JPH08123553A - Positioning device - Google Patents

Abstract

PURPOSE: To automatically perform the following adjustment of the control gain of a control system by automatically and exactly detecting that positioning accuracy or positioning time gets out of an initial set state. CONSTITUTION: This device is provided with measuring means 7 and 8 for measuring the moving data of a stage when the control system controls the move of the stage 6 based on a moving command signal D1 from the outside, storage means 19 for storing the move data of the stage as reference move data while the control system is optimumly adjusted, and deciding means 18 for comparatively deciding the move data of the stage measured by the measuring means 7 and 8 and the reference move data stored in the storage means 19 while the control system controls the move of the stage.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device, and more particularly to a positioning device applied to an XY stage of an exposure apparatus for semiconductor manufacturing.

[0002]

2. Description of the Related Art FIG. 5 is a block diagram showing a positioning device according to a conventional example, and FIGS. 3 and 4 are perspective views showing the appearance of an XY stage to which such a positioning device is applied.

As shown in FIGS. 3 and 4, the positioning device applied to the XY stage is a moving body 6 which is an X or Y stage to be positioned, and a motor 5 which serves as an actuator for moving the moving body 6. And a position measuring device 7 such as a laser length measuring device or a linear scale for measuring the current position of the moving body 6 using a mirror fixed to the upper part of the moving body 6 and outputting a current position signal P of the moving body 6. ing.

Further, as shown in FIG. 5, the current position signal P
And a position command signal D for instructing the target position of the moving body 6
1 and the current position signal P of the moving body 6 are input to output a current command signal S1, a position command signal D1 indicating the target position of the moving body 6 and a current position signal P of the moving body 6.
Is input and calculates and outputs a speed command signal D2, a speed amplifier 2 that inputs a speed command signal D2 and a speed signal V output by a differentiator 8 and outputs a current command signal S2, and a speed amplifier 2, a control mode selection switch 9 for selecting the current command signal S2 output by 2 and the current command signal S1 output by the position amplifier 3, and outputting the selected current command signal S1 to the driver amplifier 4.
The current command signal S1 selected by the control mode selection switch 9
Alternatively, it has a driver amplifier 4 for inputting S2 for current amplification and outputting a current I to the motor 5.

In this conventional example, when the target position command signal D1 is commanded from the outside, the speed command calculator 1 obtains a position deviation which is a deviation from the current position signal P, and the speed command signal D2 corresponding to the position deviation. Is calculated and output to the speed amplifier 3. The control mode selection switch 9 is set to the a side for selecting the current command signal S2 output by the speed amplifier 2 near the target position by a controller (not shown), and then the current command signal S1 output by the position amplifier 3 near the target position. Is set to the side b. The control gains of the speed amplifier 2 and the position amplifier 3 are set so as to satisfy the positioning time and positioning accuracy required when the apparatus is started up.

[0006]

By the way, in such a positioning device, particularly when guiding the moving body 6 by frictional contact, when the device is driven for a long period of time, the oil film of the frictional contact portion changes with time, or the friction The mechanical characteristics of the positioning mechanism may change due to wear of the contact surface, and the required positioning accuracy and positioning time may not be satisfied.

In order to avoid this, in the conventional positioning apparatus, the apparatus is temporarily stopped and a positioning waveform measuring machine such as an oscilloscope and a control characteristic measuring instrument such as a servo analyzer are connected to the outside of the control system to Control characteristics need to be measured regularly. In order to return the positioning accuracy and positioning time to the original state in the conventional device, for example, it is necessary to make the oil film state of the friction contact part the same as the initial state of the device. Maintenance is required to clean the frictional contact area and add new oil.

Further, in the conventional positioning device, it is necessary to prepare a special measuring instrument such as an oscilloscope or a servo analyzer and connect to the device for measurement even in the case of an unexpected failure, so that the device is returned to the initial state. There is also the problem of wasting time and money.

A positioning device which solves these problems and can maintain its positioning accuracy and positioning time automatically and at a desired value without the need to connect a special external measuring instrument such as an oscilloscope or a servo analyzer is proposed in the present application. It has been proposed by a person in JP-A-6-124126 (published on May 6, 1994).

