JPH08134627A - Masking device - Google Patents

Abstract

PURPOSE: To make it possible to easily attach and detach a masking device with simple constitution and to attain flatness with high accuracy. CONSTITUTION: A masking jig 7 is composed of a spacer 2 which holds a material 1 to be masked, mask plates 3, 4 which are superposed on at least either above or below the spacer 2 and have filming holes 3a, 4a and positioning pins 6 which position the spacer 2 and these mask plates 3, 4. At least the spacer 2 and the mask plates 3, 4 of the masking jig 7 are simultaneously magnetized by an electromagnet, by which the spacer 2 and the mask plates 3, 4 are attachably and detachably attracted to each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention positions and holds a material to be masked in order to form a thin film mainly on a non-magnetic material part on an electronic part such as a crystal oscillator or a ceramic element by a method such as vapor deposition. The present invention relates to a masking device for masking.

[0002]

2. Description of the Related Art Up to now, in a masking device for forming a thin film on an electronic component made of a non-magnetic material, a spacer and a mask plate are fixed by screwing or spot welding.

In the case of using the above-mentioned screw tightening, it took a long time to attach and detach. Also, in the case of spot welding, not only are welding marks left and the masking device cannot be reused,
There was a problem that the flatness of the masking device could not be maintained due to welding distortion.

In order to solve these problems, Japanese Unexamined Patent Application Publication No.
A masking device described in Japanese Patent No. -13858 has been proposed. Since the permanent mask is used to fix the masking device, a large number of permanent magnets must be used to ensure the flatness required for the masking device. Moreover, it takes time and effort to assemble a large number of permanent magnets, and the number of attaching / detaching steps of the masking device has not been significantly reduced.

[0005]

SUMMARY OF THE INVENTION The present invention provides a masking device which can be easily attached and detached and which can ensure highly accurate flatness.

[0006]

SUMMARY OF THE INVENTION According to the present invention, a spacer for holding a material to be masked, a mask plate having a film forming hole formed on at least one of the upper and lower sides of the spacer, and the spacer and the mask plate are positioned. A masking jig is constituted by the positioning pin, and at least the spacer and the mask plate of the masking jig are magnetized at the same time by an electromagnet, whereby the spacer and the mask plate are detachably attracted. .

When the material to be masked is removed from the masking jig, the magnetic force (adsorption force) is weaker than the detaching force of the human hand without demagnetization, so that the material can be removed by the human hand. However, if the masking jig is demagnetized, the masking jig, that is, the spacer, the mask plate and the like can be automatically and easily removed.

It is preferable to dispose a reinforcing plate having a thickness of 0.2 to 0.4 mm between the spacer and at least one of the mask plates which are superposed above and below the spacer. In this case, it is carried out when films are applied to both surfaces of the material to be masked. However, when the film is to be coated on only one surface of the material to be masked, the reinforcing plate may be interposed between the spacer and the mask plate to be polymerized above or below the spacer. Further, the reinforcing plate can be superposed on the outer side of the mask plate in the case of double-sided film attachment, and on the lower side of the spacer in the case of single-sided film attachment.

It is preferable that the spacer and the mask plate are made of a magnetic material such as JIS standard SUS430 material, and the reinforcing plate is made of a non-magnetic material such as JIS standard SUS301 material.

[0010]

Function: The material to be masked is accommodated in the accommodating hole of the spacer, and one or both of the upper mask plate and the lower mask plate having the film forming hole are positioned on the upper surface and / or the lower surface of the spacer. Insert into a pin and polymerize. The masking device in the superposed state is magnetized by an electromagnet so that the spacer and the mask plate are integrally adsorbed and fixed. In this state, a film is formed on the material to be masked by vapor deposition or the like through the film forming hole of the mask plate. After that, the mask plate is peeled off and the material to be masked is taken out.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings in the case of applying a double-sided film. FIG. 1 is a partially enlarged cross-sectional view of a masking device before polymerization according to an embodiment of the present invention, FIG. 2 is a front view of the masking device after polymerization, FIG. 3 is a plan view of an upper mask plate, and FIG. FIG. 5 is a plan view of the reinforcing plate, and FIG. 6 is a plan view of the lower mask plate.

In FIG. 1, the material 1 to be masked is contained in the storage hole 2 a of the spacer 2. On the upper surface or the lower surface of the spacer 2, mask plates 3 and 4 having film forming holes 3a and 4a are arranged, respectively. Further, a reinforcing plate 5 having an escape hole 5a for reinforcement is provided between the spacer 2 and the lower mask plate 4. The lower mask plate 4, the reinforcing plate 5, the spacer 2 and the upper mask plate 3 are provided with positioning holes 4b, 5b, 2b and 3b, respectively, and the positioning holes 4b, 5b, 2b and 3b are aligned with each other. Then, the positioning pin 6 is inserted and positioned.

The lower mask plate 4, the spacer 2, the upper mask plate 3, the reinforcing plate 5 and the positioning pin 6 constitute a masking jig 7. At least the spacer 2, the upper mask plate 3, the lower mask plate 4, and the reinforcing plate 5 of the masking jig 7.
In the superposed state, the constituent members are integrally attracted and fixed as the masking jig 7 by magnetizing with a magnetizing device 20 as shown in FIG.

