JPH08112897A - Liquid jet head, manufacture thereof, and liquid jet unit - Google Patents

Abstract

PURPOSE: To enable selection of a comparatively inexpensive lid plate and to reduce the cost of a liquid jet head by containing a visible light setting resin in an active energy line setting material as a nozzle forming member. CONSTITUTION: First of all, a photosensitive resin layer 2 is formed on a substrate 1, an object of treatment, and exposed to light through a mask 3 and patterned by a development process and a nozzle-patterned solid layer is formed on the treated substrate 1. The patterned solid layer 4 is covered by a nozzle forming member 5 which is made by containing a visible light setting resin in an active energy line setting material, and a lid plate 6 which allows an active energy line to transmit is put thereon. The nozzle forming member 5 is hardened by applying an active energy line. After that, a liquid channel 7 is formed by removing the nozzle-patterned solid layer 5 and then a liquid jet head is manufactured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid ejecting head for generating recording droplets used in an ink jet system, a method of manufacturing the same, and a liquid ejecting apparatus equipped with the head.

[0002]

2. Description of the Related Art A liquid ejecting head applied to an ink jet method (liquid ejecting method) is generally provided in a minute recording liquid ejection port (hereinafter referred to as an orifice), a liquid flow path and a part of the liquid flow path. And a liquid discharge energy generation unit that is used. Conventionally, the following method is known as a method for producing such a liquid ejecting head (FIG. 1).
reference).

First, a photosensitive resin layer (positive photoresist 2) is formed on a substrate to be processed (first substrate) (see FIG. 1).
(A)), exposing it through the mask 3 (FIG. 1 (b))
Then, a development process is performed to pattern the photosensitive resin layer,
A solid layer is formed on the substrate to be processed (FIG. 1 (c)). Next, the patterned solid layer is covered with an active energy ray-curable liquid flow path forming material 5 (FIG. 1D), and a first substrate 6 (cover plate) is covered (FIG. 1E). ). The active energy ray-curable liquid flow path forming material is cured by irradiation with the active energy ray (FIG. 1 (f)). further,
The patterned solid layer is dissolved and removed using an organic solvent such as a halogen-containing hydrocarbon, a ketone, an ester, or an alcohol or an alkaline aqueous solution such as sodium hydroxide or potassium hydroxide to form a liquid channel 6 (see FIG. g)).

[0004]

However, in such a conventional method, since the nozzle forming member reacts only to energy rays having a large amount of energy such as UV light, the size of the apparatus becomes large and the eyesight of the operator becomes poor. There was also the danger of doing so. In addition, since the liquid flow path forming material undergoes curing shrinkage during curing, the liquid jet head itself may be curved, resulting in defective printing. When an attempt was made to reduce the curing shrinkage by pressing the lid plate or adding a filler or the like, it was difficult for the energy rays to pass through, resulting in curing failure.

Accordingly, the present invention is directed to a highly reliable liquid ejecting head free from printing defects, a method of manufacturing such a head by a simple method and apparatus, and a highly reliable liquid ejecting head equipped with such a head. The purpose is to provide a device.

[0006]

According to the present invention, a substrate provided with a solid layer of a nozzle pattern is covered with an active energy ray-curing nozzle forming member, and a lid plate that transmits active energy rays is provided in the nozzle. A step of forming a nozzle by irradiating an active energy ray to cure the nozzle forming member after bonding to the substrate through the forming member, and then removing the solid layer of the nozzle pattern, and an ejection energy generating element In a method for manufacturing a liquid jet head having a forming step, a method for manufacturing a liquid jet head, characterized in that the nozzle forming member contains a visible light curable resin and an appropriate filler, and a liquid produced by the method. An ejection head and a liquid ejection apparatus equipped with the head are provided.

[0007]

The present invention will be specifically described with reference to the following examples.

As shown in FIG. 1, Examples 1 and 2 shown in Table 1 were prepared on a substrate provided with a solid layer having a nozzle pattern.
Further, after covering with the active energy ray-curable nozzle forming member of Comparative Example 1 and bonding the lid plate which transmits the active energy ray to the substrate through the member, the active energy ray is irradiated to cure the member. Then, the nozzle was formed by removing the solid layer of the nozzle pattern, and the liquid jet head was manufactured.

[0009]

[Table 1] The exposure dose of these active energy ray-curable materials was 2 J in Examples 1 and 2, and 8 J in Comparative Example 1,
Thermal curing was carried out at 130 ° C. for 1 hour after removal of the solid layer to increase curing. Observation of the liquid ejecting heads manufactured in this way revealed that no peeling of the nozzle-forming material was observed for the ones produced in Examples 1 and 2, but a slight amount was found for the one produced in Comparative Example 1. Peeling was observed.

