JPH0810522Y2 - Handling mechanism - Google Patents

Description

[Detailed Description of the Device] [Overview] Regarding the handling mechanism of a transfer robot, objects with different outer dimensions can be attached and detached with the same hand, minimizing the occupied area when arranging objects, and A mechanism for holding an object with a transfer robot to prevent it from falling.
The robot has a hand (1) and a pair of fingers (2).
And a claw (6), the hand is to be held by the transfer arm of the robot, holds the fingers downward and in parallel, and has an opening / closing mechanism for the fingers, and each finger has a claw at its tip. Holding, the claws project outward in the opening / closing direction, and the object has a pair of hook-shaped grooves (8) inwardly on top of each other, and when the fingers are opened / closed, the claws become grooved. It is configured so that you can enter and exit.

[Industrial applications]

 The present invention relates to a handling mechanism of a transfer robot.

In recent years, the automation of the semiconductor industry has been remarkable, and it can be said that there is no manual work in each process, but it is also desirable to automate the transportation between manufacturing equipments. INDUSTRIAL APPLICABILITY The present invention can be applied to, for example, an automatic carrier device such as a magazine that houses a lead frame or the like.

[Conventional technology]

FIGS. 3 (1) and 3 (2) are a perspective view and a front view of a handling mechanism of a conventional transfer robot.

In the figure, the conventional mechanism is configured such that fingers 32 provided on a hand 31 attached to a transfer arm of a robot sandwich and hold both side surfaces of a magazine 33, which is an object to be handled, from the outside.

 The arrow indicates the moving direction of the finger 32.

[Problems to be solved by the device]

Therefore, in the prior art, since the opening / closing stroke of the finger is limited, the external dimensions of the removable magazine are limited. Therefore, when changing the magazine size, the hand had to be changed accordingly.

Further, when a large number of magazines are placed side by side as shown in FIG. 3 (2), it is necessary to provide an interval for inserting fingers. Therefore, the occupied area becomes large when the objects are placed side by side.

Further, when the fingers are opened and closed by air drive, the force for clamping the magazine is reduced in the event of an abnormality such as a drop in air pressure or a power failure, and there is a risk of dropping the magazine.

An object of the present invention is to enable attachment / detachment of handling objects of different sizes with the same hand, to minimize the occupied area when the objects are placed side by side, and to prevent the objects from falling in the event of an abnormality.

[Means for solving the problem]

A solution to the above problem is a mechanism for gripping an object by a transfer robot, which has a hand (1), a pair of fingers (2) and a claw (6), and the hand (1)
Is held by a transfer arm of the robot, holds the fingers (2) downward and in parallel, and has an opening / closing mechanism for the fingers (2), and the pair of fingers (2) has an opening / closing stroke. It is constant and holds the pawl (6) at its tip, the pawl (6) projects outwards in the opening and closing direction of the finger (2), and the object is inwardly directed toward the inside of the upper surface thereof. It has a pair of hook-shaped grooves (8) provided at regular intervals according to the opening / closing stroke, and by opening / closing the fingers (2), the claws (6) can move in and out of the grooves (8). It is achieved by the handling mechanism configured as described above.

[Operation] In the handling mechanism of the present invention, the claws of the fingers clamp the inside of the hook-shaped groove on the top of the magazine from the inside. It is possible, and if you make the dimensions of the fingers less than the width of the magazine, you can set the magazines without leaving a gap between them, and the magazine groove and finger claws can be self-holding as hooks. , Even if the finger drive becomes abnormal and the clamping force is reduced, the magazine will not drop.

〔Example〕

1 (1) to (3) are a perspective view and a structural view of a handling mechanism of a transfer robot according to an embodiment of the present invention.

FIG. 1 (1) is a perspective view, and FIG. 1 (2), (3)
[Fig. 3] is a detailed view of a finger portion, which is a front view and a side view showing a partial cross section, respectively.

The handling mechanism of this embodiment is an example used for transporting a wafer between processes.

Wafers are stored in magazines and transported by magazine.

 The arrow in the figure indicates the moving direction of the nail.

In the figure, the mechanism of the embodiment is configured such that a pair of fingers 2 provided on the hand 1 can be opened and closed.

The finger 2 has a housing 3 and a stopper 4, the housing 3 is attached to each finger, and accommodates a spring 7 and a shaft 5 inside, and the stopper 4 prevents one end of the shaft from coming out of the housing and coming off. It is fixed to the housing by holding it at, and the spring 7 presses the shaft 5 against the stopper 4,
When the claw 6 reaches the object (magazine) 9, it serves as a relief, the claw 6 is attached to the tip of the shaft 5, and the pair of hook-shaped grooves 8 face inward at the top of the magazine 9. The claw 6 can be moved into and out of the hook-shaped groove 8 by opening and closing the finger 2.

Here, the opening / closing mechanism of the finger 2 may be the same as that of the conventional example shown in FIG. 3, and is constituted by an ordinary means using air, a cam or the like.

2 (1) to (4) are diagrams for explaining the operation of the mechanism of the embodiment.

In the figure, the arrow (1) → (4) indicates the finger clamping operation, and the arrow (4) → (1) indicates the finger unclamping operation.

In the embodiment, the present invention is used for wafer transfer, but the present invention can also be applied to other things, for example, the transfer of a magazine containing a lead frame.

As can be seen from the above description, the feature of the present invention is that even if the size of the wafer or the lead frame is changed, that is, the size of the magazine storing them is changed, the same transfer line can be used without changing the transfer line. It can be said that it can be used.

[Effect of device]

As described above, according to the present invention, handling objects having different outer dimensions can be attached / detached with the same hand,
The occupied area when the objects are lined up can be minimized to prevent the objects from falling in the event of an abnormality.

As a result, generalization and high reliability of automatic transfer by robots can be achieved.

[Brief description of drawings]

1 (1) to (3) are perspective views and structural views of a handling mechanism of a transfer robot according to an embodiment of the present invention, and FIGS. 2 (1) to (4) are operation explanatory views of the mechanism of the embodiment, 3A and 3B are a perspective view and a front view of a handling mechanism of a conventional transfer robot, respectively. In the figure, 1 is a hand, 2 is a finger, 3 is a housing, 4 is a stopper, 5
Is a shaft, 6 is a claw, 7 is a spring, 8 is a hook-shaped groove, and 9 is a handling object, which is a magazine.

Claims (1)

[Scope of utility model registration request] 1. A mechanism for gripping an object by a transfer robot, the robot comprising a hand (1), a pair of fingers (2) and a claw (6), the hand (1) being The finger (2) is held by a transfer arm, holds the finger (2) downward and in parallel, and has an opening / closing mechanism for the finger (2). The pair of fingers (2) has a constant opening / closing stroke. Further, it holds the pawl (6) at its tip, and the pawl (6) projects outward in the opening / closing direction of the finger (2), and the object is inwardly and outwardly in the opening / closing stroke within its upper surface. It has a pair of hook-shaped grooves (8) provided at a constant interval together so that the pawl (6) can be inserted into and removed from the groove (8) by opening and closing the finger (2). Characterized by being handled Structure.