JPH08106974A - Heater for vertical type device - Google Patents
Heater for vertical type deviceInfo
- Publication number
- JPH08106974A JPH08106974A JP23906894A JP23906894A JPH08106974A JP H08106974 A JPH08106974 A JP H08106974A JP 23906894 A JP23906894 A JP 23906894A JP 23906894 A JP23906894 A JP 23906894A JP H08106974 A JPH08106974 A JP H08106974A
- Authority
- JP
- Japan
- Prior art keywords
- heating wire
- furnace
- spiral groove
- temperature
- depth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、縦型拡散・ＣＶＤ装置
等の縦型装置に用いられるヒータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater used in a vertical device such as a vertical diffusion / CVD device.
【０００２】[0002]
【従来の技術】図２は従来ヒータの１例の一部を示す断
面図である。従来の縦型装置に用いられるヒータは、そ
の断面形状が円形形状の発熱線４を用いており、炉内側
の断熱材、例えば円筒ファイバ１の内面に、縦幅，奥行
とも等しい発熱線収納用螺旋溝５を設け、この螺旋溝５
に、前記断面形状が円形形状の発熱線４を収めてなるも
のである。2. Description of the Related Art FIG. 2 is a sectional view showing a part of an example of a conventional heater. A heater used in a conventional vertical apparatus uses a heating wire 4 having a circular cross-sectional shape, and a heating wire 4 for storing a heating wire having the same vertical width and depth is provided on the inner surface of a heat insulating material inside the furnace, for example, a cylindrical fiber 1. The spiral groove 5 is provided, and this spiral groove 5
In addition, the heating wire 4 having a circular cross section is housed.
【０００３】[0003]
【発明が解決しようとする課題】上記従来ヒータにあっ
ては、発熱線４の炉内側部分４Ａの温度Ｔ1 とその反対
側の溝底側部分４Ｂの温度Ｔ2 で大きな温度差Ｔ2 −Ｔ
1 ≫０があるため、発熱線４の炉内側部分４Ａと溝底側
部分４Ｂの伸縮が異なることにより発熱線４が断線し易
いばかりでなく、円筒ファイバ１が強固な場合、コイル
径にもよるが、発熱線４が変形して炉内に突き出てくる
という課題がある。In the above conventional heater, there is a large temperature difference T 2 between the temperature T 1 of the furnace inner portion 4A of the heating wire 4 and the temperature T 2 of the groove bottom portion 4B on the opposite side thereof. T
Since 1 >> 0, not only the heating wire 4 is easily broken due to different expansion and contraction of the furnace inner part 4A and the groove bottom side part 4B of the heating wire 4, but also when the cylindrical fiber 1 is strong, the coil diameter is also increased. However, there is a problem that the heating wire 4 is deformed and protrudes into the furnace.
【０００４】[0004]
【課題を解決するための手段】本発明は、従来の技術の
課題である発熱線の断線，変形を解決し、長寿命の縦型
装置用ヒータを提供しようとするものである。即ち、本
発明ヒータは、炉内側の断熱材１内面に、縦幅ａが長く
奥行ｂが短い発熱線収納用螺旋溝２を設け、この螺旋溝
２に断面形状が楕円形状の発熱線３を収めてなることを
特徴とする。SUMMARY OF THE INVENTION The present invention is intended to solve the problems of the prior art, such as the breakage and deformation of the heating wire, and to provide a heater for a vertical device having a long life. That is, in the heater of the present invention, a spiral groove 2 for accommodating a heating wire having a long vertical width a and a short depth b is provided on the inner surface of the heat insulating material 1 inside the furnace. It is characterized by being stored.
