JPH08135577A - Electromagnetically-driven air pump - Google Patents

Electromagnetically-driven air pump

Info

Publication number
JPH08135577A
JPH08135577A JP30142794A JP30142794A JPH08135577A JP H08135577 A JPH08135577 A JP H08135577A JP 30142794 A JP30142794 A JP 30142794A JP 30142794 A JP30142794 A JP 30142794A JP H08135577 A JPH08135577 A JP H08135577A
Authority
JP
Japan
Prior art keywords
pole
magnetic
frame
diaphragm
vibrating piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30142794A
Other languages
Japanese (ja)
Inventor
Masatoshi Miyauchi
正俊 宮内
Yukio Nakamura
幸男 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Riken Keiki KK
Original Assignee
Riken Keiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Riken Keiki KK filed Critical Riken Keiki KK
Priority to JP30142794A priority Critical patent/JPH08135577A/en
Publication of JPH08135577A publication Critical patent/JPH08135577A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To improve drive efficiency and reduce weight and to prevent deterioration of a diaphragm during rest. CONSTITUTION: An electromagnetically-driven air pump comprises a cylindrical magnetic frame 6 around which two exciting coils 7 and 8 are wound so that one pole is formed at two ends and the other pole at a central part; a variation piece 9 wherein a magnetic pole is formed at two ends and a central part is contained in a frame reciprocatively with the flange part 6a of the magnetic frame 6 forming a center; and a pump chamber 1 having a diaphragm 3 connected to one end of the slide piece 9. A magnetic force is exerted on the vibration piece 9 from the two ends of the magnetic frame 6 and the central part thereof.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、雰囲気中の気体を吸引
するのに適した小型の電磁駆動式エアポンプに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a small electromagnetically driven air pump suitable for sucking gas in an atmosphere.

【0002】[0002]

【従来の技術】ガス警報装置等の組み込まれるエアポン
プは、小型であることが必要であるため、図5に示した
ように交流電力で励磁されるコイル20が設けられた筒
状磁気フレーム21に、着磁された振動片22をその一
半がフレーム21から突出した状態で往復動可能に設
け、振動片22の一端にポンプ室23を構成しているダ
イヤフラム24を固定して構成されている(実公昭61
−36788号公報)。
2. Description of the Related Art Since an air pump in which a gas alarm device is incorporated needs to be small, a cylindrical magnetic frame 21 provided with a coil 20 excited by AC power as shown in FIG. The magnetized vibrating piece 22 is provided so as to be able to reciprocate with one half of the vibrating piece 22 protruding from the frame 21, and the diaphragm 24 forming the pump chamber 23 is fixed to one end of the vibrating piece 22 ( Actual public Sho 61
-36788).

【0003】このような構成を採ると、振動片9は、磁
気フレーム21の端部21aを中心に往復動してダイヤ
フラム24を変形させてポンプ室1を膨張、収縮させ
る。しかしながら、振動片9が磁気フレーム21から突
出している関係上、振動片9の磁極と磁気フレーム21
の磁極との間の距離が大きくなって、磁気抵抗が大きく
なり、効率が低いため、フレーム21の一端に磁極位置
調整片25を設け、フレーム21の磁極と振動片22の
磁極との距離を小さくする対策が採られている。
With such a structure, the vibrating piece 9 reciprocates around the end 21a of the magnetic frame 21 to deform the diaphragm 24 and expand and contract the pump chamber 1. However, because the vibrating piece 9 projects from the magnetic frame 21, the magnetic pole of the vibrating piece 9 and the magnetic frame 21
Since the distance between the magnetic pole and the magnetic pole is increased, the magnetic resistance is increased, and the efficiency is low. Therefore, the magnetic pole position adjusting piece 25 is provided at one end of the frame 21, and the distance between the magnetic pole of the frame 21 and the magnetic pole of the vibrating piece 22 is increased. Measures to reduce the size are taken.

