JPH08142335A - Production of ink jet head - Google Patents

Abstract

PURPOSE: To prevent the mixing-in of waste refuse or a contaminant from an ink supply port so as not to generate nozzle clogging or damage. CONSTITUTION: In the production of an ink jet head, when cutting/grinding for forming an ink emitting surface is applied to a member having a substrate 31, a solid layer 34 corresponding to an ink passage and an ink liquid chamber, the cured member 32 covering the solid layer and a top plate 33 having an ink supply port formed thereto, the ink supply port 35 is closed by a pressure- sensitive adhesive tape (a).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an ink jet head for recording and recording on a recording medium by ejecting and flying ink.

[0002]

2. Description of the Related Art Generally, an ink jet head used in an ink jet recording system has a fine ink ejection port, an ink flow path, an ink ejection energy generating element provided in the ink flow path, and an ink for supplying ink to the element. It has a supply port.

As one of the conventional methods for manufacturing an ink jet head, a photosensitive resin such as a dry film resist is transferred onto a glass or metal substrate provided with an ink discharge energy generating element by a laminating method or a printing method. ,
There is a method of forming an ink ejection port and an ink flow path.
However, with this method, it is difficult to control the shape of the ink ejection port and the ink flow path, and it is difficult to stably eject the ink droplet.

On the other hand, as another conventional method, on a glass or metal substrate on which an ink ejection energy generating element is arranged,
An ink flow path and an ink liquid chamber are formed by a solid layer that can be dissolved and removed, a photosensitive resin is applied to the ink flow path, and a top plate having an ink supply port is provided on the upper part to cure the ink flow path and the ink liquid By dissolving and removing the solid layer of the chamber,
A method of forming an ink ejection port and an ink flow path has been proposed.

[0005]

However, in the conventional method for manufacturing an ink jet head as described above, dust is removed in the cutting step by the precision cutting device for forming the ink ejection port surface, and particularly in the polishing step of the ejection port surface. In some cases, dirt, stains, and the like adhere to the peripheral portion and further enter the ink liquid chamber through the ink supply port, which becomes an obstacle when the solid layer is dissolved and removed.
Further, dust and dirt mixed in the ink liquid chamber may not be removed at the same time as the solid layer is dissolved and removed, and may enter the ink flow path to cause nozzle clogging or scratches or chips on the photosensitive resin. .

The present invention has been made to solve the above problems, and prevents dust, dirt, and the like from entering from the ink supply port so that it does not hinder the dissolution and removal of the solid layer. An object of the present invention is to provide a method for manufacturing an inkjet head that does not cause nozzle clogging or damage.

[0007]

The above object is to provide a substrate, a removable solid layer formed in advance on the substrate at a position corresponding to an ink flow path and an ink liquid chamber, and at least a curing layer covering the solid layer. In a method for manufacturing an inkjet head having a step of cutting or polishing a member for inkjet configuration having a member and a top plate having an ink supply port formed, the ink supply port is set at the time of the cutting or polishing. This can be achieved by a method for manufacturing an inkjet head, which is characterized in that it is covered with an adhesive member.

Aspects of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view illustrating a state in which a solid layer is formed on a substrate in the process of manufacturing an ink jet head. In the figure, reference numeral 1 is a substrate, on which the ejection energy generating element 14 and the like are arranged. Reference numeral 12 is an insulating layer such as SiO ₂ . Further, in FIG. 1, the hatched portion 13 indicates the position where the ink flow path and the ink liquid chamber for supplying ink to the ink flow path are to be formed on the insulating layer 12.

Then, as shown in FIG. 1, a removable solid layer 15 is patterned on the substrate 1 at positions corresponding to the ink flow path and the ink liquid chamber. The solid layer 15 may be formed of, for example, a positive photoresist or a positive dry film resist, and its thickness is preferably about 20 to 50 μm. Note that the term “corresponding to the ink liquid chamber” includes not only the entire ink liquid chamber but also a part of the ink liquid chamber (a lower portion or the like).