Recording was carried out using an ink jet ink composed of pure water / glycerin / direct black 154 (water-soluble black dye) = 65/30/5 (parts by weight), and recording was carried out in Examples 1 and 2. In the liquid jet head described above, the print disorder was not recognized, but in the case of the head manufactured in Comparative Example 1, the print disorder was recognized.

As described above, the present invention is particularly effective in the ink jet type liquid ejecting head and liquid ejecting apparatus in which flying droplets are formed by utilizing thermal energy among the ink jet methods to perform recording. To bring.

With regard to its typical structure and principle, see, for example, US Pat. Nos. 4,723,129 and 4740.
No. 796, the present invention is preferably carried out using these basic principles. This recording method is applicable to both the so-called on-demand type and the continuous type.

To briefly explain this recording method, the electrothermal converter arranged corresponding to the sheet or liquid path holding the liquid (ink) is changed to the liquid (ink) corresponding to the recording information. Thermal energy is generated by applying at least one drive signal that causes a rapid temperature rise that exceeds the nucleate boiling phenomenon and causes the film boiling phenomenon, and causes the film boiling on the heat acting surface of the liquid jet head. Let In this way, it is possible to form bubbles that correspond one-to-one to the drive signal applied from the liquid (ink) to the electrothermal converter,
It is particularly effective for the on-demand recording method. The liquid (ink) is ejected through the ejection holes by the growth and contraction of the bubbles to form at least one droplet. It is more preferable to make the driving signal into a pulse shape because bubbles can be grown and contracted immediately and appropriately, and thus a liquid (ink) with excellent responsiveness can be ejected. As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. If the conditions described in US Pat. No. 4,313,124, which is an invention relating to the rate of temperature rise on the heat acting surface, are adopted, more excellent recording can be performed.

The structure of the liquid jet head is a combination of a discharge hole, a liquid flow path, and an electrothermal converter as disclosed in the above-mentioned specifications (straight liquid flow path or right-angled liquid flow path). In addition, as disclosed in US Pat. No. 4,558,333 and US Pat. No. 4,459,600, the present invention includes a structure in which a heat acting portion is arranged in a bending region.

In addition, Japanese Patent Laid-Open No. 123670/1984, which discloses a structure in which a common slit is used as a discharge hole of the electrothermal converter for a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective in a structure based on Japanese Patent Laid-Open No. 138461/1984, which discloses a structure in which the corresponding opening corresponds to the discharge portion.

Further, as a liquid ejecting head in which the present invention is effectively used, there is a full line type liquid ejecting head having a length corresponding to the maximum width of a recording medium which can be recorded by the liquid ejecting apparatus. This full line head may be a full line configuration formed by combining a plurality of liquid jet heads as disclosed in the above-mentioned specification, or a single full line liquid jet head integrally formed. good.

In addition, the liquid ejecting head of the replaceable chip type, or the liquid ejecting head itself, which can be electrically connected to the apparatus main body and can supply ink from the apparatus main body by being mounted on the apparatus main body The present invention is also effective when a cartridge-type liquid ejecting head that is integrally provided in the above is used.

Further, it is preferable to add recovery means for the liquid ejecting head, preliminary auxiliary means, etc. to the liquid ejecting apparatus of the present invention because the liquid ejecting apparatus of the present invention can be made more stable. Is. Specific examples thereof include capping means, cleaning means, pressurizing or sucking means, an electrothermal converter or a heating element other than this, or preheating means by a combination of these for the liquid ejecting head, Adding a means for performing a preliminary ejection mode different from the recording is also effective for stable recording.

Further, the recording mode of the liquid ejecting apparatus is not limited to the mode in which only the mainstream color such as black is recorded, but either the liquid ejecting head is integrally formed or a plurality of liquid ejecting heads are combined. However, the present invention is extremely effective for an apparatus provided with at least one of a multicolor of different colors or a mixed full color.

In the above description, a liquid ink is used, but in the present invention, even if the ink is solid at room temperature,
Even ink that is in a softened state at room temperature can be used. In the above ink jet device, the ink itself is 30
It is common to adjust the temperature within a range of ℃ to 70 ℃ to control the temperature of the ink so that the viscosity of the ink is within the stable ejection range. good.

In addition, the excessive temperature rise of the head or the ink due to thermal energy is positively prevented by using it as the energy of the state change of the ink from the solid state to the liquid state, or the evaporation of the ink is prevented. It is also possible to use an ink that solidifies when left as it is. In any case, liquefaction occurs only when heat energy is applied, such as when ink is liquefied by applying heat energy according to a recording signal and ejected as an ink liquid, or when it reaches the recording medium, it already begins to solidify. The use of an ink having such a property is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or JP-A No. 60-71260, facing the electrothermal converter in the state of being held as a liquid or solid in the recesses or through holes of the porous sheet. It may be in the form.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

FIG. 2 is an external perspective view showing an example of an ink jet device (IJRA) in which the liquid jet head obtained by the present invention is mounted as an ink jet head cartridge (IJC).

