JPH08135586A - Muffler for vacuum pump - Google Patents

Muffler for vacuum pump

Info

Publication number
JPH08135586A
JPH08135586A JP27898794A JP27898794A JPH08135586A JP H08135586 A JPH08135586 A JP H08135586A JP 27898794 A JP27898794 A JP 27898794A JP 27898794 A JP27898794 A JP 27898794A JP H08135586 A JPH08135586 A JP H08135586A
Authority
JP
Japan
Prior art keywords
vacuum pump
case
muffling
housing
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27898794A
Other languages
Japanese (ja)
Other versions
JP2837814B2 (en
Inventor
Fumihiko Yamada
文彦 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orion Machinery Co Ltd
Original Assignee
Orion Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orion Machinery Co Ltd filed Critical Orion Machinery Co Ltd
Priority to JP27898794A priority Critical patent/JP2837814B2/en
Publication of JPH08135586A publication Critical patent/JPH08135586A/en
Application granted granted Critical
Publication of JP2837814B2 publication Critical patent/JP2837814B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

PURPOSE: To perform echo attenuation of exhaust noise and to reduce a manufacturing cost by a method wherein a muffling case in which a closed muffling chamber is formed is arranged on the upper surface of the exhaust hole of the outer wall surface of the housing of a vacuum pump and a groove is formed in a mating surface with a pump housing on the muffling case side. CONSTITUTION: When air in a housing 22 is discharged through an exhaust hole 21 through drive of a vacuum pump 20, this air flows in a muffling chamber 4 in a muffling case 2. Next air flows through a plurality of grooves 9a formed in the end face of the muffling case 2 mounted on the housing 22 through a packing 8 and flows in a second muffling chamber 5 and consecutively flows through a plurality of communication grooves 9b to the outside. In this case, a part of exhaust noise of air through an exhaust hole 21 is absorbed by a sound absorbing material 10 with which the inner wall of the muffling case 2 is covered. Further, pumping operation is relaxed due to enlargement of a volume when air flows in the muffling case 2 and when air flows through the grooves 9a and 9b, muffling resistance is exerted for noise reduction.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、真空ポンプのハウジン
グの外壁面に真空ポンプと一体構造化させて被装できる
真空ポンプの消音器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silencer for a vacuum pump, which can be attached to the outer wall surface of a housing of the vacuum pump by being integrally structured with the vacuum pump.

【0002】[0002]

【従来の技術】従来より、真空ポンプのポンピング作用
により発生する排気孔からの空気の排気音を消すための
種々の消音器がある。しかしながら、従来品は、消音効
果を上げるために消音器全体が大きく、真空ポンプに着
装した場合に場所を取り体裁も悪い。また、消音ケース
の消音室内に一本ないし複数本の一方の端部が真空ポン
プのハウジングの外部の外気中と連通した消音パイプを
突設する構造が知られている(実開昭59−13685
号参照)。この構造の場合には消音効果は良いものの、
パイプの分だけ部品点数が多いと共に、接着剤等による
パイプと消音ケースとの接合作用が必要になってコスト
高になっていた。
2. Description of the Related Art Conventionally, there are various silencers for eliminating the exhaust sound of air from an exhaust hole generated by a pumping action of a vacuum pump. However, in the conventional product, the entire silencer is large in order to improve the sound deadening effect, and when it is attached to the vacuum pump, the space is taken and the appearance is bad. Further, there is known a structure in which one or a plurality of one ends of a silencing case have a silencing pipe projecting from the outside of the housing of the vacuum pump and communicating with the outside air (Actually published 59-13685).
No.). In this structure, the sound deadening effect is good,
The number of parts is large corresponding to the number of pipes, and the joining action between the pipes and the sound deadening case by an adhesive or the like is required, resulting in high cost.

【0003】[0003]

【発明が解決しようとする課題】本発明は、上記従来技
術の不具合点に鑑みなされたもので、真空ポンプのハウ
ジングの外壁面に被装して、ポンプとコンパクトに体裁
良く一体化でき、ポンプ効率を落とさず小さな消音抵抗
で大きな消音効果が得られるとともに、製造が容易でか
つコストの安い消音器を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the disadvantages of the above-mentioned prior art, and can be mounted on the outer wall surface of the housing of a vacuum pump so as to be compactly and beautifully integrated with the pump. It is an object of the present invention to provide a silencer that can obtain a large silencing effect with a small silencing resistance without lowering efficiency, and that is easy to manufacture and inexpensive.