【0004】このため、振動片22の振動方向に対する
磁気抵抗にアンバランスが生じ、休止時には振動片22
に磁極位置調整片25側に引き寄せる磁気吸引力が作用
するため、ダイヤフラム24にこれを引き伸ばす方向の
力が作用し、ダイヤフラム24が短時間で劣化するとい
う問題がある。また、磁気フレーム21の一方の極が、
振動片22の無磁界領域に位置してるため、吸引、反発
力が小さく、効率が低いという問題の他、さらに磁気回
路を構成するための磁気調整片25が必要となり、重量
が増加するという問題も抱えている。
Therefore, the magnetic resistance of the vibrating element 22 in the vibration direction is unbalanced, and the vibrating element 22 is at rest.
Since the magnetic attraction force pulling toward the magnetic pole position adjusting piece 25 acts on the diaphragm 24, a force in the direction of extending the diaphragm 24 acts on the diaphragm 24, and the diaphragm 24 deteriorates in a short time. In addition, one pole of the magnetic frame 21
Since the vibrating piece 22 is located in the non-magnetic field region, the attraction and repulsion force are small and the efficiency is low, and further, the magnetic adjusting piece 25 for forming the magnetic circuit is required, and the weight is increased. I am also holding.

【0005】[0005]

【発明が解決しようとする課題】本発明はこのような問
題に鑑みてなされたものであって、その目的とするとこ
ろは高い効率と、ダイヤフラムの劣化を防止でき、さら
には軽量化を図ることができる新規な電磁駆動式エアポ
ンプを提供することである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and its object is to achieve high efficiency, prevent deterioration of the diaphragm, and further reduce the weight. It is to provide a new electromagnetically driven air pump capable of achieving the above.

【0006】[0006]

【課題を解決するための手段】このような問題を解消す
るために本発明においては、両端に一方の極を、また中
央部に他方の極を形成するように複数の励磁コイルが巻
回された筒状磁気フレームと、両端に磁極が形成されて
中央部が前記他方の極を中心に往復動可能に前記フレー
ムに設けられた振動片と、前記振動片の一端に接続され
たダイヤフラムを備えたポンプ室とからなり、前記励磁
コイルが交番電力により励磁するようにした。
In order to solve such a problem, in the present invention, a plurality of exciting coils are wound so as to form one pole at both ends and the other pole at the center. A cylindrical magnetic frame, a vibrating piece provided on the frame so that the magnetic poles are formed at both ends and a central portion can reciprocate around the other pole, and a diaphragm connected to one end of the vibrating piece. And a pump chamber, and the exciting coil is excited by alternating electric power.

【0007】[0007]

【作用】振動片が磁気フレームの中央に位置するから磁
極位置調整片が不要となり、これにより休止時において
も振動片を振動方向の一方に偏位させる磁気吸引力が極
めて小さく、また磁気フレームの両端に形成される同一
の極と、その中央部に形成される他方の極とにより振動
片が吸着力と反発力を同時に受けるから、高い効率でポ
ンプが作動する。
Since the vibrating piece is located at the center of the magnetic frame, the magnetic pole position adjusting piece is not required, so that the magnetic attraction force for displacing the vibrating piece in one of the vibrating directions is extremely small even at rest, and the magnetic frame Since the vibrating piece receives the attraction force and the repulsive force at the same time by the same pole formed at both ends and the other pole formed at the central portion thereof, the pump operates with high efficiency.

【0008】[0008]

【実施例】そこで以下に本発明の詳細を図示した実施例
に基づいて説明する。図1は本発明の一実施例を示すも
のであって、図中符号1は、ポンプ室で、剛性が大きな
材料、例えば高分子材料等で形成されたカップ状容器2
の開口部を、ゴム等の弾性材料で形成されたダイヤフラ
ム3で密閉し、また容器2の底面には吸引口4、及び吐
出口5を形成して構成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the illustrated embodiments. FIG. 1 shows an embodiment of the present invention, in which reference numeral 1 is a pump chamber, which is a cup-shaped container 2 formed of a material having a high rigidity, for example, a polymer material or the like.
The opening is closed by a diaphragm 3 formed of an elastic material such as rubber, and a suction port 4 and a discharge port 5 are formed on the bottom surface of the container 2.