In FIG. 2, reference numeral 20 is an ink jet head cartridge (IJC) provided with a group of nozzles for ejecting ink so as to face the recording surface of the recording paper fed onto the platen 24. Reference numeral 16 is a carriage HC that holds the IJC 20, and is connected to a part of a drive belt 18 that transmits the driving force of the drive motor 17, and is slidable with two guide shafts 19A and 19B arranged in parallel with each other. By doing so, reciprocating movement over the entire width of the recording paper of the IJC 20 is possible.

Reference numeral 26 is a head recovery device, which is an IJC 20.
Is arranged at one end of the movement path of, for example, at a position facing the home position. The drive force of the motor 22 via the transmission mechanism 23 causes the head recovery device 26 to operate, and
Cap the JC20. In association with capping the IJC 20 by the cap portion 26A of the head recovery device 26, ink is sucked by an appropriate suction means provided in the head recovery device 26 or by an appropriate pressure means provided in an ink supply path to the IJC 20. The ejection recovery process is performed such that the ink is pressure-fed and the ink is forcibly discharged from the ejection port to remove the thickened ink in the nozzle. Further, the IJC is protected by capping at the end of recording.

Reference numeral 30 denotes a blade which is disposed on the side surface of the head recovery device 26 and is made of silicon rubber and serves as a wiping member. The blade 30 is a blade holding member 30.
The head recovery device 26 is held by A in a cantilever form.
Similarly to the above, the motor 22 and the transmission mechanism 23 operate to enable engagement with the ejection surface of the IJC 20. As a result, the blade 30 is projected into the movement path of the IJC 20 at an appropriate timing in the recording operation of the IJC 20 or after the ejection recovery process using the head recovery device 26, and the ejection surface of the IJC 20 is moved along with the movement operation of the IJC 20. Wipe off condensation, wetness or dust.

[0028]

As described above, according to the present invention, a lid plate that does not allow high energy rays to pass through when a liquid jet head is manufactured can be used. Therefore, a relatively inexpensive lid plate can be selected. The manufacturing cost can be reduced. Further, even if a filler is mixed to suppress the curing shrinkage of the liquid flow path forming material, there is no curing failure of the liquid flow path forming material, so that there is no peeling and the like, and stable printing is provided over a long period without disturbance. A liquid ejecting head can be manufactured, and a highly reliable liquid ejecting apparatus including the head can be manufactured.

[Brief description of drawings]

FIG. 1 is a process drawing showing an example of a method of manufacturing a liquid jet head.

FIG. 2 is a perspective view showing an example of a recording apparatus including an inkjet recording head according to the present invention.

[Explanation of symbols]

 1 First Substrate 2 Positive Photoresist 3 Mask 4 Resist Pattern 5 Liquid Flow Path Forming Material 6 Second Substrate 7 Liquid Flow Path 16 Carriage 17 Drive Motor 18 Drive Belt 19A, 19B Guide Shaft 20 Inkjet Head Cartridge 22 Cleaning Motor 23 transmission mechanism 24 platen 26 cap member 30 blade 30A blade holding member

Claims (6)

[Claims] 1. A substrate on which a solid layer of a nozzle pattern is provided is covered with an active energy ray-curing nozzle forming member, and a lid plate that transmits active energy rays is bonded to the substrate via the nozzle forming member. After that, a liquid comprising a step of irradiating an active energy ray to cure the nozzle forming member, and then forming a nozzle by removing the solid layer of the nozzle pattern, and an ejection energy generating element forming step. A method for manufacturing a liquid jet head, characterized in that the nozzle forming member contains a visible light curable resin. 2. A substrate on which a solid layer having a nozzle pattern is provided is covered with an active energy ray-curing nozzle forming member, and a lid plate that transmits active energy rays is bonded to the substrate via the nozzle forming member. After that, a liquid comprising a step of irradiating an active energy ray to cure the nozzle forming member, and then forming a nozzle by removing the solid layer of the nozzle pattern, and an ejection energy generating element forming step. A method of manufacturing a liquid jet head, characterized in that the nozzle forming member contains a visible light curable resin and a filler. 3. A liquid jet head manufactured by the method according to claim 1. 4. The liquid jet head according to claim 3, wherein the ejection energy generating element is an electrothermal converter that generates thermal energy. 5. The liquid ejecting head according to claim 3, wherein the liquid ejecting head is a full line type in which a plurality of ejection openings are provided over the recording area of the recording medium. 6. An ink ejection port for ejecting ink is provided facing a recording surface of a recording medium.
6. A liquid ejecting apparatus comprising at least the liquid ejecting head according to any one of 5 to 5 and a member for mounting the head.