【0004】[0004]

【課題を解決するための手段】上記目的を達成するた
め、本発明においては、真空ポンプのハウジングの外壁
面の排気孔上面に被装して内部に密閉された消音室を形
成する消音ケースを設け、この消音ケースの消音室内に
一本ないし複数本の一方の端部が真空ポンプのハウジン
グの外部の外気中に連通する連通溝を消音ケース側であ
って真空ポンプ本体の密着面に設けることにより本目的
を達成しようとするものである。
In order to achieve the above object, in the present invention, there is provided a sound deadening case which covers the upper surface of the exhaust hole of the outer wall surface of the housing of the vacuum pump and forms a sound deadening chamber sealed inside. Provide a communication groove in the sound-absorbing chamber of the sound-absorbing case, one end of which is connected to the outside of the vacuum pump housing and the outside of the vacuum pump housing. The purpose is to achieve this purpose.

【0005】[0005]

【作用】真空ポンプの排気孔から排出された空気は、消
音ケースの消音室内へ容積を膨張しながら流入する。消
音室内に流入した空気は、消音ケース側であって消音ケ
ースと真空ポンプのハウジングの密着面に設けられた一
本ないし複数本の連通溝を通って外気中に排出される。
このとき、膨張と収縮とが連続的に行われるため、真空
ポンプのポンピング作用が緩和され、かつ排気音が消音
ケース内で反響減衰されて、消音作用がなされる。
The air discharged from the exhaust hole of the vacuum pump flows into the muffling chamber of the muffling case while expanding its volume. The air that has flowed into the muffling chamber is discharged to the outside air through one or a plurality of communication grooves provided on the muffling case side and on the contact surface of the muffling case and the housing of the vacuum pump.
At this time, since the expansion and the contraction are continuously performed, the pumping action of the vacuum pump is alleviated, and the exhaust sound is echo-attenuated in the muffling case, so that the muffling action is performed.

【0006】[0006]

【実施例】以下、図面に従い本発明の実施例について説
明する。図1ないし図3において、2は例えば方形箱体
状の消音ケースで、その内部は、仕切壁3によって比較
的容積の大きい第1の消音室4と、比較的小さな第2の
消音室5とに区分されている。その底部6、7は広く開
口され、かつ底部6、7の周囲端面はシール性、耐熱性
等のあるパッキン8を介して例えば図1に示された無給
油式回転真空ポンプ20の排気孔21周辺の平滑な平面
状のハウジング22の外壁面に密着させて螺着等により
固定する。第1の消音室4の内壁には、吸音材10が被
着されている。このように消音ケース2を真空ポンプ2
0に被装すると、消音ケース2内壁面とハウジング22
の外壁面とで囲まれた密閉された消音室が形成される。
そして消音ケース2とハウジング22とで囲まれた消音
室内には、一本ないし複数本の一方の端部が消音ケース
2の真空ポンプ20のハウジング22の外部の外気中と
連通する連通溝9を、消音ケース側であって真空ポンプ
本体の密着面に設ける。第1室の消音室4と第2の消音
室5とを連通する連通溝9aは、前記密着面の消音室の
両側の外周端縁にそれぞれ2本づつ設け、前記第2室5
と外気とは、第2室から外気に連通するまっすぐな連通
溝9bで連通される。なお、図中の実施例における無給
油式回転真空ポンプ20は、運転中に発熱するのでハウ
ジング22部分の放熱効果を良くするために、ハウジン
グ22の外壁面の他、上述の消音ケース2の外壁面にも
放熱用のフィン23が複数個突設されている。
Embodiments of the present invention will be described below with reference to the drawings. 1 to 3, reference numeral 2 denotes, for example, a rectangular box-shaped silencer case, and inside thereof, a first silencer chamber 4 having a relatively large volume by a partition wall 3 and a second silencer chamber 5 that is relatively small. It is divided into. The bottom portions 6 and 7 are wide open, and the peripheral end faces of the bottom portions 6 and 7 are provided with a packing 8 having sealability, heat resistance, etc., for example, through an exhaust hole 21 of the oilless rotary vacuum pump 20 shown in FIG. The outer wall surface of the peripheral flat housing 22 is closely attached and fixed by screwing or the like. A sound absorbing material 10 is attached to the inner wall of the first sound deadening chamber 4. In this way, the sound deadening case 2 is attached to the vacuum pump 2
When mounted on 0, the inner wall surface of the muffler case 2 and the housing 22
A closed muffling room is formed that is surrounded by the outer wall surface of the.
In the muffler chamber surrounded by the muffler case 2 and the housing 22, one or a plurality of end portions of the muffler case 2 has a communication groove 9 communicating with the outside air outside the housing 22 of the vacuum pump 20. , Provided on the close contact surface of the vacuum pump body on the noise reduction case side. Two communication grooves 9a for communicating the first silencing chamber 4 and the second silencing chamber 5 with each other are provided at the outer peripheral edges on both sides of the contact surface of the silencing chamber.
And the outside air are communicated with each other through the straight communication groove 9b communicating with the outside air from the second chamber. Since the oil-free rotary vacuum pump 20 in the embodiment shown in the drawing generates heat during operation, in order to improve the heat radiation effect of the housing 22, the outside wall surface of the housing 22 and the outside of the sound deadening case 2 described above are used. The wall surface is also provided with a plurality of fins 23 for heat dissipation.