The magnetizing device 20 may have the structure shown in FIG. 8, for example. That is, the magnetizing device 20 of FIG.
Is configured to place the masking device 7 having the above-described configuration on the table 21, and a table mount 22 is provided below the table 21. This table stand 22
Is formed in a concave shape, and the iron core 2 is formed in the center of the concave portion 23.
4 is fixed, and a coil 25 is wound around the iron core 24 via an insulating means 26 such as an insulating tape. A DC / AC converter 27 such as an inverter is connected to the coil 25. Therefore, the changeover switch (not shown) of the DC / AC converter 27 is turned on / off to magnetize or demagnetize. For example, in the case of magnetization, the upper surface of each of the spacer and the mask plate becomes the N pole and the lower surface becomes the S pole, and the entire masking jig 7 is attracted and fixed.

With the masking jig 7 fixed as described above, the required film forming work is performed.

After forming the thin film, the material to be masked 1 can be removed by peeling off the upper mask plate 3.
Further, the upper mask plate 3 can be removed more easily by demagnetizing the masking jig 7 using the magnetizing device 20.

In order to obtain a uniform and appropriate magnetic force, as a result of various experiments, SUS430 is used as the spacer 2, SUS430 is used as the mask plates 3 and 4, and SUS30 is used as the reinforcing plate 5.
It turned out that 1 is suitable. However, the present invention is not limited to the above materials.

In the above embodiment, the case of double-sided film formation in which the material to be masked 1 is filmed on both upper and lower surfaces has been described. Needless to say, it is possible to carry out the case. For example, as shown in FIG. 7, the upper mask plate 3 in which the lower mask plate 4 in the upper and lower embodiments is omitted, the spacer 2 and the reinforcing plate 5 are included, and the reinforcing plate 5 is used.
It is preferable to use a material that does not form the escape hole 5a.

[0019]

According to the present invention, a spacer for holding a material to be masked, a mask plate having a film forming hole formed on at least one of the upper and lower sides of the spacer, and a positioning member for positioning the spacer and the mask plate A pin constitutes a masking jig, and at least the spacer and the mask plate of the masking jig are magnetized at the same time by an electromagnet so that the spacer and the mask plate are removably adsorbed. It can be easily fixed by simply magnetizing a masking jig such as a plate with an electromagnet.
As in the conventional example described in Japanese Patent Laid-Open No. 13858/1992, a large number of permanent magnets are not required, and the work of assembling the permanent magnets can be omitted, thus improving work efficiency. Moreover,
When fixing the masking jig, the flatness of the spacers, mask plates, etc. that make up the masking jig can be made even more precise, and the material to be masked can be positioned with high precision and easily removable. be able to.

When removing the material to be masked from the masking jig, the masking jig can be removed by demagnetizing the masking jig.
The spacers and mask plates that make up the masking jig can be easily removed automatically. Therefore, since only the upper mask plate can be easily removed, it is possible to easily take out the product for which film formation has been completed.

By placing a reinforcing plate having a thickness of 0.2 to 0.4 mm between the spacer and at least one of the mask plates overlaid on the spacer and the spacer, the spacer and the mask plate are arranged. Not only are they reinforced, but their flatness is even more guaranteed.

[Brief description of drawings]

FIG. 1 is a partially enlarged cross-sectional view of a masking device before polymerization according to an embodiment of the present invention.

FIG. 2 is a front view of a masking device after polymerization.

FIG. 3 is a plan view of an upper mask plate.

FIG. 4 is a plan view of a spacer.

FIG. 5 is a plan view of a reinforcing plate.

FIG. 6 is a plan view of a lower mask plate.

FIG. 7 is a partially enlarged cross-sectional view of a masking device before superposition when a single-sided film is attached.

FIG. 8 is a schematic sectional view showing an example of a magnetizing device.

[Explanation of symbols]

 1 Material to be masked 2 Spacer 2a Storage hole 2b Positioning hole 3 Upper mask plate 3a Membrane attaching hole 3b Positioning hole 4 Lower mask plate 4a Membrane attaching hole 4b Positioning hole 5 Reinforcing plate 5a Membrane attaching hole 5b Positioning hole 6 Positioning pin 7 Masking Jig 20 Magnetizing device

Claims (4)

[Claims] 1. A masking jig comprising: a spacer for holding a material to be masked; a mask plate having a film forming hole formed on at least one of the upper and lower sides of the spacer; and a positioning pin for positioning the spacer and the mask plate. A masking device, wherein at least a spacer and a mask plate of the masking jig are magnetized at the same time by an electromagnet so that the spacer and the mask plate are removably adsorbed. 2. The masking device according to claim 1, wherein when the material to be masked is removed from the masking jig, the masking jig can be removed by demagnetizing the masking jig. 3. Between the spacer and at least one of the mask plates superposed above and below the spacer,
The masking device according to claim 1, wherein a reinforcing plate having a thickness of 0.2 to 0.4 mm is arranged. 4. The masking device according to claim 1, wherein the spacer and the mask plate are made of a magnetic material, and the reinforcing plate is made of a non-magnetic material.