【０００５】[0005]
【作 用】このような構成であるから、断面形状が楕円
形状の発熱線３の奥行ｂが従来の断面形状が円形形状の
発熱線４のそれよりも狭いので、溝底側部分３Ｂの温度
Ｔ 2 が炉内側部分３Ａの温度Ｔ1 （炉内温度）よりかな
り高温になることが抑制されて、溝底側部分３Ｂの温度
Ｔ2 と炉内側部分３Ａの温度Ｔ1 との温度差Ｔ2 −Ｔ1
が小さくなり、発熱線３の炉内側部分３Ａと溝底側部分
３Ｂの伸縮に差が少なくなり、発熱線３の劣化が抑制さ
れて発熱線３が断線し難くなるばかりでなく、断熱材１
が強固な場合でも、発熱線３の縦幅ａが長いので、発熱
線３が変形して炉内に突き出てくるおそれはない。又、
発熱線３の奥行ｂを短くすることにより断熱材１の外面
と螺旋溝２の底面間の厚さｄが従来よりも厚くなるの
で、固体伝導及び気体伝導による外面温度を抑制するこ
とができ、ヒータパワーを抑えることができる。[Operation] Due to this structure, the cross-sectional shape is elliptical.
The depth b of the shaped heating wire 3 has a conventional cross-sectional shape of circular shape.
Since it is narrower than that of the heating wire 4, the temperature of the groove bottom side portion 3B
T 2Is the temperature T of the furnace inner part 3A1(Temperature inside the furnace)
The temperature of the groove bottom side portion 3B is suppressed because
T2And the temperature T of the furnace inner part 3A1Temperature difference from2-T1
Becomes smaller, and the inner part 3A of the heating wire 3 and the groove bottom side part
The difference in expansion and contraction of 3B is reduced, and deterioration of the heating wire 3 is suppressed.
Not only makes the heating wire 3 harder to break, but also heat insulation material 1
Even if the heat is strong, the vertical width a of the heating wire 3 is long, so
There is no risk that the wire 3 will deform and project into the furnace. or,
The outer surface of the heat insulating material 1 by shortening the depth b of the heating wire 3
And the thickness d between the bottom surface of the spiral groove 2 becomes thicker than before.
To suppress the external surface temperature due to solid conduction and gas conduction.
Therefore, the heater power can be suppressed.
【０００６】[0006]
【実施例】図１は本発明ヒータの１実施例の一部を示す
断面図である。本実施例は、炉内側の断熱材、例えば円
筒ファイバ１の内面に、縦幅ａが長く奥行ｂが短い発熱
線収納用螺旋溝２を設け、この螺旋溝２に、断面形状が
楕円形状の発熱線３を収めてなる構成とする。1 is a sectional view showing a part of one embodiment of a heater of the present invention. In this embodiment, a heat generating wire storage spiral groove 2 having a long vertical width a and a short depth b is provided on the inner surface of a heat insulating material inside the furnace, for example, a cylindrical fiber 1, and the spiral groove 2 has an elliptical cross section. The heating wire 3 is housed.
【０００７】上記のような構成であるから、断面形状が
楕円形状の発熱線３の奥行ｂが従来の断面形状か円形形
状の発熱線４のそれよりも狭いので、溝底側部分３Ｂの
温度Ｔ2 が炉内側部分３Ａの温度Ｔ1 （炉内温度）より
かなり高温になることが抑制されて、溝底側部分３Ｂの
温度Ｔ2 と炉内側部分３Ａの温度Ｔ1 との温度差Ｔ2−
Ｔ1 が小さくなり、発熱線３の炉内側部分３Ａと溝底側
部分３Ｂの伸縮に差が少なくなり、発熱線３の劣化が抑
制されて発熱線３が断線し難くなるばかりでなく、円筒
ファイバ１が強固な場合でも、発熱線３の縦幅ａが長い
ので、発熱線３が変形して炉内に突き出てくるおそれは
ない。又、発熱線３の奥行ｂを短くすることにより断熱
材１の外面と螺旋溝２の底面間の厚さｄが従来よりも厚
くなるので、固体伝導及び気体伝導による外面温度を抑
制することができ、ヒータパワーを抑えることができ
る。Since the heating wire 3 having an elliptical cross section has a depth b smaller than that of the conventional heating wire 4 having a cross sectional shape or a circular shape, the temperature of the groove bottom side portion 3B is reduced. T 2 is suppressed to become considerably hotter than the temperature T 1 of the furnace inner portion 3A (furnace temperature), the temperature difference T between the temperature T 1 of the temperature T 2 and the furnace inner portion 3A of the groove bottom portion 3B 2-
T 1 becomes small, the difference in expansion and contraction between the furnace inner side portion 3A and the groove bottom side portion 3B of the heating wire 3 is reduced, deterioration of the heating wire 3 is suppressed, and the heating wire 3 is not easily broken. Even if the fiber 1 is strong, since the vertical width a of the heating wire 3 is long, there is no possibility that the heating wire 3 is deformed and protrudes into the furnace. Further, by shortening the depth b of the heating wire 3, the thickness d between the outer surface of the heat insulating material 1 and the bottom surface of the spiral groove 2 becomes thicker than before, so that the outer surface temperature due to solid conduction and gas conduction can be suppressed. Therefore, the heater power can be suppressed.