【0007】以上の構成の消音器1を使用して真空ポン
プ20の排気孔21から排出される空気の排気音を消す
ためには、予め真空ポンプ20の排気孔21周辺のハウ
ジング22の外壁面を平滑な平面状に形成しておき、こ
の平面状の排気孔上面のハウジングの外壁面に消音ケー
ス2をその広く開口した底部6、7を下方に向けて被
せ、その底部の周囲端面及び仕切壁端面をパッキン8を
介してハウジング22の外壁面に螺着等して固着し、真
空ポンプ20のハウジング22の外壁面の排気孔21上
面に消音器1を真空ポンプ20と一体構造化させて被装
する。しかる後、真空ポンプ20を駆動させ、排気孔2
1よりハウジング22内の空気を排出すると、排気孔2
1から排出された空気は、消音ケース2内の消音室4と
排気孔21と連通されている消音ケース2の広く開口さ
れた底部6を通り、消音室内へと流入する。該空気は、
消音ケース2側であって、ハウジング22の外壁面とパ
ッキン8を介して一体的に被装される端面に設けられた
一本ないし複数本の溝9aを通って、第1の消音室4か
ら第2の消音室5に流入する。そして、排気は、同様に
消音ケース2側であって消音ケース2とハウジング22
の外壁面との密着面に設けられた一本または複数本の連
通溝9aを通ってハウジング22外部の外気中へと放出
される。
In order to eliminate the exhaust noise of the air exhausted from the exhaust hole 21 of the vacuum pump 20 by using the silencer 1 having the above-described structure, the outer wall surface of the housing 22 around the exhaust hole 21 of the vacuum pump 20 is previously prepared. Is formed into a smooth flat surface, and the sound absorbing case 2 is covered on the outer wall surface of the housing on the upper surface of the flat exhaust hole with the widely opened bottom portions 6 and 7 facing downward, and the peripheral end surface and the partition of the bottom portion are covered. The wall end surface is fixed to the outer wall surface of the housing 22 via the packing 8 by screwing or the like, and the silencer 1 is integrated with the vacuum pump 20 on the upper surface of the exhaust hole 21 of the outer wall surface of the housing 22 of the vacuum pump 20. Put on. After that, the vacuum pump 20 is driven and the exhaust hole 2
When the air inside the housing 22 is exhausted from 1, the exhaust hole 2
The air discharged from 1 passes through the sound absorbing chamber 4 in the sound absorbing case 2 and the widely opened bottom portion 6 of the sound absorbing case 2 communicating with the exhaust hole 21 and flows into the sound absorbing chamber. The air is
From the first silencing chamber 4 through the one or a plurality of grooves 9a provided on the end surface of the silencing case 2 side, which is integrally mounted with the outer wall surface of the housing 22 via the packing 8. It flows into the second silencing chamber 5. Similarly, the exhaust gas is on the side of the muffler case 2 and the muffler case 2 and the housing 22.
Is discharged into the outside air outside the housing 22 through one or a plurality of communication grooves 9a provided on the surface closely attached to the outer wall surface of the housing 22.