Next, as shown in FIG. 2, the substrate 1 on which the solid layer 15 is formed is fitted and fixed in a mold (not shown), and ultraviolet rays having an ink supply port 18 previously formed thereon are transmitted therethrough. A top plate 17 made of transparent glass or the like is installed at a desired interval. Next, in the mold (that is, the substrate 1 and the solid layer 15 and the top plate 17).
A liquid curable material 16 such as a photosensitive resin is injected into a space between them. As a result, the solid layer 15 is covered with the curable material 16. By exposing and curing a desired portion of the curable material 16 from the top plate 17 side, a constituent member that forms the ink flow path, the wall surface of the ink liquid chamber, and the like is formed. 1 and top 17
Fused to. Further, the uncured curable material 16 which is an unnecessary portion is removed. In the above example, a photosensitive resin is used as the curable material 16 for photo-curing, but a thermosetting resin may be used for thermo-curing.

According to the molding method such as cast molding and transfer molding as described above, the substrate 1 and the removable solid layer 1
5 and a curing member of curable material 16 covering the solid layer,
An intermediate product of the inkjet head having the top plate 17 having the ink supply port 18 formed thereon can be obtained relatively easily.

In order to complete the ink jet head from this intermediate product, it is necessary to further perform cutting and polishing for forming the ink ejection port surface and further removing the solid layer 15. In the present invention, the ink supply port 18 is closed with an adhesive member when cutting or polishing such an intermediate product (a member for inkjet constitution) that needs to be cut or polished to prevent dust and dirt from the ink supply port 18. Prevent contamination.

FIG. 3 is a perspective view illustrating a state in which the ink supply port is closed with an adhesive member. That is, the substrate 31, the removable solid layer 34 previously formed at positions corresponding to the ink flow path and the ink chamber on the substrate 31, the curing member 32 that covers the solid layer 34, and the ink supply port 35 are formed. In the inkjet component having the top plate 33, the adhesive tape a is attached on the ink supply port 35. As the adhesive member used in the present invention, it is desirable to use an adhesive tape a which is as thin and flexible as possible so as not to hinder the use in the cutting or polishing process. Further, the adhesive tape a is preferably a dicing tape which can be used for precision cutting, and more preferably a type of which the adhesive strength is reduced by irradiation with ultraviolet rays.

Further, the adhesive tape a is a tape having a low adhesive strength so that it can be peeled off without any problem before the solid layer 34 is removed, or the adhesive strength of the tape is reduced by any method so that it can be peeled off without any problem. It is desirable that the tape be capable of being applied. Specifically, as the adhesive force, it is desirable that the adhesive force to stainless steel is about 50 to 400 g / 25 mm. When the adhesive force is less than 50 g / 25 mm, it is apt to be easily peeled off from the top plate 33 by an external force in the cutting or polishing process, which is not preferable. On the other hand, when the adhesive force is larger than 400 g / 25 mm, the top plate 33 is used when peeling off the adhesive tape.
Is apt to be cracked, peeled off from the hardened member 32, and the adhesive material tends to remain on the top plate 33 side, which is not preferable. It is also preferable to use a tape (ultraviolet type tape) which has a sufficient adhesive force but can be reduced in adhesive force by irradiation with ultraviolet rays.

A cutting process and a polishing process are performed on the ink jet constituent member after the adhesive tape a is attached as shown in FIG. In the present invention, the cutting or polishing step means
Specifically, for the purpose of forming a desired ink ejection port surface,
This is a step of cutting a predetermined cutting portion with a precision cutting device and then polishing the ink ejection port surface. Further, as will be described later with reference to FIG. 4, a step of cutting each head when a plurality of heads are simultaneously manufactured on the same substrate is included.

After this cutting or polishing step, the adhesive tape a is peeled off. When an ultraviolet irradiation type tape is used, it may be peeled off by irradiating a predetermined amount of ultraviolet rays to reduce the adhesive strength of the tape.