【0009】6は、筒状の磁気フレームで、軟鉄等の透
磁性材料により構成され、かつ軸方向の中央部に領域を
区分するため、やはり透磁性材料からなるフランジ部6
aが形成されていて、基台部6bを介してポンプ室1に
固定されている。
A tubular magnetic frame 6 is made of a magnetically permeable material such as soft iron, and divides the region into a central portion in the axial direction. Therefore, the flange portion 6 also made of a magnetically permeable material.
a is formed and is fixed to the pump chamber 1 via the base portion 6b.

【0010】7、8は、それぞれフランジ部6aにより
分割された各領域に巻回された励磁コイルで、それぞれ
の励磁方向が相反するよう、つまり磁気フレーム6の両
端部がそれぞれ同一の一方の極となり、またフランジ部
6aが他方の極となるように複数設けられている。この
ような励磁方向の設定は、励磁コイルの巻回方向もしく
は励磁電流の方向を選択することにより実現できる。
Reference numerals 7 and 8 denote exciting coils wound around respective regions divided by the flange portion 6a, so that the exciting directions thereof are opposite to each other, that is, both ends of the magnetic frame 6 have the same pole. In addition, a plurality of flange portions 6a are provided so as to serve as the other pole. Such setting of the exciting direction can be realized by selecting the winding direction of the exciting coil or the direction of the exciting current.

【0011】9は、フェライト等の着磁材料により構成
された振動片で、励磁コイル7、8が非励磁状態にある
ときには、その中央部9aがフランジ部6aに対向する
ようにアーム10を介してダイヤフラム3の中心に固定
され、またその端部が巻き枠6の端面6c、6dよりも
内側に位置するように長さが設定されている。
Reference numeral 9 is a resonator element made of a magnetized material such as ferrite. When the exciting coils 7 and 8 are in a non-excited state, an arm 10 is interposed so that the central portion 9a faces the flange portion 6a. Is fixed to the center of the diaphragm 3, and its length is set so that its end portion is located inside the end surfaces 6c and 6d of the winding frame 6.

【0012】なお、図中符号12は、図中点線により示
すように開弁して、吸入、吐出動作を確保する弁を形成
する板材を、また13は空気抜き口をそれぞれ示す。
Reference numeral 12 in the drawing denotes a plate member which opens the valve as shown by a dotted line in the drawing to form a valve for ensuring suction and discharge operations, and 13 denotes an air vent.

【0013】次ぎにこのように構成した装置の動作を図
2に基づいて説明する。静止状態においては、磁気フレ
ーム6の磁気抵抗が、フランジ部6aを対称線とするよ
うにして対称で、従来必要としていた磁性体の調整片が
不要となるから、振動片9は、一方に偏することが無
く、組立時の位置を保持する。これにより、長時間休止
状態が継続しても、ダイヤフラム3にはこれを変形させ
る力が作用せず、ダイヤフラムの劣化が防止できる。
Next, the operation of the apparatus thus configured will be described with reference to FIG. In the stationary state, the magnetic resistance of the magnetic frame 6 is symmetrical with the flange portion 6a as a line of symmetry, and the adjusting piece of the magnetic body which is conventionally required is not necessary. Therefore, the vibrating piece 9 is biased to one side. The position at the time of assembling is maintained. As a result, even if the resting state continues for a long time, the diaphragm 3 is not affected by the force that deforms it, and the deterioration of the diaphragm can be prevented.

【0014】一方、励磁コイル7、8に交流電力を供給
すると、磁気フレーム6には図2(イ)に示したよう
に、一方の励磁コイル7は端部側をS極に、またフレー
ム部6a側をN極に、他方の励磁コイル8は外側(図中
左側)をS極に、またフレーム部6a側をN極とした磁
界を発生する。
On the other hand, when alternating current power is supplied to the exciting coils 7 and 8, one end of the exciting coil 7 becomes an S pole and the other end of the frame part becomes the magnetic frame 6 as shown in FIG. The 6a side is an N pole, the other exciting coil 8 is an outside (the left side in the drawing) is an S pole, and the frame portion 6a side is an N pole to generate a magnetic field.