【0008】しかして、真空ポンプ20のポンピング作
用により発生する排気孔21からの空気の排気音は、消
音ケース2の内壁に被着された吸音材10にその一部が
吸収されることはもちろん、排気音を含む空気は排気孔
21から消音ケース2内に流入するときに容積が広がる
ことによってポンピング作用が緩和され、さらに連通溝
9内を通過する際に消音抵抗を受け、排気音が減殺され
て外気中へと放出される。さらに、本実施例のように消
音ケース2内を仕切壁3によって複数の室に分け、それ
らを一本ないし複数本の溝で接続した場合にあっては、
収縮と膨張とを繰り返すことによって、真空ポンプ20
の上記ポンピング作用がさらに減殺されることになっ
て、消音作用がより促進される。
The exhaust sound of the air from the exhaust hole 21 generated by the pumping action of the vacuum pump 20 is, of course, partly absorbed by the sound absorbing material 10 attached to the inner wall of the sound deadening case 2. When the air including the exhaust sound flows into the muffling case 2 through the exhaust hole 21, the volume of the air expands, so that the pumping action is mitigated, and when passing through the communication groove 9, the exhaust noise is reduced. It is released and released into the atmosphere. Furthermore, in the case where the inside of the muffling case 2 is divided into a plurality of chambers by the partition wall 3 and these are connected by one or a plurality of grooves as in this embodiment,
By repeating contraction and expansion, the vacuum pump 20
The pumping action of the above is further reduced, and the silencing action is further promoted.

【0009】また、上記実施例では、消音効果を上げる
ために消音ケースの内壁面略全体に亘り吸音材10を被
着しているが、吸音材10を被着しなくても排気孔21
から排出される排気音を含んだ空気は消音室内4、5の
消音の連通溝9内を通過する際に排気音が充分に減殺さ
れるので、場合によっては吸音材10を消音ケースの内
壁面に被着しなくとも良い。さらに、消音ケース内から
排気音を含む空気が漏れ出て消音効果が減殺されぬよう
に上記実施例では、消音ケース2の底部の周囲端面と平
面状のハウジング22の外壁面との間にパッキン8を介
在させているが、消音ケース2の底部の周囲端面とハウ
ジング22の外壁面とが良好に密着でき、消音室内から
空気が外部に漏れ出る恐れがない場合は、パッキン8は
介在させなくとも良い。さらにまた、消音器1を被装す
る真空ポンプ20が運転中に発熱しない構造の場合は、
消音ケース2の外周壁に放熱用のフィン23を設ける必
要が無いことは勿論、真空ポンプ20の消音器1が被装
されていないハウジング22部分で真空ポンプ20の運
転中の発熱量分を充分に放熱できるならば、消音ケース
2にフィン23を設ける必要は無い。
Further, in the above-mentioned embodiment, the sound absorbing material 10 is attached to substantially the entire inner wall surface of the sound absorbing case in order to improve the sound absorbing effect. However, even if the sound absorbing material 10 is not attached, the exhaust hole 21 is provided.
When the air including the exhaust sound discharged from the inside of the sound absorbing chambers 4 and 5 passes through the sound deadening communication grooves 9, the exhaust sound is sufficiently attenuated. Therefore, in some cases, the sound absorbing material 10 is attached to the inner wall surface of the sound deadening case. You don't have to wear it on. Further, in order to prevent air containing exhaust noise from leaking out of the muffling case so that the muffling effect is not diminished, in the above embodiment, packing is provided between the peripheral end surface of the bottom of the muffling case 2 and the outer wall surface of the flat housing 22. 8 is interposed, but if the peripheral end surface of the bottom portion of the muffling case 2 and the outer wall surface of the housing 22 can be satisfactorily adhered and there is no risk of air leaking out of the muffling chamber, the packing 8 is not interposed. Both good. Furthermore, in the case where the vacuum pump 20 that covers the silencer 1 does not generate heat during operation,
Of course, it is not necessary to provide fins 23 for heat dissipation on the outer peripheral wall of the muffling case 2, and the housing 22 portion of the vacuum pump 20 where the muffler 1 is not mounted is sufficient to generate heat during operation of the vacuum pump 20. It is not necessary to provide the fins 23 on the sound deadening case 2 as long as the heat can be dissipated.