In the positioning device proposed in this publication, a means for inputting a test movement command signal instead of an external movement command signal to the control system, and a test movement command signal input to the control system. The positioning device is provided with means for measuring the control characteristic of the control system when the movement of the moving body is controlled, and means for adjusting the control gain of the control system based on the measured control characteristic. By automatically adjusting the gain, it is possible to automatically and accurately return the positioning performance of the device to the initial setting state.

An object of the present invention is to provide a positioning device which is a further improvement of the above-mentioned device previously proposed by the applicant of the present invention. More specifically, the positioning accuracy and the positioning time are initialized. It is an object of the present invention to provide a positioning device that can automatically and accurately detect a deviation from the state and automatically adjust the control gain of the control system thereafter.

[0012]

In order to achieve the above object, a positioning device of the present invention comprises an actuator for moving a moving body, and movement of the moving body by the actuator based on a movement command signal from the outside. Controlling means for controlling the moving body, and measuring means for measuring movement data of the moving body when the controlling means controls movement of the moving body,
Storage means for storing movement data of the moving body as reference movement data when the control means is optimally adjusted; and measurement by the measuring means when the control means controls movement of the moving body It is characterized in that it has a judging means for comparing and judging the moved data of the moving body and the reference moved data stored in the storage means.

In the present invention, the judging means may stop the movement control of the moving body by the control means based on the movement command signal from the outside when the judgment result is in a set state, and The measuring means may sample at least one of the data indicating the speed and the positional deviation of the moving body as the moving data at a fixed time while the control means controls the movement of the moving body. Is also good.

In this case, when the determination result of the determination means is in the set state, the display means for graphically displaying the sampling data indicating at least one of the speed and the position deviation of the moving body stored in the storage means. Or having a recording means for recording the sampling data indicating at least one of the speed and the positional deviation of the moving body stored in the storage means on a removable recording medium,
Further, a communication means for transferring the sampling data indicating at least one of the velocity and the position deviation of the moving body stored in the storage means to the outside may be provided.

Further, in the present invention, there is provided a gain adjusting means for adjusting the control gain of the actuator, and the gain adjusting means stops the movement control of the moving body based on the movement command signal from the outside. After that, the control gain may be automatically adjusted, and further, the gain adjusting means has a test signal generating section for giving a test movement command signal to the control means, and the control means has the test signal. Measure the control characteristic of the control means when controlling the movement of the moving body based on the movement command signal from the generation unit, and adjust the control gain according to the measurement result,
Further, the measuring means may sample at least one of the data indicating the speed and the positional deviation of the moving body as the moving data at a fixed time while the control means controls the movement of the moving body. .

In this case, when the determination result of the determination means is in the set state, the sampling data indicating at least one of the speed and the position deviation of the moving body stored in the storage means, and the control The control means, which has a display means for graphically displaying at least one of the control characteristic and the control gain of the means, and the sampling data which is stored in the storage means and indicates at least one of the velocity and the position deviation of the moving body; The control data and the control gain are recorded on a removable recording medium, the sampling data indicating at least one of the speed and the position deviation of the moving body stored in the storage means, and the control You may make it have a communication means which transfers the control characteristic and control gain of a means to the outside.

Further, in the present invention, the movement data is data relating to at least one of the positioning time and the positioning accuracy of the moving body, or the control means first moves the moving body through the actuator with emphasis on speed. Next, the moving body is moved with emphasis on the stop position accuracy via the actuator, or the storage means further stores the control gain of the control means according to the current position of the moving body, When the means controls the movement of the moving body, the control means may perform the movement control of the moving body by reading the control gain stored in the storage means according to the current position of the moving body. good.

[0018]

According to the positioning device of the present invention, it becomes possible to check the control performance of the device over the entire region where the moving body is driven, while the device is in the operating state.

In particular, if at least one of the data (speed and position deviation) sampled during operation and the measurement result of the control characteristic of the control system is displayed on the display means when the device is out of order, the display is performed. The cause of the error can be easily investigated by the service person, and the time for investigating the cause of the error and the time for repairing the failure portion can be shortened. Further, it is possible to save the labor and time required for the service person to connect the measuring instrument such as the oscilloscope and the transfer function measuring instrument.

If at least one of the data (speed and position deviation) sampled during operation, the measurement result of the control characteristic of the control system and the control gain is recorded on a removable recording medium by a recording means, a serviceman can obtain the data. It will be possible to take it home and perform detailed analysis, and it will also be possible to identify the cause of the error that cannot be easily investigated.