【0015】これにより振動片9は、そのダイヤフラム
側が磁気フレーム6の端部6cのS極に吸引、同時にフ
ランジ部6a側のN極に押され、また振動片9の外側側
は、フランジ部6aのN極に吸引、同時に励磁コイル8
の外側のS極に反発され、図中矢印Aの方向に移動す
る。したがって、ダイヤフラム3は、ポンプ室1側に押
圧されて、ポンプ室1を圧縮する。これにより、ポンプ
室1の気体が圧縮されて吐出口5から圧送される。
As a result, the diaphragm piece of the vibrating piece 9 is attracted to the S pole of the end portion 6c of the magnetic frame 6 and simultaneously pushed by the N pole of the flange portion 6a side, and the outer side of the vibrating piece 9 has the flange portion 6a. Attracted to the N pole of the excitation coil 8 at the same time
It is repulsed by the S pole outside and moves in the direction of arrow A in the figure. Therefore, the diaphragm 3 is pressed toward the pump chamber 1 and compresses the pump chamber 1. As a result, the gas in the pump chamber 1 is compressed and pressure-fed from the discharge port 5.

【0016】このようにして振動片9がポンプ室側の死
点に到達した段階で、励磁コイル7、8への電流の向き
が切り替わり、図2(ロ)に示したように励磁コイル7
はダイヤフラム3側がN極に、またフランジ部6a側が
S極に、励磁コイル8は外側がN極に、フランジ部6a
側がS極になる。
In this way, when the vibrating piece 9 reaches the dead center on the pump chamber side, the directions of the currents to the exciting coils 7 and 8 are switched, and as shown in FIG.
Is the N pole on the diaphragm 3 side, the S pole on the flange 6a side, and the N pole on the outside of the exciting coil 8, and the flange 6a
The side becomes the S pole.

【0017】これにより、振動片9は、そのダイヤフラ
ム3側が励磁コイル7のダイヤフラム3側のN極に反
発、同時にフランジ部6a側のS極に吸引され、また振
動片9の外側は励磁コイル8の外側のN極に吸引、同時
にフランジ部側6aのS極に反発されて図中矢印Bの方
向に移動する。したがって、ダイヤフラム3は、磁気フ
レーム6側に引かれ、ポンプ室1を膨張させて吸入口4
から気体をポンプ室1に吸引する。
As a result, the vibrating bar 9 repels the diaphragm 3 side to the N pole of the exciting coil 7 on the diaphragm 3 side and is simultaneously attracted to the S pole of the flange 6a side, and the outside of the vibrating bar 9 is the exciting coil 8. Is attracted to the N pole outside, and at the same time repulsed by the S pole on the flange portion side 6a to move in the direction of arrow B in the figure. Therefore, the diaphragm 3 is pulled toward the magnetic frame 6 side, expands the pump chamber 1, and causes the suction port 4 to move.
The gas is sucked into the pump chamber 1.

【0018】このようにして振動片9が他方の死点に到
達すると(図2(ハ))、各励磁コイル7、8の励磁方
向が切り替わる。これにより振動片9は、磁気フレーム
6から前述した図2(イ)と同様な磁気力を受けて、再
び図中矢印Aで示す方向に移動する。以下、振動片9が
死点に到達する度に、各励磁コイル7、8の励磁方向が
切り替わり、これにより図2(ロ)、及び図2(ハ)の
過程を交互に繰返して磁気フレーム6の軸方向に振動片
9が往復動し、ポンプ室1が収縮、膨張されてポンプ作
用が実行される。
When the vibrating piece 9 reaches the other dead point in this way (FIG. 2C), the exciting directions of the exciting coils 7 and 8 are switched. As a result, the vibrating piece 9 receives the magnetic force similar to that in FIG. 2A from the magnetic frame 6 and moves again in the direction indicated by the arrow A in the figure. Hereinafter, each time the vibrating piece 9 reaches the dead center, the exciting directions of the exciting coils 7 and 8 are switched, whereby the processes of FIG. 2B and FIG. The vibrating reed 9 reciprocates in the axial direction, and the pump chamber 1 is contracted and expanded to perform the pump action.