【0010】[0010]

【発明の効果】以上のように、本発明の消音器は、消音
ケース側の、ポンプハウジングとの合わせ面に溝を設け
るようにしたため、ダイカスト等の型成形で容易に製造
することができ、製造コストが安い。さらに、真空ポン
プのハウジングの外壁面の排気孔上面に真空ポンプと一
体化して被装できるので、体裁良く場所を取らずにコン
パクトに消音器を真空ポンプに着装できる。また、本発
明の消音器は、消音機構に溝内に排気を通過させる方式
を用いており消音効果が高く、かつ構造が簡単であるの
で、消音抵抗が少なく真空ポンプのポンプ効率を低下さ
せることがない。さらに、消音器内の連通溝の内径、長
さ及びその本数を適宜選定することにより、各種真空ポ
ンプに適合する消音効果の良い消音器を構成できる等の
効果がある。
As described above, since the muffler of the present invention is provided with the groove on the mating surface of the muffler case side with the pump housing, it can be easily manufactured by die molding such as die casting. Manufacturing cost is low. Further, since the vacuum pump can be integrally mounted on the upper surface of the exhaust hole on the outer wall surface of the vacuum pump housing, the silencer can be compactly mounted on the vacuum pump without taking a good space. Further, the muffler of the present invention has a high muffling effect because the muffler uses a method of passing the exhaust gas into the groove, and has a simple structure. Therefore, the muffling resistance is low and the pump efficiency of the vacuum pump is reduced. There is no. Further, by appropriately selecting the inner diameter, the length, and the number of the communication grooves in the silencer, it is possible to construct a silencer having a good silence effect that is suitable for various vacuum pumps.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の消音器を被装した真空ポンプの正面断
面図である。
FIG. 1 is a front sectional view of a vacuum pump equipped with a silencer of the present invention.

【図2】図1のB−B断面図である。FIG. 2 is a sectional view taken along line BB of FIG.

【図3】本発明の消音器に使用される消音ケースの底面
図である。
FIG. 3 is a bottom view of a muffling case used in the muffler of the present invention.

【符号の説明】[Explanation of symbols]

1 消音器 2 消音ケース 3 仕切壁 4 第1の消音室 5 第2の消音室 6、7 消音ケース底部 8 パッキン 9 消音溝 10 吸音材 20 真空ポンプ 21 排気孔 22 ハウジング 23 放熱フィン 1 muffler 2 muffler case 3 partition wall 4 first muffler chamber 5 second muffler chamber 6, 7 muffler case bottom 8 packing 9 muffler groove 10 sound absorbing material 20 vacuum pump 21 exhaust hole 22 housing 23 radiating fin