Similarly, if at least one of the data (speed and position deviation) sampled during operation, the measurement result of the control characteristic of the control system and the control gain can be communicated to the outside, detailed analysis by the manufacturer of the device can be carried out. This makes it possible to identify the cause of an error that cannot be easily investigated at an early stage.

Further, a storage means for storing the control gain of the control system according to the current position of the moving body is provided, and the control using the stored control gain is performed according to the current position of the moving body during operation. Then, it becomes possible to achieve the highest positioning accuracy and the shortest positioning time performance in the entire drive area of the moving body.

[0023]

1 is a block diagram showing an embodiment of a positioning device according to the present invention. In FIG. 5, the above-mentioned FIG.
Those denoted by the same reference numerals as those in FIG. 5 indicate the same constituent elements as those in the example of FIG.

In FIG. 1, reference numeral 20 denotes an automatic adjustment unit that measures the control characteristics of the device and adjusts the control gain so that the desired characteristics are obtained. The automatic adjusting unit 20 receives the test signal generating unit 11 serving as a test signal generating unit for generating a test signal TD for measuring the control characteristic of the device, the current position signal P and the test signal TD, and controls the control characteristic of the device. A gain / phase measuring unit 10 serving as a measuring unit for measuring, a memory 12 serving as a storing unit for storing measured values by the gain / phase measuring unit 10, a position control for automatically adjusting control gains of the position amplifier 3 and the speed amplifier 2. A control gain adjusting unit 15 serving as a gain adjusting unit for outputting the gain setting signal PG and the speed control gain setting signal VG, a memory 16 serving as a storage unit for storing the position control gain setting value and the speed control gain setting value, A control state that receives the current position signal P or the current speed signal V and serves as a comparison / determination unit that determines the control state of the device based on the comparison result. Tough 18, a memory 19 serving as storage means for storing the current speed signal V and the current position signal P which is sampled at regular time intervals △ t.

Reference numeral 30 denotes a graphic display device which serves as a display means such as a CRT or a plotter and graphically displays the gain / phase measurement data in the memory 12 and the sampling speed data and sampling position data in the memory 19. Reference numeral 35 is a recording device which is a recording means for recording data on a removable recording medium such as a floppy disk driver, an optical disk driver, an IC memory card, and 36 is a communication means which is connected to a communication line such as a telephone line or an Ethernet line. It is a communication device.

A position switch 14 selects whether the signal input to the position amplifier 3 is the position command signal D1 from an external command controller (not shown) or the output TD from the test signal generator 11. A speed switch 13 selects whether the signal input to the speed amplifier 2 is the speed command signal D2 from the speed command calculator 1 or the output TD from the test signal generator 11. Reference numeral 17 designates the signal input to the gain / phase measuring unit 10 and the signal input to the control state determination unit 18 as the current position signal P from the position measuring device 7 or from the differentiator 8 that differentiates the current position signal P with time. This is an adjustment mode selection switch for selecting whether to use the current speed signal V, and is switched simultaneously with the control mode selection switch 9.

In this embodiment, when the positioning device is operated, the position switch 14 is set to the e side and the speed switch 13 is set to the c side, and the target position command signal D1 as the target position command is sent to the position amplifier 3. Further, the speed command signal D2 which is a speed command is input to the speed amplifier 2. In the operation during operation, when the target position command D1 is commanded from the outside similarly to the conventional example, the speed command calculator 1 obtains the position deviation which is the deviation from the current position signal P, and the speed command signal corresponding to the position deviation is obtained. D2 is calculated and output to the speed amplifier 2. The control mode selection switch 9 is first set to the a side for selecting the current command signal S2 output by the speed amplifier 2 until the stage 6 which is a moving body is moved to the vicinity of the target position, and then the stage 6 is moved to the vicinity of the target position. When the position is reached, the current command signal S1 output by the position amplifier 3 is switched to the side b.

The memory 19 stores the speed signal data V [i] (i = 1, i = 1, i = 1, i = 1, i) when the control gains of the speed amplifier 2 and the position amplifier 3 are optimally adjusted when the apparatus is started up. 2, 3, ...) and position signal data P [j] (j =
1, 2, 3, ...) are stored. The control state determination unit 18 is
When the target position command signal D1 is commanded from the outside and the speed of the stage 6 is controlled by the output from the speed amplifier 2 based on the speed command signal D2, the current speed from the differentiator 8 at a constant time interval Δt. The signal V is sampled, and this sampling data is used as the speed signal data V in the memory 19.
[I] (i = 1, 2, 3, ...) Sequentially compared. The difference ΔV = V−
If V [i] exceeds the preset speed tolerance,
It is determined that the speed control system based on the output of the speed amplifier 2 has a control failure.

