prevent the apparatus from increasing in size, and it is possible to avoid a long cycle time required for loading and unloading the vacuum processing object into and from the vacuum chamber.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a state of a vacuum chamber transfer device according to an embodiment of the present invention when a vacuum processed product is transferred.

FIG. 2 is a schematic diagram showing a state during the exhaust of the same.

FIG. 3 is a schematic diagram showing an example of a trace gas type leak detection system.

FIG. 4 is a schematic view showing a conventional transfer device for a vacuum chamber.

FIG. 5 is a schematic view showing another example of the trace gas detection system.

[Explanation of symbols]

1, 21, 31 ... Vacuum chamber, 1a ... Side wall, 1b ... Through hole, 2 ... Transfer roller, 3, 26 ... Roller shaft, 3a ...
Recesses, 4 ... Bearings, 5 ... Shaft with flange, 5a,
5d ... Shaft part, 5b ... Convex part, 5c ... Flange part,
6, 28 ... O-ring, 7, 29 ... Coupling, 8, 3
0 ... motor, 8a, 30a ... drive shaft, 8b ... connecting member,
9 ... Air cylinder, 9a ... Cylinder shaft, 10 ... Retreating end stopper 11, 23, 33 ... Vacuum processing object, 22a, 22
b, 32a, 32b ... Door, 24 ... Transfer roller, 25
a, 25b, 36 ... Conveyor, 27 ... Hole, 27a ... Groove,
34 ... Arm, 35 ... Vacuum processed material transfer device

Claims (2)

[Claims] 1. A transfer roller provided in a vacuum chamber, a shaft inserted through a side wall of the vacuum chamber to drive the transfer roller, a flange fixed to the shaft, and the shaft. A shaft driving means for driving the vacuum chamber, a sealing member provided on a side wall of the vacuum chamber and hermetically holding the vacuum chamber by being sandwiched between the side wall and the flange, and the shaft moving in the axial direction thereof. A transfer device for a vacuum chamber, comprising: 2. The vacuum chamber according to claim 1, wherein the sealing member is an O-ring provided on an outer surface of a side wall of the vacuum chamber, and the flange is arranged outside the vacuum chamber. Transfer device.