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 真空ポンプのハウジングの外壁面の排気
孔上面に被装して内部に密閉された消音室を形成する消
音ケースを設け、この消音ケースの消音室内に一本ない
し複数本の一方の端部が真空ポンプのハウジングの外部
の外気中に連通する連通溝を消音ケース側であって真空
ポンプ本体との密着面に設けたことを特徴とする真空ポ
ンプの消音器。
1. A sound deadening case is provided to cover an upper surface of an exhaust hole of an outer wall surface of a housing of a vacuum pump to form a sealed sound deadening chamber, and one or more of the sound deadening chamber is provided in the sound deadening chamber. A silencer for a vacuum pump, characterized in that a communication groove whose end communicates with the outside air outside the housing of the vacuum pump is provided on the silencer case side and on the contact surface with the vacuum pump body.
【請求項2】 消音ケース内を複数の室に区切る仕切り
を設けると共に、隣接する各室間を連通する連通溝と最
下流部の室に外気に開放される連通溝とを消音ケース側
であって真空ポンプ本体との密着面に設けたことを特徴
とする請求項1記載の真空ポンプの消音器。
2. A partition for partitioning the interior of the muffler case into a plurality of chambers is provided, and a communication groove that communicates between adjacent chambers and a communication groove that is open to the atmosphere in the most downstream chamber are provided on the muffler case side. The silencer for a vacuum pump according to claim 1, wherein the silencer is provided on a surface closely attached to the main body of the vacuum pump.
【請求項3】隣接する各室間を連通する連通溝を、消音
ケース側であって真空ポンプ本体との密着面の消音室外
周端縁に設けたことを特徴とする請求項1または2記載
の真空ポンプの消音器。
3. A communication groove for communicating between adjacent chambers is provided at an outer peripheral edge of the sound deadening chamber on the side close to the sound deadening case and in close contact with the vacuum pump body. Vacuum pump silencer.
JP27898794A 1994-11-14 1994-11-14 Vacuum pump silencer Expired - Fee Related JP2837814B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27898794A JP2837814B2 (en) 1994-11-14 1994-11-14 Vacuum pump silencer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27898794A JP2837814B2 (en) 1994-11-14 1994-11-14 Vacuum pump silencer

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JPH08135586A true JPH08135586A (en) 1996-05-28
JP2837814B2 JP2837814B2 (en) 1998-12-16

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KR20040037509A (en) * 2002-10-29 2004-05-07 서문원 A vaccum pump
JP2011214522A (en) * 2010-03-31 2011-10-27 Nabtesco Automotive Corp Compression device
JP2011214519A (en) * 2010-03-31 2011-10-27 Nabtesco Automotive Corp Vacuum pump
JP2013113232A (en) * 2011-11-29 2013-06-10 Nissin Kogyo Co Ltd Negative pressure pump
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CN105020140A (en) * 2014-04-30 2015-11-04 杨永坚 Pump body of vacuum pressure combination pump
WO2018220943A1 (en) * 2017-05-30 2018-12-06 株式会社アルバック Vacuum pump

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KR20040037509A (en) * 2002-10-29 2004-05-07 서문원 A vaccum pump
CN106968950A (en) * 2010-03-31 2017-07-21 纳博特斯克汽车株式会社 Vavuum pump
US10253775B2 (en) 2010-03-31 2019-04-09 Nabtesco Automotive Corporation Rotary pump having a casing being formed with a communicating hole communicating a space that is between the side plate and the wall surface of the driving machine
CN106968950B (en) * 2010-03-31 2020-02-07 纳博特斯克汽车零部件有限公司 Vacuum pump
EP2554848A4 (en) * 2010-03-31 2015-06-17 Nabtesco Automotive Corp Vacuum pump
JP2011214522A (en) * 2010-03-31 2011-10-27 Nabtesco Automotive Corp Compression device
US9255579B2 (en) 2010-03-31 2016-02-09 Nabtesco Automotive Corporation Vacuum pump having rotary compressing elements
JP2011214519A (en) * 2010-03-31 2011-10-27 Nabtesco Automotive Corp Vacuum pump
US9709057B2 (en) 2010-03-31 2017-07-18 Nabtesco Automotive Corporation Rotary pump having a casing being formed with a communicating hole communicating a space that is between the side plate and the wall surface of the driving machine
JP2013113232A (en) * 2011-11-29 2013-06-10 Nissin Kogyo Co Ltd Negative pressure pump
CN105020140A (en) * 2014-04-30 2015-11-04 杨永坚 Pump body of vacuum pressure combination pump
JP6473283B1 (en) * 2017-05-30 2019-02-20 株式会社アルバック Vacuum pump
WO2018220943A1 (en) * 2017-05-30 2018-12-06 株式会社アルバック Vacuum pump
CN110678650A (en) * 2017-05-30 2020-01-10 株式会社爱发科 Vacuum pump
TWI701387B (en) * 2017-05-30 2020-08-11 日商愛發科股份有限公司 Vacuum pump
US10982663B2 (en) 2017-05-30 2021-04-20 Ulvac, Inc. Vacuum pump
CN110678650B (en) * 2017-05-30 2021-08-06 株式会社爱发科 Vacuum pump

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