Similarly, when the stage 6 is moved to the vicinity of the target position, the switch 9 is switched from the side a to the side b, and the position of the stage 6 is controlled based on the position command signal D1, a fixed time interval is reached. The current position signal P is sampled at Δt, and this sampling data is sequentially compared with the position signal data P [j] (j = 1, 2, 3, ...) In the memory 19, and the difference ΔP = P− When P [i] exceeds a preset position allowable value, it is determined that the position control system based on the output of the position amplifier 3 has a poor control.

Then, the control state judging section 18 determines the speed difference ΔV.
Or when it is determined that the position difference ΔP exceeds the allowable value,
The control gain is corrected by the automatic adjustment unit 20 assuming that the device does not satisfy the required positioning time or positioning accuracy.

First, the speed switch 13 is switched from the c side to the d side, the output TD of the test signal generating section 11 is input to the speed amplifier 2, and the control mode selection switch 9 is set to the a side to set the speed amplifier. The current command signal S2 output by 2 is input to the driver amplifier 4. At the same time, the adjustment mode selection switch 17 is set to the h side, and the current speed signal V output from the differentiator 8 is input to the gain / phase measuring unit 10.

After that, the test signal generator 11 first generates a sine wave having a low frequency f _{min in} the frequency range f _{min to} f _{max in} which the characteristics of the frequency characteristics of the speed control system (the primary resonance point of the mechanical mechanism, etc.) can be understood. m periods are generated, then frequency f ₁
= Sine wave of f _min + △ f is m cycles generated, and so _{f i = f i-1 +} △ f (i = 1,2,3, ···) a sine wave of the frequency f _max It is generated at intervals of Δf until it becomes. While this test signal is being output from the test signal generator 11, the current speed signal V of the moving body 6 is being input to the gain / phase measurer 10, and the gain / phase measurer 10 is
For each cycle of the test signal input from 1, the gain and phase of the speed control system including the speed amplifier 2 are obtained, and the frequency f
The average of the gain and the phase for m periods at _i (i = 1,2,3, ...) Is calculated.

In this way, the frequency range f _{min to} f
The frequency characteristic of the speed control system is obtained from the gain and phase values of _max . The result is the frequency characteristic in the initial state, that is, the memory 1
The control gain adjusting unit 15 variously changes the speed control gain VG so as to be close to the frequency characteristic stored in advance in FIG.

When measuring the characteristics (gain margin, phase margin) of the frequency characteristics of the position control system including the position amplifier 3, the position switch 14 is switched from the side e to the side f.
The output TD of the test signal generator 11 is input to the position amplifier 3, the control mode selection switch 9 is set to the b side, and the current command signal S1 output from the position amplifier 3 is input to the driver amplifier 4. Adjustment mode selection switch 1
7 is set to the g side, and the current position signal P output from the position measuring instrument 7 is input to the gain / phase measuring unit 10. In this state, the gain / phase measuring unit 10 measures the characteristic of the frequency characteristic of the position control system.

That is, as in the above case, the frequency range f
_{For min to} f _max , first, a sine wave having a low frequency f _min is generated for m cycles, then a sine wave having a frequency f ₁ = f _min + Δf is generated for m cycles, and the same applies to f _i = f _i-1. + △ f
A sine wave of (i = 1,2,3, ...) Until the frequency reaches f _max △
Generate at f intervals. While this test signal is being output from the test signal generation unit 11, the gain / phase measurement unit 10
The current position signal P of the stage 6, which is a moving body, is input to the gain / phase measuring unit 10 of the position control system including the position amplifier 3 for each cycle of the test signal input from the test signal generating unit 11. Gain and phase are calculated, and frequency f _i (i = 1,
2,3, ...) Average gain and phase for m cycles.

In this way, the frequency range f _{min to} f
The frequency characteristics of the position control system are obtained from the _max gain and phase values. The position control gain PG is variously changed by the control gain adjusting unit 15 so that the result is close to the frequency characteristic in the initial state, that is, the frequency characteristic stored in advance in the memory 12 and measured at the time of device startup.

