JPH08138610A - Electron microscope - Google Patents

Abstract

PURPOSE: To perform X-ray analysis of a sample under heating by providing a protection shutter, in which a substance reflecting infrared radiation and visible radiation is inserted between an X-ray detector and a sample. CONSTITUTION: A collimator 13 is arranged between a sample 16 mounted on a heating holder 17 and an X-ray detector 12, and a protection shutter 20 prevents light from entering into the X-ray detector 12 by obstructing a hole 19 in the X-ray detector side of this collimator 13. When the light does not emit from the sample, the protection shutter 20 is retreated from a position of obstructing the hole of the collimator by a drive device 14 so that no obstacle exists between the sample 16 and the X-ray detector 12. The drive device 14, which is taken in/out by pneumatic pressure, can be taken in/out by electricity or magnetic power.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron microscope, and more particularly to an electron microscope capable of X-ray analysis in a state where light is emitted from the vicinity of a sample, such as during use of a sample heating device.

[0002]

2. Description of the Related Art Conventionally, in an electron microscope equipped with an X-ray analyzer, it is prohibited to perform X-ray analysis when using a sample heating device. The reason is that when the sample is heated, light is generated from the sample, and the light is detected by the X-ray detector and becomes noise, which makes it impossible to perform X-ray analysis. There is a risk of damaging the X-ray detector.

[0003]

SUMMARY OF THE INVENTION An object of the present invention is to provide an electron microscope capable of performing X-ray analysis even while heating a sample, as opposed to an electron microscope equipped with an X-ray detector, which was not capable of performing X-ray analysis during use of the sample heating device. To do.

[0004]

The electron microscope of the present invention comprises:
In addition to the conventional electron microscope, a substance that passes X-rays well between the sample and the X-ray detector and reflects infrared rays and visible rays well, a plate that supports the substance, and a power to move it in and out. A protective shutter composed of the above section and its controller is mounted.

Further, the electron microscope of the present invention has a function of receiving information from the sample heating device as to whether or not the heating power source is on, and interlocking with it to turn on and off the protective shutter.

Further, the electron microscope of the present invention has a function of receiving information on the heating temperature from the sample heating device and interlocking with it to open / close the protective shutter.

[0007]

In the present invention, since a protective shutter capable of inserting a substance that reflects infrared rays and visible rays well is mounted between the X-ray detector and the sample, even if light is emitted from the sample and the periphery of the sample, Infrared rays and visible rays do not enter the ray detector, and only X-rays generated by electron beam irradiation can be detected.

Further, when the sample heating device is used, the protective shutter can be automatically operated depending on the state of the heating power source and the heating temperature.

[0009]

EXAMPLES The electron microscope of the present invention is equipped with a protective shutter in addition to the conventional electron microscope with an X-ray detector.
It can be used together with a sample heating device. The protective shutter has a copper mesh with an aluminum vapor deposition film mounted on a metal plate, and is provided with a power unit for inserting and removing the metal plate and a controller thereof.

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory view of an electron microscope of the present invention, a transmission electron microscope equipped with a sample shutter with a sample heating device (hereinafter referred to as a heating holder) equipped with a protective shutter, and an X-ray detector. Sample 16 set in heating holder 17
There is a collimator 13 between the X-ray detector 12 and the X-ray detector 12, and the protective shutter 20 blocks a hole 19 on the X-ray detector side of the collimator 13 to prevent light from entering the X-ray detector 12. When the sample is not heated, that is, when the sample does not emit light, the drive shutter 14 retracts the protective shutter 20 from the position where it closes the hole 19 of the collimator, so that an obstacle exists between the sample 16 and the X-ray detector 12. There is nothing. The drive unit 14 is moved in and out by air pressure, but this may be performed by electricity or magnetic force.
The shutter controller 15 switches the protective shutter 20 from and to the drive device 14.
Protective shutter 2 with switch of shutter controller 15
0 can be taken in and out, and can be linked with the power supply of the heating holder controller 17. Further, if a signal of the sample temperature is sent from the heating holder controller 17 to the shutter controller 15 and the temperature is set by the shutter controller 15, when the sample 16 reaches the temperature or higher, the shutter 20 is automatically turned on and the temperature is lower than the temperature. The shutter 20 can be retracted when

FIG. 2 is an explanatory view of the protective shutter. The protective shutter film 21 is made by placing an aluminum film having a thickness of several thousand liters on a copper mesh.
It is held in a form sandwiched between 2, 23. Holding plates 22, 2
A hole smaller than the protective shutter film 21 and larger than the hole 19 of the collimator is opened at a position where the protective shutter film 3 is held. The holding plate 23 is hooked on the tip portion 25 of the holding plate 22 and fixed by screws 24. The holding plate 22 is screwed to the drive device 14 at the hole 26.

[0012]

The electron microscope of the present invention enables X-ray analysis during heating of a sample, which has not been possible until now.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a function of a protective shutter mounted on a transmission electron microscope.

FIG. 2 is an explanatory diagram of a protective shutter.

[Explanation of Codes] 11 ... Electron beam, 12 ... X-ray detector, 13 ... Collimator, 14 ... Driving device, 15 ... Shutter controller, 1
6 ... Sample, 17 ... Heating holder, 18 ... Heating holder controller, 20 ... Protective shutter.

Claims (4)

[Claims] 1. An electron microscope equipped with an X-ray detector for detecting X-rays generated from the test sample by irradiating the test sample with an electron beam, wherein an electron microscope is provided between the test sample and the X-ray detector. An electron microscope comprising: a device for shielding light generated from the test sample. 2. An electron microscope equipped with an X-ray detector for detecting X-rays generated from a test sample by irradiating the test sample with an electron beam, and an electron microscope comprising the test sample and the X-ray. An electron microscope comprising a device for blocking light generated from the test sample between the detector and the detector. 3. The electron microscope according to claim 2, wherein the operation of the heating device and the operation of the light shielding device are interlocked. 4. The electron microscope according to claim 2, wherein the heating temperature and the operation of the light shielding device are interlocked.