【0019】図4は、上述したポンプの吸引負荷量を変
化させた時の流量(図中曲線A)及び消費電力(図中符
号C)の関係を示すもので、従来のポンプの流量(図中
符号B)及び消費電力(図中符号D)と比較すると、本
発明のポンプは、負荷量の増加による流量の低下が小さ
く、また消費電力も従来のものよりも小さく、さらに負
荷量の増加にともなう消費電力の増加の程度も従来のも
のに比較して小さく、総合的な性能が従来のものよりも
1.8倍程度向上した。
FIG. 4 shows the relationship between the flow rate (curve A in the figure) and power consumption (reference numeral C in the figure) when the suction load of the pump is changed. Compared with the medium code B) and the power consumption (symbol D in the figure), in the pump of the present invention, the decrease of the flow rate due to the increase of the load amount is small, the power consumption is smaller than that of the conventional one, and the load amount further increases. The degree of increase in power consumption due to the change was smaller than that of the conventional one, and the overall performance was improved by about 1.8 times as compared with the conventional one.

【0020】なお、上述の実施例においては、磁気フレ
ーム6の中央部にフランジ6aを形成しているが、図4
に示したように磁気フレーム6の磁気コイル7、8を固
定する領域を筒状に形成し、予め巻回しておいた励磁コ
イル7、8を挿通してから、端部に固定片13を装着し
て励磁コイル7、8を固定するようにしてもよい。な
お、図中符号14は、仕切板を示す。
Although the flange 6a is formed at the center of the magnetic frame 6 in the above embodiment, the structure shown in FIG.
As shown in FIG. 3, the region for fixing the magnetic coils 7 and 8 of the magnetic frame 6 is formed into a tubular shape, and the pre-wound excitation coils 7 and 8 are inserted, and then the fixing pieces 13 are attached to the ends. Alternatively, the exciting coils 7 and 8 may be fixed. In addition, the code | symbol 14 in a figure shows a partition plate.

【0021】この実施例によれば、励磁コイルの着脱が
可能であるため、汎用コイル巻き機により励磁コイルが
製作できるばかりでなく、励磁コイルを簡単に交換でき
て、定格変更や、メンテナンスを簡単に行うことができ
る。
According to this embodiment, since the exciting coil can be attached and detached, not only can the exciting coil be manufactured by a general-purpose coil winding machine, but also the exciting coil can be easily replaced, and the rating change and maintenance can be easily performed. Can be done.

【0022】[0022]

【発明の効果】以上、説明したように本発明において
は、両端に一方の極を、また中央部に他方の極を形成す
るように複数の励磁コイルが巻回された筒状磁気フレー
ムと、両端に磁極が形成されて中央部が他方の極を中心
に往復動可能にフレームに設けられた振動片と、振動片
の一端に接続されたダイヤフラムを備えたポンプ室とか
らなり、励磁コイルを交番電力により励磁するようにし
たので、磁気フレームの両端に形成される同一の極と、
その中央部に形成される他方の極とにより振動片が同時
に吸着力と反発力を受けて高い効率で駆動できるばかり
でなく、軸方向におけるフレームの磁気抵抗がほぼ対称
となっていて非駆動時においても振動片がフレームのほ
ぼ中央に位置してダイヤフラムを引き伸ばす力が作用せ
ず、ダイヤフラムの劣化を防止することができ、さらに
磁気フレームの磁極位置を調整する部材が不要となって
軽量化を図ることができる。
As described above, according to the present invention, a cylindrical magnetic frame in which a plurality of exciting coils are wound so as to form one pole at both ends and the other pole at the center, It consists of a vibrating piece having magnetic poles formed at both ends and a central part that is reciprocally movable around the other pole, and a pump chamber equipped with a diaphragm connected to one end of the vibrating piece. Since it was excited by alternating power, the same poles formed at both ends of the magnetic frame,
The other pole formed in the center of the vibrator not only allows the vibrating piece to be driven with high efficiency due to simultaneous attraction and repulsion, but also when the magnetic resistance of the frame in the axial direction is almost symmetrical, it is not driven. Also, the vibrating element is located almost in the center of the frame, and the force for stretching the diaphragm does not act, so it is possible to prevent the deterioration of the diaphragm, and the member that adjusts the magnetic pole position of the magnetic frame is unnecessary and the weight is reduced. Can be planned.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す装置の断面図である。FIG. 1 is a sectional view of an apparatus showing an embodiment of the present invention.