In order to adjust the control gain, for example, two control gains I ₀ are added to the currently set control gain I _0.
The characteristics of the control system are investigated with ₁ = I ₀ + ΔI and I ₂ = I ₀ −ΔI. If the control gain I ₀ is the closest to the frequency characteristic at the time of device startup, I ₀ is set as the optimum gain. . If the control gain I ₁ is the closest to the frequency characteristic when the apparatus is started up, I ₀ = I ₁ is set, and the characteristic of the control system is examined again with the above two control gains. If the control gain I ₂ is the closest to the frequency characteristic when the apparatus is started up, then I ₀ = I
_Then, the characteristics of the control system are examined again with the above two control gains. By repeating such operations, the speed control gain V
G and position control gain PG are set to optimal control gains.

The speed control gain VG and the position control gain PG are not limited to one, and the same method is used to adjust the number when the number is large. Further, in order to set each control gain according to the position of the stage 6, for example, the position of the stage 6 is divided into regions by a certain distance, and the position control gain PG and the speed control gain VG in the memory 16 are set to the stage position. The table for the area is stored, the current position signal P is sampled at a constant time interval Δt, the position control gain PG and the speed control gain VG corresponding to the current position signal P are read from the control gain memory 16, and the position amplifier 3 and the speed are obtained. Amplifier 2
This can be achieved by setting to. Control gain to stage 6
In order to adjust according to the position of, the stage is similarly moved to the center position of the area divided into areas, the control gain is optimally adjusted by the above method, and the adjusted control gain is stored in the memory 16. Just do it.

According to this embodiment as described above, not only is the control gain adjusted optimally, but attention is paid to the mechanical mechanism resonance frequency of the frequency characteristics of the speed control system, and the mechanical mechanism fails, for example, a screw is loosened. It is also possible to estimate

In the present embodiment, by having a plurality of speed allowable values and position allowable values judged by the control state judging section 18, even if the control performance of the positioning time and the positioning accuracy is deteriorated to some extent, it continues. It may be possible to determine whether it is in a warning state in which the device can be operated or in which the device is immediately stopped and an error state in which the failure needs to be repaired. Further, the storage capacity of the memory 19 is increased so that the device stores the current speed and the current position during operation for each drive, and the speed data and the position deviation data stored in the memory 19 when the device is in an error state can be stored in a CRT display or the like. By displaying on the display device 30, the cause of the error can be easily determined, and downtime of the device can be shortened.

If the cause of the error cannot be easily determined, the speed data and the position deviation data stored in the memory 19, the control characteristic measurement data and the memory of the position control system and the speed control system stored in the memory 12 are stored. It is also possible to record at least one of the control gains of the position control system and the speed control system in 16 in a removable recording medium in the recording device 35, and carry-out analysis. Similarly, the data can be transmitted and analyzed through the communication device 36.

FIG. 2 is a block diagram showing another embodiment of the positioning device of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components as those in the example of FIG.

In the figure, 33 is a system processor which is a higher-level computer for sequence control, 31 is a CRT which is a display device of the system processor 33, 32 is a plotter which is also a display device of the system processor 33, and 34 is positioning control. Do the DSP
Etc. is a servo processor.

In this positioning apparatus, the servo processor 34 includes the speed command calculator 1, the speed amplifier 2, the position amplifier 3, the differentiator 8, the control mode selection switch 9, the gain / phase measuring unit 10, and the test of the embodiment shown in FIG. The signal generator 11,
The functions of the speed switch 13, the position switch 14, the control gain adjustment unit 15, and the adjustment mode selection switch 17 are executed.

That is, when the target position command is received from the system processor 33, which is a high-order computer, the servo processor 34 calculates the speed command and the speed command D2 _i (i =
, 1,) are generated, the current position signal P _i (i = 1,2,3, ...) is sampled at every constant time interval Δt, and the current speed signal V
_i (i = 1,2,3, ...) is expressed as V _i = (P _i -P _i-1 ) / Δt (i = 1,2,3,
...), and the speed amplifier D2 _i and the current speed signal V _{i up} to the vicinity of the target position according to the speed control gain VG.
The speed control calculation is performed and the calculation result S2 _i is output to the drive amplifier 4. Then, in the vicinity of the target position, the target position command D1
The position control calculation of the position amplifier 3 is performed according to the position control gain PG from the deviation between the current position signal P _i and the current position signal P _i, and the calculation result S
1 _i is output to the driver amplifier 4.