Next, the solid layer 34 is removed with a solvent or the like to form an ink flow path and an ink liquid chamber, and an ink jet head is obtained. Further, even if dust or dirt generated in the cutting step or the polishing step adheres to the surface of the member, these are removed at the same time as the solid layer is dissolved and removed. That is, dust and the like mixed into the ink liquid chamber from the ink supply port is difficult to remove in the solid layer dissolving and removing step, but in the present invention, since dust is prevented from mixing from the ink supply port, dust other than this is prevented. Is completely removed at the same time as the solid layer is dissolved and removed.

[0019]

The present invention will be described in more detail with reference to the following examples.

<Example 1> As shown in FIG.
A dicing tape D-612 (manufactured by Lintec Co., Ltd., thickness 90 μm) was stuck on the top of the ink supply port to close the ink supply port 35. Next, using a lapping device, polishing was performed to form the ink ejection port surface. Then, the adhesive strength of the dicing tape was reduced by irradiating it with ultraviolet light, and then peeling was performed. Next, the solid layer 34 was removed using a solvent such as ethanol to obtain an inkjet head.

In the above manufacturing process, although dust and dirt caused by the polishing of the ink ejection port surface adhered,
These debris and dirt were removed together when the solid layer was removed. That is, mixing of dust and dirt from the ink supply port was not recognized.

<Second Embodiment> FIG. 4 is a perspective view showing a second embodiment of the present invention. In this embodiment, a dicing tape is formed on almost the entire surface of a top plate 42 laminated to manufacture a large number of heads on one substrate 41 at the same time.
D-203 (manufactured by Lintec Corporation, thickness: 65 μm) b
Was pasted, and all of the large number of ink supply ports 43 were closed. Next, a predetermined portion was cut by a precision cutting device, separated into respective substrates, and an ink ejection port surface was polished by a polishing device. Next, the polished ink ejection surface was washed with running ion-exchanged water, irradiated with ultraviolet light to reduce the adhesive strength of the dicing tape, and then peeled off. Next, the solid layer was removed in the same manner as in Example 1 to obtain an inkjet head.

In the obtained ink jet head, no dust or dirt was found to be mixed in from the ink supply port, and the head was free from nozzle clogging.

[0024]

As described above, according to the method of the present invention, since dust and dirt generated in the cutting process and the polishing process do not enter the ink liquid chamber through the ink supply port, nozzle clogging in the head manufacturing process and There is no damage and the yield can be improved.

[Brief description of drawings]

FIG. 1 is a perspective view illustrating a state in which a solid layer is formed on a substrate in a manufacturing process of an inkjet head.

FIG. 2 is a perspective view illustrating a state in which a solid layer, a top plate, and the like are provided on a substrate in the manufacturing process of the inkjet head.

FIG. 3 is a perspective view showing a first embodiment of the present invention.

FIG. 4 is a perspective view showing a second embodiment of the present invention.

[Explanation of symbols]

 1 Substrate 12 Insulating Layer 13 Part Forming Ink Flow Path and Ink Liquid Chamber 14 Ink Ejection Energy Generating Element 15 Solid Layer Resolvable and Removable 16 Curable Material 17 Top Plate 18 Ink Supply Port 31 Substrate 32 Curing Member 33 Top Plate 34 Solid layer 35 Ink supply port 41 Substrate 42 Top plate 43 Ink supply port a, b Adhesive tape

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Goto 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (3)

[Claims] 1. A substrate, a removable solid layer formed in advance at a position corresponding to an ink flow path and an ink liquid chamber on the substrate, a curing member covering at least the solid layer, and an ink supply port are formed. In a method for manufacturing an inkjet head, which comprises a step of cutting or polishing an inkjet constituent member having the above-mentioned top plate, characterized in that the ink supply port is closed with an adhesive member during the cutting or polishing. Method for manufacturing an inkjet head. 2. The method for manufacturing an inkjet head according to claim 1, wherein the adhesive member is an adhesive tape. 3. The method for manufacturing an ink jet head according to claim 1, wherein the curing member that covers the solid layer is a member that is obtained by supplying a liquid curable material onto at least the solid layer and curing the material.