【０００８】[0008]
【発明の効果】上述のように本発明によれば、発熱線の
溝底側部分の温度と炉内側部分の温度の温度差を小さく
して、発熱線を断線し難くしてその寿命の延長を図るこ
とができ、又断熱材が強固でも、発熱線が変形して炉内
に突き出てくるおそれがないばかりでなく、断熱材外面
と発熱線収納用螺旋溝の底面間の厚さを厚くして、断熱
材の外面温度を抑え、ヒータパワーを抑制することがで
きる。As described above, according to the present invention, the temperature difference between the temperature at the groove bottom side and the temperature at the furnace inner side of the heating wire is reduced to make it difficult to break the heating wire and extend its life. In addition, even if the heat insulating material is strong, there is no danger that the heating wire will deform and stick out into the furnace.In addition, the thickness between the outer surface of the insulating material and the bottom surface of the heating wire storage spiral groove will be increased. Then, the outer surface temperature of the heat insulating material can be suppressed and the heater power can be suppressed.
【図１】本発明ヒータの１実施例の一部を示す断面図で
ある。FIG. 1 is a sectional view showing a part of an embodiment of a heater of the present invention.
【図２】従来ヒータの１例の一部を示す断面図である。FIG. 2 is a sectional view showing a part of an example of a conventional heater.
１ 断熱材（円筒ファイバ） ２ 発熱線収納用螺旋溝 ３ 発熱線 ３Ａ 炉内側部分 ３Ｂ 溝底側部分 DESCRIPTION OF SYMBOLS 1 Insulation material (cylindrical fiber) 2 Spiral groove for storing heating wire 3 Heating wire 3A Inner part of furnace 3B Bottom part of groove
Claims (1)
が短い発熱線収納用螺旋溝を設け、この螺旋溝に断面形
状が楕円形状の発熱線を収めてなることを特徴とする縦
型装置用ヒータ。1. A spiral groove for accommodating a heating wire having a long length and a short depth is provided on the inner surface of the heat insulating material inside the furnace, and the heating wire having an elliptical cross section is accommodated in the spiral groove. Heater for vertical equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23906894A JPH08106974A (en) | 1994-10-03 | 1994-10-03 | Heater for vertical type device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23906894A JPH08106974A (en) | 1994-10-03 | 1994-10-03 | Heater for vertical type device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08106974A true JPH08106974A (en) | 1996-04-23 |
Family
ID=17039385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23906894A Pending JPH08106974A (en) | 1994-10-03 | 1994-10-03 | Heater for vertical type device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08106974A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006080058A (en) * | 2004-08-09 | 2006-03-23 | Teitokusha Kk | Electric heater |
-
1994
- 1994-10-03 JP JP23906894A patent/JPH08106974A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006080058A (en) * | 2004-08-09 | 2006-03-23 | Teitokusha Kk | Electric heater |
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