The test signal output T _i (i = 1,2,3, ...) is T _i =
Sin (2πf _j Δt × i) (i = 1, 2, 3, ...) Generates m cycles. The frequency f _j is changed from f _{min to} f _max .
The control gain is adjusted using the same method as in FIG. In addition, a waveform generally called a sweep sin that continuously changes the test signal from f _{min to} f _max is used, and the position or speed measurement signal and the test signal input to the gain / phase measurement unit 10 are each subjected to FFT calculation. By doing so, gain / phase measurement data can be obtained in a short time.

To display the gain / phase characteristic measurement data in the memory 12 and the sampling speed / position data in the memory 19, this data is transferred to an upper computer by communication, and the upper computer performs graphic processing of the data. , A graphic display device such as a CRT 31 or a plotter 32, if necessary. Normally, this type of positioning device is generally controlled by a higher-level computer having a graphic display device. Therefore, if it is configured as in this embodiment, it is necessary to have a dedicated graphic display device for the positioning display device. Therefore, it is possible to reduce the cost.

If the cause of the error cannot be easily determined as in the embodiment of FIG. 1, the speed data and the position deviation data stored in the memory 19 and the position control system and the speed control stored in the memory 12 will be described. It is also possible to record at least one of the control characteristic measurement data of the system and the control gain of the position control system and the speed control system in the memory 16 in a removable recording medium in the recording device 35 and carry-out analysis. Similarly, the data can be transmitted and analyzed through the communication device 36.

In each of the above-described embodiments, the control gain of the speed amplifier 2 and the position amplifier 3 is not limited to the proportional gain, but may include the differential gain, the integral gain, or the like. In addition to the linear element such as the PID control described above, a non-linear element such as a clip, a dead zone, or hysteresis may be included.

[0050]

As described above, according to the present invention,
Since the change with time of the characteristics of the speed control system and / or the position control system can be measured during the operation of the apparatus, the control gain of the control system can be corrected in a timely manner or constantly. Therefore, it is possible to always operate the device in an optimum state without operating the device while the performance of the device is degraded so that the required positioning time and positioning accuracy are not satisfied.

If the control gain is automatically adjusted after it is detected that the performance of the device has deteriorated, the state of the control system can be automatically brought close to the initial state, and the required positioning time can be obtained. And the positioning accuracy can be maintained. Particularly, in the case of a positioning device having a friction contact type guide, the maintenance cost is reduced by reducing the number of regular maintenance operations performed by a service person to maintain the oil film state of the friction contact portion in the initial state such as grease up. It is also possible to maintain high equipment availability by lowering the Furthermore, according to the present invention, it is possible to measure the characteristics of the control system over the entire moving region of the stage during the operation of the apparatus, and therefore it is not necessary to stop the operation of the apparatus for a long time to perform measurement and adjustment, and The operation rate of the device can be improved.

Further, in the present invention, when at least one of the speed and position deviation data sampled during operation and the measurement result of the characteristic of the control system is displayed when the device is out of order, the serviceman can display the display. By studying, the cause of the error can be easily determined, and the time for determining the cause of the error and the time for repairing the failure portion can be shortened. It is also possible to save the labor and time required for a serviceman to connect a measuring instrument such as an oscilloscope or a transfer function measuring instrument. Further, if the above data is recorded in a removable recording medium so that the data can be taken out and analyzed, it is possible to find out the cause of an error that cannot be easily investigated by a service person. Similarly, if the above data is transmitted through a communication device so that it can be analyzed,
It is also possible for the service person to find out the cause of the error that cannot be easily investigated.

Furthermore, in the present invention, if the control gain optimally adjusted according to the current position of the moving body during operation can be used, the highest positioning accuracy and the shortest positioning can be achieved in the entire moving area of the moving body. Time performance can be achieved.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of a positioning device of the present invention.

FIG. 2 is a block diagram showing another embodiment of the positioning device of the present invention.

FIG. 3 is an X of a semiconductor manufacturing exposure apparatus to which the present invention is applicable.
The perspective view which shows the external appearance of an example of a Y stage.