【図2】図(イ)乃至(ハ)は、それぞれ同上装置の動
作を示す説明図である。
FIG. 2A to FIG. 2C are explanatory diagrams showing the operation of the above-mentioned device.

【図3】本発明のポンプと従来の電磁駆動式エアポンプ
との負荷量に対する流量特性、及び消費電力を示す線図
である。
FIG. 3 is a diagram showing flow rate characteristics and power consumption with respect to a load amount of the pump of the present invention and a conventional electromagnetically driven air pump.

【図4】本発明の他の実施例を示す断面図である。FIG. 4 is a sectional view showing another embodiment of the present invention.

【図5】従来の電磁駆動式エアポンプの一例を示す断面
図である。
FIG. 5 is a sectional view showing an example of a conventional electromagnetically driven air pump.

【符号の説明】[Explanation of symbols]

1 ポンプ室 3 ダイヤフラム 4 吸引口 5 吐出口 6 筒状磁気フレーム 6a フランジ部 7、8 励磁コイル 9 振動片 10 アーム 1 Pump Chamber 3 Diaphragm 4 Suction Port 5 Discharge Port 6 Cylindrical Magnetic Frame 6a Flange 7, 8 Excitation Coil 9 Vibrating Element 10 Arm

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 両端に一方の極を、また中央部に他方の
極を形成するように複数の励磁コイルが巻回された筒状
磁気フレームと、両端に磁極が形成されて中央部が前記
他方の極を中心に往復動可能に前記フレームに設けられ
た振動片と、前記振動片の一端に接続されたダイヤフラ
ムを備えたポンプ室とからなり、前記励磁コイルが交番
電力により励磁される電磁駆動式エアポンプ。
1. A cylindrical magnetic frame around which a plurality of exciting coils are wound so as to form one pole at both ends and the other pole at a central portion, and magnetic poles are formed at both ends so that the central portion is An electromagnetic wave which is composed of a vibrating piece provided on the frame so as to reciprocate around the other pole, and a pump chamber provided with a diaphragm connected to one end of the vibrating piece, wherein the exciting coil is excited by alternating electric power. Driven air pump.
【請求項2】 前記筒状磁気フレームの中央部にフラン
ジ部が形成されている請求項1の電磁式エアポンプ。
2. The electromagnetic air pump according to claim 1, wherein a flange portion is formed in a central portion of the cylindrical magnetic frame.
【請求項3】前記振動片は、前記筒状磁気フレームの端
部近傍を死点として往復動する請求項1の電磁式エアポ
ンプ。
3. The electromagnetic air pump according to claim 1, wherein the vibrating piece reciprocates with a dead center near an end of the cylindrical magnetic frame.
JP30142794A 1994-11-10 1994-11-10 Electromagnetically-driven air pump Pending JPH08135577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30142794A JPH08135577A (en) 1994-11-10 1994-11-10 Electromagnetically-driven air pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30142794A JPH08135577A (en) 1994-11-10 1994-11-10 Electromagnetically-driven air pump

Publications (1)

Publication Number Publication Date
JPH08135577A true JPH08135577A (en) 1996-05-28

Family

ID=17896756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30142794A Pending JPH08135577A (en) 1994-11-10 1994-11-10 Electromagnetically-driven air pump

Country Status (1)

Country Link
JP (1) JPH08135577A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007146795A (en) * 2005-11-30 2007-06-14 Nikkiso Co Ltd Micropump and driver

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007146795A (en) * 2005-11-30 2007-06-14 Nikkiso Co Ltd Micropump and driver

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