FIG. 4 is an X of a semiconductor manufacturing exposure apparatus to which the present invention is applicable.
The perspective view which shows the external appearance of the other example of a Y stage.

FIG. 5 is a block diagram showing an example of a conventional positioning device.

[Explanation of symbols]

 1 Speed Command Calculator 2 Speed Amplifier 3 Position Amplifier 6 Stage 7 Position Measuring Device 8 Differentiator 10 Gain / Phase Measurement Section 11 Test Signal Generation Section 12 Gain / Phase Measurement Memory 15 Control Gain Adjustment Section 16 Control Gain Memory 18 Control State Judgment Part 19 Speed / position memory 20 Automatic adjustment part 30 Display device 33 System processor 34 Servo processor 36 Communication device D1 Target position command value D2 Target speed command value P Current position V Current speed S1 Current command signal S2 Current command signal I Motor current T Motor torque TD test signal PG Position control gain adjustment signal VG Speed control gain adjustment signal

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical indication H01L 21/68 F

Claims (15)

[Claims] 1. An actuator for moving a moving body, control means for controlling the movement of the moving body by the actuator based on a movement command signal from the outside, and the control means for controlling the movement of the moving body. Measuring means for measuring the movement data of the moving body during operation, storage means for storing movement data of the moving body when the control means is optimally adjusted as reference movement data, and the control means Has a determination means for comparing and comparing the movement data of the moving body measured by the measuring means and the reference movement data stored in the storage means while controlling the movement of the moving body. Positioning device. 2. The determination means stops the movement control of the moving body by the control means based on the movement command signal from the outside when the determination result is in a set state. Positioning device. 3. The measuring means samples at least one of data indicating a velocity and a positional deviation of the moving body as the moving data at a constant time while the control means controls the movement of the moving body. The positioning device according to claim 2, wherein 4. A display means for graphically displaying the sampling data indicating at least one of the speed and the positional deviation of the moving body stored in the storage means when the determination result of the determination means is in a set state. The positioning control device according to claim 3, further comprising: 5. The recording means for recording the sampling data indicating at least one of the velocity and the positional deviation of the moving body stored in the storage means on a removable recording medium. Positioning control device. 6. The positioning control device according to claim 3, further comprising communication means for transferring the sampling data indicating at least one of a velocity and a positional deviation of the moving body stored in the storage means to the outside. . 7. A gain adjusting means for adjusting a control gain of the actuator is provided, wherein the gain adjusting means adjusts the control gain after the movement control of the moving body based on the movement command signal from the outside is stopped. 3. The positioning device according to claim 2, wherein the positioning device is automatically adjusted. 8. The gain adjusting means has a test signal generation section for giving a test movement command signal to the control means, and the control means controls the moving body based on the movement command signal from the test signal generation section. 7. The control characteristic of the control means when controlling the movement of the control means is measured, and the control gain is adjusted according to the measurement result.
Positioning device. 9. The measuring means samples at least one of data indicating a velocity and a position deviation of the moving body as the moving data at a fixed time while the control means controls the movement of the moving body. The positioning device according to claim 8, wherein: 10. The sampling data indicating at least one of a velocity and a positional deviation of the moving body stored in the storage means when the determination result of the determination means is in a set state, and control of the control means. 10. The positioning control device according to claim 9, further comprising display means for graphically displaying at least one of the characteristic and the control gain. 11. A recording for recording the sampling data indicating at least one of the velocity and the positional deviation of the moving body stored in the storage means, the control characteristic and the control gain of the control means on a removable recording medium. The positioning control device according to claim 9, further comprising means. 12. A communication means for transferring the sampling data indicating at least one of the velocity and the positional deviation of the moving body stored in the storage means, the control characteristic and the control gain of the control means to the outside. The positioning control device according to claim 9, wherein 13. The positioning device according to claim 1, wherein the movement data is data relating to at least one of positioning time and positioning accuracy of the moving body. 14. The control means first moves the moving body via the actuator with emphasis on speed, and then moves the moving body via the actuator with emphasis on stop position accuracy. Positioning device 1. 15. The storage means further stores a control gain of the control means according to the current position of the moving body, and the control means controls the movement of the moving body when the control means controls the movement of the moving body. 2. The positioning control device according to claim 1, wherein the control gain stored in the storage unit is read according to the current position of the moving body to control the movement of the moving body.